Heated tools. Semiconductor equipment

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1 Heated tools Semiconductor equipment Ceramic heating elements made of silicon nitride and aluminum nitride can be manufactured as tools in various shapes. The heating function can be integrated in complex parts such as injection molding tools to obtain a direct heating of the processed material or medium. For heating and simultaneous handling of microchips, specifically adapted forms can be tooled into the ceramic heater. Advantages direct heating of the processed medium energy savings thanks to low power input and direct heat transmission Selection of plane heating elements excellent control accuracy, exact adjustment of the required temperature without overheating short heat ramp, surface power up to 150 W/cm 2 (depends on design) temperatures up to 1,000 C high strength integrated vacuum grooves or bores for the handling of microchips Point heater fast compensation of heat dissipation thanks to high power output adaptation of the heated ceramic surface to the processed parts heated surfaces from 1 mm 2 BACH Resistor Ceramics GmbH Semiconductor equipment Heated tools

2 Applications handling and heating of microchips or devices in the semiconductor industry SMD technology very precise heating of weld and braze interfaces direct heating of areas to be glued, welded or brazed for applications in the plastics and packing industry Operating conditions thermocouples can be brazed or Pt100 glued into the heater for temperature measurements adaptation to the tool support corresponding to the machine mainly suitable for the use at low voltage application in corrosive gases, plasma and other aggressive media Heating comb (length: 150 mm) Ramping behavior of a heated tip (14 x 14 mm) 10 Heating time in s T in C 450 BACH Resistor Ceramics GmbH Semiconductor equipment Heated tools

3 Hot plates Semiconductor equipment Ceramic hotplates made of silicon nitride and aluminum nitride are manufactured in various shapes and forms. The specific characteristics of the ceramic create high heat ramps, a homogeneous temperature distribution and excellent control accuracy. A cooling function can be directly integrated into the heater plate for active cooling with pressured air or other cooling media. Larger heated areas are assembled from smaller heater segments. Hotplate for the 300 mm wafer with conductive upper layer and vacuum grooves Electrical connection: brazed wires up to 550 C (temperature at the contact) brazed wires in cold zone for temperatures up to 1,000 C at the heated zone or clamped contacts if used in vacuum or inert gas Advantages direct heating of the processed material homogeneous temperature distribution energy savings thanks to low power consumption excellent control accuracy thanks to low thermal mass, very fast compensation of heat dissipation due to high output low heating-up, fast cooling if cooled actively (cooling media: pressured air, cooled air, nitrogen, etc.) high strength flatness < 1 µm also feasible on larger areas, no warping of the plane surface at cyclic temperature change operation several heating circuits in one heater feasible for the compensation of different heat dissipation grades Hotplate 1,000 C working temperature integrated temperature correspondent resistor (TCR) optional BACH Resistor Ceramics GmbH Semiconductor equipment Hot plates

4 Applications furnace technology (high vacuum braze furnaces, lab ovens, wafer heating) ceramic hotplates and integral cooler ceramic heaters for semiconductor industries press heaters up to 1,000 C SMD-technology, heating of PVD- and CVD systems, heating of solder bathes hot plates for labs and test setups direct heating of areas to be glued, welded and brazed in machines of the plastics and packaging industry application in corrosive gases, plasma and other aggressive process media direct heating of process media radiant heaters for plastic welding machines Selection of hotplates adapted to the application Feasible variants of hotplates T max ( C) Shape Dimension (mm) Voltage (V) Power (W) 550 round Ø , rectangular ,000 1,000 round with interface bridge Ø ,000 1,000 rectangular with interface bridge 25 x x ,000 Hotplate (Ø 200 mm) typical cycle graph 600 T in C 500 Excellent control accuracy Ramp rate 50 K/min power-dependent Cooling rate 2bar air pressure 30 K/min t in min 35 BACH Resistor Ceramics GmbH Semiconductor equipment Hot plates

5 Preheaters for process gases Semiconductor equipment The chemical resistance of the ceramic heating elements ensures the heating of corrosive gases, aggressive liquids and other material in the temperature range of up to 1,000 C in high vacuum as well as in air. Thanks to the high power and excellent control accuracy, processes with a high heat consumption can be run in a short time. Stick heater (length: 150 cm) Application oriented design The dimensions as well as the electrical parameters are adapted to the requirements of the application. Ceramic heating elements either can be assembled inside a tube as stick-shaped heaters or they can be arranged as flat heaters around containers and specimens for heating from the outside. For vacuum applications the heaters are thermally insulated by radiation sheets, in air they are insulated by heat insulation. Applications plasma etch technologies sputter technologies research and probe devices Heating systems for heating of process gases Preheaters for corrosive gases ceramic heating rod in a quartz tube with gas inlet vacuum connection and thermocouple Evaporators for chemical and metallic coating materials Evaporator with reagent container heated ring with 12 flat heaters, two hotplates as bottom and top heater thermocouple Inside diameter: Ø 100 mm Height: 180 mm Ring heaters for fast heating of material specimens Probe heater heated ring with 6 flat heaters and heat insulation maximum temperature: 1,000 C Inside diameter: Ø 50 mm ramp rate: 50 K/s BACH Resistor Ceramics GmbH Semiconductor equipment Preheaters

6 Radiant heaters Semiconductor equipment Selection of possible shapes Dimension: 260 x 84 mm Area radiant heaters and distinctively shaped radiators for the temperature range up to 1,000 C. Thanks to the high emission value of e > 0.95 and the wide maximum of the emission spectrum, the dark grey silicon nitride ceramic is an ideal radiant heater. The radiation power tops 15 W/cm 2 at 1,000 C. 15 mm Application oriented design 57 mm Spot radiators with a glowing tip of 15mm are used at up to 1,200 C, area heaters at temperatures up to 1,000 C. Larger heated areas are composed of smaller segments. For a homogeneous temperature distribution or required gradients, the power input will be adapted to the heat dissipation. Power connections: nickel wires brazed to the ceramic in a cold area for temperatures up to 550 C at the contact point Contact pins made of nickel or plated with gold for power supply in vacuum or inert gas operate at the connections at temperatures up to 1,000 C Small glowing nib (Heated point up to max. 1,200 C) Applications coating installations vacuum braze furnaces burning-in of varnishes drawing of glasses Additional example: zone furnace For special heating and cooling cycle processes, the radiant heaters can be arranged in zones and separately controlled to create temperature profiles. Excellent control accuracy of the heating elements ensures an exact adjustment of the required temperature in the particular segments. welding heaters research and probing installations BACH Resistor Ceramics GmbH Semiconductor equipment Radiant heaters

7 Glow igniters Glow igniters made of ceramics ensure safe and fast ignition of solid, liquid and gaseous fuels. Emissions are reduced and the ignition process runs automatically. Long lifetime ensures comfortable heating. Gas igniter with Al 2 O 3 socket Applications ignition of solid fuel, e.g. wood pellets in fire places, room stoves or central heating systems ignition of gas or oil in heating systems or special stoves heating of process gases production of hot air combustion of exhaust gases and pollutants heating and ignition of specimens in research and development pyrotechnics Advantages low mass >>> fast heat ramps >>> fast ignition excellent control characteristics at operation with temperature measurement and temperature dependent control operation without control possible, choosing the proper power class allows self-limiting of the glow igniter Operating conditions brazed Ni wires Ø 1 mm contact area resistant at temperatures up to 550 C (in air) hot zone resistant up to 1,000 C (continuous operation), above that temperature for short times high dielectric strength of the insulating ceramic the igniter can be assembled inside a tube without additional fastening the power of the igniter can be adapted to the fuel and the stove design (ignition by hot air by a fan or direct ignition) Gas igniter (in operation) resistant against corrosive gases long lifetime based on the oxidation resistance of the ceramic Please consider our operation instructions including various assembly hints! BACH Resistor Ceramics GmbH Glow igniters

8 Glow igniter from our mass production Length (mm) Width (mm) Height (mm) Glow area (mm) Voltage (V) Power (W) cold Power (W) 900 C T max ( C) 75 14,7 4, , ,4 10, 20, 30, , ,5 1, ,100 Ramp graph of glow igniter variants 1,400 T in C 4,5 x 40 x 1,8 mm 1, ,7 x 75 x 4,3 mm t in s 80 Glow igniter in mowing air 1,100 T in C v Air = 2 m/s v Air = 10 m/s Glow igniter for wood pellets P/A in W/cm BACH Resistor Ceramics GmbH Glow igniters

9 Heated rails and contour heaters Heated appliances for the machine building industry Heated rails and custom-made contour heaters for line- and point shaped heating of material in processing machines offer advantages thanks to fast heat transfer by radiation or direct contact. In comparison to the use of metal pieces, ceramic heating elements directly transfer heat to the heated surface. Heated rail (lenght: 300 mm) with integrated thermo sensor (Pt100) and holder for assembly in the machine heat transfer by direct contact Heating comb (length: 150 mm) welding of plastic parts heat transmission by direct contact The low mass and excellent heat conductivity of the ceramic heating elements ensure a fast reaction to changes in the heat extraction. They follow the controller idle-free, do not heat over the target temperature and remain in a tightly controlled temperature range at changing heat dissipation. High power for fast heat ramps can be installed. These advantages in comparison to conventional heating systems make higher cycle times and higher speed in processing machines possible. Heating element with plug which can be arranged in a plug appliance as even or spatial contour dimension: 10 x 4 mm max. temperature: 500 C Application oriented design The heating elements are adapted to the contour to be heated by assembling them to heat insulating material. Power leads are brazed to the ceramic and passed out of the system, a thermo sensor is integrated into the heating element in direct proximity to the heated surface. Ground surfaces ensure an excellent heat transfer by direct contact with the application. Non-linear area and spatial heaters are assembled by single plug heaters which are switched externally either in series or in parallel. Thus, temperature profiles over the heated contour as well as easy replacements are feasible. Applications machines and devices of the plastics processing and glueing technology Welding mirrors for filter elements diameter: Ø 80 mm max. temperature: 550 C packing machines BACH Resistor Ceramics GmbH Heated appliances Heated rails and contour heaters

10 Heated knifes Heated appliances for the machine building industry High performance electrically heated ceramics with ground cutting edge for severing and welding of fast running foils, webs and skeins Heated knife (width: 140 mm) max. temperature: 550 C Advantages Very hard silicon nitride ceramics, well known as cutting ceramic, is nearly wear free at high temperatures. The ground cutting edge will not be eroded even after long operation times. Heated knife for continuous operation Heated knife with straight cutting edge heated length up to 150 mm temperature up to 1,000 C The low mass and excellent heat conductivity of the ceramic heating elements ensure a fast reaction to changes in heat dissipation. They follow the controller idle-free, do not heat over the target temperature and remain in a tight temperature range. High power for fast heat ramps can be installed. Applications Heated knife for impulse operation Heated knife for severing of skeins smallest heated length: 5 mm temperature: 1,000 C heat ramp: 150 K/s Selection of possible shapes foil cutting machines web cutting systems packaging medical technology Rotating heated knife for continuous operation Heated cutting edge, Connections to collector ring diameter for example Ø 70 mm temperature: 550 C installed power: 500 W BACH Resistor Ceramics GmbH Heated appliances Heated knifes

11 Cartridge heaters Heated appliances for the machine building industry Cartridge heaters made of high performance ceramics have the edge on conventional cartridge heaters where tools with fast cycle times and fastly changing heat dissipation are heated. High heat conductivity and low mass of the heater body cause excellent temperature control behavior. Operating conditions brazed Ni wires Ø 1 mm contact area resistant at temperatures up to 550 C (in air), heat insulation in the contact area must be avoided hot zone resistant at temperatures up to 1,000 C (continuous operation), resistant for short times above that temperature high dielectric strength of the insulating ceramic the bore in the tool must be exactly adapted to the ceramic cartridge heater to ensure a proper heat transfer, different thermal expansion of ceramic and metal must be considered Please consider our operation instructions including various assembly hints! Advantages low mass >>> fast heat ramp high surface power up to 100 W/cm 2 excellent control characteristics resistant against corrosive gases long lifetime based on oxidation resistance of the ceramic can be ground for an exact fit ceramic cartridge heaters are only used economically where the limits of conventional metallic cartridge heaters are exceeded Cartridge heater (in operation) BACH Resistor Ceramics GmbH Heated appliances Cartridge heaters

12 Applications heating of tools and metal plates substitution of conventional metallic cartridge heaters Feasible variants of cartridge heaters Length (mm) Diameter Ø (mm) Glow area (mm) Voltage (V) Power (W) cold Power (W) 900 C T max ( C) Fig ,000 1,250 1,000 (1) , ,000 (2) , ,000 (3) , ,000 (4) ,000 (5) (4) (3) (2) (1) (5) BACH Resistor Ceramics GmbH Heated appliances Cartridge heaters

13 Press heaters Heated appliances for the machine building industry Ceramic hotplates for direct heating of material specimens with pressure of up to 2,000 MPa in the temperature range of up to 1,000 C. Dimension heated area: 100 x 100 mm Advantages The high pressure resistance of 2,000 MPa and the high Young s Modulus of 200 GPa of the silicon nitride ceramic remain stable nearly without elastic deformation within a wide temperature range up to 1,000 C. Ceramic hotplates transfer pressure in direct contact with the material. Heated press plates for material testing heated area up to 1,000 C ceramic brackets for connections resilient up to 550 C High ramp rates of up to 50 K/s can be achieved. Low thermal mass and good heat conductivity ensure a fast reaction to heat dissipation. In comparison to indirectly heated pressing tools the low heat capacity allows high cooling rates. Customer oriented design The construction of press heaters is made according to the requirements of the application. Low distances for heat transfer as well as surfaces with a homogeneous temperature distribution can thus be obtained. We use our experiences for the design of the assembly to avoid bending tensions, notch impact and large temperature gradients as well as to obtain optimal thermal conditions. Applications Selection of possible shapes Groove for thermo couple material test devices plastics processing manufacturing of glass BACH Resistor Ceramics GmbH Heated appliances Press heaters

14 Custom-made solutions and heaters for r&d Heated appliances for the machine building industry Our special manufacturing technology for ceramic heating elements allows producing custom made solutions which are exactly adapted to the application. Shapes and dimensions of the ceramic heaters are adjusted according to the application. Selection of possible shapes Advantages direct heating of the processed material energy savings thanks to low power input and direct heat transmission excellent control accuracy, exact adjustment of the required temperature without overheating short heat ramps temperatures up to 1,000 C high strength and hardness Applications heating of test setups for microchips and microelectronic devices in semiconductor industries probe setups in the metal and plastics industry direct heating of specimens in test setups application in corrosive gases, plasma and other aggressive media or direct heating of aggressive media application in lab furnaces and research installations Probe setup up to 1,000 C Heating conductor Probe setup up to 1,000 C Integrated temperature correspondent resistor (TCR) BACH Resistor Ceramics GmbH Heated appliances Custom-made solutions