Semiconductor Solutions. Your global source for industrial automation, control, and power distribution products and services

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1 Semiconductor Solutions Your global source for industrial automation, control, and power distribution products and services

2 Sharpening Your Competitive Edge Meeting Industry Needs To compete in today s rapidly changing semiconductor industry, your customers need and expect innovative technology. Schneider Electric covers the world with products and service solutions you and your customers can rely on. Whether you are building a machine for a customer in your own backyard or delivering that tool to the other side of the world, you can count on solutions from Schneider Electric to meet not only your local codes and standards, but also the standards of your international customer base and the global semiconductor marketplace. Schneider Electric is ready to meet semiconductor machinery OEMs unique needs for: b Copy Exactly - Our global manufacturing presence can assist you in the stringent Copy Exactly requirements that you face in replicating identical copies of your machines for delivery worldwide. b Power Vaccine - Your international customers are pushing the envelope with their power immunity requirements. We are the semiconductor industry leader in voltage sag mitigation and can ensure compliance with even the most stringent customer requirements. b Standards Compliance - Our products are guaranteed through third-party testing to be compliant to global electrical and safety standards as well as relevant SEMI standards. b Worldwide service and support - Our distribution and service network is unsurpassed in the semiconductor industry. Ninety-eight percent of the world s population is within 30 minutes of one of our representatives. Semiconductor Competency Center In order to bring together our best resources from the various areas of our worldwide power and control operations, Schneider Electric has established a Semiconductor Competency Center to develop customized solutions for the semiconductor industry. Our engineers pool their specialized expertise to develop cutting-edge solutions for the semiconductor industry. Custom-Engineered Panel Building The Schneider Electric Custom-Engineered Panels Group provides state-of-the-art custom electrical control assemblies for our OEM customers who prefer working with and appreciate the value added by a major controls supplier such as Schneider Electric. With our extensive product resources, technical expertise and manufacturing capabilities, Schneider Electric can build the custom control panels you need, when you need them, and at a competitive price. In addition, Schneider Electric has established a network of local panel building experts convenient to our semiconductor OEM customers. These panel builders are trained, reliable local suppliers for your panel building needs, where local service and support are highly valued. When you partner with our Semiconductor Competency Center, or one of our Authorized Panel Builders to provide you with UL/CE and SEMI standards-compliant custom electrical distribution panels, you can save money and time in your manufacturing process, allowing you to focus on core competencies. Advanced Plasma Monitoring Working hand-in-hand with IBM s Microelectronics Division for over 6 years, our Semiconductor Competency Center has developed leading-edge Advanced Process Control solutions including our ArcSmart advanced plasma monitoring system which gives users a microscopic view of power anomalies and arcing events which occur in the plasma process environment. With sampling and analysis of power signals at over 30MHz, the ArcSmart system can provide the data required to implement advanced tool- and process-control strategies saving tool manufacturers and semiconductor chip manufacturers millions of dollars per year in avoided defect-related yield loss, optimized preventative maintenance schedules, and advanced process diagnostics. Custom Designed Electrical Panel ArcSmart Advanced Plasma Monitoring System 02 Schneider Electric Semiconductor Solutions 03

3 Measuring Up to SEMI Standards SEMI F47 Voltage Sag Protection SEMI S2 Safety SEMI S2 is a broad-based standard that dictates the safety On average, wafer processing plants experience large power requirements for a semiconductor manufacturing tool. While Altivar 58 TRX Drives Preventa Safety Relays disturbances more than once a quarter and voltage sags of more than 50% in magnitude several times a month. The result: millions of dollars of lost production, hundreds of thousands of dollars of wafer damage per outage and days of non-productive tool time while equipment is recalibrated and qualified. In order to combat these power quality issues, semiconductor manufacturers require their OEMs to comply with the SEMI F47 Voltage Sag Protection standard. compliance with this standard is achieved by a thorough safety review of the entire machine by an independent third party, you can assure yourself that your design will pass the S2 audit the first time by using Schneider Electric s broad line of machine safeguarding solutions, which have been verified to meet the requirements of SEMI S2 compliance. Our Preventa family of machine safeguarding products includes the SEMI S2-approved EMO Pushbutton TeSys D-line Contactors Reactivar ESP Schneider Electric has pre-tested many of our common control components to assure our OEM customers that tools new XPSMC Safety Controller. ISO rated as required by SEMI S2, the XPSMC is the perfect brain for your sophisticated TeSys F-line Contactors Phaseo DC Power Supplies designed with our control products will satisfy your end-users requirements. In addition to products such as our Low-Voltage Ride Through Modules and Electronic Sag Protectors designed specifically to address sag issues, OEMs can select components such as contactors, relays, DC power supplies, and AC drives with confidence that your initial designs will be able to stand the SEMI test and ride through critical voltage sags. fail-to-safe equipment control system. Designed for applications requiring multiple safety functions to be performed simultaneously, the XPSMC Safety Controller enables you to meet your specific safety needs according to the requirements of your machines while saving significant rack space and cost by consolidating the function of multiple safety devices into a single safety controller device. XPSMC Safety Controller TeSys K-line Contactors Low Voltage Ride Through Module Percent of Nominal Voltage Duration of Voltage Sag in Seconds Area Included in Specification Preventa Machine Safeguarding Family Trust Schneider Electric for all of your S2 safety needs such as: b Preventa machine safeguarding including safety relays, interlock switches, light curtains, cable pull switches, and more b EMO and other pushbuttons b Multi-colored indicating banks b Off Only padlock attachments for circuit breakers 04 Schneider Electric Semiconductor Solutions 05

4 Power Protection & Distribution Miniature Circuit Protection Molded-Case Circuit Breakers From ring tongue terminals to meet Pacific Rim electrical Schneider Electric offers the widest selection of molded QO/QOB UL489 Circuit Breakers requirements to lock off only padlock attachments required by the SEMI S2 safety standard, the Square D and Merlin Gerin miniature circuit breakers available from Schneider Electric provide a wide range of options to meet the diverse needs of semiconductor OEMs. At 3/4" (18mm) width per pole through the entire amp range and 3 1/2" long, the QO/QOB is the industry s narrowest panelboard mounted UL489 breaker allowing for panel size and footprint reductions. QO/QOB miniature breakers can be plugged on or bolted on for installation in Square D load centers or load center interiors. Our QOU miniature breakers have lugs at both ends and can be DIN rail-, flush-, or surface-mounted. case breakers in the industry. While you have multiple MCCB options to choose from, our PowerPact line of molded case circuit breakers is particularly well-suited for semiconductor OEM applications. The PowerPact line features industryleading circuit breaker innovation and protection for heavy-duty commercial and industrial applications in a full range of molded case circuit breakers from 15 to 2500A, delivering the ratings, configurations, and operators for your unique application. No other name in circuit protection is more trusted for reliability and performance than our Square D brand, and our PowerPact molded case circuit breakers can become the first step in PowerPact Molded Case Circuit Breakers SEMI S2 required off only padlock attachments Multi 9 Supplementary Protectors The Multi 9 miniature supplementary protectors line from Merlin Gerin is a modular system of circuit breakers, accessories and installation equipment that makes up the most complete product offering in its class. These miniature supplementary protectors provide overcurrent protection in applications where branch circuit protection is either already provided or is not required. When branch protection is required, Schneider Electric offers a UL 489 rated version of our popular Merlin Gerin Multi 9 C60 family of DIN mountable circuit protection devices. Designed to meet global applications and code requirements, the UL Listed Multi 9 breakers are the first product to carry UL 489, IEC 947-2, and CSA C22.2 ratings as well as the CE mark. The Multi 9 breaker family features an extensive array of accessories. simplifying your operations. Through our numerous design innovations, common accessories, and standardized ratings, PowerPact circuit breakers can help to save you time and money by streamlining your selection process, speeding up installations, and providing renowned operational performance. Distribution Interiors When combined with our QO panelboard mount miniature breakers, NQOM Interiors are perfect for the specific needs of OEM customers, significantly reducing installation time and costs associated with machine power distribution. Incoming power conductors attach to main lugs, or the main breaker, distributing power down the interior by way of bus bars. Circuit breakers attach to the bus bars, providing power protection to NQOM Panelboard Interior the connected loads. As a result, all line-side wiring, which is required for individually DIN mounted breakers, is eliminated. The mounting rails have been modified to minimize mounting space, and only four fasteners are required to Multi 9 UL489 Circuit Breakers attach the interior to an enclosure back pan. All interiors accept both QO plug-on and QOB bolt-on breakers. QO Panelboard Interior 06 Schneider Electric Semiconductor Solutions 07

5 Global Presence for a Demanding Industry Schneider Electric is the leading global supplier of industrial automation, control and power distribution solutions that focus extensively on the specific needs of the Semiconductor Industry. We not only maintain a vast range of products to meet circuit protection and machine control needs, we re also committed to developing products that work in open systems and meet universal standards. Whether it s via the expertise delivered from our Semiconductor Competency Centers located in the USA and Japan or through our leadership in the establishment of such SEMI standards such as F47 Voltage Sag Protection and E54 Sensor/Acutator Bus, Schneider Electric has continually shown a commitment to bring you the competitive edge you need to stay ahead in the semiconductor industry. Please visit us at w3.squared.com/semi or contact your local sales office or distributor. Schneider Electric North American Operating Division Industrial Automation & Controls 2641 Sumner Boulevard Raleigh, NC Tel: Fax: w3.squared.com/semi 2005 Schneider Electric. All rights reserved. 0106BR0503