ABSOLUTE Temperature Control System
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- Gervais Conley
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1 Temperature Control System DESCRIPTION The ABSOLUTETM Temperature Control System provides accurate and stable temperature control of liquid source chemicals. Five different models provide temperature control through the range of C, with an accuracy of ± 0.2 C. FEATURES AND BENEFITS Modular design for easy installation Microprocessor-based control circuitry for accurate and stable temperature control Electronic and visual (sight glass) level sense (for monitoring chemical levels) Removable source cup permits safe container installation from the front of the unit Full range of safety interlocks DDC interface for remote control and monitoring Holds 1500cc quartz or 1.2 liter stainless steel containers Stainless steel versions incorporate level sense and integrated lid heater Trans-LC version eliminates all spark sources and reduces over temperature cutout interlock APPLICATIONS Temperature control for CVD source chemicals (i.e. TEOS, ZTOMCATS, LTO-410, TMB,TMPI) Temperature control for diffusion and oxide passivation source chemicals (i.e. Trans-LC, TCA, POCl3, and PBr3 and BBr3) RELATED PRODUCTS Delivery Containers 1500cc Quartz Breakseal Containers 1.2 liter Stainless Steel Containers Delivery Equipment Serves as temperature controller for the V MDOT Delivery System Refill Equipment Transfill II Automated Chemical Refill System UltraFillTM Automated Chemical Refill System ATCS with 1500cc patented breakseal quartz bubbler.
2 ABSOLUTE SYSTEM SPECIFICATIONS PERFORMANCE Temperature Control: Standard Temperature Model: 10 C* to 60 C High Temperature Model: 40 C to 90 C Trans-LC Model: 10 C to 22 C LIQUID LEVEL SENSE * Minimum cooling capability is 15 C below ambient temperature. ** Add a minimum of 78mm (3in) to depth measurements for cable connection clearance. *** Overall height = 62.5mm (2.5in) + source height. **** Not including weight of source and chemical. Temp Accuracy: ± 0.2 C of setpoint Temp Stability: ± 0.1 C Readout Resolution: 0.1 Temp Cutout (std): 70 C Temp Cutout (Trans-LC): 50 C Temp Cutout (high temp): 110 C Quartz Breakseal Container: Discrete level sensors at 100%, 50%, 25% and 15%. Backlit sight glass for visual inspection of liquid level. Stainless Steel Container: Discrete level sensors for indications at 100%, 75% and 15%. S Liquid Level Alarm: Alarm activated when liquid level reaches 15% full. Temperature Alarm: Alarm is activated when the sensed temperature is not within ± 2 C of the temperature setpoint. (± 5 C for Trans-LC unit) Alarm Indicators: All alarm conditions generate an audio alarm, flashing LED display with alarm condition, and an alarm output through the DDC interface. (The audio alarm can be silenced for 30 minute intervals.) DIMENSIONS ABSOLUTE Electronics Module: ABSOLUTE Base Unit Height: 233.7mm (9.20 in) Height: 233.7mm (9.20 in) Width: 63.5mm (2.50 in) Width: 209.6mm (8.25 in) Depth**: 260.4mm (10.25 in) Depth**: 262.9mm (10.35 in) Source elevation***: 62.5mm (2.5 in) WEIGHT ABSOLUTE Base Unit: 6.7kg**** (14.9 lbs) ABSOLUTE Electronics Module: 4.8kg (10.5 lbs) MOUNTING ABSOLUTE must be mounted on a level, low vibration surface. ABSOLUTE base unit should be secured to mounting surface to prevent it from sliding when removing and installing the source cup. ABSOLUTE electronics module can be remoted up to 4.84 meters (16 feet) away from the base unit. POWER REQUIREMENTS VAC 50/60 Hz 275VA max VAC 50/60 Hz 275VA max DDC INPUTS Analog Temperature Setpoint
3 THERMISTOR BRIDGE ERROR GAIN/BALANCE TO DDC VISUAL DISPLAY SOURCE CONTROLLER PRECISION REFERENCE SET POINT DDC MANUAL CONTROL CONTROL HEATER CONTROL LIQUID LEVEL AUDIO VISUAL DISPLAY TO DDC DDC OUTPUTS Analog Temperature Output Analog Level Output Temperature Alarm Liquid Level Alarm Any Alarm CABLE LENGTH DDC Cable 20 Conductor Shielded: 6.10 meters (20ft) 20-conductor shielded ABSOLUTE Interconnect Cable: mm (18in) standard Cable lengths up to 6.10 meters (20ft) are available upon request. SOURCE CONTAINERS The ABSOLUTE is fully compatible with Schumacher 1500cc quartz and 1.2 liter stainless steel containers. 1.2 Liter stainless steel container:* Standard Configuration (BK1200SS Series) Manual inlet/outlet valves VCR inlet/outlet connectors Level Sense Probe Integral Lid Heater Configuration (BK1200SSV) Pneumatic outlet valve 1/2" male VCR outlet connector Level sense probe TransFill Host Container (BK1200SSR) Designed for automatic refill Pneumatic valves, VCR connectors Continuous and discrete level sense probes included 1500cc Quartz Containers: D-Series Quartz Container (BK3D1) Teflon inlet/outlet valves 1/4" inlet and 3/8" outlet connectors (for teflon tubing) R-Series Quartz Container (BK3R1) Designed for Automatic Refill Pneumatic Teflon Control Valves Continuous and discrete level sense probes included S-Series Quartz Container (BK3S1, BK3S2) SS VCR adaptors * Refer to 1.2 liter Stainless Steel Product Data Sheet for additional information on specific configurations.
4 PRODUCT PART SOURCE DESCRIPTION NUMBER RANGE CONTAINER ABSOLUTE Std ATCS15 10 to 60 C 1500cc Quartz Temp (BK3D1, BK3S1/2) Quartz ABSOLUTE Std Temp ATCS15-SS 10 to 60 C 1.2 liter SS SS System (BK1200SS Series) ABSOLUTE High Temp ATCS15HT 40 to 90 C 1500cc Quartz Quartz System (BK3D1, BK3S1/2) ABSOLUTE High Temp ATCS15HT-SS 40 to 90 C 1.2 liter SS SS System (BK1200SSV Series) ABSOLUTE Trans-LC ATCS15TLC 10 to 22 C 1500cc Quartz Quartz System (BK3D1) APPLICATION SUPPORT Schumacher maintains an active research program aimed at developing improved source chemicals, processes and delivery equipment. Our technical staff is available to assist you with process problems and safety concerns. For more information please call or ORDERING INFORMATION Please contact your Schumacher sales representative for ordering information or call Schumacher at or
5 For More Information If you would like additional information or technical assistance in preparing specific formulations, write or call Air Products and Chemicals, Inc. at the following location. Schumacher 1969 Palomar Oaks Way Carlsbad, CA Tel: (800) tell me more Air Products and Chemicals, Inc., US-May04
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