Sensor Systems. Impact of Projects based on the Austrian EBS priority. Dr. Martin Kraft CTR AG.

Transcription

1 Sensor Systems Impact of Projects based on the Austrian EBS priority Dr. Martin Kraft CTR AG

2 Sensors A Key Element in Smart Systems Sensor System Environment Sensor(s) Interfaces Adaptive / cognitive Data Processing Secure Communications The (Smart) System Sensor Systems research deals with Smart Component Co-integration creating Sensors Smart Integration of Sensors into Systems 2

3 Impact through Smart Sensor Systems - The Two Philosophies Ubiquitous Sensing mass market high volume low(er) prices high integration density flexibility through data processing and fusion mostly large enterprises Speciality Sensors niche markets low(er) volumes high(er) prices moderate integration density flexibility through sensor functionality often SMEs Present project support embraces both philosophies, creating maximum impact 3

4 Austrian Smart Sensor Projects IoSense Flexible FE/BE Sensor Pilot Line for the Internet of Everything Key objective: Establish the base for increased manufacturing capacity for discrete and integrated sensors and sensor system solutions in Europe, including design development and test Austrian Innovation: Ultra-compact, integrated ToF sensor Austrian Innovation: Integrated micro-hotplate / gas sensor 4

5 Austrian Smart Sensor Projects Silense (ultra)sound Interfaces and Low Energy integrated SEnsors Key objective: Acoustic technologies and concepts to activate and control devices by gesture use of common sensor/actuator platform(s) in different domains: wearables, automotive and smart homes Lower cost and energy consumption of micro-acoustic transducers at improved performance directivity, bandwidth, dynamic & frequency range, sensitivity & efficiency Dedicated packaging and assembly technology e.g. heterogeneously and monolithically integrated arrays of micro-acoustic transducers Smart algorithms for acoustic data communication and sensing Co-integration of voice/speech, digital sound modulation and gesture control in the same transducer(s) 5

6 Austrian Smart Sensor Projects RobustSENSE Reliable, secure and trustable sensors for automated driving Key objective: creating a robust and reliable platform for automated driving, addressing the problem that today s driver assistance systems stop working in harsh environmental conditions, like rain and fog Reliable for safe operation under all driving conditions Improved operability by self-diagnosis, adaptation and robustness Trustable on every level of assistance and automated driving systems 6

7 Austrian Smart Sensor Projects MSP MultiSensor Platform for Smart Building Management Key objective: Combination of various sensors for air quality monitoring on one common platform Unique 3D-integrated multi-sensor system comprising 57 sensor devices gas sensors for CO, CO 2, O 3 and VOCs and NO 2, based on ultrathin films, nanowires and nanoparticles and a unique CMOS micro-hotplate array for 16 gas sensors on a single chip; graphene oxide humidity sensor; VIS, IR and UV(A/B) light sensors 7

8 Austrian Smart Sensor Projects High-Accuracy Nanoparticle Counting Sensor Reliable sensors for exhaust analysis Key objective: Reliable sensor system for nm-sized particles in gases, e.g. such emitted by internal combustion engines Integrative System Modelling and Co- Design enabling a unique all-in-one simulation of the actual behaviour of the entire sensor Improved system characteristics unparalleled precise control of the sensor sensitivity, enhanced system stability and controllability, significantly reduced warm-up times, 3-times higher sensing range manufacturing a key sensor in Austria rather than importing it from outside the EU 8

9 R (kohm) R (kohm) Austrian Smart Sensor Projects Magnetic speed sensor Innovative technology by magnetic design Key objective: Next-generation XMR sensors (GMR, TMR) for automotive and other applications Hysteresis-free magnetic sensing 10 9,8 9,6 9,4 9, field (mt) Maximally reduced noise Disruptive technology by innovative magnetic topology design to be adopted for the next generation of automotive XMR sensors, aiming at an ~ 1 bn market 4,35 4,30 4,25 4,20 4, field (mt) linearised XMR sensor technology 9

10 Austrian Smart Sensor Research Microsystems TU Vienna Institute of Sensor and Actuator Systems R&D CMOS Cleanroom PiezoMEMS Devices SiC MEMS Devices High Q piezoelectric resonators Surface Micromachining Robust poly-sic membranes on 4H-SiC substrate MEMS Materials Piezoelectric Al(X)N thin films Silicon carbide (SiC) for MEMS IA 11 3 Na II A III B IV B VB VI B 4H-SiC Bragg mirror Acoustic piezoelectric MEMS by porosification into the bulk VII B 12 Magnesium Mg K Ca Rb Sr Cs Ba Fr Ra Rf Db Sg Bh 21 Scandium Sc 22 Ti Yttrium Zirconium Y Zr Vanadium Chromium V Cr 25 Mn Nb Mo Tc Hafnium Tantalum Hf Ta W Re 10

11 Austrian Smart Sensor Research Microsensors JKU Linz Institute for Microelectronics & Microsensors Integrated mid-ir absorption sensing in Si-MEMS technology utilizing integrated waveguides, resonators & photonic crystals Pulsed IR-emitter Sample Fluid property sensors/rheometers x z y Aperture pyroel. IR-detector Microfluidic components (pumps, particle sorters) Surface embedded sensors 11

12 Austrian Smart Sensor Research Environmental Sensing TU Graz Institute for Electronic Sensor Systems Sensors for air pollution and climate forcers Robust and autonomous sensor systems for gases and particulate matter, with emphasis on high temporal and spatial resolution (4D sensing), using a range of (complementary) methods photoacoustics, photonics, diffusion charging, ultrasonics, luminescence, spectroscopy LIDAR, remote sensing approaches or distributed sensor networks, using state-of-theart IoT developments, including as energy harvesting Sensor Electronics With focus on development and optimisation of sensor interface electronics, and on measuring physical quantities under harsh environmental conditions and demanding safety aspects, e.g. in advanced automotive and industrial applications 12

13 Future Smart Sensor Systems Research - ECS SRA Present: MASRIA Smart mobility Smart health Smart energy Smart production Smart society Design technology Cyber-Physical Systems Smart Systems Integration Semiconductor Manufacturing, Technology, Equipment and Materials Future: ECS SRA (planned) Transportation Health and Well-Being Energy Digital Industry Digital Life From Systems to Components: Architecture, Design Methods and Tools Connectivity and Interoperability Dependability and Trustability: Safety, Privacy and Security Computing and storage Process Technology, Equipment, Materials and Semiconductor Manufacturing 13