Silicon Sensors S. MIDDELHOEK S.A. AUDET

Transcription

1 Silicon Sensors S. MIDDELHOEK S.A. AUDET Department of Electrical Engineering Delft University of Technology Delft, The Netherlands ACADEMIC PRESS Harcourt Brace Jovanovich, Publishers London San Diego New York Berkeley Boston Sydney Tokyo Toronto

2 Contents Preface v 1 Introduction 1.1 Information and information-processing systems Measurement and control systems Transducers Form of signal-carrying energy Signal conversion in transducers Terminology in the transducer field Self-generating and modulating transducers Two- and three-dimensional representation of input and output transducers Signal conversion inside modifiers Transducer technologies Introduction Non-silicon generic technologies Silicon Future outlook on measurement and control systems Traditional products Present innovative markets Future innovative markets 33 References 34 2 Silicon Sensors for Radiant Signals Introduction Electromagnetic radiation 35 VII

3 viii Contents Nuclear-particle radiation Basic physical principles Characterization of electromagnetic and nuclear-particle energy and their interactions with substances Interactions of electromagnetic radiation with silicon Interactions of nuclear particles with silicon Applications for visible light Photoconductors Photodiodes Avalanche photodiodes P-I-N photodiodes Quadrant photodiodes Position-sensitive detectors One- and two-dimensional photodiode arrays Phototransistors Charge-transfer devices Applications for nuclear-particle radiation Nuclear-particle radiation detectors Silicon microstrip detector Silicon drift chamber Applications for x- and gamma-rays 97 References 98 3 Silicon Sensors for Mechanical Signals Introduction Basic physical principles The piezoresistive effect Other stress-sensitive silicon devices Piezoelectricity Capacitive pressure sensors Mechanics of cantilevers and diaphragms Surface acoustic wave transducers Applications Silicon strain gauges Diffused diaphragm pressure sensors Accclcrometers Silicon tactile sensors for robot applications 148 References 149

4 Contents ix 4 Silicon Sensors for Thermal Signais Introduction Basic physical principles Thermoelectric effects Thermoresistors Silicon diodes and transistors as thermal sensors Applications of silicon thermal sensors Flow sensors Vacuum sensors Infrared sensors Integrated PTAT temperature sensors 195 References Silicon Sensors for Magnetic Signals Introduction Basic physical principles Hall effect and magnetoresistivity Silicon Hall plates Magnctodiodcs Magnetotransistors Carrier-domain magnetic-field sensors Applications of magnetic-field sensors Magnetic-field measurements Proximity and angle detectors Hall multipliers 244 References Silicon Sensors for Chemical Signals Introduction Basic physical principles Chemo-resistors and chemo-capacitors Chemdiodes MOSFET-based chemical sensors 259

5 x Contents Humidity sensors Integrated oxygen sensors Applications Biosensors Silicon-wafer gas Chromatograph 283 References Sensor Technology Silicon-planar technology Introduction Device technologies Basic silicon planar processing steps Special requirements for silicon-sensor processing Compatible technologies Thin-film deposition ZnO thin-film deposition Thick-film deposition Magnetic-film deposition Micromachining technologies Introduction Etching solutions and gases Etching procedures and techniques Micromachined structures Devices fabricated with micromachining technologies 322 References Sensor Interfaces, Smart Sensors and Bus Systems Introduction Signal conditioning Noise Offset Cross-sensitivities Bridge circuits Signal converters Amplitude analog signals Time analog signals Binary encoded signals 352

6 Contents xi 8.4 Digital signal processing Advantages and disadvantages of integrated smart sensors Circuit partitioning Multi-sensor arrays Bus systems 358 References 359 Appendices 361 A Physical and chemical effects in solid-state materials 361 В Sensor characteristics 365 Subject Index 369