A Chiller is equipment to control temperature of customers heating sources. Application Examples

Transcription

1 Control Equipment What s a Chiller? A Chiller is equipment to control temperature of customers heating sources. Chillers control, such as water, and circulate the to customers machine using a pump by controlling the output from a cooling source such as a compressor, or a heating source such as a heater. That s why this equipment can be also called a circulator. Heating source Circulating tank Controller Cooling source Circulating pump Chiller (circulator) sensor Customer s heating source a chamber electrode Laser machining UV curing device (printing, painting, bonding and sealing) X-ray (digital) instrument Cooling of laser irradiated part Here are some of the places chillers are used!! Application Examples Cooling of UV lamp Semiconductors Machine tools Food products Measuring devices Physical and chemical/analytical equipment Medical/Pharmaceutical etc. X-ray tube and X-ray light sensing part X-ray tube ic microscope Laser marker Ultra sonic wave inspection machine control of electron-beam irradiated part Cooling of laser irradiated part ultrasonic wave laser part Light sensing part Atomizing device (food and cosmetics) Linear motor Packaging line (sealing of film and paper package) moving Cooling of work pieces for bonding Cooling water sample and device coil Coil Workpiece Cooling of die paint material Cooling of vacuum pump Circulating Cooling water Vacuum pump Shrink fitting machine Gas cylinder cabinet Concentrating equipment Cooling of work pieces control inside cabinet concentration Reagent cooling equipment reagent Cleaning tank cleaning tank chamber electrode CH1 CH2 Dual 1240

2 Chiller Best Pneumatics, HRS,, D 7 Three types of cooling and heating methods (refrigerated, water-cooled, ) can be selected for a wide range of applications. 1 Refrigerated Refrigeration cycle Expansion valve Evaporator Condenser () Lowtemperature refrigerant Facility water () Hightemperature Fan refrigerant gas Compressor Cooling capacity from 1 kw to 15 kw. For a wide range of applications Thermo-cooler/ Circulating Generates low temperatures using a cycle. This equipment cools the circulating by performing heat exchange with low-temperature refrigerant gas, using a built-in circuit that circulates refrigerant. Large-scale heat exchange can be handled compared with the Peltier type. There are two types of heating sources: high-temperature refrigerant gas, which is generated from the circuit, and an electric heater. Both air-cooled and water-cooled types are available, depending on the condenser s cooling method. Economy type Makes cooling water easily available, anytime, anywhere. As a replacement for a cooling tower Pump capacity: Max. 62 Compact type HRS Installation close to a wall is possible on both sides. Ventilation 615 mm Ventilation Installing extra cooling towers can be troublesome. The series (air-cooled ) can be moved easily to wherever you need it, when you need it. Cooling water is supplied from the attached hose. High-performance type /D stability ±0.1 C, temperature range from 20 C to + C. Full array of features and equipment. A double inverter type is also available, saving energy more effectively through use of a DC inverter compressor and an inverter pump. With casters (Option) D 377 mm 500 mm Convenient functions Timer operation function Low tank level detecting function Power failure auto-restart function Anti-freezing operation function Dual, D series can control temperature for two systems separately by one chiller. Energy-saving thanks to reduced wiring, piping and labor, and double inverter type. chamber electrode CH1 CH2 Dual Space-saving m 2 Self diagnosis function and check display 31 types of alarm codes Footprint reduced by 23% units D020 1 unit m 2 reduction 0.66 m HRS D HRW HEC HEA IDH

3 Control Equipment Chiller HRW, HEC 2 For temperature control in room temperature area range setting: 20 C to C Refrigerant-free and energy-saving type using no compressor. High-performance type HRW Energysaving In-plant cooling water circulation facility such as cooling tower, etc. With no compressor, power consumption is drastically reduced. Reduction in power consumption is even greater with inverter type: 0.5 kwh/h. Suitable for temperature control in room temperature areas not requiring compressor. Reduction in facility water volume (1.2 ) thanks to direct heat exchange with circulating. equivalent to series. Heat exchanger for cooling the circulating Circulating This equipment cools the circulating by directly exchanging it with the cooling water in the plant. This can be used at room temperature or higher, and also used when there is a cooling water circulation facility. Large-scale heat exchange can be performed using less energy, and the device has a compact body since a compressor is not required. An electric heater is used for heating. 3 Generates little vibration, and is refrigerant-free and environmentally friendly. Can control the temperature just in front of the heat source using the external temperature sensor. High-precision type HEC For high-precision temperature control stability: ±0.01 C to 0.03 C Thermo-con Cooling Heat suction (cooling) Circulating flow N P hole flow Facility water Heat generation (heating) Current DC power supply No facility water equipment Frequent piping changes Can install the unit easily without facility water equipment. Can reduce the piping installation labor since facility water piping is not required. Need to avoid effects of ambient temperature. Want to reduce installation space. Since the unit is water-cooled, the ambient temperature will have little effect. Can reduce the space since the unit is compact. Heating Heat generation (heating) Circulating flow N P hole flow Thermo-con Thermo-con Heat source Facility water Facility water Heat suction (cooling) Current DC power supply Fan Peltier device Peltier device A Peltier device is a plate type element, inside which P-type semiconductors and N-type semiconductors are located alternately. Therefore, changing the direction of the current supplied to the Peltier device can achieve heating and cooling operation. can be controlled very precisely because this method has a fast response and can switch quickly. 1242

4 Best Pneumatics 7 Thermoelectric Bath Accurately controls the temperature of liquid in the bath. stability: ±0.01 C distribution in the bath: ±0.02 C Controller Peltier device Circulating Water, fluorinated liquid GALDEN FluorinertTM Applications Chemicals for MOCVD Diffusion gas Various samples, materials and parts Chemical liquids and liquids with high viscosity Facility water Facility water outlet inlet Constant temperature liquid tank This equipment precisely controls the temperature of the in the constant temperature tank. Customers can control the temperature by placing a container in the tank. Application Examples Semiconductor Various tests Physical and chemical analysis Various chemical processes Evaporation of chemical liquids for MOCVD, temperature diffusion gas Thermal test with immersion Chemical Thermo-con Chemical Thermo-con various samples, materials and parts Fluororesin heat exchanger allows direct temperature control for chemical liquids!! Industry-leading withstand pressure 0.35 MPa!! controller Peltier device (thermo-module) Fluororesin heat exchanger Indirect temperature chemical liquids and liquids with high viscosity Type of circulating Deionized water Hydrofluoric acid Ammonia hydrogen peroxide solution, etc. HRS D HRW HEC HEA IDH THERMO-COM AT SEL RET POWER ON Chemical tank or chemical bath OFF Pump Facility water 1243

5 Control Equipment Selection Guide Series range Economy-type chiller Thermo-cooler Series (3-phase power supply) With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation. For a wide range of applications such as laser machine tool, analytical equipment, LCD manufacturing equipment, mold temperature control, etc. 5 to 35 C /Compact type Series HRS Fits into the space under a laboratory table with a compact design. 615 H x 377 W x 500 D 40 kg Available for single-phase 100/115 V, 200 to 230 V UL standards, CE marking 5 to 40 C Basic-type chiller Series HRS-X017 Basic type with the function and performance kept at the minimally required level. Fits neatly under a laboratory work bench. 615 H x 377 W x 435 D 31 kg 10 to 30 C Chiller (Circulating Fluid Controller) Refrigerated Series Series (Built-in inverter) Dual Series D (Built-in inverter) Series HRW () Series HRW () (Built-in inverter) Suitable for semiconductor processing equipment with a wide variety of features such as high temperature stability, wide temperature range, failure diagnosis, external communication, etc. Conforming to various safety standards Conforming to UL, standards, CE marking In addition to advanced series, energy-saving is achieved through use of a DC inverter compressor. A single unit covers a wide temperature range and has a large cooling capacity. Can respond to change of process conditions flexibly, which is suitable for semiconductor equipment with a short innovation cycle. Conforming to UL, standards, CE marking for two systems can be controlled separately by one chiller. More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump. Conforming to standards, CE marking Direct heat exchanger for in-plant circulating Can control the temperature over a wide range since a compressor is not required. Suitable for semiconductor processing equipment with a wide variety of features such as high temperature stability, wide temperature range, failure diagnosis, external communication, etc. Conforming to UL, standards, CE marking 20 to 40 C 20 to C 20 to C 20 to C to C 20 to C Bath High-precision chiller Thermo-con Series HEC High-precision bath Thermoelectric Bath Series High-precision temperature controller with a Peltier device suitable for applications that require high-precision temperature control. Highly-reliable simple construction Easy installation in equipment with a compact, low-vibration body Compatible with a wide range of power supply voltage Conforming to UL standards, CE marking High-precision temperature control bath with a Peltier device Compact and low noise Minimal up-down temperature distribution with a unique agitation method 10 to 60 C 15 to 60 C Control System for Chemical Liquids Fluororesin temperature control system for chemical liquids Chemical Thermo-con Series Heat exchanger for direct temperature control with a Peltier device Compatible with a wide range of chemical liquids by use of a fluororesin heat exchanger Conforming to standards, CE marking 10 to 60 C 1244

6 Best Pneumatics Selection Guide 7 : Standard : Selectable by model or option Max. cooling capacity Cooling method Pump stability capacity Applicable Automatic water fill function Circulating recovery PID control ON/OFF control Inverter-controlled compressor Learning control Error diagnostic function Pump inverter RS-232C RS-485 Analog I/O DeviceNet Flow sensor/switch With earth leakage breaker inlet With heater With external switch Stainless steel wetted parts for circulating For deionized water piping High-lift pump With DI control kit With water leakage sensor High-temperature environment specs. Page 15 kw, ±1.0 C 5 to 62 P kw, ±0.1 C 5 to 40 P kw ±2 C 4 to 16 P kw ±0.1 C 6 to 40 Fluorinated, P.1324 P.1327 P.1330 Fluorinated, 10 kw ±0.1 C 10 to 40 P kw x 2 ±0.1 C 10 to 40 Fluorinated, P.1347 HRS 30 kw Without compressor ±0.3 C 10 to 30 Fluorinated, P.1360 P.1362 P.1364 D HRW HEC 600 W air-cooled ±0.01 C 1 to 10 Clear water P.1386 HEA 1.2 kw water-cooled ±0.01 C 3 to 23 Fluorinated P.1398 IDH 140 W water-cooled ±0.01 C Fluorinated P W water-cooled ±0.1 C Chemical liquids P a