ALS5000 Series. Mechanical Bearing, Linear Motor Stage. Rugged construction. Hard-coated tabletop and waycovers

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1 Linear Stages Mechanical Bearing, Linear Motor Stage Rugged construction Hardcoated tabletop and waycovers Fully integrated cable management system Highaccuracy, noncontact linear encoder Sealed design with optional air purge The ALS5000 was designed to meet the needs of the most demanding applications. A rigid base, fullysealed metal waycovers, and high power linear motor make the ALS5000 the stage of choice in laser machining, ceramic scribing, or any other application requiring high accuracy in a production environment. Rugged Construction The greatest attention to detail is evident in all aspects of the ALS5000 design. The tabletop utilizes stainless steel Helicoil TM inserts to protect mounting holes against thread wear. An integral metal waycover is provided to protect the stage from hot sparks or debris. Both the metal waycover and tabletop are treated with a hardcoat (Rockwell 62 hardness) that is scratchresistant and provides outstanding protection in the harshest applications. To further provide the stage with protection from a caustic environment, the ALS5000 utilizes Aerotech s unique tensioned sidestrap system. The straps are in a vertical orientation that prevents debris from accumulating on top of them, and are tensioned to create a tight seal. An optional airpurge is available that allows air to be forced into the body of the stage. This creates a positive pressure that prevents any particulate, no matter how fine, from entering the stage. High Performance The base of the ALS5000 is machined from special aluminum alloy tooling plate to provide high stiffness and longterm stability. Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life, even with heavy offset loads. Noncontact linear encoders with submicron repeatabilities are standard on all ALS5000 series stages. Optional HALAR and HALSF factory calibration options are available that further increase the standard accuracy, straightness, and flatness specifications to even finer precision. Linear Motor Drive Aerotech s highpower, cogfree, BLM series linear motor drives the ALS5000 to a maximum speed of 2 m/s and acceleration of 3 g. This zero cogging design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all of Aerotech s ALS series linear motor stages, the linear motor has zero backlash, no windup, zero friction, and outstanding system responsiveness. To aid in system assembly, the base mounting holes are located outboard of the stage. Therefore, the stage can be mounted without removing the hardcover

2 SPECIFICATIONS Basic Model ALS50010 ALS50020 ALS50030 ALS50045 Total Travel 100 mm (4 in) 200 mm (8 in) 300 mm (12 in) 450 mm (18 in) Drive System Linear Brushless Servomotor (BLM264A) Bus Voltage Up to 320 VDC Continuous A pk Up to 5.10 A Current (1) A rms Up to 3.61 A Feedback Noncontact Linear Encoder Resolution µm 0.2 µm (0.04 µin 8 µin) µm 1.0 µm (0.2 µin 40 µin) Maximum Travel Speed (2) 2 m/s (80 in/s) Maximum Linear Acceleration 3 g (30 m/s 2 ) (1152 in/s 2 ) (No Load) Maximum Load (3) Horizontal kg (297.6 lb) Side 45.0 kg (99.2 lb) Accuracy Repeatability Straightness and Flatness Differential ±1.0 µm (± 40 µin) ±5.0 µm (± 200 µin) ±1.0 µm (±40 µin) ±4.0 µm (±160 µin) ±8.0 µm (±320 µin) ±12.0 µm (±480 µin) ±18.0 µm (±720 µin) HALSF 1 µm/25 mm (40 µin/in) 2 µm/25 mm (80 µin/in) Maximum HALSF ±1.0 µm (±40 µin) ±1.5 µm (±60 µin) ±2.5 µm (±100 µin) Deviation ±1 µm (±40 µin) ±2.0 µm (±80 µin) ±3.0 µm (±120 µin) ±4.0 µm (±160 µin) Pitch and Yaw 6 arc sec 8 arc sec 10 arc sec 14 arc sec Linear Stages Nominal Stage Weight 35.0 kg (77.2 lb) 40.0 kg (88.2 lb) 45.0 kg (99.2 lb) 52.0 kg (114.6 lb) Moving Mass Construction Stage Table and Waycover kg (26.92 lb) Aluminum Body; Textured Epoxy (PolaneT) Pebble Grey Paint Hard Coating (62 Rockwell Hardness Teflon Impregnated) Notes: 1. Current values based on high performance (P) magnet track. 2. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution. 3. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements. 4. Available with Aerotech controllers. 5. Specifications are for singleaxis systems, measured 25 mm above the tabletop. Performance of multiaxis systems is payload and workpoint dependent. Consult factory for multiaxis or nonstandard applications

3 SPECIFICATIONS Linear Stages Basic Model ALS50060 ALS50075 ALS50090 ALS50100 Total Travel 600 mm (24 in) 750 mm (30 in) 900 mm (36 in) 1000 mm (40 in) Drive System Linear Brushless Servomotor (BLM264A) Bus Voltage Up to 320 VDC Continuous A pk Up to 5.10 A Current (1) A rms Up to 3.61 A Feedback Noncontact Linear Encoder Resolution µm 0.2 µm (0.04 µin 8 µin) µm 1.0 µm (0.2 µin 40 µin) Maximum Travel Speed (2) 2 m/s (80 in/s) Maximum Linear Acceleration 3 g (30 m/s 2 ) (1152 in/s 2 ) (No Load) Maximum Load (3) Horizontal kg (297.6 lb) Side 45.0 kg (99.2 lb) Accuracy Repeatability Straightness and Flatness Differential ±1.0 µm (± 40 µin) ±5.0 µm (± 200 µin) ±1.0 µm (±40 µin) ±24.0 µm (±960 µin) ±30.0 µm (±1200 µin) ±36.0 µm (±1440 µin) ±40.0 µm (±1600 µin) HALSF 1 µm/25 mm (40 µin/in) 2 µm/25 mm (80 µin/in) Maximum HALSF ±3.0 µm (±120 µin) ±3.5 µm (±140 µin) ±4.5 µm (±180 µin) ± 5.0 µm (± 200 µin) Deviation ±6.0 µm (±240 µin) ±7.0 µm (±280 µin) ±8.0 µm (±320 µin) ± 9.0 µm (± 360 µin) Pitch and Yaw 17 arc sec 20 arc sec 25 arc sec 25 arc sec Nominal Stage Weight 60.0 kg (132.3 lb) 68.0 kg (149.9 lb) 76.0 kg (167.6 lb) 81.3 kg (179.1 lb) Moving Mass kg (26.92 lb) Construction Stage Table and Waycover Aluminum Body; Textured Epoxy (PolaneT) Pebble Grey Paint Hard Coating (62 Rockwell Hardness Teflon Impregnated) Notes: 1. Current values based on high performance (P) magnet track. 2. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution. 3. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements. 4. Available with Aerotech controllers. 5. Specifications are for singleaxis systems, measured 25 mm above the tabletop. Performance of multiaxis systems is payload and workpoint dependent. Consult factory for multiaxis or nonstandard applications

4 SPECIFICATIONS Linear Stages Acceleration vs. Mass (ALS5000 with BLM264A motor) L VC and L SC Cantilevered Load Capability (ALS5000) ALS5000 with dual carriage for advanced pick, place, and inspect station 195

5 DIMENSIONS Linear Stages [10.00] Typ [9.00] [7.00] Typ [6.25] 25.0 [1.00] Typ. M8 x 1.25 [3/816] Thd 4 Holes [11.00] Sq [2.00] [5.50] [8.00] Typ. M6 x 1.00 [1/420] Thd 48 Holes A [4.75] B C D E Ø11.1 [0.44] Thru Stage Mounting Holes [10.00] [13.66] 12.7 [0.50] Model Name Travel Dimensions Millimeters [Inches] A B C D E ALS [4.00] [15.00] [10.00] [19.00] ALS [8.00] [19.00] [10.00] [18.00] [23.00] ALS [12.00] [23.00] [10.00] [20.00] [27.00] ALS [18.00] [29.00] [10.00] [20.00] [33.00] ALS [24.00] [35.00] [10.00] [20.00] [39.00] ALS [30.00] [41.00] [10.00] [20.00] [36.00] [45.00] ALS50090 ALS [36.00] [47.00] [10.00] [20.00] [42.00] [51.00] [40.00] [51.00] [10.00] [20.00] [46.00] [55.00] 196

6 ORDERING INFORMATION Ordering Example ALS M 10S 45X5 NC S eries Travel (mm) Mounting and Grid Pattern M U Motor and Magnet Track 10S 10P Linear Encoder nnas nnx5 nnas Limits NC NO Options Stage Construction XYCMS /VAC3 /VAC6 /STEEL Linear Stages Linear Motor Stage ALS mm (4 in) travel stage with linear motor and limits ALS mm (8 in) travel stage with linear motor and limits ALS mm (12 in) travel stage with linear motor and limits ALS mm (18 in) travel stage with linear motor and limits ALS mm (24 in) travel stage with linear motor and limits ALS mm (30 in) travel stage with linear motor and limits ALS mm (36 in) travel stage with linear motor and limits ALS mm (40 in) travel stage with linear motor and limits Mounting and Grid Pattern M Metric dimension mounting pattern and holes U English dimension mounting pattern and holes Motor and Magnet Track 10S Brushless linear motor with standard magnet track (BLM264A) 10P Brushless linear motor with high performance magnet track (BLM264A) Linear Encoders 10AS Linear encoder for ALS50010; amplified sine output 1 Vpp (20 µm signal period); requires signal 20AS Linear encoder for ALS50020; amplified sine output 1 Vpp (20 µm signal period); requires signal 30AS Linear encoder for ALS50030; amplified sine output 1 Vpp (20 µm signal period); requires signal 45AS Linear encoder for ALS50045; amplified sine output 1 Vpp (20 µm signal period); requires signal 60AS Linear encoder for ALS50060; amplified sine output 1 Vpp (20 µm signal period); requires signal 75AS Linear encoder for ALS50075; amplified sine output 1 Vpp (20 µm signal period); requires signal 90AS Linear encoder for ALS50090; amplified sine output 1 Vpp (20 µm signal period); requires signal 100AS Linear encoder for ALS50100; amplified sine output 1 Vpp (20 µm signal period); requires signal 10X5 20X5 30X5 45X5 60X5 75X5 90X5 100X5 Linear encoder for ALS50010; 1.0 micron line driver output Linear encoder for ALS50020; 1.0 micron line driver output Linear encoder for ALS50030; 1.0 micron line driver output Linear encoder for ALS50045; 1.0 micron line driver output Linear encoder for ALS50060; 1.0 micron line driver output Linear encoder for ALS50075; 1.0 micron line driver output Linear encoder for ALS50090; 1.0 micron line driver output Linear encoder for ALS50100; 1.0 micron line driver output 197

7 Ordering INFORMATION Linear Stages High Accuracy Linear Encoders 10AS Highaccuracy linear encoder for ALS50010; amplified sine output 1 Vpp (4 µm signal period); requires signal 20AS Highaccuracy linear encoder for ALS50020; amplified sine output 1 Vpp (4 µm signal period); requires signal 30AS Highaccuracy linear encoder for ALS50030; amplified sine output 1 Vpp (4 µm signal period); requires signal 45AS Highaccuracy linear encoder for ALS50045; amplified sine output 1 Vpp (4 µm signal period); requires signal 60AS Highaccuracy linear encoder for ALS50060; amplified sine output 1 Vpp (4 µm signal period); requires signal 75AS Highaccuracy linear encoder for ALS50075; amplified sine output 1 Vpp (4 µm signal period); requires signal 90AS Highaccuracy linear encoder for ALS50090; amplified sine output 1 Vpp (4 µm signal period); requires signal 100AS Highaccuracy linear encoder for ALS50100; amplified sine output 1 Vpp (4 µm signal period); requires signal Note: Integral signal s available with A3200 amplifier products. Limits NC NO Options XYCMS Normallyclosed end of travel limit switches (standard) Normallyopen end of travel limit switches Cable management system for XY assembly; order with Xaxis only Stage Construction Options (Consult Factory) /VAC3 Vacuum preparation of stage to 10 3 torr /VAC6 Vacuum preparation of stage to 10 6 torr /STEEL All steel construction Accessories (to be ordered as separate line item) ALIGNMENTNPA Nonprecision XY assembly ALIGNMENTPA10 XY assembly; 10 arc sec orthogonal ALIGNMENTPA5 XY assembly; 5 arc sec orthogonal HALAR Highaccuracy system linear error correction for accuracy and repeatability HALSF Highaccuracy system improved straightness and flatness 198