Microtechnologies for the development of sensors N. Chaillet. Session Smart Sensor Systems, designed to drive system reliability

Transcription

1 Microtechnologies for the development of sensors N. Chaillet Session Smart Sensor Systems, designed to drive system reliability 1

2 Overview of FEMTO- ST Ins=tute DEVELOP MICRO AND NANO TECHNOLOGIES, INCREASE THE DENSITY OF FUNCTIONS, INTEGRATE INTELLIGENCE, FOR THE ENGINEERING OF COMPONENTS AND SYSTEMS WITH OPTIMIZED PERFORMANCES Created in staff: Int. Journals & 300 Int. Conf. / year A wide scien*fic spectrum covering Engineering Sciences, Informa*on & Communica*on Sciences, Physics From single molecules to systems, from nm to m A mul* & interdisciplinary voca*on Transverse research projects (e.g. Micro atomic clock, smart systems, PHM) Research based on Technology Development of experimental setups demonstra=ng novel concepts, Na=onal Micro/nanotechnology plalorm (MIMENTO) A culture of innova*on, from basic research to spin- off and industrial partnership 14 spin- offs created ü Automatic control ü Acoustics ü Energy ü Biomedical Engineering ü Computer science ü Mechanics ü Mechatronics ü Miicrosystems ü Nanotechnologies ü Optics ü Time & Frequency 2

3 MIMENTO: the micro/nanofabrica=on facili=es (MIcrofabrica=on for MEchanics, Nanoscience, Thermal science & Op=cs) One of the 6 largest French academic facili*es 3

4 Key numbers 770 m 2 of clean- room (class 10000, 1000 et 100) 230 m 2 of room for other ac=vi=es 13 M equipment, 600k annual running cost 15 Engineers and Technicians (about 10 Full- =me staff) 110 projects running Quartz- tech: a unique industrial line R&D, produc*on of piezoelectric components 4

5 Fluid flow, heat transfer SIMBA Project (FUI) SIMula*on de la Boucle d AIR 5 5

6 Briouillin sensors distributed on an op=cal fiber MICROMOTEURS MEMS NOMADES At any point of an op=cal fiber deployed in / on a structure or a site, a distributed Brillouin sensor may detect, locate and measure temperature or stress varia=ons by an optoacous=c mapping distributed along the fiber Monitoring of structures, pipelines, offshore plalorms, infrastructures (bridges, roads, tunnels), CD- FOM (Interreg IV project, 5 partners) 6

7 SAW Surface acous=c wave Wireless and energyless sensors Piezoelectric material The SAW resonance frequency is modified by the physical value to measure Packaged SAW device 7

8 SAW sensors for automobile TPMS: Why will SAW technology get in? No bafery! No maintenance during vehicle life! Lower cost at same volumes Pressure and temperature measurement Strain and accelera=on for road adhesion Speed indica=on Cookware Torque measurements SAW inside Low cost yet high precision Could be installed on shai during assembly and zero- force offset calibrated Other Wireless seat occupa=on, wireless load/weight measurements Wireless switches (open closed, presence, etc.) Wireless temperature probes (bearings, breaks, transmission) High temperature (exhaust, turbo, pistons, etc.) Instrumented filters (pressure & Id), Oil control (viscosity, contamina=on, etc.) Wind turbine generator Hydraulics pressure and temperature Pollu=on control (Gas detec=on, etc.) 8

9 Energyless MEMS sensors for passive structure monitoring ChronoMEMS silicon technology for «stick & forget» sensors Sensing energy coming from parasi=c deforma=ons of monitored structures subjected to external mechanical events. ChronoMEMS provides detec=on, coun=ng and storage of both mechanical and thermal events dealing with 1. impacts in the range of 10s g up to 1000s g, 2. mechanical vibra=ons, 3. sta=c and quasi- sta=c mechanical and/ or thermal deflec=ons. ChronoMEMS chips can be easily distributed within arrays for structure health- monitoring. It will allow mechanical fa=gue of materials to be permanently followed within periods of up to 10s years, therefore leading to cost effec=ve maintenance of strategic equipments Simplicity of installing and maintenance reliability, robustness and autonomy miniaturiza=on and resilience cost- effec=ve technology Some expected markets Transport Defense Space Mechanics industry 9

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11 Perspec=ves: Photonic crystal & Reservoir compu=ng Goal: pa=ent autonomy (especially handicapped), remote control by thought Calculateur neuromorphique (DEMO5) Capteur de champs électriques (optrodes photoniques intégrées) Casque instrumenté pour saisir et interpréter l ac=vité cérébrale (EEG HD) Traitement de données complexes à distance et en temps réel Piloter sa maison Réseau de capteurs/actionneurs communicants intégrés dans l environnement du patient Structures photoniques Piloter son fauteuil roulant 11

12 LABEX ACTION 2012/20 «Smart Systems integrated in the Material» FEMTO- ST / ICB / LNIO Thank you for your afen=on st.fr 12