BEFORE BEFORE AFTER AFTER VACUUM CHAMBER PM TECHNIQUE NOVELLUS HDP SPEED 2 DOME SCRUB OBJECTIVE: TO EFFECTIVELY PM THE NOVELLUS HDP SPEED 2 CERAMIC DOME IN A TIMELY MANNER, WHILE IN-PLACE AND TO MINIMIZE TOOL DOWNTIME WHILE IMPROVING PARTICLE PERFORMANCE, TOOL RECOVERY AND REDUCE COST Vacuum Chamber: NOVELLUS HDP SPEED 2 Vacuum Chamber Process Residue: PROCESS INDUCED RESIDUE Vacuum Chamber Components: CERAMIC DOME Old Procedure: New Procedure: Replace dome every 5,000 to 10,000 wafers Extended downtime, outgassing, recovery time & cost 30 minutes, Foamtec International PM kit with DI water, reduced tool downtime, outgassing & recovery time REDUCES COST BY EXTENDING DOME LIFE >2x Vacuum Chamber Products: NOVELLUS HDP SPEED 2 DOME PM Kit PM Kit P/N: HT4500 NOVDM5 (1) HT4754 UltraSOLV Sponge (1) FT901 ErgoSCRUB w/hook (2) HT4528DC3-1 280 Grit Diamond ScrubDISK (2) HT4528D-10-1 280 Grit Diamond ScrubPAD (2) HT4790-5 UltraSOLV Foam Wipers (2) HT5790S-5 MiraWIPES (1) FT1301 Plastic Container with Sealed Top Novellus HDP Speed 2 Dome PM 061410.docx 1
NOVELLUS HDP SPEED 2 IN-PLACE DOME PM PROCEDURE: View How to instructional videos on http://www.foamtecintlwcc.com/flash/ Step 1: Using proper procedures and safety guidelines prepare Novellus Speed 2 Dome for wet clean Step 2: Fill FT1301 plastic container with approximately 12oz of DI water and place on protective pad next to HDP Speed 2 chamber (See Fig 1) Fig 1: FT1301 plastic container with DI water Step 3: Place HT4754 UltraSOLV Sponge, ErgoSCRUB w/scrubdisk and ScrubPAD in container of DI water to moisten products Step 4: To prevent excess particles from entering Novellus Speed 2 Chamber during dome scrub procedure, ensure to cover chamber with a piece of plastic or an approved chamber cover Step 5: Take dampened UltraSOLV Sponge and wipe out the Novellus Speed 2 ceramic dome, removing all loose deposition and flakes. Continue to remoisten the UltraSOLV Sponge in container of DI water and wipe HDP Dome until as much of the deposition as possible has been removed with the UltraSOLV Sponge (See Fig 2 & 3) Novellus HDP Speed 2 Dome PM 061410.docx 2
Step 6: Take dampened 280 Grit Diamond ScrubDISK attached to ErgoSCRUB and scrub areas throughout the Novellus ceramic dome. (See Fig 2) Fig 2: Using 280 Grit Diamond ScrubDISK scrub ceramic dome. UltraSOLV Sponge placed at bottom of dome to collect any excess water NOTE: WHEN SCRUBBING CERAMIC DOME, RECOMMEND PLACING UltraSOLV SPONGE AT BOTTOM OF DOME TO ABSORB ANY EXCESS WATER DRAINING FROM THE 280 GRIT DIAMOND ScrubDISK (See Fig 2) Step 7: As loose deposition begins to build up within the ceramic dome, use UltraSOLV Sponge and wipe the area free of deposition (See Fig 3) Fig 3: UltraSOLV Sponge wiping ceramic dome free of loose deposition Novellus HDP Speed 2 Dome PM 061410.docx 3
Step 8: Continue to rinse out sponge in container of DI water, as necessary, to free UltraSOLV Sponge of excess deposition (See Fig 4) Fig 4: Continue to rinse UltraSOLV Sponge in container of DI water Step 9: As 280 Grit Diamond ScrubDISK loads up with deposition, pull & twist ScrubDISK across dampened UltraSOLV Sponge to unload ScrubDISK of deposition (See Fig 5, 6 & 7) Fig 5: ScrubDISK loaded with deposition Fig 6: Pull & Twist ScrubDISK across UltraSOLV Sponge Fig 7: Unloaded ScrubDISK NOTE: UNLOADING DIAMOND ScrubDISKS IS A VERY IMPORTANT STEP THAT MUST BE FOLLOWED THROUGHOUT ENTIRE PM Novellus HDP Speed 2 Dome PM 061410.docx 4
Step 10: As UltraSOLV Sponge becomes loaded with deposition, rinse in container of DI water (See Fig 8 & 9) Fig 8: UltraSOLV Sponge loaded with deposition Fig 9: UltraSOLV Sponge free of deposition after rinse in DI water Step 11: Repeat steps 5 10, scrubbing the remaining areas of the Novellus Ceramic Dome. Ensure to rinse out UltraSOLV Sponge and unload 280 Grit Diamond ScrubDISK onto the UltraSOLV Sponge as necessary Step 12: Replace 280 Grit Diamond ScrubDISK with 2 nd ScrubDISK when it begins to feel as though it is not removing any additional deposition Step 13: Using same technique as described above, take 280 Grit Diamond ScrubPAD and continue scrubbing ceramic dome, concentrating on edges of ceramic dome (See Fig 10) Fig 10: ScrubPAD scrubbing edges of ceramic dome Novellus HDP Speed 2 Dome PM 061410.docx 5
Step 14: Replace 280 Grit Diamond ScrubPAD with 2 nd ScrubPAD when it begins to feel as though it is not removing any additional deposition IMPORTANT NOTE IT IS NOT NECESSARY TO REMOVE ENTIRE STAIN EMBEDDED IN NOVELLUS SPEED 2 DOME. IT IS ONLY IMPORTANT TO REMOVE THE SHARP, ROUGH DEPOSITION BUILDUP THAT ACCUMULATES WITHIN DOME, DURING PROCESS Step 15: Use 280 Grit Diamond ScrubPAD and gently remove o-ring stain on sealing surface (See Fig 11) Fig 11: Dome sealing surface after 280 Grit ScrubPAD clean Step 16: When dome appears to be efficiently clean, proceed to slide Diamond ScrubPAD over the entire dome using the back of your hand. Listen for any areas that may still appear rough or sharp and scrub accordingly. If you feel any rough areas and hear any scratching, those areas need to be re-scrubbed Step 17: When deposition is sufficiently removed throughout entire Novellus Ceramic Dome, rinse out UltraSOLV Sponge with fresh DI water and re-wipe the entire dome in preparation for Final Wipe Procedure Novellus HDP Speed 2 Dome PM 061410.docx 6
DOME FINAL WIPE PROCEDURE: IMPORTANT NOTE AS THE NOVELLUS CERAMIC DOME IS AN EXTREMELY PARTICLE SENSITIVE AREA, THE FINAL WIPE PROCEDURE MUST BE FOLLOWED IN ITS ENTIRETY TO MAXIMIZE TOOL RECOVERY BENEFITS Step 18: Take HT4790 UltraSOLV Foam Wiper, fold into quarters and moisten a small area with DI water (See Fig 12 & 13) Fig 12: HT4790 UltraSOLV Foam Wiper Fig 13: Moistening UltraSOLV Foam Wiper with DI water Step 19: Using the dampened area on UltraSOLV Foam Wiper wipe dome by GENTLY PULLING Foam Wiper across an area on the dome in one direction (See Fig 14) Fig 14: UltraSOLV Foam Wiper pulling across ceramic dome Novellus HDP Speed 2 Dome PM 061410.docx 7
Step 20: Turn UltraSOLV Foam Wiper over and remoisten a new small area on Foam Wiper with DI water; continue to wipe another area within dome by pulling Foam Wiper in one direction only Step 21: Continue to refold UltraSOLV Foam Wiper as necessary ensuring to use a fresh area on the Foam Wiper for every wipe across the dome Step 22: Repeat steps 18 21, using all of the remaining UltraSOLV Foam Wipers completely, re-wiping all areas as necessary CHAMBER FINAL WIPE PROCEDURE: IMPORTANT NOTE UPON COMPLETION OF CERAMIC DOME FINAL WIPE PROCEDURE, IT IS CRITICAL TO EFFECTIVELY WIPE OUT NOVELLUS SPEED 2 PROCESS CHAMBER WITH REMAINING HT5790S MiraWIPES TO MAXIMIZE TOOL RECOVERY BENEFITS NOTE: Figure below shows how much more deposition the Foamtec International MiraWIPE can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE Final Wipe the most CRITICAL STEP of the PM procedure (See Fig 15a & 15b) Fig 15a: Current fab wiper after completely wiping HDP Dome Fig 15b: Particles picked up using HT5790S MiraWIPES after completely wiping with current fab wiper MiraWIPES are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY Novellus HDP Speed 2 Dome PM 061410.docx 8
Step 23: Using the HT5790S MiraWIPES, moisten with IPA and wipe the entire Novellus Speed 2 Chamber as necessary Step 24: Ensure to wipe down all nozzles, pump ports, view ports, vacuum sealed surfaces, o-rings and parts to be placed back into the Novellus Speed 2 Chamber with the MiraWIPES Step 25: Perform Novellus Speed 2 tool recovery as outlined by manufacturer Novellus HDP Speed 2 Dome PM 061410.docx 9