All-Metal Control Valve

Operating Instructions All-Metal Control Valve Thermomechanically and manually actuated UDV 146 BP 805 281 BE (0203) 1

Product Identification In all communications with Pfeiffer Vacuum, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below. Pfeiffer Vacuum, D-35614 Asslar Typ: No: F-No: Validity This document applies to products with part number PFI52034. The part number (No) can be taken from the nameplate. We reserve the right to make technical change without prior notice. All dimensions in mm. Intended Use The UDV 146 All-Metal Control Valve is used (in conjunction with a controller) for admitting a precise and reproducible gas flow into a vacuum system and is suited, for example, for gas and surface analysis mass spectrometry nuclear physics, accelerators cathode sputtering vacuum and laser technology handling of very pure gases 2 BP 805 281 BE (0203) UDV 146.oi

Contents Product Identification 2 Validity 2 Intended Use 2 1 Safety 4 1.1 Symbols Used 4 1.2 Personnel Qualifications 4 1.3 General Safety Instructions 4 1.4 Liability and Warranty 4 2 Technical Data 5 3 Installation 6 3.1 Capillary for Precisely Routing the Gas Flow 7 3.2 Installation in the Vacuum System 7 3.3 Electrical Connection 8 4 Operation 9 4.1 Manual Gas Flow Setting 9 4.2 Thermomechanical Regulation 10 4.3 Operation at Low Gas Flows 11 4.4 Compensation of Temperature Variations 11 4.5 Bakeout 11 5 Deinstallation 12 5.1 Electrical Connection 12 5.2 Vacuum Connection 12 6 Maintenance 14 6.1 Disassembling the Valve Mechanism 14 6.2 Cleaning the Valve Mechanism 17 6.3 Replacing the Cup Springs 17 6.4 Adjusting the Prestress of the Cup Springs 18 6.5 Assembling the Valve Mechanism 18 7 Troubleshooting 21 7.1 Valve Does Not Regulate 21 7.2 Valve Is Not Tight 21 7.3 Adjusting the Tightness at the Valve Seat 22 7.4 Adjusting the Lever 25 7.5 Disassembling the Sealing Elements of the Valve Seat 28 7.6 Checking and Cleaning the Valve Body and the Sealing Elements of the Valve Seat 30 7.7 Assembling the Sealing Elements of the Valve Seat 32 8 Accessories 34 9 Spare Parts 35 10 Returning the Product 36 11 Disposal 36 Declaration of Contamination 37 XY) is used, for cross- For cross-references within this document, the symbol ( references to further documents the symbol ( [Z]). BP 805 281 BE (0203) UDV 146.oi 3

1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. 1.2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product. 1.3 General Safety Instructions Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions between the materials ( 5) and the process media. Consider possible reactions of the process media due to the heat generated by the product. Use protective gloves for actuating the valve at operating temperatures >55 C ( 9). Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document ( 14, 21). Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Communicate the safety instructions to all other users. 1.4 Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties disregard the information in this document use the product in a non-conforming manner make any kind of interventions (modifications, alterations etc.) on the product use the product with accessories, options, and add-ons not listed in the corresponding product documentation. 4 BP 805 281 BE (0203) UDV 146.oi

2 Technical Data Actuation Connections Vacuum side Inlet side Mounting orientation Tightness of closed valve Pressure range Smallest adjustable gas flow Air Pure gases Highest adjustable gas flow 2) Conductance of open valve 2) Temperature Operation With standard cable With heat-resistant extension cable Bakeout Storage Material Housing, diaphragm Valve plate Valve seat Thermomechanical regulation Connection Voltage Current Heating resistance Weight manual thermomechanical 1) DN 40 CF-F M5 (capillary) DN 16 CF-R any <10-11 mbar l/s <10-10 mbar 30 bar (absolute) <10-9 mbar l/s <10-10 mbar l/s <10-9 mbar l/s 1) 600 mbar l/s 0.7 l/s, molecular flow 80 C 200 C 350 C 3) 5 45 C stainless steel sapphire copper alloy socket, 2 pins (W.W. Fischer) 0 20 VDC 0.5 A 30 Ω 1.4 kg 1) 2) 3) e.g. with RVG 050 C Controller at an inlet pressure of 1 bar cable removed Dimensions ø46 DN 16 CF-R 98.2 32.5 Recommended flow direction Power connection DN 40 CF-F 85.5 M5 50 Protective lid Valve seat side BP 805 281 BE (0203) UDV 146.oi 5

3 Installation Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages. Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Overview Accessory RVG 050 C Controller Shut-off valve Supplied by end-user Accessory Flange with tube ø18 DN 16 CF-F Accessory Heating jacket (accessory) Capillary Gas supply Supplied by end-user 6 BP 805 281 BE (0203) UDV 146.oi

3.1 Capillary for Precisely Routing the Gas Flow M5 Do not turn the knurled nut. M5 1000 ø2 0.5 3.2 Installation in the Vacuum System Remove the protective lids and install the valve to the vacuum system. Ensure good accessibility of the knurled nut. Do not turn the knurled nut. Screws, M4 20 1) (accessories) ø18 DN 16 CF-F Gasket (accessory) Keep the protective lid. Gasket (accessory) Keep the protective lid. DN 40 CF-F Screws, M6 35 2) (accessories) 1) 2) required torque 4 Nm, thread lubricated required torque 10 Nm, thread lubricated Recommended flow direction BP 805 281 BE (0203) UDV 146.oi 7

3.3 Electrical Connection Cable for controller (accessory) RVG 050 C Controller Socket 10 0 0.5 0.7A 5 15 valve current 0 20 V limit reset time proportional gain 10 20 50 10 100 15 5 5 200 20 2 500 3 30 s 1 1000 set point fuse power on Shut-off valve (supplied by end-user) RVG 050 C Controller BG 805 282 BE. Further technical data 5. 8 BP 805 281 BE (0203) UDV 146.oi

4 Operation DANGER C Caution: hot surface Touching the hot surface can cause burns. Wear protective gloves. 200 C C 55 C 4.1 Manual Gas Flow Setting Open the valve by making 3 counter clockwise turns of the knurled nut. Locked 3 turns Set the desired gas flow with the knurled nut. Locked This setting serves as basic adjustment for the thermomechanical regulation. BP 805 281 BE (0203) UDV 146.oi 9

4.2 Thermomechanical Regulation The UDV 146 has a thermomechanical controller. The valve stem is equipped with a bifilar heating coil and is heated according to the heater voltage applied. The resulting deformation in extension is added to the set basic adjustment of the valve ( 9) and thus reduces the conductance value accordingly. In conjunction with a controller, e.g. the RVG 050 C, the desired gas flow can be set and stabilized. WARNING Caution: wrong heating voltage A wrong heating voltage can damage the heating coil of the valve. Read the manual of the controller before putting it into operation. Caution Caution: damage of valve plate If heating voltage is applied at gas flows <10-8 mbar l/s or when the valve is closed, the valve plate (sapphire) can be damaged. Do not apply heating voltage to the closed valve. Gas flow Q [mbar l/s] 10 2 10 1 10 0 10-1 10-2 10-3 Q manual V x 10-4 V max 10-5 10-6 Q x 10-7 10-8 Q min 10-9 10-10 Manual opening Typical relationship between gas flow and heater voltage (inlet pressure 1 bar) The gas flow Q manual is the result of manual adjustment of the valve opening. This value limits the range of regulation and thus the gas flow in the event of a power failure. By preselecting a desired value on the controller and by applying the corresponding heater voltage V x, any desired gas flow Q x between Q manual and Q min may be set and kept constant. 10 BP 805 281 BE (0203) UDV 146.oi

4.3 Operation at Low Gas Flows When operating the valve at gas flows 10-9 mbar l/s, the orifice can be contaminated by condensable vapors. Adsorbed vapors can be removed by baking the valve in open position (at approx. 200 ºC for 30 minutes). Such adsorption can be prevented by heating the valve during operation, for example with a heating jacket ( 34). At gas flows <3 10-10 mbar l/s, in addition to heating, make sure the admitted gas is free of condensable vapors. If necessary, the inlet gas can be admitted via a drying device (e.g. liquid nitrogen cold trap). 4.4 Compensation of Temperature Variations Rapid changes in the environment such as draughts of air and sun irradiation can influence the gas flow too strongly for certain experiments. To avoid this, operate the valve at a controlled temperature 200 C using for example a heating jacket ( 34) in conjunction with a thermocouple. Changes in the gas flow can be compensated by operating the valve in conjunction with the RVG 050 C Controller ( 10). 4.5 Bakeout Oxidation occurs (interfering on sealing surfaces) when the valve is baked at atmospheric pressure at temperatures above 300 ºC. This can be avoided, for example, by using a protective gas atmosphere or an auxiliary vacuum. Caution Consider the information on lubricating the valve ( 14). Caution Caution: bakeout temperature Consider the temperature rating of the cables. Bakeout temperature >80 C: remove the standard cable. Bakeout temperature >200 C: remove the heat-resistant extension cable. BP 805 281 BE (0203) UDV 146.oi 11

5 Deinstallation The vacuum system must be vented, the gas inlet closed and the valve cooled down to <55 C. 5.1 Electrical Connection Before connecting or disconnecting the product turn off the control system. 5.2 Vacuum Connection DANGER Caution: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages. Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. 12 BP 805 281 BE (0203) UDV 146.oi

Detach the flanges and put the protective lids in place. Gasket Protective lid Gasket Protective lid Use new gaskets when reinstalling the valve ( 35). BP 805 281 BE (0203) UDV 146.oi 13

6 Maintenance DANGER Caution: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages. Maintenance cycle The valve is free of maintenance if it is operated according to the specifications. However, we suggest that after 25 heating to temperatures above 250 ºC you disassemble the valve mechanism, clean and lubricate it. 6.1 Disassembling the Valve Mechanism Valve deinstalled ( 12). Turn the ball pin 4 turns counter clockwise in order to relieve the lever. Size 4 4 turns 14 BP 805 281 BE (0203) UDV 146.oi

Remove the screws and lift off the cap. Size 4 Screw the screws one turn into the link bolts. Remove the cap screw. Size 6 Remove the link bolts by pulling the screws. BP 805 281 BE (0203) UDV 146.oi 15

Z Lift the lever off and carefully remove the bolt. Pull out carefully [ Remove the hexagon nut and the cup springs. 16 BP 805 281 BE (0203) UDV 146.oi

6.2 Cleaning the Valve Mechanism DANGER Caution: cleaning agents Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling and disposing of cleaning agents. Consider possible reactions with the product materials ( 5). Clean the valve mechanism with a lint-free cloth moistened with alcohol. 6.3 Replacing the Cup Springs Repeated baking at temperatures above 200 C can result in loss of tension in the cup springs. This leads to a reduced sensitivity of control at high gas flow rates. Disassemble the valve mechanism ( 14, steps [). Clean the hexagon nut. Lubricate its thread with high temperature lubricant (e.g. Hi-Temp C100). Insert 5 new cup springs. Tighten the hexagon nut by hand. Make sure to correctly position the cup springs. C100 Adjust prestress Adjust the prestress of the cup springs ( 18). BP 805 281 BE (0203) UDV 146.oi 17

6.4 Adjusting the Prestress of the Cup Springs Disassemble the valve mechanism ( 14, steps Z). Unfasten the hexagon nut. Tighten the hexagon nut play-free. Prestress 1 turns. 6.5 Assembling the Valve Mechanism We recommend using the high temperature lubricant Hi-Temp C100 ( 34). A thin coat of lubricant is sufficient. Insert the bolt and carefully connect the heating coil. C100 Plug in carefully. 18 BP 805 281 BE (0203) UDV 146.oi

Insert the lever into the housing and fasten it with the link bolts. C100 Carefully turn in the cap screw until the mechanical stop can be felt. Size 6 C100 Screw in carefully until the mechanical stop can be felt. BP 805 281 BE (0203) UDV 146.oi 19

Mount the cap and fasten it with the screws. C100 Size 4 Z Lubricate the ball pin. C100 [ Connect the valve to a leak detector Close the valve. Locked Close. \ Set the desired gas flow ( 9). 20 BP 805 281 BE (0203) UDV 146.oi

7 Troubleshooting We recommend returning the product to your local Pfeiffer Vacuum service center for repair. Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. DANGER Caution: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages. 7.1 Valve Does Not Regulate Possible cause: Heating coil is defective or not connected internally. Procedure Check the heating resistance at the valve connector with an ohmmeter. It should be 30 Ω. If it is NOT: Disassemble the valve mechanism ( 14). Check the connections and the heating resistance of the heating coil. If the heating coil is defective, please contact your local Pfeiffer Vacuum service center. See the documentation of your controller for further information (RVG 050 C Controller BG 805 282 BE). 7.2 Valve Is Not Tight Possible cause Valve seat is deformed 22 Sealing elements at the valve seat are contaminated 28 Valve seat is damaged 28 Valve plate (sapphire) is damaged 28 Cup springs have been prestressed too much 18 BP 805 281 BE (0203) UDV 146.oi 21

7.3 Adjusting the Tightness at the Valve Seat Valve deinstalled ( 12). Connect the valve to a leak detector. Knurled nut Lock nut Leak detector Unfasten the lock nut and turn it 5 turns counter clockwise. Hold stationary. 5 turns Lock the knurled nut. Turn to mechanical stop. Hold stationary. 22 BP 805 281 BE (0203) UDV 146.oi

Adjust to the required tightness. Locked Z Turn the knurled nut 2 turns clockwise in order to prestress the valve lever. Locked 2 turns [ Unlock the knurled nut. Hold stationary. Unfasten. \ Turn the knurled nut to the mechanical stop. Released Turn to mechanical stop. BP 805 281 BE (0203) UDV 146.oi 23

] Lock the knurled nut. Hold stationary. Turn to mechanical stop. 24 BP 805 281 BE (0203) UDV 146.oi

7.4 Adjusting the Lever After the tightness of the valve has been adjusted a number of times, it may be necessary to adjust the lever. Adjust the lever if α 5 (a 64.5 mm) while the valve is closed. Valve closed α (a) Valve deinstalled ( 12). Turn the knurled nut counter clockwise until α = 0 (a = 59 mm). Locked Turn until α = 0 (a = 59 mm). (a) Hold the lock nut stationary and turn the knurled nut clockwise to the mechanical stop. Hold stationary. Turn to mechanical stop. BP 805 281 BE (0203) UDV 146.oi 25

Unfasten the hexagon socket set screw and adjust the scale ring to "0". Size 2 Adjust scale ring to "0". 0 5 10 Afterwards tighten the hexagon socket set screw. Lock the knurled nut. Hold stationary. Turn to mechanical stop. Z Connect the valve to a leak detector. Leak detector 26 BP 805 281 BE (0203) UDV 146.oi

[ Turn the knurled nut 2 turns counter clockwise. Locked 2 turns \ Carefully screw in the cap screw until a mechanical stop can be felt. Size 6 ] Check that the valve is tight. Valve tight? no yes Max. 5 Nm Valve still not tight 28. He Leak detector BP 805 281 BE (0203) UDV 146.oi 27

^ Turn the knurled nut 2 turns clockwise. Locked 2 turns 7.5 Disassembling the Sealing Elements of the Valve Seat Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Valve deinstalled ( 12). Turn the knurled nut 4 turns counter clockwise. Locked 4 turns Unfasten the cap screw. 2 turns Size 6 28 BP 805 281 BE (0203) UDV 146.oi

Remove the valve seat. Approx. 40 Nm Size 8 Remove the valve plate. Special tool BP 805 281 BE (0203) UDV 146.oi 29

7.6 Checking and Cleaning the Valve Body and the Sealing Elements of the Valve Seat DANGER Caution: cleaning agents Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling and disposing of cleaning agents. Consider possible reactions with the product materials ( 5). Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Sealing elements at the valve seat disassembled ( 28). Valve body DANGER Caution: cleaning with pressure gas Flying particles can cause eye injuries. Wear protective glasses. DANGER p Caution: pressure gas Unprofessionally handling pressure gas can cause physical injury. Adhere to the relevant regulations and take the necessary precautions when handling pressure gas. DANGER Caution: asphyxiation hazard Using gases in closed rooms may cause asphyxiation. When using gases, make sure the room is properly ventilated, adhere to the relevant regulations and take the necessary precautions. 30 BP 805 281 BE (0203) UDV 146.oi

Visual check: Scratches or strong abrasion on the sealing surface? yes: polish concentrically with a polishing cloth (grain size 240 400). Rinse the inlet and vacuum side of the valve body with alcohol and subsequently blow out with dry particle-free gas (e.g. nitrogen). Sealing surface Inlet Valve plate Visual check: Cracks or chipping etc. on the sealing surface (sapphire)? yes: replace valve plate Clean the valve plate with a lint-free cloth moistened with alcohol. Sapphire Sealing surface Valve seat Visual check: Scratches on the sealing surface? yes: replace valve seat Copper gasket extends less than 0.2 mm above metal washer? yes: replace valve seat Oxidized parts? yes: polish concentrically with a polishing cloth (grain size 400) Clean the valve seat with a lint-free cloth moistened with alcohol. Copper gasket Metal washer Sealing surface Min. 0.2 BP 805 281 BE (0203) UDV 146.oi 31

7.7 Assembling the Sealing Elements of the Valve Seat Caution Caution: lubricants Lubricants can contaminate the vacuum area. Do not use any lubricants (the threads need not be lubricated). Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Screw in the valve plate. Tighten slightly. Special tool 32 BP 805 281 BE (0203) UDV 146.oi

Screw in the valve seat. Size 8 Approx. 40 Nm Check that the valve is tight. If it is not, repeat section 7.4 to 7.7. Sealing surface Leak detector He Rubber plug BP 805 281 BE (0203) UDV 146.oi 33

8 Accessories Accessory RVG 050 C Controller Shut-off valve Supplied by end-user Cable for controller (accessory) Accessory Flange with tube ø18 DN 16 CF-F Accessory Heating jacket (accessory) Capillary Gas supply Supplied by end-user C100 High temperature lubricant Hi-Temp C100 (accessory) Tool kit (accessory) Description Flange with tube, inlet side, DN 16 CF-F Capillary complete, vacuum side, length 1 m Heating jacket, max. 200 ºC, 115/230 VAC, 50/60 Hz RVG 050 C Controller Cable to controller Standard cable ( 80 C), 3 m Standard cable ( 80 C), 12 m Heat-resistant extension cable ( 200 C), 2 m Tool kit, comprising Hexagon head wrench, 8 mm Hexagon head wrench, 6 mm Hexagon head wrench, 2 mm Special tool for valve plate High temperature lubricant Hi-Temp C100 (28 g) High-temperature lubricant Hi-Temp C100 (28 g) Ordering number PF517202-X PT418976-T PT420376-T PFI00795 PT519178-T PT519343-T PT519953-T BP414624-T B2751050CA Hex cap screw kit: Nominal diameter Comprising Pieces Ordering number DN 16 CF screw, washer, nut 25 PF505000-T DN 40 CF screw, washer, nut 25 PF505001-T 34 BP 805 281 BE (0203) UDV 146.oi

Copper gaskets, premium quality diamond surface finish, individual packaging: Nominal diameter Attributes Pieces Ordering number DN 40 CF 10 PF501404-T DN 40 CF silver-plated 10 PF501504-T DN 40 CF gold-plated 5 BN845930-T DN 16 CF 10 PF501401-T DN 16 CF silver-plated 10 PF501501-T DN 16 CF gold-plated 5 BN845929-T 9 Spare Parts When ordering spare parts, always indicate: all information on the product nameplate item number, description and ordering number according to the spare parts list Description Valve plate, sapphire Ordering number BP414656-X Description Valve seat complete, standard Valve seat complete, gold plated Ordering number BP414652-X BP414950 BP 805 281 BE (0203) UDV 146.oi 35

10 Returning the Product WARNING Caution: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment. Products returned to Pfeiffer Vacuum should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination ( 37). Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer. Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense. 11 Disposal DANGER Caution: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Separating the components Contaminated components Other components After disassembling the product, separate its components according to the following criteria: Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of. Such components must be separated according to their materials and recycled. 36 BP 805 281 BE (0203) UDV 146.oi

Declaration of Contamination The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff. Description of product Type Part number Serial number Reason for return Operating fluid(s) used (Must be drained before shipping.) The product is free of any substances which are damaging to health yes G Process related contamination of product toxic no G 1) yes G caustic no G 1) yes G biological hazard no G yes G 2) explosive no G yes G 2) radioactive no G yes G 2) other harmful substances no G 1) yes G 1) or not containing any amount of hazardous residues that exceed the permissible exposure limits 2) Products thus contaminated will not be accepted without written evidence of decontamination! Harmful substances, gases and/or by-products Please list all substances, gases, and by-products which the product may have come into contact with: Trade/product name Manufacturer Chemical name (preferably with formula) Precautions associated with substance Action in case of human contact Legally binding declaration: We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may arise. The contaminated product will be dispatched in accordance with the applicable regulations. Organization/company Address Phone E-mail Name Post code, place Fax Date and legally binding signature Company stamp This form can be downloaded from our website. Copies: Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender BP 805 281 BE (0203) UDV 146.oi 37

Notes 38 BP 805 281 BE (0203) UDV 146.oi

Notes BP 805 281 BE (0203) UDV 146.oi 39

Original: German BP 805 281 BD (0203) Berliner Strasse 43 D 35614 Asslar Deutschland Tel +49 (0) 6441 802-0 Fax +49 (0) 6441 802-202 info@pfeiffer-vacuum.de bp805281be www.pfeiffer-vacuum.de