Refrigerated Thermo-chiller

Circulating Fluid Temperature Controller Refrigerated Thermo-chiller Series Type of Fluorinated fluids/ethylene glycol aqueous solution/ circulating fluid: Clear water, Deionized water Temperature range setting: to C/ to 9 C/ to 9 C Cooling capacity: 1 kw/ kw/ kw/ 8 kw/ 1 kw to Max.15 kw + Temperature stability:.1 C Refrigerant: RA (HFC)/ R13a (HFC) More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump. Inverter type Power consumption 1.1 kwh/h Facility water L/min HEC HRW HRS HRGC HRG D International standards: SEMATECH S-93, S8-95 SEMI Standard S-73, S8-71, F7-93

Power consumption: Max. % reduction (SMC comparison) In addition to the optimum control of the expansion valve by the original controller, by recycling the heat emitted from the facility water, power consumption is dramatically reduced. Conventional model -L 3.9 kwh/h Energy-Saving 6. kwh/h Operating conditions: 1 C, kw with 5% load, kw with 5% load Reduced running cost Contribution to the environmental preservation : Max. % reduction (SMC comparison) Enhanced temperature control technology and the dual tank construction achieved the reduced circulating fluid required for operation. Conventional model -H 1 L L Comparison of the required circulating fluid inside a Thermo-chiller Reduced initial cost Contribution to the environmental preservation More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump. Power consumption: Facility water: Max. 8% reduction (SMC comparison) Conventional model 1-WS 1.1 kwh/h 6. kwh/h Operating conditions: 1 C, kw with 5% load, kw with 5% load Heated refrigerant emission gas Cold refrigerant liquid Conventional model Heater Cold refrigerant liquid This illustration is for an image only. For piping systems, refer to Construction and Principles on page 98. Facility water: Max. 75% reduction (SMC comparison) Enhanced performance of a heat exchanger, recycle use of the emitted heat and the reduced power consumption achieved the reduced facility water amount. Conventional model -L 5 L/min Reduced facilities investment Space saved facility water equipment Reduced running cost L/min Operating conditions: 1 C, kw with 5% load, kw with 5% load Max. 9% reduction (SMC comparison) Conventional model 1-WS L/min L/min Operating conditions: 1 C, kw with 5% load, kw with 5% load Installation area: Leakless Space-Saving Max. 9% reduction (SMC comparison) By emitting the heat from the rear side, ventilation slits on the side are unnecessary offering reduced installation space. Conventional model: Body space: W mm x D85 mm Ventilation space: 1 mm 8-H: Body space: W38 mm x D87 mm Ventilation space: All in tank Housing the pump or heat exchanger inside the tank has eliminated any external leakage of the circulating fluid. Heat exchanger Pump 38 mm 8-H 87 mm.66 m mm 1 mm Conventional model Communications 85 mm Contact input/output signal Serial RS-85 communication Analog communication (Refer to Options on page 1.) DeviceNet communication (Refer to Options on page 1.).93 m HEC HRW D HRS HRGC HRG -19. -. -1. -19. -. -1. Temperature stability: -L High Performance +.1 C (when a load is stable) Enhanced temperature control technology achieved ±.1 C temperature stabilities when a load is stable. kw load kw load Conventional model 1 sec. 15 sec. Time Cooling time: Max.3% reduction (SMC comparison) Special temperature control technology achieved the utmost performance, resulting in the reduced cooling time. - -L Conventional model 3% reduction Time Cooling capacity (kw) Cooling capacity: Max.15 kw Up to 15 kw cooling capacity achieved. 16 15 1 1 1 8 6-8-L -15-1 -5 5 1 15 5 3 temperature setting ( C) 35 Wetted parts adopt the materials compatible for various circulating fluids. (Stainless steel, EPDM, etc.) Fluorinated fluids: Flourinert FC-383, FC- GALDEN HT135, HT 6% ethylene glycol aqueous solution Deionized water/clear water Regarding the fluid other than the above, please contact SMC. Flourinert is a trademark of 3M. GALDEN is a registered trademark of Solvay Solexis, Inc. 9 95

Easy Maintenance automatic recovery function (Refer to Options on page 13.) inside a Thermo-chiller tank can be recovered automatically. (Recovery volume: 15 L to 17 L) Reduced maintenance time Faster operation Reduced circulating liquid loss by evapolation or spill Conventional model All you have to do is to push the communication button for recovery and reset! 1 Normal operation 3 recovery Customer s machine Customer s machine Fluid returns to the main tank from the circulating fluid recovery tank. Customer s machine Internal pump Circulating pump Internal pump Circulating pump Internal pump Circulating pump Heat exchanger Main tank Option Option Option N purge port N purge port N purge port Heat exchanger Main tank Heat exchanger Main tank N electrical resistance ratio control function (Refer to Options on page 1.) (DI control kit) Easy maintenance Checking the electrical component parts accessible from the front side only Possible to replace the maintenance parts (such as a pump) without removing the pipings and discharging the circulating fluid. Various alarm displays (Refer to page 118.) 96

Application Examples Semiconductor Example: Temperature control of chamber electrode Upper electrode Medical Example: Blood preservation Water Etching equipment Spatter equipment Cleaning equipment Food Lower electrode Coating equipment Dicing equipment Tester, etc. Example: Tofu (Bean curd) production X-ray instrument MRI Blood preservation equipment Analysis Example: Electronic microscope Electronic microscope CRT HRG HRGC HRS Bottle-cleaning machine Tofu (Bean curd) production equipment Noodle-making machine, etc. Water temperature control for forming tofu by mixing the boiled soybean milk and bittern Electron microscope X-ray analytical instrument Gas chromatography Sugar level analytical instrument, etc. Prevents the distortion caused by the heat generated by the electronic gun in an electronic microscope. D Machine tool Example: Laser machining Printing Example: Printing temperature control Ink roller HRW Wire cutting Grinder Spot welding Plasma welding Laser machining, etc. Temperature-controlling the laser generating tube enables the laser wavelength to be optimised, improving the accuracy of the machined cross sectional area. Offset printing machine Automatic developing machine UV equipment, etc. Temperature-controlling the ink roller enables to control the evaporation amount and viscosity of an ink and optimise the tint of colors. Molding Example: Injection molding HEC Plastic molding Temperature-controlling the mold Rubber molding results in improved product quality. Wire cable coating machine Injection molding, etc. 97

Construction and Principles Refrigeration circuit Injection valve Expansion valve (a) Expansion valve (b) Water control valve Compressor Level switch Internal pump Level switch Circulating pump Facility water outlet Refrigerant dryer Heat exchanger Facility water circuit Facility water inlet Water-cooled condenser Highpressure gauge Highpressure shutoff pressure switch Main tank Pressure sensor Flow rate sensor Temperature sensor Circulating fluid outlet Circulating fluid return inlet Sub-tank circuit circuit With the circulating pump, circulating fluid will be discharged to the customer s machine side. After the circulating fluid will heat or cool the customer s machine side, it will be returned to the main tank via the heat exchanger. A sub-tank is not used under the normal operation. It will be used when a circulating fluid is recovered from the customer s machine side. The internal pump is used to transfer a circulating fluid from the sub-tank to the main tank. (Refer to automatic recovery function on page 96. Refrigeration circuit When the circulating fluid temperature is rising higher than the set temperature, open the expansion valve (a) to introduce refrigerant gas at a lower temperature to the heat exchanger. With this, the circulating fluid will be cooled down. Oppositely, when the circulating fluid is getting lower against the set temperature, open the expansion valve (b) and introduce refrigerant gas at a high temperature without going through the water-cooled condenser to the heat exchanger. With this heat, the circulating fluid will be heated. 98

Series Model Selection Guide to Model Selection Required Cooling Capacity Calculation Precautions on Model Selection Circulating Fluid Typical Physical Property Values P. 1 P. 11, 1 P. 1 P. 13 Fluorinated Fluid Type How to Order/Specifications Cooling/Heating Capacity Pump Capacity Ethylene Glycol Type How to Order/Specifications Cooling/Heating Capacity Pump Capacity Clear Water/Deionized Water Type How to Order/Specifications Cooling/Heating Capacity, Pump Capacity Double Inverter Type How to Order/Specifications Cooling/Heating Capacity, Pump Capacity Common Specifications Dimensions Communication Function Contact Input/Output Serial RS-85 Connector Position Operation Panel Display Alarm Optional Accessories By-pass Piping Set Anti-quake Bracket -Port Manifold DI Filter Insulating Material for DI Filter 6% Ethylene Glycol Aqueous Solution Concentration Meter Options Analog Communication DeviceNet Communication NPT Fitting DI Control Kit Circulating Fluid Automatic Recovery Specific Product Precautions P. 1 P. 15 P. 16 P. 17 P. 18 P. 19 P. 11 P. 111 P. 11 P. 113 P. 11, 115 P. 116 P. 116 P. 117 P. 117 P. 118 P. 118 P. 119 P. 119 P. 1 P. 1 P. 1 P. 11 P. 11 P. 1 P. 1 P. 1 P. 1 P. 13 P. 1 to 16 HRG HRGC HRS D HRW HEC 99

Series Model Selection Guide to Model Selection 1. How much is the temperature in degrees centigrade for the circulating fluid? Temperature range which can be set with the Thermo-chiller L: C to C ( L (clear water, deionized water specification) can be set 1 C to C.) H: C to 9 C W: C to 9 C (Select W only when the temperature ranges of L or H are not applicable. 1-WS (clear water, deionized water specification) can be set 1 C to 6 C.) Example) Customer requirement: 5 C ( Temperature range C to 9 C, H type will be appropriate.). What kind of the circulating fluids will be used? Relationship between circulating fluid (which can be used with the Thermo-chiller) and temperature Fluorinated fluids: Fluorinert FC-383/GALDEN HT135 Fluorinated fluids: Fluorinert FC-/GALDEN HT 6% ethylene glycol aqueous solution Clear water/deionized water C 1 C C C 6 C 9 C Example) Customer requirement: Fluorinated fluids Based on the results 1. and., Cooling capacity relating Fluorinated fluids and Temperature range C to 9 C is shown on page 15. 3. What is the kw for the required cooling capacity? To calculate the cooling capacity, referring to the following pages. Example) Customer requirement: 5 kw Plot the point of intersection between the operating temperature (5 C) and the cooling capacity (5 kw) in the cooling capacity graph. [Cooling Capacity Graph] Circulating Fluid: Fluorinated Fluids, Temperature Range: to 9 C 1 9 8 8-H Cooling capacity (kw) 7 6 5 3 Customer requirement -H -H 1 1-H 3 5 6 7 8 9 temperature setting ( C) The point plotted in the graph is the requirement from your customer. Select the Thermo-chiller models exceeding this point. In this case, select the -H. Fluorinert is a trademark of 3M. GALDEN is a registered trademark of Solvay Solexis, Inc. 1

Model Selection Required Cooling Capacity Calculation Example 1: When the heat generation amount in the customer s machine is known. Heat generation amount Q: 3.5 kw Cooling capacity = Considering a safety factor of %, 3.5 x 1. =. kw Example : When the heat generation amount in the customer s machine is not known. HRG Obtain the temperature difference between inlet and outlet by circulating the circulating fluid inside the customer s machine. Heat generation amount Q : Unknown temperature difference T (= T T1) : 6. C (6. K) outlet temperature T1 : C (93.15 K) return temperature T : 6 C (99.15 K) flow rate L : L/min : Fluorinated fluid Density : 1.8 x 1 3 kg/m 3 Specific heat C:.96 x 1 3 J/(kgK) Refer to page 13 for the typical physical property values by circulating fluid. Q= T x L x x C 6 x 1 = 6. x x 1.8 x 1 3 x.96 x 1 3 6 x 1 = 356 W = 3.5 kw Cooling capacity = Considering a safety factor of %, 3.5 x 1. =. kw Example of conventional measurement units (Reference) Unknown 6. C C 6 C 1. m 3 /h Fluorinated fluid Density : 1.8 x 1 3 kg/m 3 Specific heat C:.3 kcal/kg C Refer to page 13 for the typical physical property values by circulating fluid. Q= T x L x x C 86 = 6. x 1. x 1.8 x 1 3 x.3 86 = 3.5 kw Cooling capacity = Considering a safety factor of %, 3.5 x 1. =. kw HRW D HRS HRGC Thermo-chiller T: Return temperature L T = T T1 T1: Outlet temperature Customer s machine HEC 11

Model Selection Required Cooling Capacity Calculation Example 3. When there is no heat generation, and when cooling the object below a certain temperature and period of time. Cooled substance total volume V : 6 L Cooling time h : 15 min Cooling temperature difference T: C ( K) ( C C C) : Fluorinated fluid Density : 1.8 x 1 3 kg/m 3 Specific heat C:.96 x 1 3 J/(kgK) Refer to page 13 for the typical physical property values by circulating fluid. Q= = T x V x x C h x 6 x 1 x 6 x 1.8 x 1 3 x.96 x 1 3 15 x 6 x 1 = 3 W =.3 kw Cooling capacity = Considering a safety factor of %,.3 x 1. =.8 kw (When the circulating fluid temperature is C.) (In this case, selected Thermo-chiller model will be either -L or -H.) Thermo-chiller Example of conventional measurement units (Reference).6 m 3.5 h C Fluorinated fluid Density : 1.8 x 1 3 kg/m 3 Specific heat C:.3 kcal/kg C Refer to page 13 for the typical physical property values by circulating fluid. Q= T x V x x C h x 86 = x.6 x 1.8 x 13 x.3.5 x 86 =.3 kw Cooling capacity = Considering a safety factor of %,.3 x 1. =.8 kw (When the circulating fluid temperature is C.) (In this case, selected Thermo-chiller model will be either -L or -H.) Water bath C V After 15 min, cool C down to C. Note) This is the calculated value by changing the fluid temperature only. Thus, it varies substantially depending on the water bath or piping material or shape. Precautions on Model Selection 1. Heating capacity When setting the circulating fluid temperature at a higher temperature than the room temperature, the circulating fluid temperature will be heated with the Thermo-chiller. Heating capacity varies depending on the model of the series. Also, the heating capacity varies depending on the circulating fluid temperature. Consider the heat radiation amount or thermal capacity of the customer s machine. Check beforehand if the required heating capacity is provided, based on the heating capacity graph for the respective model.. Pump capacity < flow rate> Pump capacity varies depending on the model selected from the series. Also, circulating fluid flow varies depending on the circulating fluid discharge pressure. Consider the installation height difference between our Thermo-chiller and a customer s machine, and the piping resistance such as circulating fluid pipings, or piping size, or piping curves in the machine. Check beforehand if the required flow is achieved using the pump capacity curves for each respective model. < discharge pressure> discharge pressure has the possibility to increase up to the maximum pressure in the pump capacity curves for the respective model. Check beforehand if the circulating fluid pipings or circulating fluid circuit of the customer s machine are fully durable against this pressure. 1

Model Selection Circulating Fluid Typical Physical Property Values The above shown are reference values. Please contact circulating fluid supplier for details. Fluorinated Fluids Physical property value Temperature Density [kg/m 3 ] [g/l] [J/(kgK)] Specific heat C ([kcal/kg C]) 1 C C 1.87 x 1 3 1.8 x 1 3.87 x 1 3.96 x 1 3 (.1) (.3) HRG 5 C 1.7 x 1 3 1.5 x 1 3 (.5) 8 C 1.67 x 1 3 6% Ethylene Glycol Aqueous Solution Physical property Density value Temperature [kg/m 3 ] [g/l] 1 C 1.1 x 1 3 1.1 x 1 3 [J/(kgK)] 3. x 1 3 (.7) Specific heat C ([kcal/kg C]) (.7) HRS HRGC C 1.8 x 1 3 3.15 x 1 3 (.75) 5 C 1.6 x 1 3 3.7 x 1 3 (.78) 8 C 1. x 1 3 3. x 1 3 (.81) Water Density : 1 x 1 3 [kg/m 3 ] [g/l] Specific heat C:. x 1 3 [J/(kgK)] (1. [kcal/kg C]) D HEC HRW 13

Thermo-chiller Fluorinated Fluid Type Series SEMI How to Order Fluorinated Fluid Type Cooling capacity Symbol Cooling capacity 1 1 kw kw kw 8 8 kw Symbol L H W 1 L Temperature range setting Temperature range setting to C to 9 C to 9 C 1 kw kw kw 8 kw Option (Refer to pages 1 and 13.) Nil None C Analog communication D DeviceNet communication N NPT fitting Z automatic recovery Specifications (For details, please consult our Product Specifications information.) Model 1-L -L -L 8-L 1-H -H -H 8-H -W 8-W Cooling method Refrigerant Control system Ambient temp./humidity Note 1) Water-cooled refrigeration RA (HFC) PID control Temperature: 1 to 35 C, Humidity: 3 to 7%RH to C: Fluorinert TM Note ) Fluorinert TM FC-383/GALDEN HT135 Fluorinert TM FC-/GALDEN HT FC-383/GALDEN HT135 to 9 C: Fluorinert TM FC-/GALDEN HT Temp. range setting Note 1) ( C) to to 9 to 9 Cooling capacity Note 3) (kw).. 8. 1... 8.. 8. (at 1 C) (at 1 C) (at 1 C) system Cooling water system Electrical system Heating capacity Note 3) (kw) Temp. stability Note ) ( C) Pump capacity Note 5) (5/6 Hz) (MPa) Rated flow Note 6) (L/min) Main tank capacity Note 7) (L) Sub-tank capacity Note 8) (L) Port size Wetted parts material Temperature range ( C) Pressure range (MPa) Required flow rate Note 9) (5/6 Hz) (L/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) 1. (at 1 C).8 (at 1 C) 3. (at 1 C) ±.1.5/.65 (at L/min)./.6 (at L/min).5/.65 (at L/min) Approx. 15 Approx. 16.65/.95 (at 3 L/min) 3 Approx. Approx. 17 Approx. 1 Approx. 15 Rc3/ Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin 1 to 5.3 to.7 5/5 6/6 15/ 18/3 3/ 5/6 9/1 13/1 6/7 13/1 Rc1/ Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase VAC 5 Hz, 3-phase to 8 VAC 6 Hz Allowable voltage fluctuation ±1% 3 5 6 6.3 Alarm Refer to page 118. Communications Contact input/output (D-sub 5 pin) and Serial RS-85 (D-sub 9 pin) (Refer to pages 116 and 117.) Weight Note 1) (kg) 17 175 75 15 17 Safety standards UL, CE marking, SEMI (S-73, S8-71, F7-), SEMATECH (S-93, S8-95) Note 1) It should have no condensation. Note ) Fluorinert TM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC. Note 3) q Facility water temperature: 5 C, w flow rate: Values at rated circulating fluid flow rate. Values common for 5/6 Hz. Note ) Value with a stable load without turbulence in the operating conditions. It may be out of this range depending on operating conditions. Note 5) The capacity at the Thermo-chiller outlet when the circulating fluid temperature is C. Note 6) Required flow rate for cooling capacity or maintaining the temperature stability. When used below the rated flow, use the individually sold, By-pass Piping Set (Refer to page 119). Note 7) Minimum volume required for operating only the Thermo-chiller. ( temperature: C, including the Thermo-chiller s internal pipings or heat exchanger) Note 8) Preliminary space volume without main tank capacity. Available for collecting the circulating fluid inside an external piping or for preliminary injection. Note 9) Required flow rate when a load for the cooling capacity is applied at a facility water temperature of 5 C. Note 1) Weight in the dry state without circulating fluids 1 3.6 (at 1 C) 5.9 (at 1 C) 1.6.8 3. Approx. 15 Approx. 16 3 3.3 3.3

Thermo-chiller Series Cooling Capacity 1-L/-L/-L/8-L Cooling capacity (kw) 16 1 8-L 1 1 8 -L 6 -L 1-L 1 1 3 -W/8-W Cooling capacity (kw) 9 8 8-W 7 6 5 3 -W 1 1 1 3 5 6 7 8 9 Heating Capacity 1-L/-L/-L/8-L 7 1-H/-H/-H/8-H Cooling capacity (kw) 1 9 8 8-H 7 6 -H 5 3 -H 1 1-H 3 5 6 7 8 9 1-H/-H/-H/8-H HRW D HRS HRGC HRG Heating capacity (kw) 6 8-L 5 -L 3 -L 1 1-L 1 1 3 Heating capacity (kw) 8-H 3 -H -H 1-H 1 3 5 6 7 8 9 HEC -W/8-W Heating capacity (kw) 8-W 3 -W 1 1 1 3 5 6 7 8 9 15

Series Pump Capacity (Thermo-chiller Outlet) 1-L/-L/-L.9 5.8 [Outlet: 6 Hz].7 3 1.6.5..3..1 [Outlet: 5 Hz] [Return port] Lifting height Pressure 1 3 (m) (MPa) flow rate (L/min) 1-H/-H 3 1.8.7.6.5..3..1 [Outlet: 6 Hz] [Outlet: 5 Hz] [Return port] Lifting height Pressure 1 3 (m) (MPa) flow rate (L/min) 8-L 7 1. 1.1 [Outlet: 6 Hz] 6 5 1..9.8 [Outlet: 5 Hz].7.6 3.5..3 1..1 [Return port] Lifting height Pressure 1 3 (m) (MPa) flow rate (L/min) -H/8-H -W/8-W.9 5.8 [Outlet: 6 Hz].7 3 1.6.5..3..1 [Outlet: 5 Hz] [Return port] Lifting height Pressure 1 3 (m) (MPa) flow rate (L/min) When the circulating fluid flow is below 6 L/min, the in-built operation stop alarm will be activated. It is not possible to run the equipment. (common for all models) 16

Thermo-chiller Ethylene Glycol Type Series SEMI Cooling capacity Symbol Cooling capacity 1 1 kw kw kw 8 8 kw Ethylene Glycol Type Symbol L H W How to Order 1 L 1 Temperature range setting Temperature range setting to C to 9 C to 9 C 1 kw kw kw 8 kw Option (Refer to pages 1 and 13.) Nil None C Analog communication D DeviceNet communication N NPT fitting Y DI control kit Z automatic recovery Ethylene glycol type HRS HRGC HRG Specifications (For details, please consult our Product Specifications information.) Model Cooling method Refrigerant Control system Ambient temp./humidity Note 1) Note ) Temp. range setting Note 1) ( C) system Cooling water system Electrical system Cooling capacity Note 3) (kw) Heating capacity Note 3) (kw) Temp. stability Note ) ( C) Pump capacity Note 5) (5/6 Hz) (MPa) Rated flow Note 6) (L/min) Main tank capacity Note 7) (L) Sub-tank capacity Note 8) (L) Port size Wetted parts material Temperature range ( C) Pressure range (MPa) Required flow rate Note 9) (5/6 Hz) (L/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) Alarm 1-L1 -L1 -L1 8-L1 1-H1 -H1 -H1 8-H1 -W1 8-W1 Water-cooled refrigeration RA (HFC) PID control Temperature: 1 to 35 C, Humidity: 3 to 7%RH 6% ethylene glycol aqueous solution to to 9 to 9 1. (at 1 C).5 (at 1 C) 5/5. (at 1 C).9 (at 1 C). (at 1 C) 3. (at 1 C).5/. (at L/min) 8. (at 1 C) 6.1 (at 1 C) 1. 1.8 Communications Contact input/output (D-sub 5 pin) and Serial RS-85 (D-sub 9 pin) (Refer to pages 116 and 117.) Weight Note 1) (kg) 17 175 75 15 17 Safety standards UL, CE marking, SEMI (S-73, S8-71, F7-), SEMATECH (S-93, S8-95) Note 1) It should have no condensation. Note ) Dilute pure ethylene glycol with clear water. Additives such as preservatives cannot be used. Note 3) q Facility water temperature: 5 C, w flow rate: Values at rated circulating fluid flow rate. Values common for 5/6 Hz. Note ) Value with a stable load without turbulence in the operating conditions. It may be out of this range when a DI control kit (option Y) is used or in some other operating conditions. Note 5) The capacity at the Thermo-chiller outlet when the circulating temperature is C. Note 6) Required flow rate for cooling capacity or maintaining the temperature stability. When used below the rated flow, use the individually sold, By-pass Piping Set (Refer to page 119). Note 7) Minimum volume required for operating only the Thermo-chiller. ( temperature: C, including the Thermo-chiller s internal pipings or heat exchanger) Note 8) Preliminary space volume without main tank capacity. Available for collecting the circulating fluid inside an external piping or for preliminary injection. Note 9) Required flow rate when a load for the cooling capacity is applied at a facility water temperature of 5 C. Note 1) Weight in the dry state without circulating fluids ±.1..1..5 8. 3....5/.35 (at L/min).5/. (at L/min) 8. 3.3 Approx. 15 Approx. 16 Approx. Approx. 17 Approx. 1 Approx. 15 Approx. 15 Approx. 16 Rc3/ Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin 1 to 5.3 to.7 6/6 15/ 18/3 3/ 5/6 9/1 13/1 5/7 13/1 Rc1/ Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase VAC 5 Hz, 3-phase to 8 VAC 6 Hz Allowable voltage fluctuation ±1% 3 6 3 19 6 6 1 3 Refer to page 118. 17 D HRW HEC

Series Cooling Capacity 1-L1/-L1/-L1/8-L1 Cooling capacity (kw) 16 1 8-L1 1 1 8 -L1 6 -L1 1-L1 1 1 3 -W1/8-W1 Cooling capacity (kw) 9 8 8-W1 7 6 5 3 -W1 1 1 1 3 5 6 7 8 9 Heating Capacity 1-L1/-L1/-L1/8-L1 Heating capacity (kw) -W1/8-W1 Heating capacity (kw) 7 8-L1 6 5 -L1 3 -L1 1 1-L1 1 1 3 5 8-W1 -W1 3 1 1-H1/-H1/-H1/8-H1 Cooling capacity (kw) 1 9 8 8-H1 7 6 -H1 5 3 -H1 1 1-H1 3 5 6 7 8 9 1-H1/-H1/-H1/8-H1 Heating capacity (kw) 3 8-H1 -H1 -H1 1-H1 1 3 5 6 7 8 9 1 1 3 5 6 7 8 9 18

Thermo-chiller Series Pump Capacity (Thermo-chiller Outlet) 1-L1/-L1/-L1 -H1/8-H1 -W1/8-W1 8-L1 3.5..3 [Outlet: 6 Hz] [Outlet: 5 Hz] 3.5..3 [Outlet: 6 Hz] [Outlet: 5 Hz] HRG 1..1 [Return port] 1..1 [Return port] HRGC Lifting height Pressure 1 3 (m) (MPa) flow (L/min) 1-H1/-H1.5 Lifting height Pressure 1 3 (m) (MPa) flow (L/min) HRS 3..3 [Outlet: 6 Hz] [Outlet: 5 Hz] 1..1 [Return port] Lifting height Pressure 1 3 (m) (MPa) flow (L/min) When the circulating fluid flow is below 6 L/min, the in-built operation stop alarm will be activated. It is not possible to run the equipment. (common for all models) D HRW HEC 19

Thermo-chiller Clear/Deionized Water Type Series SEMI How to Order Clear/Deionized Water Type 1 L Symbol L Cooling capacity Symbol Cooling capacity 1 1 kw kw kw 8 8 kw Temperature range setting Temperature range setting 1 to C 1 kw kw kw 8 kw Option (Refer to pages 1 and 13.) Nil None C Analog communication D DeviceNet communication N NPT fitting Y DI control kit Z automatic recovery Clear/Deionized water type Specifications (For details, please consult our Product Specifications information.) Model 1-L -L -L 8-L Cooling method Refrigerant Control system Note 1) Ambient temperature/humidity Note ) Temperature range setting Note 1) ( C) Water-cooled refrigeration R13a (HFC) PID control Temperature: 1 to 35 C, Humidity: 3 to 7%RH Clear water, Deionized water 1 to system Note 3) Cooling capacity (kw) Note 3) Heating capacity (kw) Temperature stability Note ) ( C) Pump capacity Note 5) (5/6 Hz) (MPa) Rated flow Note 6) (L/min) Note 7) Main tank capacity (L) Note 8) Sub-tank capacity (L) Port size Wetted parts material Temperature range ( C) Pressure range (MPa) Required flow rate Note 9) (5/6 Hz) (L/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) Alarm Communications Weight Note 1) (kg) Safety standards Cooling water system Electrical system 1..9..98. 1.15 8. 1.5 ±.1.5/.38 (at L/min) Approx. 15 Approx. 16 Rc3/ Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin 1 to 5.3 to.7 5/5 6/6 15/ 18/3 Rc1/ Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase VAC 5 Hz, 3-phase to 8 VAC 6 Hz Allowable voltage fluctuation ±1% 3 19 Refer to page 118. Contact input/output (D-sub 5 pin) and Serial RS-85 (D-sub 9 pin) (Refer to pages 116 and 117.) 17 UL, CE marking, SEMI (S-73, S8-71, F7-), SEMATECH (S-93, S8-95) Note 1) It should have no condensation. Note ) If clear water or deionized water is used, please use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL--199/cooling water system - circulation type - make-up water). The minimum electrical conductivity of the deionized water used as the fluid should be.5 µs/cm (or electrical resistivity MΩcm at maximum). Note 3) q Facility water temperature: 5 C, w flow rate: Values at rated circulating fluid flow rate. Values common for 5/6 Hz. Note ) Value with a stable load without turbulence in the operating conditions. It may be out of this range when a DI control kit (option Y) is used or in some other operating conditions. Note 5) The capacity at the Thermo-chiller outlet when the circulating fluid temperature is C. Note 6) Required flow rate for cooling capacity or maintaining the temperature stability. When used below the rated flow, use the individually sold, By-pass Piping Set (Refer to page 119). Note 7) Minimum volume required for operating only the Thermo-chiller. ( temperature: C, including the Thermo-chiller s internal pipings or heat exchanger) Note 8) Preliminary space volume without main tank capacity. Available for collecting the circulating fluid inside an external piping or for preliminary injection. Note 9) Required flow rate when a load for the cooling capacity is applied at a facility water temperature of 5 C. Note 1) Weight in the dry state without circulating fluids 11

Thermo-chiller Series Cooling Capacity 1-L/-L/-L/8-L Cooling capacity (kw) 1 9 8-L 8 7 6 -L 5 3 -L 1-L 1 1 3 Pump Capacity (Thermo-chiller Outlet) 1-L/-L/-L/8-L 5.5 [Outlet: 6 Hz] 3..3 [Outlet: 5 Hz] Heating Capacity 1-L/-L/-L/8-L Heating capacity (kw) 1.6 1. 1. 1..8.6.. 8-L -L -L 1-L 1 3 HRS HRGC HRG. 1.1 [Return port] Lifting height Pressure 1 3 (m) (MPa) flow rate (L/min) When the circulating fluid flow is below 6 L/min, the in-built operation stop alarm will be activated. It is not possible to run the equipment. (common for all models) D HRW HEC 111

Thermo-chiller Double Inverter Type Series SEMI How to Order Cooling capacity Symbol 1 Specifications Double Inverter Type Cooling capacity 1 kw Symbol Nil 1 type Fluorinated fluids Ethylene glycol aqueous solution Clear water/deionized water 1 W S type Temperature range setting to 9 C to 9 C 1 to 6 C Double inverter type Option (Refer to pages 1 and 13.) Nil None C Analog communication D DeviceNet communication N NPT fitting Y DI control kit Z automatic recovery Not equipped to the fluorinated fluid type. Model 1-WS 1-W1S 1-WS Cooling method Refrigerant Control system Note 1) Ambient temperature/humidity Water-cooled refrigeration RA (HFC) PID control Temperature: 1 to 35 C, Humidity: 3 to 7%RH system Note ) Temperature range setting Note 1) ( C) Note 3) Cooling capacity (kw) Note 3) Heating capacity (kw) ( C) (MPa) (L/min) (L/min) (L) (L) Temperature stability Note ) Note 5) Pump capacity Note 6) Rated flow Note 7) Flow range Note 8) Main tank capacity Note 9) Sub-tank capacity Port size Wetted parts material Temperature range ( C) Pressure range (MPa) Required flow rate Note 1) (5/6 Hz) (L/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) Alarm Communications Weight Note 11) (kg) Safety standards Cooling water system Electrical system to C: Fluorinert TM FC-383/GALDEN HT135 to 9 C: Fluorinert TM FC-/GALDEN HT 1 6% ethylene glycol aqueous solution Clear water, Deionozed water to 9 1 to 6 1 9 5..5.5 ±.1 (In cases when the circulating fluid discharge port and the return port are directly connected) Max..7 (at L/min) Max.. (at L/min) Max..38 (at L/min) 1 to (With flow control function by inverter) Approx. 15 Approx. 16 Rc3/ Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin 1 to 3 1 to 5.3 to.7 15/15 Rc1/ Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Brass 3-phase VAC 5 Hz, 3-phase to 8 VAC 6 Hz Allowable voltage fluctuation ±1% 3 6 5 5 Refer to page 118. Contact input/output (D-sub 5 pin) and Serial RS-85 (D-sub 5 pin) (Refer to pages 116 and 117.) 165 UL, CE marking, SEMI (S-73, S8-71, F7-), SEMATECH (S-93, S8-95) Note 1) It should have no condensation. Note ) Fluorinert TM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Dilute pure ethylene glycol with clear water. Additives such as preservatives cannot be used. If clear water or deionized water is used, please use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL--199/cooling water system - circulation type - make-up water). The minimum electrical conductivity of the deionized water used as the fluid should be.5 µs/cm (or electrical resistivity MΩcm at maximum). Note 3) q Facility water temperature: 5 C, w flow rate: Values at rated circulating fluid flow rate. Values common for 5/6 Hz. Note ) Valuee with a stable load without turbulence in the operating conditions. It may be out of this range when a DI control kit (option Y) is used or in some other operating conditions. Note 5) The capacity at the Thermo-chiller outlet when the circulating fluid temperature is C. Note 6) Required flow rate for cooling capacity or maintaining the temperature stability. When used below the rated flow, use the individually sold, By-pass Piping Set (Refer to page 119). Note 7) May not be able to control with the set value depending on the piping specification in the customer side. Note 8) Minimum volume required for operating only the Thermo-chiller. ( temperature: C, including the Thermo-chiller s internal pipings or heat exchanger) Note 9) Preliminary space volume without main tank capacity. Available for collecting the circulating fluid inside an external piping or for preliminary injection. Note 1) Required flow rate when a load for the cooling capacity is applied at a facility water temperature of 5 C. Note 11) Weight in the dry state without circulating fluids 11

Thermo-chiller Series Cooling Capacity 1-WS/1-W1S Cooling capacity (kw) 1 1 8 6 1 1 3 5 6 7 8 9 Heating Capacity 1-WS/1-W1S/1-WS Heating capacity (kw) Pump Capacity (Thermo-chiller Outlet) 1-WS 1-WS 5 3 7 6 5 3 1 1-W1S 1-WS.5..3 1-WS 1-WS/1-W1S 1 1 3 5 6 7 8 9 1 5.9 [Outlet: Max.].8.7.6 3.5. 1.3..1 [Return port] Lifting height Pressure 1 3 (m) (MPa) flow rate (L/min) The pump capacity of the 1-W1S is same as that of the 1-L1 group on page 19. The pump capacity of the 1-WS is same as on page 111. [Outlet: Max.] 1-WS Cooling capacity (kw) 1 1 8 6 1-W1S 1-WS 1 3 5 6 When pump inverter is operating at frequency of 6 Hz (maximum). 3 1.5..3..1 [Outlet: Max.] [Return port] Lifting height Pressure 1 3 (m) (MPa) flow rate (L/min) HRG HRGC HRS D HRW HEC 1..1 [Return port] Lifting height Pressure 1 3 (m) (MPa) flow rate (L/min) When the circulating fluid flow is below 6 L/min, the in-built operation stop alarm will be activated. It is not possible to run the equipment. (common for all models) With flow control function by inverter 113

OPEN SMC CLOSE SMC OPEN REMOTE RUN ALARM SEL ENT START/STOP RESET Series Common Specifications Dimensions Rear side Front side Emergency off [EMO] switch (Red, ø mm) With a guard ring (yellow) Operation display panel Power cable entry D Cooling fan for the unit inside (exhaust) 85 or less fill port B 55 or less A Breaker handle Model no. label Facility water outlet Rc1/ (with plug) CLOSE Handle return port Rc3/ (with plug) Handle Ventilation (expiration) level gauge outlet Rc3/ (with plug) Main tank drain port Rc3/8 (with valve/plug) C Refrigerant high pressure gauge Drain pan port Rc3/8 (with plug) Facility water inlet Rc1/ (with plug) Bolt for fixing the anti-quake bracket M8 stud bolt Caster (fixed) Caster (unfixed) with brake Bolt for fixing the anti-quake bracket M8 stud bolt Sub-tank drain port Rc3/8 (with valve/plug) (mm) Model Fluorinated fluid type Ethylene glycol type Clear/Deionized water type A B C D 1-H -H 1-H1 -H1 38 87 86 ø18.5 to.5 1-L -L, W -L, H 8-H, W 1-WS 1-L1 -L1, W1 -L1, H1 8-H1, W1 1-W1S 1-L -L -L 8-L 1-WS 38 87 95 ø18.5 to.5 (Dimensional tolerance of A, B, and C: ±1 mm) 11

OPEN SMC CLOSE SMC OPEN REMOTE RUN ALARM SEL ENT START/STOP RESET Thermo-chiller Series Rear side Front side HRG Power cable entry D Cooling fan for the unit inside (exhaust) 85 mm or less B Operation display panel 55 mm or less Breaker handle A HRGC Model no. label Facility water outlet Rc1/ (with plug) CLOSE fill port Handle return port Rc3/ (with plug) level gauge outlet Rc3/ (with plug) Handle C Ventilation (expiration) Refrigerant high pressure gauge HRS Main tank drain port Rc3/8 (with valve/plug) Sub-tank drain port Rc3/8 (with valve/plug) D Facility water inlet Rc1/ (with plug) Drain pan port Rc3/8 (with plug) Caster (unfixed) Caster (unfixed) Level foot Emergency off [EMO] switch (Red, ø mm) With a guard ring (yellow) HRW 1157 53 18 3 987 Anchor bolt location 8 x ø9 HEC Level foot 35 35 375 117 Anti-quake bracket Anti-quake bracket mounting position (Dimensional tolerance: ±5 mm) Anchor bolts (M8, 8 pcs.) which are suitable for the floor material should be prepared by the customer. (mm) Model A B C D Fluorinated fluid type Ethylene glycol type 8-L 8-L1 15 18 175 ø35. to 38. (Dimensional tolerance of A, B, and C: ±1 mm) 115

Series Communication Function (For details, please consult our Communication Specifications information.) Contact Input/Output Item Connector no. Connector type (on this product side) Input signal Open collector output signal Contact output signal (Alarm signal) Contact output signal (EMO signal) Fixing bolt size Insulation method Rated input voltage Operating voltage range Rated input current Input impedance Insulation method Rated load voltage Operating load voltage range Maximum load current Leakage current Surge protection Rated load voltage Maximum load current Rated load voltage Maximum load current Specifications P1 (Refer to the next page for connector location) D-sub 5 P type, Female connector M.6 x.5 Photocoupler VDC 1.6 VDC to 6. VDC 5 ma TYP.7 kω Photocoupler VDC 1.6 VDC to 6. VDC 8 ma.1 ma or less Diode 8 VAC or less/ VDC or less 5 ma AC/DC (resistance load) 8 VAC or less/ VDC or less 8 ma AC/DC (resistance load/inductive load) To the Thermo-chiller Customer s machine side Pin assignment number INT COM INT VDC 1 1 15 VDC output COM output VDC input COM input Circuit diagram.7 kω.7 kω.7 kω.7 kω 3 16 17 6 Setting at the time of shipment from factory Run/Stop signal Recovery signal Operation condition signal Note) Custom function Run/Stop signal 1 Run/Stop signal DIO REMOTE signal 1 DIO REMOTE signal Output signal 1 Input signal Internal circuit 19 Warning signal Output signal 7 Fault signal Output signal 3 8 Remote signal Temp Ready signal Output signal Output signal 5 Output signal 5 18 Alarm signal Alarm signal Emergency off [EMO] switch 13 5 EMO signal EMO signal Note) The custom function is equipped for contact input/output. Using the custom function enables the customer to set the signal type for contact input/output or pin assignment numbers. For details, please consult Communication Specifications information. 116

Thermo-chiller Series Serial RS-85 The serial RS-85 enables the following items to be written and read out. <Writing> Run/Stop temperature setting automatic recovery start/ stop <Readout> present temperature flow discharge pressure electrical resistivity Alarm occurrence information Status (operating condition) information Item Connector no. Connector type (on this product side) Fixing bolt size Standards Protocol Circuit diagram Specifications P D-sub 9 P type, Female connector M.6 x.5 EIA RS85 Modicon Modbus To the Thermo-chiller Customer s machine side SD+ 7 Internal circuit SD HRG HRGC 1 Only when the circulating fluid automatic recovery function (option Z) is selected. Only when the DI control kit (option Y) is selected. 5 SG Connector location P3: Not used for the maintenance purpose port D-sub 9 (Male receptacle) P: Serial RS-85 D-sub 9 (Female receptacle) P1: Contact input/output D-sub 5 (Female receptacle) Power cable entry CLOSE OPEN SMC HEC HRS D HRW Rear side 117

Series Operation Display Panel q TEMP PV. C FLOW PV. LPM PRESS..56 MPa No. LCD Description Function Operating condition of this unit/ discharge temperature/ flow/ discharge pressure/setting value/alarm message, etc. are displayed. i o! r t REMOTE RUN ALARM SEL START/STOP RESET w e u [START/STOP] key [RESET] key [SEL] key [ENT] key [] [] key [] key [REMOTE] indicator [RUN] indicator [ALARM] indicator Starts/Stops the operation. Stops the alarm buzzing. Resets the alarm. Switches the display. Decides the settings. Moves the cursor and changes the setting values. Moves the cursor. Lights up when the unit is in the remote status. Lights up when the unit is in the operating status. Lights up when the unit is alarming. ENT y Alarm This unit can display 7 kinds of alarm messages as standard. Also, it can read out the serial RS-85 communication. Alarm code 1 3 5 6 7 8 9 11 1 13 1 15 16 17 18 19 1 3 Alarm message Water Leak Detect FLT Incorrect Phase Error FLT RFGT High Press FLT CPRSR Overheat FLT Reservoir Low Level FLT Reservoir Low Level WRN Reservoir High Level WRN Temp. Fuse Cutout FLT Reservoir High Temp. FLT Reservoir High Temp. WRN Return Low Flow FLT Return Low Flow WRN Heater Breaker Trip FLT Pump Breaker Trip FLT CPRSR Breaker Trip FLT Interlock Fuse Cutout FLT DC Power Fuse Cutout WRN FAN Motor Stop WRN Internal Pump Time Out WRN Controller Error FLT Memory Error FLT Communication Error WRN DI Low Level WRN Operation status Stop Stop Stop Stop Stop Continue Continue Stop Stop Continue Stop Continue Stop Stop Stop Stop Continue Continue Continue Stop Stop Continue Continue Main reason Liquid deposits in the base of this unit. The power supply to this unit is incorrect. Pressure in the refrigeration circuit has exceeded the limitation. Temperature inside the compressor has increased. The amount of circulating fluid is running low. The amount of circulating fluid is running low. Filling the circulating fluid too much. Temperature of the circulating fluid tank is raised. Temperature of the circulating fluid has exceeded the limitation. Temperature of the circulating fluid has exceeded the limitation set by the customer. The circulating fluid flow has gone below 6 L/min. The circulating fluid flow has gone below the limitation set by the customer. Protection device for the electric circuit of the heater is activated. Protection device for the electric circuit of the circulating pump is activated. Protection device for the electric circuit of the compressor is activated. Overcurrent is flown to the control circuit. Overcurrent has flowed to the (optional) solenoid valve. Cooling fan inside the compressor has stopped. The internal pump continuously run for more than a certain period of time. The error occurred in the control systems. The data stored in the controller of this unit went wrong. The serial communications between this unit and customer's system has been suspended. DI level of the circulating fluid has gone below the limitation set by the customer. (Option) 5 Pump Inverter Error FLT Stop An error has occurred in the inverter for the circulating pump. The alarm is only for the 1-WS. 6 DNET Comm. Error WRN Continue The DeviceNet communications between this unit and customer s system has been suspended. (Only for DeviceNet communication specification - option D) 7 DNET Comm. Error FLT Stop An error has occurred in the DeviceNet communication system of this unit. (Only for DeviceNet communication specification - option D) 8 CPRSR INV Error FLT Stop An error has occurred in the inverter for the compressor. The alarm is only for the 1-WS. 118

Series Optional Accessories 1 By-pass Piping Set Note) Necessary to be fitted by the customer. When the circulating fluid goes below the rated flow, cooling capacity will be reduced and the temperature stability will be badly affected. In such a case, use the by-pass piping set. To circulating fluid return port To circulating fluid outlet x Rc3/ Part no. -BP1 -BP -BP8 Applicable model 1-H/1-H1 -H/-H1 1-L/1-L1 1-L -L/-L1 -L -L/-L1 -L 8-L -H/-H1 8-H/8-H1 -W/-W1 8-W/8-W1 1-WS 1-W1S 1-WS 8-L/8-L1 HRG HRGC HRS By-pass volume adjustment valve Insulating material Mounting view (Rear side) Approx. 16 mm D Anti-quake Bracket Bracket for earthquakes Prepare the anchor bolts (M1) which are suited to the floor material by the customer. Part no. Applicable model 1-L/-L/-L/8-L 1-H/-H -TK -H/8-H -W/8-W/1-WS Note 1) pieces per set (for 1 unit) (-TK-) Note ) Anti-quake bracket is attached as standard. (8-L, 8-L1) 9 HRW HEC pieces per set ( nuts are included.) Anchor bolt (M1) Front side Anti-quake bracket -TK 111 Anti-quake bracket Top side Anchor bolt location x ø1 Nut (M8) x (Accessory to anti-quake bracket) Fit it on the opposite side similarly. 16 Front side 119

Series Optional Accessories -Port Manifold -branching the circulating fluid enables temperature controls at the maximum with the 1 unit Thermo-chiller. Part no. -MA1 Applicable model Common for all models x Rc1/ Mounting view (Rear side) Approx. 1 mm pcs./set DI Filter This is the ion replacement resin to maintain the electrical resistivity of the circulating fluid. Customers who selected the DI control kit (option Y) need to purchase the DI filter separately. Part no. -DF1 Applicable model Common for all models which can select the DI control kit. (option Y) Note) The DI filters are consumable. Depending on the status (electrical resistivity set value, circulating fluid temperature, piping volume, etc.), product life cycles will vary accordingly. Insulating Material for DI Filter When the DI filter is used at a high-temperature, we recommend that you use this insulating material to protect the radiated heat from the DI filter or possible burns. When the DI filter is used at a low-temperature, we also recommend that you use this to prevent heat absorption from the DI filter and to avoid forming condensation. Part no. -DF Applicable model Common for all models which can select the DI control kit. (option Y) Approx. 58 mm Approx. ø mm Weight: Approx. kg 1

Thermo-chiller Series 6% Ethylene Glycol Aqueous Solution Concentration Meter This solution can be used as a circulating fluid for ethylene glycol-type Thermo-chillers. (Capacity: 1 L) This meter can be used to control the condensation of ethylene glycol solution regularly. Part no. -BR1 Applicable model Common for all ethylene glycol-type models Part no. -BR Applicable model Common for all ethylene glycol-type models Approx. 8 mm Approx. 3 mm Approx. 17 mm Approx. 35 mm Approx. 3 mm HEC HRGC HRS HRW D HRG 11

Series Options Note) Options have to be selected when ordering the Thermo-chiller. It is not possible to add them after purchasing the unit. C Option symbol Analog Communication D Option symbol DeviceNet Communication Analog communication N Option symbol NPT Fitting C In addition to the standard contact input/output signal communication and the serial RS-85 communication, analog communication function can be added. The analog communication function enables to write and read out the following items. <Writing> temperature setting Only when the DI control kit (option Y) is selected. <Readout> present temperature Electrical resistivity Scaling voltage - circulating fluid temperature can be set arbitrarily by the customer. For details, please consult our Communication Specifications information. DeviceNet communication D In addition to the standard contact input/output signal communication and the serial RS-85 communication, DeviceNet function can be added. DeviceNet function enables to write and read out the following items. <Writing> Run/Stop temperature setting automatic recovery start/stop 1 <Readout> present temperature flow discharge pressure Electrical resistivity Alarm occurrence information Status (operating condition) information 1 Only when the circulating fluid automatic recovery function (option Z) is selected. Only when the DI control kit (option Y) is selected. For details, please consult our Communication Specifications information. Y NPT fitting Option symbol N DI Control Kit An adapter is included to change the connection parts of circulating fluid piping and facility water piping to NPT thread type. The adapter must be installed by the customer. DI control kit Y Select this option if you want to maintain the electric resistance ratio (DI level) of the circulating fluid at a certain level. However, some components have to be fitted by the customer. For details, refer to specification table for this option. Please note that this is not applicable to the fluorinated liquid type. Applicable model -L1-Y -H1-Y -W1-Y 1-W1S-Y -L-Y 1-WS-Y Allowable circulating fluid DI level display range DI level set range DI level reduction alarm set range MΩcm MΩcm MΩcm 6% ethylene glycol aqueous solution to to. Note) to. Deionized water Note) The DI filter is needed to control the DI level. (SMC Part No.: -DF1) Please purchase additionally because the DI filter is not included in this option. Also, if necessary, additionally purchase the insulating material for the DI filter. (SMC Part No.: -DF) Rc3/ DI tube (1 piece each attached for IN/OUT) 1 Install the DI filter outside the thermo-chiller for piping. Secure the space for installing the DI filter on the rear side of the Thermo-chiller. It may go outside of the temperature stability range of ±.1 C when this option is used in some operating conditions. Approx. 156 mm DI filter (Optional accessories) (Refer to page 1.) Please order separately.

Thermo-chiller Series Z Option symbol Circulating Fluid Automatic Recovery automatic recovery Z Select this option for customers who want to use the circulating fluid automatic recovery function. The automatic recovery function is a device which can recover the circulating fluid inside pipings into a sub-tank of the Thermo-chiller by the external communication or operating display panel. Some components need to be fitted by the customer. For details, please consult Product Specifications information for these options. Note 1) recoverable volume Purge gas Purge gas supply port Purge gas supply pressure Purge gas filtration Regulator set pressure Recoverable circulating fluid temperature Recovery start/stop Timeout error Applicable model Height difference with the customer system side L MPa µm MPa C sec m 1-H-Z 1-H1-Z -H-Z -H1-Z 1-L-Z 1-L1-Z -L-Z -L1-Z -L-Z -L1-Z -H-Z -H1-Z 8-H-Z 8-H1-Z 1-L-Z -L-Z -L-Z 8-L-Z -W-Z -W1-Z 8-W-Z 8-W1-Z 1-WS-Z 1-W1S-Z 1-WS-Z 8-L-Z 8-L1-Z 15 16 17 Nitrogen gas Self-align fitting for O.D. ø8 Note ). to.7.1 or less Note 3).15 to.3 1 to 3 Start: External communication Note ) or operation display panel / Stop: Automatic Timer from recovery start to completion Stops recovering when the timer turns to set time. Possible set range: 6 to 3, at the time of shipping from the factory: 3 1 or less Note 1) This is the space volume of the sub-tank when the liquid level of the circulating fluid is within the specification. Guideline of the recovery volume is 8% of the circulating fluid recoverable volume. Note ) Before piping, clean inside the pipings with air blow, etc. Use the piping with no dust generation by purge gas. When using resin tube, where necessary, use insert fittings, etc. in order not to deform the tubings when connecting to self-align fittings. Note 3) At the time of shipping from factory, it is set to. MPa. Note ) For details, please consult our Communication Specifications information. HEC HRW D HRS HRGC HRG Rc3/ Approx. 11 mm 13

Series Specific Product Precautions 1 Be sure to read this before handling. Refer to back page 1 for Safety Instructions and back pages to 5 for Temperature Control Equipment Precautions. Design Warning 1. This catalog shows the specifications of a single unit. 1. For details, please consult our Product Specifications and thoroughly consider the adaptability between the customer s system and this unit.. Although the protection circuit as a single unit is installed, the customer is requested to carry out the safety design for the whole system. Caution Warning Selection 1. Model selection In order to select the correct Thermo-chiller model, the amount of thermal generation from the customer s system, the operating circulating fluid, and its circulating flow are required. Select a model, by referring to the guideline to model selection on page 1.. Option selection Options have to be selected when ordering the Thermo-chiller. It is not possible to add them after purchasing the unit. Handling 1. Thoroughly read the Operation Manual. Read the Operation Manual completely before operation, and keep this manual available whenever necessary. Operating Environment/Storage Environment Caution 1. Do not use in the following environment because it will lead to a breakdown. 1. Environment like written in Temperature Control Equipment Precautions.. Locations where spatter will adhere to when welding. 3. Locations where it is likely that the leakage of flammable gas may occur.. Locations where the ambient temperature exceeds the limits as mentioned below. During operation 1 C to 35 C During storage C to 5 C (but as long as water or circulating fluid are not left inside the pipings) 5. Locations where the ambient relative humidity exceeds the limit as mentioned below. During operation 3% to 7% During storage 15% to 85% 6. (Inside the operation facilities) locations where there is not sufficient space for maintenance. 7. In locations where the ambient pressure exceeds the atmospheric pressure.. The Thermo-chiller does not have clean room specification. It generates dust from the pump inside the unit and the cooling fan for the unit inside. Circulating Fluid Caution 1. Avoid oil or other foreign objects entering the circulating fluid. 1 Standard item Reference item Circulating Fluid. Use ethylene glycol that does not contain additives such as preservatives. 3. The condensation of ethylene glycol aqueous solution must be 6% or less. If the density is too high, the pump will be overloaded, resulting in occurrence of Pump Breaker Trip FLT. Also, if the density is to low, the unit will freeze at lower temperatures, resulting in product failure.. Avoid water moisture entering the fluorinated fluid. Otherwise, the unit will freeze, resulting in product failure. 5. Use clear water (including for diluting ethylene glycol aqueous solution) which must meet the water quality standards as mentioned below. Clear Water (as Circulating Water) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL--199 Cooling water system Circulating type Supply water Item Unit Standard value ph (at 5 C) 6. to 8. Electrical conductivity (5 C) [µs/cm] 1 1 to 3 Chloride ion [mg/l] 5 or less Sulfuric acid ion [mg/l] 5 or less Acid consumption amount (at ph.8) [mg/l] 5 or less Total hardness [mg/l] 7 or less Calcium hardness [mg/l] 5 or less Ionic state silica [mg/l] 3 or less Iron [mg/l].3 or less Copper [mg/l].1 or less Sulfide ion [mg/l] Should not be detected. Ammonium ion [mg/l].1 or less Residual chlorine [mg/l].3 or less Free carbon [mg/l]. or less 1 Electrical conductivity ratio should be 1 [µs/cm] or more. In the case of [MΩcm], it will be.3 to.1. Transportation/Transfer/Movement Warning 1. Transportation by forklift 1. It is not possible to hang this product.. The fork insertion position is either on the left side face or right side face of the unit. Be careful not to bump the fork against a caster or level foot and be sure to put through the fork to the opposite side. 3. Be careful not to bump the fork to the cover panel or piping ports.. Transportation by casters 1. This product is heavy and should be moved by at least two people.. Do not grip the pipings on the rear side or the handles of the panel. Fork insertion side Rear side Front side Fork insertion side

Series Specific Product Precautions Be sure to read this before handling. Refer to back page 1 for Safety Instructions and back pages to 5 for Temperature Control Equipment Precautions. Caution Mounting/Installation 1. Avoid using this product outdoors.. Install on a rigid floor which can withstand this product s weight. 3. Install a suitable anchor bolt for the anti-quake bracket taking into consideration the customers floor material.. Avoid placing heavy objects on this product. Caution Piping 1. Regarding the circulating fluid pipings, consider carefully the suitability for shutoff pressure, temperature and circulating fluid. If the operating performance specifications are regularly exceeded, the pipings may burst during operation.. The surface of the circulating fluid pipings should be covered with the insulating materials which can effectively confine the heat. Absorbing the heat from the surface of pipings may reduce the cooling capacity performance and the heating capacity may be shortened due to heat radiation. 3. When using fluorinated liquid as the circulating fluid, do not use pipe tape. Liquid leakage may occur around the pipe tape. For sealant, we recommend that you use the following sealant: SMC Part No., -S3 (Silicone sealant). For the circulating fluid pipings, use clean pipings which have no dust, oil or water moisture inside the pipings, and blow with air prior to undertaking any piping works. If any dust, oil or water moisture enters the circulating fluid circuit, inferior cooling performance or equipment failure due to frozen water may occur, resulting in bubbles in the circulating fluid inside the tank. 5. The reciprocating total volume of the circulating fluid pipings must be less than the volume of the sub-tank. Otherwise, when the equipment is stopped, the in-built alarm may activate or the circulating fluid may leak from the tank. Refer to the specifications table for the sub-tank volume. 6. Select the circulating fluid pipings which can exceed the required rated flow. For the rated flow, refer to the pump capacity table. 7. For the circulating fluid piping connection, install a drain pan just in case the circulating fluid may leak. 8. Do not return the circulating fluid to the unit by installing a pump in the customer system. 1-L -L -L 1-L1 -L1 -L1 1-L -L -L 8-L Caution 8-L 8-L1 1-WS 1-W1S 1-WS 1-H -H -H 8-H 1-H1 -H1 -H1 8-H1 -W 8-W -W1 8-W1 Electrical Wiring 1. Power supply and signal cable should be prepared by the customer.. Provide a stable power supply which is not affected by surge or distortion. If the voltage increase ratio (dv/dt) at the zero cross should exceed V/ µsec., it may result in a malfunction. 3. This product is installed with a breaker with the following operating characteristics. For the customer s machine (inlet side), use a breaker whose operating time is equal to or longer than the breaker of this product. If a breaker with shorter operating time is connected, the customer s machine could be cut off due to the inrush current of the motor of this product. Breaker Operating Characteristics Applicable model Operating time Operating time h h 1h 3min 1min min 6min 1min min min 1min 3s s 1s 5s s 1s.5s.s.1s.5s.s.1s 1 6 1 13 3 5 7 15 3 Current (% for chiller main breaker volume) h h 1h 3min 1min min 6min 1min min min 1min 3s s 1s 5s s 1s.5s.s.1s.5s.s.1s Voltage Min. Min. Max. Max. Voltage increase ratio Time 1 6 1 13 3 5 7 15 3 Current (% for chiller main breaker volume) HRG HRGC HRS D HRW HEC 15

Series Specific Product Precautions 3 Be sure to read this before handling. Refer to back page 1 for Safety Instructions and back pages to 5 for Temperature Control Equipment Precautions. Caution Operation 1. Confirmation before operation 1. The circulating fluid should be within the specified range of HIGH and LOW.. Be sure to tighten the cap for the circulating fluid port until the click sound is heard.. Emergency stop method In the case of an emergency, press down the EMO switch which is fitted on the front face of this product. Caution Operation Restart Time 1. Wait five minutes or more before restarting operation after it has been stopped. If the operation is restarted within five minutes, the protection circuit may activate and the operation may not start properly. Warning Maintenance 1. Do not operate the switch with wet hands or touch electrical parts such as an electrical plug. This will lead to an electrical shock.. Do not splash water directly on this product for cleaning. This will lead to an electrical shock or a fire. 3. When the panel was removed for the purpose of inspection or cleaning, mount the panel after works were done. If the panel is still open, or running the equipment with the panel removed, it may cause an injury or electric shock. Caution 1. In order to prevent a sudden product failure of the unit, replace the replacement parts every 36 months.. Perform an inspection of the circulating fluid every 3 months. 1. In the case of fluorinated fluids: Discharge the circulating liquid and avoid any dirty objects, or water moisture, or foreign objects entering the system.. In the case of ethylene glycol aqueous solution: Maintain the condensation at 6%. 3. In the case of clear water, deionized water: Replacement is recommended. 3. Check the water quality of cooling water every 3 months. Regarding the water quality standards for cooling water, refer to Temperature Control Equipment Precautions. 16

Circulating Fluid Temperature Controller Refrigerated Dual Thermo-chiller (Double inverter type) Series D Temperature for two systems can be controlled separately by one chiller. HRGC HRS Example Temperature control of chamber electrode CH1 CH D HRG Double inverter type More effective energy-saving is achieved through use of a DC inverter compressor and an inverver pump. Power consumption: Reduced by 8%. kwh/h (Conventional model: 13.8 kwh/h) Facility water consumption: Reduced by 9% L/min (Conventional model: L/min) Conditions: temperature 1 C, Galden HT135 x L/min, Piping 3/ inch x m, Idling 5%, Process 5% operation with kw customer load, 6 Hz Reduced wiring, piping and labor Single power cable, single facility-water piping system International standards: SEMI Standard S-76, S8-38, F7-76 Energysaving Spacesaving.51 m Footprint reduced by 3% D 1 unit 6 85 1 76.66 m units 87 Switchover from the conventional model is also possible. 17 HRW HEC

Series D Temperature range setting: 3 to 9 C (Fluorinated fluid) Temperature stability: +.1 C flow range: 1 to L/min Cooling capacity: Max. 1 kw x ch Type of circulating fluid: Galden Fluorinert Ethylene glycol aqueous solution Communications: Contact input/output (Standard equipment) Serial RS-85/RS-3C Analog communication (Selectable on the touch panel) Leakless All in Tank Accommodation of a pump and a heat exchanger inside the tank can eliminate the external leakage of circulating fluid. Heat exchanger Pump Specifications (Fluorinated Fluid Type) Model Channel Cooling method Cooling capacity Note 1) (kw) Temperature range setting ( C) Temperature stability ( C) flow range Note 3) (L/min) Refrigerant Pump capacity Note 5) (MPa) Main tank capacity Note 6) (L) Sub-tank capacity Note 7) (L) connection port size (Outlet/Return port) Facility water ( C/MPa) Facility water required flow rate Note 8) (L/min) Facility water connection port size (Inlet/Outlet) Power supply Main breaker capacity (A) Dimensions Note 9) (mm) Weight Note 1) (kg) Communications Dimensions D-WS-WS 1 Water-cooled refrigeration 9.5 ( temperature at C) 9.5 ( temperature at C) 3 to 9 3 to 9 ±.1 Note ) ±.1 Note ) 1 to 1 to 3 to C: Galden HT135 Note ) Fluorinert FC-383 Note ) to 9 C: Galden HT Note ) Fluorinert FC- Note ) RA (HFC) RA (HFC) Max..7 (at L/min) With flow control function by inverter Max..7 (at L/min) With flow control function by inverter Approx.15 Approx.15 Approx.16 Approx.16 Rc3/ Rc3/ 1 to 35 /.3 to.7 15 (Facility water temperature at 5 C) 15 (Facility water temperature at 5 C) Rc1/ (Single system for Channel 1, ) 3-phase, 5/6 Hz, AC, to 8 V ±1% 6 W6 x D85 x H155 38 Serial RS-85/RS-3C (D-sub9 pin), Contact input/output, Analog input/output (D-sub5 pin) 85 Note 1) Values of facility water at 5 C, circulating fluid flow rate L/min. Values when the heat generation source is directly connected to the circulating fluid circuit in this product. Common for 5/6 Hz. Note ) Values may go beyond the specified range depending on the operating condition. Note 3) Depending on the piping specifications of the customer system, it may not be controlled by the set value. Note ) Galden is a registered trademark of Solvay Solexis, Inc. Fluorinert is a trademark of 3M. Note 5) temperature at C, Capacity at the outlet on this product. Common for 5/6 Hz. Note 6) Minimum volume required for operating this product only. ( temperature at C, including volume for the piping and the heat exchanger inside this product) Note 7) Preliminary space volume without main tank capacity. Use for collecting circulating fluid inside the external piping or for preliminary injection. Note 8) Required flow rate during the temperature drop. Possible to operate this product at approx. 1 to L/min when there is no load. Note 9) Dimensions between panels, not including the dimensions of protrusion such as a breaker handle. Note 1) Weight in the dry state without circulating fluids 6 155 18