Overview of VTT s activities in photonics, semicon, MEMS and printed intelligence

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Overview of VTT s activities in photonics, semicon, MEMS and printed intelligence Timo Aalto, Jussi Hiltunen Finnish-Dutch matchmaking mission, October 4, 2018, Nijmegen, The Netherlands 15.10.2018 VTT beyond the obvious 1

VTT Technical Research Centre of Finland Ltd BASIC RESEARCH UNIVERSITIES APPLIED RESEARCH SODANKYLÄ OULU KAJAANI DEVELOPMENT INDUSTRY KUOPIO JYVÄSKYLÄ OUTO- KUMPU TAMPERE ESPOO 15.10.2018 VTT beyond the obvious

VTT Technical Research Centre of Finland Ltd VTT Group: VTT VTT Memsfab VTT Ventures Established in 1942 269 M Net turnover and other operating income (VTT Group 2016) 2,368 Total of personnel (VTT Group 2017) www.vttresearch.com #vttpeople @VTTFinland Owned by Ministry of Economic Affairs and Employment 33% 27% Doctorates and Licentiates (VTT Group 2017) 15.10.2018 VTT beyond the obvious from abroad (VTT Group 2016)

R&D and pilot production infrastructures Micronova, Espoo 2 600 m² Class 10-100 150 mm wafers PrintoCent, Oulu R2R pilot environment for printing and hybrid manufacturing 15.10.2018 VTT beyond the obvious

Silicon photonics on 3 µm SOI Extreme light confinement: SM rib waveguides MM strip waveguides 15.10.2018 VTT beyond the obvious Euler bend Long & compact delay lines Benefits of Thick-SOI : Low optical losses (0.1 db/cm) Ultra-dense integration Dual-polarization operation Tolerates high optical power Ultra-broadband SM operation Under development: Fast modulators & PDs Monolithic isolator Monolithic spot-size conversion for SSMF We are looking for III-V chips and partners for scalable assembly/packaging

Hyperspectral imaging Miniaturization enables novel applications Tunable MEMS FPI processes Customized miniaturized hyperspectral imaging solutions based on Fabry-Perot interferometers UV, visible and NIR to SWIR and thermal IR Expertise in designing and realizing demanding HSIs for high-performance applications in space, medical, remotesensing drones and precision agriculture MEMS-based high-volume scalable technology for mobile and IoT: spectral imaging for autonomous systems, smart homes and consumer health We re looking for R&D partnerships to develop novel applications: EU projects, partners with HSI data processing and algorthims expertise, end users HSI with AI for skin cancer detection Scalable, low-cost HSIs UV SOx and NOx detection Hyperspectral iphone demo CubeSat & drone instruments for 500 nm 3 µm anna.rissanen@vtt.fi VTT beyond the obvious 6

Hyperspectral imaging: Impact through commercialization Collaboration examples for generating award-winning spectral sensing products 2018 CubeSat imaging Three Prism Award Finalists Two Prism Award Winners 2016 High-volume NIR sensor 2015 Skin Cancer Screening Pioneering AI product in health care 2018 2013 VTT Spin-off 2017 EU food scanner award anna.rissanen@vtt.fi 2012 Rikola

Nanoelectronics Current offering: Radiation and photo detectors Tunnel junction and superconductive devices Graphene devices and integration Thermal devices Custom CMOS On-going & future developments: Nano-bolometer detector matrix for thermal IR Quantum information systems on-chip Nano-phononic filters and sensors Megapixel X-ray detector for dental X-ray Graphene based bioassays for diagnostics and components for integrated photonics 2D material based sensors on flexible platform 15.10.2018 VTT beyond the obvious Contact: mika.prunnila@vtt.fi Uncooled nanobolometer 100 nm Electrode of in-chip supercapacitor X-ray detector Graphene Biosensor

MEMS Manufacturing Sensor Platform Surface micromachining platform Piezo platform (AlN, ScAlN) SOI Platform 15.10.2018 VTT beyond the obvious Pressure sensor Ultrasound transmitter or receiver (CMUT) Ultrasound transmitter/ receiver (PMUT) AE sensor Acceleration Micro mirros Application Barometric pressure Inertial navigation Height detection Differential pressure Flow sensor Liquid level detection Flow sensor NDT testing Near field communication Cylinder pressure sensor Imaging Proximity sensing Gesture based user interface 3D positioning Machine diagnostics NDT testing Lidar technology Space communication

Printed Intelligence Is large area high-volume printing to produce systems and sub-systems functionality from electronics, biotechnology, chemistry, optics, optoelectronics, etc. integrated as devices and systems Impression roll Doctor blade Film Printing roll Production chain System & sub-system integration Devices Ink Materials 15.10.2018 VTT beyond the obvious 10

Roll-to-Roll Printed & Hybrid Functionalities Design Freedom, New functionalities and concept architectures by printing Thin, flexible, light-weight, stretchable, large area, transparent, decorative, interactive Integration Embedded/hidden, conformal, easy-to-install, reduced volume, easy-to-use Cost-effective production High-volume Roll-to-Roll manufacturing, disposable, small material usage

Hybrid integration Manufacturing Printing of electrical wiring Surface structuring Integration of electrical components Overmolding Collaboration needs printing materials, process equipment, semiconductors, standardization 15.10.2018 VTT beyond the obvious 12

Optical Sensors and Instruments > 30 Years Experience to Develop and Deliver Optical Measurement Solutions KEY COMPETENCES Innovation of Optical Measurement Methods and Systems System and Concept Design for Demanding Applications Optics, Sensor and Instrument Development from Idea to Pre-commercial Prototypes CUSTOMERS Process and Manufacturing Industry Pharma, Agriculture, Food, Military Equipment Suppliers FUTURE DEVELOPMENT EXAMPLES Low-cost Hyperspetrcal Imaging Applications Cloud Based Sensor Networks Hand-held, Miniature Devices 15.10.2018 VTT beyond the obvious 13

Time-gate Raman system Collaboration needs Single-photon detector arrays, high-power ps lasers 15.10.2018 VTT beyond the obvious 14