MCD200-NPP 01 1 pce. MCD200- NPP POLOS Single Wafer Spin Processor for Manual Dispense for up to 200 mm diameter substrates: Autoselect 100-120VAC, 200-240VAC, 50/60Hz, with CE-Compliance Full-Plastic System in Polypropylene NPP (PTFE (TFM ) is optionally available) Table-Top Model (Footprint: 40cm x 34cm, Inside Bowl Ø30cm) For Fragments and Substrates up to max. 200mm (8 ) Incl. (1) pce. Vacuum Chuck A-V87-S96 with (1) pce. Wafer Centering Tool for (1) Wafer Size, please specify 4, 5, 6 or 8 Wafers, in NPP or: (1) pce. A-V36-S45 with Fragment Adapter D-V10- S50-PP, in NPP (Alternative Chucks optionally available) Clear Glass Transparent Lid with central 19mm hole for Manual Chemical Liquid Dispense (Note : Manual Syringe Dispense Needle Kits or Auto Dispense Needle Systems, with or without N 2 Nitrogen Diffuser etc. are optionally available) Easy, step-by-step Programming via Gloved-Finger-Friendly Keyboard with LED Backlit Display Programmable Storage of 50 Programs with 99 steps / each for: Time 1-999 sec/step, Speed 1-6.000 RPM +/- 1 RPM real speed accuracy, Acceleration/Dec. 1-3.000 RPM/Sec. +/- 1 RPM/Sec., Vacuum On/Off Digitally controlled Motor with digital incremental speed signal feed back 2 Programmable Switch Contacts: e.g. for Dispense On/Off, Nitrogen On/Off, etc. Drain connection 1¼ female NPT with Exhaust Hose Requires min. 27 Hg > 100 LPM House Vacuum Supply or (optional) Vacuum Pump Drain and Nitrogen Purge Port Safety door Interlock - Please specify Substrate size(s) when ordering. - Photo left shows Table Base System Vacuum Chuck A-V87-S96 for 8 Wafer or : Vacuum Chuck A-V36-S45 for 6 Substrates with Fragment Adapter D-V10-S50-PP (max. 50mm) (press-fit onto the Vacuum Chuck) TFM Teflon is a registered trademark of Dupont.
MCD200-NPP: OEM version: Polos MCD200-NPP is also available as recessed In-Deck OEM unit, with remote control panel, or in PTFE (TFM ). 02 1 pce. OEM Unit for Recessed In-Deck Installation To recess build-in in to your wetbench Separate Remote Keyboard Control Panel for installation at the Frontside of the Wetbench (note : table top model has integrated Keyboard.) MCD200-NPP.doc 2
OPTIONS: ALL POLOS MODELS: 03 1 pce. PTFE MCD200-PTFE (Item 01) in PTFE (Teflon ) instead of Natural Polypro, with PTFE chucks 04 1 pce. HS High Speed option 1 up to 10.000 rpm +/- 1 rpm 05 1 pce. DET Drain/Exhaust Port Separation TEE (screws on to Rear of the System) 06 1 pce. VP-80 Vacuum Pump Oil Free (heavy duty) Vacuum Pump, Rotary Vane type For 230 VAC 50 Hz CE For 100 LPM 27-30 Hg operation Incl. 1,5 mtr. ¼ Diam. Vacuum Line tubing 07 1 pce. FS-x Additional Wafer Centering Tool in NPP Specify one Diameter Wafer /Tool at order 08 1 pce.. VW Vacuum Wand set in ESD safe PEEK for loading / unloading Substrates or Wafers between Cassette and System, Includes : NOPPF2AS Vacuum Wand T693PKAS/3 Vacuum Tip for max. 8 Wafers (or T692PKAS for up to 6 wafers ) HSU Wand Holder auto Shut Off in NPP Coiled / Vacuum Tube, extendable 11 to 74 MCD200-NPP.doc 3
MCD200-NPP: OPTIONS: 09 1 pce. PD N 2 Diffuser +10mm hole and plug for Pipette Dispense Provision Must be ordered with unit. (Picture shows PD on SPIN150) 10 1 pce. DOME Dome Shaped Lid for MCD System only in C-PVC or ECTFE (Note: Material Choice pending application and availability) 11 1 pce. SHSK Syringe Holder Starter Kit Includes starting Dispense Holder Kit : (5) 30cc Volume Dispense Barrel (2) White clear Polypro Plungers (5) 18 gauge St. St. Needles (5) 25 gauge St. St. Needles. (5) 18 gauge Polypro Flexible Needles (5) 25 gauge Polypro Flexible Needles (5) Needle End Caps Note: Consumable Kits with different Needle diameters for accurate choice depending on Liquid Viscosity etc. are available at request, starter Kit is a set of the most commonly used parts. MCD200-NPP.doc 4
MCD200-NPP: OPTIONS: 12 1 pce. DS-1400 DS-1400 Semi Automatic Dispense System For programmable +/- 0,1 cc accurate Dispense (note : Standard is Model DS-1400 (0-100 PSI CDA or N2, for All Fluids or customer specify model DS-1415 (0-15 PSI CDA or N2 for Watery Fluids) Includes : Dispense Timer 0,001-99,9 sec/dispense Press. Regulator / Gauge for N2 or filtered CDA Adjustable Suck-Back, prevents dripping after Dispense (0-1 Bar for Watery Liquids) Per Step Programmable Dispense On/Off. 9 Pins DBU9/Cable Interface w. SPIN150-V3 Foot Switch for Start/Stop Dispense w. Cable Syringe Barrel Dispense Starter Kit, Includes : (2) Standard 30 cc Barrels with white Plunger (1) Box 50 pcs. Needles one type at Choice, (1) Box 50 pcs. End Caps, (1) 1000Y5152 Adapter Pneumatic Plunger (1) 1000FLT-Y Filter prevents backflow Liquid (1) 7154 9 Pins Connector for extern Start/Stop (1) 2170FT Clean-room Muffler (1) 5 µ CDA or N2 Pressure Regulator (Note : see optional Consumables below for Choice of adequate Needles etc.. - Manual fine accurate control is a function of trial and error of N 2 or CDA pressure/needle diameter and time versus Liquid Viscosity, we recommended most common starter combination - System requires on site provided Filtered - Pressure/Flow controlled CDA or Nitrogen and Vacuum, Needle Valve Restrictor in Vacuum and CDA is recommended) MCD200-NPP.doc 5