Vacuum related component model series variation

Vacuum related component model series variation Vacuum related components Vacuum pad Vacuum ejector/vacuum unit <Vacuum break unit> VSLF series <Vacuum filter> VSFB Series VSFU Series Series <Vacuum sensor> The vacuum release air is controlled while maintaining the vacuum of the vacuum ejector. Reduction of vacuum release time realized by vacuum release circuit relief function. Series large capacity union type Dust and water drops are eliminated with the cyclone effect and element. The entire dust case is removed with a single touch, preventing dust from scattering. compact union type Tools are not required to replace or clean the element. In-line types are easily installed in piping. Model No. VSLF-44 VSLF-66 VSLF-46A VSLF-66A Model No. VSFB-66 VSFB-88 VSFB-1010 VSFB-1212 VSFU-1S VSFU-1L VSFU-2 VSFU-3 Port size Vacuum generator side ø4 ø6 ø4 ø6 Port size Work piece side ø4 ø6 R1/8 R1/8 M5 ø4 ø6 ø8 ø10 ø12 Remarks Remarks Filtration area: 2.8cm 2 Filtration area: 4.7cm 2 Filtration area: 7.5cm 2 Filtration area: 12.5cm 2 Page 405 405 405 405 Page 411 411 411 411 411 411 411 411 VSUS series Series 2-point output and analog output types are available. Push-in joint, M5 female thread, or direct installation piping connection is selectable. With LED display Model No. VSUS-NW VSUS-NA VSUS-PW VSUS-PA M5 ø4 Port size ø6 ø8 Direct installation Remarks NPN: 2-point output NPN: Analog output PNP: 2-point output PNP: Analog output Page 421 421 421 421 <Air pincette> Series Model No. Pad diameter ø2 ø4 ø6 ø8 Rubber material Holder shape Page VST series The vacuum pad and ejector are integrated into a pen shape component. Ideal for assembling small parts. A package type is also available. VST-A*N VST-A*S VST-B*N VST-B*S Nitrile rubber Silicon rubber Nitrile rubber Silicon rubber No valve No valve Valve integrated Valve integrated 427 427 427 427 : Standard : Option 403

MEMO Inch/NPT specifications Vacuum related components 404

Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Vacuum release control valve with release air flow rate and relief pressure adjustment needle Vacuum release unit VSLF series Features This vacuum release unit for the vacuum ejector has a vacuum release mechanism. The vacuum release air is controlled while maintaining the vacuum of the vacuum ejector. Vacuum ejector unit Vacuum air Vacuum air Vacuum pad Vacuum release air Release pressure adjusting needle Vacuum release air (controlled flow) Release flow rate adjusting needle Pressure control is added to the vacuum release air's flow rate control to prevent work pieces from popping off. A relief mechanism to release excess pressure in the vacuum release circuit shortens vacuum release time. Vacuum pad Extremely small light work piece Pressure control is added to vacuum release air flow rate control * Vacuum break air is air passed to release the vacuum state. Break time is shortened by attaching this valve to the vacuum release circuit. The rotating resin body and joint enable the tube to be led out in any direction. Specifications 405 Working fluid Working pressure range Relief valve working pressure setting range Working vacuum pressure Ambient temperature range Air 0 to 0.7MPa -0.015 to 0.015MPa 0 to -101kPa 0 to 60 C (To be unfrozen.)

VSLF series Structure drawing (VR port: push in joint, W port: taper screw type) Release ring (Polyacetal) Tube Vacuum side port (VR) Lock nut (aluminum) Lock jaw (stainless) Resin body (PBT) Metal body (brass, nickel plating) Lock nut (aluminum) Vacuum release relief pressure adjusting needle (brass, nickel plating) Valving element (aluminum) Check packing (nitrile rubber) Order type (Example) Vacuum release flow rate adjusting needle (brass, nickel plating) Pad side port (W) VSLF (1) 6 (2) 6 (3) (1) Vacuum release unit: VSLF (3) Pad side connection port size Tube size Tube size Metric size 4 6 Port size (mm) ø4 ø6 Screw size Screw size Taper screw for pipes 6A Port size (mm) R1/8 (2) Vacuum side connection port size Tube size Metric size 4 6 Port size (mm) ø4 ø6 Vacuum related components Inch/NPT specifications 406

VSLF series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Special precautions 1. There is a set air control flow direction for the vacuum release unit. Read this manual thoroughly and check the direction before using. An incorrect control direction could cause personal injury or device damage. CAUTION WARNING 2. Do not use fluids other than air. Contact CKD when using for fluids other than air. 3. Do not pull, twist, bend, etc., the product, and do not drop or apply excessive impact to it. The valve could break. 4. Securely tighten the lock nut by hand instead of using a tool. The lock nut or main unit could be damaged if the lock nut is tightened with a tool. If the lock nut is not accurately tightened, it could loosen and cause initial settings to deviate. 5. Do not use this product in applications where the inner pressure between the vacuum ejector and vacuum release unit is 0.2 MPa or more. The vacuum ejector could break. 1. Read and understand this manual before adjusting the vacuum release air flow rate or vacuum release air relief pressure. 2. Caution is required when piping resistance is large or when the required flow rate is high. An insufficient break flow rate could result in problems. Confirm specifications before using. 3. Install a vacuum filter on the pad port. Use only filters that withstand positive pressure for vacuum break. If a filter is not installed, avoid sucking in dust, salt, or iron chips, etc., and regularly wash the inside of the valve. 407

VSLF Vacuum side (VR) port: Push-in joint Pad side (W) port: Push-in joint type Relief hole VR port 2-E 2-C W port Relief (release) pressure adjusting needle Break flow rate adjusting needle 30 22 2-øP ø14.4 11.2 L3 2-øD 1.2 8 12.5 12 L1 43.1 10.6 L2 2-ø3.5 6.2 10.2 Circuit diagram VSLF-44 VSLF-66 Type Unit: mm Tube O.D. L1 L2 Weight C E L3 øp ød max. min. max. min. (g) 4 6 11.3 11.8 16.4 17.7 11.8 11.8 8 8 13.4 13.4 9.6 9.6 12.2 12.7 8 10.5 36 37 VR port W port VSLF Vacuum side (VR) port: Push-in joint Pad side (W) port: Taper screw type øp ø14.4 Relief (release) pressure adjusting needle VR port ød E C Hex.10 R1/8 20.5 12 L1 43.1 Relief hole 10.6 L2 Break flow rate adjusting needle W port L3 16.2 20.2 Circuit diagram Vacuum related components Inch/NPT specifications Type VSLF-46A VSLF-66A Unit: mm Tube O.D. L1 L2 Weight C E L3 øp ød max. min. max. min. (g) 4 11.3 16.4 11.8 8 13.4 9.6 12.2 8 36 6 11.8 17.7 11.8 8 13.4 9.6 12.7 10.5 37 VR port W port 408

VSLF series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Characteristics Vacuum release air discharge flow rate characteristics Flow rate ( /min(a.n.r)) 25 20 15 10 5 0 1 2 3 4 5 Vacuum release air pressure characteristics Releaseflow rate adjusting needle rotations 6 7 8 Vacuum ejector setting pressure: 0.7MPa Release flow rate: 60 /min (A.N.R) Vacuum ejector setting pressure: 0.5MPa Release flow rate: 47 /min (A.N.R) Vacuum ejector setting pressure: 0.3MPa Release flow rate: 30 /min (A.N.R) 0.025 0.02 Relief pressure (MPa) 0.015 0.01 0.005 0 0 1 2 3 4 5 Release air pressure adjusting needle rotations 409

Adjusting the vacuum release unit 1. Install the VR port (vacuum port) onto the vacuum ejector, and the W port (pad port) onto the pad. Fully open the relief pressure adjustment needle (1) as shown in the drawing, and fully open the release air flow rate adjustment needle (2). 2. Generate a vacuum with the vacuum ejector, and gradually close the needle (1) shown in the drawing and start the vacuum. Check that vacuum startup time is not delayed. Repeatedly generate a vacuum. If there is no problem, proceed to settings in step 3. 3. Generate a vacuum release air with the vacuum ejector, and gradually open the needle (2) shown in the drawing. Set the release air suitable for the work piece. Vacuum side port Release flow rate adjusting needle Relief (break) pressure adjusting needle Pad side port Inch/NPT specifications Vacuum related components 410

Vacuum filter for different vacuum piping Vacuum filter VSFB/VSFU series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Characteristics Dust and water sucked in by the vacuum ejector are eliminated with the cyclone effect and element. (Large capacity union type: VSFB). Large dust case reduces maintenance. The entire dust case is removed with a single touch, preventing dust from scattering. (Large capacity union type: VSFB) The compact vacuum filter is ideal for applications requiring a high-cycle vacuum. (Compact union type: VSFU) Specifications Working fluid Air Working pressure range -100 to 0kPa Filtration accuracy 10µm Ambient temperature range 0 to 60 C 411

VSFB series Piping example When piped between the vacuum ejector and vacuum pad, dust and dirt, etc., entering from the pad is removed and vacuum ejector problems prevented. Vacuum ejector Vacuum filter Compressed air Vacuum pad Ordering type for large capacity union type (VSFB) (Example) VSFB (1) 6 (2) 6 (3) (3) Pad side connection port size 6 8 10 12 Port size (mm) ø6 ø8 ø10 ø12 (2) Vacuum side connection port size 6 8 10 12 Port size (mm) ø6 ø8 ø10 ø12 (1) Vacuum filter (large capacity union type): VSFB Note: For details on model combinations, see the model field on page 415 showing dimensions. Vacuum related components Inch/NPT specifications 412

VSFU series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Ordering type for union type (VSFU) (Example) VSFU (1) 1L (2) 66 (3) (2) Filter size (3) Port size 1S 1L 2 3 Filtration area (cm 2 ) 2.8 (element length 15 mm) 4.7 (element length 25 mm) 7.5 12.5 (1) Vacuum filter (Compact union type): VSFU Connection shape Push-in joint type Metric screw type 44 66 88 1010 M55 Size (mm) ø4 ø6 ø8 ø10 M5x0.8 Note: For details on model combinations, see the model field on page 416 showing dimensions. Note: The dedicated bracket is enclosed. 413

VSFB/VSFU series Special precautions 1. Do not apply positive pressure for vacuum release on the large capacity union type (VSFB) vacuum filter. The filter does not have an explosion proof structure, and pressure resistance is low. Damage to the unit could result in personal injury. 2. The compact union type and union type (VSFU) is a vacuum filter. Avoid using in applications where pressurized state continues. The filter does not have an explosion proof structure, and damage to the unit could result in personal injury. 3. Regularly service and inspect the vacuum filter's filter element. Performance could drop or problems result if the element is clogged. When replacing the element, see the procedures of cleaning and replacing the vacuum filter element. Release the filter's inner pressure to atmospheric pressure before replacing the element. 1. See Precaution 9 in Common Precautions for Vacuum for details on the vacuum filter's working environment. 2. Confirm the unit and IN and OUT ports when connecting piping. The filter's functions will not be satisfied if the connection is reversed. 3. After cleaning out the dust and replacing the element, securely fix the case and check that the vacuum does not leak. Inch/NPT specifications Vacuum related components CAUTION WARNING 414

VSFB series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit VSFB Large capacity union type 2-15 2-20 2-17.5 EXH 2-C 30 2-ø5.5 2-E 80 60 2-øD 37.5 V Type VSFB-66 VSFB-88 VSFB-1010 VSFB-1212 Tube O.D. ød 6 8 10 12 *.Replacement element: VSFB-E C 17 18.2 20.7 23.3 E 52.6 53.9 54.8 56.4 Filtration area (cm 2 ) 20 Unit: mm Weight (g) 206 204.5 198 190.5 415

VSFU series VSFU-1 Small union type B 2-C 2-øD VSFU- Union type IN (pad side) Vacuum related components Type VSFU-2-44 VSFU-2-66 VSFU-3-66 VSFU-3-88 VSFU-3-1010 4 6 6 8 10 B1 57.8 59.9 67.7 70.1 72.7 B2 33 39.5 B3 18 20 B4 24 28 L1 11.9 13 13.5 14.9 16.2 L2 11.9 13 13.8 14.7 16.0 øp1 18.2 22.1 øp2 20 24 2-ø4.5 øp3 17.5 21.5 C 14.9 16 16.5 18 19.2 F1 10 14 F2 20 24 7.5 12.5 Unit: mm 18 19 27 29 32 Inch/NPT specifications B 2-4 2-3 2 3 OUT 2-ød 8.3 L3 7.4 L4 F2 øp1 2-X L2 ø11.7 13.6 10.5 IN (pad side) 2 B1 øp3 10.5 2-C L1 2-øD OUT øp2 L3 L4 2-M5x0.8 10 M5 female screw type 2-M3 flat head screw mounting hole 12 33 L1 25 (L2) Unit: mm Tube O.D. Element Filtration area Weight Type B C L1 (L2) L3 L4 ød X ød length (cm 2 ) (g) VSFU-1S-44 49.1 11.1 13.0 15 2.8 5.1 4 11.3 8.5 4 10.5 9.8 VSFU-1L-44 59.1 17.1 17.0 25 4.7 5.4 VSFU-1S-66 53.8 13.4 15.4 15 2.8 6 6 11.8 10.8 4.5 10.5 11.8 VSFU-1L-66 63.8 19.4 19.4 25 4.7 6.4 VSFU-1S-M55 40.6 5.6 10 15 2.8 7.6 - - 5.5 2.5 10.5 - VSFU-1L-M55 50.6 11.6 14 25 4.7 8 H8 Tube O.D. ød B3 B4 3 F1 B2 Filtration Weight area (cm 2 ) (g) 416

VSFB/VSFU series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Pressure loss diagram Large capacity union (VSFB) type Pressure loss (MPa) 0.10000 0.01000 0.00100 Union (VSFU) type Pressure loss (MPa) VSFB-66 VSFB-88 VSFB-1010 VSFB-1212 0.00010 10 100 1000 0.10000 0.01000 0.00100 0.00010 Flow rate ( /min(a.n.r)) VSFU-1*-44, VSFU-1*-M55, VSFU-2-44 VSFU-1*-66 VSFU-2-66 VSFU-3-66 VSFU-3-88 VSFU-3-1010 0.00001 1 10 100 1000 *. This data is actually measured values, not guaranteed values. Flow rate ( /min(a.n.r)) 417

Vacuum filter replacement element VSFB Large capacity union type VSFU-1 A B Small union type Joint body B Filter element Type: VSFB-E Filter element Type VSFU-1S- VSFU-1L- Filter element VSFU-1S-E VSFU-1L-E Discrete fixing bracket Type VSFU-1S- VSFU-1L- Fixing bracket VSFU-1-B Joint body A Replacing the compact union type element 1. Turn the joint body 45 in the "O" direction. (After replacing, turn the joint body in the "L" direction until it locks.) 45 rotation Joint body Vacuum related components 2. Remove the rotated joint body from the filter cover, and replace the filter element. When replacing, insert half of the filter element into the filter element mating section, and insert into the joint body A while taking care not to crush the end of the filter element. Note 1. There are two replacement filters 15 and 25 mm. Check before replacing. Note 2. After replacing, install parts following the above procedures in reverse, and securely lock the joint body. Filter element mating section Filter element Inch/NPT specifications Filter element end 418

VSFU series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit VSFU- 2 3 Union type Discrete fixing bracket Type Fixing holder VSFU-3- VSFU-2- VSFU-3- Filter element Type VSFU-2- VSFU-2-B VSFU-3-B Filter element VSFU-2-E VSFU-3-E Removing and locking the plastic body when replacing the union type element Removing the body 1. Rotate the plastic body B 45 counterclockwise*. 2. Pull out plastic body B. * Do not rotate plastic body B by more than 45. The body could be damaged. Plastic body B (2) Locking the plastic body 1. Align the convex section of plastic body A with the keyway on plastic body B, and push in until it contacts the end. 2. Rotate plastic body B 45 clockwise* 1, and lock it. *1. '* Do not rotate plastic body B by more than 45. The body could be damaged. *2. When locking, check that the convex section of plastic body A comes to the center of plastic body B's hole as shown below. Plastic body B (1) (1) Keyway (2) Convex section Plastic body A Plastic body A Check that the convex section of plastic body A comes to this position 419

MEMO Inch/NPT specifications Vacuum related components 420

Vacuum related components Vacuum pad Vacuum ejector/vacuum unit VSUS Series Vacuum sensor with LED display Characteristics Set and applied pressure are displayed on the LED. The 2-point switch output type or analog output type vacuum sensor is selectable to match different applications. Connector wiring facilitates wiring layout. The push-in joint, M5 metric screw (female screw), or directly installed piping connection is selectable to match the application. Pressure is detected with an electric switch, ensuring stable accuracy. 421

VSUS series Specifications Specifications Factory setting value Current consumption Pressure detection method Working pressure range Set pressure range Pressure proof Storage temperature range Operating temperature range Operating humidity range Power supply voltage Protective structure Number of pressure setting points Operation accuracy Hysteresis Switch output Analog output Responsiveness Display Number of displays Display accuracy Resolution Operation display Function 2-point output (NW) With analog output (NA) 2-point output (PW) With analog output (PA) -50kPa(SW1),-10kPa(SW2) -50kPa -50kPa(SW1),-10kPa(SW2) -50kPa 40 ma or less Diffused metal-oxide semiconductor (DMOS) pressure switch -100 to 0kPa -99 to 0kPa 0.2MPa -20 to 70 C (atmospheric pressure, humidity 60%RH or less) 0 to 50 C (with no freezing or dew condensation) 35 to 85%RH (with no dew condensation) 12 to 24 V DC 10% Ripple (P-P) 10% or less IEC Standards IP40 or equivalent 2 1 2 1 3%F.S. max (at Ta = 25 C) Fixed (2%F.S. or less) Variable (approx. 0 to 15% F.S.) Fixed (2%F.S. or less) Variable (approx. 0 to 15% F.S.) NPN open collector output 30V 80mA or less Residual voltage 0.8V or less PNP open collector output 80mA or less Residual voltage 0.8V or less Output voltage Zero point voltage Span voltage Output current Output 1 to 5V voltage 1 to 5V Zero point 1 0.1V voltage 1 0.1V Span 4 0.1V 4 0.1V 1mA or less (load resistance 5kΩ or more) voltage Output current 1mA or less (load resistance 5kΩ or more) LIN/HYS 0.5%F.S. or less LIN/HYS 0.5%F.S. or less Approx. 2m sec or less 0 to -99kPa (2-digit red LED display) Approx. 4 times/sec 3%F.S. 2 digit 1digit Red LED turns ON when SW1 is above set pressure Red LED turns ON when SW1 is above set pressure Red LED turns ON when above set pressure Red LED turns ON when above set pressure Green LED turns ON when SW2 is above set pressure Green LED turns ON when SW2 is above set pressure 1. MODE switching switch (ME, S1 or S2) 1. MODE switching switch (ME or SW) 1. MODE switching switch (ME, S1 or S2) 1. MODE switching switch (ME or SW) 2. S1 setting trimmer (2/3 rotation trimmer) 2. SW setting trimmer (2/3 rotation trimmer) 2. S1 setting trimmer (2/3 rotation trimmer) 2. SW setting trimmer (2/3 rotation trimmer) 3. S2 setting trimmer (2/3 rotation trimmer) 3. HYS setting trimmer (Approx. 0 to 15% of setting value) 3. S2 setting trimmer (2/3 rotation trimmer) 3. HYS setting trimmer (Approx. 0 to 15% of setting value) Vacuum related components Order type (Example) VSUS (1) N (2) W (3) 6 (4) (4) Port size Push-in joint (mm) Metric screw (female screw)(mm) Directly mounted type 4 6 8 M5 F Port size ø4 ø6 ø8 M5 X 0.8 - (3) Sensor specifications W: 2-point output A: 1-point output + analog output (2) Sensor output type N: NPN output P: PNP output (1) Model VSUS: Vacuum sensor for negative pressure Inch/NPT specifications 422

VSUS series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Fixing the VSUS vacuum sensor with LED display 1. Fixing the VSUS vacuum sensor with LED display Fix the VSUS vacuum sensor with LED display with M2.5 screws using installation holes on the body. (See the dimensions for fixing hole spacing.) Using the vacuum sensor 1. Setting pressure (1) Energizing (checking wiring and supplying DC power.) (2) Set the display change switch to pressure setting mode (ME S1 or S2, SW). (2)-2. Only for analog output vacuum sensors Turn the hysteresis setting trimmer (HST) fully in the CCW direction to set hysteresis to a minimum. (3) Turn the pressure setting trimmer (S1 or S2, SW) with a small screwdriver, setting it to the required setting. (4) Set the display change switch to ME, apply pressure, and check that the sensor operates appropriately. (For vacuum sensors with 2-point switch output) Switch output 1 (S1): The operation LED (red) turns on when set pressure is exceeded. Switch output 2 (S2): The operation LED (green) turns on when set pressure is exceeded. (For vacuum sensors with analog output) Switch output (SW): The operation LED (red) turns on when set pressure is exceeded. 2. Setting hysteresis (1) Hysteresis is adjusted using the hysteresis setting trimmer (HYS). (2) Hysteresis is adjusted from 0 to 15% of the setting. Hysteresis increases when the trimmer is turned to CW. (3) Checking hysteresis Set the display change switch to pressure display mode (ME) and gradually increase and decrease pressure near the set pressure. Read values at which the operation indicator is turned on and off. The difference in displayed values is hysteresis. (4) Example of hysteresis adjustment If pressure has a pulse and output is thin and intermittent, use large hysteresis. To set the tolerable range for pressure drops. Hysteresis setting trimmer For setting SW2 pressure MODE switching switch 2-point MODE switching switch 3-contact SW2 SW1 MODE ME S1 S2 kpa V Pressure setting trimmer SW1 pressure setting trimmer LED display section Upper level: Analog output vacuum sensor Lower level: Vacuum sensor with 2-point switch output 423

Connection method V + (brown) V+(brown) Load Main circuit SW1 OUT (black) Load SW2 OUT (gray) Main circuit Load SW OUT (black) ANALOG OUT (gray) COM (blue) COM (blue) Vacuum sensor with 2-point switch output Vacuum related components Inch/NPT specifications Vacuum sensor with analog output Precautions Do not use this vacuum sensor in fluids or in an atmosphere with corrosive substances. The sensor may fail. Do not use wiring or applications that may cause noise (surge), etc., to be applied. The sensor may fail. Do not use this vacuum sensor in an atmosphere containing fluids or flammable or explosive gases. This device is not explosion-proof, so faults may occur. Do not use this vacuum sensor where it may be exposed to water, oil, or dust. This device is not drip-proof, so faults may occur. Do not use this vacuum sensor for applications that generate heat exceeding the working temperature range. The sensor may fail. Turn power off before wiring. Check the lead wire color during wiring, and check that the output terminal, power terminal, and COM terminal are not short-circuited. The sensor may fail if these terminals are short-circuited. Do not apply excessive tension or bend the connector cable excessively. Wires or connector section may break. Check that pressure exceeding 0.2 MPa is not constantly applied during a vacuum break. Constant application of this pressure may damage the sensor. When setting pressure or hysteresis, use a small screwdriver, and gently turn the trimmer within its rotation range. Do not force it. The trimmer or PCB may be damaged if excessive force is applied during adjustment. Use stabilized DC power. Insert a surge voltage absorption circuit in the relay or solenoid valve, etc., connected to the output terminal or power terminal. Avoid uses in which current exceeds 80 ma. Ground the FG terminal when using unit power, such as switching power. Do not short-circuit the output terminal (black or gray lead) with other terminals. Do not apply excessive external impact or force to the sensor. M2.5 screw installation holes are provided on the sensor body. Tighten screws into these holes with the recommended tightening torque. Use clean fluids when possible. 424

VSUS series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit VSUS VSUS Push-in joint type Directly mounted type ø8 (pressure inlet) ø11.2 7 O ring; 8 X 1 2-ø3.8 depth 1.2 6 Approx. 500 61 55 6 Approx. 500 61 55 12.3 11.8 6.8 6 VACUUM SWITCH MODEL; VUS21A LOT; 24.5 Hysteresis setting trimmer *) 2-point SW: For setting SW2 pressure Pressure setting trimmer *) 2-point SW: For setting SW1 pressure MODE switching switch 2-point SW, 3-contact/analog: 2-point ød Type VSUS- -4 VSUS- -6 VSUS- -8 7.5 SW1 SW2 MODE Tube O.D. ød 4 6 8 SW ME kpa C 14.5 L 20 3 12.3 11.8 6.8 6 VACUUM SWITCH MODEL; VUS21A LOT; 24.5 Hysteresis setting trimmer *) 2-point SW: For setting SW2 pressure Pressure setting trimmer *) 2-point SW: For setting SW1 pressure Female screw type *) 2-point SW, 3-contact/analog: 2-point 7.5 3 SW1 SW2 MODE SW V ME kpa 14.5 20 7 LED display section Operation confirmation lamp 2-ø2.6 (mounting hole) Spot facing diameter ø4.5, depth 2.5 Unit: mm L C Weight (g) 6.1 11.2 28 8.9 11.9 28 17.3 18.2 34.5 V LED display section Operation confirmation lamp 2-ø2.6 (mounting hole) Spot facing diameter ø4.5, depth 2.5 Type VSUS- -F Unit: mm Weight (g) 19 425

VSUS Female screw type 6 Approx. 500 61 55 12.3 11.8 6.8 6 Hysteresis setting trimmer *) 2-point SW: For setting SW2 pressure VACUUM SWITCH MODEL; VUS21A LOT; Pressure setting trimmer *) 2-point SW: For setting SW1 pressure MODE switching switch *) 2-point SW, 3-contact/analog: 2-point M5 X 0.8 SW1 SW2 MODE Inch/NPT specifications SW Vacuum related components ME kpa LED display section Operation confirmation lamp 24.5 7.5 3 14.5 20 V 7 2-ø2.6 (mounting hole) Spot facing diameter ø4.5, depth 2.5 Type VSUS- -M5 Unit: mm Weight (g) 28.5 426

Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Vacuum ejector with integrated vacuum pad Air pincette VST series Characteristics Air Pincette have a vacuum pad and vacuum ejector integrated in a pen-shaped body. This product is ideal for assembling small parts, etc. The VST-B type with integrated valve generates little noise, and conserves energy by flowing air only during use. Specifications Working fluid Working pressure range Rated supply pressure Ultimate vacuum Ambient temperature range Air 0.15 to 0.7MPa 0.5MPa -90kPa (VTB: -86kPa) 0 to 60 C 427

VST series Structure drawing (VST-A type with no valve) Standard type pad Resin body B (Nylon) Resin body C (Polyacetal) Cover (ABS resin) Nozzle A'ssy Pad holder (Brass, nickel-plated) Resin body A (ABS resin) Filter element Diffuser (Brass, nickel-plated) Structure drawing (VST-B type with integrated valve) Push button (ABS resin) O ring holder (Brass, nickel-plated) O ring (Nitrile rubber) Pad holder A (ABS resin) Pad holder B (Brass, nickel-plated) O ring (Nitrile rubber) Resin body A (PBT) Diffuser (Brass, nickel-plated) O ring (Nitrile rubber) Resin body B (Nylon) Ordering type (example) (For package type) VST (1) Standard type pad B (2) SET (3) (2) Holder shape A: Type with no valve B: Type with integrated valve (1) Air Pincette set: VST Filter element Valving element ring (Brass, nickel-plated) Valving element (Brass, nickel-plated) Valving element guide (Brass, nickel-plated) (3) Specifications SET: Air -5ncette package set Ordering model (example) (For discrete air pincette) VST (1) A (2) 6RS (3) (2) Holder shape A: Type with no valve B: Type with integrated valve (1) Air tweezers set: VST (3) Pad diameter and material Joint body (PBT) Silencer element Pipe (Brass, nickel-plated) Nozzle (Brass, nickel-plated) Spring (Stainless steel) Nitrile rubber 2RN 4RN 6RN 8RN Silicon rubber 2RS 4RS 6RS 8RS Pad diameter (mm) ø2mm ø4mm ø6mm ø8mm Vacuum related components Inch/NPT specifications 428

VST series Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Usage methods VST-A type with no valve Pick up a work piece by pressing the side hole while compressed air (0.5 MPa) is flowing to the Air pincette. To release the work piece, release the side hole. Side hole Replacement element for Air pincette VST-A Type with no valve Filter element Type: VST-A-E VST-B type with integrated valve Pick up a work piece by pressing the pushbutton while compressed air (0.5 MPa) is flowing to the Air Pincette. To release the work piece, release the pushbutton. Push-button VST-B Type with integrated valve Filter element Type: VST-B-E Special precautions Caution 1. Do not mechanically push the pushbutton on the type with integrated valve. The button could break off. 2. The filter element is replaced by removing the ejector (VST-A type without valve) or pad holder (VST-B type with integrated valve). Regularly service and inspect the element. Performance could drop if the element is clogged. 3. The silencer for the type with integrated valve cannot be replaced. 4. When piping to the Air Pincette, use a coiling tube, and keep the load applied onto the joint as small as possible. 429

VST-A Type with no valve A ød F R22 B 11.3 ø4 ø13.5 Type VST-A-2R VST-A-4R Pad diameter ød 2 4 A 8 8 B 181.5 181.5 F 64 64 VST-A-6R 6 11 184.5 66 VST-A-8R 8 9.5 183 66 Unit: mm Weight (g) 21.5 21.5 22.5 22.5 VST-B Type with integrated valve A ød F R22 171 max 15 min 14.4 11.3 ø4 ø12 VST-A Air pincette PACKAGE with no valve package set Type: VST-A-SET Type VST-B-2R VST-B-4R Pad diameter ød 2 4 A 9 9 F 59 59 VST-B-6R 6 11 61 VST-B-8R 8 9.5 59.5 VST-B PACKAGE Type: VST-B-SET Unit: mm Weight (g) 16 16 17 17 Air pincette with integrated valve package set Vacuum related components Details of Air Oincette package set (without valve/with integrated valve) Air tweezers: 1 unit, pad rubber: 4 pieces (material: silicon), pad outer diameter: ø2mm, ø4mm, ø6mm, ø8mm Pad adaptor: 2 pieces (for ø2/4mm, for ø6/8mm), coiling tube: 1 tube Coiling tube for Air Pincette Inch/NPT specifications 100 ø24 328 (max 520) 128 100 ø4 430

Inch/NPT specifications Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Guide to Joint Inch Size and Screw NPT Specifications CONTENTS Vacuum ejector 432 VSH/VSU/VSC/VSB VSG/VSK/VSKM Vacuum pad 438 VSP-*S*/VSP-*B* VSP-*W*/VSP-*E* VSP-*L*/VSP-*LB* Vacuum filter 442 VSFU 431

Joint Inch Size and Screw NPT Specifications How to order Discrete vacuum ejector with directly mounted solenoid valve (Inch/NPT specifications) VSH H 07 7C 6N J (A) Vacuum characteristics (B) Nozzle diameter (C) Vacuum port (V) (D) Air supply port (P) (E) Exhaust port (EX) Descriptions (A) Vacuum characteristics Note 1 H High vacuum medium flow rate type L Medium vacuum large flow rate type E High vacuum small flow rate type (B) Nozzle diameter Note 1 05 ø0.5 07 ø0.7 10 ø1.0 12 ø1.2 15 ø1.5 (C) Vacuum port (V) 3C 5/32 inch push-in joint 7C 1/4 inch push-in joint 9C 5/16 inch push-in joint 11C 3/8 inch push-in joint 13C 1/2 inch push-in joint (D) Air supply port (P) 32U 10-32 UNF 6N NPT 1/8 8N NPT 1/4 (E) Exhaust port (EX) S Atmospheric exhaust with silencer J Common exhaust Type/port combination table Vacuum port 3C 7C 9C 11C 13C Air supply port 32U 6N 6N 8N 8N 8N Note on model No. selection Note 1: The (A)(B) combination E05 and L12 cannot be selected. Note 2: Specifications and dimensions follow standards. See pages 8 to 16 for details. Model No. VSH-H05 VSH-H07 VSH-H10 VSH-H12 VSH-H15 VSH-L05 VSH-L07 VSH-L10 VSH-L15 VSH-E07 VSH-E10 Inch/NPT specifications VSH-E12 VSH-E15 432

Joint Inch Size and Screw NPT Specifications Inch/NPT specifications Vacuum related components Vacuum pad Vacuum ejector/vacuum unit How to order Individual pipe type vacuum ejector (Inch/NPT specifications) VSU H 07 3C 3C S (A) Vacuum characteristics (B) Nozzle diameter (C) Vacuum port (V) (D) Air supply port (P) (E) Exhaust port (EX) Note on model No. selection Note 1: The (A)(B) combination E05 cannot be selected. Note 2: Specifications and dimensions follow standards. See pages 8 to 19 for details. How to order S (C) Vacuum port (V) Descriptions (A) Vacuum characteristics Note 1 H L E High vacuum medium flow rate type Medium vacuum large flow rate type High vacuum small flow rate type (B) Nozzle diameter Note 1 05 ø0.5 07 ø0.7 (C) Vacuum port (V) 3C 5/32 inch push-in joint 7C 1/4 inch push-in joint 32U 10-32 UNF 6N NPT 1/8 (D) Air supply port (P) 3C 5/32 inch push-in joint 7C 1/4 inch push-in joint (E) Exhaust port (EX) S Atmospheric exhaust with silencer J Common exhaust Individual vacuum ejector with directly mounted pad, Atmospheric exhaust with silencer (Inch/NPT specifications) VSC H 05 32U 3C (A) Vacuum characteristics (B) Nozzle diameter (A) Vacuum characteristics H L Descriptions High vacuum medium flow rate type Medium vacuum large flow rate type (B) Nozzle diameter 05 ø0.5 (C) Vacuum port (V) 32U 10-32 UNF (D) Air supply port (P) (D) Air supply port (P) 3C 5/32 inch push-in joint Note on model No. selection Note 1: Specifications and dimensions follow standards. See pages 8 to 25 for details. 433

Joint Inch Size and Screw NPT Specifications How to order Individual square vacuum ejector (Inch/NPT specifications) VSB H 07 7C7C V (A) Vacuum characteristics (B) Nozzle diameter (C) Vacuum port (V) - Air supply port (P) (D) Vacuum sensor specifications Descriptions (A) Vacuum characteristics Note 1 H High vacuum medium flow rate type L Medium vacuum large flow rate type E High vacuum small flow rate type (B) Nozzle diameter Note 1 05 ø0.5 07 ø0.7 10 ø1.0 12 ø1.2 (C) Vacuum port (V) - Air supply port (P) 3C3C 5/32 inch push-in joint - 5/32 inch push-in joint 7C7C 1/4 inch push-in joint - 1/4 inch push-in joint (D) Vacuum sensor specifications Blank No vacuum sensor V With mechanical vacuum switch Note on model No. selection Note 1: The (A)(B) combination E05 and L12 cannot be selected. Note 2: Specifications and dimensions follow standards. See pages 8 to 20 for details. Type/port combination table Port size 3C3C Model No. VSB-H05 7C7C VSB-H07 VSB-H10 VSB-H12 VSB-L05 VSB-L07 VSB-L10 VSB-E07 How to order Discrete mechanical vacuum switch VSB VUSB 3C VSB-E10 VSB-E12 Inch/NPT specifications (A) Input port Note on model No. selection Note 1: Specifications and dimensions follow standards. See pages 8 to 20 for details. (A) Input port 3C 5/32 inch push-in joint 7C 1/4 inch push-in joint Descriptions 434

Joint Inch Size and Screw NPT Specifications Inch/NPT specifications Vacuum related components Vacuum pad Vacuum ejector/vacuum unit How to order 20mm width individual vacuum ejector unit (Inch/NPT specifications) VSG H 07 F 7C 7C 3 NW (A) Vacuum characteristics (B) Nozzle diameter (C) Unit combination (D) Vacuum port (V) Note on model No. selection (E) Air supply port (P) (F) Solenoid valve voltage Note 1: the (A)(B) combination E05 cannot be selected. Note 2: The (D)(E) combination is available only as 3C3C and 7C7C. Note 3: When (B) 05 is selected, only 3C3C is selectable for (D)(E). Note 4: When (B) 07 or 10 is selected, only 7C7C is selectable for (D)(E). Note 5: A or B is selected for the (C) unit combination, (F) solenoid valve voltage cannot be selected. Note 6: When (A) or E is selected for the (C) unit combination, the (G) vacuum sensor specifications cannot be selected. Note 7: Specifications and dimensions follow standards. See pages 30 to 34 for details. (G) Vacuum sensor specifications Appendix Table 1 Unit combination A B E F Descriptions (A) Vacuum characteristics Note 1 H High vacuum medium flow rate type L Medium vacuum large flow rate type E High vacuum small flow rate type (B) Nozzle diameter Note 1, Note 3, Note 4 05 ø0.5mm 07 ø0.7mm 10 ø1.0mm (C) Unit combination Note 5, Note 6 Refer to Appendix Table 1 for details on the unit combinations. (D) Vacuum port (V) Note 2, Note 3, Note 4 3C 5/32 inch push-in joint 7C 1/4 inch push-in joint (E) Air supply port (P) Note 2, Note 3, Note 4 3C 5/32 inch push-in joint 7C 1/4 inch push-in joint (F) Solenoid valve voltage Note 5 1 100V AC 3 24V DC (G) Vacuum sensor specifications Note 6 NW 2-point NPN output NA 1-point NPN output + analog output A Analog output Filter Vacuum sensor with LED display Vacuum generating solenoid valve Solenoid valve type vacuum release valve 435

Joint Inch Size and Screw NPT Specifications How to order 16mm width integrated type vacuum ejector unit (Inch/NPT specifications) Individual vacuum ejector unit VSK A H 07 W 3C 7C 9L 3 B NW (A) Port position (B) Vacuum characteristics (C) Nozzle diameter (D) Unit combination (E) Vacuum port (V) Note on model No. selection Note 1: the (B)(C) combination E05 cannot be selected. Note 2: (C) 10 and 12 cannot be used with 3C for (E) or (F). Note 3: If the (D) unit combination is A, B, C, D, E, F, the (H) solenoid valve voltage and (I) valve type need not be selected. Note 4: (J) vacuum sensor specifications are selectable only when the (D) unit combination is E, F, L, M, R, W. Note 5: Specifications and dimensions follow standards. See pages 41 to 63 for details. Appendix Table 1 (Common with manifold type) Unit combination A B C D E F G H J K L M P Q R S T W Filter (F) Air supply port (P) Vacuum generating solenoid valve (G) Exhaust port (EX) (H) Solenoid valve voltage (I) Valve type (J) Vacuum sensor specifications Check valve (vacuum holding) (A) Port position A B Descriptions (B) Vacuum characteristics Note 1 H High vacuum medium flow rate type L Medium vacuum large flow rate type E High vacuum small flow rate type (C) Nozzle diameter Note 1, Note 2 05 ø0.5mm 07 ø0.7mm 10 ø1.0mm 12 ø1.2mm (D) Unit combination Note 3, 4 Refer to Appendix Table 1 for details on the unit combinations. (E) Vacuum port (V) Note 2 3C 5/32 inch push-in joint 7C 1/4 inch push-in joint 9C 5/16 inch push-in joint (F) Air supply port (P) Note 2 3C 7C 9C 5/32 inch push-in joint 1/4 inch push-in joint 5/16 inch push-in joint (G) Exhaust port (EX) S Atmospheric exhaust with silencer 9C 5/16 inch push-in joint straight common exhaust 9L 5/16 inch push-in joint elbow common exhaust (H) Solenoid valve voltage Note 3 1 100V AC 3 24V DC (I) Valve type Note 3 A B Mechanical vacuum switch Discrete type connection port 2 planes Discrete type connection port on one face Normally open type Normally closed type (J) Vacuum sensor specifications Note 4 NW 2-point NPN output with LED display NA 1-point NPN output + analog output with LED display PW 2-point PNP output with LED display PA 1-point PNP output + analog output with LED display Vacuum sensor with LED display Air timer type vacuum release valve Solenoid valve type vacuum release valve Inch/NPT specifications 436

Joint Inch Size and Screw NPT Specifications Inch/NPT specifications Vacuum related components Vacuum pad Vacuum ejector/vacuum unit How to order 16mm width integrated type vacuum ejector unit (Inch/NPT specifications) Manifold type vacuum ejector unit VSKM H 07 W T3C W9C W13C 3 B 10 Individual for vacuum ejector unit manifold VSKM NW H 07 W T3C 3 B NW VSKM T3C W9C W13C 10 Note on model No. selection Note 1: the (A)(B) combination E05 cannot be selected. Note 2: (B) 10 and 12 cannot be used with S3C or T3C for (D). Note 3: If the (C) unit combination is A, B, C, D, E, F, the (G) solenoid valve voltage and (H) valve type need not be selected. Note 4: (J) vacuum sensor specifications are selectable only when the (C) unit combination is E, F, L, M, R, W. Note 5: Specifications and dimensions follow standards. See pages 40 to 63 for details. Appendix Table 2 (E) Air supply port Port shape R side only Both sides L side only Joint size Only vacuum ejector unit manifold (A) Vacuum characteristics (B) Nozzle diameter R7C W7C L7C 1/4 inch (C) Unit combination Straight joint R9C W9C L9C 5/16 inch (D) Vacuum port (V) R11C W11C L11C 3/8 inch (E) Air supply port (P) R13C W13C L13C 1/2 inch (F) Exhaust port (EX) R9L W9L L9L 5/16 inch (G) Solenoid valve voltage Elbow joint R11L W11L L11L 3/8 inch R13L W13L L13L 1/2 inch (J) Vacuum sensor specifications Note 4 (I) Number of manifold stations (H) Valve type Descriptions (A) Vacuum characteristics Note 1 H High vacuum medium flow rate type L Medium vacuum large flow rate type E High vacuum small flow rate type (B) Nozzle diameter Note 1, Note 2 05 07 10 12 ø0.5 ø0.7 ø1.0 ø1.2 (C) Unit combination Note 3, Note 4 Refer to Appendix Table 1 (Common for discrete type) for details on the unit combinations. (D) Vacuum port (V) Note 2 PP Plug port position, side S3C 5/32 inch push-in joint, port position side S7C 1/4 inch push-in joint, port position side S9C 5/16 inch push-in joint, port position side T3C 5/32 inch push-in joint, port position side T7C 1/4 inch push-in joint, port position side T9C 5/16 inch push-in joint, port position side 00 Individual for manifold with side port position (E) Air supply port (P) Refer to Appendix Table 2 for details on the air supply port. (F) Exhaust port (EX) Refer to Appendix Table 3 for details on the exhaust port. (G) Solenoid valve voltage 1 100V AC 3 24V DC (H) Valve type Note 3 A Normally open type B Normally closed type (I) Number of manifold stations 2 to 10 2 stations to 10 stations Manifold Type Individual for manifold (J) Vacuum sensor specifications Note 4 NW 2-point NPN output with LED display NA 1-point NPN output + analog output with LED display PW 2-point PNP output with LED display PA 1-point PNP output + analog output with LED display Only manifold 437 Appendix Table 3 (F) Exhaust port Port shape R side only Both sides L side only Joint size Atmospheric with silencer S1 S2 S3 - R9C W9C L9C 5/16 inch Straight joint R11C W11C L11C 3/8 inch R13C W13C L13C 1/2 inch Common exhaust type Elbow joint R9L W9L L9L 5/16 inch R11L W11L L11L 3/8 inch R13L W13L L13L 1/2 inch R8N W8N L8N NPT 1/4 Elbow R10N W10N L10N NPT 3/8 R12N W12N L12N NPT 1/2

Joint Inch Size and Screw NPT Specifications How to order Vacuum pad/standard type - general type (R), deep type (A) (Inch/NPT specifications) VSP A 40 R N 7C F1 (A) Holder shape (B) Pad diameter (C) Pad shape (D) Pad material (E) Connection port size, (Applicable pad diameter: ø1 to ø4) shape (Applicable pad diameter: ø6 to ø50) (Applicable pad diameter: ø60 to ø100) (Applicable pad diameter: ø150 to ø200) Descriptions (A) Holder shape A Fixed type with vacuum outlet on top B Fixed type with vacuum outlet on side C Spring type with vacuum outlet on top D Spring type with vacuum outlet on side (B) Pad diameter Note 1 Refer to Appendix Table 1 for the pad diameters. (C) Pad shape R Standard type (General type) A Standard type (Deep type) (D) Pad material N Nitrile rubber S Silicon rubber U Urethane rubber F Fluoric rubber SE Antistatic silicon rubber E Antistatic butadiene rubber (low-resistance type) G Food Sanitation Law compliant NBR (E) Connection port size, shape 3C 5/32 inch push-in joint 7C 1/4 inch push-in joint 6N NPT 1/8 8N NPT 1/4 Type/port combination table Pad shape Pad material ø1 ø2 ø3 ø4 ø6 ø8 ø10 ø15 ø20 ø25 ø30 ø40 ø50 ø60 ø80 ø100 ø150 ø200 Pad diameter Note on model No. selection Note 1: (F) F1 and F2 can be selected for (B) 10 to 100. Note 2: Specifications and dimensions follow standards. See pages 245 to 261 for details. (F) Free holder (swinging) Appendix Table 1 Pad diameter Pad diameter (mm) Pad diameter (mm) 1 ø1 25 ø25 2 ø2 30 ø30 General type (R) Deep type (A) N S U F SE E G N S U F SE E G (F) Free holder (swinging) Note 1 F1 With free holder 30 swinging angle type F2 With free holder 15 swinging angle type Blank No free holder 3 ø3 40 ø40 4 ø4 50 ø50 6 ø6 60 ø60 8 ø8 80 ø80 10 ø10 100 ø100 15 ø15 150 ø150 20 ø20 200 ø200 Inch/NPT specifications 438

Inch/NPT specifications Vacuum related components Vacuum pad Vacuum ejector/vacuum unit 439 Joint Inch Size and Screw NPT Specifications How to order Vacuum pad/sponge type (Inch/NPT specifications) VSP A 30 S 7C F1 (A) Holder shape (B) Pad diameter (C) Pad shape (D) Pad material (E) Connection port size, shape Note on model No. selection Note 1: Specifications and dimensions follow standards. See pages 264 to 272 for details. How to order Vacuum pad/bellows type (Inch/NPT specifications) VSP A 80 B N 6N F1 (A) Holder shape (B) Pad diameter (C) Pad shape (D) Pad material (E) Connection port size, shape Note on model No. selection Note 1: Specifications and dimensions follow standards. See pages 274 to 281 for details. (Applicable pad diameter: ø10 to ø50) (Applicable pad diameter: ø70 to ø100) (F) Free holder (swinging) Appendix Table 1 Pad diameter 10 Pad diameter (mm) ø10 15 ø15 (Applicable pad diameter: ø10 to ø50) (Applicable pad diameter: ø80) (F) Free holder (swinging) Descriptions (A) Holder shape Note 1 A B C D Fixed type with vacuum outlet on top Fixed type with vacuum outlet on side Spring type with vacuum outlet on top Spring type with vacuum outlet on side (B) Pad diameter Refer to Appendix Table 1 for the pad diameters. (C) Pad shape S Sponge type (D) Pad material Blank Cloroplane rubber (E) Connection port size, shape 7C 6N 1/4 inch push-in joint NPT 1/8 (F) Free holder (swinging) F1 With free holder 30 swinging angle type F2 With free holder 15 swinging angle type Blank No free holder 20 ø20 A B C D 25 ø25 Appendix Table 1 Pad diameter 10 Pad diameter (mm) ø10 30 ø30 20 ø20 35 ø35 30 ø30 50 ø50 Descriptions (A) Holder shape Note 1 40 ø40 70 ø70 Fixed type with vacuum outlet on top Fixed type with vacuum outlet on side Spring type with vacuum outlet on top Spring type with vacuum outlet on side (B) Pad diameter Refer to Appendix Table 1 for the pad diameters. (C) Pad shape B Bellows type (D) Pad material N Nitrile rubber S Silicon rubber SE Antistatic silicon rubber (E) Connection port size, shape 7C 6N 1/4 inch push-in joint NPT 1/8 (F) Free holder (swinging) F1 With free holder 30 swinging angle type F2 With free holder 15 swinging angle type Blank No free holder 50 ø50 100 ø100 80 ø80

Joint Inch Size and Screw NPT Specifications How to order Vacuum pad/multistage bellows type (Inch/NPT specifications) VSP A 50 W N 7C (A) Holder shape (B) Pad diameter (C) Pad shape (D) Pad material Note on model No. selection Note 1: Specifications and dimensions follow standards. See pages 284 to 291 for details. How to order Vacuum pad/oval type (Inch/NPT specifications) (E) Connection port size, shape VSP A 5 X 30 E N 7C F1 (F) Free holder (swinging) (A) Holder shape A B C D Descriptions Fixed type with vacuum outlet on top Fixed type with vacuum outlet on side Spring type with vacuum outlet on top Spring type with vacuum outlet on side (B) Pad diameter Refer to Appendix Table 1 for the pad diameters. (C) Pad shape W Multi-level bellows type (D) Pad material N Nitrile rubber S Silicon rubber G Food Sanitation Law compliant NBR (E) Connection port size, shape 7C 1/4 inch push-in joint (F) Free holder (swinging) Blank No free holder Appendix Table 1 Pad diameter 10 Pad diameter (mm) ø10 20 ø20 30 ø30 40 ø40 50 ø50 (A) Holder shape (B) Pad diameter (C) Pad shape Note on model No. selection Note 1: Specifications and dimensions follow standards. See pages 295 to 305 for details. (D) Pad material (E) Connection port size, shape (F) Free holder (swinging) (A) Holder shape A B C D AE BE Descriptions Fixed type with vacuum outlet on top Fixed type with vacuum outlet on side Spring type with vacuum outlet on top Spring type with vacuum outlet on side Screw fixed type with vacuum outlet on top Screw fixed type with vacuum outlet on side (B) Pad diameter 4 X 10 4 X 10 4 X 20 4 X 20 4 X 30 4 X 30 5 X 10 5 X 10 5 X 20 5 X 20 5 X 30 5 X 30 6 X 10 6 X 10 6 X 20 6 X 20 6 X 30 6 X 30 8 X 20 8 X 20 8 X 30 8 X 30 (C) Pad shape E Oval type (D) Pad material N Nitrile rubber S Silicon rubber E Antistatic butadiene rubber (low-resistance type) (E) Connection port size, shape 7C 1/4 inch push-in joint (F) Free holder (swinging) F1 With free holder 30 swinging angle type F2 With free holder 15 swinging angle type Blank No free holder Inch/NPT specifications 440

Inch/NPT specifications Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Joint Inch Size and Screw NPT Specifications How to order Vacuum pad/soft type (Inch/NPT specifications) VSP A 30 L N 7C F1 (A) Holder shape (B) Pad diameter (C) Pad shape (D) Pad material (E) Connection port size, shape Note on model No. selection (Applicable pad diameter: Only ø4) (F) Free holder (swinging) Note 1: (E) 3C can be selected only when (A) HC, HD or HE is selected. When (B) 4 and (A) HC, HD or HE is selected, (E) 7C cannot be selected. Note 2: (F) F1 and F2 can be selected only when (A) A, B, C or D is selected. Note 3: Specifications and dimensions follow standards. See pages 309 to 320 for details. How to order Vacuum pad/ soft bellows type (Inch/NPT specifications) VSP A 30 LB N 7C F1 (A) Holder shape (B) Pad diameter (C) Pad shape (D) Pad material Note on model No. selection (E) Connection port size, shape (F) Free holder (swinging) Appendix Table 1 Pad diameter Pad diameter (mm) Note 1: (F) F1 and F2 can be selected only when (A) A, B, C or D is selected. Note 2: Specifications and dimensions follow standards. See pages 323 to 334 for details. 441 Descriptions (A) Holder shape Note 1, Note 2 A B C D HC HD HE Fixed type with vacuum outlet on top Fixed type with vacuum outlet on side Spring type with vacuum outlet on top Spring type with vacuum outlet on side Spring type (without stopper) with vacuum outlet on top Spring type (without stopper) with vacuum outlet on side Directly mounted fixed type with vacuum outlet on side (B) Pad diameter Refer to Appendix Table 1 for the pad diameters. (C) Pad shape L Soft type (D) Pad material N Nitrile rubber S Silicon rubber FS Fluoric-silicon rubber SE Antistatic silicon rubber (E) Connection port size, shape Note 1 3C 7C 5/32 inch push-in joint 1/4 inch push-in joint (F) Free holder (swinging) Note 2 F1 F2 Blank 4 ø4 A B C D HC HD HE With free holder 30 swinging angle type With free holder 15 swinging angle type No free holder 6 ø6 8 ø8 10 ø10 15 ø15 Descriptions (A) Holder shape Note 1 20 ø20 30 ø30 40 ø40 Fixed type with vacuum outlet on top Fixed type with vacuum outlet on side Spring type with vacuum outlet on top Spring type with vacuum outlet on side Spring type (without stopper) with vacuum outlet on top Spring type (without stopper) with vacuum outlet on side Directly mounted fixed type with vacuum outlet on side (B) Pad diameter Refer to Appendix Table 1 for the pad diameters. (C) Pad shape LB Soft bellows type (D) Pad material N Nitrile rubber S Silicon rubber (E) Connection port size, shape 7C 1/4 inch push-in joint (F) Free holder (swinging) Note 1 F1 With free holder 30 swinging angle type F2 With free holder 15 swinging angle type Blank No free holder Appendix Table 1 Pad diameter Pad diameter (mm) 6 ø6 8 ø8 10 ø10 15 ø15 20 ø20

Joint Inch Size and Screw NPT Specifications How to order Vacuum filter (compact union type) (Inch/NPT specifications) VSFU 3 7C7C (A) Filter size (A) Filter size 2 Filtration area 7.5cm 2 3 Filtration area 12.5cm 2 Descriptions (B) Vacuum side port size - pad side port size (B) Vacuum side port size - pad side port size 3C3C 5/32 inch push-in joint - 5/32 inch push-in joint 7C7C 1/4 inch push-in joint - 1/4 inch push-in joint 9C9C 5/16 inch push-in joint - 5/16 inch push-in joint 11C11C 3/8 inch push-in joint - 3/8 inch push-in joint Note on model No. selection Note 1: Specifications and dimensions follow standards. See pages 411 to 416 for details. Filter size - bore size combination table Port size Model No. VSFU-2 VSFU-3 3C3C 7C7C 9C9C 11C11C Inch/NPT specifications 442

Inch/NPT specifications Vacuum related components Vacuum pad Vacuum ejector/vacuum unit Quick exhaust valve 2QV/3QV series The straight path and large effective sectional area make this valve suitable for shutting off the source pressure, etc. Vacuum filter VFA series (Catalog No.CB-024SA) This filter effectively removes dust and water sucked in together with the vacuum pump and ejector. Vacuum regulator VRA2000 series (Catalog No.CB-024SA) Ideal regulator for precisely adjusting pressure for delicate work piece pickup and inspection. (Catalog No.CB-024SA) Electro pneumatic regulator EV2100V series This regulator incorporates feedback control with a semiconductor pressure sensor and electronic control circuit to realize no-stage and highly accurate control of vacuum pressure with electronic signals. (Catalog No.CB-024SA) 443

Precise suction plate PVP series A fluorine resin pickup surface gently picks up work piece without scratching them. Tension controlling buffer FBU2 series CKD's original magnetic spring is incorporated in the buffer section to maintain a constant load. This buffer does not break work pieces. Fiber tube UP series This ultra-fine tube has a 1.8 outer diameter. Stress generated after piping is greatly reduced. MVS series cylinder with compact vacuum pickup A vacuum path is provided on the cylinder body. Select a type with rubber pads or buffers, etc., to match the application. (Catalog No.CB-029SA) 444