Scientific vapor pumps

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Scientific vapor pumps Vapor pumps for scientific instruments and R&D applications Diffusion pumps - technology and applications - EO series -4 Diffstak -8 Cryo cooled diffstak - Unvalved diffstak -6 Diffstak installation - Diffstak combined outfits - Vapor pump accessories -

VAPOR PUMPS FOR SCIENTIFIC INSTRUMENTS AND R&D APPLICATIONS Scientific and R & D applications require special vapor pumps and accessories. It is important to minimize any backstreaming of the vapor pump fluid, and the number of elastomer seals used in system design needs to be kept to a minimum, to give clean pumping with minimal outgassing. For benchtop or transportable instruments, compact air-cooled pumps are essential. BOC Edwards offers a range of vapor pumps and accessories which are designed to meet these needs. Measurement methods The methods used to measure pressure and flow have become more accurate in recent years allowing much tighter controls over system conditions. The speeds and throughputs quoted in the catalog for the diffusion pumps are based on actual pump data derived from measurements made with the latest technology total pressure gauges and mass flow transducers in accordance with ISO standards. Some confusion could arise with previously published speed and throughput figures for older designed pumps where, historically, pressure measurements were made with partial pressure gauges like the McLeod gauge. This older gauge can indicate speeds up to % higher than that expected using state of the art total pressure gauges. Further confusion could arise from the measurement standards chosen to determine pumping performance. In the case of AVS (American Vacuum Society), this can indicate speeds and throughput up to 5% higher than ISO figures. Historical industry practice meant that in considering the above, and potential gauge accuracy of ± 5%, it was possible to have speeds quoted 6% higher than might be expected using modern total pressure measurement equipment. This should be carefully considered when comparing specifications for older derived data published for similarly sized competitor pumps and BOC Edwards diffusion pumps. Ultimate vacuum The ultimate vacuum of a vapor pump is the lowest pressure achieved in tests on the pump, measured above the inlet of the pump (or above the high vacuum valve for the Diffstaks). The ultimate vacuum depends on: the type of fluid used in the pump; the temperature of the inlet baffle; the amount of outgassing from the vacuum system; and the amount of leakage into the system. Critical backing pressure The critical backing pressure is the highest pressure that a pump can tolerate in the backing line. If the pressure is higher than the critical backing pressure, the pump may stall. The critical backing pressure depends on: the pump design; the power of the heaters; and the fluid used in the vapor pump. The test rig for SI pumps ensures BOC Edwards stringent product reliability standards are maintained. EO diffusion pumps BOC Edwards EO range of rugged standard diffusion pumps are fully fractionating pumps which are ideal in many demanding scientific and R&D pumping applications. They comprise three pumps: EOK, EO4K and EO6K. All three are available as water-cooled and the EOK is also offered as an air-cooled pump. Diffstak vapor diffusion pumps The patented, compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Diffstak design has been proven over many years with thousands of pumps installed. They are supplied in three types: standard, cryo-cooled and unvalved. (C - collar model pumps). The standard Diffstak pumps have integral high vacuum valves and watercooled baffles. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. Valves on both versions are supplied as either manually operated (M-model pumps) or pneumatically operated (P-model pumps). When comparing pumping speeds, note that the speeds quoted for valved Diffstaks are the speeds above the high vacuum valve, taking full account of the valve's impedance. Backstreaming Backstreaming is the direct movement of molecules of pump fluid vapor from the pump toward the vacuum system. All BOC Edwards pumps are specially designed to minimize backstreaming; the pumps have a guard ring (sometimes called a cool-cap) fitted above the top jet. The guard ring condenses vapor molecules moving from the top jet toward the vacuum system. In some sensitive applications, backstreaming may be very undesirable; you can minimize backstreaming if you fit a baffle or a trap to the top of the pump. EO5/6 diffusion pump The EO5/6 is a compact, fast warm-up, air-cooled diffusion pump and makes a good choice for small, low-cost systems. The high helium pumping speed from a pump only 76 mm high is a particular benefit for GCMS applications. Standard Diffstaks 6/5P, 6/7P and /P

The unvalved Diffstaks are for systems requiring the highest possible ultimate vacuum or for those which do not need a high vacuum valve. All sizes are available with ISO flanges while two sizes are also available with CF flanges. (F - Conflat model pump). The complete range is shown in the table below. Refer to the following pages for full technical data for each of the pumps and also for full details of installations, spares and accessories. STANDARD CRYO-COOLED UNVALVED DIFFSTAK DIFFSTAK DIFFSTAK ISO FLANGE CF FLANGE 6/5M or P CR6/5M or P 6/5C - /M or P CR/M or P /C /F 6/7M or P CR6/7M or P 6/7C 6/7F 5/M or P CR5/M or P 5/C - Fast cycling on unvalved systems For fast cycling pumping systems we recommend our TV range of water or air-cooled pumps. Primarily designed for the evacuation of cathode ray tubes, they will also suit other fast cycling pumping applications. Accessories For vapor pump accessories see page -. APPLICATIONS Mass spectrometry Gas analysis Leak detection Thin film coating High vacuum systems Lamp evacuation Surface physics Small vacuum ovens Vacuum isolation/cryo transfer SCIENTIFIC VAPOR PUMPS Conflat is a registered trademark of Varian, Inc

EO5/6 AIR COOLED DIFFUSION PUMP 7 6 5 4 EO5/6-5 -4 - - - mbar - - - DC74EU Santovac 5 4 (.6) 54 (.) 76 (.99) 6 (.6) 76 (6.9) 8 (.) 54 (.6) 4 The model EO5/6 is a compact, fast warm-up air-cooled diffusion pump supplied complete with high integrity inlet Co-Seal, flange clamping ring and optional baffle. The jet assembly is removable for easy cleaning. It meets the need for a low-cost, high vacuum pump for use in desk top or mobile scientific instruments, leak detectors, and general laboratory applications. In many applications the rapid warm-up capability will enable the EO5/6 to be used without an isolation valve. However, the pump is not intended for use on valveless systems where rapid cycling from atmospheric pressure through the hot pump is required. BOC Edwards offers the TV range of diffusion pumps for these applications. Air 6 (7 baffled) Hydrogen 7 (5 baffled) Fluid charge ml Recommended fluid Santovac 5, Silicone DC74EU Minimum backing pump displacement m h - EM.5 Inlet connection NW5 flange NW flange W or 5 W Warm-up time 4 min kg Minimum cooling air flow 4.5 m h - Santovac 5.6 5-8 Silicone DC7. 5-6 Silicone DC74EU.8 5-7 Silicone DC75.6 5-7 EO5/6 pump, 5/6 Hz, single phase Pump voltage Fan voltage 9 V (.5 kw) 5 V B79-5 V (. kw) 5 V B7 8 V (.5 kw) V B78-5 V (. kw) V B7-5 V (. kw) V B74 Supplied with: NW5 combined baffle and centering-ring, NW5 centering-ring and O ring, NW5 clamp and NW Co-Seal and clamp. NW 9 (.58) 4 (5.59) NW5 Heater (. kw) -5 V H776-5 V H776-5 V H776 Heater (.5 kw) 9 V H7775 8 V H777 Inlet Co-Seal fluoroelastomer B758466 Backing NW O ring assembly, nitrile C59 6 (.44) 8 (.5) Santovac is a registered trademark of Santovac Fluids Inc, USA ACCESSORIES Pump ready thermal snap-switch Cooling fail thermal snap-switch Santovac 5 ( ml) Silicone DC74EU (5 ml) B4 B796 H4 H4 For valves, see page -4. For NW pipeline fittings, see page -7. For vapor pump fluids, see page -46.

EOK DIFFUSION PUMP Ø. (5.) Ø77 (.) Ø. (5.) Ø77 (.) Ø8 (4.5) 9.7 (.69) Water cooled Air cooled (4.7) Ø4. (4.5) x Ø8.8 (.5) 6 77 (.9) 74. (.9) (4.6) NW 5 (5.98) 77 (.9) 7 (.76) Ø8 (4.5) 5 (5.98) 9.6 (.68) NW (.44) Ø4. (4.5) x Ø8.8 (.5) (air) 5 ISO 7 AVS (hydrogen) ISO Fluid charge 75 ml Minimum backing pump displacement for maximum throughput 5 m h - RV5 Inlet connection 8.8 holes on 4. PCD NW flange ¼in BSP Minimum cooling water flow at C 5 l h -.4 kw (water cooled) 4 kg (air cooled) 7 kg RV for many applications Santovac 5.4 5-7 Silicone DC7.9 5-6 Silicone DC74EU.6 5-7 Silicone DC75.45 5-7 5 5-9 Santovac 5 DC75-8 DC74EU -7-6 DC7-5 -4 DC74EU DC75 Santovac 5 - DC7 EOK - mbar EOK water cooled -5 V -phase 5/6 Hz B49-5 V -phase 5/6 Hz B49-5 V -phase 5/6 Hz B494 EOK air cooled -5 V -phase 5/6 Hz B4-5 V -phase 5/6 Hz B4-5 V -phase 5/6 Hz B44 Supplied with: NW elbow, NW centering-ring, NW clamp, water pipe couplings and ferrules (water cooled pump only). Heater (.4 kw) -5 V H78-5 V H785-5 V H78 Inlet Co-Seal ISO6 fluoroelastomer B7585 Backing NW O ring assembly, nitrile C59 Drain plug O ring VITA (pack of 5) H65 ACCESSORIES Cooling-fail thermal snap-switch Santovac 5 ( ml) Silicone DC7 (5 ml) Silicone DC74EU (5 ml) Silicone DC75 (5 ml) BOC Edwards L9 ( liter) B H4 H47 H4 H47 H55 For valves, see page -4. For NW pipeline fittings, see page -7. For vapor pump fluids, see page -46. 5SCIENTIFIC VAPOR PUMPS -5-4 - - -

EO4K DIFFUSION PUMP Ø8 (7.9) Ø8 (5.4) 76 (4.8) 5 (6.) 78 (7.) Ø5.5 (6.) 8 (5.4) NW5 44 (.7) ISO6 (5.4) 6 (air) 6 ISO 68 AVS (hydrogen) 8 ISO Fluid charge 75 ml Minimum backing pump displacement for maximum throughput 6.6 m h - RV8 or RV Inlet connection compatible with ISO6 NW5 flange ¼ in BSP Minimum cooling water flow at C 75 l h -.85 kw 8 kg for very fast roughing flange internal diameter as shown Santovac 5.8 5-7 Silicone DC7. 5-6 Silicone DC74EU. 5-7 Silicone DC75.9 5-7 7 6 4-9 DC75 Santovac 5 L9 EO4K -8 DC74EU -7-6 DC7-5 DC74EU DC75 Santovac 5-4 DC7 - - mbar EO4K, -5V -phase 5/6 Hz B64 EO4K, -5V -phase 5/6 Hz B64 EO4K, -5V -phase 5/6 Hz B644 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules. Heater (.85 kw) -5 V H74-5 V H74-5 V H77 Inlet Co-Seal ISO6 fluorelastomer B75874 Backing NW5 O ring assembly nitrile C549 Drain plug O ring VITA (pack of 5) H65 ACCESSORIES QSB6 quarter swing valve, manual Rotatable flange 6 mm Cooling-fail thermal snap-switch Pump-ready thermal snap-switch Santovac 5 ( ml) Silicone DC7 (5 ml) Silicone DC74EU (5 ml) Silicone DC75 (5 ml) BOC Edwards L9 ( liter) B48 C B B4 H4 H47 H4 H47 H55 For valves, see page -4. For NW pipeline fittings, see page -7. For vapor pump fluids, see page -46. -7-6 -5-4 - - -

EO6K DIFFUSION PUMP Ø54 (.) Ø78 (7.) Ø99. (7.85) 46 (5.75) Ø8.6 (9.) 8 x Ø (.4) 6 (.6) 477 (8.8) (.8) 47 (5.79) (7.95) (9.7) (.6) 84 (7.4) 5 (9.5) (air) 5 ISO 5 AVS (hydrogen) ISO Maximum throughput.5 mbar Fluid capacity ml Minimum backing pump displacement m h - EM8 or EM8 Inlet connection 8. holes on 8.6 PCD NW5 flange!/8 in BSP Minimum cooling water flow at C 75 l h -.5 kw 8 kg for very fast roughing Santovac 5.4 5-7 Silicone DC7.9 5-6 Silicone DC74EU.6 5-7 Silicone DC75.5 5-7 5 4 8 6 4-6 Santovac 5.75 EO6K -5-4 - - - mbar -4 - - - - mbar l s EO6K, -5 V -phase 5/6 Hz B8 EO6K, -5 V -phase 5/6 Hz B8 EO6K, -5 V -phase 5/6 Hz B84 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules (One heater of each wattage required) Heater (. kw) -5 V H759-5 V H76-5 V H754 Heater (.5 kw) -5 V H7-5 V H77-5 V H7 Inlet O ring VOR44 H585 Backing NW5 O ring assembly nitrile C549 Drain plug O ring VIT4A (pack of 5) H65 ACCESSORIES NW5 45 (.77) QSB5 quarter swing valve, manual B4 Cooling-fail thermal snap-switch B Pump-ready thermal snap-switch B4 Santovac 5 ( ml) H4 Silicone DC7 (5 ml) H47 Silicone DC74EU (5 ml) H4 Silicone DC75 (5 ml) H47 BOC Edwards L9 ( liter) H55 For valves, see page -4. For NW pipeline fittings, see page -7. For vapor pump fluids, see page -46. 7SCIENTIFIC VAPOR PUMPS

STANDARD DIFFSTAK 6/5M AND 6/5P 6 (4.7) (8.8) Ø (5.) 5 7 (4.) (.67) 4 x Ø9 (.5) x Ø (4.) 94 (.7) 5 (.97) 7 (.75) 65 85 (.56) (.5) (5.6) 6 (8.5) Ø76 (.99) 5 (4.9) Diffstak 6/5M 8 Standard Diffstak 6/5M Standard Diffstak 6/5P M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 5 hydrogen Minimum backing pump displacement 5 m h - RV5 Recommended fluid Santovac 5 Fluid charge (dry) 6 ml Inlet connection compatible with ISO6 NW 6 mm compression fittings.45 kw Minimum cooling-water flow at C 4 l h - Pneumatic connections 6 mm coupling x!/4 BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbf in - Maximum 6.9 bar / lbf in - 6/5M 8 kg 6/5P 9 kg For maximum throughput. For applications where maximum throughput is not required, use an RV. 6/5P only Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-8 Diffstak 6/5P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 6/5M -5 V -ph 5/6 Hz B44976-5 V -ph 5/6 Hz B44977-5 V -ph 5/6 Hz B44978 Diffstak 6/5P -5 V -ph 5/6 Hz B44976-5 V -ph 5/6 Hz B44977-5 V -ph 5/6 Hz B44978 Supplied with: NW elbow, NW centering-ring, NW clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal 6 (4.7) (8.8) Ø (5.) 5 7 (4.) (.67) 94 (.7) 5 (.97) 4 x Ø9 (.5) x Ø (4.) Ø76 (.99) 5 (4.9) Heater (.45 kw) -5 V H78-5 V H786-5 V H79 Valve plate O ring VIT5 H65 Valve shaft seal O ring VIT H6 Valve blanking plate O ring VIT H6 Backing O ring assembly (fluoroelastomer) C595 Drain and filler plug O rings H7 ck of 5 For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. 5 (5.) 7 (.75) 65 85 (.56) (.5) (8.66) -8 Diffstak 6/5-5 -4 mbar - -4-6 -5 - - -

STANDARD DIFFSTAK /M AND /P 47 (7.) 76 (.87) Ø65 (6.5) 8 5 (4.5) (.8) 8 x Ø9 (.5) x Ø45 (5.7) Ø (4.7) 7 (5.) 8 (7.) 4 (.58) 86 (.9) 6 (4.7) (4.8) 7 (.67) Diffstak /M Standard Diffstak /M Standard Diffstak /P M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 8 hydrogen 5 Minimum backing pump displacement 5 m h - RV5 or RV8 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO NW5 6 mm compression fittings.65 kw Minimum cooling-water flow at C 6 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbf in - Maximum 6.9 bar / lbf in - /M kg /P kg For maximum throughput /P only Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-8 47 (7.) Diffstak /P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak /M -5 V -ph 5/6 Hz B46976-5 V -ph 5/6 Hz B46977-5 V -ph 5/6 Hz B46978 Diffstak /P -5 V -ph 5/6 Hz B46976-5 V -ph 5/6 Hz B46977-5 V -ph 5/6 Hz B46978 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO Co-Seal 76 (.87) Ø65 (6.5) 8 5 (.8) (4.5) 8 x Ø9 (.5) x Ø45 (5.7) 5 (6.) Ø (4.) 7 (5.) 7 (5.) 8 (7.) 4 (.57) Heater (.65 kw) -5 V H799-5 V H797-5 V H79 Valve plate O ring VIT46 H66 Valve shaft seal O ring VIT H6 Valve blanking plate O ring VIT H6 Backing O ring assembly (fluoroelastomer) C5495 Drain and filler plug O rings H7 ck of 5 For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. 86 (.9) 6 (4.8) (4.7) 75 (.8) 9SCIENTIFIC VAPOR PUMPS -8 Diffstak / -5-4 mbar - -6-5 -4 - - -

STANDARD DIFFSTAK 6/7M AND 6/7P 6 (4.) 64 (4.) Ø5 (8.86) 58 (4.84) (.8) 8 x Ø (.4) x Ø (7.87) 9 (7.56) 5 (5.9) Ø57 (6.8) 7 (6.69) 8 (8.58) 9 (.54) 4 5 (4.88) (5.9) 54 (.94) Diffstak 6/7M Standard Diffstak 6/7P M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 7 hydrogen Minimum backing pump displacement m h - RV or EM8 Recommended fluid Santovac 5 Fluid charge (dry) 55 ml Inlet connection compatible with ISO6 NW5 mm compression fittings.5 kw Minimum cooling-water flow at C 5 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbf in - Maximum 6.9 bar / lbf in - 6/7M 6 kg 6/7P 7 kg For maximum throughput 6/7P only Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-8 4-8 -6-5 -4 - Diffstak 6/7-5 -4 - - mbar - - 6 (4.) Diffstak 6/7P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 6/7M -5 V -ph 5/6 Hz B48976-5 V -ph 5/6 Hz B48977-5 V -ph 5/6 Hz B48978 Diffstak 6/7P -5 V -ph 5/6 Hz B48976-5 V -ph 5/6 Hz B48977-5 V -ph 5/6 Hz B48978 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal 49 (9.9) Ø5 (8.86) 58 (4.84) (.8) 9 (7.5) 8 x Ø (.4) x Ø (7.87) 9 (7.56) 5 (5.9) Ø57 (6.8) 7 (6.69) 8 (8.58) 4 5 (4.88) (5.9) (.99) Heater (one heater of each power is required) -5 V.5 kw H7-5 V kw H759-5 V.5 kw H77-5 V kw H76-5 V.5 kw H7-5 V kw H754 Valve plate O ring VIT H6 Valve shaft seal O ring VIT H6 Valve blanking plate O ring VIT H6 Backing O ring assembly (fluoroelastomer) C5495 Drain and filler plug O rings H7 ck of 5 For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. 89 (.5)

STANDARD DIFFSTAK 5/M AND 5/P 769 (.8) 65 (4.6) Ø5 (.9) Diffstak 5/M 94 (.7) (8.5) 4 (.5) 48 (8.) 9 (.4) x Ø (.4) x Ø (.) Ø6 (.8) 4 (9.5) 4 (6.) 8 (7.9) (.94) 4 (5.8) (.) 6 (4.9) Standard Diffstak 5/M M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen hydrogen Minimum backing pump displacement 4 m h - EM4 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO5 NW4 mm compression fittings.5 kw Minimum cooling-water flow at C 8 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbf in - Maximum 6.9 bar / lbf in - 5/M 59 kg 5/P 6 kg For maximum throughput. 5/P only Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-8 4 769 (.8) Diffstak 5/P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 5/M -5 V -ph 5/6 Hz B5976-5 V -ph 5/6 Hz B5977-5 V -ph 5/6 Hz B5978 Diffstak 5/P -5 V -ph 5/6 Hz B5976-5 V -ph 5/6 Hz B5977-5 V -ph 5/6 Hz B5978 Supplied with: NW4 elbow, NW4 centering-ring, NW4 clamp, water pipe couplings and ferrules, inlet ISO 5 trapped O ring 74 (8.5) Ø5 (.9) 94 (8.5) (.7) 4 (.5) 465 (8.) x Ø (.4) x Ø (.) 9 (9.) Ø6 (.8) (9.5) 4 (6.) Heater (one heater of each power is required) -5 V.85 kw H74-5 V.4 kw H76-5 V.85 kw H74-5 V.4 kw H755-5 V.85 kw H77-5 V.4 kw H758 Valve plate O ring VIT449 H69 Valve shaft seal O ring VIT (pack of ) H6 Valve blanking plate O ring VIT8 (pack of ) H68 Backing O ring assembly (fluoroelastomer) C5695 Drain and filler plug O rings (pack of 5) H7 For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. 4 9 (.4) 8 (7.9) (.94) 4 (5.8) (.) 59 (.) SCIENTIFIC VAPOR PUMPS -8 Diffstak 5/ -5-4 mbar - -5-6 -4 - - -

CRYO-COOLED DIFFSTAK CR6/5M AND CR6/5P 97 (.69) 8 (.9) Ø46 (5.75) 9 94 (.54) 7 (.7) Ø (5.) 4 x Ø9 (.5) (.76) x Ø (4.) Ø76 (.99) 7 5 (.67) (4.) 45 (6.7) 89 (7.44) 5 (4.9) 5 (.97) 65 85 (.56) (.5) 6 (8.5) Cryo-cooled Diffstak CR6/5M Cryo-cooled Diffstak CR6/5P CR - model pumps have a cryo cooled baffle. M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have pneumatically actuated high vacuum isolation valve. nitrogen hydrogen 9 water vapor 5 Minimum backing pump displacement 5 m h - RV5 Recommended fluid Santovac 5 Fluid charge (dry) 6 ml Inlet connection compatible with ISO6 NW 6 mm compression fittings.45 kw Minimum cooling-water flow at C 4 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbf in - Maximum 6.9 bar / lbf in - Liquid nitrogen charge.7 l Liquid nitrogen charge duration 8 h 6/5M 6 kg 6/5P 7 kg For maximum throughput. CR6/5P only Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-9 8 Diffstak CR6/5M 97 (.69) 8 8 (.) (.9) (.) Diffstak CR6/5P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak CR6/5M -5 V -ph 5/6 Hz B447976-5 V -ph 5/6 Hz B447977-5 V -ph 5/6 Hz B447978 Diffstak CR6/5P -5 V -ph 5/6 Hz B448976-5 V -ph 5/6 Hz B448977-5 V -ph 5/6 Hz B448978 Supplied with: NW elbow, NW centering-ring, NW clamp water pipe couplings and ferrules. Ø46 (.75) 9 (.54) Ø (5.) 7 5 (4.) (.67) 45 (6.7) 5 4 x Ø9 (.5) x Ø (4.) (.99) 89 (7.44) 5 (4.9) 5 (.97) Heater (.45 kw) -5 V H78-5 V H786-5 V H79 Liquid nitrogen drain O ring VIT56-4 H7 Liquid nitrogen line O ring VOR49 H549 ck of 5 For information about other spares, refer to standard Diffstak 6/5 (see page -8). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. (5.) 7 (.76) Ø76 94 (.7) 85 65 (.5) (.56) (8.66) -8 Diffstak CR6/5-5 -4 mbar - -6-5 -4 - - -

CRYO-COOLED DIFFSTAK CR/M AND CR/P 64 (.4) 79 (.) (.5) Ø74 (6.85) 76(.87) Ø65 (6.5) Diffstak CR/M 8 5 (4.5) (.8) 498 (9.6) 9 (9.) 8 x Ø9 (.5) x Ø45 (5.7) Ø (4.7) 6 7 (4.57) (5.) 8 (7.) 4 (.57) 86 (.9) 6 (4.7) (4.8) 7 (.67) Cryo-cooled Diffstak CR/P CR - model pumps have a cryo-cooled baffle. M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen hydrogen 45 water vapor 9 Minimum backing pump displacement 5 m h - RV5 or RV8 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO NW5 6 mm compression fittings.65 kw Minimum cooling-water flow at C 6 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbf in - Maximum 6.9 bar / lbf in - Liquid nitrogen charge.7 l Liquid nitrogen charge duration 8 h /M kg /P kg For maximum throughput. CR/P only Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6 7-9 64 (.4) 79 (.5) (.) Diffstak CR/P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak CR/M -5 V -ph 5/6 Hz B467976-5 V -ph 5/6 Hz B467977-5 V -ph 5/6 Hz B467978 Diffstak CR/P -5 V -ph 5/6 Hz B468976-5 V -ph 5/6 Hz B468977-5 V -ph 5/6 Hz B468978 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules. Ø74 (6.85) 76 (.87) Ø65 (6.5) 5 8 (.8) (4.5) 498 (9.6) 5 (6.) 8 x Ø9 (.5) x Ø45 (5.9) 9 (9.) Ø (4.7) 6 7 (4.57) (5.) 86 (.9) 6 (4.7) (4.8) 75 (.8) Heater (.65 kw) -5 V H799-5 V H797-5 V H79 Liquid nitrogen drain O ring VIT56-4 H7 Liquid nitrogen line O ring VOR49 H549 ck of 5 For information about other spares, refer to standard Diffstak / (see page -9). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. 7 (5.) 8 (7.) 4 (.57) SCIENTIFIC VAPOR PUMPS -8 Diffstak CR/ -5-4 mbar - -6-5 -4 - - -

CRYO-COOLED DIFFSTAK CR6/7M AND CR6/7P 4 (6.6) 94 (4.) (.7) 64 (4.96) Ø5 (8.86) Ø4 (8.) Diffstak CR6/7M 7 58 7 (8.) (6.69) (.8) 7 (.9) 9 (7.56) 5 (5.9) Ø57 8 x Ø (.4) x Ø (7.87) (6.8) 7 (6.69) 8 (8.58) 9 4 5 (.54) (4.88) (5.9) 59 (4.) 4 Cryo-cooled Diffstak CR6/7M CR - model pumps have a cryo-cooled baffle. M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 6 hydrogen water vapor Minimum backing pump displacement m h - RV or EM8 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO6 NW5 mm compression fittings.5 kw Minimum cooling-water flow at C 5 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbf in - Maximum 6.9 bar / lbf in - Liquid nitrogen charge 7. l Liquid nitrogen charge duration 8 h 4 kg For maximum throughput. CR6/7P only Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6 7-9 4 Diffstak CR6/7 4 (6.6) 94 (4.) (.7) Diffstak CR6/7P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak CR6/7M -5 V -ph 5/6 Hz B487976-5 V -ph 5/6 Hz B487977-5 V -ph 5/6 Hz B487978 Diffstak CR6/7P -5 V -ph 5/6 Hz B488976-5 V -ph 5/6 Hz B488977-5 V -ph 5/6 Hz B488978 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules. Ø4 (8.) 49 (9.9) Ø5 (8.86) 7 58 (6.69) (.8) 7 (8.) 8 (7.9) 7 (.9) 5 (5.9) 8 x Ø (.4) x Ø (7.87) Ø57 (6.8) 7 (6.69) 8 (8.58) Heater (one heater of each power is required) -5 V.5 kw H7-5 V kw H759-5 V.5 kw H77-5 V kw H76-5 V.5 kw H7-5 V kw H754 Liquid nitrogen drain O ring VIT56-4 H7 Liquid nitrogen line O ring VOR49 H549 ck of 5 9 (7.56) 88 (.46) 4 5 (4.88) (5.9) (.99) -8-5 -4 - - mbar For information about other spares, refer to standard Diffstak 6/7 (see page -). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. -4-6 -5 - - -

CRYO-COOLED DIFFSTAK CR5/M AND CR5/P CR - model pumps have a cryo-cooled baffle. M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 7 hydrogen water vapor 6 Minimum backing pump displacement 4 m h - EM4 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO5 NW4 mm compression fittings.5 kw Minimum cooling-water flow at C 8 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbf in - Maximum 6.9 bar / lbf in - Liquid nitrogen charge 6 l Liquid nitrogen charge duration 4 h 58 kg For maximum throughput. CR5/P only Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6 7-9 4 885 (4.84) 97 56 (.) 96 (.8) (.78) Diffstak CR5/P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak CR5/M -5 V -ph 5/6 Hz B57976-5 V -ph 5/6 Hz B57977-5 V -ph 5/6 Hz B57978 Diffstak CR5/P -5 V -ph 5/6 Hz B58976-5 V -ph 5/6 Hz B58977-5 V -ph 5/6 Hz B58978 Supplied with: NW4 elbow, NW4 centering-ring, NW4 clamp, water pipe couplings and ferrules, inlet ISO 5 trapped O ring. Ø54 (.) 74 (8.5) Ø5 (.9) 94 (8.5) (.7) 4 (.5) 466 (8.5) x Ø (.4) x Ø (.) Heater (one heater of each power is required) -5 V.85 kw H74-5 V.4 kw H76-5 V.85 kw H74-5 V.4 kw H755-5 V.85 kw H77-5 V.4 kw H758 Liquid nitrogen drain O ring VIT56-4 H7 Liquid nitrogen line O ring VOR49 H549 ck of 5 9 (9.) 4 (9.57) (.4) 8 (7.9) Ø6 (.8) 9 4 (9.5) 49 (6.) 4 (6.) (.94) 4 (5.8) (.) 59 (.) -8 Diffstak CR5/ -5-4 - - mbar For information about other spares, refer to standard Diffstak 5/ (see page -). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. -6-5 -4 - - - 885 (4.84) 96 56 (.) 97 (.8) (.78) Ø54 (.) 65 (4.6) Ø5 (.9) 94 (8.5) (.7) 4 (.5) x Ø (.4) x Ø (.) 48 (6.6) 4 9 (9.57) (.4) 8 (7.9) Ø6 (.8) 4 (9.5) 49 (6.) 4 (6.) 4 (.94) (5.8) (.) 6 (4.9) 5SCIENTIFIC VAPOR PUMPS Diffstak CR5/M

UNVALVED DIFFSTAK 6/5C -8 Diffstak 6/5C -5-4 mbar - -6-5 -4 - - - Ø95 (.74) 69 (.7) 48 (5.8) 79 (7.5) 4 (.5) 7 (.76) Ø76 (.99) 5 (.97) 85 (.5) 55 (6.) 94 (.7) (4.8) 9 (7.56) 6 Unvalved Diffstak 6/5C C - model pumps have an unvalved ISO collar inlet flange. nitrogen 5 hydrogen 5 Minimum backing pump displacement 5 m h - RV5 Recommended fluid Santovac 5 Fluid charge (dry) 6 ml Inlet connection ISO6 NW 6 mm compression fittings Minimum cooling-water flow at C 4 l h -.45 kw 5 kg For maximum throughput. Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-8 Diffstak 6/5C -5 V -ph 5/6 Hz B44976-5 V -ph 5/6 Hz B44977-5 V -ph 5/6 Hz B44978 Supplied with: NW elbow, NW centering-ring, NW clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal. Heater (.45 kw) -5 V H78-5 V H786-5 V H79 For information about spares, refer to standard Diffstak 6/5 (see page -8). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46.

UNVALVED DIFFSTAK /C AND /F Ø (5.) 84 (.) 77 (6.97) 6 (8.) 44 (6.) 7 (5.) Ø (4.7) 4 (.57) 86 (.9) (4.8) 6 (8.5) 7 (5.) 59 (6.6) 5 (9.9) Diffstak /C Unvalved Diffstak /C Unvalved Diffstak /F C - model pumps have an unvalved ISO collar inlet flange. F - model pumps are unvalved and have a copper compression gasket flange (Conflat ). nitrogen hydrogen 55 Minimum backing pump displacement 5 m h - RV5 or RV8 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection /C ISO /F 6 inch NW5 6 mm compression fittings Minimum cooling-water flow at C 6 l h -.65 kw /C 9 kg /F kg For maximum throughput Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-8 Diffstak /F Diffstak /C -5 V -ph 5/6 Hz B46976-5 V -ph 5/6 Hz B46977-5 V -ph 5/6 Hz B46978 Diffstak /F -5 V -ph 5/6 Hz B464976-5 V -ph 5/6 Hz B464977-5 V -ph 5/6 Hz B464978 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules inlet ISO Co-Seal (C version only). Ø5 (5.98) 5 (4.) 98 (7.8) 7 (8.94) 6 x Ø8. (.) x Ø. (5.) 45 (7.) Ø9 (4.9) 7 (5.) 7 (5.) 59 (6.6) 5 (9.9) Heater (.65 kw) -5 V H799-5 V H797-5 V H79 For information about spares, refer to standard Diffstak / (see page -9). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. 4 (.57) 86 (.9) (4.8) 6 (8.5) 7SCIENTIFIC VAPOR PUMPS -8 Diffstak /C, F -5-4 - - mbar -6-5 -4 - - -

UNVALVED DIFFSTAK 6/7C AND 6/7F Ø8 (7.9) 8 (4.5) 4 (9.5) 9 (.4) 578 (.76) 9 (7.56) 5 (5.9) Ø56 (6.4) 9 (.54) 5 (5.9) 87 (.) PHOTO REQUIRED 7 (6.69) 8 (8.58) 55 (.98) Diffstak 6/7C Unvalved Diffstak 6/7C Unvalved Diffstak 6/7F Ø (7.99) 8 (4.65) 5 (9.9) x Ø8. (.) x Ø8 (7.) (.8) 588 (.5) 9 (7.56) 5 (5.9) Ø56 (6.4) 7 (6.69) 9 (.54) 5 (5.9) 87 (.) 8 C - model pumps have an unvalved ISO collar inlet flange. F - model pumps are unvalved and have a copper compression gasket flange (Conflat ). nitrogen 76 hydrogen 4 Minimum backing pump displacement m h - RV or EM8 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection 6/7C ISO6 6/7F 8 inch NW5 mm compression fittings Minimum cooling-water flow at C 5 l h -.5 kw 6/7C 8 kg 6/7F kg For maximum throughput Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-8 Diffstak 6/7F Diffstak 6/7C -5 V -ph 5/6 Hz B48976-5 V -ph 5/6 Hz B48977-5 V -ph 5/6 Hz B48978 Diffstak 6/7F -5 V -ph 5/6 Hz B484976-5 V -ph 5/6 Hz B484977-5 V -ph 5/6 Hz B484978 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal (C version only). 8 (8.58) 55 (.98) Heater (one heater of each power is required) -5 V.5 kw H7-5 V kw H759-5 V.5 kw H77-5 V kw H76-5 V.5 kw H7-5 V kw H754 For information about spares, refer to standard Diffstak 6/7 (see page -). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. -8 Diffstak 6/7C, F -5-4 - - mbar -6-5 -4 - - -

UNVALVED DIFFSTAK 5/C C - model pumps have an unvalved ISO collar inlet flange. nitrogen hydrogen Minimum backing pump displacement 4 m h - EM4 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection ISO5 NW4 mm compression fittings Minimum cooling-water flow at C 8 l h -.5 kw 46 kg For maximum throughput Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU.8 7-8 Silicone DC75.6-8 Diffstak 5/C -5 V -ph 5/6 Hz B5976-5 V -ph 5/6 Hz B5977-5 V -ph 5/6 Hz B5978 Supplied with: NW4 elbow, NW4 centering-ring, NW4 clamp, water pipe couplings and ferrules, inlet ISO 5 trapped O ring Heater (one heater of each power is required) -5 V.85 kw H74-5 V.4 kw H76-5 V.85 kw H74-5 V.4 kw H755-5 V.85 kw H77-5 V.4 kw H758 For information about spares, refer to standard Diffstak 5/ (see page -). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page -5; for electropneumatic control valves, see page -5; for thermal snap-switch accessories, see page -; for hardware components, see page -; and for vapor pump fluids, see page -46. 4-8 Diffstak 5/C -5-4 mbar - -6-5 -4 - - - Ø9 (.4) 4 (5.59) 57 (4.6) 8 (5.) 76 (7.8) 9 (.4) 8 (7.9) Ø6 (.8) (.94) (.) 5 (.55) 4 (9.5) 5 (9.8) 9 (.4) 9SCIENTIFIC VAPOR PUMPS

DIFFSTAK INSTALLATION M-model pumps have a manually operated high vacuum valve. P-model pumps have a pneumatically operated high vacuum valve. Both M-model and P-model pumps have inlet flanges which are compatible with ISO flanges: the internal diameter of the inlet flange is narrower and the flange is deeper than a standard ISO flange, to accommodate the high vacuum valve. C-model pumps do not have a high vacuum valve and have an ISO flange on the inlet (see pages -6 - -9). F-model pumps do not have a high vacuum valve and have a CF flange on the inlet (see pages -7 and -8). Refer to the diagrams and the tables on these pages to identify the pipeline components and valves required to complete the typical Diffstak installation shown. Items supplied with the pump are shown as a dotted line. Read the footnotes below the diagrams and the tables for more information and for details of the installation requirements for the different models of Diffstaks. 6/5, /, 6/7 installation ** 5P 9 7 6 5 *** 5P 4 * 4P 4P * 8 DIAGRAM COMPONENT 6/5 COMPONENT / COMPONENT 6/7 COMPONENT KEY DESCRIPTION SIZE QUANTITY SIZE QUANTITY SIZE QUANTITY ISO tube/collar assembly ISO6 ISO ISO6 Rotable flange pack ISO6 ISO ISO6 4 Bolts (size minimum length, mm) M- and P-model M8 75 4 M8 75 8 M 9 8 F-model - - M8 55 6 M8 6 4 5 Inlet seal ISO6 ISO ISO6 5 BRV valve, manual BRVM BRV5M BRV5M BRV valve, pneumatic BRVP BRV5P BRV5P 6 Clamp NW NW5 NW5 7 O' ring assembly NW NW5 NW5 8 6 4-port light-weight electropneumatic - - - control valve 9 6 5-port electropneumatic control valve - - - *** 5-port electropneumatic control valve - - - These items are supplied with the pumps, except that the inlet seal for the F-model pumps is not supplied. Not required for F-model pumps; use CF fittings (which must be obtained from another supplier) Not required for C-model pumps; use claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly. 4 Bolts are not available from BOC Edwards. Bolts are not required for C-model pumps; use claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly; use 4 claw clamps for ISO6, ISO and ISO6 flanges. 5 These inlet seals are suitable for standard, cryo-cooled and C-model pumps only; use CF fittings (which must be obtained from another supplier) for F-model pumps. 6 Required only for pneumatic operation BRV valves; use either 5-port control valve or 4-port control valves. If you use 4-port control valves, you can use the isolation position of the BRV valve. 7 Required only for P-model pumps, to control the operation of the high vacuum valve.

5/ installation 7 6 P ** 5P 5 4 * 7 8 6 9 7 7 6 6 * P ** 5 DIAGRAM COMPONENT COMPONENT KEY DESCRIPTION SIZE QUANTITY ISO tube/collar assembly ISO5 Rotatable flange pack ISO5 Bolts (size, minimum M length, mm) M- & P-model 4 Inlet seal, trapped O ring ISO5 5 PV4 valve, manual PV4MK PV4 valve, pneumatic PV4PK 6 Clamp NW4 5 7 O' ring assembly NW4 5 8 T' piece NW4 These items are supplied with the pump. Not required for C-model pumps; use 6 claw clamps to bolt the pump ISO inlet flange directly to 9 Elbow NW4 the ISO tube/collar assembly. 4 -port electropneumatic Bolts are not available from BOC Edwards. Bolts are not required for Model-C pumps; use 6 claw control valve clamps to clamp the pump ISO inlet flange directly to the ISO tube/collar assembly. 5 5-port electropneumatic - 4 Required only for pneumatic operation PVPK valves; use -port control valve for each of the two PVPK valves. control valve 5 Required only for P-model pumps, to control the high vacuum valve. SCIENTIFIC VAPOR PUMPS

DIFFSTAK COMBINED OUTFITS mm Diffstak outfit above Diffstak valve 8 Ultimate vacuum (with Santovac 5 fluid) x -8 mbar x -6 Minimum cooling water 6 l h - Maximum power. kw (approx.) 6 kg Inlet connection ISO Outlet connection NW5 Vapor pump Diffstak / M Rotary vacuum pump RV5 Backing/roughing valve BRV5K Vacuum gauge - pirani APG-M-NW5 65 (4.) Compact unit, delivering ~ x -8 mbar ultimate pressure (depending on vapor pump fluid used) Integrated manual backing/roughing valve and water cooled baffle Active Pirani gauge head * in backing line automatically interlocks the Diffstak Enhanced safety shields for the highest temperature surfaces Castors are fitted as standard Fully factory tested These are compact, high performance units featuring either the 6 mm or mm Diffstak both backed by the RV5 two-stage rotary pump. Inlet pumping speeds above the valve are 5 and 8 respectively. The Diffstak has an integral water cooled baffle and is fitted with manual quarterswing and backing/roughing valves. A manual air admittance valve and a Pirani gauge are fitted in the backing line to the rotary pump. The unit is supplied complete with rotary pump oil but vapor pump fluid should be selected from the fluids and sealants section. Additional gauges are optional extras (see page -7). A separate display or controller is required to show the pressure measured by the Pirani gauge head. 6 mm Diffstak outfit above Diffstak valve 5 Ultimate vacuum (with Santovac 5 fluid) x -8 mbar x -6 Minimum cooling water flow 4 l h - Maximum power.8 kw (approx.) 5 kg Vapor pump Diffstak 6 / 5M Rotary vacuum pump RV5 Backing/roughing valve BRVK Vacuum gauge - pirani APG-M-NW6 6 mm Diffstak Combined Outfit (requires electrical supply cable) 5 V -ph 5/6 Hz B64699 V -ph 5/6 Hz B64695 45 V -ph 5/6 Hz B64696 mm Diffstak Combined Outfit (requires electrical supply cable) 5 V -ph 5/6 Hz B6699 V -ph 5/6 Hz B6695 45 V -ph 5/6 Hz B6696 ACCESSORIES 54 (.6) 4 (.9) Line cords for combined outfit - m electrical supply cable with IEC socket UK, three pin plug A555 North European plug A556 No plug A558 USA plug A557 The Diffstak combination includes the inlet flange Co-Seal, rotary pump oil and instruction manual. The Diffusion pump oil is not included, but can be ordered through BOC Edwards, see page -47. The power cable (line cord) is not included and needs to be ordered separately, through BOC Edwards, see above. To meet your special requirements we also offer custom built Diffstak combined outfits or combined outfits featuring turbomolecular pumps, see page 5-8. Please contact us for further details.

VAPOR PUMP - THERMAL SNAP-SWITCHES COOLING-FAIL THERMAL SNAP-SWITCH This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. 5 (.8) COOLING-FAIL THERMAL SNAP-SWITCH (TVA5/6 AND TVW5/6) This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. Ø5.88 (.6) Ø.68 (.4).5 8.54 (.) (.7) 65 (.56) 4 (.55) Use with these pumps Diffstak, EO, EO4, EO6, EO9 8B4A and B5A Electrical data 5 A at V a.c. or 4 V a.c. Preset operation temperatures Open 46 ± 5 ºC Close (automatic reset) 8 ± 5 ºC Cooling-fail thermal snap-switch B COOLING-FAIL THERMAL SNAP-SWITCH (EO5/6 AND SI) This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. Ø5.88 (.6) Ø.68 (.4).5 8.54 (.) (.7) Use with these pumps Electrical data Preset operation temperatures Open 6 ± ºC Close (automatic reset) 5 ± ºC Cooling-fail thermal snap-switch TVA5/6, TVW5/6 5 A at V a.c. resistive or A at 4 V a.c. resistive B4 PUMP-READY THERMAL SNAP-SWITCH This switch opens at a preset temperature to indicate that the pump is at operating temperature. It can be used to control the opening of a high vacuum valve. The switch resets (closes) when the pump cools down to a preset temperature..5 (.9).8 (.94).5 (.9).8 (.94) Ø6..5 5.5 (.6) (.) (.6) Ø.6 (.4).5 (.9).8 (.94) Use with these pumps Electrical data Preset operation temperatures Open 5 ± ºC Close (automatic reset) 5 ± ºC EO5/6, SI, EO/9 5 A at V a.c. resistive or A at 4 V a.c. resistive Use with these pumps All Diffstak, EO5/6, SI, EO/9 EO4, EO6, EO9 Electrical data 6 A at V a.c. resistive or A at 4 V a.c. resistive or 7 A ar V a.c. or dc, resistive Preset operation temperatures Open 8 ±.8 ºC Close (automatic reset) 6 ±.8 ºC Cooling-fail thermal snap-switch B796 Pump-ready thermal snap-switch B4 SCIENTIFIC VAPOR PUMPS

BOILER PROTECTION THERMAL SNAP- SWITCH This switch opens at a preset temperature when the pump boiler base exceeds the maximum safe operating temperature. The switch resets (closes) when the pump cools down to a preset temperature. Ø8. (.7) Ø.6 (.4).5 5.49 (.) (.6).5 (.9).8 (.94) Use with these pumps Electrical data Pre-set operation temperatures Open ± 4.4 ºC Close (automatic reset) 84 ± 4.4 ºC EO5/6, EO/9, SI 5 A at V a.c. 5/6 Hz A at 4 V a.c. 5/6 Hz Boiler protection thermal snap-switch B4 4