CHAPTER ONE: INTRODUCTION... 1 STUDY BACKGROUND... 1 STUDY GOALS AND OBJECTIVES... 1 INTENDED AUDIENCE... 2 SCOPE AND FORMAT... 2 INFORMATION SOURCES AND METHODOLOGY... 3 ANALYST CREDENTIALS... 4 RELATED BCC RESEARCH REPORTS... 4 BCC ONLINE SERVICES... 4 DISCLAIMER... 5 CHAPTER TWO: EXECUTIVE SUMMARY... 6 SUMMARY TABLE 1 GLOBAL MARKET FOR TERAHERTZ RADIATION DEVICES AND SYSTEMS, BY TYPE OF SYSTEM, THROUGH 2021 ($ MILLIONS)... 6 SUMMARY FIGURE 1 GLOBAL MARKET FOR TERAHERTZ RADIATION DEVICES AND SYSTEMS, BY TYPE OF SYSTEM, THROUGH 2021 ($ MILLIONS)... 7 SUMMARY TABLE 2 GLOBAL MARKET FOR TERAHERTZ RADIATION DEVICES AND SYSTEMS, BY APPLICATION, THROUGH 2021 ($ MILLIONS)... 7 SUMMARY FIGURE 2 GLOBAL MARKET FOR TERAHERTZ RADIATION DEVICES AND SYSTEMS, BY APPLICATION, THROUGH 2021 ($ MILLIONS)... 8 CHAPTER THREE: OVERVIEW... 9 GENERAL DESCRIPTION OF TERAHERTZ RADIATION... 9 DEFINITION AND GENERAL DESCRIPTION... 9 PROPERTIES... 9 Line of Sight Travel... 10 Limited Range... 10 Safety... 10 Ability to Penetrate Nonconducting Materials... 11 Improved Image Resolution/Contrast... 11 Absorption by Water and Other Materials... 11 Interactions with Metal... 12 Spectral Sensitivity... 12 HISTORY... 13 THZ ENABLING TECHNOLOGIES... 14 THZ SOURCES... 15 Laser Sources... 15 Optically Pumped THz Lasers... 15 Ti:Sapphire Femtosecond Laser... 16 Quantum Cascade Lasers... 16
Free-Electron Lasers... 17 Electronic Sources... 18 Backward-Wave Oscillators... 18 Direct Multiplied Sources... 18 Photomixing... 19 Hybrid Sources... 19 THZ DETECTORS... 19 Direct Detectors... 20 Bolometers... 20 Golay Cells... 20 Pyroelectric Detectors... 21 Semiconductor Detectors... 21 Heterodyne Receivers... 22 Schottky Mixers... 22 Superconductor-Isolator-Superconductor Mixers... 22 Hot Electron Bolometer Mixers... 23 THZ WAVEGUIDES... 23 Metal Wire Waveguide... 23 Other Types of THz Waveguide... 24 THZ SWITCHES, REGULATORS, LENSES AND OTHER DEVICES... 24 Optically Switched Metamaterial THz Switch... 24 Organic Molecule Switching... 25 Voltage Controlled Metamaterial THz Modulator... 25 Ballistic Deflection THz Transistor... 25 THz Lenses, Filters and Windows... 25 NEW MATERIALS AND TECHNOLOGIES... 26 Nanomaterials... 26 Superconductors... 27 Metamaterials... 27 FIGURE 1 SPLIT RING RESONATOR... 28 Graphene... 29 Micro-Electromechanical Systems (MEMS)... 30 TYPES OF THZ SYSTEMS... 31 IMAGING SYSTEMS... 32 SPECTROSCOPES... 32 SENSORS... 32 COMMUNICATIONS DEVICES... 33 COMPUTERS... 33 POTENTIAL THZ END USES AND APPLICATIONS... 33 TABLE 1 POTENTIAL END USES AND APPLICATIONS OF THZ RADIATION... 34 OVERALL MARKET SIZE AND SEGMENTATION... 34 MARKET SIZE... 34
FIGURE 2 TRENDS IN GLOBAL MARKET FOR THZ SYSTEMS, 2010 2021 ($ MILLIONS)... 35 APPLICATION SEGMENTS... 35 TABLE 2 MARKET FOR THZ SYSTEMS BY END-USER SEGMENT, THROUGH 2021 ($ MILLIONS)... 35 FIGURE 3 THZ MARKET SHARES BY END-USER SEGMENT, 2010 2021 (% OF TOTAL SALES)... 36 FIGURE 3 (CONTINUED)... 37 CHAPTER FOUR: THZ IMAGING SYSTEMS: TECHNOLOGIES, APPLICATIONS AND MARKETS, 2010 2021... 38 TECHNOLOGIES... 38 ACTIVE VS. PASSIVE SYSTEMS... 38 TYPE OF ILLUMINATION... 38 Pulsed Systems... 39 Continuous-Wave Systems... 39 TECHNOLOGICAL HURDLES... 40 Power... 40 Spatial Resolution... 40 Signal-to-Noise Ratio... 41 Image Acquisition Speed... 41 Scattering... 42 Cost... 42 Non-Line-of-Sight Applications... 42 MANUFACTURERS... 43 TABLE 3 COMPANIES THAT MANUFACTURE OR ARE DEVELOPING TERAHERTZ IMAGING DEVICES... 44 END USES AND APPLICATIONS... 44 TABLE 4 POTENTIAL THZ IMAGING END USES AND APPLICATIONS... 45 SECURITY/PUBLIC SAFETY... 45 Passenger Screening... 45 HEALTHCARE... 46 Medical Imaging... 46 Intraoperative Imaging... 47 Skin Cancer Detection... 48 Endoscopy... 48 Clinical Dentistry... 48 Diagnostics... 49 MANUFACTURING... 49 Process/Quality Control... 49 TABLE 5 THZ NONDESTRUCTIVE TESTING APPLICATIONS... 49 Aerospace... 49 Pharmaceuticals... 50
Semiconductor Wafer and Circuit Inspection and Testing... 50 Other Applications... 51 SCIENTIFIC RESEARCH... 51 Astronomy... 51 Art and Archaeology... 52 MILITARY/DEFENSE... 52 Target Acquisition and Identification... 52 Land Mine and IED Detection... 53 MARKETS... 53 TABLE 6 MARKET FOR THZ IMAGING BY END-USE, 2010 2021 ($ MILLIONS)... 53 FIGURE 4 TRENDS IN GLOBAL MARKET FOR TERAHERTZ IMAGING SYSTEMS, 2010 2021 ($ MILLIONS)... 54 FIGURE 5 TRENDS IN THZ IMAGING SYSTEM MARKET SHARES BY TYPE OF APPLICATION, 2010 2021 (% OF TOTAL MARKET)... 55 SECURITY AND PUBLIC SAFETY... 55 Passenger Screening... 55 TABLE 7 GLOBAL MARKET FOR TERAHERTZ AND OTHER AIRPORT SECURITY SCREENING EQUIPMENT, THROUGH 2021 ($ MILLIONS)... 56 HEALTHCARE... 57 TABLE 8 GLOBAL MARKET FOR TERAHERTZ IMAGING DEVICES FOR HEALTHCARE APPLICATIONS, THROUGH 2021 ($ MILLIONS)... 57 Biomedical Imaging... 57 TABLE 9 GLOBAL MARKET FOR TERAHERTZ MEDICAL IMAGING APPLICATIONS, THROUGH 2021 ($ MILLIONS)... 58 Intraoperative Imaging... 58 TABLE 10 GLOBAL MARKET FOR INTRAOPERATIVE IMAGING EQUIPMENT, THROUGH 2021 ($ MILLIONS)... 58 FIGURE 6 INTRAOPERATIVE IMAGING TECHNOLOGIES MARKET SHARES, 2010 (PERCENT OF TOTAL INTRAOPERATIVE IMAGING EQUIPMENT SALES)... 59 TABLE 11 MARKET FOR INTRAOPERATIVE TERAHERTZ IMAGING EQUIPMENT, THROUGH 2021 ($ MILLIONS)... 60 Skin Cancer Detection... 60 TABLE 12 GLOBAL MARKET FOR TERAHERTZ SKIN CANCER IMAGING EQUIPMENT, THROUGH 2021 ($ MILLIONS)... 60 Endoscopy... 61 TABLE 13 GLOBAL MARKET FOR TERAHERTZ ENDOSCOPES, THROUGH 2021 ($ MILLIONS)... 61 Clinical Dentistry... 61
TABLE 14 GLOBAL MARKET FOR TERAHERTZ DENTAL CARIES IMAGING EQUIPMENT, THROUGH 2021 ($ MILLIONS)... 62 Diagnostics... 62 Burn Diagnosis... 62 TABLE 15 GLOBAL MARKET FOR TERAHERTZ BURN DIAGNOSTIC INSTRUMENTS, THROUGH 2021 ($ MILLIONS)... 63 MANUFACTURING... 63 Nondestructive Testing... 63 TABLE 16 GLOBAL MARKET FOR TERAHERTZ IMAGING EQUIPMENT FOR NDT APPLICATIONS, THROUGH 2021 ($ MILLIONS)... 64 SCIENTIFIC RESEARCH... 64 Astronomy... 64 FIGURE 7 ALMA THZ TELESCOPE ANTENNA COSTS (% OF TOTAL COST OF A 30M ANTENNA)... 65 TABLE 17 GLOBAL MARKET FOR TERAHERTZ ASTRONOMICAL IMAGING EQUIPMENT, THROUGH 2021 ($ MILLIONS)... 66 MILITARY/DEFENSE... 66 Radar Imaging... 66 TABLE 18 GLOBAL MARKET FOR TERAHERTZ MILITARY RADAR APPLICATIONS, THROUGH 2021 ($ MILLIONS)... 67 CHAPTER FIVE: TERAHERTZ SPECTROSCOPES: TECHNOLOGIES, APPLICATIONS AND MARKETS, 2010 2021... 68 TECHNOLOGIES... 68 SOURCES... 68 REFLECTIVE VS. TRANSMISSION DETECTION... 69 DETECTORS... 69 TECHNOLOGICAL HURDLES... 69 Slow Acquisition Speeds... 69 END USES AND APPLICATIONS... 70 SCIENTIFIC RESEARCH... 70 Materials Science... 70 Biochemistry... 70 Plasma Diagnostics... 71 Art and Archaeology... 71 Environmental and Earth Science... 72 MANUFACTURERS... 72 TABLE 19 COMPANIES THAT MANUFACTURE OR ARE DEVELOPING TERAHERTZ SPECTROSCOPES... 72 TABLE 19 (CONTINUED)... 73 MARKETS... 73 SUMMARY... 73 FIGURE 8 TRENDS IN GLOBAL MARKET FOR TERAHERTZ SPECTROSCOPY SYSTEMS, 2010 2021 ($ MILLIONS)... 74
SCIENTIFIC RESEARCH... 74 TABLE 20 GLOBAL MARKET FOR TERAHERTZ SPECTROSCOPY EQUIPMENT FOR SCIENTIFIC RESEARCH APPLICATIONS, THROUGH 2021 ($ MILLIONS)... 74 CHAPTER SIX: TERAHERTZ SENSORS: TECHNOLOGIES, APPLICATIONS AND MARKETS, 2010 2021... 75 TECHNOLOGIES... 75 THZ BIOCHIPS... 75 MOISTURE DETECTORS... 75 APPLICATIONS... 76 TABLE 21 POTENTIAL THZ SENSOR END USES AND APPLICATIONS... 76 SECURITY AND PUBLIC SAFETY... 76 Chemical Agent Detection... 76 HEALTHCARE... 76 Medical Diagnostics... 76 MANUFACTURING... 77 Process/Quality Control... 77 AGRICULTURE... 77 Measurement of Leaf and Seed Water Content... 77 MILITARY/DEFENSE... 78 Chemical Agent Detection... 78 MARKETS... 78 TABLE 22 MARKET FOR THZ SENSORS BY END-USER SEGMENT THROUGH 2021 ($ MILLIONS)... 78 FIGURE 9 TRENDS IN GLOBAL MARKET FOR TERAHERTZ SENSORS, 2010 2021 ($ MILLIONS)... 79 FIGURE 10 TRENDS IN THZ SENSOR MARKET SHARES BY END- USER SEGMENT, 2010 2021 (% OF TOTAL MARKET)... 80 SECURITY AND PUBLIC SAFETY... 80 Chemical Agent Detection... 80 TABLE 23 GLOBAL SECURITY/PUBLIC SAFETY MARKET FOR THZ CHEMICAL WARFARE AGENT AND TOXIC CHEMICAL DETECTORS, THROUGH 2021 ($ MILLIONS)... 81 HEALTHCARE... 81 Medical Diagnostics... 81 TABLE 24 GLOBAL MARKET FOR TERAHERTZ BIOCHIPS USED IN MEDICAL DIAGNOSTICS APPLICATIONS, THROUGH 2021 ($ MILLIONS)... 82 MANUFACTURING... 82 Process/Quality Control... 82 TABLE 25 GLOBAL MARKET FOR TERAHERTZ BIOCHIPS USED IN INDUSTRIAL PROCESS AND QUALITY CONTROL, THROUGH 2021 ($ MILLIONS)... 83
Pathogen Detection... 83 TABLE 26 GLOBAL MARKET FOR TERAHERTZ BIOCHIPS USED IN INDUSTRIAL PROCESS AND QUALITY CONTROL, THROUGH 2021 ($ MILLIONS)... 83 Measurement of Package Moisture Content... 84 TABLE 27 GLOBAL MARKET FOR TERAHERTZ MOISTURE SENSORS USED IN INDUSTRIAL PROCESS AND QUALITY CONTROL, THROUGH 2021 ($ MILLIONS)... 84 AGRICULTURE... 84 TABLE 28 GLOBAL MARKET FOR TERAHERTZ MOISTURE SENSORS USED IN AGRICULTURE, THROUGH 2021 ($ MILLIONS)... 84 MILITARY/DEFENSE... 85 TABLE 29 GLOBAL MILITARY/DEFENSE MARKET FOR THZ CHEMICAL WARFARE AGENT AND TOXIC CHEMICAL DETECTORS, THROUGH 2021 ($ MILLIONS)... 85 CHAPTER SEVEN: TERAHERTZ COMMUNICATION SYSTEMS: TECHNOLOGIES, APPLICATIONS AND MARKETS, 2010 2021... 86 TECHNOLOGIES... 86 ANTENNAS... 86 EMITTERS... 87 MODULATORS... 88 FILTERS... 89 END USES AND APPLICATIONS... 90 SATELLITE-TO-SATELLITE COMMUNICATIONS... 90 INDOOR WIRELESS COMMUNICATIONS... 91 TACTICAL (MILITARY) COMMUNICATIONS... 91 MARKETS... 91 SUMMARY... 91 TABLE 30 MARKET FOR THZ COMMUNICATIONS EQUIPMENT BY END-USER SEGMENT, THROUGH 2021 ($ MILLIONS)... 92 FIGURE 11 TRENDS IN GLOBAL MARKET FOR TERAHERTZ COMMUNICATION SYSTEMS, 2010 2021 ($ MILLIONS)... 92 FIGURE 12 TRENDS IN THZ COMMUNICATION MARKET SHARES BY END-USER SEGMENT, 2010 2021 (% OF TOTAL MARKET)... 93 COMMUNICATIONS... 93 TABLE 31 GLOBAL MARKET FOR TERAHERTZ DEVICES USED IN CIVILIAN COMMUNICATIONS, THROUGH 2021 ($ MILLIONS)... 94 Satellite-to-Satellite Communications... 94 TABLE 32 GLOBAL MARKET FOR TERAHERTZ CIVILIAN SATELLITE-TO-SATELLITE COMMUNICATIONS, THROUGH 2021 ($ MILLIONS)... 95 Indoor Wireless Communications... 95
TABLE 33 GLOBAL MARKET FOR TERAHERTZ INDOOR COMMUNICATIONS EQUIPMENT, THROUGH 2021 ($ MILLIONS)... 96 MILITARY/DEFENSE... 96 TABLE 34 GLOBAL MARKET FOR TERAHERTZ COMMUNICATION DEVICES USED IN MILITARY APPLICATIONS, THROUGH 2021 ($ MILLIONS)... 97 Tactical Communications... 97 TABLE 35 GLOBAL MARKET FOR TERAHERTZ TACTICAL COMMUNICATIONS EQUIPMENT, THROUGH 2021 ($ MILLIONS)... 98 Military Satellite Communications... 98 TABLE 36 GLOBAL MARKET FOR TERAHERTZ MILITARY SATELLITE-TO-SATELLITE COMMUNICATIONS, THROUGH 2021 ($ MILLIONS)... 98 CHAPTER EIGHT: TERAHERTZ COMPUTING: TECHNOLOGIES, APPLICATIONS AND MARKETS, 2010 2021... 99 TECHNOLOGIES... 99 END USES AND APPLICATIONS... 100 MARKET... 100 TABLE 37 GLOBAL MARKET FOR THZ HIGH PERFORMANCE COMPUTING INTERCONNECTS, THROUGH 2021 ($ MILLIONS/%)... 101 CHAPTER NINE: INDUSTRY STRUCTURE... 102 NATIONALITY... 102 FIGURE 13 TERAHERTZ COMPANIES BY COUNTRY (% OF TOTAL COMPANIES)... 102 FIGURE 13 (CONTINUED)... 103 ANNUAL SALES... 103 FIGURE 14 TERAHERTZ COMPANIES SEGMENTED BY TOTAL ANNUAL REVENUES (% OF ALL THZ COMPANIES)... 104 FIGURE 15 TERAHERTZ COMPANIES BY TYPE OF OWNERSHIP (% OF ALL THZ COMPANIES)... 105 PRODUCT SPECIALIZATION... 105 FIGURE 16 TERAHERTZ COMPANIES SPECIALIZING IN THZ TECHNOLOGY VS. COMPANIES WITH OTHER PRODUCT LINES (% OF ALL THZ COMPANIES)... 106 COMMERCIALIZATION... 106 FIGURE 17 TERAHERTZ COMPANIES WITH COMMERCIAL PRODUCT (% OF ALL THZ COMPANIES)... 107 CHAPTER TEN: GOVERNMENT-SPONSORED THZ RESEARCH PROGRAMS... 108 UNITED STATES... 108 FEDERAL LEVEL INITIATIVES... 108 Department of Defense... 109
Defense Advanced Research Projects Agency... 109 Terahertz Electronics Program... 109 Terahertz Imaging Focal-Plane Technology (TIFT) Project... 109 Mission Adaptable Chemical Sensor (MACS) Project... 110 U.S. Army... 110 U.S. Air Force... 110 U.S. Navy... 111 Department of Homeland Security... 111 Department of Energy... 112 National Aeronautics and Space Administration... 112 National Science Foundation... 113 Integrative, Hybrid and Complex Systems (IHCS) Program... 113 National Institutes of Health... 113 INDIVIDUAL STATE INITIATIVES... 113 EUROPE... 114 EUROPEAN UNION... 114 Ultrafast Electronics for Terahertz Rapid Analysis in Compact Lab-on-Chip Applications (ULTRA) Project... 114 Optically Driven Terahertz Amplifiers (OPTHER) Project... 115 Multispectral Terahertz, Infrared, Visible Imaging and Spectroscopy (MUSIS) Project... 115 Towards 0.5 Terahertz Silicon/Germanium Hetero- Junction Bipolar Technology (DOTFIVE) Project... 116 TeraTOP... 117 EUROPEAN SPACE AGENCY... 117 INDIVIDUAL GOVERNMENTS... 118 Germany... 118 United Kingdom... 118 Italy... 119 JAPAN... 119 APPENDIX A: COMPANY PROFILES... 120 COMPANIES THAT ARE PRODUCING OR KNOWN TO BE DEVELOPING THZ RADIATION-BASED PRODUCTS... 120 AB MILLIMETRE... 120 ACREO AB... 120 ADVANTEST CORP.... 121 AGILTRON... 121 ALPES LASERS SA... 121 APPLIED RESEARCH AND PHOTONICS INC.... 121 BAE SYSTEMS PLC... 122 BROADBAND INC.... 122 BRUKER OPTICS INC.... 122 CANON INC.... 123
COHERENT INC.... 123 DEL MAR PHOTONICS INC.... 123 EMCORE CORP.... 124 FEMTOLASERS PRODUKTIONS GMBH... 124 GOODRICH CORP.... 124 INNOVATIVE PHOTONICS SOLUTIONS INC.... 125 INSIGHT PRODUCT CO.... 125 JENA OPTRONIK GMBH... 125 LOCKHEED MARTIN SPACE SYSTEMS... 126 LONGWAVE PHOTONICS LLC... 126 M SQUARED LASERS LTD.... 126 MICROTECH INSTRUMENTS INC.... 127 NORTHROP GRUMMAN CORP.... 127 NOVATRANS GROUP SA... 127 NP PHOTONICS INC.... 128 OPHIR-SPIRICON INC.... 128 PICOMETRIX LLC... 128 QMC INSTRUMENTS LTD.... 129 RADIABEAM TECHNOLOGIES LLC... 129 RAYTHEON CO.... 130 SARNOFF CORP.... 130 SCIENCE APPLICATIONS INTERNATIONAL CORP.... 130 SCIENCETECH INC.... 131 SMITHS DETECTION INC.... 131 SPECTRUM DETECTOR INC.... 131 SPIRE CORP.... 132 SYNVIEW GMBH... 132 TELEDYNE SCIENTIFIC AND IMAGING LLC... 132 TERAPHYSICS CORP.... 133 TERASENSE DEVELOPMENT LABS LLC... 133 TERAVIEW LTD.... 133 THOMAS KEATING LTD.... 134 TRAYCER DIAGNOSTIC SYSTEMS INC.... 134 THRUVISION LTD.... 135 TOCHIGI NIKON CORP.... 135 TOPTICA PHOTONICS AG... 136 TOSHIBA CORPORATION... 136 VERISANTE TECHNOLOGY INC.... 136 VERMONT PHOTONICS TECHNOLOGIES CORP.... 137 VIRGINIA DIODES INC.... 137 ZOMEGA TERAHERTZ CORP.... 137 OTHER COMPANIES THAT ARE CONDUCTING OR HAVE CONDUCTED THZ RESEARCH AND DEVELOPMENT... 138 OTHER COMPANIES THAT ARE (CONTINUED)... 139
APPENDIX B: THZ RESEARCH PROGRAMS... 140 NORTH-AMERICA-BASED ORGANIZATIONS... 140 ARGONNE NATIONAL LABORATORY... 140 JEFFERSON NATIONAL ACCELERATOR FACILITY FREE ELECTRON LASER PROGRAM... 141 LAWRENCE LIVERMORE NATIONAL LABORATORY... 141 LOS ALAMOS NATIONAL LABORATORY... 141 OKLAHOMA STATE UNIVERSITY (OSU) TERAHERTZ RESEARCH LABORATORY... 142 RENSSELAER POLYTECHNIC INSTITUTE (RPI) CENTER FOR TERAHERTZ RESEARCH... 142 SANDIA NATIONAL LABORATORY... 143 UNIVERSITY OF CALIFORNIA (SANTA BARBARA) (UCSB) CENTER FOR TERAHERTZ SCIENCE AND TECHNOLOGY... 143 UNIVERSITY OF WATERLOO MICROWAVE AND TERAHERTZ PHOTONICS INTEGRATED SYSTEM LAB... 144 FOREIGN-BASED ORGANIZATIONS... 144 ASIA... 144 National Institute of Technology, Warangal, Terahertz Science and Technology Center... 144 Osaka University Institute of Laser Engineering Division of LaserTerahertz Research... 145 Rikagaku Kenkyusho (RIKEN) Terahertz-Wave Research Group... 145 EUROPE... 146 Aachen University Institute for Semiconductor Electronics... 146 Czech Academy of Sciences Laboratory of Terahertz Spectroscopy... 146 Braunschweig Technical University Terahertz Communication Lab... 146 Fraunhoer Institute for Physical Measurement Techniques... 147 Leibniz Gemeinschaft/German Teraherz Center... 147 National Institute of Chemical Physics and Biophysics Terahertz and Low Temperature Group... 147 Oxford University Terahertz Photonics Group... 148 Swiss Federal Institute of Technology Terahertz Group... 148 Technical University of Vienna Photonics Institute THz Group... 149 University of Leeds Institute of Microwaves and Photonics THz Imaging Group... 149 APPENDIX C: PATENT ANALYSIS... 151
FIGURE 18 SUMMARY OF U.S. TERAHERTZ TECHNOLOGY PATENTS AND PATENT APPLICATIONS AS OF DEC. 31, 2011 (% OF TOTAL THZ PATENTS AND APPLICATIONS IDENTIFIED)... 152 FIGURE 19 U.S. PATENTS AND PATENT APPLICATIONS FOR THZ COMPONENTS AND SUBSYSTEMS AS OF DEC. 31, 2011 (% OF TOTAL THZ PATENTS AND APPLICATIONS IDENTIFIED)... 153 FIGURE 19 (CONTINUED)... 154 FIGURE 20 U.S. PATENTS AND PATENT APPLICATIONS FOR COMPLETE THZ SYSTEMS AS OF DEC. 31, 2011 (% OF TOTAL THZ PATENTS AND APPLICATIONS IDENTIFIED)... 155 FIGURE 21 U.S. TERAHERTZ TECHNOLOGY PATENTS AND PATENT APPLICATIONS BY COUNTRY OF GRANTEE OR APPLICANT AS OF DEC. 31, 2011 (% OF TOTAL THZ PATENTS AND APPLICATIONS IDENTIFIED)... 156 FIGURE 21 (CONTINUED)... 157 FIGURE 22 U.S. TERAHERTZ TECHNOLOGY PATENTS AND PATENT APPLICATIONS BY TYPE OF GRANTEE OR APPLICANT AS OF DEC. 31, 2011 (% OF TOTAL THZ PATENTS AND APPLICATIONS IDENTIFIED)... 157 FIGURE 22 (CONTINUED)... 158 TABLE 38 MAJOR THZ IP PORTFOLIOS (NUMBER OF U.S. PATENTS/PATENT APPLICATIONS)... 159