SIEMENS ULTRAMAT 6 IR CARBON MONOXIDE ANALYZER METHOD VALIDATION FOR TESTING CARBON MONOXIDE IN NITROGEN, NF

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2015 SIEMENS ULTRAMAT 6 IR CARBON MONOXIDE ANALYZER METHOD VALIDATION FOR TESTING CARBON MONOXIDE IN NITROGEN, NF

FINAL APPROVAL REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 1 of 13 This Methods Validation (MV) Summary Report, for the Siemens ULTRAMAT 6 IR Carbon Monoxide Analyzer, has been prepared by Integrated Project Services (IPS) and approved by IPS and Siemens. Author Mark Celii Associated Director Medical Gases, Compliance Services Integrated Project Services Date Approver Aaron Weinstein Senior Director, Compliance Services Integrated Project Services Date Approver Dean Davis Analytical Products and Solutions Quality Manager Siemens USA Date

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 2 of 13 Table of Contents 1.0 OBJECTIVE... 3 2.0 SCOPE... 3 3.0 DESCRIPTION AND BACKGROUND/DISCUSSION... 3 3.1 Analyzer Description... 3 3.2 Measuring Principle... 4 4.0 METHODS VALIDATION SUMMARY... 5 4.1 Test Gases... 5 4.2 Testing Conducted... 5 4.3 Accuracy and Precision... 6 4.4 Robustness... 8 4.5 Specificity... 9 4.6 Linearity & Range... 10 4.7 Linear Regression IR Method... 10 4.8 Linear Regression Detector Tube Method... 12 5.0 DEVIATION SUMMARY... 13 6.0 CONCLUSION... 13

1.0 OBJECTIVE REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 3 of 13 The objective of the analytical Method Validation (MV) protocol was to provide documented evidence that the Siemens ULTRAMAT 6 IR Carbon Monoxide Analyzer used to measure Carbon Monoxide in Nitrogen product is suitable for its intended purpose and is an equivalent, or better method for quantifying the Carbon Monoxide impurity levels, than the National Formulary compendial method for determining Carbon Monoxide in Nitrogen, NF. The analyzer can be used to monitor bulk product in air separation plants, measure CO levels in Nitrogen after being filled in bulk liquid Nitrogen transports, and used for the analysis of filled cylinders. The validation of the method demonstrates that it is suitable for its intended purpose. 2.0 SCOPE This summary report provides the testing results and conclusions for the execution of the Siemens ULTRAMAT 6 IR Carbon Monoxide Analyzer method validation for the analysis of medical-grade Nitrogen in lieu of the NF compendial method. 3.0 DESCRIPTION AND BACKGROUND/DISCUSSION 3.1 Analyzer Description The Siemens ULTRAMAT 6 IR Carbon Monoxide analyzer operates according to the infrared two- beam alternating light principle with double- layer detector and optical coupler. The measuring principle is based on the molecule-specific absorption of bands of infrared radiation. The absorbed wavelengths are characteristic to the individual gases, but may partially overlap. This results in cross-sensitivities which are reduced to a minimum in the ULTRAMAT channel by the following measures: Gas- filled filter cell (beam divider) Double- layer detector with optical coupler Optical filters if necessary.

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 4 of 13 3.2 Measuring Principle An IR source (5) which is heated to approx. 700 C and can be shifted to balance the system, is divided by the beam divider (7) into two equal beams (sample and reference beams). The beam divider also acts as a filter cell. The reference beam passes through a reference cell (11) filled with Nitrogen (a noninfrared-active gas) and reaches the right-hand side of the detector (12) practically unattenuated. The sample beam passes through the sample cell (10) through which the sample gas flows and reaches the left- hand side of the detector (13) attenuated to a lesser or greater extent depending on the concentration of the sample gas. The detector is filled with a defined concentration of the gas component to be measured and is designed as a double- layer detector. The center of the absorption band is preferentially absorbed in the upper detector layer; the edges of the band are absorbed to approximately the same extent in the upper and lower layers. The upper and lower detector layers are connected together via the microflow sensor (15). This coupling means that the spectral sensitivity has a very narrow band. The optical coupler (14) lengthens the lower detector chamber layer optically. The infrared absorption in the second detector layer is varied by changing the slider position (16). It is thus possible to individually minimize the influence of interfering components. A chopper (8) rotates between the beam divider and the sample cell and interrupts the two beams alternately and periodically. If absorption takes place in the sample cell, a pulsating current is generated which is converted by the microflow sensor (15) into an electric signal. The microflow sensor consists of two nickel grids heated to approx. 120 C which, together with two further resistors, form a Wheatstone bridge. The pulsating flow together with the very close arrangement of the Nickel grids leads to a change in resistance. This leads to an offset in the bridge which is dependent on the concentration of the sample gas. Figure 1 - Mode of Operation

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 5 of 13 4.0 METHODS VALIDATION SUMMARY 4.1 Test Gases The following certified challenge gases were used to conduct the testing and represent the gas concentrations within the Dräger CO detector tube graduation scale, the limit of Carbon Monoxide in Nitrogen, NF, and include typical impurities in Nitrogen, NF. Challenge Gas #1 99.999% Nitrogen Challenge Gas #2 5.173 ppm Carbon Monoxide / Balance Nitrogen Challenge Gas #3 10.11 ppm Carbon Monoxide / Balance Nitrogen Challenge Gas #4 15.37 ppm Carbon Monoxide / Balance Nitrogen Challenge Gas #5 20.08 ppm Carbon Monoxide / Balance Nitrogen Challenge Gas #6 5.025 ppm Carbon Monoxide / 8.670 ppm Oxygen / Balance Nitrogen Challenge Gas #7 5.173 ppm Carbon Monoxide / 2.819 ppm Methane / Balance Nitrogen 4.2 Testing Conducted The seven challenge gases were sampled using the Siemens ULTRAMAT 6 IR Carbon Monoxide analyzer as follows: Robustness Accuracy, Precision, Linearity, & Range (Day 1) Accuracy, Precision, Linearity, & Range (Day 2) Specificity Gas 3 Gas 1 Gas 1 Gas 1-5 (low flow rate) Gas 2 Gas 2 (from Day 1) Gas 3 Gas 3 Gas 6 Gas 3 (high flow rate) Gas 4 Gas 5 Gas 4 Gas 5 Gas 7 Figure 2 IR Method Testing Conducted

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 6 of 13 The seven challenge gases were also sampled using a Dräger Carbon Monoxide detector tubes as follows: Robustness Accuracy, Precision, Linearity, & Range (Day 1) Accuracy, Precision, Linearity, & Range (Day 2) Specificity Gas 1 Gas 1 Gas 1-5 Gas 2 Gas 2 (from Day 2) Not Applicable Gas 3 Gas 3 Gas 6 Gas 4 Gas 4 Gas 5 Gas 5 Gas 7 4.3 Accuracy and Precision Figure 3 Detector Tube Method Testing Conducted Challenge Gases 1 through 5 were sampled on two separate days using both methods. Five (5) replicate samples were taken with the Siemens ULTRAMAT 6 IR Carbon Monoxide analyzer while two (2) replicate samples were taken with the Dräger detector tubes. The acceptance criteria used to evaluate accuracy and precision was: Accuracy: 1.0 ppm Precision: RSD (%) 2.0%

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 7 of 13 Table 1 below provides the result of the sampling conducted using the IR Method (all readings in ppm CO). Table 1 IR Method Accuracy and Precision Results Replicate # Gas 1 Gas 2 Gas 3 Gas 4 Gas 5 Day1 Day2 Day1 Day2 Day1 Day2 Day1 Day2 Day1 Day2 1 0.00 0.00 5.12 5.08 10.13 10.11 15.32 15.24 20.33 20.10 2 0.00 0.00 5.14 5.09 10.15 10.12 15.31 15.23 20.31 20.12 3 0.00 0.00 5.14 5.11 10.12 10.12 15.32 15.16 20.25 20.17 4 0.00 0.00 5.14 5.10 10.16 10.09 15.29 15.20 20.32 20.19 5 0.00 0.00 5.14 5.10 10.12 10.12 15.31 15.20 20.30 20.18 Precision Calculations Average 0.000 0.00 5.136 5.096 10.136 10.112 15.310 15.206 20.302 20.152 Std Dev(σ) 0.000 0.00 0.009 0.011 0.018 0.013 0.012 0.031 0.031 0.040 RSD(σ R) n/a n/a 0.174% 0.224% 0.179% 0.129% 0.080% 0.206% 0.153% 0.197% Accuracy Calculations Conc. Of Std. 0.000 5.173 10.11 15.37 20.08 Deviation From Std. 1 0.000 0.000 0.037 0.077 0.026 0.002 0.060 0.164 0.222 0.072 Table 2 below provides the result of the sampling conducted using the Dräger detector tube method (all readings in ppm CO). Table 2 Dräger Tube Method Accuracy and Precision Results Replicate # Gas 1 Gas 2 Gas 3 Gas 4 Gas 5 Day1 Day2 Day1 Day2 Day1 Day2 Day1 Day2 Day1 Day2 1 ND ND 5 5 10 10 10-20 10-20 10-20 10-20 2 ND ND 5 5 10 10 10-20 10-20 10-20 10-20 Precision Calculations Average 0.000 0.00 5 5 10 10 10-20 10-20 10-20 10-20 Accuracy Calculations Conc. Of Std. 0.000 5.173 10.11 15.37 20.08 Deviation From Std. 1 n/a n/a 0.173 0.173 0.11 0.11 n/a n/a n/a n/a ND: Not Detected 1 The absolute value of the deviation from standard is reported.

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 8 of 13 4.4 Robustness Robustness testing was conducted on the Siemens ULTRAMAT 6 IR Carbon Monoxide analyzer only using five (5) replicate samples on Challenge Gas 3 at the minimum analyzer flow rate of 0.3 l/min (nominal) and at the maximum analyzer flow rate of 1.5 l/min (nominal). The acceptance criteria used to evaluate robustness was for the method to meet the accuracy and precision acceptance criteria at both the minimum and maximum flow rates tested. The results of the robustness testing are provided in Table 3 below. Table 3 IR Method Robustness Results Replicate # Low Flow Rate High Flow Rate 0.3 lpm 1.5 lpm 1 10.09 10.08 2 10.11 10.10 3 10.09 10.09 4 10.10 10.09 5 10.07 10.10 Precision Calculations Average 10.092 10.092 Std Dev(σ) 0.015 0.008 RSD(σ R) 0.147% 0.083% Accuracy Calculations Conc. Of Std. 10.11 10.11 Deviation From Std. 2 0.018 0.018 2 The absolute value of the deviation from standard is reported.

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 9 of 13 4.5 Specificity Challenge Gases 6 and 7 were sampled one time using both methods. Five (5) replicate samples were taken with the Siemens ULTRAMAT 6 IR Carbon Monoxide analyzer while two (2) replicate samples were taken with the Dräger detector tubes. The acceptance criteria used to evaluate specificity was for the results meeting the accuracy and precision acceptance criteria at each of the Carbon Monoxide concentrations. In addition, the qualitative results (Carbon Monoxide was detected or not) for the analyzer and the detector tube methods were required to be equivalent. Table 4 IR Method Specificity Results Replicate # Gas 6 Gas 7 IR Method DT Method IR Method DT Method 1 5.02 <5 5.00 5 2 5.04 <5 4.98 5 3 5.03 5.00 4 5.02 4.99 5 5.04 5.01 Precision Calculations Average 5.030 <5 4.996 5 Std Dev(σ) 0.010 0.011 RSD(σ R) 0.199% 0.228% Accuracy Calculations Conc. Of Std. 5.025 5.004 Deviation From Std. 3 0.005 >0.025 4 0.008 0.004 Qualitative Results Carbon Monoxide Detected detected detected detected detected 3 The absolute value of the deviation from standard is reported. 4 Calculated based on a certified standard of 5.025 ppm and the detector tube reading just below 5 ppm.

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 10 of 13 4.6 Linearity & Range For the testing conducted in section 4.3, the measured Carbon Monoxide concentration as a function of the challenge gas Carbon Monoxide concentration for both the analyzer method and the detector tube method was plotted. A linear relationship was performed using the least squares method to determine the correlations of the two methods. The following acceptance criteria were used to evaluate the linearity of the methods: Correlation coefficient (r) 0.99 y-intercept, slope of the regression line and the residual sum of squares will be reported 4.7 Linear Regression IR Method The linear regression for the IR method indicates a strong correlation between the measured and known Carbon Monoxide concentrations between 0 and 20 ppm Carbon Monoxide in Nitrogen.

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 11 of 13 Challenge Measured Conc Measured Conc Sample Known Conc Gas No Day 1 Day 2 1 Replicate 1 0.00 0.00 0.00 Replicate 2 0.00 0.00 0.00 Replicate 3 0.00 0.00 0.00 Replicate 4 0.00 0.00 0.00 Replicate 5 0.00 0.00 0.00 2 Replicate 1 5.173 5.12 5.08 Replicate 2 5.173 5.14 5.09 Replicate 3 5.173 5.14 5.11 Replicate 4 5.173 5.14 5.10 Replicate 5 5.173 5.14 5.10 3 Replicate 1 10.11 10.13 10.11 Replicate 2 10.11 10.15 10.12 Replicate 3 10.11 10.12 10.12 Replicate 4 10.11 10.16 10.09 Replicate 5 10.11 10.12 10.12 4 Replicate 1 15.37 15.32 15.24 Replicate 2 15.37 15.31 15.23 Replicate 3 15.37 15.32 15.16 Replicate 4 15.37 15.29 15.20 Replicate 5 15.37 15.31 15.20 5 Replicate 1 20.08 20.33 20.10 Replicate 2 20.08 20.31 20.12 Replicate 3 20.08 20.25 20.17 Replicate 4 20.08 20.32 20.19 Replicate 5 20.08 20.30 20.18 Parameter Value Acceptance Criteria y-intercept: -0.0479 reported slope: 1.0046 reported residual sum of squares: 0.42922 reported correlation coefficient (r): 0.99992 0.99

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 12 of 13 4.8 Linear Regression Detector Tube Method When conducting the linear regression for the detector tube method, the regression was limited to the range of 0 to 10 ppm since the readings for Challenge Gas #4 and #5 were between 10 ppm and 30 ppm divisions on the detector tube and a specific value could not be obtained. The linear regressions indicate the IR method is exceeds the detector tube method within the subject range. Challenge Gas No Sample Known Conc Measured Conc Day 1 Measured Conc Day 2 1 Replicate 1 0.00 0 0 Replicate 2 0.00 0 0 2 Replicate 1 5.173 5 5 Replicate 2 5.173 5 5 3 Replicate 1 10.11 10 10 Replicate 2 10.11 10 10 4 Replicate 1 15.37 10-20 10-20 Replicate 2 15.37 10-20 10-20 5 Replicate 1 20.08 10-20 10-20 Replicate 2 20.08 10-20 10-20 Parameter Value 1 Acceptance Criteria y-intercept: -0.0380 reported slope: 0.9889 reported residual sum of squares: 0.03632 reported correlation coefficient (r): 0.99991 0.99 1. Linear Regression based on Challenge Gas 1-3 only.

REVISION #: 0 ISSUE DATE: December 4, 2015 PAGE: 13 of 13 5.0 DEVIATION SUMMARY There were no deviations and no observations recorded during the execution of this protocol. 6.0 CONCLUSION The Method Validation (MV) protocol for the Siemens ULTRAMAT 6 IR Carbon Monoxide Analyzer Method for Testing Carbon Monoxide in Nitrogen, NF has been successfully completed. There were no deviations or observations identified. Based on the results of the execution of the method validation protocol the Siemens ULTRAMAT 6 IR Carbon Monoxide Analyzer Method for Testing Carbon Monoxide in Nitrogen, NF Method has been demonstrated to be suitable for use and has been demonstrated to be at least equivalent to the NF method and therefore satisfies the requirement for equivalency.