Vacuum unit ideal for controlling large flow rates Vacuum unit VSQ/VSQP series

Vacuum unit ideal for controlling large flow rates Vacuum unit VSQ/VSQP series Features This 1.5 mm width vacuum unit is ideal for controlling large flow rates. A vacuum ejector unit and vacuum switching unit are available to respond to different needs. Three types of vacuum ejector units are available: singlenozzle, twostep nozzle and twin nozzle types. The twin nozzle is for uses with a long suction time and transfer time. The vacuum startup to the reference vacuum pressure is controlled with the large bore size nozzle, and the pressure higher than the reference vacuum pressure is controlled with the small bore nozzle, thereby greatly reducing the consumed flow rate. (Patent pending) The vacuum generation is controlled with one signal. Large/small nozzle switching pressure adjusting trimmer for large bore size nozzle Valve timing for vacuum break Reference vacuum pressure (random setting possible) Consumption flow rate for small bore size nozzle Atmosphere Large bore size nozzle Small bore size nozzle Nozzle type T15 T2 Consumption flow rate 2 2 46 The twostep nozzle suction flow rate is about % more than the conventional signal. The singlenozzle is an orthodox integrated large flow vacuum generator. A full lineup of vacuum generating valve variations is available. Singlenozzle: Normally open, normally closed, double Twostep nozzle: Normally open, normally closed Twinnozzle: Normally closed Vacuum switching unit: Normally open, normally closed 17

Structure drawing (Vacuum ejector unit, single nozzle type) Vacuum release main valve Filter element Sensor unit Pilot exhaust port Nozzle Structure drawing (Vacuum ejector unit, twostep nozzle type) Pilot exhaust port Vacuum generating main valve unit Vacuum release main valve Vacuum generating main valve unit Nozzle Diffuser Diffuser Nozzle Diffuser 1 Diffuser 2 Silencer element Filter element Sensor unit Silencer element Filter element Sensor unit Check valve Silencer element Filter element Sensor unit Vacuum related components Vacuum pad Inch/NPT specifications Related components Nozzle Diffuser 1 Diffuser 2 Silencer element 174

VSQ/VSQP series Structure drawing (Vacuum ejector unit, twin nozzle type) Vacuum break main valve Large/small nozzle switching pressure adjusting trimmer Break flow rate adjusting needle Filter element Sensor unit Nozzle 1 Nozzle 2 Diffuser Silencer element Large bore size vacuum generating main valve unit Large/small nozzle switching pressure adjusting trimmer Small diameter vacuum generating main valve unit Check valve Check valve Filter element Sensor unit Pilot exhaust port Nozzle 1 Nozzle 2 Diffuser Silencer element Structure drawing (Vacuum switching unit) Vacuum release main valve Filter element Sensor unit Vacuum supply port Vacuum generating main valve unit Filter element Sensor unit Pilot exhaust port Vacuum supply port 175

VSQ series Operation explanation drawing (Vacuum ejector unit, singlenozzle type (normally closed)) Vacuum generation stopped state Relase circuit Vacuum release main valve Filter element Sensor unit Vacuum generating main valve unit Nozzle Diffuser Vacuum generating state Silencer element Vacuum related components Vacuum pad Vacuum release air supply Inch/NPT specifications Related components 176

VSQ series Operation explanation drawing (Vacuum ejector unit, twostep nozzle type (normally closed)) Vacuum generation stopped state Vacuum release main valve Filter element Sensor unit Vacuum generating main valve unit Check valve Nozzle Diffuser 1 Diffuser 2 Silencer element Vacuum generating state Vacuum release air supply 177

Operation explanation drawing (vacuum ejector unit, twin nozzle type) Vacuum generation stopped state Large/small nozzle switching pressure adjusting trimmer Vacuum release main valve Filter element Sensor unit Large bore size vacuum generating main valve unit Check valve Check valve Nozzle 1 Nozzle 2 Diffuser Silencer element Small diameter vacuum generating main valve unit Vacuum generating state (Vacuum startup to reference vacuum pressure: Large bore size nozzle) Vacuum generating state (Higher than reference vacuum pressure: small bore size nozzle) Vacuum related components Vacuum pad Vacuum release air supply Inch/NPT specifications Related components 17

VSQP series Operation explanation drawing (Vacuum switching unit (normally closed)) Vacuum generation stopped state Vacuum break main valve Filter element Sensor unit Vacuum generating main valve unit Vacuum supply port Vacuum supply state Vacuum release air supply 179

VSQ/VSQP series Specifications Common Unit Vacuum ejector unit Vacuum switchover unit Working fluid Air Working pressure range. to.7mpa Ambient temperature range 5 to 5 C Working vacuum pressure range to Ejector characteristics Nozzle type Solenoid valve Nozzle diameter (mm) Rated pressure (MPa) H15 5 1.5.5 Single nozzle E15.5 H2 2..5 Twin nozzles E2 T15.7 1.5 (Small bore size) (Large bore size) T2 1. 2. (Small bore size) (Large bore size).5.5 D7 Twostep nozzle D D12.7 1. 1.2.5 *.Values in parentheses for the twinnozzle are small bore nozzle values. Operation method Valve structure Rated voltage Tolerable voltage fluctuation range Surge protective circuit Power consumption Manual operation Operation display Switching valve Twin nozzles types Item Operation method Valve structure Valve type Lubrication Effective sectional area (Cv value) Twostep nozzle type Item Operation method Valve structure Valve type Lubrication Effective sectional area (Cv value) Ultimate vacuum () 9 66 92 9 66 92 9 (9) 9 Suction flow ( /min(anr)) 6 95 42 1 1 4 (24) 7 (6) 24 6 Direct operation Rubber seal, poppet valve 24V DC V AC 24V DC % V AC % Surge absorber Bridge diode.55w 1VA Push type locking valve During coil energizing: Red LED ON Consumed flow ( /min(anr)) 7 2 15 (2) 2 (46) Small bore size valve Large bore size valve Vacuum release valve Air pressure operation using pilot valve Rubber seal, poppet valve Normally closed Normally closed Normally closed Not required.5mm 2 (.19) 16.5mm 2 (.9).5mm 2 (.19) 2 46 7 Vacuum generating valve Vacuum release valve Air pressure operation using pilot valve Rubber seal, poppet valve Normally closed, normally open Normally closed Not required.5mm 2 (.19).5mm 2 (.19) Related components Inch/NPT specifications Vacuum related components Vacuum pad 1

VSQ/VSQP series Single nozzle type Item Operation method Valve structure Valve type Lubrication Effective sectional area (Cv value) Minimum excitation time Vacuum switchover unit Item Operation method Valve structure Valve type Lubrication Effective sectional area (Cv value) Vacuum generating valve Vacuum release valve Air pressure operation using pilot valve Rubber seal, poppet valve Normally closed, normally open, double solenoid Normally closed Not required 16.5mm 2 (.9).5mm 2 (.19) 5 msec or more Vacuum generating valve Vacuum release valve Air pressure operation using pilot valve Rubber seal, poppet valve Normally closed, normally open Normally closed Not required 16.5mm 2 (.9).5mm 2 (.19) Vacuum sensor specifications Working pressure range Withstanding pressure Storage temperature range Working temperature range Working humidity range Power supply voltage Protective structure Number of pressure setting points Switch output Hysteresis Repeatability Responsiveness Display Number of displays Display accuracy Temperature characteristics to 2 2 to 7 C to 5 C 5 to 5%RH 12 to 24V DC % ripple (PP) % or less IEC Standards IP or equivalent 2 NPN open collector V DC ma or less Residual voltage: 1.2V or less (at load current ma) to digit (variable) Within.%F.S. 5msec max. 2 1/2digit 7segment LED display 4 times/sec. 1%F.S..%F.S.( to 5 C, 25 C reference) Vacuum filter specifications Element material PVF (Polyvinyl formal) Filtration degree µm Element area 157mm 2 Replacement filter element ordering type VSQE Vacuum release function Release air flow rate to 5 /min(anr) (at supply pressure:.5 MPa) Valve lead wire colors 24V DC specifications Twin nozzles types Twostep nozzle type Single nozzle type Vacuum switching unit Black Vacuum generation () Vacuum generation () Vacuum generation () Vacuum generation () Gray Vacuum relese () Vacuum relese () Vacuum relese () Vacuum relese () Blue Minus () Brown 24V DC (+ common) 24V DC (+ common) 24V DC (+ common) 24V DC (+ common) VAC specifications Twostep nozzle type Single nozzle type Vacuum switching unit Black Vacuum generation () Vacuum generation () Vacuum generation () Gray Vacuum relese () Vacuum relese () Vacuum relese () Blue Brown common common common 11

Electric circuit (solenoid valve) 24V DC Internal circuit V AC + + V Supply valve (Black) 24V DC common (Brown) V Vacuum release valve (Gray) Single nozzle type Twostep nozzle type Vacuum pump system compatible type V Supply valve (Black) V (Blue) Vacuum sensor electrical circuit diagram Sensor Pressure display Main circuit 24V DC common (Brown) Twin nozzles types (Brown) V Vacuum release valve (Gray) Load (Black) SW OUT1 Load (White) SW OUT2 (Blue) Supply valve (Black) Common Vacuum release valve (Brown) (Gray) Single nozzle type Twostep nozzle type Vacuum pump system compatible type Vacuum related components Vacuum pad Related components Inch/NPT specifications Power supply 12 to 24V DC COM 12

VSQ series Ultimate vacuum () Single nozzle type characteristics VSQH15 VSQ5 VSQE15 6 2 E type ultimate vacuum L type ultimate vacuum H type suction flow E type suction flow Vacuum characteristics diagram 2 H type ultimate vacuum E type consumed flow H and L type consumed flow L type suction flow 16 12 Flow rate ( /min (A.N.R)) Ultimate vacuum () VSQH2 VSQ VSQE2 6 2 L type ultimate vacuum Vacuum characteristics diagram H type ultimate vacuum 2 E type ultimate vacuum E type consumed flow H and L type consumed flow L type suction flow 2 16 H type suction flow E type suction flow Flow rate ( /min (A.N.R))..4.5.6.7 Supply pressure (MPa)..4.5.6.7 Supply pressure (MPa) Twostep nozzle type characteristics VSQD7 Vacuum characteristics diagram Ultimate vacuum 5 VSQD7 Flow rate characteristics diagram Ultimate vacuum () 6 Consumed flow Suction flow 2 Flow rate ( /min (A.N.R) ) Vacuum () 6 2 2..4.5.6.7 Supply pressure (MPa) 2 Suction flow ( /min (A.N.R) )

Ultimate vacuum () VSQD 6 2..4.5.6.7 Supply pressure (MPa) VSQD12 Vacuum characteristics diagram Ultimate vacuum Consumed flow Suction flow 6 2 Vacuum characteristics diagram Ultimate vacuum Consumed flow Flow rate ( /min (A.N.R) ) Vacuum related components Vacuum pad Inch/NPT specifications Related components Vacuum () VSQD 6 2 Flow rate characteristics diagram 2 5 6 7 Suction flow ( /min (A.N.R) ) VSQD12 Flow rate characteristics diagram Ultimate vacuum () 6 2 Suction flow..4.5.6.7 Supply pressure (MPa) 6 2 Flow rate ( /min (A.N.R) ) Vacuum () 6 2 2 6 Suction flow ( /min (A.N.R) ) 14

VSQ series Ultimate vacuum () Twin nozzle type characteristics VSQT15B 6 Vacuum characteristics diagram 2 16 Large bore size nozzle ultimate vacuum Small bore size nozzle ultimate vacuum Large bore size nozzle consumption flow rate 12 Flow rate ( /min (A.N.R) ) Vacuum () VSQT15B 6 Flow rate characteristics diagram (small bore size nozzle) 2 Large bore size nozzle suction flow rate Small bore size nozzle suction flow rate Small bore size nozzle consumption flow rate..4.5.6.7 Supply pressure (MPa) 2 5 15 2 25 Suction flow ( /min (A.N.R) ) VSQT2B Vacuum characteristics diagram Large bore size nozzle ultimate vacuum VSQT2B Flow rate characteristics diagram (small bore size nozzle) Ultimate vacuum () 6 2 Small bore size nozzle ultimate vacuum Large bore size nozzle consumption flow rate Large bore size nozzle suction flow rate Small bore size nozzle consumption flow rate Small bore size nozzle suction flow rate 2 1 12 6 Flow rate ( /min (A.N.R) ) Vacuum () 6 2..4.5.6.7 Supply pressure (MPa) 5 15 2 25 5 Suction flow ( /min (A.N.R) ) 15

How to order vacuum ejector unit (Example) VSQ (1) T15 (2) B () (4) (5) S (6) (7) SW () () Vacuum sensor specifications (7) Solenoid valve voltage (6) Exhaust port (EX) (5) (PS) Symbol 6 Exhaust method 6 mm pushin joint mm pushin joint mm pushin joint *. ø6 mm is available only when the twostep nozzle type is selected for item (1). (4) (V) Symbol mm pushin joint mm pushin joint () Valve type Symbol B A D Valve type Normally closed type Normally open type Double solenoid type *1. Only the normally closed type (symbol: B) is available when the twinnozzle type is selected for item (1). *2. Only the normally closed type (symbol: B) or normally open type (symbol: A) is available when the twostep nozzle type is selected for item (1) (2) Vacuum characteristics, nozzle diameter Symbol H15 5 Single nozzle type E15 H2 E2 Twin nozzle type Twostep nozzle type T15 T2 D7 D D12 Nozzle diameter (mm) ø1.5 ø1.5 ø1.5 ø2. ø2. ø2. ø.7 ø1.5 (small bore size) (large bore size) ø1. ø2. (small bore size) (large bore size) ø.7 ø1. ø1.2 Rated pressure (MPa).5.5.5.5.5.5 Ultimate vacuum () 9 66 92 9 66 92 9 (9) *.Values in parentheses for the twinnozzle are small bore nozzle values. (1) Discrete vacuum ejector unit type: VSQ *. The ø6 mm push in joint is attached to the pilot valve's exhaust port. Symbol SW Blank Specifications 2point output with LED display No vacuum sensor Symbol 1 Specifications 24V DC V AC *. Only the 24V DC (symbol: ) is available for the twinnozzle type. Symbol S J Exhaust method Atmospheric exhaust type ø12mm push in joint common exhaust type 9 Suction flow Consumed flow (l/min(anr)) (l/min(anr)) 6 95 42 7 1 2 1 4 15 (24) 7 (6) 24 6 (2) 2 (46) 2 46 7 Related components Inch/NPT specifications Vacuum related components Vacuum pad 16

Vacuum unit VSQ series How to order vacuum ejector unit (Example) VSQP (1) B (2) () (4) (5) SW (6) (6) Vacuum sensor specifications Symbol SW Blank Specifications 2point output with LED display No vacuum sensor (5) Solenoid valve voltage Symbol 1 Specifications 24V DC V AC () (V) Symbol 12 mm pushin joint 12 mm pushin joint (2) Valve type (4) Vacuum supply port (PV) Symbol B A Valve type Normally closed type Normally open type (1) Discrete vacuum switching unit type: VSQP Symbol 12 mm pushin joint 12 mm pushin joint *. The ø6 mm push in joint is attached to the pilot valve's exhaust port and air supply port. Fixing method Fix the vacuum unit VSQ with M screws using the fixing holes on the resin body. (See the dimensions for the fixing hole pitch.) 17

Read before using. See pages to 6 in the introduction for Safety Precautions and Precautions common to products. See pages to 5 in the introduction for Precautions common to vacuums. WARNING CAUTION Special precautions 1. The working temperature range is 5 C to 5 C. Do not use this product under other temperature conditions. 2. When continuously energizing the pilot valve for a long time, heat is generated from the coil. This heat could cause burns or affect peripheral devices. Contact your nearest CKD sales office when using energizing continuously for long times.. When using the double solenoid, the switching valve position is neutral when the pilot air supply is stopped and restarted, including when using for the first time after delivery. When restarting the pilot air supply, issue a signal to the pilot valve or accurately switch the valve with manual operations. 4. Check that leakage current is 1 ma or less when operating the valve. Malfunctions may result from the leakage current and cause problems. 5. Vacuum leaks are tolerated with the with vacuum changeover unit vacuum holding function and with check valve function. Provide separate safety measures if the vacuum must be held for a long time. 6. Avoid using this product in environments containing corrosive gas. Do not use this product for fluid purposes. 7. Do not use this product in an atmosphere containing flammable or explosive gases or fluids. This product does not have an explosion proof structure, so there is a risk of fires and explosions.. Do not this product for applications that generate heat exceeding the working temperature range. The sensor could fail. 9. Turn the power OFF before wiring. Check the lead wire color and terminal numbers when wiring, and check that the output terminal, power terminal and common terminal are not shortcircuited. The sensor could fail if these terminals are shortcircuited. 1. Compressed air contains large amounts of drainage (water, oxidized oil, tar, foreign matter, etc.) that may adversely affect VSJ/VSJP performance. Dehumidify air with an after cooler or dryer and improve air quality. 2. Do not use a lubricator.. Rust, etc., in piping may result in operation faults. Install a 5 µm or smaller filter preceding the supply port. Flush pipes before use and at an appropriate cycle. 4. Do not apply excessive tension or bending to the pilot valve or vacuum sensor leads. Wires or connectors may break. 5. Avoid using this vacuum ejector in environments with corrosive or flammable gas. Do not use this unit for fluids. 6. This product does not have a drip proof or dustproof structure. Avoid using it where it could be subject to water, oil or dust. 7. Avoid sucking in dust, salt or iron chips, etc.. Do not operate the vacuum break valve when generating vacuum. 9. When replacing the cartridge joint at the supply or vacuum port, remove all matter adhered to the seal, and accurately insert the pin.. Keep the piping for the vacuum, common exhaust, pilot exhaust, and supply as short as possible. The vacuum component's true performance may not be attained if there is piping resistance. 11. Use a stable DC power supply. 12. Insert a surge voltage absorption circuit in the relay or solenoid valve, etc., connected to the output terminal or power terminal. Avoid uses in which the current exceeds the rating.. Ground the FG terminal when using the unit power, such as the switching power. 14. Do not shortcircuit the output terminal with other terminals. 15. Do not apply an excessive load on the component as it could break. 16. Wiring or uses that apply a load on the nozzle, etc., could result in damage. 17. When using the twinnozzle, provide a margin between the vacuum during workpiece suction and for the large/small nozzle switching pressure sensor's setting value. If the vacuum and setting value are the same, the large/small bore size pilot valve may operate in sequence. Related components Inch/NPT specifications Vacuum related components Vacuum pad 1

VSQ series No vacuum sensor Circuit diagram PS VSQ vacuum ejector unit, singlenozzle type (atmospheric model) EX V 4 7 Vacuum release pilot valve Vacuum generating pilot valve ø6 (pilot valve exhaust port).9 21 2. 9.1 22.1 2ø.5 2.5 LED 2 Approx. 5 Manual button 5 61. Exhaust port ød1 (air supply port) 29 1.5 12 6.5 ød1 ød2 (vacuum port) 79 ød2 Unit: mm 1mm width, with 2point output vacuum sensor Vacuum release pilot valve Vacuum generating pilot valve Manual button Circuit diagram PS EX ø6 (pilot valve exhaust port) 4 V 7.9 21 2. 9.1 22.1 2ø.5 2.5 LED 2 Approx. 5 5 61. Up key Mode key Down key Approx. 15 ød1 (air supply port) 29 1.5 12 6.5 Exhaust port ød1 ød2 (vacuum port) 79 ød2 Unit: mm 19

No vacuum sensor PS VSQ vacuum ejector unit, singlenozzle type (common exhaust model) Circuit diagram EX V 4 7 Vacuum release pilot valve Vacuum generating pilot valve ø6 (pilot valve exhaust port).9 1mm width, with 2point output vacuum sensor 21 2. 9.1 22.1 2ø.5 2.5 LED 2 Approx. 5 Manual button 5 61. ød1 (air supply port) 29 5.2 1.5 12 6.5 Vacuum release pilot valve Vacuum generating pilot valve Manual button ød1 ød2 (vacuum port) 79 ø12 (exhaust port) ød2 Unit: mm Vacuum related components Vacuum pad Circuit diagram PS EX ø6 (pilot valve exhaust port) 4 V 7.9 21 2. 9.1 22.1 2ø.5 2.5 LED 2 Approx. 5 5 61. Up key Mode key Down key Approx. 15 ød1 (air supply port) 29 5.2 1.5 12 6.5 ød1 ød2 (vacuum port) 79 ø12 (exhaust port) ød2 Unit: mm Inch/NPT specifications Related components 19

VSQ series No vacuum sensor PS Circuit diagram VSQD vacuum ejector unit, twostep nozzle type (atmospheric model) EX V 4 Vacuum generating pilot valve Vacuum releaqse pilot valve ø6 (pilot valve exhaust port) 7.9 21 2. ød1 (air supply port) 9.1 22.1 2ø.5 29 LED 2 Approx. 5 Manual button 5 61. 12 6.5 Exhaust port 1.5 ød1 6 ød2 (vacuum port) 11.1 79 ød2 Unit: mm 1mm width, with 2point output vacuum sensor Vacuum generating pilot valve Vacuum release pilot valve Manual button release flow rate adjusting needle PS Circuit diagram EX V ø6 (pilot valve exhaust port) 4 7.9 21 2. ød1 (air supply port) 9.1 22.1 2ø.5 29 LED 2 Approx. 5 5 61. 12 6.5 Exhaust port Up key Mode key Down key Approx. 15 1.5 ød1 6 ød2 (vacuum port) 11.1 79 ød2 Unit: mm 191

No vacuum sensor PS VSQD vacuum ejector unit, twostep nozzle type (common exhaust model) Circuit diagram EX V 4 Vacuum generating pilot valve 7 Vacuum release pilot valve ø6 (pilot valve exhaust port).9 21 2. ød1 (air supply port) 1mm width, with 2point output vacuum sensor 9.1 Vacuum generating pilot valve Vacuum release pilot valve 22.1 2ø.5 29 LED 2 Approx. 5 Manual button 5 Manual button Break flow rate adjusting needle 61. 5.2 12 6.5 1.5 ød1 6 ød2 (vacuum port) 79 ø12 (exhaust port) 11.1 ød2 Unit: mm Vacuum related components Vacuum pad PS Circuit diagram EX V ø6 (pilot valve exhaust port) 4 7.9 21 2. ød1 (air supply port) 9.1 22.1 2ø.5 29 LED 2 Approx. 5 5 61. 5.2 12 6.5 Up key Mode key Down key Approx. 15 1.5 ød1 6 ød2 (vacuum port) 79 ø12 (exhaust port) 11.1 ød2 Unit: mm Inch/NPT specifications Related components 192

VSQ series No vacuum sensor Vacuum release pilot valve for large bore size nozzle Large/small nozzle switching pressure adjusting trimmer Circuit diagram PS VSQT vacuum ejector unit, twinnozzle type (atmospheric type) EX V 4 ø6 (pilot valve exhaust port) 7.9 21 2. ød1 (air supply port) 9.1 22.1 2ø.5 29 LED 2 Approx. 5 for small bore size nozzle Manual button 5 61. 12 6.5 Exhaust port 1.5 ød1 ød2 (vacuum port) 79 ød2 Unit: mm 1mm width, with 2point output vacuum sensor for small bore size nozzle Vacuum release pilot valve for large bore size nozzle Manual button PS Large/small nozzle switching pressure adjusting trimmer Circuit diagram EX V ø6 (pilot valve exhaust port) 4 7.9 21 2. ød1 (air supply port) 9.1 22.1 2ø.5 29 LED 2 Approx. 5 5 61. Up key Mode key Down key Approx. 15 12 6.5 Exhaust port 1.5 ød1 ød2 (vacuum port) 79 ød2 Unit: mm 19

No vacuum sensor PS VSQT vacuum ejector unit, twinnozzle type (common exhaust model) Vacuum release pilot valve for large bore size nozzle Large/small nozzle switching pressure adjusting trimmer Circuit diagram EX V ø6 (pilot valve exhaust port) 4 7.9 21 2. ød1 (air supply port) 1mm width, with 2point output vacuum sensor 9.1 for small bore size nozzle Vacuum release pilot valve for large bore size nozzle 22.1 2ø.5 29 for small bore size nozzle LED 2 Approx. 5 Manual button 5 Manual button 61. 5.2 12 6.5 release flow rate adjusting needle 1.5 ød1 ød2 (vacuum port) 79 ø12 (exhaust port) ød2 Unit: mm Vacuum related components Vacuum pad PS Large/small nozzle switching pressure adjusting trimmer Circuit diagram EX V 4 ø6 (pilot valve exhaust port) 7.9 21 2. ød1 (air supply port) 9.1 22.1 2ø.5 29 LED 2 Approx. 5 5 61. 5.2 12 6.5 Up key Mode key Down key Approx. 15 1.5 ød1 ød2 (vacuum port) 79 ø12 (exhaust port) ød2 Unit: mm Inch/NPT specifications Related components 194

VSQP series No vacuum sensor Circuit diagram PV V PS ø6 (air supply port) ø6 (pilot valve exhaust port) 4 VSQP vacuum switching nozzle Vacuum generating pilot valve 7 7.9 29.1 21 2. 22.1 ød1 (vacuum supply port) 2ø.5 29 Vacuum release pilot valve LED 2 Approx. 5 Manual button 5 61. 12 6.5 1.5 ød1 12 16 ød2 (vacuum port) 1. 2.9 79 ød2 12 16 Unit: mm 2.9 1mm width, with 2point output vacuum sensor Vacuum release pilot valve Vacuum generating pilot valve Manual button Circuit diagram PV V PS ø6 (air supply port) ø6 (pilot valve exhaust port) 4 7 7.9 21 2. 29.1 22.1 ød1 (vacuum supply port) 2ø.5 29 LED 2 Approx. 5 5 61. 12 6.5 Up key Mode key Down key Approx. 15 1.5 ød1 12 16 ød2 (vacuum port) 1. 2.9 79 ød2 12 16 Unit: mm 2.9 195

Precautions 1. Using the valve Turn power ON. (Check wiring, and turn power ON.) Energize the lead of the solenoid valve to be operated (black: vacuum, gray: vacuum break). The valve starts operating. 2. Using the twinnozzle type valve When using the twinnozzle type valve, apply constant voltage to the brown and blue leads. Adjust the reference vacuum pressure setting with the large/small nozzle switching pressure adjusting trimmer. *. The large/small nozzle switching is controlled with an internal circuit when the vacuum generation valve is energized.. Vacuum sensor parts and operation procedures Switch output 1 indicator lamp (Red LED) Minus indicator lamp (Red LED) Switch output 2 indicator lamp (Red LED) DOWN key 2 1/2 digits LED display section Display unit UP key MODE key 4. Vacuum sensor initialization mode Operation mode Press and M simultaneously. Hold down M for more than 1 second. Press M and simultaneously. Hold down M for more than 1 second. Enter initialization mode. Press the key and M key simultaneously in operation mode. When initialization mode is entered, the rd digit blinks. is displayed when used for the first time. Initialization mode Pressure setting mode Display OFF setting (2 types) Display magnification setting (5 types) Switch output setting (type combinations) setting setting Hysteresis ( to digits) Filter setting (F to F2) Vacuum related components Vacuum pad Set initial conditions. The digit moves once each time the M key is pressed. The settable digit blinks. Setting conditions change each time the key or key is pressed. Moves 1 digit when M key is pressed Display Display magnification Switch output : Normal mode : Display OFF mode : X 1 : X.75 : X.1 : Separate mode Inch/NPT specifications Exit initialization mode. Hold down the M key for more than 1 second. Initial conditions are set, and the mode returns to operation mode. : X.145 : Window comparator mode Related components 196

VSQ/VSQP series 5. Vacuum sensor pressure setting mode Enter pressure setting mode. Press the M key and key simultaneously in operation mode. When pressure setting mode is entered, blinks and the setting 1 value is displayed. 5 is displayed when used for the first time. Set pressure. "Setting 1 (P1)" The LED blinks. Set setting 1 (P1) with the key or key. ( 5 is displayed when used for the first time.) Note 1) Pressure is set within displayed range. Press the M key. Note 2) If window comparator mode is selected, the setting satisfies this equation: P1 < = P22H. Press the M key. "Setting 2 (P2)" The LED blinks. Set setting 2 (P2) with the key or key. ( 5 is displayed when used for the first time.) Note 1) Pressure is set within displayed range. Note 2) If window comparator mode is selected, the setting satisfies this equation: P1 < = P22H. Press the M key. "Setting hysteresis (H)" and LEDs blink. Set hysteresis (H) with the key or key. ( is displayed when used for the first time.) Note 1) Hysteresis is set within digits. Note 2) If window comparator mode is selected, the setting satisfies this equation: P1 < = P22H. "Setting the digital filter" Set the digital filter with the key or key. : No filter, : 25 ms filter, : 25 ms filter ( F is displayed when used for the first time.) Press the M key. Exit pressure setting mode. Hold down the M key for more than 1 second. Pressure conditions are set, and the mode returns to operation mode. 197

6. Vacuum sensor functions Display OFF If no keys are pressed for seconds, display turns OFF, and the LED display turns OFF. The LED display turns ON again if a key is pressed while the LED is OFF. Note 1) The decimal point below blinks during display OFF mode. Note 2) Switch output and switch output indicator lamp function even during display OFF mode. Note ) Air is not displayed during display OFF mode. * See the explanation on initialization mode (page 196) for details on setting display OFF mode. Display magnification Display magnification is selected from ranges at right. * See the explanation on initialization mode (page 196) for details on setting display OFF mode. Selected number Selected number OFF Pr ON P1: Pr Separate mode (HI operation) P1: H H (LO operation) P2: ON P2: Pr H H P1 < = P2 or P1 = > P2 P1: Setting 1, P2: Setting 2 H: Hysteresis Pressure range Display magnification Display range X 1 () to X.75 (cmhg) 75 to 75 X.1 (bar) 1. to 1. X.145 (psi) 14.5 to 14.5 Switch output Switch output is selected from the following table: Note 1) Setting 1 and, and setting 2 and operate together in separate mode. Note 2) and operate with the common minimum (Setting 1) and maximum (setting 2) in window comparator mode. * See the explanation on initialization mode (page 196) for details on setting switch output. Output Mode Operation Separate Window comparator Separate Window comparator HI LO A B HI LO A B Setting 1 Note 1 Lower limit: Setting 1 Upper limit: Setting 2 Note 2 Setting 2 Note 1 Lower limit: Setting 1 Upper limit: Setting 2 Note 2 OFF Pr Window comparator mode (A operation) ON ON Pr P1 OFF H H (B operation) ON P2 Pr OFF OFF P1 P2 Pr H H P1 < = P22H Digital filter Two digital filters (25 ms, 25 ms) is selected. Use this when pressure fluctuates greatly, and display cannot be read easily. Note 1) The selected digital filter is applied to pressure display and switch output. * See the explanation on pressure setting mode (page 197) for details on setting the digital filter. Vacuum related components Vacuum pad Inch/NPT specifications Related components 19

VSQ/VSQP series 7. Adjusting the vacuum sensor zero point, error display Adjust the zero point. Release pressure applied on the pressure port to atmospheric pressure (state with no pressure applied). Press the key and key simultaneously in operation mode. OA blinks when zero point adjustment is started. Quit zero point adjustment. Release the key and key while OA is blinking. After one second, the zero point is adjusted, and display returns to operation mode. E2 is displayed when pressure is applied during zero point adjustment. Press the M key for more than one second, and reset E2. Release pressure applied to the pressure port to atmospheric pressure, and adjust the zero point again. Take the following measures if an error occurs: Error display Descriptions Remedy Overload current is flowing. (The LED for or, where the overload is detected, blinks.) Turn power OFF, and check the state of the load. Pressure is applied during zero point adjustment. Press the M key to reset E2. Release pressure applied on pressure port to atmospheric pressure, and adjust the zero point again. 1% of the rated pressure range is exceeded. (When 111 is displayed with 2R) Check applied pressure. Applied pressure exceeds the maximum of display pressure range. Check applied pressure. Applied pressure is less than the minimum of the display pressure range. Check applied pressure. *. An error is not displayed when display OFF mode is selected. 199

. Replacing the filter element Remove the fixing screw, and replace the filter element. After replacing the element, confirm that the filter packing is attached, and securely fix with a tightening torque of. to.5 N m. Fixing screw Filter cover 9. Replacing the silencer element Filter element Type: VSQE Replace the silencer element as follows: (1) Remove the two element cover fixing screws. (2) Remove the element. () Insert the element, attach the element cover, and securely tighten with a tightening torque of.4 to.5 N m. Vacuum related components Vacuum pad Silencer element Type: VSQSE Element cover Inch/NPT specifications Fixing screw Related components 2

VSQ/VSQP series. Replacing and cleaning the nozzle and diffuser Replace and clean the nozzle as follows: (1) Using a suitable Phillips screwdriver, remove the twoelement cover fixing screws, and remove the element cover. (2)1. For singlenozzle: Pull out parts in the order of the nozzle retainer, diffuser, and nozzle 1. (2)2. For twinnozzle: Pull out parts in the order of the nozzle retainer, diffuser, nozzle 2, and nozzle 1. (2). For twostep nozzle: Pull out parts in the order of nozzle retainer, diffuser 2, diffuser 1, and nozzle. ()1. For singlenozzle: Remove all matter on the inner side of nozzle 1 and diffuser and the seal with compressed air or by wiping it off. ()2. For twinnozzle: Remove all matter on the inner side of nozzles 1 and 2 and the diffuser and the seal with compressed air or by wiping it off. (). For twostep nozzle: Remove all matter on the inner side of the nozzle and diffusers 1 and 2 and the seal with compressed air or by wiping it off. Note: Do not scratch the inside of the nozzle and diffuser or the seal. (4)1. For singlenozzle: Insert parts into the unit in the order of nozzle 1, diffuser, and nozzle retainer. (4)2. For twinnozzle: Insert parts into the unit in the order of nozzle 1, nozzle 2, diffuser, and nozzle retainer. (4). For twostep nozzle: Insert parts into the unit in the order of nozzle, diffuser 1, diffuser 2, and nozzle retainer. (5) Mount the element cover, and securely fix it with the fixing screws. Silencer element Nozzle retainer Element cover Nozzle 1 (nozzle) Nozzle 2 (diffuser 1) Diffuser (diffuser 2) Fixing screw *. Parts in parentheses are for the twostep nozzle. 11. Replacing the cartridge joint Replace the cartridge joint as follows: (1) Pull out the set pin with a flattip screwdriver, etc. (2) Pull the cartridge out in the connection direction. Note: Before installing the cartridge in the unit, check that no dirt or lint, etc., is caught on the Oring. Cartridge Fixing pin Cartridge Fixing pin 21

MEMO Related components Inch/NPT specifications Vacuum related components Vacuum pad 22