UL Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semiconductor Tool Construction. General Information

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UL 2360 Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semiconductor Tool Construction General Information

UL 2360 - Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool Construction General Information The test Standard used to measure the fire performance of sheet plastic used in semiconductor wet bench tool constructions is UL 2360 -- Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool Construction. The plastics covered by this standard shall be subjected to the following testing: 1. Nine (9) Cone Calorimeter Ignition Response tests - Minimum of Four (4) series of cone calorimeter ignition response tests 2. Three (3) Cone Calorimeter Combustibility tests 3. Three (3) Large Scale Parallel Panel tests It should be noted that if the average Flame Propagation Index is less than 6, then the Large Scale Parallel Panel tests need not be conducted. If the Large Scale Parallel Panel tests need to be conducted and if the Cone Calorimeter Combustibility test and the Parallel panel test results indicate different performance Classifications, then the Parallel Panel test results shall be utilized in determining the Classification of the plastic tested. It should also be noted that any material other than a ¼-in thick requires that the Parallel Panel tests be conducted. The testing is described in the attached pages. Also included is information about the UL Classification and Preliminary Investigation Programs. A Preliminary Investigation can be conducted to develop test data that would be used within your organization as an aid in the development of a product for eventual submittal to Underwriters Laboratories Inc. for Classification and Follow-Up Service. A UL Classification Investigation requires a UL representative to witness the manufacturing of the test specimens. Clients receive Preliminary results within the following couple of days by fax. At your request, a formal application letter will be completed and sent to your attention. With the receipt of your signed application the Project will be activated. Page 2 of 11

ASTM E1354 - Cone Calorimeter Ignition Response Testing: The ASTM E1354 Cone Calorimeter Ignition Response test provides a procedure for measuring the Thermal Response Parameter (TRP) as a basis for characterizing the fire performance. The tests are to be conducted in the horizontal orientation with the edge frame sample holder at the following external radiant heat flux exposures of: 1. 20 kw/m² 2. 35 kw/m² 3. 50 kw/m²* 4. 75 kw/m² * Ignition data from the cone calorimeter combustibility tests will be utilized for this portion of the investigation. Each test has a spark pilot ignition source and an initial exhaust mass flow rate of 30 g/sec. During the test, the time to ignition at the specified radiant heat flux is determined. Testing is terminated when sustained ignition has occurred. If ignition does not occur at values below 35 kw/m², then additional radiant heat flux values shall be selected so that at least three cone calorimeter ignition response tests have flame ignition time results. Experimental results are reported in terms of: time to ignition (sec) and Thermal Response Parameter (TRP). Test Specimens Test samples for the ASTM E1354 Cone Calorimeter Ignition Response tests shall be 100 ± 2 mm wide by 100 ± 2 mm long (3.9-in. wide by 3.9-in.long) and should be representative of the product. While nine (9)* consecutive test results are required for each product submitted in order to complete a test series, we suggest that you supply eleven (11) additional test samples so that the extra test samples can be used as 'insurance' in the event that the initial test results suggest some change in the fire test plan. A total of twenty (20) test specimens are requested. Sample thickness: materials and composites of normal thickness 50 ± 3 mm (2-in) or less will be tested at their full thickness. Testing is required on the various thickness of the test specimens if the intent of the Investigation is to Classify more than one test specimen thickness. * Three test series of three tests each. Page 3 of 11

ASTM E1354 - Cone Calorimeter Combustibility Testing: The ASTM E1354 Cone Calorimeter Combustibility test provides a procedure for measuring the Fire Propagation Index (FPI) and Smoke Damage Index (SDI) as a basis for characterizing the fire performance. The tests are to be conducted in the horizontal orientation with the edge frame and wire grid sample holder at the following external radiant heat flux exposures of 50 kw/m². Each test has a spark pilot ignition source and an initial exhaust mass flow rate of 30 g/sec. An oxygen consumption technique is employed to calculate the rate of heat release. Instantaneous measurements of weight loss and smoke obscuration are recorded. Testing is terminated when flaming or other signs of combustion ceased. Observations regarding ignition time and physical changes to the sample (i.e. melting, swelling, or cracking) are also noted. Tests are conducted in triplicate for each test specimen. Experimental results are reported in terms of: heat release rate, total heat released, smoke release rate, total smoke released, heat of combustion, extinction cross-sectional area, and sample weight loss, Fire Propagation Index (FPI), and Smoke Developed Index (SDI). Test Specimens Test samples for the ASTM E1354 Cone Calorimeter Ignition Response tests shall be 100 ± 2 mm wide by 100 ± 2 mm long (3.9-in. wide by 3.9-in.long) and should be representative of the product. While three (3) consecutive test results are required for each product submitted in order to complete a test series, we suggest that you supply three (3) additional test samples so that the extra test samples can be used as 'insurance' in the event that the initial test results suggest some change in the fire test plan. A total of six (6) test specimens are requested. Sample thickness: materials and composites of normal thickness 50 ± 3 mm (2-in) or less will be tested at their full thickness. Testing is required on the various thickness of the test specimens if the intent of the Investigation is to Classify more than one test specimen thickness. Page 4 of 11

PARALLEL PANEL TESTS: The Parallel Panel tests provide a procedure for measuring the maximum flame spread distance as a basis for characterizing the fire performance. Values determined by this method are specific to the specimen form and the thickness of the test specimen. The tests consists of placing two vertical parallel slabs, separated by 1-ft (0.31 m ) in a draft-protected room which has the provisions for a free flow of air during the test, to maintain the room at atmospheric pressure during the entire test run. At the start of the test, the room temperature shall be not less than 50ºF (10ºC) or more than 90ºF (32ºC). The slabs and ignition source are centered under a collection hood. A nominal exhaust flow rate is initially set at 6100 ft³/min (2.9 m³/sec) through the duct and increased as required during the test to exhaust the combustion products. 3.4 fluid oz. (100 ml) of isopropyl alcohol is poured into the sand burner and ignited with a suitable torch. The gas flow to the sand burner is started. The flame propagation distance and physical observations (i.e. melting, dripping, floor ignition, etc) are recorded. The flame propagation is monitored visually during the test and recorded for distance intervals not in excess of 0.5-ft (0.15 m) or a minimum of every 15 seconds for a fast flame propagation. Testing is terminated 15 minutes from the ignition of the sand burner. The test may be terminated early if the flame propagation exceeds 8-ft (2438 mm). Tests are conducted in triplicate for each test specimen. Experimental results are reported in terms of: maximum flame spread distance, char, melt, and ash for each specimen, and any other observations. Test Samples Test samples for the Parallel Panel tests are to be two (2) panels measuring 2-ft (620 mm) wide by 8-ft (2438 mm) long. The test specimens shall be composed of one or more continuous 8-ft (2438 mm) lengths so that the backer board, in assembly for the test, is completely covered. Since three (3) consecutive test results are require for each product submittal in order to complete a test series, it is necessary for six (6) individual panels to be provided. Sample thickness: materials and composites of normal thickness 50 ± 3 mm (2-in) or less will be tested at their full thickness. Testing is required on the various thickness of the test specimens if the intent of the Investigation is to Classify more than one test specimen thickness. Page 5 of 11

Test Costs and Lead Time Currently there are various options for testing, which include the following: 1. Conducting ONLY the ASTM E1354 Cone Calorimeter Tests as a Preliminary Investigation. 2. Conducting ONLY the Parallel Panel Tests as a Preliminary Investigation. 3. Conducting ONLY a single Parallel Panel Test as a Preliminary Investigation. 4. Conducting the ASTM E1354 Cone Calorimeter Tests as a Classification Investigation in which no Parallel Panel tests are required based on the TRP values. 5. Conducting BOTH the ASTM E1354 Cone Calorimeter Tests and Parallel Panel Tests as a Classification Investigation (¼-in. thick test specimens ONLY). 6. Conducting BOTH the ASTM E1354 Cone Calorimeter Tests and Parallel Panel Tests as a Classification Investigation (thickness other than ¼-in. thick). The costs are based upon the number of test specimens requested for testing. For costing, please contact either of the following UL engineers: Daniel R. Steppan Senior Project Engineer Michelle M. Sluga Senior Project Engineer Phone: (847) 272-8800, Ext. 43574 Phone: (847) 272-8800, Ext. 43981 Fax: (847) 509-6391 Fax: (847) 509-6391 e-mail: Daniel.Steppan@us.ul.com e-mail: Michelle.Sluga@us.ul.com Our lead time in the laboratory to conduct these series of tests is based on current schedule after receipt of the samples at our Northbrook Facility and a Project has been established. Clients receive preliminary results within two days by fax or e-mail. Page 6 of 11

BACKGROUND INFORMATION PRELIMINARY INVESTIGATION: Underwriters Laboratories has an arrangement whereby we can conduct tests under a Preliminary Investigation that may prove to be beneficial for product development work. Under this arrangement, the information developed by this preliminary test work would be intended for use within your organization as an aid in the development of a product(s) for eventual submittal to the Laboratories for Classification and Follow-Up Service. Under terms of this arrangement, the Applicant agrees not to use the name of UL, nor to permit such use by others in connection with the release, publication or other dissemination of the information obtained under the investigation. If a preliminary investigation is desired, no manufacturing facility visits are necessary; you simply send the appropriate precut samples to us and advise us as to the extent of test work you wish us to undertake. After the testing is completed, we will issue a letter and enclose a copy of the data generated during the test and close the project. Page 7 of 11

CLASSIFICATION INVESTIGATION: What is a UL Classification? If your product is tested and found to meet the requirements established for a given product category, then it is eligible for UL Classification and Follow-Up Service. UL Classification authorizes the Applicant and or manufacturer to apply the UL Mark to a given product. This Mark notifies buyers, designers, decorators, architects, building owners, code authorities and others having jurisdiction, that your product meets UL requirements for flammability and that the product continues to be produced in accordance with UL requirements. This minimizes the need to conduct additional tests or provide copies of Reports for authorities having jurisdiction. A typical Classification program includes the following elements: 1. Application - After a detailed review of the product(s) that you wish to have evaluated, a fire test program will be outlined in a letter along with an application for Classification and Follow- Up Service. 2. Factory Visit - Upon receipt of the properly signed application form and preliminary deposit, arrangements will be made for a representative of Underwriters Laboratories to visit the manufacturing facility. The purpose of the visit is to identify components, witness and record the results of the conduct of any quality control tests, obtain a copy of the tests method(s) used, witness production and select finished product for the fire tests at our Northbrook facility. 3. Tests - The conduct of the fire tests outlined in a given test method as well as any chemical verification tests required. 4. Promulgate Classification - This includes the preparation of the following: a) A Follow-Up Service inspection Procedure(s) for use by our local field representative(s), which describes the manufacture, quality control tests, methods and or procedures for the product(s) eligible for Classification. b) A Classification Card which identifies the applicant as a supplier of a Classified product. In addition, the Classification will be published in the current edition of appropriate Directory. 5. Follow-Up Service Program - If the product is found to meet the requirements for Classification, Follow-Up Service will be established at the facility which produces finished product. In general, the Follow-Up Service program is the implementation of an on going program of unannounced visits at the manufacturing facility. During these visits, local field representatives of the Laboratories audit the means by which the manufacturer exercises to determine compliance of Classified products with quality control requirements which are determined at the time of the initial manufacturing facility visit. Page 8 of 11

A typical investigation plan would consist of the following: A. Factory visit by a representative of Underwriters Laboratories Inc. your manufacturing facility to: 1. Identify ingredients and or components of the finished product. 2. Witness the manufacture of the finished product 3. Witness, record the results and obtain a copy of the tests methods used to perform any quality control tests on the individual ingredients, components and finished product. B. The conduct of various series of tests. C. The conduct of verification tests at our Northbrook office on samples of the finished product, which would be selected by our representative during their visit. D. Letter Report of results. E. Preparation of the Follow-Up Service Inspection Procedure and Classification card. Page 9 of 11

INFORMATION NEEDED TO INITIATE A TEST PROGRAM PRELIMINARY INVESTIGATION: If you are interested in initiating an Preliminary investigation product(s), we will require a letter from you requesting a Preliminary Investigation application. In order to properly prepare the application, we request that the following information be provided: Applicant - The complete name and address. This is the firm under whose auspices the work will be undertaken. The applicant is responsible for all invoices incurred for new work projects. Product Information - Brief description(s) of the product(s). CLASSIFICATION: If you are interested in initiating an investigation which could lead to a program of Classification and Follow-Up Service for your product(s), we will require a letter from you requesting an application for Classification and Follow-Up Service. So that we are better able to plan the work accordingly, we request that the following information be provided with the letter: Applicant - The complete name and address. This is the firm under whose auspices the work will be undertaken. The applicant is responsible for all invoices incurred for new work projects and for the Follow-Up Service. Manufacturer(s) - The complete name(s) and address(es). This is the firm(s) which maintains and operates the factory facilities where a Classified product normally audited as a part of the Follow-Up Service program. Listee - The complete name and address. This is the Firm whose name appears in the Building Materials Directory. Product Information - Complete description(s) of the product(s) including composition, tolerances, weights, thickness etc. Upon our receipt of the information requested, we will plan a fire test program and forward the necessary application forms to the Applicant. In addition, Follow-Up Service Agreement contracts will be sent to the manufacturer(s). Upon receipt of the properly authorized forms(s) and preliminary deposit, a project will be established and a representative of the Laboratories will schedule mutually agreeable dates in which to witness production of the finished product test samples. Fire test dates will be scheduled upon receipt of the samples at our Northbrook facility. Page 10 of 11

CONFIDENTIALITY It should be understood that the party sponsoring an Investigation as the Applicant has access to and maintains certain, significant rights to the data developed under a Classification Investigation. Per the Classification Agreements, UL will refrain from voluntarily disclosing to third parties information which is considered to be proprietary in nature that is obtained by UL in confidence from the Applicant and manufacturer(s) without authorization in writing from the Applicant. Specifics of the composition of the Classified product will not be provided in the Directory; information provided in the Directory will be limited to the catalog or trade name(s) of the finished product. Confidentiality of test results, product formulations, and manufacturing processes will be maintained in the formal Reports and Follow-Up Service Inspection procedure.. It is also important for you to realize that once the finished product is Classified, future modifications requested of UL to the finished product may not necessarily require full scale fire tests to ascertain compliance. Inclusion of such modifications to the Follow-Up Service Procedure(s) may be authorized based upon UL's review of the modifications being proposed in conjunction with the test data previously developed during the initial investigation. Page 11 of 11