Leak Detector Leak Detector [ 710 Series] The 710 series leak detector covers a wide range of leak testing applications. The upgraded 710 design has been simpified resulting in cost reductions. The 710 Series provides for easy operation, high performances and is environmentally friendly. Features Fully automatic leak detection with Select Free Flow (patent) technology to meet diversified requirements. High sensitivity (minimum detectable leak rate is 0.1 10-12 Pa m 3 /sec (0.1 10-11 : mbar L/sec, Torr L/sec, atm cc/sec)). 1 To promote ease of use all data is presented on a large display screen. 7 language interface installed: English, Japanese, Korean, Chinese (Simplified/Traditional), German and Spanish is provided for temperature compensation. Unit will notify operator when repair or maintenance is needed. Unit will monitor and sound alarm if unit is sensing high external vibrations or temperature variations. Power saving mode to shut down the idle fore pump (patent). By using the vacuum method of leak test the 710 can detect H2 and He. 2 Complies with CE and IP30. 3 1 2 3 Vacuum method. (model 711D1 only: 0.1 10-10 Pa m 3 /sec (0.1 10-9 : mbar L/sec, Torr L/sec, atm cc/sec)) Hydrogen is not detectable with D1 model. model 711W1, model 711D1 and model 714D2 standard only. Applications Leak testing on piping and tubing assemblies. Leakage inspection of vacuum process chambers. Pinhole inspection of food and pharmaceutical packaging and containers. Applicable for measurement of flow quantity and permeation. Leak Detector
Leak Detector [ 710 Series] Features 1) Full-color testing display: 4 types of testing display Screen 1)-1: Graph Screen 1)-2: Meter Screen 1)-3: Numerical value Screen 1)-4: Vacumm system diagram 2) Circle test display: From Bell-Jar method to He spraying vacuum method, leak testing steps can be done in the automatic mode. With a simple click, operator can perform fore pumping, spraying He, judging NG or OK to displaying the results. (When performing He spraying method, valve and relay needs to be provided by the users) Screen 2)-1: Setting screen Screen 2)-2: Judding screen 3) I/O check display: can recognize and let the users know signals are correctly coming in/going out. Screen 3) 4) All diagnotics and maitenance instructions are provided on the large screen display. Screen 4)-1: Gauge exchange Screen 4)-2: Contact information 5) System surveillance function: Automated notice will be given periodically. Screen 5)-1: Maintenance announce Screen 5)-2: Maintenance infrormation Screen 5)-3 6) Unit prevents faliure by monitoring external temperature and rough handling. Screen 6)-1: Vibration alarm Screen 6)-2: Temperature alarm
7) Operator is notified when recalibration is needed of the internal calibrated leak. 8) Coefficient display: Value of condensation of tracer gas, or attenuation ratio will be automatically caliculated. Screen 7) 9) Unit can be calibrated externally using a calibrated leak allowing the leak detector to be used in many applications. 10) Eco-friendly function: a) Power saving mode: When unit is not operating the fore pump will automatically idle to save energy. b) Self-start up/stop: Set start up time and automated stopping function not to leave the unit running. c) Select free flow function: Shortening the fore pump running time. Screen 10) 11) Save the setting: Their function prevents loss of critical data. Screen 11) Model Model (+ Model : When with model 712) + Model Model : Main unit Model : Unit, Power and Power cable Sniffer unit Fore Pump Model Oil rotary pump 30L/min (1.8m 3 /hr) 711W1 Oil rotary pump 135L/min (8.1m 3 /hr) 714W2 Membrane pump 20L/min (1.2m 3 /hr) 711D1 Scroll pump 90L/min (5.4m 3 /hr) 714D2 Scloll pump 250L/min (15m 3 /hr) 714D3 with Oil rotary pump 30L/min (1.8m 3 /hr) 712W1 Oil rotary pump 135L/min (8.1m 3 /hr) 712W2 Membrane pump 20L/min (1.2m 3 /hr) 712D1 Scroll pump 90L/min (5.4m 3 /hr) 712D2 Scroll pump 250L/min (15m 3 /hr) 712D3 Unit Base unit Power Power cable type Model SI units W1 100V PSE J100A (Japan, USA, Taiwan etc.) 200V J200B W2, D1, D2, D3 100-120V J120A 200-240V J240B SI units and others W1 100V F100A 110V F110A 115V F115A Model : Sniffer unit 200V F200B F220B Flow value Probe type Length of hose Model Small flow Straight pipe 2m AS72 5m AS75 AS710 Big flow 2m BS72 5m BS75 BS710 Flexible pipe 2m BF72 5m BF75 BF710 Tube hose BT710 W2, D1, D2, D3 100-120V F120A 200-240V F240B W1 200V CCC F200C (China etc.) F220C W2, D1, D2, D3 200-240V F240C W1 200V IEC F200D (Korea, Germany etc.) F220D W2, D1, D2, D3 200-240V F240D
Specifications Common Specifications Analyzer 90 degrees magnetic field deflection mass spectrometer Main pump Turbo molecular pump 25L/sec (90m 3 /hr) Test port NW25 Startup time/shutdown time 3min (quick start setting)/3min Operating temperature range 10 to 40ºC (50 to 104ºF) Display 7.5inch TFT color touch panel Language 7 Languages selectable: English, Japanese, Korean, Simple Chinese, Traditional Chinese, German, Spanish Test screen 4 test screens (Graph, Numerical value, Meter, Vacuum system diagram). Calibration Automatic calibration is performed at device startup (with calibration leak temperature and secular variation compensation). The device can also start up performing a sensitivity calibration or perform a sensitivity calibration after starting up, and it also features an external calibration function that allows the entire system to be calibrated. (The external calibration leak feature is optional.) An analog display also allows sensitivity calibration to be performed according to the operator's own calculations. Zero adjustment Auto zero adjustment function Input /Output signal Leak rate setpoint 3 Leak rate output Analog style (DC 0 to 10V) Printer Output RS232C Startup/shutdown signal input, etc., for a total of 20 connections Environment-friendliness Time crunch in rough evacuation by "Select Free Flow" Power saving mode Self startup/shutdown function Main Unit Specifications Model 711W1 714W2 714D2 714D3 711D1 Fore pump Oil rotary pump 30L/min (1.8m 3 /hr) Oil rotary pump 135L/min (8.1m 3 /hr) Dry scroll pump 90L/min (5.4m 3 /hr) Dry scroll pump 250L/min (15m 3 /hr) Dry membrane pump 20L/min (1.2m 3 /hr) External dimensions W D H 480mm 335mm 505mm 480mm 380mm 10m 480mm 335mm 600mm 480mm 380mm 10m 480mm 335mm 505mm Mass Approx. 43kg Approx. 80kg Approx. 50kg Approx. 80kg Approx. 39kg Input power supply AC100V, 110V, 115V, 200V, Specify when ordering. AC100 to 120V, AC200 to 240V Specify when ordering. Inrush current/ stationary current AC100 to 115V AC200 to AC100 to 120V AC200 to 240V AC100 to 120V AC200 to 240V AC100 to 120V AC200 to 240V AC100 to 120V AC200 to 240V 10A/5A 6A/3A 15A/11.5A 11A/6A 10A/5A 6A/3A 13A/8A 10A/5A 10A/5A 6A/3A Vacuum Method Specifications Model 711W1 714W2 714D2 714D3 711D1 Minimum detectable leak rate He: 0.1 10-12 Pa m 3 /sec (0.1 10-11 : mbar L/sec, Torr L/sec, atm cc/sec) 1 H2: 0.1 10-8 Pa m 3 /sec (0.1 10-7 : mbar L/sec, Torr L/sec, atm cc/sec) 3 He: 0.1 10-10 Pa m 3 /sec (0.1 10-9 : mbar L/sec, Torr L/sec, atm cc/sec) 2 H2: N/A Sensitivity mode 2modes (normal sensitivity/high sensitivity) 1mode (normal sensitivity) Tset flow mode 4modes: Auto, Fine leak, 5modes: Auto, Fine leak, Middle leak, Gross leak, Super fine leak Middle leak, Gross leak 1 When super fine leak flow is set 2 Fine leak flow is set when He concentration is 1000ppm or more, B.G. increases and minimum detectable leak rate increases, because of contamination. 3 There might be a need for the unit to be operated for a few hours to reduce H2 background inside of the unit after start up, or depending on the customers operational environment.
Sni f f er M e th o d S p e c ific a tio n s Model AS BS He: 0.1 10-8 Pa m3/sec (0.1 10-7: mbar L/sec, Torr L/sec, atm cc/sec) He: 1.0 10-3 Pa m3/sec (1.0 10-2: mbar L/sec, Torr L/sec, atm cc/sec) Minimum detectable leak rate 4 Maximum detectable leak rate 4 Minimum detectable concentration 4 Calibration method Sniffer pump Micro separator Flow monitoring function Form of sniffer probe hose LED on sniffer probe Length of sniffer probe pipe Mass Input power supply BF BT He: 0.1 10-6 Pa m3/sec (0.1 10-5: mbar L/sec, Torr L/sec, atm cc/sec) He: 1.0 10-2 Pa m3/sec (1.0 10-1: mbar L/sec, Torr L/sec, atm cc/sec) He: 0.1ppm 3modes (Caliblated leak, Reference concentration gas, Atmosphere 5ppm) with (membrane pump) with with Straight pipe Flexible pipe Urethane tube φ6mm LED 3 (Setpoint 1, 2, Error) Specify when ordering. Approx. 2.0kg DC24V 2A Approx. 0.7kg 4 Hydrogen measurement can not be performed in sniffer method. Vacuum S y s te m D ia g ra m TP ANA TP CL CLV VV PiG TV1 TV2 TV3 ANA TMP TVV FV FVV FP SP MS MP SP TMP TVV FV TV1 CLV TV2 VV CL Sniffer A unit SP PiG MP TV3 FVV FP MS Sniffer B unit ①Fine leak flow ②Middle leak flow ③Gross leak flow Test port valve Vent valve Pirani vacuum gauge Test valve 1 Test valve 2 Test valve 3 Analyzer tube Turbo molecular pump Turbo molecular pump vent valve Fore line valve Fore line vent valve Fore pump Sniffer probe Micro separator Membrane pump D im e n s io n s (210) (220) 320 510 360 80 ø5 150 150 110 0 ø3 81 105 150 0 70 180 360 ø3 46 64 80 95 64 230 142 81 105 175) 142 ø8.9 600 1010 505 335 1010 ① model 711W1/711D1 ④ model 714D3 ⑦ sniffer unit BT ② model 714D2 ⑤ sniffer unit AS ⑧ sniffer prove AS, BS ③ model 714W2 ⑥ sniffer unit BS, BF ⑨ sniffer prove BF Unit: mm
Leak Detector [ 710 Series] Option Vacuum Method Sniffer Method Bombing Method Display / Control L-shape manual valve Sniffer unit Test Chambert Handy remote controller Interface Other Thermal printer Signal conversion unit Record out 300,100 I/O PC Connector for RS232C Flexble hose, Clamp O-ring Setpoint light unit Pipe Type a b Model I-shape pipe NW25 NW16 P-I1 NW25 NW25 P-I2 NW25 NW40 P-I3 NW25 PG15 P-I4 NW16 PG18 P-I5 a b NW25 PG18 P-I6 NW25 15mm: pipe P-I7 NW25 18mm: pipe P-I8 NW25 1/8Gsocket P-I9 NW25 1/4Gsocket P-I10 NW25 3/8Gsocket P-I11 Pipe ULVAC, Inc. Components Division Bombing tank 1L He Control panel ext Pump Helium spray gun He Oilmist trap Casters He Helium regulator Case, Cart Parts name Model W1 W2 D1 D2 D3 Carrying case Casters Carrying cart (standard) Carrying cart (free) Panelcover for carrying cart Oilmist trap Display, Control Control panel unfix modification: 0.5m Control panel extension cable: 5m,, 15m Setpoint light unit Handy remote controller: 5m,, 15m Handy remote controller extension cable: 5m, Handy remote controller stay Panelmount remote controller: 5m,, 15m Sniffer unit Sniffer AS unit: 2m, 5m, Sniffer BS unit: 2m, 5m, Sniffer BF unit: 2m, 5m, Sniffer BT unit: Interface PC software RS232C Connector for RS232C: D-sub25P Cable for RS232C: D-sub 9pin-D-sub25pin / Cross (Reverse) 1.5m Thermal printer Thermal printer paper 10 pcs/set Thermal printer cleanpaper 5 pcs/set Signal conversion unit for 300 series, 100 series O.LEAKRATE Connector set for 710 I/O, LEAKRATE membrane 18mm: pipe: 10-7, 10-8, 10-9, 10-10 : Pa m 3 /sec (10-6, 10-7, 10-8, 10-9 : mbar L/sec, Torr L/sec, atm cc/sec) membrane NW16 with Valve: 10-7, 10-8 : Pa m 3 /sec (10-6, 10-7 : mbar L/sec, Torr L/sec, atm cc/sec) membrane within 710 channel PT1/4 ( 18mm: pipe): 10-4, 10-5,10-6 : Pa m 3 /sec (10-3, 10-4, 10-5 : mbar L/sec, Torr L/sec, atm cc/sec) tank 10-5, 10-6, 10-7 : Pa m 3 /sec (10-4, 10-5,10-6 : mbar L/sec, Torr L/sec, atm cc/sec) Parts Helium spray gun Helium regulators Bombing tank 1L Test chamber 0.2L L-shape manual valve NW25-NW25 Flexible hose NW16, NW25, NW40 L: 250mm-2000mm Blank flange NW16, NW25, NW40 O-ring NW16, NW25, NW40 Clamp NW16, NW25, NW40 Consumable parts Ion source Pirani vacuum gauge head Sintered filter for sniffer prove Air filter element for sniffer BT unit Microseparator Oil for rotary pump Document Instruction manual / CD-R, booklet Inspection certificate of 710, calibrated leak Ceritificate of calibrated leak Power cable Power cable-a: 120V, PSE Power cable-b: 240V, PSE Power cable-c: 240V, CCC Power cable-d: 240V, IEC Type Model a b c d T-shape pipe P-T1 NW25 NW25 NW25 P-T2 NW25 NW16 NW25 b P-T3 NW16 NW25 NW16 a c P-T4 NW16 NW40 NW25 P-T5 NW25 NW40 NW25 P-T6 NW25 PG18 NW25 P-T7 NW16 PG18 NW25 Cross-shape pipe P-C1 NW25 NW25 NW25 NW25 P-C2 NW25 NW25 NW25 PG18 b P-C3 NW25 NW25 NW25 NW16 a c P-C4 NW25 NW16 NW25 PG18 d P-C5 NW25 NW16 NW25 NW16 P-C6 NW25 NW16 PG18 NW16 www.ulvac.co.jp/eng Overseas Sales in Japan TEL +81-467-89-2261 USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC Singapore Philippines Branch TEL +63-2-828-7700 GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC Singapore Vietnam Representative Office TEL +84-8-62556762 CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-312-4447 TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700 KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006 SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700 This catalog is subject to change notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 1607E-1/2012060000UYO