The Cameron Clean Room

The Cameron Clean Room

Clean Room Teams Will Start This Week

How to get to Cameron Hall Shuttle Stop

CAMERON HALL Second floor entrance Main entrance

CAMERON Best entrance to the clean room second floor entrance Parking Lot L-16 Craver Road

What is a clean room A better name for a clean room would be a contamination control room The goal of a clean room is to minimize the contamination that might effect a product and to provide a clean manufacturing environment for the fabrication of products Clean rooms were originally exclusive to microelectronics manufacturing Today clean rooms are used in many industries and applications 1. Microelectronics 2. Optoelectronics 3. Pharmaceuticals 4. Certain food packaging 5. CD and DVD manufacturing 6. Satellite assembly 7. Many other industries Intel microprocessors have design rules that space components 150 nm apart (.15 micron spacing) An Intel advanced microprocessor is about the size of a thumb nail and many hundreds are produced simultaneously on 12 (304mm) silicon wafers

In microelectronics size matters The common unit of measurement in a clean room is the micron or micrometer

Simple Clean Room work area

ECE Clean Room in CAMERON uses a membrane diffusion ceiling with HEPA filters and through the wall returns

Special safety and working issues when in the Cameron clean room

Material Safety Data Sheet - MSDS Mandated by the Federal government Employees must have access All hazardous materials MUST have a MSDS associated with it MSDS details all hazards, safety requirements, exposure limits, spill or leakage procedures, etc. CARC Clean Room MSDS sheets are located in the garment change area of the clean room You can view them in the clean room or you can get them on-line from each manufacturer of the hazardous material The safety office and Student Health Center do NOT have all of the MSDS sheets for the entire University. Each lab is responsible for their MSDS

Material Safety Data Sheet MSDS showing hazardous and required protective equipment

Completed Clean Room Gown After all gowning is complete you can now enter the clean room. You are not allowed into the clean room unless you are completely gowned

Material Safety Data Sheet - MSDS Mandated by the Federal government Employees must have access All hazardous materials MUST have a MSDS associated with it MSDS details all hazards, safety requirements, exposure limits, spill or leakage procedures, etc. CARC Clean Room MSDS sheets are located in the garment change area of the clean room You can view them in the clean room or you can get them on-line from each manufacturer of the hazardous material The safety office and Student Health Center do NOT have all of the MSDS sheets for the entire University. Each lab is responsible for their MSDS

Material Safety Data Sheet MSDS showing hazardous and required protective equipment

ECE Clean Room Safety John s office Second floor entrance to Cameron Manual pull fire alarm

CAMERON s Clean Room. Front window of clean room Front door to clean room Entrance to clean room The clean room is located on the 2 nd floor, room 201F, of the CARC building. Access to the clean room is restricted. Access is through a UNC Charlotte ID card reader. Engr1202 E01 students are not allowed without an instructor present Card reader door lock

Cameron Clean Room garment change area

MSDS Binders in the garment change area of the clean room

Engr 1202 students sign in each time they enter the clean room on the clipboard shown below

ECE Clean Room Safety Fire alarm includes strobe light and loud alarm If the alarm sounds, you must leave the building If an emergency condition exists, it is OK to leave the building with your clean room garments If there appears to be no emergency remove clean room garments before leaving the building Most alarms are false alarms but all alarms must be treated as a serious condition Fire alarm inside clean room

ECE Clean Room Safety Rear clean room exit Rear fire alarm

ECE Clean Room Safety Inside the clean room is a safety station 1. Deluge shower 2. HF safety instructions 3. Burn and HF salve 4. First aid kit 5. Chemical spill kit 6. Eye wash 7. Hose wash

Deionized (DI) Water UV sterilizer DI water polisher, set 1 DI water polisher, set 2 Recirculation water pump Resistivity meter City water feed Supply and return DI water to CR Carbon filters

Gas Cylinders inside CARC Clean Room Gas pressure regulators

Hazardous Gases used in Hazardous gases in the CARC Clean Room all high purity 1. Nitrogen 2. Oxygen 3. Helium 4. Argon 5. Hydrogen 6. Ammonia 7. Methane 8. Chlorine 9. Acetylene 10. Carbon Dioxide 11. Carbon Monoxide 12. Freon Microelectronics Hazardous gases NOT in the CARC Clean Room 1. Silane 2. Phosphine 3. Arsine 4. Diborane 5. Cyanide 6. Fluorine

Hazardous Chemicals in the CARC Acids 1. Hydrofluoric Acid 2. Sulfuric Acid 3. Acetic Acid 4. Nitric Acid 5. Hydrochloric Acid 6. Chromic Acid 7. Phosphoric Acid Bases 1. Photoresist Developer (NaOH) 2. Potassium Hydroxide 3. Ammonium Hydroxide Clean Room Oxidizers 1. Hydrogen Peroxide Flammable solvents 1. Acetone 2. Methanol 3. Trichloroethyene-TCE 4. Isopropanol 5. Ethane Light Sensitive 1. Positive photoresist 2. Negative photoresist

Chemical Storage Chemical resistant plastic cabinets

Flammable storage inside CARC Clean Room Metal fire-proof cabinets for flammables

Student working with chemicals Chemical goggles Fume exhaust laminar flow work station Face shield Chemical gloves Correctly labeled containers Front exhaust panels Anyone not wearing eye protection when working with chemicals will be removed from the clean room

Assignment due before next class Go to my Engr 1202 ECE web site, coefs.uncc.edu/jahudak/ Look under guidelines for the file on clean room safety Complete the safety test that will be e-mailed to you. Highlight the correct answer in yellow. Return to me at jahudak@uncc.edu subject line of the e-mail to be clean room safety test Use only your UNC-Charlotte e-mail account, no personal e-mail accounts