Operation of SemiTool Spin Rinser Dryers 1
1) Table of Contents 1) Table of Contents... 2 2) Introduction... 3 I) Locations... 3 II) Recipes... 3 III) Emergency Abort... 3 IV) Nitrogen Purge... 3 V) Vendor Manual, Version 1... 3 3) Operation... 3 I) Rotor Check... 3 II) Turn On... 3 III) Select Program... 3 IV) Load Wafers... 4 V) Run Program... 4 VI) Maintenance Notes... 5 4) Recipe Listing... 6 I) RCA Hood Spin Dryer Recipes... 6 II) PVD Spin Dryer Recipes... 7 2 Updated 12/17/2014 at 11:11 AM by CLS
2) Introduction I) Locations The SemiTool Model 470 S Spin Rinser Dryer with a 102 Controller, Serial Number 12863 ( H - bar out) next to the Tystar and RCA Wet Acid Bench. The SemiTool Model 470 S Spin Rinser Dryer with a 102 Controller, Serial Number 12854 ( H - bar in) is next to the Denton Electron Beam Evaporator in PVD. II) Recipes A total of nine recipes (one through nine of the display) are available for programming. Factory recipes Auto Cycle (A), Idle Status (idle), and Check Recipe (B) are also present. See Section 4 for details on the available recipes. III) Emergency Abort In the event of an emergency, terminate the process by pressing the red ABRORT button. IV) Nitrogen Purge Due to the low frequency of usage, the tool is left with the high purity nitrogen off when in idle. This is to eliminate the expense of flowing high purity nitrogen 24/7. Even when off, the tool uses 6 CFM nitrogen to purge the tool. Turn on the high purity nitrogen at 1 hour before use. V) Vendor Manual, Version 1 PRISM has one (1) hardcopy SemiTool Spin Rinser/Dryer WPSC-102 Controller Manual. 3) Operation I) Rotor Check Check that the rotor moves freely by giving it a manual spin. If the rotor does not spin freely, suspend use and contact PRISM Clean Room staff. II) Turn On 1) Press the lighted toggle switch to turn on the Spin Dryer. 2) If the tool has not been used earlier in the day, load a clean set of dummy wafers and run the tool through the standard recipe once. III) Select Program 1) Set the Key Switch to the vertical position. 3 Updated 12/17/2014 at 11:11 AM by CLS
2) Use the + or buttons to select the recipe to be run. The Spin Dryer may have up to 9 recipes stored in memory. Recipe #9 is designated for user modification. All other recipes may only be modified by PRISM Clean Room staff. IV) Load Wafers 1) The rotors of these Spin Dryers are balanced for a full cassette of wafers using an Entegris Teflon Cassette Model A182-39M. DO NOT USE ANY OTHER MODEL CASSETTE. In particular, do not use any of the polypropylene cassettes, either natural or blue, or the Teflon Cassette Model A72-40MB. CHECK THE CASSETTE YOU SELECT TO MAKE SURE IT IS THE CORRECT MODEL. 2) When loading the Teflon cassette in the Metals Spin Dyer, the H -bar must be positioned IN, i.e. with the cassette end with the cross bar toward the back. When loading the Teflon cassette next to the RCA Acid Hood, the H -bar must be positioned OUT, i. e. with the cassette end with the cross bar toward the door. CHECK TO MAKE SURE THE CASSETTE IS INSERTED IN THE SPIN DRYER CORRECTLY; THE CASSETTES ARE LOADED DIFFERENTLY IN THE TWO SPIN DRYERS. V) Run Program 1) Open the external N 2 valve. If the external nitrogen valve is not turned on, the Spin Dryer will register a N 2 Flow Error. 2) Press the Red Stop Button on the lower right front panel to ensure the machine is in the correct state. 3) Press the Green Start Button on the lower right front panel to start the program. The door will lock and the program will start running. 4) Upon completion of the program, the rotor will go to its home position. Remove the cassette and turn off the external N 2. 5) Close the external N 2 valve. 6) Turn off the Spin Dryer. 4 Updated 12/17/2014 at 11:11 AM by CLS
VI) Maintenance Notes 1) Model 102 Controller Shows "CPU Fail 3"/ Resetting Controller After powering up, the controller displays "CPU Fail 3". This message indicates a recipe checksum error has occurred. The following procedure Erases All Recipes. (This procedure can be performed with the controller connected or disconnected to the SRD). Remove controller lid. Turn on controller power switch. Depress both Memory Clear Buttons. (SW8 and SW9 buttons located on the main logic board, see photo below). Release SW8 first (SW8 switch located on right), then release SW9 (located on the left). If the error does not clear, contact Thomas E. Long, Engineering Technician, OEM Group East, Office 610 282 9742, Fax 610 282 0789, Email thomas.long@oemgroupinc.com. 5 Updated 12/17/2014 at 11:11 AM by CLS
4) Recipe Listing I) RCA Hood Spin Dryer Recipes Recipe Step RPM Time Resistivity Rinse Dry Chem Purge Bowl Heat Purge Manifold Anti Stat 1 1 300 30 00.0 2 3000 280 00.0 3 0 0 00.0 5 0 0 00.0 2 1 300 60 00.0 2 2000 300 00.0 3 1000 120 00.0 3 1 100 30 00.0 2 300 120 00.0 3 2000 600 00.0 4 1 2000 600 00.0 2 0 0 00.0 5 0 0 0 00.0 6 Updated 12/17/2014 at 11:11 AM by CLS
II) PVD Spin Dryer Recipes Recipe Step RPM Time Resistivity Rinse Dry Chem Purge Bowl Heat Purge Manifold Anti Stat 1 1 300 30 00.0 2 2800 280 00.0 3 0 0 00.0 5 0 0 00.0 2 1 300 60 00.0 2 2000 300 00.0 3 1000 120 00.0 3 1 100 30 00.0 2 300 120 00.0 3 2000 600 00.0 4 1 2000 600 00.0 7 Updated 12/17/2014 at 11:11 AM by CLS