Significant Changes to the 2012 IFC Semiconductor Fabrication Facilities. Scott Stookey Senior Technical Staff International Code Council, Austin TX

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Significant Changes to the 2012 IFC Semiconductor Fabrication Facilities Scott Stookey Senior Technical Staff International Code Council, Austin TX

Introduction This presentation reviews the significant changes to Section 907 of the 2012 International Fire Code. These changes are explained in greater detail in the ICC publication Significant Changes to the IFC 2012 edition. March 14, 2011 2

Format of the 2012 IFC The 2012 IFC has been reorganized into seven parts. This new organization allows for flexibility when regulations for new technologies arise. The reorganization also aligns the IFC to certain IBC chapters. March 14, 2011 3

Format of the 2012 IFC The IFC parts are: Part 1 - Administration & Definitions (Chapters 1 & 2) Part 2 - General Safety Provisions (Chapters 3 & 4) Part 3 Building & Equipment Design Features (Chapters 5-11) Part 4 Special Occupancies & Operations (Chapters 20 49) Part 5 Hazardous Materials (Chapters 50 79) Part 6 Adopted Standards (Chapter 80) Part 7 Appendices (Appendices A J) March 14, 2011 4

Congratulations SESHA! In the 2012 IFC, all of your requirements are in Chapter 27. PS: Everything related to hazardous materials was in Chapter 27. That s now Chapter 50. March 14, 2011 5

Combustible Tools Section 2703.10.1.2 Semiconductor manufacturing equipment constructed of polymeric materials no longer require an automatic fireextinguishing system when they are constructed of listed flame-limiting plastics. March 14, 2011 6

Combustible Tools Section 2703.10.1.2 Exception 2 allows the use of plastics listed as meeting UL 2360 Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semiconductor Tool Construction. Photograph courtesy of Amerimade Technologies, Livermore CA March 14, 2011 7

Combustible Tools Section 2703.10.1.2 UL 2360 evaluates two properties of polymeric materials and assigns them certain categories: Flame Propagation Index (FPI) Smoke Development Index (SDI) Listed materials are classified as Class 1 or Class 2. Photograph courtesy of Factory Mutual Global, Johnson RI March 14, 2011 8

Combustible Tools Section 2703.10.1.2 Class 1 materials do not propagate fire beyond the ignition zone. FDI 6 and SDI 0.4 Class 2 material limit a fire s propagation beyond the ignition zone. Generates < 40 kw/m² thermal flux and < 60 grams of smoke Photograph courtesy of Factory Mutual Global, Johnson RI March 14, 2011 9

Sub-Atmospheric Pressure Gas Systems Section 2703.16 Sub-Atmospheric Pressure Gas Systems (SAGS) are now recognized in the IFC. Section 2703.16 requires SAGS to comply with the requirement of NFPA 318, Semiconductor Fabrication Facilities. Graphics courtesy of ATMI, Danbury CT March 14, 2011 10

Sub-Atmospheric Pressure Gas Systems Section 2703.16 SAGS are most commonly used in ion implanting operations where compressed gas dopants are embedded or deposited. Dopants commonly present multiple physical and health hazards. Photograph courtesy of Praxair, Danbury CT March 14, 2011 11

Common Dopant Gases and Hazard Classification March 14, 2011 12

NFPA 318 Type 1 SAGS Under NFPA 318 a Type 1 SAGS uses a DOT approved container filled with activated carbon. Cylinders are loaded in which dopant molecules are adsorbed by the carbon. This process reduces the vapor pressure of the molecules. Vacuum is used to reverse the gas-solid equilibrium, which releases the molecules. Photo courtesy of ATMI, Danbury CT March 14, 2011 13

NFPA 318 Type 2 SAGS A Type 2 SAGS uses DOT cylinder equipped with either an internal pressure regulator or check valve and excess flow valve. All gas flow control elements are internal to the cylinder. The cylinder contents are pressurized however they can only be removed by vacuum pressure. Photograph courtesy of Praxair, Danbury CT March 14, 2011 14

Benefits of SAGS SAGS offer a much higher level of safety when compared to conventional gas systems. As a result, NFPA 318 does not require: Automatic shutoff valves when supply pyrophoric gases Post-release treatment systems Dedicated purge gas system Incompatible gases can be stored within the same gas cabinet or exhausted enclosure Graphic courtesy of Praxair, Danbury CT March 14, 2011 15

Corridors and Exit Enclosures Section 2705.3.1 Section 2705.3.1 was revised to now permit the transportation of HPM in means of egress (MOE) exit corridors and enclosure. The amount of HPM must be < MAQ. The transportation must occur using a cart complying with 5003.10. March 14, 2011 16

Gas Detection Section 6004.2.2.10.1 In Group H-4 occupancies storing or using Toxic or Highly Toxic gases, gas detectors and their control units must be approved or listed as meeting UL 2075, Gas and Vapor Detectors and Sensors. Section 6004.2.2.10.1 continues to permit the use of approved gas and vapor detectors. March 14, 2011 17

Gas Detection Section 6004.2.2.10.1 A bigger change is the adoption of the 2010 edition of NFPA 72, National Fire Alarm and Signaling Code. NFPA 72 Section 17.10 now requires all detectors and equipment be listed for the specific gas or vapor. In addition, gas detection systems must comply with all of the applicable NFPA 72 requirements. March 14, 2011 18

How to contact Scott: Telephone: 1-888-422-7233 X 3473 (FIRE) Cellular: 512-716-9595 E-mail: sstookey@iccsafe.org Snail Mail: 807 Sweetwater River Drive, Austin Texas 78748-2238 March 14, 2011 19

Discontinuation or Change of Service Section 901.9 is a new provision addressing monitoring of fire protection systems. The 2012 IFC requires notification of the fire code official when alarm monitoring services are discontinued or changed. March 14, 2011 20

Group A Occupancies Section 907.2.1 was revised to clarify when a fire alarm system is required in a building with two or more Group A occupancies. If Group A occupancies are not separated by fire barriers per IBC Section 707.3.9, the Group A occupant loads are summed. March 14, 2011 21

Example Application Section 907.2.1 Group A-3 190 O.L. Group B/M/S-1 Group A-3 230 O.L. Minimum 2-hour fire-resistive barrier per IBC Section 707.3.9 March 14, 2011 22

Example Application Section 907.2.1 No Fire-Resistive Separation is Required per IBC 508.2 for Accessory Occupancies Group B Office 450 O.L. Group A-2 Restaurant 95 O.L. A manual fire alarm system is not required because the occupant load due to the assembly occupancy is less than 300. March 14, 2011 23

Emergency Voice/Communications Alarm Captions Section 907.2.1.2 will require captioned messages in Group A stadiums, arenas and grandstands with more than 15,000 fixed seats. The messages are either recorded or generated realtime by the Emergency Voice/Communications Alarm System (EV/CAS). March 14, 2011 24

Emergency Voice/Communications Alarm Captions The EV/CAS must comply with the 2010 NFPA 72 Mass Notification System (MNS) requirements. Section 907.6.2.2.4 requires messages be generated from an approved location and are selected based on the design risk assessment. March 14, 2011 25

Emergency Voice/Communications Alarm Captions NFPA 72 Section 24.7 requires a performance design based on a risk assessment that considers: Number of persons Unique hazards and their rate of growth Anticipated threats Reliability, performance and security of the MNS How will MNS be used by stakeholders (i.e., owner, fire service, law enforcement) March 14, 2011 26

Emergency Voice/Communications Alarm Captions NFPA 72 requires textual visible notification appliances comply with Section 24.2.2.21. NFPA 72 requires: Textual EV/CAS messages take precedence Primary and secondary power Unmonitored displays must indicate their operational status Character size, display and fonts Alertus LLC, Gaithersburg MD March 14, 2011 27

Emergency Voice/Communications Alarm Captions Because EV/CAS commonly utilize software or firmware, NFPA 72 requires it to be functionally compatible with all alarm initiating and occupant notification appliances. NFPA 72 also requires the software and firmware be protected from unauthorized changes. March 14, 2011 28

Group E Occupancies Section 907.2.3 was revised by lowering the fire alarm and detection system threshold in Group E occupancies from an occupant load of 50 to 30. Section 907.2.3 also requires the fire alarm system include an EV/CAS which activates upon sprinkler activation or manually from a normally occupied location. March 14, 2011 29

Group E Occupancies The reason for the change was the provisions added in the 09 IFC for building lockdown plans. Section 404.3.3.1 has no specific communications criterion. These provisions apply to any occupancy with a lockdown plan. March 14, 2011 30

NFPA 72 EV/ACS Requirements in Group E Occupancies EV/CAS are required by NFPA 72 to provide speech intelligibility. An audible voice that is distinguishable and understandable. It is an overall measure of the degree that building occupants understand the spoken language. Speech intelligibility is not audibility. Do You Understand My Message Now? March 14, 2011 31

Acoustically Distinguishable Spaces (ADS) An ADS is a physically defined space where speech intelligibility can be achieved or is exempted. NFPA does not establish prescriptive requirements for ADS because of many variables. Armstrong Industries, Lancaster PA March 14, 2011 32

Factors Influencing ADS The area of the space. The required audibility. Ceiling height. Changes to interior finish affecting acoustics. Function of the space. Unique architectural features. March 14, 2011 33

ADS Exemptions Certain spaces are exempt as being ADS because of their function or signal intelligibility cannot be achieved. When intelligibility cannot be achieved NFPA 72 requires compliance with Chapter 18. March 14, 2011 34

Measuring Speech Intelligibility Under NFPA 72, speech intelligibility is measured using Speech Transmission Index (STI). An acceptable alternate mechanism for measuring STI is the Common Intelligibility Scale (CIS). March 14, 2011 35

NFPA 72 Signal Intelligibility Acceptance Criteria Speech Transmission Index (STI) 0 0.30 0.45 0.60 0.75 1.0 BAD POOR FAIR GOOD EXCELLENT 0 0.48 0.65 0.78 0.88 1.0 Common Intelligibility Scale (CIS) Speech intelligibility is acceptable when 90% of all measurements in the ADS has a minimum 0.45 STI (0.65 CIS) and an average 0.50 STI (0.65 CIS) for all measurements in the ADS. (NFPA 72, Annex D) March 14, 2011 36

Plan Review Considerations Plans will require preparation under the supervision of a RDP. Design information will include: Notification appliances part of the EV/CAS Speaker wattage Design sound pressure level How occupant notification is accomplished Is signal intelligibility achieved in each ADS March 14, 2011 37

Wireless Smoke Alarms IRC Section 314.5 and IFC Sections 907.2.11.2 and 1103.7.2 recognize wireless smoke alarms. The smoke alarms are listed to UL 217 and installed in accordance with NFPA 72, Chapter 29. BRK Electronics, Aurora IL March 14, 2011 38

Wireless Smoke Alarms In the 2012 IRC all smoke alarms require wiring to a source of utility power. The IFC will allow batterypowered alarms in existing buildings. Guest alarms are supervised by a host alarm. Under the IFC & IRC, wiring can be eliminated between the guest and host smoke alarms. March 14, 2011 39 BRK Electronics, Aurora IL

Wireless Smoke Alarms Wireless smoke alarms are classified as low-power systems in NFPA 72 Section 23.18. Specific low-power supervision provisions include: Loss of battery power Integrity of signal integrity and path interconnection Maximum polling frequency and maximum response time BRK Electronics, Aurora IL March 14, 2011 40

Protection of Fire Alarm Control Unit Section 907.5.1 now requires a supervised smoke detector to protect Fire Alarm Control Units (FACUs). This change aligns the 2012 IFC with 2010 edition of NFPA 72. The IFC allows sprinkler protection to protect the FACU when the building climate do not satisfy NFPA 72. March 14, 2011 41