PART 2 Basic Code Requirements - Semiconductor & Microelectronic Facilities using HPM s
Occupancy Classifications Y A - Assembly Y B - Business Y E - Educational Y F - Factory/Industrial Y H - Hazardous Y I - Institutional Y M - Mercantile Y R - Residential Y S - Storage Y U - Utility
Getting started... Y Quantity, location, and type of hazardous materials help make an occupancy classification Y Facilities that use or store hazardous chemicals or gases in sufficient quantity are H occupancies Y Many existing facilities were built prior to the H occupancy classification (pre-1985) and are considered B-2 grandfathered facilities
Issues for existing facilities YWhat is your current occupancy? YIf you are still B-2 occupancy Making modifications?? WATCH OUT! Do they change character or use? In some jurisdictions, the definition of these terms are VERY strict. Some jurisdictions do not allow grandfathering privileges
Determining Occupancy YDevelop a smart impact determination database (Excel or Access) Determine the quantity of each class of hazardous production material (HPM) Determine how they are used Compare with exemption limits Determine H occupancy by division
Chemical Classifications ; Combustible Liquid Class II, III-A, III-B ; Combustible Fiber ; Cryogenic (flammable or oxidizing) ; Explosives ; Flammable Solids ; Toxics ; Highly Toxics ; Flammable gas (gaseous or liquefied) ; Flammable Liquid Class I-A, I-B, I-C Combination NTE ; Organic peroxide, unclassified ; Pyrophorics ; Corrosives ; Water Reactives Class 3, 2, 1 ; Organic peroxide Class I, II, III, IV, V ; Oxidizer Class 4, 3, 2, 1 ; Unstable Reactive Class 4, 3, 2, 1 ; Irritants ; Sensitizers ; Other Health Hazards
HPM Storage and Handling - Classification of HPM s ; Physical Hazard Explosives, Compressed Gases, Flammables, Combustibles, Flammable solids, Organic peroxides, Oxidizers, Pyrophorics, Unstable Reactives, Water Reactives, Cryogenic fluids ; Health Hazard Highly toxic or toxic materials, including highly toxic compressed gases Radioactive materials Corrosives Carcinogens, irritants, sensitizers, and other health hazards
NFPA Hazard Symbol ID s Health Hazard - Blue A 0 rating means that exposure to material offer no hazard beyond that of ordinary combustible material. A 4 rating means short exposure causes death or major residual injury. Flammability - Red A 0 means the material will not burn A 4 means materials will rapidly vaporize and burn readily Reactivity - Yellow A 0 means materials are stable even under fire conditions and are not water reactive A 4 means materials are capable of detonation, explosive decomposition, or reaction at normal temperatures and pressures.
Definitions & Tables? Use - open systems? Use - closed systems? Storage? UBC Tables 3-D/E (UFC 8001.15.-A/B)? UFC 8001.15.- C (Outdoors)? UFC 5102-A (H-6 Occupancies)
Common H Occupancy Classifications > H, Div. 2 (H-2) - S/H/U flammable or combustible liquids Pyrophoric gases and oxidizers > H, Div. 3 (H-3) - S/U (low pressure) of flammable and combustible liquids, oxidizers, or water reactives
Common H Occupancy Classifications > H, Div. 6 (H-6) - Semiconductor fabrication facilities > H, Div. 7 (H-7) - S/U of health hazard materials Corrosives, toxic, or highly toxic irritants or sensitizers
Control Areas > Areas which use or store less than the exempt amounts of HPM s - no occupancy designation > Must be constructed with not less than one-hour partitions > Four control areas allowed within a building. > Aggregate quantity of HPM s in a fab area may not exceed the max. amounts in UFC Table 5103-A > If quantities in control areas exceed exempt amounts, a new occupancy must be created
A few notes on occupancy... > Changes in occupancy cost $$$ > Control areas allows large amounts of HPM s and don t affect occupancy > When HPM s fall under more than one division, it must meet all requirements. > Mixed occupancies happen if the other occupancy is >= 10% of the area. > Ratio of actual area to allowable area for each occupancy must add up to one or less.
Exit Corridors > Exit Corridors Areas >= 200ft 2 require two exits Distance to exits in H-6 should be <100 feet Distance to outdoors in H-6/H-7 <200 feet May not be used to transport HPM (except in existing B-2 facilities)
Exit Corridors > Exit Corridors (con t) Air handling should be separate Exit doors must with egress Doors are smoke-tight with draft stops, selfclosing, 3/4 hour rated Duct penetrations need fire/smoke dampers Egress must be available in two directions
Service Corridors > Service Corridors Transport HPM s in H occupancies May not be used as required exit corridors (except in existing buildings) May not be crossed by required exits One-hour separation from req d exits Ventilation at one CFM/SF or six ACPH
Service Corridors > Service Corridors (con t) Must have two exits Transport should comply Section 5103.3 Spill alarms should be provided HPM s cannot be dispensed in corridor Pass-throughs only allowed in existing buildings exit corridors
HPM Storage/Dispense Rooms > Are separated from other occupancies > Are separated by different classes of HPM s - toxics, acids, flammable, etc.? Separate storage rooms have many design requirements that can be costly to retrofit. See UFC 8003.1 for all requirements Items discussed include fire-rated construction, ventilation, fire suppression, piping, temperature and spill control, secondary containment, alarms, clearances, etc.
Codes for Mechanical Systems > UBC/UFC contain ventilation rates, separation, and system relationships > UMC dictates the technical detailed design of the systems. Chapter 4, Ventilation Air Supply Chapter 5, Exhaust Systems Chapter 6, Duct Systems
Cleanroom Ventilation Systems > Recirculating Air? Exhaust Ventilation? Make-up Air Locate your make-up air vents away from dirty air vents and emergency generators!
Recirculating Air Handling Systems > Use high efficiency filters (HEPA/ULPA) > Should not be shut down by the smoke detection system > Need manually operated remote S/D > The RAH of one hazardous cleanroom area cannot be connected to another cleanroom occupancy
Exhaust Ventilation Ventilation should be 1 cfm/sf floor area and comply with UFC 79/80 Emissions must be confined to area generated and exhausted or treated Incompatible materials require separate exhausts Exhausts from different fabs cannot connect within the building GEP - 3,5000 fpm exhaust rates to atm. All H-6 ancillary areas @1cfm/sf or 6 ACPH
HPM Storage Area Ventilation - H-1, H-2, H-3, and H-7 Mechanical exhaust should be 1 cfm/sf or 6 ACPH Unless exempted, indoor storage areas and buildings must be provided with mechanical exhaust ventilation Ventilation should consider that some fumes are heavier than air and be located within 12 of the floor as well as above
HPM Storage Area Ventilation - H-1, H-2, H-3, and H-7 Gas cylinders must be stored in gas cabinets, exhausted enclosures, or within a ventilated separate gas storage room Gas cabinets must operate at negative pressure compared with surroundings Average velocity of ventilation >= 200 fpm
Emergency Ventilation/Operation Emergency power is required to operate exhaust ventilation and treatment systems Power must be on-line w/in 10 seconds GEP - provide enough emergency power to keep the cleanroom pressurized to avoid contamination UPS for all controls which operate lifesafety related equipment and ventilation
Air Handling System Isolation Separate incompatibles Ducts conveying explosives, flammables, fumes, toxics and related must go directly to the atmosphere. H-6 air handling systems, between fabs must be separated unless make-up air is 100% outside air. If you connect exhaust, do it outside the building. Exit corridors cannot be used as return air space for another area
Air Handling System Isolation Draft-stopping penetrations are required in multiple-level fabs. Smoke dampers or smoke/fire dampers required at all penetrations of ducts through a smoke partition. Fire dampers shall not be installed in exhaust ducts. Exhausts ducts shouldn t penetrate area separation walls.
Fire Suppression Code Areas UFC Articles 51/80, UBC Chapter 9, UMC Sect. 609 NFPA 13 - Installation of Sprinkler Systems NFPA 14 - Standpipe and Hose Systems NFPA 24 - Private Fire Service Mains and their Appurtenances NFPA 318 - Protection of Cleanrooms Factor Mutual (FM)/and Industrial Risk Insurers (IRI) have additional design requirements to reduce risk/liabilities
Electrical Power Systems Three types of electrical back-up systems in hazardous occupancies: Emergency Power Systems Legally required Standby Power System Optional Standby Power System Transfer Switches, Emergency Shutoffs, Hazardous Area Electrical Req ments (refer to paper)
Emergency Power Requirements Essential for life-safety systems and on-line within 10 seconds Wiring must be kept entirely separate (don t share raceway s) Emergency generator requires onsite fuel supply Emergency lighting according to NFPA
Standby Power Requirements Provide power for control of health hazards and aid in fire-fighting or rescue Must be connected and online with 60 seconds. Required in H-1 and H-2 occupancies and H-3 occupancies where Class I, II, or III organic peroxides are stored.
Optional Standby Power Req d Provides power for systems whose failure could damage process equipment, interrupt the manufacturing process, cause contamination of the cleanroom, etc. NOT CODE REQUIRED Must be able to shed the optional power loads if necessary.
Life Safety & Monitoring Systems Types of required alarm systems - Manual pull stations Area smoke and heat detectors Air sampling or particle counter-type smoke detection on the cleanroom return-air stream Duct smoke detectors Smoke door holders Sprinkler flow and tamper switches (use zones) Optical detectors
Emergency Control Stations Central location where emergency signals are received. (UBC Chapter 2) Monitored 24-hours per day Should be in a separate building or with a two-hour firewall Must also meet ANSI SE3.2 (UL 827) Covers continuous monitoring, emergency lighting, HVAC, etc.
Life Safety Monitoring Continuous Toxic Gas Monitoring Required by UFC Art. 51/80, UBC Chapt. 3 Emergency Spill Alarms Emergency Shut-offs Visual alarm signaling Audible alarm activation signaling Fire alarm and smoke detection
Cautions to the New Code User This presentation is an overview with the most common requirements. Most detailed training course are 3 to 5-days long! Many exceptions/exemptions exist. Unlike other EHS rules, codes are very local, i.e., just because it is in the official code books, your local jurisdiction may have adopted other codes or interpretations. Always get a sanity check! Talk to the experts and get networked with your peers.
Closing Notes on Part 2 Many options are available to comply with the codes Involve your local officials Discuss alternate materials & methods of compliance Appeal unfavorable decisions (but don t antagonize your official) Use an integrated approach to the codes