Building Description Applicable Codes & Standards Prescriptive Requirements. Performance Based Design

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June 15, 2017

Building Description Applicable Codes & Standards Prescriptive Requirements Structural Fire Protection Fire Sprinkler Fire Alarm Means of Egress Performance Based Design 2

3 Semiconductor Fabrication Support / 231,000 square feet Cleanroom / 145,000 square feet Hazardous Production Material (HPM) Storage or Dispensing / 28,000 square feet Exterior Loading Docks / 3,600 square feet Pyrophoric Storage / 430 square feet

4

2012 International Building Code (IBC). 2012 International Fire Code (IFC). Factory Mutual (FM) Datasheet 7-29, Flammable Liquid Storage in Portable Containers. FM Datasheet 7-50, Compressed Gases in Cylinders. FM Datasheet 7-82N, Storage of Liquid/Solid Oxidizing Materials. FM Datasheet 7-84, Hydrogen Peroxide. FM Datasheet 7-88, Storage Tanks for Flammable Liquids. NFPA 10: Standard for Portable Fire Extinguishers, 2010 Edition NFPA 13: Standard for the Installation of Sprinkler Systems, 2013 Edition NFPA 14: Standard for the Installation of Standpipes and Hose Systems, 2013 Edition NFPA 20: Standard for the Installation of Stationary Pumps for Fire Protection, 2013 Edition NFPA 22: Standard for Water Tanks for Private Fire Protection, 2011 Edition NFPA 24: Standard for the Installation of Private Fire Service Mains and Their Appurtenances, 2013 Edition NFPA 25: Standard for the Inspection, Testing, and Maintenance of Water Based Fire Protection Systems, 2015 Edition NFPA 30: Flammable and Combustible Liquids Code, 2012 Edition NFPA 55, Standard for the Storage, Use and Handling of Compressed Gases and Cryogenic Fluids in Portable and Stationery Containers, Cylinders and Tanks, 2005 Edition. NFPA 72: National Fire Alarm and Signaling Code, 2013 Edition NFPA 80: Standard for Fire Doors and Other Opening Protectives, 2010 Edition NFPA 92: Standard for Smoke Control Systems, 2012 Edition NFPA 110: Standard for Emergency and Standby Power Systems, 2010 Edition NFPA 251: Standard Methods of Tests of Fire Resistance of Building Construction and Materials, 2006 Edition NFPA 252: Standard Methods of Fire Tests of Door Assemblies, 2008 Edition NFPA 291: Recommended Practice for Fire Flow Testing and Marking of Hydrants, 2010 Edition NFPA 430, Storage of Liquid and Solid Oxidizers, 2004 Edition. NFPA 2001: Standard on Clean Agent Fire Extinguishing Systems, 2012 Edition Society of Fire Protection Engineers (SFPE) Handbook of Fire Protection Engineering, 4 th Edition 5

Description of Use Fabrication Areas Flammable Liquid Storage Hazardous Material Storage Corrosive/Oxidizer Storage Mechanical & Electrical Rooms Occupancy Classification Semiconductor (Group H-5) High Hazard (Group H-2) High Hazard (Group H-3) High Hazard (Group H-4) Factory (Group F-1) 6

Building Elements - Based on Type I-B Construction Building Element Provided Fire IBC Required Fire Resistance Resistance Rating Rating Structural Frame 2 Hour 2 Hour Bearing Walls (exterior) 2 Hour 2 Hour Bearing Walls (interior) 2 Hour 2 Hour Nonbearing Walls (exterior) (<30 feet) 1 Hour 1 Hour Unprotected Openings (IBC Section 705.8) Protection Required (footnote i), if less than 30 feet fire separation None, fire separation distances > 30 feet Nonbearing Walls (interior) 0 Hour 0 Hour Floor Construction 2 Hour 2 Hour Roof Construction* 1 Hour 1 Hour* Shaft Enclosures (IBC Section 713.4) 2-hour 2 Hour Stairwell Enclosures (IBC Section 713.4) 2-hour 2 Hour Exit Passageways - to extend travel distance 2 Hour 2 Hour *Roof construction meeting the 1 hour fire resistance rating requirement will be shown through an alternative method complying with Section 104.11. The use of fire modeling will show a fire resistance rating without the use of spray-applied fire resistive materials, when exposed to the worst case credible fire scenario. 7

8 Water Supply

Electric fire pump & diesel fire pump 266,000 gallon on-site emergency water storage tank. 9

HPM Rooms & Design Densities Room / Area (Room Number) Density (gpm/sq. ft.) Area of Operation (sq. ft.) NFPA Reference FM Datasheet Bulk Aqueous Chemical Room (F11121) Specialty Gas Dispensing (F111122) 0.20 3,000 NFPA 430, Section 5.3.2 (3) 7-84 0.25 3,000 NFPA 55, Section 6.9.2.2 7-50 Bulk Gas Purifier Room (F11821) 0.30 2,500 NFPA 13, Figure 11.2.3.1.1 / AM&M #12 - Aqueous Chemical Room 0.20 Entire Room (~2,400) NFPA 430, Table 6.4.1 - (F111021) Solvent Room (F141211) 0.30 Entire Room (~3,250) - FM DS 7-88, Table 11. Solvent Offloading (Deluge System) 0.30 Entire Area (<3,900) NFPA 15, Section 7.3.3.2 FM DS 4-1N Cold Storage (F141214) 0.60 Entire Room (~693) - FM DS 7-29, Table 15 Bottle Staging (F111212/F111213) Acid/Base Small Pack (F111205) Solvent Waste Room (F111402) Waste Pit & IWD Treatment (F11011) Hazardous Material Delivery Area (F111301) 0.60 Entire Room (~442) - FM DS 7-29, Table 15 0.60 Entire Room (~220) - FM DS 7-29, Table 15 0.30 Entire Room (<3,000) NFPA 30, Table 16.5.2.2-0.20 3,000 NFPA 13, Figure 11.2.3.1.1-0.20 Entire Area (<3,900) NFPA 13, Figure 11.2.3.1.1 and Section 11.2.3.2.5 - NE Offload Dock (outside F111402) 0.20 Entire Area (<3,900) NFPA 13, Figure 11.2.3.1.1 and Section 11.2.3.2.5-10

11

Supply / demand curve Special suppression systems CO2 local application at flammable gas valve manifold boxes (VMBs) initiated by UV/IR flame detectors 12

13

14 Manual fire alarm system (IBC 415.10.8) Automatic smoke detection for highly toxic gases, organic peroxides, and oxidizers (907.2.5) Emergency alarm system (908.2) Continuous gas detection of highly toxic or toxic gas at or below the permissible exposure limit (PEL) Initiates a local alarm and transmit to supervising station

15

16

Floor Level (Floor Name) (Elevation above grade) No. of Occupants No. of Exits Required No. of Exits Provided Exit Width Required Exit Width Provided** Level 1 (Subfab) (0-0 ) Level 1-M (Equip. Platform) (13-0 ) Level 2 (Mechanical Mezzanines) (17-4 ) 659 3 14 263.6 476 312 117 Level 1-M & Level 2 converge 429 2 4 171.6 136 Level 3 (Cleanroom) (32-4 ) Level 4 (Interstitial catwalks) (60-2 ) 703 3 8 281.2 352 152 2 4 60.8 136 TOTAL 1,918 17

18 Highest occupied floor level elevation 72-6 Not a high-rise, smokeproof enclosures not required Smoke management is through passive fire barriers between adjacent smoke zones (fire-rated floor/ceiling assemblies, fire-rated vertical exit enclosures)

19 Emergency Response Team (ERT) Local volunteer fire department Hot-work programs Fire extinguisher training

Design Objective: Provide roof construction achieving a 1-hour fire resistance rating when subjected to the worst credible fire scenario. Fire modeling will be used to show a 1-hour fire resistance rating without the use of spray-applied fire resistive materials. Stakeholders: Design Team, General Contractor, Owner, AHJ 20

21

22

Wet Bench Materials of construction various plastics Weighted average m = 0.0040 kg / m²s, ΔH c = 7.94 MJ / kg Isopropyl alcohol (IPA) & Tetramethylammonium hydroxide (TMAH) maximum HRR would be 524 kw Front Opening Unified Pod (FOUP) Materials of construction polycarbonate m = 0.025 kg/m²s, ΔH c = 21.2 MJ / kg maximum HRR is 79.5 kw No local suppression within Wet Bench tools 23

Ventilation limited compartment fire The maximum HRR is dependent on the quantity of oxygen available for combustion of the materials within the compartment. Adequate vents are not readily observed on the SU-3100 Assumed that two of the upper doors on both sides of the equipment are open or have been removed to provide a worst-case ventilation condition. Using the Babrauskas Method, the maximum HRR for a ventilation-limited fire within a compartment is: HRR = 1500 A o H o, where: A o = area of vent opening (m²) H o = height of bottom of vent opening (m) Each of the four assumed openings has an area of approximately 0.27m² and a height of 2.4m. Therefore, the maximum HRR for this compartment, regardless of internal fuels, is 2,509.7 kw. 24

Fuel Source Peak HRR Wet Bench (center) 2510 kw (divided equally among (4) vents) FOUPs (on center bench) 237 kw (divided equally among (3) FOUPs) Wet Bench #2 (left) 1205 kw (divided equally among (2) vents) Wet Bench #3 (right) 1205 kw (divided equally among (2) vents) Adjacent FOUPs (on adjacent wet benches) TOTAL 158 kw (divided equally among (2) FOUPs) 5,415 kw 25

26 Time evolution of grid ceiling and steel truss gas temperatures

27 Temperature slice file showing heat transfer through ceiling

Time evolution of grid ceiling and steel truss gas temperatures with ceiling failure 28

Temperature slice file showing peak interstitial temperatures with ceiling tile failure 29

Temperature slice file showing interstitial temperatures with multiple tile failures 30

31

ε = 0.7 c s = 600.00 J/Kg K σ = 5.67E-08 W/(m 2 K 4 ) ρ = 7.86E+03 Kg/m 3 W/D = 2.968 lbs/ft in = 173.8925 Kg/m 2 Δt = 10.00 Seconds Seconds Time T s ( C) T f ( C) T f -T s ( C) h t ΔT s ( C) 0 20 20.00 0.0025 0 10 20.00 164.96 144.9633.0703 0.459464 20 20.46 217.51 197.0535.1838 0.664478 30 21.12 255.18 234.0536.9485 0.82886 40 21.95 285.26 263.3138.5225 0.972195 1 Min. 50 22.92 310.57 287.6539.9689 1.101923 240 59.85 532.52 472.6759.369 2.689592 400 109.37 615.16 505.7972.213 3.500684 560 169.82 669.36 499.5384.678 4.054171 720 237.60 708.84 471.2497.6355 4.409812 900 318.93 742.78 423.85113.303 4.60273 1200 456.48 784.56 328.09142.206 4.471702 1500 582.72 815.28 232.56173.045 3.857146 2400 815.07 875.32 60.25247.366 1.42844 1 Hour 3600 908.21 923.56 15.35292.07 0.429712 Valid for F/V = 37.45 m -1 32

The exposed steel structure does not reach a temperature of XXX F (XXX C) for simulation duration of one hour. This temperature is the point at which a truss deflection of xx mm occurs, which is deemed a failure point by the design team. ASTM E119 test criteria used for the establishment of fire-resistance ratings, exceeding a temperature of 1,100 F (593 C) average over 4 thermocouples at any section, is deemed failing a loaded restrained beam. 33

34 Fire Load = 1.2D + 0.5L + 0.2W

35 Maximum deflection of xx mm.

36 Perform finite element heat transfer analysis. Use results of heat transfer analysis as input to structural model. Conduct structural calculations in reverse using assumed maximum permitted deflection criteria to determine critical design temperature.

Contact Jacob Epstein, P.E. +1 602-286-6000 jepstein@jensenhughes.com 37