John Cox Advanced Technology Solutions, L.L.C Beth Tshudy Analog Devices, Inc. Tuesday, September 30, 2014 Advanced Technology Solutions, L.L.C.
Reducing Risk, Improving Safety Current Safety Controls at Analog Devices, Inc. Roof-top Silane Gas Pad Design Overview Project Team Participants Design Phase Considerations Code and Guidelines Excerpts Safety Features Project Milestones Acknowledgements Advanced Technology Solutions, L.L.C.
Responds to obsolescence of vacuum silane Recommended for FM Global Insurance compliance (a Key Exposure ) Advanced Technology Solutions, L.L.C.
Advanced Technology Solutions, L.L.C.
One of the greatest hazards of silane is that its behavior in air is unpredictable. Five things can happen: Nothing Brown or white powder formation Intermittent popping sounds poppers Immediate ignition-fire Delayed Ignition-fire/explosion Under the same conditions different results can occur Shutdown or abrupt reduction in flow can cause ignition in atmosphere Advanced Technology Solutions, L.L.C.
The majority of our systems utilized vacsilane (14 tools). Advanced Technology Solutions, L.L.C.
ADI Stakeholders: Facilities Environmental, Health and Safety Process Engineers On-site Service Staff (contractor that changes silane cylinders) Speciality Consultants: Advanced Technology Solutions, LLC EHS/Code Hallam/ICS---Specialty Gas Piping & Controls External Stakeholders: Connolly Brothers, Inc. Symmes Maini & McKee Associates Advanced Technology Solutions, L.L.C.
Review and develop options for siting the pad Understand constraints Understand and explore nature of catastrophic release Research the current regulations for providing an outside storage facility that incorporate all code, safety, and environmental regulations Determine actual process needs (present and future) Advanced Technology Solutions, L.L.C.
Finalize conceptual design for filing permits with Town. Work with local officials to educate them on ADI s proposed risk reduction initiative (buy-in). Solicit feedback from town officials. EDUCATE, Educate, educate. Advanced Technology Solutions, L.L.C.
ATS identified. Code requirements (C) Guideline safety recommendations (G) Industry Best Practice (IBP) Advanced Technology Solutions, L.L.C.
ATS identified 168 requirements after a thorough code review. The referenced codes and guidelines pertaining to silane gas storage and distribution are below: ANSI/CGA-G-13 -- 2006 (American National Standards Institute / Compressed Gas Association) Storage and Handling of Silane and Silane Mixtures; FM Global Property Loss Prevention Data Sheets 7-7 Semiconductor Fabrication SEMI S18 1102 Environmental, Health and Safety Guideline for Silane Family Gases Handling; NFPA 318 -- Standard for the Protection of Semiconductor Fabrication Facilities NFPA 55 -- Compressed Gases and Cryogenic Fluids Code; International Fire Code: Chapter 18 (Semiconductor Fabrication Facilities), Chapter 27 (Hazardous Materials General Provisions), Chapter 30 (Compressed Gases) and Chapter 41 (Pyrophoric Materials); and Massachusetts Building and Fire Codes. SEMI S18 Advanced Technology Solutions, L.L.C.
46 safety feature recommendations were developed for use and review for FM Global and other stakeholders. Advanced Technology Solutions, L.L.C.
Restricted Flow Orifices Automated Cylinder Valve Excess flow valves UV/IR detection Ventilation Sprinkler protection Closed Circuit Television Seismic bracing and anchoring Emergency Shut Off button Auxillary blowers ¼ thick steel plates Damage limiting construction Auto-purge Class 1, Div. 2 electrical Water mist to cool Lightening protection Safety systems on UPS Advanced Technology Solutions, L.L.C.
Formal Process Hazard Analysis Cause/Effect Matrix Advanced Technology Solutions, L.L.C.
Advanced Technology Solutions, L.L.C.
Shutdown Conditions: (Typical for each GSM) 1. GSM panel flame verified 2. GSM panel heat detector tripped 3. Silane cylinder temperature > 150 F 4. GSM outlet excess flow - internal GSM safety 5. GSM outlet high delivery pressure - internal GSM safety 6. GSM EPO activation - internal GSM safety 7. VMB exhaust gas detection 8. VMB enclosure flame verified 9. VMB controller EPO activated 10. Roof Pad Exit EPO activated -shutdown all PAD GSMs 11. Security Office Pull Station (via FACP to SGMCS) -shutdown all PAD GSMs 12. Heat detectors beneath PAD in Bldg 2 ceiling tripped Advanced Technology Solutions, L.L.C.
Schematics of exterior fenced structure (shell) Schematics of lower level exterior Schematics of damage limiting construction requirements Structural support bracing Site preparation plans Utility plan Site details Schematics of all safety controls Advanced Technology Solutions, L.L.C.
Roof steel will be installed during the Christmas shutdown week Silane process piping will start in January 2011 Concrete slab and site work will begin April 2011 Gas equipment and the elevator should begin in May 2011 System completion and testing by July 2011 Fab tie into equipment TBD Advanced Technology Solutions, L.L.C.
Includes 2 story cylinder elevator, heated slab, exhaust, 14 cylinder positions with silane auto switchover. Advanced Technology Solutions, L.L.C.
Advanced Technology Solutions, L.L.C.
Advanced Technology Solutions, L.L.C.
SILANE ROOF PAD
Side A Rack 1 Side B
Flame Detector Ring
Blowers 25% 50% 100% I.R. Camera
Storage Rack U.V./I.R. Detector Sprinkler Flame Detector Ring Heat Detector
Gas Monitoring Point 3-1 VMB ROOM (1-5) U.V./I.R. Sensor
At both exits ROOFTOP
First Vision Panels (SCC)
Silane Alarms to ERT Rack Hazard Alarms: Emergency Gas Off Excess Flow UVIR Fault UVIR Flame Detected Side A standby cylinder leak Side B standby cylinder leak Side A High Cylinder pressure Side B High Cylinder pressure
Regular Thermal Thermal Thermal Thermal Regular
Advanced Technology Solutions, L.L.C.