Fire Safety Compliance Why Are My CO2 Systems Not S2 Compliant? For 2010 SESHA Hill Country By Matt Wyman, Managing Director KFPI Inc. September 28, 2010
Overview 1. SEMI S2 2. Fire Safety Requirements 1. SEMI S2 Chapter 14 3. Non Compliance Findings 4. Cause 5. Solution
KFPI Services Equipment Fire Protection Systems Carbon Dioxide (CO2) Fine Water Spray (FWS) Aspirating Smoke Detection (ASD) Flame Detection (Multi IR) Consulting Risk Engineering Analysis & Consulting Equipment Safety Compliance Compliance Audits & Testing Training IR Thermography Thermal Scans Reports
KFPI Leadership SEMI Standards Fire Protection Task Force Chairman (Past & Present) NFPA 318 Clean Room Fire Protection Committee Chairman (Past) Factory Mutual (FM Global) Semiconductor Specialist (Past) Factory Mutual Research Board (FMRC) Advisory Board Member (Past) Expert Witness on International Fire Loss Litigations Published Numerous Papers in Industry Magazines Presented Numerous Papers in Industry Venues Global Training Seminars Fabricators, Insurance, & 3 rd Party Consultants
SEMI S2 Compliance Environmental, Health, & Safety Guideline for Semiconductor Manufacturing Equipment Required by Fabricators Worldwide Categories Include: Hazard Warning Labels Safety Interlock Systems Emergency Shutdown Electrical Design Fire Protection Heated Chemical Baths Ergonomics and Human Factors Hazardous Energy Isolation Mechanical Design Seismic Protection Automated Material Handlers Environmental Considerations Exhaust Ventilation Chemicals Ionizing Radiation Non-Ionizing Radiation and Fields Lasers Sound Pressure Level
Safety Labels
Electrical Safety
Chemical Safety
Hazardous Energy
Ergonomics
Radiation
Laser
Environmental Safety
Emergency Shutdown
Fire Protection
Fire Codes International Fire Code (IFC) Combustibles or Flammables >4ft. Wide Sprinkler Head Inside or Gaseous Fire Suppression FM DS 7-7 Semiconductor Fabrication Facilities Equipment Protection Design Criteria CO2 & FWS 13kW Fire Detection NFPA 12 Carbon Dioxide (FM4-11N) NFPA 750 Fine Water Spray NFPA 318 Protection of Semiconductor Fabrication Facilities SEMI S14 Safety Guidelines for Fire Risk Assessment & Mitigation for Semiconductor Manufacturing Equipment SEMI S2 Environmental, Health, & Safety Guideline for Semiconductor Manufacturing Equipment Chapter 14 Fire Protection
S2 Compliance Section 14.4.4 Fire Detection, Alarm, & Controls 14.4.4.1&2 All detectors, alarms, and controls be accepted and listed by an accredited laboratory (example UL or FM) and installed in accordance with the terms of that acceptance and appropriate national or international standards (example NFPA 72). 14.4.4.3 Capable of interfacing with facility s alarm system 14.4.4.4 Activate alarms audibly and visually at equipment Note 58 Should be identifiable & distinguishable from other alarms 14.4.4.5 Manual activation should be considered 14.4.4.6 A supervisory/trouble condition should notify operator, allow completion of existing processing, but prevent additional processing until condition is cleared. 14.4.4.7&8 Capable of operation at all times with 24hr backup batteries 14.4.4.11 Shut down the equipment upon alarm condition (EMO) 14.4.4.12 Capable of being certified by licensed parties
S2 Compliance Section 14.4.5 Fire Suppression 14.4.5.1 The fire suppression system, which includes nozzles, actuators, and their associated controls, should be certified by an accredited testing laboratory (e.g., UL or FM) and suitable for the application and for the environment in which it to be used. 14.4.5.2&3 The fire suppression agent and delivery system should be designed and installed in accordance with the appropriate international or national standard (e.g., NFPA 12). 14.4.5.5 Activate alarms audibly and visually at equipment Note 64 Should be identifiable & distinguishable from other alarms 14.4.5.10 Allowance can be made to disable system when in maintenance mode if supervised. 14.4.5.11 Capable of operation at all times with 24hr backup batteries 14.4.5.12 Capable of interfacing with facility s alarm system 14.4.5.13 Shut down the equipment upon alarm condition (EMO) 14.4.5.14 Manual activation should be provided 14.4.5.15 Should be discharge tested on represented sample of equipment 14.4.5.16 Control access to the suppression agent source. 14.4.5.17 Capable of being certified by licensed parties 15.4.5.19 Piping should be designed, installed, and tested to ensure it is capable of withstanding discharge pressures.
CO2 Hazard Design Total Flood (TF) Design Fully Enclosed Compartments Criteria = 50% CO2 Concentration Time Limit = 60 Seconds Compensate for Exhaust Ventilation Uncloseable Openings Local Application (LA) Design Open Compartments Example = Working Surface Criteria = Minimum Flow Rate Time Limit = Minimum 30 Second Compensate for Missing Walls Not for Exhaust Combination Design Both TF & LA 60 50 40 30 20 10 0 CO2 Concentration Levels 0 15 30 45 60 Minimum Not Protected Protected
Non-Compliance Findings All found on existing CO2 Systems 3 rd Party Reviews Site Audits Design Reviews Incident Investigations
Inadequate Designs Total Flood (TF) Hazard Exhaust Compensation Not Included (or Damper) Exhaust Not Distributed Uncloseable Opening Leakage Wrong Flooding Factors Local Application (LA) Hazard Assumed Volume Calculations % Perimeter Closed 60-sec Discharge Duration
Assumed Volume (LA) None Local Application Headcase Working Surface Headcase Assumed Volume Actual Volume 4.0ft. Minimum Height Total Flood Plenum Process Tank Total Flood Pumps/Heaters Front View Add 2.0ft. Open Sides Side View
Assumed Volume (LA) Example: IPA DRYER LA Design Add 2.0ft. To Each Side Assumed Volume Actual Volume 4.0ft. Minimum Height
LA Nozzles All have cone to absorb discharge pressure Reflected discharge from orifice Less exit velocity (same flow rate) Nozzle absorbs most 600psi discharge pressure CO2 Nozzles TF Nozzles V Nozzle is Vent nozzle (TF) Straight discharge from orifice Full effects of ~600psi discharge pressure on tool (especially baths) Much higher velocity
Nozzle Issues TF Nozzles Used in LA Hazards Ansul & Hatsuta FM Approved LA Nozzles for Wet Bench Stainless Steel (SS) & Halar Coated Kidde & Others (Fenwal, Fike) No FM Approval for Wet Bench No SS or Halar Coated Models Painted Steel/Brass/Chrome Not Compatible with Wet Processing LA Nozzles Installed Heights Above Coverage Chart All LA Nozzles Have Coverage Chart
Hydraulic Calculations UL/FM Approved Calc Software Based Upon Liquid Discharge Time Increase Capacity Increase Concentration More Agent Adequate Design Extends Discharge Duration Inadequate Hydraulic Calculations 60 Supply Demand 50 40 Discharge Duration > Demand 30 Manufacturer Specific 20 CO2 Distribution Installation 10 0 See Example 0 15 30 45 60 Minimum Not Protected Protected
Hydraulic Calcs Sample Hydraulic Calc Report (Pipe & Tubing)
Hydraulic Calculations WET Hazard 1 Hazard 2 Hazard 3 CO2 BENCH LA TF TF Supply CO2 Demand 64.8 lbs 84.2 lbs 13.2 lbs. 200 lbs. # Nozzles 4 2 1 2 cylinders End of Report is Nozzle Summary Must Verify Supply = Demand H1 = 20.5lbs/42.6sec x 30sec = 14.44 x 4 nozzles = 57.8 lbs H2 = 51.0lbs/42.7sec x 30sec = 35.8 x 2 nozzles = 71.6 lbs H3 = 16lbs/42.6sec x 30sec = 11.2 lbs x 1 nozzle = 11.2 lbs This hydraulic calc is inadequate
CO2 Distribution High Pressure CO2 Cylinders Stored Pressure = 750psi Nozzle Pressure = ~350psi 650psi Must have internal pressure rating of 3,000 psi Must have internal burst pressure rating of 5,000 psi SS Piping is Allowed by Fire Code (NFPA 12 Section 4.7) Pipe ¾ in. = Schedule 40 Pipe 1 in. = Schedule 80 with Extra Heavy Fittings Recommend SS Tubing (316) with SS Compression Fittings Minimum Wall Thickness Cleanliness & Contamination Questions? How Do You Verify Integrity? CO2 Discharge?
CO2 Distribution Issues Compression Fittings Not Installed Correctly Compression Fittings Installed on Pipe vs. Tube ¾ Fitting on ½ Pipe Calculated with Pipe installed with Tubing ½ Pipe ID > ½ Tube ID ½ Pipe ID 5/8 Tube ID Friction Coefficient Not Equal 1.0 + Pipe Installed with Schedule 40 Fittings Improper Tubing Thickness
Exhaust Dampers Exhaust Damper Not Allowed NFPA 318 Section 5.3.5 SEMI S2 Exhaust/Chemical Safety Solvent Fumes (LEL) Corrosive Fumes FM DS 7-7 Section 2.5.15.1.2 Exhaust Ventilation Reduces Smoke Damage Exhaust Volume >> Compartment Volume
Flame (Optical) Detectors Semiconductor Industry 4 Flame Detectors FM Approved for Use on Wet Benches Sierra DCR1 (UV/IR) Det-Tronics PM-5MPX (IR) Fire Sentry FS7 (IR) Hatsuta SX-7000 (IR) Field Of View (FOV) Coverage Affected by Physical Obstructions Coverage Affected by Detector Range 120º FOV
Flame Detector Issues Compliance Issues: FOV Obstructed Spacing > 13kW 8 PP Fire 4 IPA Fire Chemical Compatibility UV HF Quartz Window Match Detector with Fuel Detector Detection Area Obstructed View
Lockout Valves Lockout Valves (NFPA 12 2005) Required except where personnel can t enter space (4.3.3.6) Where CO2 can migrate to expose personnel (4.3.3.6.1) System should Lockout during maintenance or testing (4.3.3.6.3) Lockout Valve must be supervised Lockout Valve Typically Not Required If a Lockout Valve is Installed then. Pressure Switch installed between Supply and Lockout Valves (4.5.4.11) A Pressure Relief Valve is Required (4.7.2.4) Operate 2400-3000psi
Disable Switch Disable/By-Pass Switch (Required but Not Installed) Electrically operated systems should have service disconnect switch (NFPA 12 Section 4.3.3.7) Switch must be supervised (by panel) Electrical Lockout of Discharge Tool Maintenance or System Testing/Inspection Key Switch Normal Key Switch Lockout
Personnel Device Issues Horn/Strobe Not ADA/NFPA Mounting Heights 80-96 AFF Adequate Notification for Personnel? All 4 Sides of Tool? Bay/Chase or Fab/Subfab Manual Release Not ADA/NFPA Mounting Heights 48-52 AFF Mounted Above Fire Hazard Adequate Travel Distance? Bay/Chase or Fab/Subfab
Wiring Installation Issues All Fire Alarm Inputs & Outputs are Supervised EOL Resistors @ Panel (Not EOL) Fault Relays Not Supervised Flame Detectors Aspirating Smoke Detectors Cables Not Protected NEC / NFPA Wire Gauge Too Small NEC / NFPA Panel Input Panel Input Device Detector EOL Resistor Alarm EOL Resistor Fault
Laser Smoke Detector
Inadequate Battery Calcs Result is < 24hr. Standby & 5min Alarm
Chemical Compatibility Issues CO2 Components Must Be Chemically Compatible Nozzles & Detectors Combustible Plastic Benches Corrosives Single Wafer Processing Tools Solvents & Corrosives Nozzles, Tubing, & Fittings Must be Coated & Sealed Detectors Must be Compatible with Corrosives HF & Quartz are Not Compatible
Safety Label Issues No CO2 Safety Labels Labels must meet ANSI Z535 Orange Warning Color Warning Triangle Symbol Aspiration Symbol Outside Protected Space At Manual Activation SEMI S1 Compliant
Kidde Issues Kidde V (Vent or Velocity) Nozzle is TF Nozzle Kidde Only Manufactured V Nozzle in Brass June 2005 Kidde Released Stainless Steel V Nozzle FM Approval Guide
Imitation (Copy) V Nozzles Result was Imitation Kidde V Nozzles Supplied to Industry prior to 2005. These same Imitation Nozzles Are Still Being Used Today VERSION REAL KIDDE VERSION No Threads Result is S2 Non-Compliance Nozzle CO2 System Tool No Strainer Installed Backwards
Cause Why Has This Happened? Fire Protection has NOT Been Reviewed as Part of SEMI S2 Report. Fire Protection has NOT Been Reviewed by Site Safety Personnel (Product Safety). Majority of Equipment CO2 Systems are NOT Reviewed by Fire Department or Insurance. 99% EHS Professionals Come from EHS, IH, Ergonmics, etc. Background No Fire Protection Engineering or Fire Safety Background Fire Protection is a Professional Engineering Discipline Must have 3 rd Party Approval & Certification for Compliance CO2 & FWS Specialized Fire Suppression Application Not Used by Majority of Fire Contractors
Solution What is the Solution? Verify SEMI S2 Reports Include Fire Protection Verify SEMI S2 Reports are Completed by Qualified Personnel Require Copies of Fire Design Package Documentation OEM, 3 rd Party, Fire Contractor Have Safety Personnel to Review Design & Reports Property Insurance Carrier Equipment Safety Personnel for Fire Safety Compliance Verify Insurance Agent Qualified to Review CO2/FWS Systems Provide Training Corporate Level or at Site Level
Questions Fire Protection Is Not Needed Often.. But When It Is It Has To Work! It Also Must Be Reliable.. To Prevent Damage & Downtime! Matt Wyman, Managing Director Advanced Technologies Division Semiconductor, TFT-LCD, & PV KFPI INC. Koetter Fire Protection International Inc. - (1) 972.333.4965 cell mwyman@kfpiinc.com www.kfpiinc.com