UNIVERSAL SOLVENT HEATER

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UNIVERSAL SOLVENT HEATER Circulation Heater A cast-in circulation heater with a full array of special features to safely heat volatile solvents. The Universal Solvent Heater from Cast Aluminum Solutions (CAS) has been designed and tested to perform at the highest levels when heating volatile, low-flashpoint solvents. The USH features efficient low-watt-density heating elements cast into an aluminum body that also contains two helical-coiled stainless steel tubes; a small cooling tube for water (to reduce solvent temps below flashpoint), and a larger solvent tube (passivated & electro-polished). Solvents are sequestered in this tube, never contacting the heating elements, which prevents contamination and reduces the risk of explosion. Three J-Type thermocouples sense solvent inlet, outlet and heater core temperatures. A snap-action high limit switch provides safe shutdown of the unit. The electrical enclosure is explosion proof (NEMA 7). To protect it from corrosion, the body is Teflon coated. This is the ultimate solvent heating device. APPLICATIONS: Semiconductor Wet Process Systems Wafer Cleaning Equipment Heating of Photoresist Removal Solvents Acid Heating Heating Low Flashpoint Solvents Safe Heating of Media in Environments Containing Flammable or Explosive Vapors SPECIFICATIONS: Power: 6 kw Total to 8 kw Total Voltage Range: 28-48 V Max Line Current: 3 A per circuit Tubing (Solvent Tube):.7 OD (3/4") (19.1 mm).6 Wall (1.7 mm) Overall Process Tube Length: 11. (2934 mm) 316L Stainless Steel, Passivated & Electro-Polished Tubing (Cooling Tube):.2 OD (1/4") (6.3 mm).3 Wall (.9 mm) Overall Process Tube Length: 86.2 (219 mm) 316L Stainless Steel Max Pressure: 31 psi (213 bar) Enclosures: NEMA 7 (explosion-proof) (Class 1, Div. 1 and 2, Groups B, C and D) Max Working Temperatures: 392 F (2 C) Published temperatures are for housing at 12 o clock position; higher temps may be possible at 6 o clock position. See factory for details. Sensors: Two J-Type Thermocouples (cast in) One J-Type Thermocouple (removable) Snap Action High Limit Switch (with auto reset) Fittings: Solvent Tube: Flaretek -Compatible or Swagelok VCR Cooling Tube: NPT or Swagelok VCR Accessories: Insulating Jacket FEATURES & BENEFITS: Provides Safe & Efficient Heating Low Flashpoint Solvents Solvents Never Contact Heating Elements (isolated fluid path reduces possibility of explosion & contamination) NEMA 7 Explosion-Proof Electrical Enclosure Design is Self-Draining (eliminating trapped debris) Solvent Tubes are Passivated and Electro-Polished Cooling Tube Quick Reduces Heat Below Flashpoint Equipped with 3 Thermocouples & 1 Limit Switch Compatible with High Pressure Applications Tel: 63-879-2696 Sales@CastAluminumSolutions.com www.castaluminumsolutions.com 131 Kingsland Drive Batavia, Illinois 61 USA

UNIVERSAL SOLVENT HEATER Circulation Heater FRONT VIEW SIDE VIEW 1.3 389 REAR VIEW.7 146 1/4-2 or M8 x 1.2 tapped hole 7. 178 8. 216. 14 Temperature Increase (Delta-T, F) 4 4 3 3 2 2 1 1 4.6 117 3.6 92 3. 89 4.7 121 Universal Solvent Heater Heating Profile: Delta-T Water (Process Fluid = Water @ 42 F /.6 C Inlet Temp, Single Pass, Using Solvent Tube, 1% Power, Set Point 72 F / 4 C) Heater Wattage: 2 4 6 8 1. 12 gpm 7.6 1.1 22.7 3.3 37.9 4.4 l/min Flow Rate, Water (gpm and l/min) Universal Solvent Heater Heating Profile: Delta-P Water (Process Fluid = Water. Change in Pressure from Inlet to Outlet, Single Pass Using Solvent Tube) 8.2 8.kW 7.kW 6.kW 27.8 2. 22.2 19.4 16.7 13.9 11.1 8.3.6 2.8 Temperature Increase (Delta-T, C) 7 48.3 Pressure Drop (Delta-P, PSI) 6 4 3 2 41.4 34. 27.6 2.7 13.8 Pressure Drop (Delta-P, kpa) 1 6.9 2 4 6 8 1. 12 gpm 7.6 1.1 22.7 3.3 37.9 4.4 l/min Flow Rate, Water (gpm and l/min)

SWAGELOK VCR FITTINGS ON SOLVENT TUBE AND COOLING TUBE FLARETEK -COMPATIBLE FITTINGS ON SOLVENT TUBE AND NPT 9 ELBOW FITTINGS ON COOLING TUBE Tube Fittings to Meet Any Need Our Universal Solvent Heater offers an array of high-performance tube fittings. Each fitting was chosen for its ability to meet the unique specifications of solvent heating applications. Temperature Increase (Delta-T, F) 12 1 8 6 4 2 Universal Solvent Heater Heating Profile: Delta-T Solvent (Process Fluid = Generic Solvent @ 42 F /.6 C Inlet Temp, Single Pass, Using Solvent Tube, 1% Power, Set Point 72 F / 4 C) Heater Wattage: 8.kW 7.kW 6.kW 66.7.6 44.4 33.3 22.2 11.1 Temperature Increase (Delta-T, C) 8 7 2 4 6 8 1 12 gpm 7.6 1.1 22.7 3.3 37.9 4.4 l/min Flow Rate, Solvent (gpm and l/min) Universal Solvent Heater Heating Profile: Delta-P Solvent (Process Fluid = Generic Solvent. Change in Pressure from Inlet to Outlet, Single Pass Using Solvent Tube).2 48.3 Pressure Drop (Delta-P, PSI) 6 4 3 2 41.4 34. 27.6 2.7 13.8 Pressure Drop (Delta-P, kpa) 1 6.9 2 4 6 8 1. 12 gpm 7.6 1.1 22.7 3.3 37.9 4.4 l/min Flow Rate, Solvent (gpm and l/min)

UNIVERSAL SOLVENT HEATER Circulation Heater Engineering Expertise Speed to Market Operational Excellence Cast Aluminum Solutions (CAS) manufactures the CAST-X line of circulation heaters, plus a broad range of heating, cooling, and non-thermal components. We are relied upon by OEMs and end-users alike throughout the semiconductor, medical device, aerospace, industrial gas, fluid-handling, food equipment, and energy markets. Our multi-discipline team of engineers and technicians works closely with customers to develop practical solutions to complex process challenges. We utilize industry standard applications such as Finite Element Analysis (FEA), SolidWorks 3-D CAD technology, and a range of structural analysis & thermal modeling tools. CAS is an ISO 91 Certified company with a fully-equipped R&D facility. Testing capabilities include X-Ray, ultrasound, helium leak, and infra-red technology, plus the latest coordinate measuring machines (CMM). Our in-house casting facility utilizes a permanent mold low-pressure casting process which reliably produces low-porosity, high-quality aluminum products. We offer an array of precision CNC machining options, finishing options such as electroless nickel plating, Teflon coatings, clear-coat and hard-coat anodizing, plus high-value-added testing and inspection services. Headquartered in Batavia, Illinois (just outside Chicago) we serve customers worldwide. See the below map to locate a Sales Engineer, or contact CAS directly. We look forward to working with you. With offices worldwide, the CAS Team of knowledgeable and experienced representatives is ready to assist with your project. 6 7 8 9 1 2 4 - MEXICO, CENTRAL and SOUTH AMERICA Tel: +2 442-26-22 8 - ASIA China Tel: +86 21-332-832 1 - WEST REGION Tel: 714-93-2999 2 - MIDWEST REGION Chicago Tel: 847-48-1 Minneapolis Tel: 92-892-9222 3 - SOUTH REGION Tel: 678-91-812 4 - NORTHEAST REGION Tel: 13-398- 3 ENERGY PROCESS DIVISION Tel: 866-948-178 SEMICONDUCTOR DIVISION Tel: 48-74-337 6 - EUROPE France Tel: +33 () 1-41-32-79-7 Germany Tel: +49 723-94- Italy Tel: +39 2-48-8841 Spain Tel: +34 91-67-1292 United Kingdom Tel: +44 11-964-777 Japan Tel: +81 3-318-663 Korea Tel: +82 2-2169-26 Taiwan Tel: +866 7-288-168 India Tel: +91 4-666-127 9 - AUSTRALIA & NZ Tel: +61 3-933-6449 7 - RUSSIA, AFRICA & MIDDLE-EAST Tel: +1 63-879-2696 Tel: 63-879-2696 Sales@CastAluminumSolutions.com www.castaluminumsolutions.com 131 Kingsland Drive Batavia, Illinois 61 USA

Base Circulation Heater Heater Power Solvent Tube Fitting Cooling Tube Fitting High Limit Switches Accessories Metric Mountings BX8JN1A-BCDEF Building a Universal Solvent Heater Part Number Use these graphs to build your Universal Solvent Heater Assigning numbers for sections A, B, C, D and E. If you need metric mountings, assign "M" to section F. If metric mounts are not required, leave section F blank. For assistance, please contact CAS directly. VOLTAGE, POWER, CIRCUIT TYPE Section "A" Volts (V) Watts (kw) Circuit Type Amps (A) per circuit A 28 8 TWO SINGLE-PHASE CIRCUITS 19.2 C 28 6 TWO SINGLE-PHASE CIRCUITS 14.4 E 28 7. ONE THREE-PHASE WYE 2.8 B 24 8 TWO SINGLE-PHASE CIRCUITS 16.7 D 24 6 TWO SINGLE-PHASE CIRCUITS 12. F 24 7. ONE THREE-PHASE WYE 18. G 38 7. ONE THREE-PHASE WYE 11.4 H 48 7. ONE THREE-PHASE WYE 9. SOLVENT TUBE FITTING Section "B" Description 1 FLARETEK -COMPATIBLE, 1" OD, 2 THREADS PER INCH, MALE / PAIR 2 SWAGELOK VCR FITTINGS / PAIR COOLING TUBE FITTING Section "C" Description 1 NPT (NATIONAL PIPE THREAD) FITTINGS, 1/4", 9 ELBOW, FEMALE / PAIR 2 SWAGELOK VCR FITTINGS / PAIR SNAP ACTION HIGH LIMIT SWITCHES Pilot duty only Section "D" Switch 1 AUTOMATIC RESET, 212 F (1 C) 2 AUTOMATIC RESET, 36 F (18 C) ACCESSORIES Section "E" Component NONE 1 INSULATION JACKET, MAXIMUM TEMPERATURE 4 F (24 C) Section "F" M METRIC MOUNTING HOLES Place an "M" in section F if metric mounting holes are required. If standard Imperial mounting holes are desired, section F can be left blank Metric Mounting Holes M8 x 1.2 Metric Tapped Mounting Holes

1 L1 G 1L2 G HEATER HEATER* 1L1 1 L2 2 L1 HEATER* N HEATER HEATER* 1L3 SINGLE PHASE CIRCUIT 2 L2 THREE-PHASE WYE CIRCUIT Universal Solvent Heater Available Circuit Types The Universal Solvent Heater is manufactured with these types of circuit configurations. *Wiring schematic only shows heater elements. Refer to I&M Manual for further details on wiring of snap-action switches (if applicable). UNIVERSAL SOLVENT HEATER WITH SWAGELOK FITTINGS ON BOTH THE SOLVNENT TUBE AND THE SMALLER COOLING TUBE. UNIVERSAL SOLVENT HEATER WITH FLARETEK -COMPATIBLE FITTINGS ON SOLVENT TUBE AND NPT FITTINGS ON COOLING TUBE Need Help with Part Numbers or Engineering Calculations? One of the key advantages of working with CAS is the accessibility of our team and ability to offer assistance. The CAS Team is ready and available to help you work through part number configurations, provide engineering advice, and ensure customers purchase the heater most appropriate for their particular application. CAS Engineers are accustomed to working closely with customers to generate accurate calculations and models. We have a range of powerful tools at our disposal, including Finite Element Analysis (FEA) software, 3-D CAD applications, and infra-red thermal testing. Our mission is developing solutions, from concept to reality. So feel free to contact the CAS Team directly: Main Tel: 63-879-2696 Toll-Free: 888-367-3992 Sales@CastAluminumSolutions.com www.castaluminumsolutions.com