Our Company Your Partner for Pressure Sensing Solutions Supporting customer success with Pressure Sensing Solutions since 1991. Our Company 1
About SMI A pioneer in the MEMS sensor industry, we design and manufacture pressure sensing solutions to serve challenging applications in the automotive, medical, industrial, consumer, aerospace and HVAC markets. Our innovative products are market leading in measuring pressure at ultra-low pressure ranges (< 2 H 2 O) all the way to extremely high pressure ranges (> 40 Bar) all while being the smallest size for their respective sensitivity. Our captive fab enables us to provide harsh environment sensors and turn-key solutions to our customers with the possibility of joint or custom development. This integrated business model, with in-house manufacturing in Silicon Valley, enables unique process and design capability while maintaining high quality and control and offering highest levels of service to our customers. Our Markets MEDICAL APPLICATIONS > Continuous Positive Airway Pressure (CPAP) > Blood Pressure Monitoring > Catheter Pressure Sensor > Respirators/Ventilators > Patient Monitors > Oxygen Concentrators > Dialysis Machines > Hospital Beds > Balloon Inflation > Negative Pressure Wound Therapy > Air and Gas Flow Monitors > Gas Flow Instrumentation > Infusion Pumps > Spirometers AUTOMOTIVE APPLICATIONS > Tire Pressure Monitoring Systems (TPMS) > Transmission Management > Exhaust Gas Recirculation (EGR) > Barometric Absolute Pressure (BAP) > Compressed Natural Gas > Fuel/Oil Pressure > Manifold Absolute Pressure (MAP) > Diesel Particulate Filter > Occupant Detection > Fuel Vapor Pressure/Evaporative > Heating, Venting & Air Conditioning (AC) > Brake Booster > Crank Case Pressure > Air Brakes > Suspension > Airbag INDUSTRIAL APPLICATIONS > Safety Cabinets/Ventilation Hoods > Gas Flow Instrumentation > Liquid Level Measurement > Hydraulic & Pneumatic Pressure > Industrial Automation > Refrigeration > Water Tank Level Measurement > Pressure Transmitters > Oil Filled/Media Isolated Sensors > Water Heaters/Boilers CONSUMER APPLICATIONS > Home Appliances and White Goods > Vacuum Cleaner > Washing Machines > Wearables > Coffee/Espresso Machines > Scuba Dive Watches > Air Purifiers AEROSPACE APPLICATIONS > Air Data Modules > Cabin Pressure > Engine Controls > Valve Controls > Altimeters > Barometers > Cockpit Instrumentation HVAC APPLICATIONS > Heating > Ventilation > Airflow Measurement > Variable Air Volume (VAV) > Compressors 2 Our Company
AccuStable Our AccuStable Quality Label Our TailorSense Product Configurator For the most demanding applications, SMI has developed the AccuStable TM brand of sensors. For bare die and uncompensated packaged products, this means that the parts are guaranteed to have span and offset shifts of less than 1% over the life span of the product, based on 1000 hours of high temperature operating life (HTOL) testing. Our compensated systems meet this same definition, but additionally are guaranteed to have < 1% total accuracy error, which combines linearity, hysteresis and stability, and also show < 1% total output shift over the lifetime of the product. Only products combining an extraordinary accuracy with a long-time stability are allowed to have this high quality label. Several of SMI s new pressure sensor families qualify for this designation. The SM95 and SM30 die sensors have been qualified to 85 C and 150 C, respectively. These are available both as bare die and also packaged in SOIC16 package (the SM95 sensor) and in a new SOIC8 gauge package (the SM30 sensor). The newly-released harsh environment SM98 sensor has also earned the Accustable TM label, and has an operating temperature to 150 C. With the help of SMI s TailorSense Product Configurator the customer can build the perfect sensor system meeting all target requirements. The Product Configurator lets the customer define a sensor system tailored to the needs of a specific application. Pressure range, pressure type and accuracy can be configured as well as package type and package porting. In addition different options for the output type, compensated temperature range and supply voltage are available. By choosing these parameters based on the application, the customer is able to optimize the sensor system for its specific target application. For example, the full resolution and output range of the sensor system are available if the pressure range has been optimized for the specific application. And the configurable sensor output type, including amplified analog and digital I 2 C or SPI, allow integration with a variety of interfaces. The goal is that the customer does not have to compromise when choosing a sensor system solution. Several of our new digital-output compensated sensor systems are AccuStable TM. This includes the SM1221 series (for pressures ranging from 15 PSI to 29.9 PSI), the SM4221 series (from 2.5 PSI to 14.9 PSI), the SM5221 series (from 0.8 PSI to 2.0 PSI) and the SM6221 series (from 2.5 PSI to 14.9 PSI). Quality SMI's quality system is certified under ISO 9001 since 2006. Furthermore SMI fulfills the high quality standards of the automotive industry, and is therefore certified under ISO/TS 16949 since 2006. To ensure only highest quality material is used along the entire production chain SMI's maintains a Supplier Management System. It is SMI's quality policy to continually improve customer satisfaction by superior quality and 100% on time delivery. Our Company 3
Product Overview Bare Die For OEM and custom solutions, SMI provides a broad selection of bare pressure sensor die. With offerings from ultra-low pressure to media resistant high pressure, SMI can provide high performance solutions for your application while meeting the robust and high quality demands of the Automotive, Medical, and Industrial markets. The pressure sensor die are available in gauge and absolute pressure configurations. For more robust applications, a backside absolute pressure die is available. Pressure ranges vary from 0.07 PSI (~5 mbar) to 750 PSI (~50 bar). Packaged Solutions SMI carries a full selection of standard packaged products for the Automotive, Medical and Industrial markets. Packages range from the very small SOIC-8 plastic housing to the more versatile SOIC-16 plastic package with various porting options for design flexibility. A robust ceramic Dual Inline Package (DIP) is also available with stainless steel porting options for more stringent applications. To complement the package offering, SMI provides solutions for pressure ranges from 0.07 PSI (~5 mbar) to 120 PSI (~8.3 bar) with either an analog output or a digital interface or both. Compensated and System Solutions Various levels of integration are available from temperature compensated to fully signal-conditioned offerings. For the latter combining the pressure sensor cell with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors. Digital Product Series SM9543 SM7X21 SM6X21 SM5X21 SM4X21 SM1X21 Pressure Range 5 mbar 0.15-0.3 PSI 0.3-0.8 PSI 0.8-2.5 PSI 2.5-15 PSI 15-30 PSI Pressure Type Differential Comp. Temp. Range 5 C to +65 C 20 C to +85 C 20 C to +85 C 20 C to +85 C 20 C to +85 C 20 C to +85 C Package Type SOIC-16 SOIC-16 SOIC-16 SOIC-16 SOIC-16 SOIC-16 Port Type Dual Vertical Dual Vertical, Dual Horizontal Dual Vertical, Dual Horizontal Dual Vertical, Dual Horizontal Dual Vertical, Dual Horizontal, Single Vertical Dual Vertical, Dual Horizontal, Single Vertical Digital Interface I 2 C, 14 bit I 2 C, 14 bit I 2 C, 14 bit I 2 C, 14 bit I 2 C, 14 bit I 2 C, 14 bit Supply Voltage 3.3 V 3.3 V/5 V 3.3 V/5 V 3.3 V/5 V 3.3 V/5 V 3.3 V/5 V Accuracy 1.5%-FS 1%-FS AccuStable 1%-FS AccuStable 1%-FS AccuStable 1%-FS AccuStable 1%-FS AccuStable The digital sensor systems are fully signal-conditioned and provide a 14 bit digital output. The I 2 C interface of these sensor systems can easily be connected to a microcontroller. The SOIC- 16 package has a standard JEDEC footprint and the package porting options (dual vertical, dual horizontal and single vertical) allow for flexibility in the application. Available pressures range from 0.07 PSI (5 mbar) to 15 PSI. Most pressure ranges are available in a gauge, differential or asymmetric differential configuration and with a compensated temperature range of 20 C to +85 C. 4 Our Company
Analog Product Series SM6250 Uncalibrated Amplified Analog Sensor Pressure Range 0.7 to +0.7 PSI 0 to 15 PSI Pressure Type Differential Absolute Compensated Temperature Type 40 C to +85 C 0 C to +85 C Package Type Low Profile SOIC-16 SOIC-16 SM6844 Amplified Analog Absolute Port Type Dual Hole (Top & Bottom) Single Horizontal Supply Voltage 2.7 V/5.5 V 5 V Accuracy N/A (uncalibrated) 1%-FS AccuStable The amplified analog sensor systems combine a signal-conditioning ASIC with a pressure sensor cell. The ASIC provides an amplified analog output signal which is ratiometric to the supply voltage. The SOIC-16 package has a standard JEDEC footprint and can easily be Analog & Digital integrated in the PCB layout. For the uncalibrated sensor offering the customers will have to perform calibration over pressure and temperature in their module or system, while the calibrated SM6844 sensor is fully signal-conditioned and temperature compensated. Compensated Product Series SM5852 Series Ultra Low Pressure, Analog & Digital Product Series SM5651 Series Compensated Low Pressure, Constant Current SM5652 Series Compensated Low Pressure, Constant Voltage Pressure Range 0.15 to 1.5 PSI Pressure Range 0.15 to 1.5 PSI 0.15 to 1.5 PSI Pressure Type Gauge, Differential Pressure Type Gauge, Differential Gauge, Differential Compensated Temperature Range 0 C to +85 C Compensated Temperature Range 0 C to +60 C 0 C to +60 C Package Type Ceramic DIP Package Type Ceramic DIP Ceramic DIP Port Type Single Vertical, Dual Vertical Port Type Single Vertical, Dual Vertical Single Vertical, Dual Vertical Accuracy 2%-FS (for 0.15 PSI) / 1.6%-FS (other ranges) The signal-conditioning ASIC used in the amplified & digital Series provides an amplified analog and a digital 12 bit I 2 C output. Both outputs can be used in parallel. The analog output is radiometric with supply voltage. Supply voltage is 5 V. The SM565x series of pressure sensors are constructed by attaching a piezoresistive pressure cell to a ceramic susbtrate with thick film resistors. These resistors are then laser-trimmed during manufacturing to provide zero offset and span calibration as well as temperature compensation. Our Company 5
Uncompensated Product Family SM9G Uncompensated Low Pressure SM5G Gauge Medium Pressure Sensor SM5420 Absolute Pressure Sensor Pressure Range 0.3 to 1.5 PSI 5 to 80 PSI 15 to 100 PSI Pressure Type Gauge, Differential Gauge Absolute Temp. Range 40 C to +125 C 40 C to +125 C 40 C to +125 C Package Type SOIC16 SOIC8 Gauge SOIC8 Absolute Port Type Single Horizontal, Dual Horizontal, Single Vertical, Dual Vertical Single Vertical Hole, Single Vertical The same die used in our compensated systems are available as packaged sensor die without compensation. The customer can implement their own temperature compensation scheme with easy-to-use standard JEDEC packages. These are the same highly stable sensors used in the AccuStable TM line of compensated devices. A variety of porting options are available. Die Product Family SM95D Ultra Low Pressure Die SM30D Medium Pressure Die SM68E Absolute Pressure Die SM98A Backside Pressure Harsh Media Die Pressure Range 0.3 to 1.5 PSI 5 to 100 PSI 15 to 150 PSI 30 to 300 PSI Pressure Type Gauge/Differential Gauge/Differential Absolute Backside Absolute Temp. Range 40C to +125C 40C to +150C 40C to +125C 40C to +150C For customers who want complete control over packaging and signal conditioning, SMI offers sensor die. These are typically delivered as sawn wafers on tape, but other options include picked die in waffle packs or Gel-Pak TM boxes. Sensor die are fully inspected and electically probed before delivery. Customized die options include: > Backside Gold for eutectic bonding > Top-side Gold or Platinum for harsh media > Wafer Thinning for die stacking > Solder bumping > Open or closed bridge designs 6 Our Company
Services Evaluation Boards SMI also offers evaluation boards and kits to support the design-in of the SMI pressure sensors by making evaluation testing and prototyping easier. Please contact Sales for details. Turnkey Solutions Many applications require the use of a pressure sensor die instead of a packaged standard product. In those cases, significant engineering effort is spent on the selection and development of suitable processes for membrane formation, media protection, electrical contact, and handling of the sensor die. The Design for Manufacturability is crucial in applications where product quality and commercial success are critical factors. Custom Solutions Over the years SMI has acquired broad expertise in many of these areas ranging from special coatings used for media protection to advanced packaging methods for easier handling of ultra-small sensors. SMI offers valueadded services in conjunction with our pressure sensors that enable our customers to develop truly innovative and unique products. Process Modules Vapor deposited films Metallization PECVD oxide, PECVD nitride, PECVD Oxynitride LPCVD nitride, Low Stress LPCVD nitride Aluminum/AlSi, Chrome, Titanium Gold, Titanium-Tungsten Platinum, Tantalum Wafer bonding Anodic (Si/Glass), (Glass/Si/Glass triple-stack) Fusion (Si/Si), Aligned Bonding Wafer Etching High Temperature processes Lithography Metrology Singulation & Die-Picking KOH Bulk micromachining, DRIE Deep Reactive Ion Etching, IBE Ion Beam Etching, RIE Reactive Ion Etching, Metal wet etch for applicable metal Annealing (up to 1150C), Thermal Oxidation Stepper, Front to back Alignment, IR Alignment Thin Film Measurement, Particle measurement, Film Stress measurement, Diaphragm Thickness, Automated optical Inspection, Dicing with automated dual blade saw Die-picking into waffle packs or gel packs Manufacturing Capabilities SMI has various silicon wafer processing capabilities as listed above. Most processes are available for 6 and 8 wafers. SMI has implemented Poka-Yoke systems, 5S workplace organization and a ISO/TS 16949 compliant quality system to fulfill automotive standards and deliver highest quality products to the market. SMI also offers platinum metallized products that withstand harsh environment. The different wafer-bond and alignment capabilities at SMI enable various opportunities for production of complicated MEMS devices. SMI uses automated optical inspection systems to detect and classify defects to secure highest quality standards. SMI is also capable of picking die into various gel and waffle packs for turnkey solutions. In order to secure the line and avoid contamination SMI does not process wafers that were pre-processed in other facilities. Our Company 7
About the Elmos Group Elmos is a developer and manufacturer of semiconductor-based system solutions. Elmos offers to their customers the product which is the right solution for their tasks. Whether it is a chip which is customized to their requirements (ASIC), a standard product which can be implemented quickly (ASSP), or a complete micro-system as symbiosis of sensor and evaluation electronics. The core competency of Elmos is the development, production, and sale of mixed-signal semiconductors. Mixed-signal semiconductors represent the intelligence in an electronic system. Among other things, Elmos components evaluate sensor data and convert this analogue information into digital values. Only then can the sensor data be analysed and recorded precisely. With regard to vehicles, this means that a mixed-signal chip makes sense wherever analysis and switching takes place. Thus an integrated sensor can, for example, detect and analyse the rotational speed, acceleration, inclination angle, pressure, or even light. Numerous application opportunities also exist in industrial and consumer goods applications, for example in motion detectors, gesture and movement recognition, smoke detectors, or products with electric motors. Contact Headquarters Sales Americas Silicon Microstructures, Inc. 1701 McCarthy Blvd Milpitas, CA 95035 USA Sales Europe, Middle East & Africa Silicon Microstructures, Inc. Cologne Germany Sales Asia Pacific Silicon Microstructures, Inc. Shanghai, P.R. China Phone +1-408-577-0100 Fax +1-408-577-0123 sales@si-micro.com www.si-micro.com Phone +49 (0) 2219-626-4849 Fax +49 (0) 2233-713-5013 sales@si-micro.com www.si-micro.com Phone +86 (0) 21-6210-0908 ext. 112 Fax +86 (0) 21-6219-7502 sales@si-micro.com www.si-micro.com 8 QM-No. Our Company 40IS1701.01 2017 Silicon Microstructures Inc. All rights reserved.