Integrated Process Solutions. Series 49. Thermal Management System

w w w. m k s i n s t. c o m Integrated Process Solutions Series 49 Thermal Management System The COMPLETE THERMAL MANAGEMENT Solution Controller Heater User Interface

Series 49 Thermal Management System Intuitive Advanced Control The Series 49 Thermal Management System is a comprehensive thermal control solution with innovative technology built on the proven Series 46 and 48 heater products. The Series 49 features three newly designed main components: The intelligent and flexible Series 49 Controller with customized temperature operation, provides complete, configurable thermal system management. Two advanced heaters with new jacket materials offer high energy efficiency and high operating temperature. A new intuitive User Interface System enables quick and easy system access, diagnostics; and features adjustable set points for comprehensive system control. Significant Energy Savings Series 49 Thermal Management Systems provide greater energy savings and efficiency over competitive heater products. The new thermally efficient advanced Polyimide and PTFE materials used in the heater jacket construction provide superior insulation. Users can also broadcast a lower set point temperature to all controllers on the network allowing for a reduction in energy use while minimizing heat up and restart time. The chart below compares the energy use of the Series 49 heaters to other current heater solutions. Preventative maintenance cycles combined with our advanced materials resulted in 36% less power usage compared to current competitive heater products. Features & Benefits Series 49 Controller Comprehensive system control along with detailed diagnostics Control method flexibility 360 LED signal visibility Superior Heaters Choice of two jacket material options Series 49P Polyimide Heater Series 49T PTFE Teflon -Woven Heater New, advanced materials construction High efficiency and high operating temperature Lightweight and flexible with easy installation Low particulate generation and low VOC User Interface System Digital communications link to one or an entire heater network Tablet based, easy to use software application and hardware kit Detailed control, diagnostic feedback, and data acquisition Advanced Digital Communications Series 49 Thermal Management Systems feature an innovative automatic self-addressing function for configuration of digital heater networks. It automatically increments the address on consecutive controllers for ease of set up and prevents duplication of addresses. Commands can be sent to individual heater controllers via direct communications or to the entire heater network via a broadcast function from the MKS downloadable software application. The user interface system allows access to system settings and functions via Modbus RTU communications over serial RS485. Series 49 Heaters can provide over 36% energy savings vs. competitive heater products Superior LED Display Series 49 heater controllers use an array of LEDs to illuminate the enclosure providing 360 heater status easily visible from a distance. LED s indicate several diagnostics and safety conditions including at temperature status, low and high temperature alerts, and digital communications status. Secure Safety Features Onboard Safety Functions Voltage Monitoring Dual Microprocessor Control PCB Temperature Sensing Over Temperature Safety Shutdown Inline Fused Power Cables

Series 49 Thermal Management System Applications Semiconductor ETCH Prevent solidification of aluminum chloride (AlCl 3 ) in an aluminum etching system CVD, PECVD, MOCVD, LPCVD (Nitride and TEOS) Prevent solidification of ammonium chloride (NH 4 Cl) in a silicon nitride LPCVD system Reduce solid buildup in other semiconductor processes, such as titanium nitride, tungsten, and TEOS CVD EPI (Epitaxi) ALD Gauge Trees and Gas Lines Maintain uniform temperature environments in complex shapes Gas Analyzers, Endpoint Detectors, Bubbler Cylinders, Mass Flow Controllers, Manometers, Isolation and Butterfly Valves Analytical Instrumentation Mass Spectrometers Evaporators Chambers Biopharm Stainless Steel Filter Housings Single Use Filters Industrial Coating Solar Substrate Processing Thin Films LED Manufacturing Custom and R&D Applications Heaters for custom and R&D applications can be engineered to meet specific requirements The Series 49 Thermal Management System provides a complete, integrated Thermal Heater Solution for multiple and custom applications

Series 49 Controller New advanced controller technology allows for more versatility in the Series 49 providing maximum flexibility in system configuration. This unique controller integrates a temperature process controller, a high-low temperature alert, power switching with a safety high limit, and detailed diagnostics. The Series 49 controller can be configured and customized using the optional user interface tablet, communicating with each individual heater controller. The user interface application is the gateway to a comprehensive thermal management control system providing access to temperature limits, set points, data and network alerts. Series 49 Controller Module Features fully adjustable control parameters and 360 view of status indicators Features & Benefits Provides maximum flexibility in system configuration or standalone operation Fully adjustable control parameters and alarm conditions Adjustable set point and process control alarms Master/slave configuration option for reduced system cost Low and high temperature alerts 360 View of status indicators Simplified cabling with integrated power and communications bus Over temperature safety shutdown Custom OEM configurations Remote set up and diagnostics Network communications access Series 49 Controller Specifications Pre-Set Temperature Configurations 150 C Standard Custom configurations available on request Operating Environmental 0 C to 60 C Temperature Range Controller Enclosure Connectors Compliance Control Power Requirements Unit Dimensions Injection Molded Circular 6 Contact Locking Bayonet 250 VAC, 10A CE, SEMI S2 100-120 VAC Input 200-240 VAC Input Ø2.2'' x 3.7''L

Series 49 Heater Material Options The Series 49 multiple set point heater jackets feature a choice of two new Polyimide and PTFE heater materials. These new heater jackets improve thermal control versatility and functionality provided by the Series 49 Controller. The new control mechanism, along with optional user interface system application, provides easy user friendly adjustment of system controlling parameters. Series 49 new heater materials allow for use in stricter clean room environments. The materials have proven to be lower in airborne particles and offer minimal outgassing of Volatile Organic Compounds. The heater shapes conform to the hardware, square ends minimize gaps and subsequent heat loss. The patented automated sewing of the heater element safely secures it to the reinforced inner materials thus resulting in superior uniformity and guaranteed temperature profiles for the life of the heater. Series 49T PTFE Teflon -Woven Heater Series 49T products provide maximum performance, utilizing a proprietary Teflon woven shell achieving ultra low particulate generation, preventing surface contamination. This low outgassing product is ideal for customers that need low Volatile Organic Compound (VOC) in the work area. These heaters are constructed with fully squared ends and a shape to provide maximum energy efficiency and thermal uniformity. PTFE heaters are generally used in critical applications where elevated temperatures (up to 200 C), and low VOCs are required. Series 49P Polyimide Heater Series 49P products employ cutting edge materials technology to provide superior performance utilizing polyimide materials for both the insulation and jacketing. The heaters can be used in all critical applications where minimal outgassing, ultra low particle generation, elevated temperatures (up to 200 C), and ease of installation are required. These patented heaters are constructed with fully squared ends and a form fit shape to maximize thermal efficiency and temperature uniformity, minimizing thermal losses and power consumption. Polyimide heaters enable lower cost heating compared to other solutions. Series 49 Heater Specifications Voltage Requirements 100-120 VAC 200-240 VAC Temperature Range 35 C to 200 C Material Options Polyimide PTFE *Custom heaters available up to 250 C

Series 49 User Interface System The Series 49 User Interface System enables an integrated remote communications and diagnostics solution for Thermal Management Systems. The user friendly system allows quick and easy set up and operation with a downloadable software application. The Series 49 software app provides full access to all functions of the Series 49 heater control system. The application provides intuitive system control set up, monitoring, diagnostics and parameter adjustments creating a user friendly experience. The User Interface System adjusts variables such as temperature set points, upper and lower temperature threshold alarms, control parameters, and heater identification as well as advanced parameter setting for users to fine tune the Series 49 heater network. The user interface app contains a sequential auto-addressing function which automatically sets the address of the heater controllers in a network, ensuring accurate communication and identification of each connected heater. Features & Benefits Quick and easy access to Series 49 Controller set up and diagnostics Android-based software app, simple to download, install and run Multi-functional user screens provide network monitoring and control On-line manual for quick reference Multi-node Screen Indicates devices connected to the network Real-time Series 49 network updates (of all LED display and control parameters) emulating the actual heater controller visual condition View all nodes on the network and their current temperature Single-node Screen Provides general status and any alerts or errors for a particular heater Adjust set point and temperature alert parameters ''Ping'' feature for physical identification of a heater on the line Data Plot Screen Simple plotting of selected heaters with timescale adjustment capability Monitoring, diagnostics and system tuning Advanced Access Screen (protected) Broadcast commands to the entire network Advanced parameter adjustment Register output for diagnostics

Ordering Information Straight Section - Diameter Tubing 1.50 in Nominal Length in. (mm) 7.00 (178) 8.00 (203) 9.00 (229) 10.00 (254) 11.00 (279) 12.00 (305) 13.00 (330) 14.00 (356) 15.00 (381) 16.00 (406) 17.00 (432) 18.00 (457) 19.00 (483) 20.00 (508) 21.00 (533) 22.00 (559) 23.00 (584) 24.00 (610) 25.00 (635) 26.00 (660) 27.00 (685) 28.00 (711) 29.00 (737) 30.00 (762) 31.00 (787) 32.00 (813) 33.00 (838) 34.00 (864) 35.00 (889) 36.00 (914) 0.30 0.37 0.42 0.47 0.55 0.63 0.71 0.78 0.87 0.94 1.03 1.10 1.19 1.26 1.35 1.42 1.50 1.58 1.65 1.73 1.81 1.89 1.97 2.04 2.12 2.20 2.28 2.36 2.44 2.52 2.59 2.67 2.75 2.84 0.15 0.19 0.22 0.24 0.28 0.32 0.36 0.40 0.44 0.48 0.52 0.56 0.60 0.64 0.68 0.72 0.77 0.80 0.84 0.88 0.92 0.96 1.00 1.04 1.08 1.12 1.16 1.20 1.24 1.28 1.32 1.36 1.40 1.45 1=PTFE; 49X015-Y003 49X015-Y004 49X015-Y005 49X015-Y006 49X015-Y007 49X015-Y008 49X015-Y009 49X015-Y010 49X015-Y011 49X015-Y012 49X015-Y013 49X015-Y014 49X015-Y015 49X015-Y016 49X015-Y017 49X015-Y018 49X015-Y019 49X015-Y020 49X015-Y021 49X015-Y022 49X015-Y023 49X015-Y024 49X015-Y025 49X015-Y026 49X015-Y027 49X015-Y028 49X015-Y029 49X015-Y030 49X015-Y031 49X015-Y032 49X015-Y033 49X015-Y034 49X015-Y035 49X015-Y036

Straight Section - Diameter Tubing 2.00 in Nominal Length in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) 10.00 (254) 11.00 (279) 12.00 (305) 13.00 (330) 14.00 (356) 15.00 (381) 16.00 (406) 17.00 (432) 18.00 (457) 19.00 (483) 20.00 (508) 21.00 (533) 22.00 (559) 23.00 (584) 24.00 (610) 25.00 (635) 26.00 (660) 27.00 (685) 28.00 (711) 29.00 (737) 30.00 (762) 31.00 (787) 32.00 (813) 33.00 (838) 34.00 (864) 35.00 (889) 36.00 (914) 0.28 0.39 0.46 0.54 0.59 0.69 0.79 0.90 1.00 1.10 1.20 1.29 1.39 1.49 1.60 1.69 1.79 1.90 2.00 2.08 2.19 2.29 2.39 2.49 2.59 2.68 2.78 2.88 2.99 3.08 3.18 3.28 3.38 3.48 3.59 0.14 0.19 0.23 0.27 0.30 0.35 0.39 0.45 0.50 0.55 0.60 0.65 0.70 0.74 0.80 0.85 0.90 0.95 1.00 1.04 1.09 1.14 1.20 1.24 1.29 1.34 1.39 1.44 1.49 1.54 1.59 1.64 1.69 1.74 1.80 1=PTFE; 49X020-Y002 49X020-Y003 49X020-Y004 49X020-Y005 49X020-Y006 49X020-Y007 49X020-Y008 49X020-Y009 49X020-Y010 49X020-Y011 49X020-Y012 49X020-Y013 49X020-Y014 49X020-Y015 49X020-Y016 49X020-Y017 49X020-Y018 49X020-Y019 49X020-Y020 49X020-Y021 49X020-Y022 49X020-Y023 49X020-Y024 49X020-Y025 49X020-Y026 49X020-Y027 49X020-Y028 49X020-Y029 49X020-Y030 49X020-Y031 49X020-Y032 49X020-Y033 49X020-Y034 49X020-Y035 49X020-Y036

Ordering Information Straight Section - Diameter Tubing 3.00 in Nominal Length in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) 10.00 (254) 11.00 (279) 12.00 (305) 13.00 (330) 14.00 (356) 15.00 (381) 16.00 (406) 17.00 (432) 18.00 (457) 19.00 (483) 20.00 (508) 21.00 (533) 22.00 (559) 23.00 (584) 24.00 (610) 25.00 (635) 26.00 (660) 27.00 (685) 28.00 (711) 29.00 (737) 30.00 (762) 31.00 (787) 32.00 (813) 33.00 (838) 34.00 (864) 35.00 (889) 36.00 (914) 0.39 0.53 0.65 0.73 0.82 0.95 1.09 1.22 1.37 1.50 1.64 1.78 1.92 2.05 2.19 2.33 2.46 2.60 2.73 2.87 3.00 3.14 3.28 3.43 3.57 3.70 3.84 3.98 4.10 4.25 4.39 4.53 4.66 4.80 4.93 0.19 0.26 0.32 0.37 0.41 0.47 0.54 0.61 0.68 0.75 0.82 0.89 0.96 1.02 1.09 1.16 1.23 1.30 1.36 1.43 1.50 1.57 1.64 1.71 1.78 1.84 1.91 1.98 2.05 2.12 2.19 2.25 2.32 2.39 2.46 1=PTFE; 49X030-Y002 49X030-Y003 49X030-Y004 49X030-Y005 49X030-Y006 49X030-Y007 49X030-Y008 49X030-Y009 49X030-Y010 49X030-Y011 49X030-Y012 49X030-Y013 49X030-Y014 49X030-Y015 49X030-Y016 49X030-Y017 49X030-Y018 49X030-Y019 49X030-Y020 49X030-Y021 49X030-Y022 49X030-Y023 49X030-Y024 49X030-Y025 49X030-Y026 49X030-Y027 49X030-Y028 49X030-Y029 49X030-Y030 49X030-Y031 49X030-Y032 49X030-Y033 49X030-Y034 49X030-Y035 49X030-Y036

Straight Section - Diameter Tubing 4.00 in Nominal Length in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) 10.00 (254) 11.00 (279) 12.00 (305) 13.00 (330) 14.00 (356) 15.00 (381) 16.00 (406) 17.00 (432) 18.00 (457) 19.00 (483) 20.00 (508) 21.00 (533) 22.00 (559) 23.00 (584) 24.00 (610) 25.00 (635) 26.00 (660) 27.00 (685) 28.00 (711) 29.00 (737) 30.00 (762) 31.00 (787) 32.00 (813) 33.00 (838) 34.00 (864) 35.00 (889) 36.00 (914) 0.49 0.65 0.78 0.91 1.00 1.17 1.33 1.50 1.67 1.84 2.00 2.17 2.33 2.51 2.66 2.84 3.00 3.18 3.33 3.50 3.66 3.84 4.00 4.16 4.33 4.50 4.66 4.83 0.23 0.33 0.39 0.45 0.50 0.58 0.67 0.75 0.84 0.92 1.00 1.08 1.17 1.25 1.33 1.42 1.50 1.59 1.67 1.75 1.83 1.92 2.00 2.08 2.16 2.25 2.33 2.41 2.50 2.58 2.66 2.75 2.83 2.91 3.01 1=PTFE; 49X040-Y002 49X040-Y003 49X040-Y004 49X040-Y005 49X040-Y006 49X040-Y007 49X040-Y008 49X040-Y009 49X040-Y010 49X040-Y011 49X040-Y012 49X040-Y013 49X040-Y014 49X040-Y015 49X040-Y016 49X040-Y017 49X040-Y018 49X040-Y019 49X040-Y020 49X040-Y021 49X040-Y022 49X040-Y023 49X040-Y024 49X040-Y025 49X040-Y026 49X040-Y027 49X040-Y028 49X040-Y029 49X040-Y030 49X040-Y031 49X040-Y032 49X040-Y033 49X040-Y034 49X040-Y035 49X040-Y036

Ordering Information 45 Elbow For ISO Flanged Elbows, Standard * 45 elbow is too small to heat, and serves as an insulator 1.37 (35) 1.62 (41) 2.94 (75) 4.05 (103) Bend Radius 4.50 (114) 120 VAC * 0.40 0.82 1.32 * 0.20 0.41 0.66 100318705 100318706 100764408 100764410 1=PTFE; 50X015-Y062 49X020-Y062 49X030-Y062 49X040-Y062 45 Elbow For Weld Elbows, Standard * 45 elbow is too small to heat, and serves as an insulator 0.93 (24) 1.24 (31) 1.86 (47) 2.49 (63) Bend Radius 4.50 (114) * 0.32 0.54 0.87 * 0.16 0.27 0.44 1002345150 1002345200 1002345300 1002345400 1=PTFE; 50X015-Y064 49X020-Y064 49X030-Y064 49X040-Y064 45 Elbow For Weld Elbows, with Tangents 1.56 (40) 2.24 (57) 3.61 (92) 4.74 (120) Bend Radius 4.50 (114) 0.31 0.50 0.96 1.54 0.16 0.25 0.48 0.77 1002345WT150 1002345WT200 1002345WT300 1002345WT400 1=PTFE; 49X015-Y065 49X020-Y065 49X030-Y065 49X040-Y065

90 Elbow For ISO Flanged Elbows, Standard 2.38 (60) 3.75 (95) 5.25 (133) Bend Radius 1.50 (38) 2.00 (51) 4.50 (114) 0.34 0.43 0.86 1.60 0.17 0.22 0.43 0.80 100314505 100314506 100764608 100764610 1=PTFE; 49X015-Y061 49X020-Y061 49X030-Y063 49X040-Y063 90 Elbow For ISO Flanged Elbows, Long Radius 4.75 (121) 5.13 (130) Bend Radius 0.64 0.83 0.32 0.42 100314415 100314416 1=PTFE; 49X015-Y063 49X020-Y063 90 Elbow For Weld Elbows, Standard 4.50 (114) Bend Radius 4.50 (114) 0.35 0.52 0.97 1.58 0.18 0.26 0.48 0.79 1002390150 1002390200 1002390300 1002390400 1=PTFE; 49X015-Y066 49X020-Y066 49X030-Y066 49X040-Y066 90 Elbow For Weld Elbows, with Tangents 2.88 (73) 6.25 (159) 8.25 (210) Bend Radius 4.50 (114) 0.41 0.68 1.45 2.33 0.21 0.34 0.72 1.17 1002390WT150 1002390WT200 1002390WT300 1002390WT400 1=PTFE; 49X015-Y067 49X020-Y067 49X030-Y067 49X040-Y067

Ordering Information Tee - For ISO Flanged Tees 2.38 (60) 3.38 (86) Length 4.50 (114) 4.75 (121) 6.75 (171) 0.52 0.65 0.97 1.27 0.26 0.32 0.49 0.63 100314605 100314606 100761408 100761410 1=PTFE; 49X015-Y038 49X020-Y038 49X030-Y038 49X040-Y038 Tee - For Weld Tees 2.19 (56) 2.94 (75) 3.19 (81) 3.81 (97) Length 4.38 (111) 5.88 (149) 6.38 (162) 7.63 (194) 0.51 0.76 1.06 1.49 0.23 0.53 0.74 10023T150 10023T200 10023T300 10023T400 1=PTFE; 49X015-Y039 49X020-Y039 49X030-Y039 49X040-Y039 Bellows - For ISO Flanged Bellows Length 3.31 (84) 3.19 (81) Bellows Diameter 1.81 (46) 2.41 (61) 3.80 (97) 4.70 (119) Heater O.D. 3.50 (89) 0.24 0.27 0.42 0.57 0.12 0.14 0.21 0.28 100314915 100314916 100763508 100763510 1=PTFE; 49X015-Y069 49X020-Y069 49X030-Y069 49X040-Y069

Reducer - For ISO Flanged Reducers (in) 3.0 x 1.5 3.0 x 2.0 4.0 x 2.0 4.0 x 3.0 Length 3.90 (99) 3.83 (97) 3.83 (97) 3.18 (81) Large End Tangent 0.39 (10) 0.42 (12) 0.49 (12) 0.47 (12) Small End Tangent 1.00 (25) 0.93 (23) 0.93 (23) 0.28 (7) 0.42 0.46 0.51 0.50 0.21 0.23 0.26 0.25 100765016 100765008 100765018 100764908 1=PTFE; 49X030-Y043 49X030-Y047 49X040-Y043 49X040-Y047 Reducer - For Weld Reducers (in) 2.0 x 1.5 3.0 x 1.5 3.0 x 2.0 4.0 x 2.0 4.0 x 3.0 Length 2.38 (60) 3.63 (92) 3.63 (92) 3.63 (92) 3.63 (92) Large End Tangent 0.70 (18) Small End Tangent 0.28 0.46 0.51 0.58 0.63 0.23 0.25 0.29 0.32 10023200CR150 10023300CR150 10023300CR200 10023400CR200 10023400CR300 1=PTFE; 1=120V; 2=240V 49X020-Y045 49X030-Y041 49X030-Y045 49X040-Y041 49X040-Y045 Hose - For ISO-KF Flanged Thin Wall Hose Length 9.19 (233) 9.06 (230) Bellows Diameter 1.95 (50) 2.50 (64) Heater O.D. 3.50 (89) 0.63 0.69 0.32 0.35 100317415 100317416 1=PTFE; 49X015-Y077 49X020-Y077 Hose - For ISO-KF Flanged Thick Wall Hose Length 9.19 (233) 9.06 (230) Bellows Diameter 2.12 (54) 2.71 (69) Heater O.D. 3.50 (89) 0.60 0.65 0.31 0.32 100315905 100315906 1=PTFE; 49X015-Y079 49X020-Y079

Ordering Information Flange Insulators - Standard, Fits Most Clamps Flange NW 40 40 50 50 80 80 100 100 Hole 1 I.D. 2.50 (64) 2.50 (64) Hole 2 I.D. 2.50 (64) O.D. 6.20 (157) 6.20 (157) 7.78 (198) 7.78 (198) 6.68 (170) 6.68 (170) 7.42 (188) 7.42 (188) MKS ISO-KF Clamps MKS ISO-KF Clamps MKS ISO-KF Clamps MKS ISO-KF Clamps MKS Double Claw Clamp 100761106 MKS Double Claw Clamp 100761106 MKS Double Claw Clamp 100761106 MKS Double Claw Clamp 100761106 1=PTFE 50X015-0016 50X015-0017 50X020-0016 50X020-0017 50X030-0016 50X030-0017 50X040-0016 50X040-0017 Flange Insulators - ISO-KF Flanges, Compact Flange NW 40 40 40 50 50 50 Hole 1 I.D. 2.50 (64) 2.50 (64) 2.50 (64) Hole 2 I.D. 2.50 (64) 3.50 (89) 3.50 (89) O.D. 4.20 (107) 4.20 (107) 4.20 (107) 5.16 (131) 5.16 (131) 5.16 (131) (will only work with MKS clamps) MKS Wing Nut Clamp 100312905 MKS Wing Nut Clamp 100312905 MKS Wing Nut Clamp 100312905 MKS Wing Nut Clamp 100312906 MKS Wing Nut Clamp 100312906 MKS Wing Nut Clamp 100312906 1=PTFE 50X015-0269 50X015-0270 50X015-0280 50X020-0247 50X020-0285 50X020-0248 1'' Long Insulators Use to fill straight gaps. Length 1'' 1'' 1'' 1'' 1=PTFE (Qty 1 Insulator) 50X010-0001 50X020-0001 50X030-0001 50X040-0001 1=PTFE (Qty 5 Insulator) 50X010-0005 50X020-0005 50X030-0005 50X040-0005

Ordering Information Power Power Kit, 120 V, 8 ft cable Power Kit, 240 V, 8 ft cable Power Kit, 120 V, 15 ft cable Power Kit, 240 V, 15 ft cable Communications Description Description 20001532 20001533 20001534 20001535 Communications Kit 20001543 Accessories Description High Temperature Cable Ties, (package of 12) 100014821 MKS Instruments, Inc. Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 Tel: 800.227.8766 (in USA) Web: www.mksinst.com MKS Instruments, Inc. Integrated Process Solutions 5330 Sterling Drive Boulder, CO 80301 Tel: 303.449.9861 Series 49-2/18 2016-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst is a trademark of MKS Instruments, Inc., Andover, MA. Teflon is a registered trademark of E.I. Dupont Co., Inc., Wilmington, DE.