Date ECO# Rev Description Originator 9/15/97 1.0 First Publication DB 10/8/97 2.0 Miscelaneous corrections DB 10/28/97 3.0 Minor changes BM 5/1/98 3.1 Added CE compliance BM TM IN USA, INCORPORATED 87 CRESCENT ROAD NEEDHAM, MA 02194-1496 USA TEL: 781-444-2929 FAX: 781-444-9229 Model gffoz Process Ozone Sensor (In-Line) (software versions 1.02 and higher)
Contents CONTENTS... 2 FIGURES... 3 TABLES... 3 GENERAL PRECAUTIONS... 4 GFFOZ SENSOR DESCRIPTION... 6 GFFOZ SPECIFICATIONS... 8 INSTALLATION AND CONNECTIONS... 9 Mounting...9 Pneumatic Connections and Configuration...9 Electrical Connections to the IN USA, INC. Controller...12 OPERATION... 13 Initial Power-on and Warm-up...13 Zeroing the Sensor...13 MAINTENANCE... 15 Removing the Sensor Cover...15 Accessing the UV Lamp...15 CONTACTING IN USA, INC.... 17 About the Company...17
Figures FIGURE 1: GFFOZ SENSOR...6 FIGURE 2: GFFOZ DIMENSIONS AND MOUNTING HOLE PATTERN...6 FIGURE 3: IN-LINE, FULL-FLOW CONFIGURATION...10 FIGURE 4: SIDE STREAM CONFIGURATIONS...11 FIGURE 5: UV LAMP ACCESS...16 Tables TABLE 1: ZEROING PHASES...14
General Precautions WARNINGS: 1. Ozone (O 3 ) is a toxic gas. High concentrations of ozone are dangerous and harmful to humans. Take reasonable steps to avoid exposure. The current maximum 8-hour exposure limit for ozone is 0.1 ppm (according to U.S. OSHA). 2. Install appropriate safety monitoring equipment wherever high concentrations of ozone are used. IN USA, INC. manufactures several ozone monitors for workplace safety applications. 3. Materials in contact with high concentrations of ozone should be suitable for such use. 316L Stainless, Teflon, Chemraz and Kynar are recommended. 4. When performing any maintenance to the unit, make sure all AC power is disconnected from the unit. 5. The ozone sensor contains an ultraviolet (UV) lamp. Never remove the lamp from its housing while the unit is powered on. Eye exposure to UV light is extremely dangerous. 6. Certain components may be hot to the touch. Please allow proper cooling time before working with these components. 7. Never attempt to open ozone catalyst canisters (if supplied). The content of the canisters can be hazardous if not handled properly. 8. Use only IN USA, INC. recommended spare parts. Substitution parts could result in damage to the equipment, may create hazardous conditions and will void the warranty. CAUTIONS: 1. Read the operating manual before operating the unit. 2. Do not subject the unit to extreme physical or thermal shock. 3. Use care in handling the unit and any of its components.
GENERAL NOTES 1. IN USA, AFX, gffoz, SCI and Excellence in Instrumentation are Trade Marks of IN USA, INC. 2. This document is Copyright Protected. 3. IN USA, INC. reserves the right to make changes to the product covered in this manual to improve performance, reliability or manufacturability. Make sure that this Manual is used with the original Product it was shipped with. 4. Although every effort has been made to ensure accuracy of the information contained in this manual, IN USA assumes no responsibility for inadvertent errors. Contents of the manual are subject to change without notice. 5. IN USA assumes no responsibility for the use of any measuring schemes described herein. 6. This product is not intended or recommended by IN USA for use in (a) medical therapy or physical therapy of any kind whether as a direct or adjunct part of such therapy, including, without limitation, life support (i.e., critical medical) applications or (b) any nuclear facility applications. IN USA will not knowingly sell this product for use in such applications. Use of the IN USA product in connection with medical or like treatment cannot be reasonably expected to produce accurate monitorings of therapy or treatment and may cause failure of the life support device or significantly affect its safety or effectiveness. Use by any direct purchaser or after-market purchaser in such applications whether or not known to IN USA shall absolve IN USA of any responsibility or liability to such purchaser (s) or to any person (s) subjected to or affected by such use knowingly or unknowingly.
gffoz Sensor Description IN USA, INC's. gffoz* sensor is designed for measuring process ozone in the gas phase at concentrations up to 400 g/m 3. The sensor can be installed directly in-line in a full-flow stream at flow rates up to 15 SLPM or more. The gffoz is clean-ready for high ultra-pure applications. The gffoz is a state-of-the-art smart sensor incorporating IN USA, INC's. innovative dual optical path sample sensing technology (patent pending) to provide unparalleled performance. Calibration data is stored on-board, making sensor replacement easy. gffoz sensors must be connected to one of IN USA, INC's. Sensor Control Interface controllers (series "SCI"). Some of these controllers interface to multiple sensors and can be equipped with ozone generator servo controls. Please refer to the controller's operating manual for details. SCREWS FOR COVER (QTY 2) Figure 1: gffoz Sensor 15 PIN "D" CONNECTOR POWER ON INDICATOR LED INLET PORT OUTLET PORT *gffoz = gas phase, Full Flow OZone sensor. Figure 2: gffoz Dimensions and Mounting Hole Pattern
gffoz Specifications Measuring Principle Application Pressure and Temperature UV Light Source UV absorption; dual optical path sample sensing (patent pending) Continuous in-situ measurement of high concentrations of ozone in gas phase Automatic compensation for pressure and temperature Low pressure mercury vapor lamp Units of Measure % weight, g/m 3, g/nm 3 Measuring Range Repeatability Sample Flow Sample Pressure Sample Ports Wetted Materials Dimensions (W x H x D) Maintenance Compliance 0-400 g/m 3 (0-26% weight in O 2 at NTP) 1.0 g/m 3 or 1% of reading, including zero drift (higher precision available) 0.2 to 15 SLPM. Pressure drop at 10 SLPM is less than 5 mb 40 psia operating; 80 psia proof 1/4" VCR standard Electropolished 316L, sapphire. Compatible with semiconductor processes 5.1" x 5.8" x 2.1" [130mm x 146 mm x 54mm] UV lamp replacement every 24-36 months. No other scheduled maintenance CE
Installation and Connections Mounting The gffoz sensor has threaded mounting holes on its bottom plate. The hole pattern is shown in Figure 2, page 6. Use #8-32 screws for mounting. Pneumatic Connections and Configuration IMPORTANT!!: Gas flow should be as indicated by the gas flow direction arrows on the sensor. The female VCR fitting is the gas inlet. The male VCR fitting is the gas outlet. To avoid leaks, tighten the VCR fittings per the manufacturer's recommendation. Protect the VCR fitting faces from scratches and contamination. Always use new stainless steel gaskets - never use other materials. Although the gffoz is primarily designed for in-line measurement as shown in Figure 3, it can also be installed in a side-stream configurations, as shown in Figure 4 (by-pass mode and return mode). When used in a by-pass mode, the sensor's outlet should be vented to a catalytic module to destroy all traces of ozone. Contact IN USA, INC. for the appropriate catalytic module. NOTE: The exhaust from the catalyst in by-pass mode can be vented to ambient. However, it should not be vented into a clean-room environment. A particulate filter is recommended on the sensor inlet in order to protect the sensor's optical components and prolong the life of the sensor and of the UV lamp.
Figure 3: In-Line, Full-Flow Configuration PARTICULATE FILTER (TYP. 0.003 µm) gffoz gffoz SENSOR FULL FLOW OZONE SENSOR PATENT PENDING FLOW OZONE LINE CAUTION!!: When installed in-line, the sensor operates at the pressure of the ozone supply line. Do not exceed the maximum operating pressure of the sensor.
PATENT PENDING PATENT PENDING Figure 4: Side Stream Configurations ZERO REFERENCE GAS gffoz BY-PASS MODE FULL FLOW OZONE SENSOR FLOW EXHAUST SIDE-STREAM SAMPLE GAS (0.2-15 L/MIN) FILTER (TYP. 0.003 µm) IN USA OZONE CATALYST FLOW RESTRICTOR OR FIXED ORIFICE ISOLATION VALVE MAIN OZONE GAS STREAM (AT LINE PRESSURE) SIDE-STREAM SAMPLE GAS (0.2-15 L/MIN) gffoz FULL FLOW OZONE SENSOR FLOW RETURN MODE FILTER (TYP. 0.003 µm) FILTER (TYP. 0.003 µm) FLOW RESTRICTOR OR FIXED ORIFICE ISOLATION VALVE MAIN OZONE GAS STREAM (AT LINE PRESSURE)
In side-stream configurations, the use of a fixed orifice flow restrictor (as shown in Figure 4) is recommended in order to achieve the desired side-stream flow rates. Side-stream flow rates are usually set as low as possible, and flow restrictors can be selected such that they produce the desired flow at the process gas pressure. Metering or needle valves are also acceptable. CAUTION!!: When installed in the "return" mode, the sensor operates at the pressure of the ozone supply line. Do not exceed the maximum operating pressure of the sensor. As shown in Figure 4, the by-pass mode can easily incorporate an external zero reference gas line to allow for convenient "on-demand" zeroing of the sensor. Electrical Connections to the IN USA, INC. Controller As mentioned earlier, the gffoz sensor must be connected to an IN USA, INC. "SCI" series controller using the cable supplied by IN USA, INC. The connection on the gffoz is through a 15 pin male "D" connector located on top of the unit (see Figure 1, page 6).
Operation Initial Power-on and Warm-up In order to achieve maximum performance and stability, it is strongly recommended to allow an overnight warm up period on initial startup or on a "cold" start. This warm up period should preferably be done while the unit is purging with ozone-free gas (typically oxygen). After this warm up period, the unit can be zeroed as explained below. NOTE: It is recommended that the sensor be powered on at all times (24 hours/day, 7 days/week). This will insure peak performance, minimal zero drift, and maximum system life. Zeroing the Sensor Because of its advanced, patent-pending design, the gffoz is a highly zero-stable instrument. However, as with any similar device, the sensor must be zeroed periodically with an ozone-free reference gas. The interval between zeros depends upon operating conditions, but it is recommended that the zero point be verified at least once every 4 weeks.
Zeroing always involves the following steps: Table 1: Zeroing Step Purging with an ozone-free reference gas (typically oxygen) Zeroing Purpose To get rid of ozone gas inside the optical chamber prior to zeroing To make internal parameter adjustments to reflect the true zero of the sensor The zeroing phase is initiated through the sensor controller (SCI), either remotely or via its keypad. Please refer to the operating manual for the controller. The recommended ozone-free reference (purge) gas is oxygen. Oxygen is readily accessible given that it is used as feed-gas for ozone generators. Nitrogen and clean dry air may also be used. On start-up, the unit should be warmed up and purged with a reference gas overnight prior to zeroing. Thereafter, if the unit is operating continuously, a reference for about 15 minutes is adequate.
Maintenance The gffoz sensor is designed to operate continuously with minimal maintenance requirements. Only the UV lamp will need to be replaced on a periodic basis (every 24-36 months). Lamp replacement does not change calibration and can be done while the sensor is on line and while gas is flowing through it. After lamp replacement, re-zero unit following the after start-up zeroing procedure. The use of particulate filters on the gas inlet of the monitor is recommended in order to minimize the risk of optical component soiling. Removing the Sensor Cover The UV lamp can be replaced without disconnecting pneumatic lines and without interrupting the flow of gas through the sensor. The lamp is accessed by removing the cover with the two thumb screws as shown in Figure 1 on page 6 REMINDER: SAFETY FIRST!! Disconnect power to the sensor (power off) before removing the cover. Accessing the UV Lamp Once the cover is removed as described above, unplug the lamp and slide it up and out of its housing by loosening the lamp set-screw (see Figure 5 below ). To reinstall the lamp, follow the aforementioned steps in reverse order. NOTE: Some lamps may have marks indicating preferred rotational position. If so, install the lamp accordingly.
Figure 5: UV Lamp Access UV LAMP PLUG UV LAMP UV LAMP SET-SCREW
Contacting IN USA, INC. IN USA, INC. technical and service personnel are ready to help and can be reached by mail, e-mail, telephone, or fax. Address: IN USA, INC. 87 Crescent Road Needham, MA 02194-1496 U.S.A. Telephone: (USA) 781-444-2929 Fax: (USA) 781-444-9229 e-mail: AFXOZONE@aol.com (attn:customer service) About the Company IN USA, INC. manufactures instrumentation and control systems. The company is the world's leading manufacturer of ozone monitoring equipment. IN USA, INC. provides customized, optical-based monitoring systems which include sophisticated process control hardware and software.