Document No. 1800-60 Acrylic Vacuum Chambers Copyright 2010 Terra Universal Inc. All rights reserved. Revised October 2010 Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020
Proprietary Notice This manual pertains to proprietary devices manufactured by Terra Universal, Inc. Neither this document nor any portion of it may be reproduced in any way without prior written permission from Terra Universal. Safety Notice A thorough familiarity with all operating guidelines is essential to safe operation of the product. Failure to observe safety precautions could result in poor performance, damage to the system or other property, or serious bodily injury or death. The following symbols are intended to call your attention to two levels of hazard involved in operation. Terra Universal makes no warranties applying to information contained in this manual or its suitability for any implied or inferred purpose. Terra Universal shall not be held liable for any errors this manual contains or for any damages that result from its use. CAUTION Cautions are used when failure to observe instructions could result in significant damage to equipment. Warnings are used when failure to observe instructions or precautions could result in injury or death. WARNING The information presented here is subject to change without notice. 1.0 Introduction This manual provides information on installing and operating your Terra Universal Acrylic Vacuum Chambers. By studying this document carefully, you can be assured of a long, efficient service life from the unit. 2.0 Description Seven different sizes are available in cubic and cylindrical designs. All models are fabricated of transparent 1" thick acrylic (.52" acrylic on Cat. #5235-08). They feature chrome-plated latches and 304 stainless steel hinges to ensure a non-contaminating environment. These vacuum chambers require dual metering valves and a vacuum gauge. Metering Valve (two per chamber, Cat. # 5235-09) let you apply vacuum to the chamber and allow backfill (purging) of the chamber with nitrogen or air to bleed the vacuum. Vacuum Gauge (one per chamber, Cat. # 5235-10) senses and indicates vacuum on a 0-30" Hg scale. For automated vacuum operation, Terra recommends selection of the Vacuum Control Module (Cat. # 1681-75) for operation to 29.8" Hg. Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020 2
3.0 Installation Uncrate your Acrylic Vacuum Chamber, checking to make sure that it has no visible damage incurred during shipment. If damage is found, contact the freight company to file a damage claim immediately. Connecting Vacuum Pump to Vacuum Chamber 1. Connect 1/4" vacuum line from the user-selected vacuum pump to one of the metering valves on the vacuum chamber. 2. Make sure that the second metering valve is fully closed. 3. Turn on the vacuum pump. The vacuum gauge should indicate falling pressure inside the vacuum chamber. All chambers listed in Section 4.0 support vacuum to 29.9 Hg. 4. Maintaining the desired vacuum level: Once the desired level is attained, you should close the valve connected to the incoming vacuum line. CAUTION: Never turn off the pump while the chamber is under vacuum and the vacuum valve is open! Otherwise contaminants including oil, if the pump is oil lubricated will be drawn into the chamber. Always close the vacuum valve before turning off the pump. 0-30" Hg Vacuum Gauge Metering Valves Releasing (bleeding) vacuum: With the vacuum valve closed, open the second metering valve to allow air into the chamber. If backfill with a process gas (such as nitrogen) is required, you may connect this line to a process gas source. If you require sustained vacuum, you may wish to leave the pump running with the vacuum valve open. Otherwise, acrylic chamber walls will "bleed" the vacuum over time. Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020 3
Set up of Vacuum Control Module 1. Plug Vacuum Pump power cord into Vacuum Control Module (VCM) 2. Plug solenoid power cord into VCM 3. Plug Sensor Tube Connector Cord into sensor 4. Plug ¼ tubing into Vacuum Chamber 5. Insert Inlet Filter to Vacuum Pump and secure with clamp 6. Attach VCM to power source Refer to separate operating instructions of the Vacuum Control Module (Doc. # 1800-58) to program a vacuum set point. Rear view of Vacuum Control Module Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020 4
4.0 Specifications Leak Rate Cat # Acrylic Construction Outside Dimensions (W x D x H ) Inside Dimensions (W x D x H ) Max Vacuum In. of HG 5235-00A 1 Thick 16 x 10 x 11.5 14 x 8 x 9.5 29.9 5235-01A 1 Thick 13 x 13 x 7.5 11 x 11x 5.5 29.9 5235-02A 1 Thick 9 x 9 x 9.5 7 x 7 x 7.68 29.9 5235-03A 1 Thick 12 x 12 x 10.5 10 x 10 x 8.5 29.9 5235-04A 1 Thick 17 x 17 x 13.5 15 x 15 x 11.5 29.9 5235-06A 1 Thick 26.5 x 11 x 12.5 11 x 8 x 9.5 29.9 5235-08A 1/2 Thick 12 D x 14.5H 11D x 13.5H 29.8 Figure 4.1 indicates the typical vacuum leak rate after a vacuum of 29.9 Hg is achieved and the vacuum line is closed. (Data are for Cat # 5235-04A, monitored at one-hour intervals) Figure 4.1: Leak Rate 5.0 Maintenance CAUTION: Do not clean acrylic with alcohol or other abrasive cleaning agents. Terra s Acrylic Vacuum Chambers require minimal maintenance. All materials are easy to clean with water or mild detergent and a dry, clean wipe. All materials may be cleaned with clean, lukewarm water with or without a mild, non-abrasive detergent and a dry, clean non-abrasive wipe. Use only light pressure when cleaning. If the outside surface is exceptionally dirty or gritty, lightly swab the surface with a saturated cloth and allow the surfactants to drain away. Avoid rubbing dirt or grit into the surface. Turn the cloth often and replace with a clean cloth frequently. Dry the surface by blotting gently with a clean, dry cloth. Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020 5
6.0 Warranty Products Manufactured by Terra: Terra Universal, Inc., warrants products that it manufactures to be free from defects for a period of 12 months for parts and 90 days for labor, commencing from the date of shipment. Terra s sole responsibility is to repair or replace, at its option, any part of the product that proves defective or malfunctioning during this time limit. In some cases, components incorporated in Terra Universal products are covered by additional warranties from component manufacturers; obtain specific information from Terra sales representatives. This warranty is void if the equipment is abused or modified by the customer, is operated outside Terra s operating instructions or specifications, or is used in any application other than that for which it is specified. This warranty does not include routine maintenance or service procedures, breakage of quartz baths after 60 days, shipping damage, nor damage from misuse, intentional or unintentional abuse, neglect, natural disasters, or acts of God. Products Manufactured by Others: Terra Universal, Inc., warrants that, to the best of its ability, Terra s representations of products that are manufactured by others reflect the manufacturer s representations, subject to change without notice. Sole warranty for these products is the original manufacturer s warranty that is passed forward to the purchaser and constitutes the customer s sole remedy for these products. Detailed warranties for distributed products are available through Terra sales representatives. Freight Shortage or Damage: Upon receipt of any equipment from Terra Universal, Inc., customer shall immediately unpack and inspect for damage or shortage. The customer shall not accept a damaged package or a short shipment until the carrier makes a "damage or shortage" notation on both the carrier's and customer's copy of the freight bill or delivery receipt. Service title passes when the shipment is loaded, so customer is responsible for filing and collecting a freight claim. Any replacement products must be ordered and paid for separately. For Terra's "Policy and Procedures for Returning Goods," see Terra's Internet site:. Generally, customers can improve the chance of collecting on a freight claim by following these procedures: 1) formally requesting that the carrier inspect the shipment immediately upon suspecting damage or shortage to verify condition; 2) notifying the carrier upon discovery of concealed damage and requesting an inspection within 15 days of receipt, both in person or phone and following up via mail; 3) keeping the shipment as intact as possible, including retaining original packaging materials and keeping the product as close to the original receiving location as possible; 4) holding salvage for disposition by the carrier. All Claims: Terra Universal expressly disclaims all other warranties, expressed or implied or implied by statute, including the warranties of merchantability or fitness for intended use. Terra Universal is not responsible for consequential or incidental damages arising out of the purchase or use of the products supplied by Terra Universal. Terra Universal is not liable for damage to facilities, other equipment, products, property or personnel of others, or of their agents, suppliers, or affiliated parties, which is caused or alleged to have been caused by products supplied by Terra Universal. In any event or series of events, Terra Universal s total liability for any and all damages whatsoever is limited to the lesser of the actual damages or the original invoice cost of the items alleged to have caused the damage. The customer s sole and exclusive remedy for any cause of action whatsoever is repair or replacement of the non-conforming products or refund of the actual purchase price, at the sole option of Terra Universal. All claims must be made in writing within 90 days of the date the product was shipped. Any claims not made within this time limit shall be deemed waived by the customer. Terra Universal is not responsible for any additional costs of repair caused by poor packaging or in-shipment damage during return. Warranty Returns: All warranty returns must be authorized in advance by Terra Universal and approved under an RMA. Unless approved in advance for good reason, all returns must be in original condition, including all manuals, and must be packaged in original packaging materials. All returned goods are to be shipped to Terra Universal, freight prepaid at customer s expense. See Terra s Policy and Procedure for Returned Goods. Thank you for ordering from Terra Universal! Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020 6
7.0 Related Products Users of Terra Universal s Acrylic Vacuum Chambers may also be interested in: Metering Valve 5235-09 Dual valves allow purging of the chamber with nitrogen or other process gas before vacuum is applied. Permits safe, convenient application of vacuum to the chamber. Vacuum Gauge 5235-10 Senses and indicates vacuums on 0-30 Hg scale Monitors vacuum pressure. Vacuum Control Module 1681-75 Applications : This automatic Vacuum Control Module controls pump operation to maintain a preset vacuum level (to 800 torr) in a remote vacuum chamber or vacuum furnace. Automatically controls pump operation to maintain stable vacuum levels inside a vacuum chamber Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020 7
See: TerraUniversal.com Includes necessary fittings and seals to attach Vacuum Control Module to Vacuum Chamber and Vacuum Pump Full-Vacuum Turnkey Connection Kits (Due to the variety of connection kits and their applications, the product shown at left is for display purposes only. Your product may differ.) See: TerraUniversal.com Universal single-phase motor allows pump configuration for low or high voltage, without the need for hard wiring Natural lubrication design offers the lowest oil mist level, even with high throughputs Compact design makes these pumps ideal for use in cramped locations Integrated anti-suckback valve prevents pump damage or enclosure contamination when pump is turned off Choose among three pumping capacities, up to 120 m3/h (85 CFM) Rotary Vane Vacuum Pumps These Rotary Vane Pumps combine ruggedness and versatility to meet a wide range of applications in and out of the cleanroom. (Due to the variety of vacuum pumps and their applications, the product shown at left is for display purposes only. Your product may differ.) Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020 8
Disposal Inlet Filter for Vacuum Pump 9401-00 This filter provides high-efficiency removal of relatively large quantities of solids and liquids to prevent damage to vacuum pumps and the loss of valuable or hazardous materials. It also maintains a contamination-free environment by trapping particles fed into the pump. Protects vacuum pumps from damage by solid contaminants Oil Mist Eliminator for Vacuum Pump 7901-01 - No Picture Available For use with air-cooled vacuum pump Terra Universal, Inc. TerraUniversal.com 800 S. Raymond Ave. Fullerton, CA 92831 TEL: (714) 578-6000 FAX: (714) 578-6020 9