Air Shower TECHNICAL DATA

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TECHNICAL DATA

Table of Contents Introduction... 3 Unit setup and components... 3 Cleaning cycle... 4 Control system... 5 Size and dimensions... 6 Configuration of doors... 6 Technical data...8 Testing, delivery and commissioning... 8 Warranty, maintenance and servicing... 8 Unit type code... 9 PROTECTION NOTICE The reproduction, distribution and utilization of this document as well as the communication of its contents to others without express authorization is prohibited. Offenders will be held liable for the payment of damages. All rights reserved in the event of the grant of a patent, utility model or design. 2 FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications

Introduction Introduction Purpose and function Areas of application Air showers offer an efficient method of removing contamination from clothes of personnel or surfaces of materials entering or leaving a cleanroom. Decontamination is performed by clearing off dust and dirt particles from bodies of cleanroom personnel using a high-velocity turbulent jet of clean air. Air showers are an integral part of cleanroom access control systems and ensure critical manufacturing conditions in such industries as microelectronics, life science, biomedical, aerospace and others. Air showers guarantee that factory equipment is protected from pollutants and contaminating agents. Unit setup and components Fig. 1: Air shower side and top views 1 2 9 6 7 3 4 5 8 1: Motor fan is a radial fan with backward-curved blades, powered by an EC motor and equipped with constant-flow control; motor fans are installed and replaced from below after opening of the ceiling door and removing the HEPA filter. Parameters: U=3~VAC 380-480V, 50/60 Hz Pmax =3 kw, Imax = 4.8 A, tmax 50 C Operating P=1.5 kw, I=1.0 A 2: HEPA filter class H13 (optionally higher) with a flat seal (optionally a fluid seal), clamped to a welded painted frame. The filter is replaced from below (from the shower cabinet) after opening of the ceiling door. 3: Pre-filter class G4 is protected by a magnetically secured grille made of perforated painted steel sheet. 4: Cabinet is assembled from R panels filled with mineral wool. The panels are performed in steel in the RAL9002 semi-matt shade (optionally in a different shade). 5: Corner ducts with nozzles are located in the corners of the cabinet; each duct contains eleven nozzles with a minimum internal diameter of 25 mm, through which air is blown at a mean axial velocity of 25 m/s towards a person standing in the centre of the cabinet. 6: Ceiling door opens with a special key. It has one nozzle and three LED lights. A PIR-motion sensor is located in the ceiling panel next to the door. 7: Doors are performed as a pair of single-leaf doors that cannot be opened at the same time, so that the air shower simultaneously acts as an air lock. The door has an aluminium frame with a polyester finish in the RAL9002 semi-matt shade (optionally a different RAL shade). The frame contains a reversible electronic contact lock to open the door and LUDS signal panels on each side. The all-glass door is made of 8 mm-thick tempered safety glass, secured on three hinges and is fitted with an automatic door seal and a self-closing mechanism. The door is equipped with a double-knob handle (all components are made by Dorma). Clear width is 700 mm, clear height 2100 mm. 8: Floor is performed as a stainless steel floor (can be used as an assembly template). We recommend using special (selfadhesive) cleaning mats. 9: Switch box FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications 3

Clean Rooms Air Shower Operating principle 1 2 3 4 5 The basic air shower version is designed for one person. Air shower is equipped with an insulated chamber (6) with its own motor fan (2) in which air circulates through a HEPA (ULPA) filter (1) and is directed at high velocity via two rows of nozzles (11) and one nozzle on top (12) at a person in the chamber (6). 12 6 7 Air with particles freed from personnel body is drawn in through a pre-filter (8), protected by a suction grille (9), and guided through a duct (10) to the suction opening of the motor fan. Personnel can enter and leave air shower through a pair of doors that block each other. 11 8 9 10 The operation of air showers is controlled by software running on a PLC Siemens Logo! with display. The control panel (7) is located inside the air shower above the suction grille (9). The switch box (3) is located in the ceiling interspace (4) and is accessible after opening of ceiling panel (5). Fig. 2: Air shower operation Cleaning cycle Cleaning sequence Air flow The cleaning cycle is activated automatically when the door from a grey area opens and closes and a person is detected inside the chamber. The door to the cleanroom is blocked automatically when the grey area door opens. Both doors are blocked during the cleaning cycle. In case of an emergency the cycle can be interrupted and the unit completely switched off using one of the emergency stop switches. The switch is located inside the chamber and in the cleanroom or is available as the main switch in the grey area. There is a delay of 5 seconds between the end of the cleaning cycle and the door opening. The grey area door can be opened only when the cleanroom door closes and preset delay times elapses. After the person has left the air shower, the door closes and the shower is shortly purged at high speed. Alternatively, continuous purging at low airflow rates can be selected. During the cleaning cycle nozzles discharge air at a velocity of min. 25 m/s to create a sufficiently turbulent airflow. The air velocity and distribution are indicated in Fig. 3 with the highest air velocity marked white and lower from red to blue color. The airflow rate is fixed and cannot be changed to avoid the reduction in the efficiency of the air shower. Fig. 3: Air shower flow simulation, top view 4 FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications

Clean Rooms Efficiency The efficiency of air showers depends on their correct use. As demonstrated in Fig. 4, staff must consider and observe the following instructions: Stand in the centre of the chamber marked for this purpose by a point. Turn around by 360 during complete cleaning cycle. Keep the hands on the head during the cleaning cycle. Fig. 4: Using air shower, side view Timing The length of the cleaning cycle is considered the most important aspect of an air shower s efficiency. The recommended time period is at least 20 seconds. The pre-set interval is 30 seconds. This parameter can be changed on the control display between 10 and 60 seconds with a 5-second interval. Control system Siemens Logo! controller with display uses original software to control and monitor unit functions. Flow and pressure control Control modes CL GR The motor fan s PID controller with a pressure converter provides constant-flow control based on measuring pressure parameters at the fan s suction nozzle. The control unit monitors pressure drop at the HEPA filter and pre-filter. When the pressure drop limit is exceeded, the controller sends a message requesting filter replacement on the display of the control panel. Depending on the requirements, the PLC controller can be programmed for three different modes presented below: Standard Cleaning cycle runs when passing from grey to clean room. Moving from a clean room to a grey area does not start the cleaning cycle, only purging (regenerating) cycle. GR GR CL CL Two-way Cleaning cycle runs when passing from grey to clean room and also when leaving clean room. One-way Exit from clean room is not allowed through the Air Shower. Fig. 5: Air shower control modes GR - grey area CR - clean room FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications 5

Clean Rooms Air Shower Sizes and dimensions Showers are offered in two size versions. Low or standard version: 1300 x 1900 mm, height 2820 mm High version: 1300 x 1500 mm, height 3020 mm Low/standard version High version Fig. 6: Low/Standard model High model cross sections with air-flow direction and footprints 6 FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications

Clean Rooms Configuration of doors Door variants Air showers can be supplied in four configurations with different door positions: L left S straight R right T- with 3 doors Fig. 7: Door configurations Designation of doors The order / type code must identify the door from a grey area (G) and the door into a clean room (C), and the door alignment according to DIN L = left, R = right. Doors always open outwards. Doors are identified according to the enclosed schema (aligned so the suction channel is always at the top) in order 1-2-3. If there is a panel on the position, it is marked as P0. It is also necessary to indicate the requested colour shade of panels and door frames in the 18th position of code. Standard is polyester coating shade RAL9002 semi-gloss. Examples Clean room DIN Left Grey area DIN Right Clean room DIN Left Grey area DIN Right Grey area DIN Left Clean room DIN Right AS1300x1900x2820S1CL-P0-GRDIN Left AS1300x1900x2820R1P0-GL-CL AS1300x1900x2820L1CR-GR-P0 In case of atypical configuration request, e.g. air tunnel for applications where there are requirements for a higher pass-through rate of people: please contact FläktGroup for this special solution. FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications 7

Clean Rooms Air Shower Technical data Dimensions Unit High Low Spare parts Order Code / Specification (Standard) Internal length mm 1176 1176 H13 HEPA filter M13FS-2390/AU1BR3S 1010x610x78 Total length mm 1500 1900 H14 HEPA filter A14FS-2390/AU1BR3S 1010x610x78 Internal width mm 1176 1176 Pre-filter KS-W/48 G4 1180x285x48 Total width mm 1300 1300 Internal clear height mm 2100 2100 Fan Radial, backward curved blades Total height mm 3020 2820 Number of nozzles 23 Electrical data 3 phases VAC, 50/60Hz Air flow and weight Voltage V 380-480 Mean discharge speed m/s 25 Max input W 3000 Air volume flow m³/h 1220 Max current A 4.6 Number of air exchanges 1/h 440 Weight kg 580 Testing, delivery and commissioning Air showers are completely assembled and tested at FläktGroup which is documented by a test report. Air showers are supplied dismantled and installed and put into operation at the customer s site by installation firms trained by FläktGroup. A Factory Acceptance Test can be provided. Warranty, maintenance and servicing Except for the replacement of pre-filters and HEPA filters, air showers do not require any maintenance besides surface cleaning as specified by the user s internal regulations. In case of defects FläktGroup provides servicing support for a warranty period of 2 years. 8 FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications

Ordering code Order code AS 1300 x 1900 x 2820 S 1 C L - P 0 - G L Product Dimensions Configuration Face material Left side Middle Right side AS Air shower B [mm] L [mm] H [mm] Dimensions: width length height Low (standard) 1300 x 1900 x 2820 High 1300 x 1500 x 3020 S Straight configuration 180 L Left configuration 90 _ R Right configuration 90 _ T with three doors _ Front material 1 RAL9002 semi-gloss 2 RAL9010 semi-gloss Left side P Panel C Door to the clean room G Door to the grey room 0 (for panel) L DIN left R DIN right Middle P Panel C Door to the clean room G Door to the grey room 0 (for panel) L DIN left R DIN right Right side P Panel C Door to the clean room G Door to the grey room 0 (for panel) L DIN left R DIN right Fig. 8: Layout template FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications 9

a 10 FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications

FläktGroup DC-2014-0107-GB 2018-05/R2 Subject to modifications 11

FG_DC-2014-0107-GB_AIR SHOWER_DF_R2-2018-05_150dpi Copyright 2018 FläktGroup WWW.FLAKTGROUP.COM AIR SHOWER FläktGroup is the European market leader for smart and energy efficient Indoor Air and Critical Air solutions to support every application area. We offer our customers innovative technologies, high quality and outstanding performance supported by more than a century of accumulated industry experience. The widest product range in the market, and strong market presence in 65 countries worldwide, guarantee that we are always by your side, ready to deliver Excellence in Solutions. PRODUCT FUNCTIONS BY FLÄKTGROUP Air Treatment Air Movement Air Diffusion Air Distribution Air Filtration Air Management Air Conditioning & Heating Controls Service» Learn more on www.flaktgroup.com or contact one of our office