POLOS Options

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Drain and Exhaust options 29243 Drainhose 1,5m NPP Corrugated drainhose and connector, material NPP, length 5 m, connects to drainport 26835 Drainhose 5m NPP Corrugated drainhose and connector, material NPP, length 1,5 m, connects to drainport 32226 PFA draintube Corrugated hose fluoroplastic (PFA), l=1,5 m, d = 22mm, does not include P-FC-W8-N8A 27271 T-Adapter for drain and exhaust connection T-Adapter for drain and exhaust connection, material NPP, FNPT 1"-G1,5"-MNPT1", connects drain and exhaust to drainport 27570 Exhaust port kit Complete kit, incl. 5 m NPP Tube and P/N's 27271 and 26835 Dispense options 27021 PTFE/PFA injector line Complete injector line, material Teflon / PFA, incl. nozzle 215-16, 32084, P-MC-W2-N1B, SBV, tubing and mounting on lid 28527 Back Side Spray Nozzle Backside spray nozzle with adjustable position for rinsing of chuck side of substrate, including standard 215-16 nozzle 31420 Edge Bead Removal Nozzle 31311 Pneumatic syringe arm + Polos200 Autolid Edge bead removal spray nozzle (topside substrate) with adjustable position, including standard 215-16 nozzle Pneumatic syringe arm + Polos200 Autolid for automatic closing of lid after dispensing of chemicals with syringedispense when static barrier plate is used Polos POLOS 200-300 Options.doc 1

31312 Pneumatic syringe arm + Polos300 Autolid Pneumatic syringe arm + Polos300 Autolid for automatic closing of lid after dispensing of chemicals with syringe dispense when static barrier plate is used Dispense vessel Full PTFE dispense vessel. All PTFE/PFA wetted surfaces. All connections on top of lid: easily reachable. Can be used with and without chemical bottle. Suitable for most commercially available chemical bottles, maximum outer dimensions bottle Ø 185mm x 375 mm height, please contact us for other sizes. SPS1400 Dispense system for all Fluids Dispense system for all fluids, including 2x30cc barrels, 2 boxes of 50 pcs. Needles, 1 box of 50 pcs. endcap barrels, 1 1000Y5152 Syringe adapter. SPS1415 Dispense system for watery fluids Dispense system for watery fluids, including 2x30cc barrels, 2 boxes of 50 pcs. Needles, 1 box of 50 pcs. endcap barrels, 1 1000Y5152 Syringe adapter. Polos POLOS 200-300 Options.doc 2

SHSK Syringe Holder Includes starting Dispense Holder Kit : Starter Kit 5 30cc Volume Dispense Barrel 2 White clear Polypro Plungers 5 18 gauge St. St. Needles 5 25 gauge St. St. Needles. 5 18 gauge Polypro Flexible Needles 5 25 gauge Polypro Flexible Needles 5 Needle End Caps Note: Consumable Kits with different Needle diameters for accurate choice depending on Liquid Viscosity etc. are available at request, starter Kit is a set of the most commonly used parts 31363 Dispense system start/stop adapter Lid options 32225 Pneumatic Door Lock Polos200 new rev. 32077 Pneumatic Door Lock Polos300 new rev. Dispense system start/stop adapter, Dsub9 Polos- EFD (Pin 1-5; 2-7) Programmable pneumatic safety doorlock, increases safety during processes with dangerous chemicals Programmable pneumatic safety doorlock, increases safety during processes with dangerous chemicals 29644 Polos300 Autolid Automatic Vertical Lid Opener for Polos200, prevents dripping of fluids from Lid onto substrates 29801 Polos200 Autolid Automatic Vertical Lid Opener for Polos300, prevents dripping of fluids from Lid onto substrates Polos POLOS 200-300 Options.doc 3

30025 Static Barrier Plate Barrier plate for improvement of coating uniformity, mounted on the inside of the lid. Not incombination with ACD or syringeholder Centring Aids 29756 Polos200 F- S3"/75mm 26842 Polos200 F- S4"/100mm 26843 Polos200 F- S5"/125mm 26844 Polos200 F- S6"/150mm 26460 Polos200 F- S8"/200mm 27436 Polos300 F- 4"/100mm 27437 Polos300 F- 5"/125mm 27438 Polos300 F- 6"/150mm 26926 Polos300 F- 8"/200mm Centering aid for Polos200, for 3" / 75 mm Centering aid for Polos200, for 4" / 100 mm Centering aid for Polos200, for 5" / 125 mm Centering aid for Polos200, for 6" / 150 mm Centering aid for Polos200, for 8" / 200 mm Centering aid for Polos200, for 4" / 100 mm Centering aid for Polos200, for 5" / 125 mm Centering aid for Polos200, for 6" / 150 mm Centering aid for Polos200, for 8" / 200 mm 26925 Polos300 F-12 /300 Centering aid for Polos300, for 12" / 300 mm Polos POLOS 200-300 Options.doc 4

General options Option Windows Avialable starting spring 2008 SW / Schnittstelle VP80 Vacuum Pump Vacuum Pump, Oil free, Rotary Vane type, 230 VAC 50Hz, 100 L/min. 84kPa - 90kPa Polos POLOS 200-300 Options.doc 5