Integrated Process Solutions. Series 46 Heaters HEATER JACKETS FOR STAINLESS STEEL PIPING SIZES 1 1/2 TO 4 (NW 40 TO NW 100)

Transcription

1 Integrated Process Solutions W W W. M K S I N S T. C O M Series 46 Heaters HEATER JACKETS FOR STAINLESS STEEL PIPING SIZES 1 1/2 TO 4 (NW 40 TO NW 100)

2 Series 46 Heaters - 11/2015 MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Due to continuous development, specifications and prices are subject to change without notice. Copyright 2008 by MKS Instruments, Inc. All rights reserved. mksinst is a trademark of MKS Instruments, Inc. US patent number is 5,714,738. Foreign patents pending.

3 Table of Contents Features and Benefits Applications Description Specifications Ordering Information Straight Sections Elbows Elbows Tees Bellows Reducers Hoses Flange Insulators Insulators Spare Parts, Power Cords and Accessories MKS Series 46 Heaters 1

4 Series 46 Heaters Heater Jackets for Stainless Steel Tubing MKS Series 46 Heaters are our newest heater design that provides improved temperature control and uniformity. The heaters are UL listed and CE marked for thermal and electrical safety. The preset temperature setpoint is microprocessor controlled through an integral electronic controller within the power cord. The addition of a no-arc relay technique significantly extends the relay life in high current heaters. This new control method allows you to heat longer sections of tubing with fewer heaters. Completely compatible with Series 45 heaters, the Series 46 heaters are the same dimensional size, have a lower current draw, and are the same price. The heaters molded shape conforms to the tubing, minimizing gaps and subsequent heat loss. Taking advantage of a patented process, silicone foam insulation is bonded to the outside of the reinforced silicone heater mat, resulting in external temperatures that are safe for human contact, and meets many OSHA safety requirements. Features and Benefits New Improved Heater Design Tighter temperature control enabled by microprocessor controlled thermocouple Improved reliability of heater control system due to no-arc relay circuit Improved design of thermal fuse, eliminating failures caused by transient thermal spikes Completely compatible with Series 45 heaters in size and connectivity Special temperature settings available on request Enhanced Heater Safety Outside temperature of heater C, safe to touch UL listed and CE tested and marked for both electrical and thermal safety Passes SEMI S9-95 strain relief test of 35 pounds Integral thermal fuse Ground Fault Equipment Leakage Circuit Interrupter power cord option eliminates shock hazard Greater Thermal Performance Reduced power consumption Improved temperature uniformity, prevents cold zones Patented design retains heat and improves thermal safety Other Important Features May be used in forelines or exhaust lines Fast delivery of standard heaters Light emitting diodes (LEDs) on local controller confirms that heater is operating properly Low Temperature Alert (LTA) option provides remote warning when heater is cold Specially designed heaters available 2 MKS Series 46 Heaters

5 Applications Current trends in semiconductor processing are towards less maintenance, more uptime, and increased product yield. Reduction of the solid buildup resulting from the cooling of effluent gasses can be a factor in achieving those goals. Heating the system is part of a method to manage these by-products, increasing uptime, and improving wafer yields, with a quick payback. In the LPCVD silicon nitride process it is not uncommon to see a six-fold improvement in uptime. Maintenance cycles have increased from two-week intervals to twelve weeks, or expressed in runs, from 20 to 145 runs. In other applications, such as tungsten CVD or aluminum etch, heaters are used on the exhaust line to prevent clogging downstream of the pump or at the scrubber inlet. Save $15,000 Per Day For example, in a fab running 24 hours a day, 7 days a week, if a batch of wafers is processed every 4 hours and is worth $250,000, a yield improvement of only 1% will result in savings of $15,000 per day. Processes at several semiconductor fabs have yielded even better results. Figures 1 and 2 compare the particulate contamination on a wafer before and after MKS heated lines were installed. Such buildup can also reduce the effective pumping speed of a system by decreasing the conductance of the vacuum lines. Description MKS Series 46 Heaters are designed to improve heat distribution on downstream lines while complying with strict agency and corporate personnel safety standards. The heating elements are microprocessor controlled with the use of a thermocouple. Their molded shape conforms to the piping, eliminating gaps and subsequent heat loss. Taking advantage of a patented process, silicone foam insulation is bonded to the outside of the reinforced silicone heater mat, resulting in external temperatures that are safe for human contact. A line of heaters is connected together (daisy-chained) using interlocking power connectors. The loss of any single heater has no effect on the operation of the other heaters in that chain. A power cord is required for every 12 amps drawn by a chain of heaters. Flange insulators, made of the same silicone foam material, help keep heat losses at flange connections to a minimum while providing user safety by covering the exposed connection. MKS Series 46 Heaters and insulators are fabricated entirely from cleanroom compatible materials. Low Temperature Alerts Figure 1 - Particles on wafer before MKS heaters This improvement is achieved by keeping process effluents in their vapor phase so that they may be carried away from the process chamber. Solid buildup in vacuum lines between the process chamber and the pump is a major source for particulate contamination. An optional Low Temperature Alert (LTA) Monitor indicates if the temperature of one or more heaters in a line has fallen below the set operating temperature, through an LED and a relay output. The alarm signal can be connected to a usersupplied computer or other instrumentation to provide remote verification that the heater chain is at operating temperature. Heaters equipped with the LTA option contain a normally open thermal switch that closes as the heater approaches normal operating temperature. The thermal switches are designed to be connected in series to permit monitoring a line of heaters with a single LTA monitor. If any of the thermal switches fails to close, then one of the heaters in the line has gone cold and the LTA monitor will signal a fault via a flashing red LED. When all heaters are within their normal operating temperature range, the monitor s green LED will be on. Enhanced Safety Figure 2 - Particles on wafer after installing MKS heaters MKS Series 46 Heaters are the result of many years of continuous improvement dedicated to satisfy the demands of modern semiconductor facilities and represent the highest standard of thermal and electrical safety on the market. MKS Series 46 Heaters 3

6 Low outside temperature safe to touch One of the primary concerns of safety engineers is exposure to hot surfaces. Pipeline heaters in particular present opportunity for incidental contact because of the vast amount of vacuum piping typically found in a fab. Superior thermal insulation is key to holding the heat near the pipe where it is needed, and away from the outside surface. A heater operating at 150 C requires a 0.5-inch thick layer of silicone foam in order to meet safety standard limits (see Figure 3). UL listed The basic heater mat, power leads, critical temperature devices such as the controller and thermal fuse, and other construction materials have all been reviewed and certified by UL and given the UL listing designation. UL safety standards cover both thermal and electrical issues. CE marked for both electrical and thermal safety An independent test lab has tested and certified the entire heater for compliance with the relevant European Electromagnetic Compatibility and Low Voltage directives. Passes SEMI S9-95 strain relief test of 35 pounds Each power lead is capable of sustaining a load in excess of 35 pounds without damage. The heaters are durable and designed to withstand the rigors of repeated installation and removal without damage. Integral thermal fuse Figure 3 - Outside and inside temperatures of the Series 46 heater jackets When an object touches the outer diameter of the Series 46 heater jacket, it acts as a heat sink and the outside temperature of the heater drops. When the object is removed, the silicone temperature returns to 65 C (see Figure 4). A secondary temperature-limiting device is required by several safety standards organizations. Our thermal fuse is considered a critical safety component and has been certified by UL, CSA, and VDE testing agencies. Ground Fault Equipment Leakage Circuit Interrupter (GFELCI) power cord option Vacuum piping installations should be grounded. In the event that the ground connection is lost, the GFELCI power cord option will maintain electrical safety even with a short circuit to ungrounded piping. The GFELCI power cord will cut power off to the heaters within 25 msec upon sensing a current imbalance between the hot and neutral power lines. The detection circuit is similar to those used in new residential construction. Figure 4 - Series 46 Heat-Sink Graph 4 MKS Series 46 Heaters

7 Ordering and Installation Standard MKS Series 46 Heaters have preset control for two common temperatures, 105 C and 150 C. The first step in selecting heaters is to determine which temperature will best suit your process application. If unsure as to which temperature heater to use, let the MKS applications engineering team assist in determining the appropriate heaters for the system. Once the temperature is determined, select heaters to fit the geometry of the system piping. MKS Series 46 Heaters are designed to fit onto standard MKS piping components, but will often fit onto components from other manufacturers. Consult the MKS applications engineering team for help with non-standard shapes, configurations, and applications. When fitting a heater, do not use a length that is too long for the fitting. Forcing the heater to compress to fit the component can cause damage to the heater. Instead, use a heater or combination of heaters. After covering as much of the vacuum line as reasonable with heaters, select insulators to eliminate cold spots at flanged joints, or gaps between heaters. Insulators can be trimmed to fit the gap. Never trim a heater, only an insulator. Finally, select the accessories needed to complete each line such as power cords, Low Temperature Alert diagnostics, and ground fault detection. Heater Specifications LTA Specifications Nominal Set Point Temperature 150 C (302 F) 105 C (221 F) Exterior Range Temperature C ( F) C ( F) Interior Range Temperature C ( F) C ( F) Foam Thickness 0.5 in. (12.7 mm) Materials Molded silicone foam, fiberglass reinforced silicone, Teflon insulated wire Connectors Midget Twist-Lock, nylon, NEMA ML-1 Weight Range 0.5 to 6.2 lb (0.73 to 2.8 kg) Product Safety CE Mark: 89/336/EEC EMC Directive, 73/23/EEC LV Directive UL Listed File E JR Enclosure Power Requirements Power Consumption Relay Contact Rating Input/Output Wiring Dimensions Product Safety Black Plastic VAC input, 12VDC ±3VDC output 0.3 W SPDT, 2 50 VAC resistive, 1 30 VDC 1 Thermal switch line IN 2 Thermal switch line OUT 3 Normally closed 4 Common 5 Normally Open 2.58" x 4.76" x 1.46" (in.) 66 x 121 x 37 (mm) CE Mark: 89/336/EEC EMC Directive92/59/EEC General Product Safety Directive Heater Features 1. Exterior Heater Surface Interior Heat Mat 3. Cable Lead with Male Twist-Lock Connector 4. Microprocessor 5. Cable Lead with Female Twist-Lock Connector 6. Nylon-capped Metal Snaps MKS Series 46 Heaters 5

8 Straight Section - Diameter Tubing Nominal in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) (254) (279) (330) (356) (381) (406) (432) (457) (483) (508) (533) (559) (584) (610) (762) (914) (replace the X with a 0 for 150 C or a 1 for 105 C) X X X X X X X X X X X X X X X X X X X X X X X X X36 Nominal in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) (254) (279) (330) (356) (381) (406) (432) (457) (483) (508) (533) (559) (584) (610) (762) (914) (replace the X with a 0 for 150 C or a 1 for 105 C) X X X X X X X X X X X X X X X X X X X X X X X X X36 6 MKS Series 46 Heaters

9 Straight Section - Diameter Tubing Nominal in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) (254) (279) (330) (356) (381) (406) (432) (457) (483) (508) (533) (559) (584) (610) (762) (914) (replace the X with a 0 for 150 C or a 1 for 105 C) X X X X X X X X X X X X X X X X X X X X X X X X X36 Nominal in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) (254) (279) (330) (356) (381) (406) (432) (457) (483) (508) (533) (559) (584) (610) (762) (914) (replace the X with a 0 for 150 C or a 1 for 105 C) X X X X X X X X X X X X X X X X X X X X X X X X X36 MKS Series 46 Heaters 7

10 Straight Section - Diameter Tubing Nominal in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) (254) (279) (330) (356) (381) (406) (432) (457) (483) (508) (533) (559) (584) (610) (762) (914) (replace the X with a 0 for 150 C or a 1 for 105 C) X X X X X X X X X X X X X X X X X X X X X X X X X36 Nominal in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) (254) (279) (330) (356) (381) (406) (432) (457) (483) (508) (533) (559) (584) (610) (762) (914) (replace the X with a 0 for 150 C or a 1 for 105 C) X X X X X X X X X X X X X X X X X X X X X X X X X36 8 MKS Series 46 Heaters

11 Straight Section - Diameter Tubing Nominal in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) (254) (279) (330) (356) (381) (406) (432) (457) (483) (508) (533) (559) (584) (610) (762) (914) (replace the X with a 0 for 150 C or a 1 for 105 C) X X X X X X X X X X X X X X X X X X X X X X X X X36 Nominal in. (mm) 2.00 (51) 7.00 (178) 8.00 (203) 9.00 (229) (254) (279) (330) (356) (381) (406) (432) (457) (483) (508) (533) (559) (584) (610) (762) (914) (replace the X with a 0 for 150 C or a 1 for 105 C) X X X X X X X X X X X X X X X X X X X X X X X X X36 MKS Series 46 Heaters 9

12 90 Elbow For ISO Flanged Elbows, Standard 2.38 (60) 3.75 (95) 5.25 (133) 2.38 (60) 3.75 (95) 5.25 (133) 1.50 (38) 2.00 (51) 1.50 (38) 2.00 (51) X X X X X X X X63 90 Elbow for ISO Flanged Elbows, Long 4.75 (121) 5.13 (130) X X (121) 5.13 (130) X X63 90 Elbow For Weld Elbows, Standard C or a 1 for 105 C) X X X X C or a 1 for 105 C) X X X X66 90 Elbow For Weld Elbows, with Tangents 2.88 (73) 6.25 (159) 8.25 (210) WT WT WT WT X X X X (73) 6.25 (159) 8.25 (210) WT WT WT WT X X X X67 10 MKS Series 46 Heaters

13 45 Elbow For ISO Flanged Elbows, Standard 1.37 (35) 1.62 (41) 2.94 (75) 4.05 (103) X X X X (35) 1.62 (41) 2.94 (75) 4.05 (103) X X X X62 45 Elbow For Weld Elbows, Standard 0.93 (24) 1.24 (31) 1.86 (47) 2.49 (63) N/A X X X64 45 elbow is too small to heat, and serves as an insulator 1.24 (31) 1.86 (47) 2.49 (63) X X X64 45 Elbow For Weld Elbows, with Tangents 1.56 (40) 2.24 (57) 3.61 (92) 4.74 (120) 1.56 (40) 2.24 (57) 3.61 (92) 4.74 (120) WT WT WT WT WT WT WT WT X X X X X X X X65 MKS Series 46 Heaters 11

14 Tee - For ISO Flanged Tees 2.38 (60) 3.38 (86) 4.75 (121) 6.75 (171) X X X X (60) 3.38 (86) 4.75 (121) 6.75 (171) X X X X38 Tee - For Weld Tees 2.19 (56) 2.94 (75) 3.19 (81) 3.81 (97) 4.38 (111) 5.88 (149) 6.38 (162) 7.63 (194) T T T T X X X X (56) 2.94 (75) 3.19 (81) 3.81 (97) 4.38 (111) 5.88 (149) 6.38 (162) 7.63 (194) T T T T X X X X39 Bellows - For ISO Flanged Bellows 3.31 (84) 3.19 (81) 3.31 (84) 3.19 (81) Bellows Diameter 1.81 (46) 2.41 (61) 3.80 (97) 4.70 (119) Bellows Diameter 1.81 (46) 2.41 (61) 3.80 (97) 4.70 (119) Heater O.D (89) Heater O.D (89) Amps at Amps at For Use With For Use With X X X X X X X X69 12 MKS Series 46 Heaters

15 Reducer - For ISO Flanged Reducers (in.) 3.0 x x x x (99) 3.83 (97) 3.83 (97) 3.18 (81) Large End Tangent 0.39 (10) 0.42 (12) 0.49 (12) 0.47 (12) Small End Tangent 1.00 (25) 0.93 (23) 0.93 (23) 0.28 (7) Amps at For Use With X X X X47 (in.) 3.0 x x x x (99) 3.83 (97) 3.83 (97) 3.18 (81) Large End Tangent 0.39 (10) 0.42 (12) 0.49 (12) 0.47 (12) Small End Tangent 1.00 (25) 0.93 (23) 0.93 (23) 0.28 (7) Amps at For Use With X X X X47 Reducer - For Weld Reducers (in.) 2.0 x x x x x (60) 3.63 (92) 3.63 (92) 3.63 (92) 3.63 (92) Large End Tangent 0.70 (18) Small End Tangent Amps at For Use With CR CR CR CR CR C or a 1 for 105 C) X X X X X45 (in.) 2.0 x x x x x (60) 3.63 (92) 3.63 (92) 3.63 (92) 3.63 (92) Large End Tangent 0.70 (18) Small End Tangent Amps at For Use With CR CR CR CR CR C or a 1 for 105 C) X X X X X45 Hose - For ISO-KF Flanged Thin Wall Hose (in.) 9.19 (233) 9.06 (230) Bellows Diameter 1.95 (50) Heater O.D (89) Amps at For Use With X X77 (in.) 9.19 (233) 9.06 (230) Bellows Diameter 1.95 (50) Heater O.D (89) Amps at For Use With X X77 Hose - For ISO-KF Flanged Thick Wall Hose (in.) 9.19 (233) 9.06 (230) Bellows Diameter 2.12 (54) 2.71 (69) Heater O.D (89) Amps at For Use With X X79 (in.) 9.19 (233) 9.06 (230) Bellows Diameter 2.12 (54) 2.71 (69) Heater O.D (89) Amps at For Use With X X79 MKS Series 46 Heaters 13

16 Flange Insulators - Standard, fits most clamps Flange NW Hole 1 I.D. Hole 2 I.D. O.D (157) 6.20 (157) 7.78 (198) 7.78 (198) 6.68 (170) 6.68 (170) 7.42 (188) 7.42 (188) MKS ISO-KF Clamps MKS ISO-KF Clamps MKS ISO-KF Clamps MKS ISO-KF Clamps MKS Double Claw Clamp MKS Double Claw Clamp MKS Double Claw Clamp MKS Double Claw Clamp Flange Insulators - ISO-KF Flanges, on Short Elbows Flange NW 40 Hole 1 I.D. Hole 2 I.D. O.D. (will only work with MKS clamps) / and (121) / and Flange Insulators - ISO-KF Flanges, Compact Flange NW Hole 1 I.D. Hole 2 I.D (89) 3.50 (89) O.D (107) 4.20 (107) 4.20 (107) 5.16 (131) 5.16 (131) 5.16 (131) (will only work with MKS clamps) MKS Wing Nut Clamp MKS Wing Nut Clamp HPS Wing Nut Clamp MKS Wing Nut Clamp MKS Wing Nut Clamp MKS Wing Nut Clamp MKS Series 46 Heaters

17 Insulators - Foam Only Trim and use to fill straight gaps on line. Attaching straps must be ordered separately. Use Insulating gaps on 1.5 inch tube systems Insulating gaps on 2.0 inch tube systems Insulating gaps on 3.0 inch tube systems Insulating gaps on 4.0 inch tube systems Insulators - Foam with Straps Trim and use to fill straight gaps on line. Use 1.00 (25) 1.00 (25) 1.00 (25) 1.00 (25) Insulating gaps on 1.5 inch tube systems Insulating gaps on 2.0 inch tube systems Insulating gaps on 3.0 inch tube systems Insulating gaps on 4.0 inch tube systems Straps with Snaps For installing foam only tube insulators. Quantity SNAP 4520-SNAP 4530-SNAP 4540-SNAP Elbow Insulators - Foam with Straps For insulating gaps on 45 elbows Power Cables and Accessories Double claw clamp, grounding, ISO-Universal NW 80 and NW 100 Spare fuse, 12 amps, (quantity of 1) Kit, LTA lead, with male & female connector & 10 ft. of wire Kit, LTA jumper, with male & female connector & 6 in. of wire Low Temperature Alert Monitor Description Power cable, 6 ft. (1.83m), 120 VAC Power cable, custom length, Max 25 ft., 120 VAC Power cable, 12 ft. (3.66m), 120 VAC Power cable, 120 VAC, with ground fault leakage circuit interrupter, 6 ft. (1.83m) Power cable, 120 VAC, with ground fault leakage circuit interrupter, custom, max 25 ft. Power cable, 120 VAC, with ground fault leakage circuit interrupter, 12 ft. (3.66m) 43PWRCORD01 43PWRCORD02 43PWRCORD03 43PWRCORD04 43PWRCORD05 43PWRCORD06 The power cables are not included with any of the heater jackets and must be ordered separately. Do not exceed 12 amps draw per power cord. MKS Series 46 Heaters 15

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20 MKS Instruments, Inc. Integrated Process Solutions 5330 Sterling Drive Boulder, CO Tel: (in USA) MKS Instruments, Inc. Global Headquarters 2 Tech Drive, Suite 201 Andover, MA Tel: (in USA) Web: China France Germany Ireland Israel Italy Japan Korea Netherlands Singapore Taiwan United Kingdom United States