Jacket Heater. Sep Jacket Heater 1

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Anissa Summers
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1 Jacket Heater Jacket Heater 1

Contents 1. Purpose 2. Uses 3. Characteristics 3-1. Heating element structure 3-2. Noncombustibility 3-3. Construction Materials 3-4. Energy saving, Less CO 2 3-5. High precision sewing technology 4.

2 Contents 1. Purpose 2. Uses 3. Characteristics 3-1. Heating element structure 3-2. Noncombustibility 3-3. Construction Materials 3-4. Energy saving, Less CO High precision sewing technology 4. Compliance with CE & RoHS 5. Summary References (a) Controller (b) Durability of heater wire (c) Clean room specification (d) Glass cloth (e) Safety devices (f) Covers & Heaters (g) Installation (examples) (h) Effects of the Jacket Heater (example) Jacket Heater 2

3 1. Purpose Efficient heating of pipes Preventing blockage in the pipes caused by exhaust gas solidification. Preventing input gas solidification. 2. Uses - Semiconductor / LCD manufacturing devices (LP-CVD, P-CVD, Etcher, etc.) - Around Vacuum pump / Scrubber (relating to the above) - Gas inlet pipes Jacket Heater 3

4 3. Characteristics 3-1. Heating element structure other manufactures Glass/SiO2 Yarn (braided) Ni-Cr wire Possible heater disconnection or short circuit due to insulation deterioration caused by heating Difficulty of narrow pitch wiring due to mechanical strength poverty and low reliability amc Double insulation structure Diameter 0.2mm or more Ni-Cr wire Ceramics felt Thermal resistance.:800 Glass/SiO 2 Yarn(braided) High reliability and durability by double insulation structure, preventing insulation deterioration. Narrow pitch wiring is possible. (Refer to (b) Durability of heater wire) Jacket Heater 4

5 3. Characteristics 3-2. Noncombustibility Materials used are all incombustible. Thermal protector to prevent overheat. (safety device) Cross section of the Jacket Heater Cover cloth:silicon coated glass cloth Thermal insulator:glass felt, etc. Thermal protector preventing overheat Base cloth: Glass cloth Heater wire:ni-cr wire (with double insulation) Inner cloth:baked glass cloth Jacket Heater 5

6 3. Characteristics 3-3. Construction Materials Heater wire Cover cloth Double insulation structure (thermal resistance: 800 ) Silicon coated glass cloth Teflon coated glass cloth Thermal insulator Glass felt, etc. Inner cloth Baked glass cloth Cover cloth, thermal insulator, inner cloth, controller, etc. are to be chosen through consultation with customers. Jacket Heater 6

Less power / Less CO 2 than rubber heaters & other heaters of other manufactures Electric

7 3. Characteristics 3-4. Energy saving, Less CO 2 With its excellent thermal insulation capability, Rubber heater Less power / Less CO 2 than rubber heaters & other heaters of other manufactures Electric power for heating : approx. 40% less Surface temperature: 40% lower (92 55 ) Less electric power for air-conditioner Jacket Heater made by amc Jacket Heater 7

8 3. Characteristics 3-5. High precision sewing technology High precision cutting with laser machine - Computer Aided Design - High precision sewing of heater wire with NC machine - Very careful sewing by skilful workers Jacket Heater 8

9 4. Compliance with CE & RoHS 4-1. CE. The Jacket Heater complies with the provisions of the following European Directives: 2006/95/EC Low Voltage Directive EN :2006 Safety in electroheat installations Part 2 : Particular requirements for resistance heating equipment Jacket Heater 9

10 4. Compliance with CE & RoHS 4-2. RoHS (Restriction of Hazardous Substances) The Jacket Heater complies with the RoHS. No. Six Substances Banned Under the RoHS Legal citation / Threshold 1 Cadmium and its compounds RoHS Directive (2002/95/EC) Threshold: 100 ppm 2 Chromium VI compounds RoHS Directive (2002/95/EC) Threshold: 1000 ppm 3 Lead and its compounds RoHS Directive (2002/95/EC) Threshold: 1000 ppm 4 Mercury and its compounds RoHS Directive (2002/95/EC) Threshold: 1000 ppm 5 Specified PBB family of brominated flame retardants 6 Specified PBDE family of brominated flame retardants RoHS Directive (2002/95/EC) Threshold: 1000 ppm RoHS Directive (2002/95/EC) Threshold: 1000 ppm Jacket Heater 10

11 5. Summary Specially designed heater wire - Double insulation structure - Narrow pitch sewing of heater wire is possible. Thermal resistance of up to 800, depending on construction materials. Fray-free and highly reliable products by careful sewing based on advanced technology. Multiple means for temperature control (PID/Thermostat) are available. Ready to meet various specifications. Specific product shape is available in accordance with customer s requirements. Jacket Heater 11

12 References Jacket Heater 12

Thermostat control Temperature control accuracy: ±10.

13 (a)-1 Controller PID control Temperature control accuracy: ±1 Long life time with semiconductor relay for on/off switching Temperature to be set : adjustable within 200 ~ +1,000, depending on sensor specification PID or Thermostat Thermostat control Temperature control accuracy: ±10. Short life time due to bimetallic contact for on/off switching (approx. 0.1 million times at rated load) Temperature to be set : adjustable within RT ~ 200 Less expensive, less space Jacket Heater 13

14 (a)-2 Controller PID A PID controller consists of two major units. 1. Temperature controller (Central unit in PID controller) Transmitting the optimum output signal to SSR (below), carrying out comparison operation with the set temperature and the heater temperature measured with sensor (thermocouple). Optional functions: Detection of heater wire disconnection and heater overheat. 2. SSR(Solid state relay) Semiconductor relay, switching on/off the heater power by signal of the temperature controller. Optional devices of PID controller ammeter alarm device leakage breaker fuse, disconnection alarm Jacket Heater 14

15 (a)-3 Controller 24 PIDs type 24PIDs with touch panel Dimension: H 1460 W 520 D 400 * P-CVD vacuum pump scrubber inlet * Control on 24 points * 150 ~120 * Each heater with LED connected Touch panel display (example) Jacket Heater 15

(a)-4 Controller 4 PIDs 1 display type 4 PIDs

or more channels is possible with multiple

16 (a)-4 Controller 4 PIDs 1 display type 4 PIDs with one common display -Dimension: - H 330 W 330 D Lightweight and compact size - Control for 5 or more channels is possible with multiple controllers 4channels PID x 1 Customized design including chassis Jacket Heater 16

17 (b)-1 Durability of heater wire Durability comparison test of heater wires with MIT test machine Plunger Tool to put load 1. Test samples (A, B): φ0.35 x 6m Test sample Bending equipment A: Heater wire with double insulation structure (amc) B: Heater wire with single insulation structure (other vendor) A plate to attach bending equipment 2. Evaluation Degree of damage after bending the test samples (visual check) 3. Test condition load : 1kg bending angle : 135 ±5 frequency : 175 times/min. Test machine(mit type) Jacket Heater 17

18 (b)-2 Durability of heater wire Result of the durability test thermal stress prior to the test. none Sample wire manufacture sample A amc Degree of durability 32, 30, 27 Degree of damage After 10th~20th bending : No wire disconnection though fluff of covering material was observed hrs sample B other vendor sample A amc sample B other vendor 17, 18 After 10th bending : A heater wire itself was exposed. 6, 5, 5.5 After 1st~2nd bending: The disconnection was not caused though the shagginess of the coating material was observed. 3, 4 After 1st~2nd bending: Heater wire was exposed Life time of Mitsui-MMC heater wire is approx. two times better than that of other manufacturer. Jacket Heater 18

with unique doubly-insulated heater wire.

19 (b)-3 Durability of heater wire amc Other manufacture Excellent durability against wire disconnection, short circuit, etc. with unique doubly-insulated heater wire. Liable to cause possible short circuit, etc., resulting from exposure of heater wire caused by repeated use. Jacket Heater 19

20 (c) Clean room specification Cover cloth:materials with few particles. :Very strong against tear, bend and cut. Structure to prevent particles. Structure to have both heat resistance capability and the adaptability to clean room of class 10. N u m b e r o f p a r t i c l es initial Teflon-coated glass cloth Gore-Tex Polyester (μm) Jacket Heater 20

21 (d)-1 Glass cloth Glass cloth strength change by heat 120 twisted yarn single fiber woven fabric tensile strength retention rate ( % ) temperature( ) ( Heated for two hours at each temperature ) Jacket Heater 21

(d)-2 Glass cloth Tensile strength change of glass fiber by heat treatment at 550 200 Glass cloth A Glass cloth B

22 (d)-2 Glass cloth Tensile strength change of glass fiber by heat treatment at Glass cloth A Glass cloth B Glass cloth C tensile strength(kg/mm 2 ) time( hours) Jacket Heater 22

(e) Safety devices 1) Thermal protector Standard feature in each heater, cutting off input current in case heater temperature rises over specified figure. (default value: approx.

23 (e) Safety devices 1) Thermal protector Standard feature in each heater, cutting off input current in case heater temperature rises over specified figure. (default value: approx. 250 at piping) 2) LED (optional feature) Turning on in case heater temperature is low (30 ) and turning off at 75. LEDs are on to indicate low temperature. (example) 3) others(special design) Ready to meet other requirements (alarm, interlock, etc.). Jacket Heater 23

detach & attach them when cleaning piping, etc.

24 (f) Covers & Heaters Covers (heat-retention) & Heaters for flange and clamping part of piping Very easy to detach & attach them when cleaning piping, etc. Clean room specification Clamping cover Clamping heater Jacket Heater 24

25 (g) Installation (examples) Abundant actual experiences Jacket Heater 25

26 (h)-1 Effects of the Jacket Heater (example) LP-CVD Heating at 150 by PID controller. 1. Less Particles in a chamber 2. Less starting times Jacket Heater 26

27 (h)-2 Effects of the Jacket Heater (example) 1. Less particles in a chamber Case 1 Before Jacket Heater attachment After Jacket Heater attachment 50 Total 50 Total 40 Large size 40 Large size /9 11/16 11/23 11/30 12/7 12/14 0 6/24 7/1 7/8 7/15 7/22 7/29 *All particles, 0.2μm or more, were counted. *The large size : 1μm or more. Overall average number 10.9/wafer 2.6/ wafer Average number of the Large size 1.1/ wafer 0.5/ wafer Jacket Heater 27

28 (h)-3 Effects of the Jacket Heater (example) 1. Less particles in a chamber Case 2 Before Jacket Heater attachment After Jacket Heater attachment Total Total Large size Large size /25 5/29 6/2 6/6 6/10 0 7/31 8/4 8/8 8/12 *All particles, 0.2μm or more, were counted. *The large size : 1μm or more. Overall average number 28.7/wafer 12.1/ wafer Average number of the Large size 6.0/ wafer 1.6/ wafer Jacket Heater 28

29 (h)-4 Effects of the Jacket Heater (example) 2. Less starting times Before After Case1 4.2 times (average) 1 time Case2 5.6 times (average) 3 times Starting times : Repeat count of the chamber start until number of particles are reduced to designated value. Jacket Heater 29

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