DESICCATORS CLEANROOM STORAGE & HANDLING. Low-Cost Solutions for High-Tech Industries. Copyright 2011 Terra Universal, Inc. Vol. 4, No.

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1 DESICCATORS CLEANROOM STORAGE & HANDLING Low-Cost Solutions for High-Tech Industries Copyright 2011 Terra Universal, Inc. Vol. 4, No. 13

2 NitroPlex Humidity Control System Configured for multiplexed RH control and datalogging of a 20-chamber desiccator Ref. No Shown with optional SmartPlex hand-held computer and software. NitroPlex Zero Tolerance Moisture Control Terra s NitroPlex Desiccator Control System optimizes nitrogen purge efficiency for the most demanding applications, when every second of moisture exposure counts. The NitroPlex is the only humidity control system that combines the monitoring and control capabilities required in zero-tolerance applications with miniaturized semiconductor components, bio/ pharmaceutical samples and other moisture-sensitive materials. Chamber-by-Chamber Multiplexed %RH Monitor/ Control A separate high-accuracy, miniaturized humidity module in each desiccator chamber provides independent monitor/control capability. Each module can be programmed locally or remotely to maintain a humidity set point from ambient down to 0%RH. Nitrogen is directed only where needed to keep the %RH level below the critical set point. Cuts System Recovery Time to Seconds Desiccators controlled by a flowmeter may require an hour or more to regain a humidity set point after a chamber access door is opened. When doors are opened repeatedly, humidity levels can remain above the critical set point for an entire work day. Testing shows that the NitroPlex cuts this recovery time by over 400% in a 4-chamber desiccator (see sidebar below). In Terra s Microccator this recovery time is cut to a matter of seconds, eliminating moisture-caused damage (see photo on facing page). Product Safety Alarm The NitroPlex eliminates another common cause of moisture exposure: access doors mistakenly left open or ajar. The system directs a high-flow nitrogen purge to any chamber the moment its door is opened. If the door remains opened longer than a specified delay time, the NitroPlex issues warning alarms to alert personnel to the problem. Recovery Time Comparison The NitroPlex Advantage Almost any desiccator maintains a low-rh storage environment under ideal conditions. Problems begin when someone opens a door. Immediately, moisture-laden air backfills the cabinet. The measure of an efficient humidity control system is how quickly the cabinet can remove moisture and recover the initial humidity set point. In a large desiccator with a flowmeter and a single bleed valve, this recovery can take up to an hour. If, during this recovery period, another door is opened, the process begins again. Moisture may remain present in the storage enclosure during the entire duration of a working shift negating your investment in desiccator storage and slashing your product yields. Terra s Dual Purge and NitroWatch systems improve system recovery time by initiating a high-flow purge when a door opens or humidity creeps above a set point threshold. This variable purging speeds up moisture removal, but recovery can still take up to 40 minutes if only one bleed valve is present (see Figure 1). Simply by installing Terra s Automatic RB (Relief/Bleed) Valve in each chamber, you can cut both the system recovery time and the nitrogen consumption in half (see Figure 2). This configuration minimizes moisture migration water vapor is purged out of the chamber it enters. Relative Humidity (%) % Nitrogen Consumption Fig. 1: 110 ft3 Fig. 2: 55 ft3 (100% improvement) Fig. 3: 15 ft3 (nearly 300% improvement) Nitrogen Consumption 15 ft 3 55 ft ft 3 Fig. 1 Fig. 2 Fig. 3 One Automatic RB Valve on bottom chamber Four Automatic RB Valves, all chambers simultaneously purged Four Automatic RB Valves with NitroPlex Module Purge Time (min.) Recovery Time Fig. 1: 40 minutes Fig. 2: 20 minutes (100% improvement) Fig. 3: 10 minutes (400% improvement) For optimal efficiency, however, a desiccator requires chamber-by-chamber humidity sensing and purge control. Only Terra s NitroPlex system delivers this purge efficiency (see Figure 3). A NitroPlex desiccator typically saves up to 77% in nitrogen cost. More importantly, it cuts system recovery time by 400%, ensuring dry storage under real-world operating conditions. NOTE: All prices and specifications are subject to change without notice. Crating charges apply to selected items. Call for information Terra Universal, Inc. All rights reserved. Printed in USA

3 Datalogging Complete Product Assurance The NitroPlex control system includes capabilities for logging data to a remote PC for subsequent analysis. A serial port downloads data to a remote PC for display and analysis. For optimal convenience, Terra offers the SmartPlex : a hand-held computer with software customized to your NitroPlex cabinet and application requirements. The SmartPlex allows convenient remote programming of chamber set points. It also provides a graphical display of current humidity and set point conditions in each NitroPlex chamber and records these data for archiving or analysis. This datalogging capability provides a detailed, traceable storage and access history for every chamber of a NitroPlex desiccator an invaluable tool in R&D experiments. Activity Report, 4-Chamber Cabinet Date 6/7/03 Chamber R/H R/H Door Number Set Point In Chamber Open/Closed Time 1. 2% 2% Open 8:10 a.m. 14% Closed 8:15 a.m. 2% Closed 8:20 a.m % 10% Open 12:05 p.m. 45% Closed 12:20 p.m. 25% Closed 12:21 p.m. 10% Closed 12:23 p.m. 3. 1% 1% Closed 4:00 p.m. 1% Open 4:10 p.m. Humidity Uniformity In a large, multi-chamber cabinet with only one humidity sensor, the %RH level can vary as much as 50% from one chamber to another. Because humidity levels in portions of the cabinet remain well above the set point level, Microccator No , used with critical night-vision goggle electronics/optics System Recovery in Seconds! moisture can degrade parts before you even realize there s a problem! By sensing humidity levels in each chamber independently, the NitroPlex provides complete RH uniformity to eliminate this problem. 50% Closed 4:15 p.m. Multiplexed Control for Moisture Exposure Studies Multiplexed humidity monitoring and control also allows a different humidity set point in each desiccator chamber. 1% Closed 4:20 p.m. This flexibility has several important application benefits. It allows a single cabinet to store parts with varying 4. 2% 1% Closed 5:10 p.m. moisture sensitivities. It also allows accelerated life testing under varying humidity levels for everything from 20% 2% Closed 5:15 p.m. pharmaceuticals to semiconductor ICs. You can even monitor the effects of varying humidity levels on cosmetics 8% Closed 5:30 p.m. and other moisture-sensitive chemical compounds. 15% Closed 6:10 p.m. 20% 20% Closed Closed 7:20 p.m. 8:10 p.m. Application Versatility Add the NitroPlex to any Terra desiccator cabinet to create a state-of-the-art automated humidity control system. Or customize a NitroPlex cabinet to the unique demands of your application. SmartPlex option datalogs access history and environmental conditions for analysis or printing at a remote PC See page 5 for complete ordering information N 2 Fig. 1: Dual Purge /NitroWatch Systems, One Automatic RB Valve. Moisture migrates through cabinet N 2 Fig. 2: Dual Purge /NitroWatch Systems, Four Automatic RB Valves. Moisture migration eliminated Refer to Control System Comparison Chart on page 2 for more information. See NitroPlex ordering information on page 5. Fig. 3: NitroPlex System Efficient moisture removal, fast recovery time, reduced N 2 use What s Your Application? The standard NitroPlex system provides unsurpassed moisture control in dozens of storage applications. Temperature, gas or biological sensors expand the range of critical operations. Microelectronics components, SMDs, hybrid packages Storage of PCBs for rework Pharmaceutical R&D studies Kitting of high-precision watch components Pass-through transfer of night-vision electronics Lithium battery development Humidity testing of cosmetics Accelerated life testing of ICs Animal inhalation and toxicology research Which critical control application can you find in your facility? QuickQuote Planner quickly configures a system to your specifications: To Order, Call or Fax Vol. 4 No. 13 1

4 Compare! Terra s Designs and Fabrication Techniques Stainless Steel Frame One-piece Gasket Full Plenum Chambers Uniform gas distribution Minimizes backfill when a door is opened Greater cabinet rigidity Stainless Steel Door Frames Strongest, most durable doors in the industry Designed for years of heavy use without bowing or cracking Leaks develop as weather stripping creeps. LiftLatch Extends Cabinet Life Now available in stainless steel Removes lateral strain on hinges and gasket Ergonomic design eliminates twisting Upgrade from chrome-plated to 304 stainless steel models to minimize scratching, corrosion and contamination (see pg. 18) Compare! Terra s Desiccator Cleanliness Terra desiccators feature non-particulating, easy-clean, cleanroom-compatible materials to ensure a non-contaminating environment for sensitive materials. Heat-Fused, One-Piece Seals Mechanically attach to stainless steel frames to eliminate adhesives and outgassing problems Will not creep or deform like adhesive weather stripping - style gaskets Hollow-formed e -profile Santoprene construction enhances resiliency seals better and longer! Particle deposition testing reveals minimal detectable contamination of test wafers stored inside a Terra desiccator an average of much less than one 0.16 micron over a 12-hour period, which lies within the typical deviation of the test equipment. Overnight Particle Deposition Rate (12-hour test period) Single Cassette/Chamber* Multiple Test Cassettes** Chamber 1 (top) (bottom) Total Cassette No µm particles µm particles µm particles µm particles Performed in 5-chamber Wafer Box Desiccator No A equipped with NitroWatch and Dual Purge systems, using Tencor 6220 particle scanner. Results indicate average difference between measured particle counts before and after the test period, during which time filtered nitrogen was purged through the cabinet to maintain a 15% RH. * Single Cassette Test: one test wafer cassette installed in each of four chambers. ** Multiple Cassette Test: Each of four test wafer cassettes installed inside chamber 5 (bottom chamber). Compare! Which Control System is Best for My Application? Every time a door opens, your system is potentially exposed to particles and humidity. Terra offers several nitrogen control systems that minimize the impact of this exposure by reducing system recovery time. Control System Relative Humidity Set Point Control (to 0% RH)* Access & RH Datalogging Multiplexed Relative Humidity Monitor/Control (to 0% RH)** Multiple RH Set Points in a Single Cabinet Use in Large, Multi-chamber Desiccators Use in Small Desiccators Variable N 2 Purge Compensates for Frequent Access Requires Automatic RB Valve(s)*** SmartDesiccator (page 3) NitroPlex System (page 4) Included Dual Purge /NitroWatch Systems Dual Purge System (page 18) Flowmeter (page 18) * RH maintained through nitrogen purge; system includes moisture sensor(s). ** Nitrogen purge delivered only to chamber that exceeds RH set point. *** One recommended per chamber to ensure rapid contaminant purging and fast humidity recovery 2 Thousands of Critical Environment Solutions:

5 Miniaturized LED monitors humidity and displays set point Reduces nitrogen cost by 78%! Acrylic SmartDesiccator No A (shelves and door frame optional) Seconds to install and program! SmartDesiccator Benchtop Storage System 304 Stainless Steel SmartDesiccator 22"W x 20.75"D x "H C 2, Automates dry benchtop storage to eliminate moisture-related degradation and optimize yields First-of-its-kind gas controller system conserves nitrogen Fully integrated turnkey system takes 30 seconds to install Terra Universal s SmartDesiccator maximizes yields of sensitive materials by automatically maintaining a user-determined humidity set point. Its quick-response feedback system continuously monitors the cabinet s relative humidity level and activates a purge of dry nitrogen only when needed. The system thus economizes on gas consumption and minimizes the possibility of overpressures that can stress cabinet seals. Comparison testing reveals that the SmartDesiccator maintains a low relative humidity level using only 22% of the nitrogen required by a flowmeter-based system of the identical size (see below). Smart Performance and Big Savings! Testing demonstrates the cost benefit of the SmartDesiccator s automated nitrogen control system. The test below was conducted on a 24"W x 18"D x 24"H desiccator equipped with a flowmeter and then with a SmartDesiccator control system, under the following conditions: Ambient Humidity: 60% RH Temperature: 70 F RH Setpoint: Test Period: 10% RH Achieve setpoint and then maintain it for 24 hours Chamber Access: Door opened once every 30 minutes; remains open for one minute Time to achieve 10% RH Total N 2 Consumption (Cu. Ft.) Stainless steel doors (optional on plastic cabinets) restrict the door from flexing or bending, thereby preventing the cracks and fatigue that occur in all-plastic cabinets. A specially designed lift latch eliminates hinge and door damage caused by the strain of twisting and turning conventional latch systems. The SmartDesiccator also incorporates a one-piece, nonadhesive, nonoutgassing gasket specially formulated to retain sealing integrity in extreme low humidity. Because it won t sag or migrate, it extends the service life of the cabinet. Prices include the humidity control module and sensor. To ensure safe pressure release, order the Automatic RB Valve. Systems are available in stainless steel, acrylic or transparent static-dissipative PVC, which helps control static charges and the particles they attract. Automatic RB (Relief/Bleed) Valve B Plastic SmartDesiccators (See above for stainless steel) Shelf Door Frame Chambers Overall Materials Perf. Stainless 304 Stainless Dimensions Acrylic* Dissipative PVC Steel Steel (W x D x H) 1 12" x 12" x 13.25" D 1, D 1, A " x 18" x 13.25" A 1, A 1, A " x 18" x 13.25" A 1, A 2, A " x 24" x 13.25" A 1, A 2, A " x 18" x 25.25" D 1, D 2, A " x 18" x 25.25" D 1, D 2, A " x 24" x 25.25" D 2, D 3, A Time (hours) * Acrylic is damaged by alcohol and other cleaning agents. Desiccator with 0-20 SCFH flowmeter (red area on chart) To achieve setpoint: 85 cubic feet (requires over 4 20 CFH). Note: setpoint measured with a hygrometer, since this set up does not monitor humidity level. Maintain for 24 hrs: 480 cubic feet (24 x 20) Total N 2 Consumed: 565 cubic feet SmartDesiccator (blue area on chart) To achieve setpoint: 85 cubic feet (required cubic/hour on high flow) Maintain for 24 hrs: 40 cubic feet Total N 2 Consumed: 125 cubic feet SmartDesiccator uses 22% of nitrogen consumed by standard cabinet a 78% saving! To Order, Call or Fax Vol. 4 No. 13 3

6 Portable PC docking station Sensor/Display Modules (one/chamber). Allow multiplexed humidity control SmartPlex Portable PC (order separately) allows convenient RH display, programming, database management, and downloading to remote PC. Cuts Nitrogen Costs, Increases Efficiency! See page 1 for more information. NitroPlex Humidity Control System Increases desiccator efficiency up to 400% to minimize nitrogen waste and moisture exposure Senses and displays relative humidity in each desiccator chamber independently for more efficient, cost- effective moisture control Cuts nitrogen expenses by over 75% Prevents moisture and contamination migration from one chamber to another Lets you specify a different humidity set point for each chamber Automatically delivers a high-flow nitrogen purge only to the chamber where it s needed, and only as long as it s needed to restore RH set point Ergonomic design allows easy viewing, eliminates chamber lip for easier parts removal Convenient hand-held computer (optional) monitors humidity conditions in each chamber, facilitates easy set point programming, datalogs chamber RH, and allows stored data to be transferred to a remote PC Can be integrated into almost any Terra desiccator line Model shown: No NP, with ten (10) control modules (No A) and optional SmartPlex computer, stainless steel door frames, and stand. Increased Efficiency Lowers Recovery Time, Increases Yields The NitroPlex system provides state-of-the-art automated humidity control to guarantee the integrity of stored components. Each microprocessor-based multiplexed sensor/display module, one installed in each chamber, enhances desiccator performance and economizes on nitrogen expenses. It contains a miniaturized moisture sensor that reads the internal humidity level within ± 2% of full scale. The LED readout displays this value or the programmable set point for that chamber. When the humidity climbs above the set point in any chamber, the NitroPlex automatically directs a high-flow purge of clean, dry nitrogen only to the chamber where it is needed, and only for as long as necessary to bring the humidity back below the set point value. Specifications Dimensions: 1.5"W x 2.75"D x 1.5"H; increases height of affected chamber by 1.25" (Humidity Module) Housing Material: Stainless steel (chamber humidity modules) Power Requirement: 110VAC, 50/60Hz or 220VAC, 50Hz (universal power supply) Display: 5-digit LED Display Resolution: ± 0.1% RH Sensor Accuracy: ± 20 C Measuring Range: 0-100% RH Calibration: None required. A calibration mode is included for applications that require calibration to an NIST-traceable instrument. Miniature LEDs display current humidity and RH set point QuickQuote Planner quickly configures a system to your specifications: Stainless Steel Systems Available! See page Thousands of Critical Environment Solutions:

7 NitroPlex Ordering Information You can convert any of Terra s standard desiccators into a NitroPlex System simply by adding an NP to the desiccator part number. Then, order one NitroPlex module (Cat. No A) for each desiccator chamber. Example: Cat. No NP is a NitroPlex version of Terra s standard Adjust-A-Shelf desiccator. To complete the order, specify (10) chamber sensor/ display modules. NitroPlex Module C Includes humidity sensor, 5-digit LED display, Automatic RB Valve, and gas plumbing. Order one per chamber. Many Other NitroPlex Systems Available! See page 11. Specifications NitroPlex Desiccators 304 Stainless Corresp. Stainless Steel Corresp. Stands T Steel Door Frames Shelves (leveling feet incl.) yp Overall Dim. Static Dissipative PVC Clear Acrylic Select appropriate quantity Perforated Shelf Stainless Steel (W" x D" x H") for your desiccator 4" High e 45 x 24 x ANP 8, ANP 4, A A 34 x 18 x ANP 6, ANP 3, A x 18 x ANP 7, ANP 3, A x 24 x ANP 5, ANP 2, A B x 18 x ANP 3, ANP 2, A x 18 x ANP 4, ANP 2, A Two chambers per tier One chamber per tier 60" 18" or 24" 34" or 45" A 60" For Performance Data See Inside Cover 18" or 24" 171 8" or 225 8" B SmartPlex Hand-Held Monitor/Display Computer and Software Includes software package customized for the specified NitroPlex desiccator configuration. Provides easy-view monitoring of humidity level, humidity set point, and alarm status in each desiccator chamber. Simplifies programming of separate humidity set point for each desiccator chamber. Includes 12VDC power supply and transformer for operation from 110VAC, 50/60Hz or 220VAC, 50Hz power supply. Serial interface allows downloading of storage data. Standard Software Updates Inventory Chamber #1 The SmartPlex onboard database software R/H = 14.2 o lets you configure the system for your Setpoint = 15.0 o application. You specify number of chambers and contents of each chamber, including Chamber #2 R/H = 12.7 o detailed information on each product stored (description, part number, quantity and more). Setpoint = 15.0 o The SmartPlex then searches by product Chamber #3 name or part number and provides detailed information on quantities on hand, storage R/H = 14.5 o history, and environmental conditions. This Setpoint = 15.0 o information can then be downloaded to a remote PC for analysis or print-outs. Chamber #4 R/H = 12.0 Setpoint = 10.0 Open-door warning High-flow purge warning SmartPlex displays detailed chamber information in one screen SmartPlex hand-held computer allows convenient RH display, programming, database management, and downloading to remote PC To Order, Call or Fax Vol. 4 No. 13 5

8 B Stainless Steel Frame (shown with optional shelves) A Polyethylene Frame C Cushioned ride for optimal product protection of wafers and other delicate parts. DesiCart Low Humidity Transport Carts These mobile storage carts transport components from one location to another while maintaining critical low-humidity and low-particle conditions. Each houses a hermetically sealed desiccator storage chamber, which maintains clean, dry storage conditions during parts transport. Desiccators feature opposing access doors for pass-through convenience, and every door is equipped with a LiftLatch. Quick connect/disconnect fittings (optional) enable you to purge the system with nitrogen while it is stationary. Reinforced door construction and gasketing provide air-tight seals that maintain a clean, dry storage environment while the DesiCart is in motion. Quick Connect/Disconnect Fitting (installed; requires RB Valve) Automatic RB (Relief/Bleed) Valve (Required for safe gas purging) B Note: Models below feature chrome-plated racks and opposing doors for pass-through access. Overall H x W x L (inches) A. Polyethylene Frame Ordering Information Corresponding Shelves Shelving Doors (8) with Acrylic* with Static-Dissipative Acrylic* Desiccator W x D H x W Desiccator PVC (inches) (inches) 304 Stainless Steel Shield Tray x 27 x x 22 9 x B 2, B 4, Shelf * Acrylic is damaged by alcohol and other cleaning agents. Overall H x W x L (inches) B. Stainless Steel Frame Ordering Information Corresponding Shelves Shelving Doors (8) with Acrylic* with Static-Dissipative Acrylic* Desiccator W x D H x W Desiccator PVC (inches) (inches) 304 Stainless Steel Shield Tray x 24 x x x B 3, B 4, Shelf * Acrylic is damaged by alcohol and other cleaning agents. C. Wafer Box DesiCart This DesiCart ensures clean, dry, secure transport of delicate wafers. Its 6"-diameter spring-loaded casters provide a cushioned ride, and ultra-clean materials of construction, including electropolished stainless steel shelves, ensure surfaces that won t slough or outgas. Overall dimensions: 50.88"W x 26.25"D x 38"H (including hardware). Holds up to mm wafer boxes.* Ordering Information Enclosure Material Acrylic B 5, Static-Dissipative PVC B 6, *Based on Empak model TR-08A. Custom sizing is available for other carrier sizes. 6 Thousands of Critical Environment Solutions:

9 Desiccator Storage System (please turn the page for ordering information) *Dual Purge System Maintains positive internal pressure Provides low and high purge to save N 2 Blocks out contamination and moisture Activates alarm if door is left open *NitroWatch Displays RH level inside desiccator Operates with Dual Purge System to maintain a low humidity level automatically Humidity Control Systems SmartDesiccator page 3 NitroPlex see page 4 Dual Purge & NitroWatch page 18 Grounding terminals ground entire cabinet with a single connection * Stainless Steel door frame improves sealing, extends service life of cabinet * Sensor Switches provide reliable control of high- and low-flow purging rated for over 10 million operations! Plenum Chamber minimizes backfill, ensures homogeneous positive pressure * Automatic RB Valve Reduced size allows mounting in each chamber for improved performance Bleeds off excess gas Makes cabinet rupture-proof Calibrated to maintain the required positive pressure * One-piece nonadhesive gaskets eliminate flaking, shrinking, slippage; ensure tight seal and prevent sagging Chrome-Plated Wire Racks support slide-out stainless steel trays and shelves * Stainless steel conductive shelf electrically grounded to protect stored parts and devices against electrostatic discharge * Grounded LiftLatch discharges the operator before stored components are damaged, eliminates stress on hinge (all-stainless steel models available) * Stands available in stainless steel, with and without casters Tamper-proof hinge available on selected models * Options refer to separate catalog listings for full descriptions To Order, Call or Fax Vol. 4 No. 13 7

10 Two Chambers Per Tier Standing Adjust-A-Shelf Desiccators with Interchangeable Shelving Shelving (including shields and trays) of models listed on these pages can be used interchangeably in any desiccator chamber with the same nominal dimensions. Manufactured by Terra Universal Terra will custom manufacture a turnkey system to meet your requirements. Call for a quotation. 60" 48" 36" 18" or 24" 34" or 45" 18" or 24" 34" or 45" 18" or 24" A B C 34" or 45" Pass-Through models available for dual-side access see TerraUniversal.com Specifications Adjust-A-Shelf Desiccators Corresponding Acrylic Shelf 304 Stainless Steel Door Frames T Y P E A B Overall Dimensions (W" x D" x H") Two Chambers Per Tier No. of Doors I.D. of Shelves (useable area) (W" x D") Static Dissipative* Clear Acrylic*** Amber Acrylic*** Includes Select appropriate Bow Guard** quantity for your PVC desiccator 45 x 24 x x A 5, A 2, A 3, A x 18 x x A 4, A 2, A 2, A x 18 x x A 4, A 2, A 3, A x 24 x x A 7, A 3, A 3, A x 18 x x A 5, A 2, A 3, A x 18 x x A 6, A 3, A 3, A x 24 x x A 8, A 4, A 4, A C 34 x 18 x x A 6, A 3, A 3, A x 18 x x A 7, A 3, A 4, A x 24 x x A 2, A 1, A 1, A D x 18 x x A 1, A A A x 18 x x A 1, A 1, A 1, A x 24 x x A 3, A 1, A 1, A E x 18 x x A 2, A 1, A 1, A x 18 x x A 2, A 1, A 1, A x 24 x x A 4, A 2, A 2, A F x 18 x x A 2, A 1, A 1, A x 18 x x A 3, A 1, A 2, A x 24 x x A 5, A 2, A 2, A G x 18 x x A 3, A 2, A 2, A x 18 x x A 4, A 2, A 2, A H 12 x 12 x x A A A A * Constructed of transparent static-dissipative PVC; removable back wall made of nondissipative material. **For use in acrylic cabinets. Select stainless steel shelves for use with static-dissipative PVC cabinets. *** Acrylic is damaged by alcohol and other cleaning agents. One Chamber Per Tier Better Doors Long-Lasting Cabinets! Doors are typically the only desiccator component to show signs of wear. These improvements safeguard your investment in clean, dry storage! LiftLatches Standard on all models, these noncontaminating, durable lifting latches operate without straining hinges. Upgrade to all-stainless steel models to minimize contamination. (See pg. 18). Stainless Steel Door Frames Lend strength and rigidity to plastic doors! One-Piece, Nonadhesive Gaskets Standard on all models with stainless steel frames, these durable gaskets are mechanically attached to eliminate adhesives. 8 Thousands of Critical Environment Solutions:

11 One Chamber Per Tier 12" QuickQuote Planner quickly configures a system to your specifications: 12" 12" H 48" 60" 36" 24" 18" or 24" " or " 18" or 24" " or " 18" or 24" " or " D E F G 18" or 24" " or " Perforated Shelf Corresponding 304 Stainless Steel Shelves** Non-Perforated Tray Non-Perforated Shelf Non- Perforated Shied Price (Includes Installation) Corresponding Stands (leveling feet included) (see casters information at right) Stainless Steel 3" High 12" High 3" & 12" High Other Options (see page 18) Dual Purge System , Dual Purge Sensor Switches (one/desiccator door required) Automatic RB Valve B NitroWatch A NitroWatch Sensor (one/desiccator required) A Casters (Heavy-duty, low-profile, set of 4, including 2 with brakes) ** Price for a shelf, shield, or tray of a given size is the same. To order electropolished stainless steel shelving, add -2 to the catalog no. and 30% to the price. Silica Gel on selected models Molecular Sieve No Nitrogen Required! DesiTray Renewable Drying Tray Desiccant tray (select silica gel or molecular sieve) maintains humidity down to 5% RH in any standard Terra desiccator cabinet. Regenerates in minutes for repeated use. See page 19. Smart Desiccator Saves up to 78% of nitrogen costs! Miniature LEDs display current humidity and RH set point See page 3 for the SmartDesiccator, Terra s automated storage environment that incorporates a humidity control system. RH/Temperature Data Logger. Get a complete record of storage conditions see page 19 To Order, Call or Fax Vol. 4 No. 13 9

12 A Model shown is A Shown with optional gas controls B Model shown is A C and castered stand. D Gas controls optional. No A Series Stainless Steel Desiccators Terra manufactures several lines of stainless steel desiccators, for applications ranging from benchtop storage to multiplexed humidity control. All feature the one-piece gaskets and LiftLatches for superior service life and sealing performance. Note: Series 100 and 300 desiccators include shelf racks on a standard basis. Racks must be specified for other models if shelves are required. A/B. Series 100 Benchtop Stainless Steel Desiccator Air-tight seals and all-stainless steel construction maintain a low-humidity storage environment to keep parts clean and dry. Inlet/outlet ports allow nitrogen purging (see page 18 for ordering information on optional nitrogen controllers). Transparent staticdissipative PVC windows protect against static and particle build-ups. Electropolishing Available! C. Series 200 Double-Wall Stainless Steel Desiccators Smooth-profile stainless steel design ensures a staticsafe environment that won t shed or accumulate particles. Built-in gas plumbing and Automatic Relief/Bleed Valve in each chamber allow easy, safe connection to nitrogen or clean dry air purge line. Shelves Perforated Solid Stands 4" High " High D/E. Series 300 Stainless Steel Desiccator Provides all the humidity control features of the Series 100 and 200 models above, but features easy-open double doors for fast, easy access to the whole cabinet. No Nitrogen? DesiTray Renewable Drying Tray Humidity to 5% RH See page 19. No Series 100 Stainless Steel Desiccator: Subtract 2" from OD to get ID Outside Tempered Dissipative Corresponding Shelves Dimensions Class PVC Perforated Non- (W" x D" x H") Windows Windows Perforated 12 x x A A 1, x 16 x A A 1, x 13 x A A 1, x x A A 1, Series 200 Stainless Steel Adjust-A-Shelf Desiccators No. of Stainless Steel Chambers Chamber Dimensions (W" x D" x H") Overall Dimensions (W" x D" x H") Electropolished Stainless Steel 1 20 x 20 x x 22.5 x A 2, A 2, x 20 x x 22.5 x A 5, A 5, x 20 x x 22.5 x A 8, A 8, Series 300 Stainless Steel Desiccators Shelf* Stand** 72"H x 36"W x 18"D 36"H x 36"W x 18"D 304 Stainless Steel A 12, , A Electropolished SS A 12, , A * Includes perforations along one edge to permit gas circulation. Comes with mounting clips. ** Includes leveling feet; raises cabinet 4" off floor. 10 Thousands of Critical Environment Solutions: E

13 Series 400 Stainless Steel Desiccators The Series 400 Stainless Steel Desiccator provides the optimal clean, low-humidity environment for sensitive parts. Available in many chamber configurations, it includes front and rear static-dissipative PVC viewing windows for full visibility of stored contents. Staticdissipative PVC helps control static charges and the particles they attract. All models feature a plenum chamber that ensures uniform distribution of nitrogen purge gas. SmartPlex hand-held computer. See page 5 NitroPlex display modules indicate chamber % RH (optional) NitroPlex -Ready! Terra fabricates these desiccators for use with the NitroPlex humidity control system, the most advanced nitrogen purge controller available. Equipped with the NitroPlex, these systems automatically regulate a nitrogen purge in order to maintain any relative humidity set point you require down to 0% RH. See page 4 for more information. Temperature/Humidity Gauge Includes installation on any specified desiccator cabinet Heavy-Duty Cleanroom Casters Set of Four Model shown: No A (configured for double-side access), with optional NitroPlex humidity control system and stainless steel casters. Series 400 Stainless Steel Desiccators For use with NitroPlex Control System, add NP to part number. Type No. of Nominal Single-Side Access (See Chambers Dimensions* 304 Stainless Electropolished below) (W" x D" x H") Steel 304 Stainless Steel 304 Stainless Steel Double-Side Access Electropolished 304 Stainless Steel 2 25 x x A 3, AEP 3, A 4, AEP 4, A 3 25 x x A 5, AEP 5, A 6, AEP 6, x x A 7, AEP 8, A 8, AEP 9, x x A 6, AEP 7, A 7, AEP 8, B 6 47 x x A 10, AEP 11, A 12, AEP 13, x x A 15, AEP 15, A 17, AEP 18, ** Excludes hardware. Stands raise cabinets an additional 4" (with leveling feet) or 7" (with casters). System Options Accessory Stainless Steel Electropolished Stainless Steel Shelf Rack** EP Perforated Shelf EP Solid Shelf EP Stands (with levelers) 4"H Type A EP "H Type B EP "H Type A EP "H Type B EP ** Required with selection of shelves. Order two per chamber. Type A Type B Both models shown with optional NitroPlex System and casters. Heavy-Duty Casters $/Set of 4 Includes set of 4, two with locking brakes To Order, Call or Fax Vol. 4 No

14 Kiticcator Kitting Tray Desiccator This desiccator provides organized, space-efficient storage of kitting trays (tote boxes) in a clean, dry, static-safe environment. Electropolished stainless steel wire racks are designed specifically for secure storage of any of three common tote boxes (see ordering information below). Trays can be inserted and removed without disturbing any others in the cabinet. Like Terra s other desiccators, these hermetically sealed cabinets are designed to maintain particle-free, lowhumidity storage conditions when purged with nitrogen or clean dry air (see purge controllers on page 18). Tote Boxes (for Kiticcators) Made of durable, static-dissipative highdensity polyethylene thermoplastic. Meets the minimum static decay specifications of MIL-B-81705B. See TerraUniversal.com for more information. Kiticcator No A, shown with optional stainless steel door frames, stand and nitrogen controls Height 1.5" " " Kiticcators (See TerraUniversal.com for full specs) Optional Accessories T No. of Capacity: Clear Acrylic Static-Dissipative Door Frames** Stainless Steel YP Doors (No. of Totes*) PVC Stands*** E 1.5" 2" 4.4" A 1, A 2, A A 1, A 3, A A 2, A 5, A 2, A 4, B A 3, A 6, A RH/Temperature Data Logger A 4, A 9, Get a complete record of storage * Indicates how many boxes of specified depth fit in each cabinet. Order tote boxes separately, above. conditions see page 19 ** Improves seals (see page 2); order one per door. *** Includes levelers. Raises cabinet 4" /2", 51" or 73" 30 1 /2", 51" or 73" 19" 18" 19" 35 1 /2" Type A Cabinets Type B Cabinets One Chamber/Tier Two Chambers/Tier Other Configurations Available! QuickQuote Planner quickly configures a system to your specifications: Series 200 Kiticcator No A, Shown with Tote Boxes No Series 300 Kiticcator No A, Shown with IC Trays No Thousands of Critical Environment Solutions:

15 Tape-and-Reel Desiccator Terra s Tape-and-Reel Desiccator gives you the optimal storage environment for semiconductor component reels. Mix and match reels of several sizes in one easy-access cabinet that conserves space. Adjustable stainless steel racks safely support carrier reels of many widths, up to 14" in diameter (order appropriate reel supports separately). Like Terra s other desiccators, these hermetically sealed cabinets are designed to maintain particle-free, low-humidity storage conditions when purged with nitrogen or clean dry air (see purge controllers on page 18). Adjustable Reel Supports Stainless steel supports can be adjusted in 1 4" increments to form holding bins for many reel sizes inside Terra s Tape-and- Reel Desiccator. Height 4.5" " Casters Set of 4, 2 with locking brakes Tape-and-Reel Desiccator No A, shown with optional stainless steel door frames, stand and nitrogen controls Note: Dimensions given below are for chamber OD only. Ordering Information: Tape-and-Reel Desiccators Corresponding Stands Door Frames Reel No. of Style Overall Clear Acrylic Static Dissipative* Stainless Steel Stainless Steel Size** Doors Dimensions W x D H Desiccator*** PVC Desiccator 4" High 12" High Order 1/Door (inches) x 13 x A A A One Up to 7.5" x 13 x A 1, A 2, A Chamber diameter 5 Per Tier 24.5 x 13 x A 1, A 2, A x 13 x A 2, A 4, A x 13 x A 2, A 5, A Two Up to 7.5" x 13 x A 3, A 7, A Chambers diameter 12 Per Tier 48.5 x 13 x A 4, A 8, A x 13 x A 4, A 9, A x 16 x A A 1, A One Up to 14" x 16 x A 1, A 2, A Chamber diameter 3 Per Tier 24.5 x 16 x A 1, A 3, A x 16 x A 2, A 4, A Up to 14" 6 Two 48.5 x 16 x A 3, A 6, A Chambers diameter 8 Per Tier 48.5 x 16 x A 4, A 8, A * Transparent material helps eliminate static charges and the particles they attract. See TerraUniversal.com for full specifications. Removable back wall is made of nondissipative material. ** Order adjustable supports separately. *** Acrylic is damaged by alcohol. Cabinets with Slide-Out Drawers Easy Access for reels up to 7.5" dia. Includes SS Trays No. of Doors Style Overall Dimensions W x D x H Clear Acrylic Desiccator Static Dissipative PVC Desiccator (inches, OD) x 21 x A A 1, One x 21 x A 2, A 3, Chamber 5 Per Tier x 21 x A 4, A 6, x 21 x A 5, A 8, x 21 x A 6, A 9, Two x 21 x A 8, A 11, Chambers 12 Per Tier x 21 x A 9, A 13, x 21 x A 11, A 15, To Order, Call or Fax Vol. 4 No

16 Wafer Box Desiccator These desiccators are designed specifically to maximize storage efficiency of standard lot boxes used for 200mm and 300mm wafers. They feature the same advanced technology features of standard Terra desiccators, including the most efficient sealing techniques available. For optimal performance, select the optional stainless steel door frames, which extend cabinet life and improve sealing performance through the use of one-piece, non-adhesive gaskets. For 200mm Wafers No. Of Chambers Capacity* Acrylic** Static-Dissipative PVC A 4, A 9, A 2, A 5, For 300mm Wafers A 3, A 7, A 2, A 3, * 200 capacities based on Empac No. TR-08A (four boxes per chamber). 300 capacities based on Empac No. SX (two boxes per chamber) ** Acrylic is damaged by alcohol and other cleaning agents. Optional Features Cabinet Style (No. of Chambers) Door Frames See page 2 Stands* Stainless Steel A A A A *Includes levelers. Raises cabinet 4". No A (for 300 mm wafers), shown with optional stainless steel door frames. No A (for 200mm wafer carriers), shown with optional stainless steel door frames, humidity controllers, and stand. Portable Desiccators A convenient, contamination-free, economical carrying container for moisture-sensitive devices Stackable design permits space-saving storage Optional quick-connect and Automatic RB (Relief/ Bleed) Valve allow nitrogen purge for a particle-free, lowmoisture environment Static-dissipative PVC option ensures ESD-safety, eliminates particle attraction to ensure clean surfaces RH/Temperature Data Logger. Get a complete record of storage conditions see page 19 QuickQuote Planner quickly configures a system to your specifications: A B C D All models shown with standard access doors. Select stainless steel door frames for extended service. Specifications Portable Desiccators Accessories T Outside Clear Acrylic* Static Dissipative Amber Acrylic* 304 Stainless Steel YP Dimensions PVC Door Frames (W" x D" x H") E A 12 x 12 x A B 10 x10.5 x A C 12 x 6 x A D 20 x 6 x A * Acrylic is damaged by alcohol and other cleaning agents. Optional Features: Quick Connect Fitting Installed, requires RB Valve Automatic RB Valve Installed; see page B Thousands of Critical Environment Solutions:

17 Faraccator Static-Safe Desiccators These desiccators employ a Faraday-cage design that completely shields stored parts against electrostatic charges. Static-dissipative PVC construction controls surface charges and the particles they attract (acrylic models also available). All models come with removable stainless steel trays mounted on noncontaminating runners. Select models with or without stainless steel insert packages, which provide convenient storage bins for 2" waffle (die) packs. Configurations also available for 3"-deep and 5"-deep trays click on Desiccators at TerraUniversal.com for complete ordering information. Single chamber-width models, shown with optional gas controls and castered stands. See ordering chart for double chamber-width models. Optional Features (see page 18 for nitrogen controllers) Cabinet Width Door Frames See page 2. Stainless Steel Stand (with levelers) 4" H 12" H " A " A " A " A All models include removable stainless steel trays; inlays included on select models Tray Type Load Capacity: 35 lbs./tray Number of Chambers (doors) Cabinet Style: Single Chamber Width (13 1 8" or 17") With Inlays Without Inlays For 2" Waffle Pack Storage 10 3 /4 or 14 3 / /4 or 14 3 / /4 2 3 Trays Per Chamber 18 3 /4 3 Trays Per Chamber Specifications Cabinet Style: Double Chamber Width (26.5 " or 34.25") With Inlays Without Inlays For 2" Waffle Pack Storage 10 3 /4 or 14 3 / /4 or 14 3 / /4 2 3 Trays Per Chamber 18 3 / Trays Per Chamber Number of Sliding Trays Drawer Inside Dimensions W x D x H (inches) * For enhanced contamination control, select Faraccators made of Static-Dissipative PVC. ** Acrylic is damaged by alcohol and other cleaning agents. Cabinet Overall Dimensions W x D x H (inches) Clear Acrylic** Faraccators Faraccators Static Dissipative* PVC Faraccators x x x 22 x A 1, A 1, x x x 22 x A 2, A 3, x x x 22 x A 3, A 5, x x x 22 x A 4, A 6, x x 2 17 x 22 x A 1, A 2, x x 2 17 x 22 x A 2, A 4, x x 2 17 x 22 x A 4, A 6, x x 2 17 x 22 x A 5, A 7, x x x 22 x A A 1, x x x 22 x A 1, A 2, x x x 22 x A 2, A 4, x x x 22 x A 3, A 5, x x 2 17 x 22 x A 1, A 1, x x 2 17 x 22 x A 2, A 3, x x 2 17 x 22 x A 3, A 4, x x 2 17 x 22 x A 3, A 6, x x x 22 x A 2, A 3, x x x 22 x A 4, A 6, x x x 22 x A 6, A 10, x x x 22 x A 8, A 12, x x x 22 x A 2, A 4, x x x 22 x A 5, A 8, x x x 22 x A 8, A 11, x x x 22 x A 10, A 15, x x x 22 x A 1, A 3, x x x 22 x A 3, A 5, x x x 22 x A 4, A 8, x x x 22 x A 6, A 10, x x x 22 x A 2, A 3, x x x 22 x A 4, A 6, x x x 22 x A 5, A 9, x x x 22 x A 7, A 12, To Order, Call or Fax Vol. 4 No

18 Custom Series 300 Stainless Steel Desiccator Ref. No Custom Electropolished Stainless Steel Pass-Through Desiccator Ref. No Double-Agent Desiccator No Desiccator storage inside a high-security, fire-rated safe Heated Dehydration Chamber, No A Smart control system maintains temperature and %RH set points. Optimized to Your Requirements Visit Terra s web site for hundreds of innovative desiccator solutions to unique storage needs. QuickQuote Planner quickly configures a system to your specifications: Nitroplex Humidity Control System Configured for multi-plexed RH control and datalogging for 20 chambers. Ref. No NP 16 Thousands of Critical Environment Solutions:

19 Epoxy Tube Sheet Support Core Outer Case Enriched Nitrogen Product Gas Process Gas Generators and Dryers End Plate Feed Air O-Rings Hollow Fibers Oxygen-Enriched Air Nitrogen Generator Separation Membrane Reliable, Hassle-Free Nitrogen Source! Terra s gas generators and gas dryers provide several ways to produce a dry, particle-free environment inside glove boxes, desiccators, and other enclosures. Membrane separation systems operate with no moving parts and require almost no maintenance. The Nitrogen Generator uses this technology to provide a reliable source of clean, dry nitrogen. Nitrogen Generators Purity vs. Flow Rates (@100 PSI inlet feed, 72 F*) Model Purity 99% 98% 97% No A 7.4 CFH 10.2 CFH 12.5 CFH No A 49.0 CFH 65.0 CFH 75.0 CFH No A CFH CFH 223.0CFH * Higher flow rates can be achieved with higher feed temperature (see Terra s process gas heater, No ). B Dryex 80 No A No A No A A Nitrogen Generator C Dryex 10 Comparative Guide to Terra Gas Dryers Product Design Type Outlet Flow Capacity A. Nitrogen Generator B. Dryex 80 Gas Dryer C. Dryex 10 Generator Membrane Membrane Membrane See performance chart SCFH PSIG Service Requirement Air Compressor (# ) Air Compressor (# ) Air Compressor (# ) Prefilters Included Yes (micro-fiber& coalescing) Yes (micro-fiber & coalescing) Yes (micro-fiber & coalescing) Overall Dimensions Recommended Application (W x D x H) 18 x 18 x Gloveboxes, desiccators & N A 12, x 12 x based process equipment in labs A 6, x 12 x 35.5 where N 2 is preferable to dry air A 3, Low-humidity applications 24 x 12 x (in gloveboxes or desiccators) , where clean, dry air is acceptable Ideal source of purged gas in 16 x 7.25 x 6.5 moisture-sensitive storage , and processing applications To Order, Call or Fax Vol. 4 No

20 Environmental Control Systems A Miniaturized humidity displays D Actual Size: 7/16" x 7/16" x 1.5" B C E A. NitroPlex Multiplexed Humidity Controller See page 4 B. Desiccator Dual Purge System Provides variable-flow gas purge to block out moisture and contaminants. Switches to high-flow purge to compensate for pressure drop-out or rising humidity levels. Requires RB valve for safe operation. Dual Purge System , (110/220VAC, 50/60Hz) Sensor Switch (order one per desiccator door) C. NitroWatch Humidity Controller Operates together with the Dual Purge System to maintain a userdetermined humidity level down to 0% RH. Also displays current humidity level. Control Unit A (draws power from Dual Purge) Humidity Sensor A (order one per cabinet) D. Automatic RB (Relief/Bleed) Valve Automatically relieves pressure build-ups to ensure safe operating conditions with Terra s gas control systems. One valve recommended per storage chamber. Model Shown B RB Valve with Exhaust Fitting A Allows connection of.25" exhaust tubing. E. Flowmeters For static control of nitrogen purge in small benchtop desiccators. Note: Because flowmeters cannot vary nitrogen flow in response to operating conditions, they increase nitrogen expenses and are not recommended for large cabinets. Flow Range 1 10 SCFH SCFH F. Desiccator Ionizing Modules These low-voltage ionizers minimize EMI/RFI and safety hazards. Emitters, mounted in a 304 stainless steel housing in the desiccator plenum chamber, direct balanced streams of positive and negative ions to safely neutralize static charges. Full information at TerraUniversal.com. F G F G. 304/316 Electropolished Stainless Steel LiftLatches Terra s LiftLatches eliminate rotary motion that strains hinges and gaskets. Standard cabinets include chrome-plated latches. Under heavy use, however, plated latches can scratch and eventually expose corrosion-prone metal. For optimal cleanliness in high-use environments, upgrade to all-stainless steel models. 304 EP Stainless Steel Upgrade Models* Retrofit Models** EP Stainless Steel Upgrade Models* Retrofit Models** * Upgrades must be ordered together with the associated desiccator cabinet. ** Retrofit latches use the same mounting holes and hardware as standard latches for fast, easy installation. 18 Thousands of Critical Environment Solutions:

21 H. Adjustable Support Rack This stainless steel rack is ideal for storing carrier reels, screen frames, and similar items of various heights and thicknesses. Adjustable supports are positioned in 0.25" increments along the support frame. Rack (7.75"W x 23.5"L) "H Support "H Support I. Humex 2 Humidifier Provides inline humidification of nitrogen or other process gas being fed into a desiccator. Quick vaporization module eliminates moisture sputtering. Humex 2 110VAC, 50/60 Hz , Humex 2 Humidity Sensor A J. Adjustable Shelf Supports Lends strength to any chamber without taking up valuable space. 15" to 26" " to 35" K. IC Tube Inserts Adapts a standard Adjust-A-Shelf Desiccator for IC tube storage. For Shelf ID Acrylic Dissipative PVC (See page 8) 14.5" x 14.5" " x 14.5" " x 21" , H J I K L. DesiTray Drying System These DesiTrays create a convenient dry storage environment inside any Terra desiccator, maintaining a humidity level down to 5% RH. Their low-profile design allows insertion below adjustable shelving, consuming virtually no storage space. The noncontaminating stainless steel housing contains your choice of silica gel or molecular sieve. To regenerate the DesiTray, simply heat it inside any appropriate lab oven until the indicating desiccant turns blue. Stainless Steel DesiTray Order one/chamber. Each holds two pounds of desiccant (order below) Silica Gel (20-lb. can) Molecular Sieve (20-lb. can) M. Temperature/Humidity Gauge Ideal for monitoring humidity. Includes installation N. Imperial V Mechanical Convection Oven Maximum Temperature: 270 C. Ideal for regeneration of DesiTray. L No Nitrogen Required! DesiTrays convert a Terra Desiccator into a low-rh Drying Cabinet Silica Gel Molecular Sieve Power 120VAC, 50/60Hz, 15.8A , VAC, 50Hz, 7.9A , M O. RH/Temperature Data Logger USB device provides a convenient record of storage conditions! Records data at selected intervals. Download to computer to display in several formats O Low-cost temperature & humidity monitoring N Perfect for desiccant regeneration To Order, Call or Fax Vol. 4 No

22 General Purpose Storage Cabinets Economical storage cabinets are ideal for many laboratory, cleanroom and stockroom applications HEPA-filter/blower option provides a continuous downstream of particle-free air Select acrylic for full visibility and economy, or polypropylene for strength and chemical resistance Clean, Durable, Economical All cabinets feature double full-height access doors that require minimal clearance space. The durable hinges are spring-loaded and, together with gaskets, ensure a tight seal and a clean environment for stored materials. For critical contamination-control requirements, select a model with an integral filter/blower module. This unit, mounted to the top of the cabinet, features a 740 CFM variable speed impeller that directs a continuous stream of HEPAfiltered air downward through the storage area. All models with HEPA filter/blower modules feature shelf perforations to allow air distribution throughout the cabinet. They are available with either acrylic or static-dissipative PVC doors (dissipative PVC offers complete visibility in addition to dissipative characteristics and excellent chemical resistance). HEPA Filters ULPA Filters 99.99% efficient at 0.3µm particles % efficient at 0.12µm particles Casters Set of four, two with locking brakes. Raise stands an additional 3" off the floor Silica Gel Type C Polypropylene Cabinet with Filter/Blower HEPA Filter A B C D Molecular Sieve DesiTray Renewable Drying Tray Humidity to 5% RH; See page 19. Type D Available with amber acrylic and germicidal lights Perforated shelves on models with filter/blowers optimize air flow. Type D Acrylic Cabinet with Filter/Blower Polypropylene Storage Cabinets T No. Overall Cabinets Without Filter & Blower Cabinets With Filter & Blower** Corresponding Y of Dimensions* P Acrylic Doors*** Static Dissipative Acrylic Doors*** Static Dissipative Stands Tiers (W x D x H inches) (Includes levelers) E PVC Doors PVC Doors A x 20 x A 1, A 1, B x 20 x , A 1, A 2, C x 20 x , , A 2, A 2, A x 15 x A 1, A 1, B x 15 x A 1, A 1, C x 15 x , , A 2, A 2, A x 15 x A 1, A 1, B x 15 x , , A 1, A 2, C x 15 x , , A 2, A 2, A x 29 x , , A 2, A 2, B x 29 x , , A 2, A 3, B x 13.5 x A 1, A 1, D x 13.5 x , A 1, A 2, B x 15 x A 1, A 1, D x 15 x , , A 2, A 2, Acrylic Storage Cabinets A x x A 1, C x 14.5 x A 1, B D x 17 x A 1, B * Without Filter/Blower Module. ** Order desired filter separately. Stainless Steel housing increases overall height by ". *** Acrylic is damaged by alcohol and other cleaning agents. 20 Thousands of Critical Environment Solutions:

23 Custom work is no problem simply call Terra with your specifications Heated Processing Chamber Ideal for work with biological samples, microelectronics-based surgical tools, medical implants, and other critical components requiring aboveambient calibration or testing Recirculation system ensures uniform heating of the internal environment up to 140 F Transparent polycarbonate front and sides allow full visibility of chamber Hinged access door with PVC parting curtain allows introduction of large materials when opened Specifications Dimensions: 19"W x 24"D x 15"H Materials: Polycarbonate (front and side of processing chamber); 304 stainless steel (blower/heater housing and diffusers) Blower: 230 CFM motorized impeller with automatic thermal protection (adjustable C) Heated Processing Chamber $ Each 110VAC/60Hz A 5, VAC/50Hz A-220 5, Humidity Accuracy: ± 3%RH within ± 20% of ambient Temperature Accuracy: ± 2 F within ± 10 F of ambient Ref. No A Available in acrylic or stainless steel F ambient F cabinet %rh ambient %rh cabinet RH/Temperature Stability Chamber Humidifier AC/Heater This acrylic cabinet is customized for storage of polycarbonate films used for high-precision screening of circuit boards. It maintains critical relative humidity and temperature levels to prevent dimensional aberrations that result from exposure to humidity and temperature fluctuations. Air circulates horizontally across the shelves that hold the film. As air exits the storage area, it passes through an air conditioning/ heating module that conditions it to within ± 2 F of the temperature set point. In Top View addition, the continuously operating A/C module removes moisture to keep the %RH level within ± 3% of the set point. If humidity falls too low, an ultrasonic humidifier cycles on to add the proper amount of water vapor. If the temperature falls too low, the heater module cycles on. A water filtration system removes contaminants from the humidification feed water to eliminate the chance of mineral deposits or other vaporborne contaminants. As the process air exits the RH/temperature modules, an impeller blower draws it into an intake plenum area and forces it uniformly back through the storage area pm 6 pm 12 am 6 am 12 pm 6 pm 12 am 6 am 12 pm 6 pm 12 am 6 am 12 pm 6 pm 12 am 6 am 12 pm 6 pm 12 am 6 am 12 pm 6 pm 12 am 6 am 12 pm Day 1 Day 2 Day 3 Day 4 Day 5 Day 6 To Order, Call or Fax Vol. 4 No

24 Cleanroom Shelving A. Super Adjustable Wire Shelves Just lift the release on each corner, adjust your shelf at precise 1"-increments, and clamp the release lever shut. In seconds, you can optimize your storage system to changing load requirements, with no tools, no wasted time, and no wasted space. For shelf grounding in static-sensitive applications, select conductive sleeves below. A More sizes available A. Super Adjustable Wire Shelves Dimensions Chrome Plated Stainless Steel W x L (inches) 18 x x x x x x x x x x x x $/Pkg. Replacement Sleeves/Wedges (pack of 4) Conductive Sleeves (pack of 4) B. C. Cleanroom Shelving with Split-Sleeve Assembly This InterMetro shelving is fabricated of noncontaminating, cleanroom-compatible materials. Order aluminum split sleeve for shelf grounding. B C SiteSelect Posts Height Stationary *Mobile (inches) Chrome Plated Stainless Steel Chrome Plated Stainless Steel * Make it mobile Select the mobile post from chart above. Casters available at TerraUniversal.com B. Solid Shelves C. Wire Shelves Dimens. W x L (in) Flat Stainless Steel Chrome Plated Stainless Steel 18 x x x x x x x x x x x x Plastic Split Sleeve Assembly Included with each shelf. Aluminum Split Sleeve For grounding type B/C shelves. $/Pkg Wall-Mount Shelving Order quantities indicated below to create an above-bench storage unit. Posts are 33.6"H and allow shelf adjustment. Metroseal 3 coating inhibits growth of bacteria, fungus and other microbes. Wall mounting hardware not included (varies according to wall type). Stainless Steel Antimicrobial Metroseal 3 Shelves (2*) 18"D x 36"L "D x 48"L Shelf Supports (4*) Shelf Posts (2*) * Order quantity indicated in parenthesis to create one shelving unit 22 Thousands of Critical Environment Solutions:

25 Change Room Racks A./B. Upright and Wall-Mount Garment Racks Electropolished stainless steel construction and open wire design promotes ultra-clean conditions. Features unique hanger capture mechanism to ensure proper positioning at 3" intervals and to deter theft. Both models include electropolished stainless steel hangers; upright models include leveling feet. To meet ESD requirements, select aluminum split sleeves (on facing page). All units are 24"D; upright models are 74"H. No. of A. Upright B. Wall-Mount Width Hangers 36" " , " , " , C. Gowning Bench Made of 14-gauge, 304 stainless steel, with stainless steel leveling footplates. Dimensions 16" x 36" " x 48" " x 60" A D. Economy Garment Rack Made of chrome-plated wire racks, this configuration of Metro Super Erecta shelving creates a versatile garment storage rack. See TerraUniversal.com for other shelving. C B D Required Quantity Item " H Corner Post " x 48" Chrome Wire Shelf 4 Footplate Chrome Support Frame Chrome Hanger Tube Closed Top Loop Chrome Hanger Starsys Mobile Workcenters Moving? Take your lab with you! Starsys lets you choose from an array of modular, mobile units to fit your changing work and space requirements. Fast, efficient lab installation Easy reconfiguration Flexible door, drawer and cabinet designs Corrosion-proof, noncontaminating polymer construction Greater storage density in a smaller footprint Visit TerraUniversal.com for complete information! To Order, Call or Fax Vol. 4 No

26 Visit TerraUniversal.com for other configurations. Cleanroom and Lab Storage Cabinets A./B. Reticle Storage Cabinet for Vertical Storage Open-structure shelves mounted on noncontaminating, low-friction runners provide full access. Each shelf contains three removable stainless steel trays. Order filter/blower separately. Vertical Storage: Photomask/Reticle Cabinets Stainless Steel Electropolished Stainless Steel A No , with optional Filter Module and casters B No , with optional Filter Module and Casters ,125.00* ,088.00* ,169.00** ,966.00** * 28.5"W x 25"D x 38"H (Capacity: 189 reticles 7" x 7" x.125"d) ** 28.5"W x 25"D x 62"H (Capacity: 378 reticles 7" x 7" x.125"d) Filter/Blower Module (Includes HEPA filter). 110VAC, 60Hz , VAC, 50Hz , Panel Set Includes two side panels, one rear panel, and hinged door. Acrylic Dissipative PVC * * ** ** 1, * For 38"H models ** For 62"H models C Wire Shelf Cabinets Stainless steel or laminate enclosures, available with HEPA filtration modules C. Supplies Cabinet Adjustable shelves hold garments, wipers, and other cleanroom supplies. See page 28 for ordering information. D F. Wafer Box Storage Cabinets Electropolished stainless steel cabinet features adjustable shelves to accommodate many box sizes. Wafer Storage Cabinets Overall Dimensions D. 47"W x 20"D x 67"H ** 13, E. 47"W x 26"D x 77"H ** 13, F. 47"W x 26"D x 41"H * 5, G.*** 47"W x 26"D x 41"H ** 5, * Solid not shown D No E No F No Thousands of Critical Environment Solutions:

27 Racks and Shelving From Eagle Group These economical cleanroom and laboratory shelves use four truss wires for greater strength. Posts allow shelf height adjustment at 1-inch increments. Plastic split sleeves are included with each shelf; for grounding in ESD-sensitive applications, select optional aluminum split sleeves. Eaglegard Hybrid Epoxy: Durability and Microbial Protection Shelving and posts featuring Eaglegard hybrid epoxy coatings inhibit the growth of mold, microbes and other organic contaminants. These units carry a 15-year limited warranty. Aluminum Split Sleeve For grounding. One per shelf required Shelves from Eagle Dimens* Wire Shelves Solid Shelves W x L (inches) Chrome Plated Stainless Steel Eaglegard ** Stainless Steel 14 x x x x x x x x x x x x * Each shelf includes 4 pairs of plastic split sleeves. ** Hybrid epoxy coating resists growth of microbes. 4-Inch Shelf Ledges for Wire Shelves Length* Chrome Stainless Steel (inches) * Other sizes available Polymer 5" Stem Casters Use with Mobile Posts (below) to convert your shelves into a mobile shelf cart. Swivel Caster Caster with Brake Posts Adjust shelf height at 1" increments Height (inches) Chrome Plated Filtered Curing/Drying Cabinet Provides continuous wash of filtered air for clean, controlled adhesive curing, PC board drying, and parts storage Exhaust purification system (optional) removes odors and chemical vapors from air-stream for safe indoor release Stainless Steel Drying/Curing Cabinets: Inlet Filter/Blower and Exhaust Filter No. of Acrylic Chambers 110VAC, 50/60Hz Overall Dimensions (W" x D" x H") Eaglegard Chrome Plated Stainless Steel Static-Dissipative PVC 110VAC, 50/60Hz x 24 x A 2, A 4, x 24 x A 3, A 6, x 24 x A 4, A 7, x 24 x A 5, A 11, Includes inlet filter housing with one 740 CFM blower and outlet (exhaust) housing for one filter (order filters separately) 2 Includes inlet filter housing with two 740 CFM blowers and outlet (exhaust) housing for two filters (order filters separately) Eaglegard For mobile storage, select the correct post and casters above. HEPA Filter Rated 99.99% 0.3µm particles Stainless Steel Shelves (perforated) No A To Order, Call or Fax Vol. 4 No

28 A Three-Shelf Cart (No ) Microban Antimicrobial Formulation Available! B Three-Shelf Deep-Ledge Cart (No ) Microban Antimicrobial Formulation Available! Cleanroom and Lab Utility Carts A. Polymer Utility Carts with Adjustable Shelves Made of tough, chemical-resistant, high-density polyethylene, an extremely resilient polyolefin that provides excellent chemical resistance and wipes down easily. Raised ship s edge lip (.44"/11mm) contains spills. Height: 33.25" (other sizes and configurations available). Microban antimicrobial models available (see item C on facing page). 2-Shelf Models Blue W" x L" 18 x A x A x A Shelf Models Blue W" x L" 18 x A x A x A B. Polymer Deep Ledge Carts with Adjustable Shelves Similar to models above, but with 2.75" (70mm)- deep shelf ledges for enhanced spill containment. All models are 41"H. Color: Blue. W" x L" Configuration 21.5 x shelf x shelf x shelf x shelf D Series 100 Two stainless steel solid shelves (see chart below) E Series 200 Three stainless steel solid shelves (see chart below) Dozens more at TerraUniversal.com! F Series 400 Two chrome wire shelves and one stainless steel solid shelf. G Series 600 Two wire shelves, chrome or stainless steel. H Series 700 Shown with optional bin. Three wire shelves, in a choice of chrome or stainless steel. Ordering Information D. Series 100 E. Series 200 F. Series 400 G. Series 600 H. Series 700 Dimensions (W" x L" x H") Caster Dia. Stainless Steel Wire Shelves Stainless Steel Wire Shelves 18 x 24 x 38 4" x 30 x 38 4" x 36 x 38 4" x 36 x 39 5" x 36 x 39 5" Thousands of Critical Environment Solutions:

29 Cleanroom and Wafer Fab Carts C. Polymer Carts with Microban Antimicrobial Product Protection (not shown) Built-in Microban formulation inhibits growth of bacteria, mold and mildew. Construction is otherwise identical to corresponding carts on this page. For Molded-Handle Units (Style A left) W" x L" Configuration 18 x 28 2-shelf x 28 3-shelf x shelf x shelf For Deep-Ledge Units (Style B left) W" x L" Configuration 21.5 x shelf x shelf D H. Super Erecta Carts with Adjustable Shelves Many designs available with chrome-plated and stainless steel wire and solid shelves. I. Wafer Box Carts Electropolished stainless steel for Class 1 cleanliness. Spring-loaded casters for smooth rolling. Rod Shelves , Perforated Shelves , J. Dead Man Cart Features polypropylene construction with a spill containment area. Dead Man braking system prevents carts from rolling while unattended , K. Bottle Cart Electropolished stainless steel construction, clean casters, and ergonomic design make this cart ideal for safely transporting 5' process gas canisters. Includes retaining chain. 12.3"W x 31"D x 57"H , L./N. Acid Transport Carts Made of stress-relieved polypropylene, these carts resist acids and corrosives used in wet processing applications. All three designs feature recessed receptacles that collect spills into an easy-empty containment reservoir. Acid-resistant neoprene swivel casters are included. Type L Type M Type N features removable 7" x 7" inserts is ideal for larger, heavy containers. Compartments: 17" x 26.5" x 17" and 17" x 36.5" x 14" features 24 angled 7" x 7" slots for one-gallon bottles and one top compartment for gloves, safety glasses and other small items. Polypropylene Acid Transport Carts Type (see photos) No. of Compnts. L , , M , N , Floor-Lock Brake I J B L Model Shown: No Rod Shelf Cart I K M N Model Shown: No Perforated Shelf Cart To Order, Call or Fax Vol. 4 No

30 Garment and Supplies Cabinets Now in Stainless Steel and Powder-Coated Steel Designs Type A: Garment storage only. Type B: Garment storage and adjustable shelves (order desired shelf type separately). Type C: Adjustable shelves only (order desired shelf type separately). Type D: Includes two chrome-plated wire shelves adjustable in 1" intervals. All models are fabricated of stainless or cleanroom powder-coated steel. All except type C are available with overhead HEPA filter/blower module that showers contents with particle-free air to dislodge and wash away contaminants. HEPA-filtered models dislodge and remove particles A No B with optional hangers B No B with optional hangers and shelves C No B with optional shelves D No B, two shelves included Powder-Coated Steel (see stainless steel models on facing page) Specifications Powder-Coated Steel Cabinets* Corresponding Shelves Type Outside Dimensions (W" x D" x H") Powder-Coated Steel w/ Acrylic Doors Powder-Coated Steel w/ Dissip. PVC Doors Polypropylene Shelves Powder-Coated Steel Shelves Filter/Blower 36 x 20 x B 2, B 3, A Cabinet Only 36 x 20 x B 2, B 2, Filter/Blower 36 x 24 x B 2, B 3, Cabinet Only 36 x 24 x B 1, B 2, Filter/Blower 48 x 20 x B 3, B 4, A B Cabinet Only 48 x 20 x B 3, B 3, A Filter/Blower 48 x 24 x B 3, B 4, A Cabinet Only 48 x 24 x B 2, B 3, A Cabinet Only 30 x 14 x B 1, B 2, A C Cabinet Only 30 x 18 x B 1, B 2, A Cabinet Only 36 x 20 x B 1, B 2, A D Filter/Blower x 26.5 x B 3, B 4, Additional Wire Shelves (Type D) Cabinet Only x 26.5 x B 2, B 3, "W x 24"D * Includes built-in stand with leveling feet. Steel-reinforced doors with locks available on all models ordering information at TerraUniversal.com 28 Thousands of Critical Environment Solutions:

31 More Gowning Area Products TerraUniversal.com A/B. UltraClean Cylinder Tube Garment Racks Made of high-grade electropolished stainless steel, these racks feature sloping 1 1 /2"-diameter cylindrical tube frames that are easy to wipe down. Fixed position design keeps garments firmly in place. See ordering chart below. C. UltraClean Square Tube Garment Racks These electropolished racks can be disassembled for easy storage and shipping. They are available with one or two hanger rods, in configurations for closedloop or detachable hangers (photos C and D). See ordering chart below. D. Fixed Position Hanger Rods This style is available with square-tube racks. Slots at 3" increments keep garments from bunching together. Requires fixed-position hangers (photo G). See ordering chart below. Cylinder Frame Rack (1 1 2"-diameter tubes) Overall height: 76" For use with detachable hangers. Electropolished Stainless Steel Garment Storage Racks Type See photos Dimensions Hanger Capacity (order separately) above Single Dual Rack Rack C. Sliding Position (order closed loop or detachable hangers) A. B. & D. Fixed Position (order fixed position hangers) E F G B Closed Loop Detachable Fixed Position Electropolished Cleanroom Hanger Type For Rack Type E C F A, B or C G A, B or D Square-Tube Rack Sliding position style for use with closed-loop or detachable hangers. Overall height: 74" A/B. Cylinder Tube Frame C/D. Square Tube Frame (order hanger separately) A. Single-Rack B. Dual-Rack Single-Rack Dual-Rack Fixed position style 48"W x 24"D , "W x 24"D , "W x 24"D , "W x 24"D , , "W x 24"D , , , "W x 24"D , , , , "W x 24"D , , , , "W x 24"D , , , , A C D Stainless Steel Garment & Supplies Cabinets (see powder-coated steel models on facing page) Specifications Garment Storage Cabinets* Shelves Type Outside Stainless Steel w/acrylic Stainless Steel w/ Dissip. Stainless Steel Dimensions (W" x D" x H") Doors PVC Doors Filter/Blower 36 x 20 x A 6, A 7, A Cabinet Only 36 x 20 x A 4, A 5, Filter/Blower 36 x 24 x A 6, A 6, Cabinet Only 36 x 24 x A 4, A 4, Filter/Blower 48 x 20 x A 8, A 8, A B Cabinet Only 48 x 20 x A 7, A 7, A Filter/Blower 48 x 24 x A 6, A 7, A Cabinet Only 48 x 24 x A 5, A 6, A Cabinet Only 30 x 14 x A 3, A 3, A C Cabinet Only 30 x 18 x A 3, A 4, A Cabinet Only 36 x 20 x A 3, A 4, A D Filter/Blower x 26.5 x A 6, A 7, Cabinet Only x 26.5 x A 5, A 5, * Height includes built-in stainless steel stand with leveling feet. Type D Stainless Steel Cabinet (No A, shown with one optional shelf) To Order, Call or Fax Vol. 4 No

32 Protects microscope samples! B Install next to hand washer C Accommodates multiple glove sizes or materials A D For gloves, hoods, face masks* E Ideal for finger cots F Organizes small parts G H Easy-access wiper dispensing* I Hinged top keeps wipers clean J K Garb and Parts Dispensers Space-Saving Convenience! These handy dispensers save space and organize gloves, safety glasses, wipers, hats, and other garb. They re perfect benchtop storage bins for small parts used in cleanroom processing. Select clear acrylic or staticdissipative PVC, which eliminates static charges and the particles they attract. Item (see photos) Dimensions Acrylic Static-Dissipative PVC W x D x H, in A. SneezeGuard 7.12 x x B. Wall-Mount Glove Dispenser (single) 16.5 x 12.5 x C. Wall-Mount Glove Dispenser (triple) 16 x 11.5 x D. Benchtop Glove Dispenser* 12 x 6 x E. File Holder (4 slots) 10.5 x 5 x F. Dispensing Bins 5 x 6.25 x G. Apparel Dispenser 48.5 x 24.5 x , , H. Multi-Chamber Dispenser x 8 x I. Wiper Dispenser (enclosed) 12 x 9 x J. Wiper Dispenser (open top) 10.5 x 14.5 x K. Safety Glasses Dispensers Holds: x (all are 5.75"D) x x Other sizes available x call Terra! x *Now available in stainless steel see facing page x x , x , , Thousands of Critical Environment Solutions:

33 Stainless Steel Lab Aids A Holds up to four petri dishes L Protects fragile pipette tips B Models for loose or packaged gloves M Clean, dry benchtop storage C Bench or wall-mount glove dispenser E Bootie dispenser D Wiper dispenser F Swab dispenser Stainless Steel Cleanroom and Lab Aids Convenient racks, dispensers and tools. Dozens of other models at TerraUniversal.com N For Gilson Pipetman and Drummond Pipette-Aid models O Q P Holds plates over 6" wide Item (see photos) includes Dimensions Electropolished 304 SS anit-microbial coating W x D x H, in. A. Glove Dispenser, 27 x 7 x 24 (3 compartment) , Wall-mount 34.5 x 8 x 24 (4 compartment) , B. Glove Dispenser, 24 x 8 x 24 (3 compartment) Wall-mount 32 x 8 x 24 (4 compartment) , C. Glove Dispenser 12 x 6 x D. Wiper Dispenser 12 x 9 x x 9.5 x E. Bootie Dispenser 15 x 6 x F. Swab Dispenser 6 x 4 x G. Glove Dispenser 5.5 x 3.75 x 20 (2 boxes) A-2 H. Glove Dispenser 5.5 x 3.75 x 30 (3 boxes) G. K. I. Glove Dispenser 5.5 x 3.75 x 10 (1 boxes) Glove J. Glove Dispenser 12 x 3.75 x 10 (2 boxes) Dispensers many K. Glove Dispenser 18 x 3.75 x 10 (3 boxes) sizes available. L. Petri Dish Incubation Tray 5.37 x x M. Pipette Support Rack 8.88 x 9.2 x N. Electrophoresis Gel Plate 6.25 x 7.75 x Drying Rack O. Microliter Pipettor Racks 9 x 5 x P. Microliter Pipettor Racks 9 x 7.82 x Q SS Clipboard 12 x A To Order, Call or Fax Vol. 4 No

34 More Storage Solutions Complete Specs and Pricing: TerraUniversal.com No No No No Universal Screen Frame Storage System Keeps screen frames clean and organized ESD-Safe Enclosed Electronics Cart, No Made of static-dissipative PVC; use DesiTray or N 2 purge for moisture control Stainless Steel Storage Cabinet, No Vapor-resistant gaskets for chemical storage Gowning Room Bootie Cabinet, No B CleanStocker, No Horizontal flow of HEPA-filtered air for clean drying Acid Storage Cabinet, No One-piece polyethylene body with spill tray Sure-Grip EX Safety Can Storage Cabinets meet OSHA/NFAA standards Bottle Safety Stocker, No No A and No A 32 Thousands of Critical Environment Solutions:

35 from the Expert in Critical Environments Cleanroom garments courtesy of W. L. Gore & Associates Chemical Safety Cabinets, No Acid-Resistant Polypropylene, No Dozens of Configurations, No A F. Electropolished Step Stools and Ladders Include spring-loaded safety casters that retract under load. Perforations limit particle accumulation. Custom sizes and 316 SS available. A B All include removable liner F 304 Stainless Steel Step Stools and Ladders Top Platform (W" x D") Overall Dimensions (W" x D" x H") No. of Steps G K. Cleanroom Waste Receptacles Fabricated of 304 electropolished stainless steel, they provide years of constant service without contami nation. Their no-spring foot pedal allows hands-free operation, and the tight-fitting, gasketed lid forms a nearly air-tight seal to contain waste safely. Electropolished 304 Stainless Steel A 30 x x 20 x A-2 1, B 30 x x 28 x A-2 2, C 30 x x 24 x 60 3* A-2 2, D 30 x x 30 x 70 4* A-2 3, E 30 x x 40 x 80 5* A-2 4, F 30 x x 76 x 86 5* A-2 4, * Includes safety handrail. C D not shown New soft-close feature minimizes turbulence when top closes. Polypropylene H I J K G Cleanroom Waste Receptacles Corresponding Rigid Liner Type Capacity Dimensions Ship. Wt. Polypropylene Electropolished 304 Stainless Ship. Wt. (Gallons) W x D x H (in.) (lbs.) Steel (lbs.) G dia. x 17 H H 7 12 x 12 x I x 12 x J x 15 x K x 19 x , To Order, Call or Fax Vol. 4 No

36 The Ultimate Pass-Through For Aseptic Environments! B C HEPA-filtered air jets remove contaminants A BioSafe Pass-Through Unique design eliminates cracks, corners and other contaminant traps! Seamless No cracks or other contaminants traps. Lipless Easy material transfer Easy to Clean and Sterilize Cleanroom Pass-Throughs and Air Showers Pass-Throughs and Air Showers allow contamination-free transfer of personnel and products in and out of the cleanroom. Terra offers the most comprehensive selection of designs and features available anywhere Hundreds of Standard Configurations 304/316 stainless steel chemical-resistant and static-safe plastics clean laminates HEPA air showers wall and floor-mount designs mechanical interlocks slide-up or swing doors shelves and special lighting No-Clearance Roll-Up Door Pass-Throughs Several standard sizes PLC control panel includes safety and security features electronic interlock prevent cross-contamination HEPA air showers Application-Specific Designs Fire-rated models active and passive ventilation modules remove fumes electropolished models meet the most strenuous cleanliness requirements smooth, radius corners eliminate cracks that harbor contaminants D E Custom work is no problem Terra builds to your specifications A. BioSafe Pass-Through Chambers: Uncompromising Cleanliness! Select 304 or 316 electropolished stainless steel. All continuous-seam welds with radius corners produce ultra-clean, smooth internal surfaces. Isolated interlock prevents cross contamination. Removable doors, with or without windows, can be autoclaved; polyurethane bioseal won t outgas or shed particles. Removable racks and shelves accommodate small parts. Available with antimicrobial surface. Models start under $7,000. B. Acrylic Pass-Through No C / $856, mounted to a Terra hardwall modular cleanroom. C. Stainless Steel Pass-Through No C / $4,426 models available in 15 standard sizes. D. Roll-Up Door Pass-Through No B / $12,123 PLC-controlled, electronically interlocked doors eliminate clearance requirements. E. ValuLine Air Shower No / $10,805 directs high-speed HEPA-filtered air through adjustable nozzles to remove contaminants from personnel before they enter the cleanroom. Polypropylene panels are clean and resist chemicals. Modular frame design allows easy installation either inside or outside standard Terra hardwall cleanrooms. Ventilation Modules Air-Conditioned Pass-Through 34 Thousands of Critical Environment Solutions:

37 Convert any space into a controlled environment at a fraction of the cost, in a fraction of the time! Fast-response roll-up doors Modular Cleanrooms Free-standing, all-steel structures create sturdy, versatile clean processing solutions that meet cleanliness requirements to Class 10 (ISO 3). Whatever your application, Terra delivers a pre-tested, turnkey system. QuickQuote Planner quickly configures a system to your specifications: Hardwall Designs Acrylic or static-dissipative rigid panels for full visibility Steel support frame spans up to 20 feet without internal pillars or external supports Mirror-finished stainless steel trim creates a showcase exterior A/C and humidity controls Available raised floors optimize laminar airflow Softwall Designs Portable, expandable, easy to assemble and disassemble Curtain panels and parting strip shields, in antistatic cleanroom-grade vinyl Rigid steel support frame requires no ceiling supports Casters available BioSafe All-Steel Designs Perfect for ultra-clean applications requiring frequent cleaning or sterilization Smooth interior walls with radius corners eliminate cracks that harbor germs and particles 304/316 stainless or powder-coated steel panels Negative-pressure airflow designs available for fume venting Configured to Your Specifications! Air conditioning Humidification/Dehumidification Rapid-Operation Doors Raised Floor To Order, Call or Fax Vol. 4 No

38 Work Benches and Chairs Top designs for all applications C Dampens 90% of building vibrations A Cleanroom laminate B Stainless steel Note: Benches above are pictured with optional drawer module No (3", 6" and 12" drawer height); others configurations in both plastic and stainless steel are available. D Vibration platform Work Benches select desired top (all bases feature a white powder-coated finish) Base Type Width A. Nonconductive B. Stainless (Epoxy Finish) (Depth=30") Laminate Steel Telescoping A Base Recessed C Base 25"-34" 30" C. Vibration-Free Laminate Top D. Vibration-Free Platform Work Electropolished Surface Stainless Steel Top (W" x D" x H") , A 1, x x , , A 1, x 24 x , , A 1, Visit TerraUniversal.com for other bench styles: , , , ErgoHeight Adjustable Height Tables Acid-resistant polypropylene tops Dozens of standard sizes Class 100 Static Control # Class 100 Static Control # Class 100 Static Control # Class 100 # Class 100 # E F G H I E. I. Class 100 & Static Control Clean vinyl meets Class 100 particle requirements. Static-Control chairs feature dissipative vinyl, conductive casters, and grounding chains. Specs Class 100 Static Control Class 100 Height Color E. F. G. H. Color I. Desk Black Black Blue * * * Black Bench Black Black Blue * * * Black * Quick ship models usually ship within one week! 36 Thousands of Critical Environment Solutions:

39 Work Benches and Chairs Competitor s design Hidden reinforcements minimize dead spots, add strength, and eliminate deflection bounceback, no matter how large the benchtop. QuietTop Rod-Top Benches Compare! Rods anchored by non-outgassing elastomer that eliminates welds, dampens noise and vibrations. Open-Top Perf-Top Benches Heavy-Duty All-Electropolished Stainless Steel Work Stations (800-lb. load capacity) QuietTop Rods with Full Bullnose ø 1 4" rods on 1" centers OpenTop Perforated with ErgoEdge Rounded Front ø 1 4" holes OpenTop Perforated with ErgoEdge Rounded Front ø 3 4" holes Solid Top with ErgoEdge Rounded Front Bench Size (1) A Base C Base A Base C Base A Base C Base A Base C Base (W" x D") (1) (1) (1) (1) 36 x , , , , x , , , , x , , , , x , , , , x , , , , x , , , , Ergonomic Upholstered # Ergonomic Upholstered # Ergonomic Upholstered # Urethane # Ergonomic ESD # J K L M N J. N. Laboratory Chairs Select from our large assortment of Laboratory Chairs. Types J-L are upholstered chairs built with ergonomic benefits. Types M and N meet durability and budget needs. Specs Ergonomic Upholstered Chairs* Specs Urethane Chairs** ESD Chair Height Color J. w/seat Control K. Standard L. Large Backrest Color M. N. Black Black Desk Blue Black Bench Black Blue * Available in Grade 2 Vinyl or Grade 4 Breathable Nylon. Visit TerraUniversal.com for more color options. ** More configurations available on the website. To Order, Call or Fax Vol. 4 No

40 Polypropylene Cabinet No : ideal for acids (shown with optional gooseneck faucets, spray guns, casters and duplex outlet) Wet Processing and Cleaning Cabinet Incorporates all processing components into one self-contained, easy-to-clean system Isolated control panel allows safe, convenient operation of baths, rinsers and other process modules Whatever the requirements, Terra delivers a pre-configured, tested, turnkey system These self-contained Wet Processing Cabinets are ideal for a wide range of cleaning and processing requirements. Stainless steel Cabinet No : recommended for solvents and flammable chemicals (shown with optional casters and spray gun) Standard models below include a reinforced cabinet of the specified size and material, a sliding access shield, and a fluorescent illuminator. Select sinks, baths, etchers and other processing modules to suit your application. A raised lip surrounds the work area to contain spills, and a full-length plenum sink located under the deck contains overflow for easy disposal (select plenum flush for easy cleaning). A control panel mounted to the side of the deck provides safe, convenient access to all system controls (order processing sinks and baths separately; see pricing and specifications at TerraUniversal.com). Optional Filter/Blower Module provides a vertical laminar flow of HEPA-filtered air for particle-sensitive applications. Room Air Filtered Air Exhaust Fumes Overall Width Wet Processing Cabinets (standard height = 72") Filter Blower Module Plenum Flush Ionizing Bar Work Polypropylene Stainless Includes 99.99% PVC with Area Steel efficient HEPA filter H 2 O Dimensions 115VAC, 60Hz 230VAC, 50Hz Nozzles & Valves 84" 72"W x 24"D , , , , " 96"W x 24"D , , , ,192 Note: All models listed above include an adjustable PVC sliding sash (to restrict airflow to the work area), a static pressure exhaust meter (to monitor the pressure differential in the exhaust line), and a fluorescent illuminator. All electronic controls are located on a vertical panel to the right of the work area (left side mounting may be specified at no extra charge). PLC controllers are also available; call for quotation. Features and Accessories You Specify the Process Workflow Let Terra Take Care of the Rest! Constant-temperature baths and dump rinsers in quartz, polypropylene, PVDF, 304/316 stainless steel and other high-purity, chemicalresistant materials Carboys and Reclamation Tanks FM 4910 and other plastics PLC automation Sinks, goosenecks, air/de-ionized water spray guns, aspirators and other utilities 38 Thousands of Critical Environment Solutions:

41 Polypropylene Acid/Base Etching Bench No (shown with optional processing baths and controls) Stainless Steel Solvent Cleaning Bench No (shown with optional sink, gooseneck faucet, spray gun) modular Wet Processing and Cleaning Cabinet Modular designs accommodate process baths, tanks, goosenecks, aspirators, spray guns, fire detection/suppression systems, and other system options Isolated control can be mounted above, behind or to the side of the work deck Select Vertical Laminar Flow or Exhaust Fume Workstation to control particles, chemical vapors Like the models on the previous page, these benches accommodate a complete line of baths, rinsers, cleaners and other processing modules. Terra engineers work with yours to develop a deck configuration that s right for your process. Bath controls can be mounted to the side or behind the work deck. An overhead control case extends controls forward, above the work deck, for easier operator access. Standard models below include reinforced station with modular deck panels. Room Air Filtered Air Exhaust Fumes Overall Width Work Area Dimensions Modular Wet Processing Station* Vertical Laminar Flow Hood Plenum Flush Polypropylene Stainless Order Filter/Fan Units separately PVC with DI Steel 115VAC 230VAC Water Nozzles 48" 36 x , , , , " 48 x , , , , " 60 x , , , , " 84 x , , , , * All models on this chart are designed for rear panel mounting of controllers (as shown in photo above). Call for a quotation on models with head case panel mounts. Features and Accessories QuickQuote Planner quickly configures a system to your specifications: Standard models operate with Terra s Vertical Laminar Flow or Exhaust Fume Workstations (see following page) Configure baths in a single or double row to accommodate workflow. Containment hood collects and condenses vapors To Order, Call or Fax Vol. 4 No

42 Laminar Flow Stations HEPA/ULPA-filtered enclosure provides a clean, static-safe work environment Vertical and horizontal flow stations available with powder-coated or easy-clean stainless steel finish Hundreds of standard sizes and configurations, with modifications to handle any application! Vertical Laminar Flow Station, No A, shown with optional cleanroom bench No Return air ducts minimize turbulence and backwash Available with Anti-microbial coatings for enhanced germ control. Model shown: No For complete specifications: TerraUniversal.com 40 Thousands of Critical Environment Solutions:

43 ValuLine Laminar Flow Hoods and Workstations A B ValuLine Workstation No : Complete system includes frame, workstation and hood ValuLine WhisperFlow Hood No : Polypropylene HEPA-filtered enclosure under $2,000 A. ValuLine Laminar Flow Workstations This low-cost, completely integrated workstation includes a powder-coated or stainless steel frame, stainless steel work surface, and laminar flow HEPA filtration module with tilting sash, fluorescent light, and backpressure gauge. Several sizes available, starting at under $4,000. B. ValuLine WhisperFlow Benchtop Laminar Flow Hood This all-polypropylene laminar flow hood provides a vertical flow of HEPAfiltered air to the work bench. Order desired work surface separately. Integrated polypropylene bottom include raised lip to capture chemical spills. Many sizes available. C. CleanBooth Laminar Flow Station This modular system includes a stand that support HEPA filtration modules. Select vinyl side panels, casters, and desired work surface separately. Optional UV Sanitizing Solutions UV-C lights provide 99+% bacterial and viral disinfection. C CleanBooth Laminar Flow Hood No , with side curtains and FFUs To Order, Call or Fax Vol. 4 No

44 Gloveboxes: Isolation and Containment Chambers Air Lock Provides Convenient Access. No B, shown with optional pass-through vacuum oven and low-humidity controllers Series 300 Stainless Steel Glovebox The ideal isolation enclosure for a wide range of operations requiring control of particles, humidity, and temperature. Select among several different sizes for one or two operators. Automatic humidity control systems regulate a purge of process gas to maintain user-determined %RH set point. Available in many configurations, with air locks, pass-through ovens, ionization, humidification and sterilization modules. Perfect for parts degassing, temperature and humidity testing, chemical mixing, and other processes requiring a non-reactive environment. System starts at $4, No B, shown with optional Dual Purge System, Vacuum Antechamber and Control Module Series 400 Stainless Steel Glovebox Like the Series 300 chamber shown at left, this isolation glovebox protects delicate materials against particles, humidity, static discharge, and other environmental threats. Its larger chamber size accommodates Terra s Vacuum Antechamber, which provides a practical way to remove moisture as items are moved in and out of the main processing chamber. Choose between single and twin models, with right or left-side air locks. Custom modifications are available on all Terra gloveboxes; just let us know your requirements! System starts at $10, Acrylic chamber No G Series 100 Acrylic Glovebox, shown with optional filtration module and air lock. Polypropylene No F Series 100 Polymer Gloveboxes Terra s Series 100 Polymer Gloveboxes provide a clean, low-humidity environment for critical processing operations. Their modular design lets you select the options you need for your application. Dual side access doors open inward to allow easy parts transfer from inside the chamber. Doors feature stainless steel reinforcement frames that increase the structural rigidity of the door by a factor of five. A built-in LiftLatch securely seals the door without applying lateral torque that could damage hinges. Series 100 Plastic Glovebox Series 100 gloveboxes are available in five materials: Acrylic strong, rigid material offers full visibility Static-Dissipative PVC protects against static discharge and eliminates static attractions Non-Dissipative PVC resists a wide range of chemicals, including most disinfectants Polypropylene ideal for chemical mixing or use with acids Polycarbonate strong and resistant to chemical and thermal shock Select among a full range of options for control of particles, static charges, and humidity. Systems start at $1, Thousands of Critical Environment Solutions:

45 Gloveboxes: Isolation and Containment Chambers No A (two linked together) Series 500 Full-View Glovebox This enclosure features transparent front and back panels, made of static-dissipative PVC or polycarbonate, with opposing glove ports for convenient dual-side access to work in progress. This design combines full chamber visibility with the strength of a stainless steel glovebox. It features a large chamber up to 96"W x 36"D x 30"H for work with bulky process equipment. A full range of controller systems provides protection against particles, static charges, and humidity. Terra s smart gas controllers regulate the purge of nitrogen or other process gas to maintain the humidity set point you require. Systems start at $5, No B, shown with right-side air lock Series 600 Front-View Glovebox This chamber provides a sloping front panel of transparent polycarbonate or safety glass for full visibility of work in progress. Like the Series 500 model at left, it accommodates Terra s complete line of environmental control systems to automatically maintain a particle-free, controlled-humidity, static-safe environment. Multiple chambers can be cascaded together to expand working space. Standard chamber size: 37.5"W x 29"D x 39"H. System starts at $7, Anti-Microbial Coatings Available! Ask about Terra s latest innovation for aseptic processing. Radius corners simplify cleaning, eliminate seams and cracks Insulated chambers available Series 300 Glovebox with Constant Temperature Module No Refrigerated Glovebox Ideal for many testing and processing applications, Terra Universal s Constant Temperature Control System incorporates heating and refrigeration modules that maintain a stable temperature between -25 F and 120 F inside a fully integrated glove box. The complete system consists of a compressor/condenser, a heater, and an evaporator cooler with an integral fan mounted inside the chamber. The closedloop refrigeration unit operates with CFC-free coolant and uses a RTD sensor with an internal bypass to prevent temperature overshoot. The sensor provides continuous temperature display, and a standard controller allows the user to establish a constant temperature set point. PLC-based recipes are available for multiple temperature cycles. Fully integrated systems start under $13, Insulated chambers available BioSafe Stainless Steel Glovebox This glovebox features smooth, ultra-clean interior surfaces that eliminate germ traps, making it ideal for aseptic requirements. Continuous-seam welds and rounded corners create a hermetically sealed enclosure that s easy to clean and sterilize. Tempered glass or polycarbonate viewing windows afford full chamber visibility, and optional side air locks allow convenient parts transfer. Optional access panels are available for transfer of large process equipment. Select between two sizes, with either polycarbonate or safety glass viewing window. System starts at $18, Custom Work is No Problem! Contact Terra to discuss your unique requirements. To Order, Call or Fax Vol. 4 No

46 Laboratory Hoods, Bio Safety Cabinets: by Labconco A C B D A. Fiberglass 30 Laboratory Hoods Powder epoxy-coated exterior is easy to clean; one-piece molded fiberglass interior resists most chemicals. By-pass design maintains stable face velocity, and pivoting air foil maximizes containment. Available with onboard exhaust blower. Model shown: B. Basic Laboratory Hoods By-pass design maintains stable face velocity, and vapor-proof or explosion-proof blower provides safe ventilation. Available in 47" and 70" widths, with a complete range of system options. Model shown: C. Paramount Ductless Enclosures These self-contained workstations require no ducting to the outside, making them ideal for applications that require portability or flexible installation. An air foil enhances fume containment. Many sizes and accessories, including filters, at TerraUniversal.com D. Protector XVS Ventilation Stations This low-profile, large-capacity enclosure provides the perfect fume hood for analytical work, solvent cleaning, pathology and cytology studies. By-pass design maintains stable air velocity, and Clean- Sweep air foil minimizes dead air zones to maximize containment. Model shown: No Select FilterMate below for ventilation. E. Purifier Logic Series Biological Safety Cabinets Meets NSF designation for Class II, Type A2 biological safety cabinets. The Purifier also offers the largest working area of any cabinet in its class and includes a fully closing, counterbalanced tempered glass sash with alarm indicator. Model shown: F. FilterMate Portable Exhausters Ideal for operation with the Protector XVS, this system provides quiet exhausting and containment of contaminants. Select HEPA and/or carbon filter to remove powders, particulates or vapors. True bag-in/bag-out systems allows safe filter disposal. Model shown: E F 44 Thousands of Critical Environment Solutions:

47 See specifications/ordering chart below. Vacuum Chambers A. High-Capacity Chamber (see chart below) Ideal for degassing large assemblies. Powder-coated steel chamber with 1"-thick aluminum door. Includes 1"-thick polycarbonate viewing window, piping, fittings and solenoid valve for convenient control (order pump and vacuum controller separately). 18"W x 48"L stainless steel shelf creates a convenient platform 4.5" above chamber floor. Powder-Coated Steel Stand Raises chamber shelf to 34.6" above floor level , B. Stainless Steel Chamber (see chart below) Double-wall construction; includes 8" x 8" tempered glass viewing window and dual metering valves and 0-30" vacuum gauge. C. Aluminum Chamber (see chart below) 1"-thick walls; includes dual metering valves and 0-30" Hg vacuum gauge. Powder-Coated Steel Stand Raises chamber 17"; includes casters D. Full-View Acrylic Chamber (see chart below) Made of 1 /2"-thick cylindrical acrylic. Designed for continuous pump operation with safety relief valve. E J. Acrylic Chambers See chart below. Ideal for degassing and transporting small parts. Designed for continuous pump operation (order below). Vacuum Chamber Accessories Metering Valves (installed) Two required for direct connection to pump, or one if connecting Vacuum Controller. Vacuum Gauge (installed) Required if selected pump does not include metering kit. Vacuum Controller Recommended for all continuous vacuum applications. For Full Vacuum (to 29.9" Hg). Select appropriate Turnkey Connection Kit below. 120VAC, 60Hz , VAC, 50Hz , Connection Kit Includes all connections, vacuum, solenoid, turnkey installation and testing charges. For Type A C Chambers , For Type D J Chambers , A B C D E J Shown with optional stand, vacuum pump and controller Vacuum Chambers Type Dimensions (W" x D" x H") Max. Outside Inside Vacuum A 49L x 30 dia. 48L x 26 dia. 29.9" Hg , B 13 x 15 x 14 8 x 12 x " Hg , C 31.4 x 25.4 x x 24.4 x " Hg , D 12"-dia. x "-dia. x " Hg , E 17 x 11 x x 8 x " Hg A 2, F 13 x 13 x x 10.5 x " Hg A 1, G 9 x 9 x x 6 x " Hg A 1, H 13 x 13 x x 10 x " Hg A 1, I 17 x 17 x x 15 x " Hg A 2, J 26.5 x 11 x x 8 x " Hg A 2, No Custom designs to your specifications! No To Order, Call or Fax Vol. 4 No

48 Cleanroom Accessories ErgoHeight Work Stations One size fits all! Eliminates back stress and injury, enhances productivity Provides up to four programmable height settings Smooth bench motion suitable for microscopes and delicate process equipment Supports up to 400 pounds net load No need to clear work surface for height adjustment! Cleanroom-compatible materials Motorized lifters raise, lower and level the work surface to any of four programmed pre-sets without disturbing table-top set-ups. Front panelmounted controls provide pushbutton convenience. Sealed design isolates motor for cleanroom compatibility. Models below feature powder-coated white bases; dozens of other sizes and configurations available. Standard height range: 28" 48" floor-to-top. Turnkey solutions for vibration isolation and exhaust fume removal: TerraUniversal.com Ergonomic benchtop positioning eliminates back stress. ErgoHeight Auto-Adjustable Cleanroom Work Stations Benchtop Powder-Coated Steel Bases Dimensions Nonconductive Static-Dissipative Polypropylene (W" x D") Top Top Top Stainless Steel Top Stainless Steel Top Stainless Steel Bases Electropolished Top and Base 36 x , , , , , , x , , , , , , x , , , , , , x , , , , , , x , , , , , , x , , , , , , x , , , , , , x , , , , , , A. Motorized Shoe Cleaner Internal vacuum system removes contaminants on shoes. Five internal brushes clean deep into seams, welts. 110VAC/60Hz , VAC/50Hz , B Reduced Pricing! B. Cleanline Sticky Mats Peel-off sheets eliminate the need for messy cleaning and make it easy to maintain a clean surface. Models are available with full-bottom adhesive surfaces and 2" bottom adhesive strips. Optional mounting frame (shown in photo) provides a sturdy, easy-to-clean edging. Many other sizes and colors, along with hightack models, are available at TerraUniversal.com. A Sticky Mats All are medium tack (high tack and other sizes, colors available) Dim. (inches) Blue Gray Corresponding Frame Full Bottom 2" Strip Bottom 2" Strip Bottom (Adds 3" to each side) 18 x x x x x Thousands of Critical Environment Solutions:

49 Hand, Glove and Shoe Cleaners Brushless motor for clean operation Industry-Leading Noise Reduction! Isolated motor and insulated housing contain noise and vibration ULPA Filter (rated % 0.12µm particles) Filtered Air Outlet ULPA Filtered Air Perforated Inlet Vibration-absorbing insulation (encased in stainless steel) Recirculating design minimizes airborne contaminants, increases efficiency Motor/Heater Module Dimensions: 15"W x "H x 11"D Heater: 1600W PureDry Hand/Glove Dryer 120VAC/60Hz , VAC/50Hz , The only cleanroomcompatible, integrated washing/drying station! PureDry Cleanroom Hand/Glove Washers and Dryers PureDry Dryer Provides warm, contamination-free air for drying hands and gloves Also ideal for drying tools, bottles, microelectronic components and other small materials Eliminates the need for towels that shed particles and harbor germs ULPA (Ultra Low Penetration Air) filter captures microcontaminants Insulation and motor isolation reduce noise and vibration levels Recirculating air design minimizes turbulence for enhanced cleanliness Wide exposure area allows complete drying of elbow-length gloves Photo-electric cell and adjustable timer allow no-touch operation Washing/Drying Station Incorporates washing and ULPA-filtered drying modules in one cleanroomcompatible station Hands-free, noncontaminating activation Optional liquid soap dispenser is ideal for aseptic cleaning Hand/Glove Cleaning Station Dimensions No. of (W x D x H) Sinks Includes levelers Stainless Steel Electropolished Stainless Steel Soap Dispensing Module 110VAC/60Hz 220VAC/50Hz 110VAC/60Hz 220VAC/50Hz Order one per sink 24" x 22" x 61" , , " x 22" x 61" , , " x 22" x 61" , , " x 22" x 61" , , Sole Cleaner Automatic Contamination-Control Mat Unique system automatically maintains a sticky surface that removes particles from shoe soles Controller counts foot passes and replaces surface at programmed intervals Self-regenerating design eliminates monitoring and maintenance costs Take-up roller draws particle-laden surface inside housing to minimize contamination Terra s Sole Cleaner provides the ultimate in shoe sole cleaning! Its automated design minimizes the hassle, expense, and uncertainty associated with other adhesive shoe mats. Just program the acceptable number of foot passes and the Sole Cleaner guarantees a sticky surface throughout a work shift. Its low-profile design is ideal for carts, and replacement rolls take only seconds to install , To Order, Call or Fax Vol. 4 No

50 Reusable Garments: by Vidaro C E C D Vidaro Maxima ESD A B Vidaro Grid A B F Vidaro Grid high performance cleanroom fabric designed for industries where it is essential to protect products from static dissipative charges as well as airborne particles. Maxima ESD fluid resistant fabric with built-in static control properties. Widely used in food technology, medical and pharmaceutical industries to help control product and work contamination A. B. Cleanroom Coveralls and Boots Size* A. Coveralls B. Boots Grid Maxima ESD Grid Maxima ESD XS S M L * Larger sizes available at TerraUniversal.com. C. Hoods The Vidaro Grid Pullover Cleanroom hood offers complete head coverage with a sewn-in replaceable over the nose 2-ply poly tricot. The Maxima ESD Pullover Cleanroom Hood offers complete head coverage with round face opening. Material Size* Grid XS Grid S Grid M Grid L Maxima ESD OSFA * The Vidaro Grid hoods are available up to 3XL. D. Lab Coats Vidaro Advanced Static Control Lab Coats are cool and comfortable, so they may be worn over normal clothing, yet they effectively reduce electrostatic charges to safe levels, eliminating the possibility of arcing from workers to sensitive electronic products. Size White Light Blue Gray XSM SM MED L * Sizes available up to 2XL. Visit for complete fabric specifications and sizing charts E. F. Frocks and Shoe Covers Available in white and light blue, Vidaro Taffeta frocks and shoe covers are comfortable, long wearing and modestly priced. E. Frock White Light Blue Size* XS S M L * Larger sizes available at TerraUniversal.com. F. Shoe Cover White Light Blue Size S M L XL G. Modesty Garments (Undergarments) This shirt-and-pants set can be worn inside other cleanroom garb as undergarments or as outer garments themselves. Sold as a set. Size* XS S M L * Sizes available up to 5XL. Quantity Discounts! Additional discounts apply to orders of Vidaro Grid, Maxima ESD and Modesty Garments over 100 pieces. 48 Thousands of Critical Environment Solutions:

51 Cleanroom Gloves, Wipers and Paper: by Valutek Disposable Gloves We offer a wide variety of cleanroom gloves suitable for different applications and cleanliness requirements. The Nitrile cleanroom gloves are available in sterile packaging for use in Class 10 environments and in non-sterile packaging appropriate for Class 10, 100, 1,000, and 10,000. A PVC cleanroom glove is also available which has excellent ESD properties and is a good fit for use in microelectronics manufacturing. Wipers Terra Universal offers an assortment of cleanroom and laboratory wipers to suit every need. Cotton Wipers are woven for strength and durability, while also clean and absorbent. Ideal for cleaning magnetic disk media surfaces, high heat applications, and absorbing aqueous and organic solvent spills. Suitable for Class 1000 and higher cleanrooms. Size Qty./Bag Cat# 9" x 9" " x 12" Sterile Nitrile Cleanroom Glove, Class 10 (200 Pairs) Size $/Case SM MED L XL XXL Nitrile Cleanroom Glove, Class 10 (1,000 Pieces) Size $/Case SM MED L XL Nitrile Cleanroom Glove, Class 100 (1,000 Pieces) Size $/Case SM MED L XL Nitrile Cleanroom Glove, Class 1000 (1,000 Pieces) Size $/Case SM MED L XL Powder-free Nitrile Glove, Class 10,000 (1,000 Pieces) Size $/Case SM MED L XL PVC Glove, Class 10,000 (1,000 Pieces) Size $/Case SM MED L XL Laundered Polyester Wipers are ideal for critical environments where ultra-low particle/fiber generation and absorbent capacity is important. Soft yet durable construction cleans surfaces without scratching. The 2-ply wiper is commonly used in pharmaceutical applications as a primary process wiper. Size Federal Standard 209E Qty./Bag Cat# $/Bag 9" x 9" Class " x 9" x 2-ply Class " x 9" Class " x 12" Class " x 4" Class " x 9" Class " x 12" Class Pre-saturated Wipers saturated with semiconductor grade (filtered to.2 micron) 70% isopropyl alcohol and 30% de-ionized 18 mega ohm water. Processed and packaged in a controlled environment. Ideal wipe for electronics applications and for general use in pharmaceutical and semiconductor industries. Designed for Class 10,000 applications and above. Size Unit of Measure Cat# 12" x 12" 20 wipe/foil pouch Cleanroom Paper Specially formulated cleanroom paper minimizes particle generation in controlled environments. Ultralow particle, extractable and metallic ion content. High tear and tensile strength, burst strength of 50 lbs. per inch. Compatible with virtually any ink or copier system. Processed and double bagged in a Class 100 cleanroom. Gloves Liners These lightweight, non-linting liners are knitted with fine-gauge, 100% virgin nylon. They provide dexterity in finger tips, while offering comfort and improved grip in palm. Quality, sturdy construction allows liners to be laundered and reused. Universal size and ambidextrous shape fits comfortably under latex, PVC or nitrile gloves. Suitable for use in controlled environments. Style Number of gloves per bag $/Bag Full-finger 12 pairs Half-finger 12 pairs Color Weight Size Reams*/Case $/Case White 23# 8.5" x 11" Pink 23# 8.5" x 11" Yellow 23# 8.5" x 11" Blue 23# 8.5" x 11" Blue 30# 11" x 17" * 250 sheets per ream. Visit TerraUniversal.com for contamination and performance characteristics To Order, Call or Fax Vol. 4 No

52 Cleaning Ultrasonic Cleaners These Branson CSA-listed cleaners provide thorough, safe cleaning of smalland medium-sized parts. Models below feature heat controls with digital timer and degas function, which allows immediate use at maximum efficiency. All operate on 115VAC; 230VAC and other heating and timer configurations are also available. Tank Capacity 0.5 gallons gallons gallons gallons , gallons , Vacuum Sealers AV Vacuum Sealer With Gas Purge Th e f o o t - p e d a l-activated, retractable nozzle AV series vacuum sealers offer gasflush vacuum packaging at its finest. The.25"-wide sealing element delivers a leak-proof seal for electronic devices that require moisture barrier bags. With one touch of the pedal, the AV flushes out oxygen and moisture with nitrogen, and your sensitive components are sealed in seconds. Also great for dry packaging applications and shipping containers. Compressed air required. 120VAC 220VAC Seal Length 20" * 1, * 2, " , , " , , " , , " , , * These models do not include the gas flush feature. Ionizing Blow-Off Gun Safely removes surface contaminants with a burst of clean, static-neutralized air or nitrogen. Lowvoltage design for safe, low-emi/rfi operation. Includes 0.4-micron capsule filter. 110VAC SNO GUN II High-Precision Cleaner The safe, inexpensive, highly effective alternative to solvent or dry nitrogen cleaning of sensitive parts! Dry ice particles remove contaminants as small as 0.1 micron without disturbing delicate surface features. Specialized inert gas enclosure available to prevent moisture condensation A 2, Digital Vacuum Sealers Digital controls ensure repeatable, uniform sealing cycles. The standard cycle is gasvacuum-seal; optional firmware change allows vacuum-gasseal cycling. All units feature gas purge and have.25" seal elements. Three-year standard warranty. 120VAC, 50/60Hz 220VAC, 50Hz Seal Length 15" , , " , , " , , " , , " , , Budget Vacu- Sealer (Model 235) The Model 235 Vacu-Sealer performs hands-free vacuum packaging, in and out of the cleanroom. It creates.187"-wide thermal impulse seals up to 20" long in a wide range of packaging media, including metalized barrier material. See TerraUniversal.com for other models, including validatable sealers for medical applications. 120VAC 220VAC , , Cleanroom- Compatible Vacu-Sealer (Model 35) This compact, quiet vacuum sealer performs safe.25" band-seal packaging. Its cleanroom-friendly design features isolated exhaust port, stationary vacuum nozzle and no moving parts. Includes electronic timers for gas, vacuum, heating and cooling cycles. 220V models available. Model 35 Model 35 with Gas Backflush Seal Length 20" , , " , , " , , " , , Thousands of Critical Environment Solutions:

53 Refrigerators: by Marvel Scientific A No B Space Saver shown with solid and glass doors. C No A. ADA-Compatible Refrigerator Marvel Scientific s ADA compliant refrigerator fits under 32" countertops and may be built into casework with zero clearance or used as free standing. The units are designed to comply with the Americans with Disabilities Act (ADA) for accessibility by adhering to strict height standards. B. Space-Saver Undercounter Refrigerator This Marvel Scientific 3.0 cu.-foot undercounter refrigerator is a real space saver at just 15 inches wide and comes with three full-depth adjustable shelves. The fan-cooled interior insures uniform temperature front to back and bottom to top, which is controlled by an adjustable microprocessor-based thermostat. C. Undercounter Freezers Marvel s undercounter freezers come in 4.5 cu.-ft and 6 cu.-ft. models that fit easily under lab benches and casework. The standard version features forced air ventilation, eliminating the need for clearance space for built-in applications. Also available are flammable materials and explosion-proof undercounter freezers. D No D. Undercounter Refrigerators These 6.1-cubic-feet refrigerators fit easily under lab benches and casework. The standard version is available with either a solid or glass door. The flammable materials refrigerator meets NFPA Standard 99 and complies with OSHA. The explosive-proof refrigerator is listed by Underwriters Laboratory. E. Two-Drawer Undercounter Refrigerator Marvel s new two-drawer model is the first undercounter drawer refrigerator on the market that is Commercial UL-Listed for laboratory use. Two deep, full-extension drawers store nearly all types of containers and provide superior visibility and access, even when seated. Type Exterior Dimensions Temp Range Capacity Power** H x W x D (in.) (ºC) (cu. ft.) Cat # A. ADA Compliant Refrigerators General Purpose 31.5 x x º to 7º V , B. Space Saver Refrigerators General Purpose* x x º to 6º V , General Purpose 34 x x 24-23º to -18º V , C. Undercounter Freezers Explosion-Proof 34 x x 26-18º to -15º V , Flammable Material 34 x x 26-18º to -15º V , D Undercounter Refrigerators Explosion-Proof 34 x x 26 1º to 7º V , Flammable Material 34 x x 26 1º to 7º V , E. Two-Drawer Refrigerator Stainless Steel 34 x x º to 7º V A 1, White Powder-coated 34 x x º to 7º V A 1, * Available with glass doors. ** All models are available in 220V. Visit TerraUniversal.com for more information. E E No To Order, Call or Fax Vol. 4 No

54 Vacuum Cleaners Cleanroom Vacuum Cleaner With ULPA Filtration A four-stage filtration system, which includes a final ULPA filter, rated % 0.12µm particles, and quiet operation (59dBA at 6.5 feet) make this vacuum ideal for cleanroom use. Includes filter set and tool kit with two 22" stainless steel tubes, 3" round brush, combination 12" floor nozzle, 6'6" conductive plastic hose, trolley, 30' power cord, conductive crevice nozzle and 5" utility nozzle. C cat. # 120VAC , VAC , Minuteman Explosion-Proof Vacuum This 15 gal., wet/dry vacuum is ideal for picking up flammable liquids, finely pulverized dust, and other hazardous materials. Operates wet and dry in Class I Group D and Class II Group F & G atmospheres. Features a 22-gauge non-sparking stainless steel tank, with ULPA filter, manometer, and static conductive casters and wheels. cat. # 115VAC , Tool Kit Minuteman Cleanroom Vacuum The CRV is designed for use in Class 1 through Class 100,000 cleanrooms. Features a three-stage ULPA filtration system, stainless steel four-wheel carriage, and a collection bag indicator. The quiet motor supplies a powerful suction at a constant airflow with a noise level of 65 dba. Electromagnetic/radio frequency interference filtration (RFI/EMI) is also available for more stringent applications. C cat. # RMI/EMI 115V , Tool Kit Step 2 Permanent Cloth Bag Step 4 ULPA Filter Step 1 Disposable Paper Bag Step 3 Class 10,000 Filter Particle Collection 0.12µm Triple-Duty Cleaning Cleans up dust and chemical spills Clean air blower pinpoints ULPA-filtered air Ventilates glovebox or other enclosure Compact, Versatile MicroVac Vacuum or Clear Air Blower Includes % efficient ULPA filter to capture sub-micron particulates Ideal for cleaning up hazardous powders, pharmaceutical spills Ventilates bio cabinets, glove boxes and other small enclosures Provides burst of particle-free air to clean keyboards, PCBs and other delicate surfaces Mini-tool kit pinpoints small surface features An economical continuous clean air source for dozens of applications MicroVac cat. # 110VAC/60Hz , VAC/50Hz , MicroVac Tool Kit Replacement Filters Stage 1 Disposable Paper Bag Stage 4 Class Replacement ULPA Filter Thousands of Critical Environment Solutions:

55 More Products for Your Lab LAMBA Bio+ Spectrophotometer from Perkin Elmer The LAMBA Bio+ has been specifically designed for life-science laboratories that require a dedicated instrument for the determination of nucleic acid purity and concentration, protein concentrations and cell density measurements. A full suite of stored methods include DNA, RNA and Oligonucleotide calculations, protein assays such as direct UV measurement, BCA, Biuret, Bradford and Lowry. Unlike many dedicated life-science spectrophotometers, the LAMBA Bio+ can also measure absorbance or concentration at any wavelength, providing flexibility to address future applications. All results may be printed to an integrated high quality printer or stored and printed via SD flash memory card. C cat. # LAMBDA Bio+ with printer , LAMBDA Bio+ with SD Card , Millennium 2000 Microplate Shaker Incubator from Jencons Scientific Minimum bench space required Easy to clean and maintain Optimal temperature uniformity of plates The Millennium 2000 is a unique controlled microprocessor that accommodates up to four microtitre plates in either 96- or 384-well format. Speed, temperature and time are programmed via the control panel with an easy to read LCD displaying all three parameters. All four plates are easy to access at all times for loading and unloading. For added safety, the Millennium 2000 works from a low voltage supply. Full line of microplate readers, shakers, and incubators available! cat. # , Branson Sonifier Cell Disruptors Auto tuning for optimum performance Pulsed mode to minimize heat generation in thermally-sensitive samples Continuous or timed operation The Sonifier ultrasonic cell disruptors are designed to apply highfrequency ultrasonic energy to disrupt cellular structures, homogenize samples, emulsify materials, mix compounds and accelerate reactions. These cell disruptors can process static samples from 1 ml to greater than 500 ml or flowing material up to 40 l/hr. Each model consists of a power supply, converter, and mechanical probe. Model * Output 250 Analog 200 Watts , Analog 400 Watts , Digital 200 Watts , Digital 400 Watts , *Also available in 230V, 50/60Hz Justrite Centura Safety Cans Take control of solvents with Centura Safety Cans from Justrite. These safety disposal cans offer a safe and easy way to collect liquid waste. The quick-disconnect fittings allow free flow of solvent into the container through tubing. Hands-free liquid waste accumulation is ideal for HPLC applications and is suitable for either pump fed or gravity flow HPLC waste methods. Double fittings eliminate back pressure in liquid flow disposal line and provide controlled handling of vapors. Capacity Liquid Intake Vapor Release Fitting Fitting 2 gallon Stainless Steel Stainless Steel gallon Stainless Steel Polypropylene gallon Polypropylene Polypropylene gallon Stainless Steel Stainless Steel gallon Stainless Steel Polypropylene gallon Polypropylene Polypropylene To Order, Call or Fax Vol. 4 No

56 CHANGE SERVICE REQUESTED PRSRT STD U.S. POSTAGE PAID TERRA UNIVERSAL Business Without Borders n Low-Cost Domestic and International Shipping Competitive quotes include customs brokerage and duties for door-to-door delivery n Hassle-Free Pricing Web prices honored worldwide n International System of Units Web descriptions include SI specifications (metric units of measure) n Comprehensive Product Lines Terra provides single-source convenience at remarkable savings n Online Order Tracking Web-based Real-Time Order Status System lets you monitor progress, from design approval to shop floor to delivery tracking number n Quick-Ship Program Popular models of both Terra-built and distributed products are inventoried for quick shipment look for blue prices at TerraUniversal.com n Global Network of Sales Representatives Complete listing at TerraUniversal.com