Sensing our World Motion, Humidity, Pressure, Temperature, Sound, Light

Transcription

1 Sensing our World Motion, Humidity, Pressure, Temperature, Sound, Light Challenges in the development of MEMS sensor ASICs for consumer and automotive market Dr. Dirk Droste, 1 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

2 Agenda Bosch Market and Applications Technical Challenges MEMS-IC Design Integration Miniaturization Conclusion 2 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

3 2013 key figures Bosch Group 46,1 billion euros in sales 281,000 associates Automotive Technology World's largest supplier of cutting-edge automotive technology 66 % share of sales Industrial Technology Leading in drive and control technology, packaging and process technology Energy and Building Technology Leading manufacturer of thermo-, solarand building security technology World s largest supplier of heat pumps 34 % share of sales Consumer Goods World's largest power tool manufacturer Leading the field in household appliances 3 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

4 Agenda Bosch Market and Applications Technical Challenges MEMS-IC Design Integration Miniaturization Conclusion 4 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

5 Bosch the MEMS supplier Out of one hand MEMS sensors, actuators and solutions Akustica Bosch Connected Devices & Solutions Automotive Electronics CE CE CE & Industrial Automotive Accelerometers Geomagnetic sensors Gyroscopes Pressure sensors Humidity sensors Combo sensors ASSNs MEMS microphones Smart sensor/ actuator nodes Embedded SW & Algorithms Customized IoTS sensor & actuator solutions Accelerometers Angular rate sensors Pressure sensors Mass flow sensors 5 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

6 Consumer MEMS success story World s smallest digital pressure sensor Full portfolio of acceleration and pressure sensors First 2x2 mm 2 acceleration sensor World s smallest triaxial gyroscope in 3x3 mm 2 World s first Integrated Environmental Unit Complete 6-14 bit acceleration sensor portfolio in 2x2 mm First triaxial acceleration sensor World s smallest digital acceleration sensor Strongest growing consumer acceleration company 6-axis ecompass in 3x3 mm 2 Smallest triaxial acceleration sensor in 1.2x1.5 mm 2 9-axis system (incl. µcontroller) in 5.2x3.8 mm 2 6 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

7 Consumer MEMS success story German Innovation and Advanced Technology Prize SMB380 is Product of the Year 2008 Global Frost & Sullivan Award for Product Innovation SMB380 is E&E s Best Product of the Year Acceleration Sensor BMA220 is Product of the Year axis Sensor BMX055 is Product of the Year Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

8 Agenda Bosch Market and Applications Technical Challenges MEMS-IC Design Integration Miniaturization Conclusion 8 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

9 Today s state-of-the-art portfolio automotive Acceleration sensors Angular rate sensors Combined inertial sensors Pressure sensors Mass flow sensors Central/peripheral acceleration sensor for occupant protection Low-g acceleration sensors for VDC, RoSe and active suspension Rollover sensor for occupant protection Yaw rate sensor for VDC Combined inertial sensor (yaw rate and acceleration sensor) for VDC Low pressure sensor for engine control Mid-pressure sensor for transmission control Pressure sensor for occupant protection Mass flow sensor for engine management High pressure sensor for engine and brake systems 9 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

10 Today s state-of-the-art portfolio consumer 3-axis sensors 6-axis sensors 9-axis sensors environmental microphones Accelerometer Gyroscope Magnetometer ecompass IMU Absolute Orientation Sensor Application Specific Sensor Nodes (ASSNs, incl. µc) Barometric Pressure Sensor Integrated Environmental Unit Analog and digital MEMS microphones (Akustica) High quality voice input for mobile devices Sensor data-fusion software ties everything together 10 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

11 MEMS sensors a multitude of markets Mobile Home Entertainment Imaging Sport & Fitness Augmented Reality Home Appliances Industrial & Logistics Smart Sensors 11 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

12 Everyone & everything connected 5 billion People connected Devices connected* billion devices in billion World population People connected to the internet billion vehicles billion in telemedicine billion in security 7.3bn billion smart meters 5.7bn 6.5bn billion TVs billion tablets 3 billion 0,7% 15% 75% billion mobile phones billion laptops billion desktops billion servers 2 billion 1 billion * Conservative bottom-up estimation Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

13 Waves of MEMS sensor proliferation Internet of Things and Services (IoTS) 3 rd wave Consumer Electronics 2 nd wave Automotive 1 st wave Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

14 14 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

15 Agenda Bosch Market and Applications Technical Challenges MEMS-IC Design Integration Miniaturization Conclusion 15 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

16 Challenges for automotive sensor ASICs System Issues Technology Choice Partitioning Interfacing Functional Safety Area / Box size Performance Issues Overload robustness Sensitivity stability Offset stability Linearity SNR Power Consumption Robustness Issues EMC / active ESD PSRR Supply voltage and impedance variation Temperature stability h work life cycle Push the limits! 16 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

17 Challenges for consumer sensor ASICs Market Extreme TTM requirements Fierce price competition Technical Challenges MEMS-IC-design: low-power, low-noise, high accuracy Miniaturization Integration Features Verification Application Wide variety of customers Wide variety of application scenarios Non-ideal application environment Push the limits! 17 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

18 Agenda Bosch Market and Applications Technical Challenges MEMS-IC Design Integration Miniaturization Conclusion 18 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

19 Yawerate Sensing: all the best Noise <0.1 /s Overload >1000 /s Low offset High linearity High longterm stability High robustness Drive C 1 = C o + DC/2 C 2 = C o - DC/2 Sense Counting few electrons with high SNR and high robustness (EMI, PSRR, T-Range, ) 19 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

20 DSPs: smart, modular and scalable approach Performance is adapted to signal processing requirements at Bosch automotive or consumer applications Enhanced design efficiency Seamless verification from system to hardware Level Performance sdsp Bit Today s needs for Sensors Fix VHDL IP Processor ARC 605 Core Area norm. Safety features (ISO26262) Flexibility (e.g. new functionality by means of ROM-metal fix) Performance tailored to application Cost-effective solution Flexible solution 20 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

21 Peripherals / Test 2 channel Signal-Path ISO26262 automotive functional safety S 1x (f.ex. D/A-Converter) S 2x S 1y (f.ex. D/A-Converter) S 2y (f.ex. Band-Gap) H 1 H 2 Active and passive safety: Exhaustive Online monitoring Failure rate << 1e-9/h (f.ex. SGND-Buffer) H 3 (f.ex. Power-Down Test) Possible single point failure Possible single point failure resulting in common cause failure 21 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

22 Agenda Bosch Market and Applications Technical Challenges MEMS-IC Design Integration Miniaturization Conclusion 22 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

23 ESP Sensor-ASIC - high integration level, SoC Functional Modules on ASIC 2 channel acceleration FE 1 channel yaw-rate FE sdsp for signal processing Internal Bus-System Embedded µc NVM CAN-, PSI and SPI-Interface Full Monitoring & Safety-Control Yaw-Rate Acceleration uc Premold Mold 23 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

24 ESP Sensor-ASIC Functional Block Diagram Yawrate DAC AGC microcoded DSP OTP, ROM, RAM CV AD PLL SYSTEM CLOCK uc CV AD FILTER X + X FILTER TEMP SENS ACC DAC SPI CV AD + X FILTER CAN CV AD + X FILTER SCON 24 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

25 MEMS sensor integration/ smart sensors 3-axis 6-axis 6+3-axis 9+1-axis BMM BMC BMC+BMG BMA BMI BMI+BMM 1 1 BMG FusionLib: BSX 3.5* FusionLib: ecompass3.2 BSX3.5 FusionLib: BSX3.5 -BSX3.5 -BNO (inc. SW for Sensor Hub) -BNx (inc. SW for ASSN**) Different applications require different solutions * Sensor Data Fusion **Application Specific Sensor Node 25 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

26 Intelligent absolute orientation sensor - BNO055 First 9-axis sensor with µc + BSF fusion SW 3-axis accelerometer (12 Bit) 3-axis gyroscope (16 Bit) 3-axis geomagnetic sensor ARM Cortex µc (32 Bit) Sensor Data Fusion with fast magnetic calibration (optimally integrated & tuned) 5.2 x 3.8 mm² footprint High performance (high accuracy, low latency, low calibration time, immune to magnetic distortions) Augmented Reality Gaming Activity monitoring Navigation Context awareness Power management Home automation Logistics BNO055 plus RF interface (WiFi, BT*, etc.) is a key block of IoT based sensing 26 * Bluetooth Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

27 Agenda Bosch Market and Applications Technical Challenges MEMS-IC Design Integration Miniaturization Conclusion 27 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

28 Cost Main challenges for MEMS packages Metal can Niche product Low stress Very robust package Premold Low stress Robust package Media access Leaded Mold Package Standard Intrinsic stress Leadless Mold Packages Standard Intrinsic stress Stress from PCB - BLR Mechanical Stress Automotive Consumer 28 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

29 Milestones in packaging technology Yaw rate sensors automotive DRS50/100 Precisionmechanics metal housing (Electromechanical) MM1 BMM - Silicon bulk micromachining metal can (1 st gen.) SMG06x SMM Silicon surface micromachining PLCC44 MM3 Silicon surface micromachining (2 nd gen) PM20 MM3R SMM PM16 SMG10x SOIC16w MM4 SMM First ESPi sensor SMI540 SMI7x0 SMM SMM Comboinertial sensor inertial sensor Combo- for ESP in for ESP in mold-package BGA Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

30 Consumer miniaturization of accelerometers 600uA 130uA 1 st with 3x3 mm 2 1 st with 1.2 x 1.5 mm Bosch 2007 Sensortec 1 st with 2x2 mm 2 30 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

31 Agenda Bosch Market and Applications Technical Challenges MEMS-IC Design Integration Miniaturization Conclusion 31 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

32 Priority Automotive vs. Consumer Sensor ASICs Automotive Consumer Overload robustness Noise EMC robustness PSRR robustness Offset drift Sensitivity drift Area Power Power Area Noise Offset drift Sensitivity drift Overload robustness Spec 4-6 sigma typical Q (field) <<1ppm ppm 32 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,

33 Bosch sensors can be found in every second smartphone worldwide. height differences of < 1m tilt angles of < 1 heading accuracy of 3 track movement of hour hand in a clock Disclaimer With respect to any examples or hints given herein, any typical values stated herein and/or any information regarding the application of the device, hereby disclaims any and all warranties and liabilities of any kind, including without limitation warranties of non-infringement of intellectual property rights or copyrights of any third party. The information given in this document shall in no event be regarded as a guarantee of conditions or characteristics. They are provided for illustrative purposes only and no evaluation regarding infringement of intellectual property rights or copyrights or regarding functionality, performance or error has been made. 33 Marketing GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion,