Buyers Guide. International Statistics on Vacuum Technology

Transcription

1 International Statistics on Vacuum Technology JVIA (Japan Vacuum Industry Association) AVEM International (Association of Vacuum Equipment Manufacturers International) EVTA (European Vacuum Technology Association) in co-operation with SEMI (Semiconductor Equipment and Materials) Buyers Guide

2 Company Name A-N A&N Corporation Aerzener Maschinenfabrik GmbH Agilent Technologies, Anest Iwata Corporation Anlet Co., Ltd. Brooks Automation, Canon Anelva Ltd. Choshu Industry Co., Ltd. Cosmotec Corporation Diavac Limited DigiVac Corporation Drivac Country US DE IT JP JP US JP JP JP JP US US Vacuum pumps Liquid ring pumps (including packages) Side channel pumps (including packages) Multi-stage oil-sealed rotary vane/ piston pumps < 1 mbar (ultimate pressure) Single stage oil-sealed rotary vane/ piston pumps > 1 mbar (ultimate pressure) Single stage roots pumps (separately sold) Roots pumping packages, backed by oil < 300 l/min > l/min > 2500 l/min < 300 l/min > l/min > 2500 l/min sealed pumps Radial blowers (including packages) Ejector pumps water, steam & compressed air (including packages) Dry pumps (including packages, other than turbopumps) < 1mbar (ultimate pressure) < 600 l/min l/min l/min Vacuum instrumentation >8000 l/min Rough Dry pumps (including packages) > 1mbar (ultimate pressure) < 300 l/s Turbomolecular pumps > l/s (incl. compound and drag pumps) > 1000 l/s Turbomolecular pumping packages (incl. compound and drag pumps) Diffusion pumps (including packages) Ion getter pumps (including packages) Sublimation/ Sorption/ Getter pumps (including packages) Cryopumps (< -160 C) (excl. water pumps) Cryo water pumps (> -160 C) capacitance manometer (diaphragm gauges) Total-pressure gauges thermal (including controllers) hot/cold cathode (include wide range) RGA s (partial pressure gauges < 500 amu) Quartz crystal thickness measurement (incl. deposition controllers) Helium Leak Detectors (capability < 10-4 mbarl/s) Other Vacuum Instrumentation (includes Mc Leods, mechanical gauges and switches)

3 Ebara Corporation Edwards Ltd. Flowserve SIHI GmbH Fuji Technology Gardner Denver Thomas, Welch Vacuum Technology Gardner Denver Deutschland GmbH Gardner Denver Nash Deutschland GmbH Gebr. Becker GmbH & Co GNB Corporation Green Tec Corporation Hakuto Co. Ltd. Hitachi Zosen Corporation Inficon USA Irie Koken Co Ltd JEOL Ltd. Kashiyama Ind.Co.,Ltd. Körting Hannover AG Kurt J. Lesker Company Ltd. Gardner Denver Srl Robuschi Division Leybold GmbH Mass-Vac, Matumura Oil Research Corp. Mitsubishi Cable Industries, Ltd. Musashino Engineering Co.,Ltd. Neis Co Ltd JP GB DE JP US DE DE DE US JP JP JP US JP JP JP DE US DE DE US JP JP JP JP

4 Company Name A-N A&N Corporation Aerzener Maschinenfabrik GmbH Agilent Technologies, Anest Iwata Corporation Anlet Co., Ltd. Brooks Automation, Canon Anelva Ltd. Choshu Industry Co., Ltd. Cosmotec Corporation Diavac Limited DigiVac Corporation Drivac Country US DE IT JP JP US JP JP JP JP US US Vacuum hardware Other sales of vacuum components and services Rectangular Port Valve Round Port Valve Valves (HV, UHV) Angle Valves Conductance valves Flanges and fittings Motion and positioning devices (incl. motion feedthroughs, manipulators, stages, controllers) Traps and baffles Electrical and other feedthroughs (includes liquid and gas feedthroughs) View ports and shutters, blinds and covers, source and target shutters Vacuum chambers (includes load locks, baseplates and feedthrough collars) E-beam, ion-guns / ion sources, resistance evaporator sources with power supplies (for thin film deposition) Heaters and Heater Controllers Other vacuum hardware Service (includes spare parts sold with repair) Spare parts and spares kits (sold separately from service) Oils, waxes and greases

5 Ebara Corporation Edwards Ltd. Flowserve SIHI GmbH Fuji Technology Gardner Denver Thomas, Welch Vacuum Technology Gardner Denver Deutschland GmbH Gardner Denver Nash Deutschland GmbH Gebr. Becker GmbH & Co GNB Corporation Green Tec Corporation Hakuto Co. Ltd. Hitachi Zosen Corporation Inficon USA Irie Koken Co Ltd JEOL Ltd. Kashiyama Ind.Co.,Ltd. Körting Hannover AG Kurt J. Lesker Company Ltd. Gardner Denver Srl Robuschi Division Leybold GmbH Mass-Vac, Matumura Oil Research Corp. Mitsubishi Cable Industries, Ltd. Musashino Engineering Co.,Ltd. Neis Co Ltd JP GB DE JP US DE DE DE US JP JP JP US JP JP JP DE US DE DE US JP JP JP JP

6 Company Name O-W Okano Works, Ltd. Optorum Co., Ltd. Osaka Rasenkan Kogyo Co Ltd Osaka Vacuum, Ltd. Pfeiffer Vacuum GmbH Piab GmbH Rigaku Corporation Rocky Brook Associates Sato Vac Sumitomo (SHI) Cryogenics of America, Shibaura Eletec Corporation Shimadzu Corporation Country JP JP JP JP DE DE JP US JP US JP JP Liquid ring pumps (including packages) Side channel pumps (including packages) < 300 l/min Multi-stage oil-sealed rotary vane/ piston pumps > l/min < 1 mbar (ultimate pressure) > 2500 l/min < 300 l/min > l/min Vacuum pumps Single stage oil-sealed rotary vane/ piston pumps > 1 mbar (ultimate pressure) > 2500 l/min Single stage roots pumps (separately sold) Roots pumping packages, backed by oil sealed pumps Radial blowers (including packages) Ejector pumps water, steam & compressed air (including packages) Dry pumps (including packages, other than turbopumps) < 1mbar (ultimate pressure) < 600 l/min l/min l/min >8000 l/min Rough Dry pumps (including packages) > 1mbar (ultimate pressure) < 300 l/s Turbomolecular pumps > l/s (incl. compound and drag pumps) > 1000 l/s Turbomolecular pumping packages (incl. compound and drag pumps) Diffusion pumps (including packages) Ion getter pumps (including packages) Vacuum instrumentation Sublimation/ Sorption/ Getter pumps (including packages) Cryopumps (< -160 C) (excl. water pumps) Cryo water pumps (> -160 C) Total-pressure gauges (including controllers) RGA s (partial pressure gauges < 500 amu) Quartz crystal thickness measurement (incl. deposition controllers) Helium Leak Detectors capacitance manometer (diaphragm gauges) thermal hot/cold cathode (include wide range) (capability < 10-4 mbarl/s) Other Vacuum Instrumentation (includes Mc Leods, mechanical gauges and switches)

7 Shimadzu Emit Co., Ltd. Shinko Seiki Co., Ltd. Shinmaywa Industries, Ltd. SMC Corporation Sumitomo Heavy Industries, Ltd. Taiko Kikai Industries Co., Ltd. Taisei Kinzoku Kogyosho, Ltd. Teledyne Hastings Instruments, Televac, a Fredericks Company, Tokyo Electronics Co. Ltd Toyama Co. Ltd. Tuthill Vacuum & Blower Systems, UC Components, Ulvac Cryogenics, Ulvac Kiko, Ulvac Tecno, Ltd. Ulvac, V Tex Corporation Vacom GmbH Vacuum Research Corporation Verity Instruments, Wakaida Science Corporation JP JP JP JP JP JP JP US US JP JP US US JP JP JP JP JP DE US US JP

8 Company Name O-W Okano Works, Ltd. Optorum Co., Ltd. Osaka Rasenkan Kogyo Co Ltd Osaka Vacuum, Ltd. Pfeiffer Vacuum GmbH Piab GmbH Rigaku Corporation Rocky Brook Associates Sato Vac Sumitomo (SHI) Cryogenics of America, Shibaura Eletec Corporation Shimadzu Corporation Country JP JP JP JP DE DE JP US JP US JP JP Rectangular Port Valve Vacuum hardware Other sales of vacuum components and services Valves (HV, UHV) Round Port Valve Angle Valves Conductance valves Flanges and fittings Motion and positioning devices (incl. motion feedthroughs, manipulators, stages, controllers) Traps and baffles Electrical and other feedthroughs (includes liquid and gas feedthroughs) View ports and shutters, blinds and covers, source and target shutters Vacuum chambers (includes load locks, baseplates and feedthrough collars) E-beam, ion-guns / ion sources, resistance evaporator sources with power supplies (for thin film deposition) Heaters and Heater Controllers Other vacuum hardware Service (includes spare parts sold with repair) Spare parts and spares kits (sold separately from service) Oils, waxes and greases

9 Shimadzu Emit Co., Ltd. Shinko Seiki Co., Ltd. Shinmaywa Industries, Ltd. SMC Corporation Sumitomo Heavy Industries, Ltd. Taiko Kikai Industries Co., Ltd. Taisei Kinzoku Kogyosho, Ltd. Teledyne Hastings Instruments, Televac, a Fredericks Company, Tokyo Electronics Co. Ltd Toyama Co. Ltd. Tuthill Vacuum & Blower Systems, UC Components, Ulvac Cryogenics, Ulvac Kiko, Ulvac Tecno, Ltd. Ulvac, V Tex Corporation Vacom GmbH Vacuum Research Corporation Verity Instruments, Wakaida Science Corporation JP JP JP JP JP JP JP US US JP JP US US JP JP JP JP JP DE US US JP

10 Vacuum Market Segmentation Rough Vacuum Process Vacuum Industrial Vacuum Semiconductor Process Vacuum Thin Film Deposition (non-semiconductor) FPD Solar Instrumentation Manufacturers R&D Packaging (except food) Central Vacuum Printing and Paper Handling Pick and Place Conveying Moulding Air sampling Medical Chemical (Bulk, Fine, ) Petrochemical Pharmaceutical Plastics (Extrusion, ) Food Beverage Textile Paper Ceramics Freeze drying Energy (Wind, Nuclear, Steam Turbines, ) Central Vacuum (Batteries, ) Vacuum Metallurgy (Metal Degassing, Melting, Re-melting, E-beam welding, Casting, ) Vacuum Heat Treatment (Brazing, Carburising, Nitriding, Quenching, ) Laser Technology Electron Tubes TV Tubes Lamps and Bulbs Industrial leak detection Refrigeration and Air Conditioning Automotive (Dehydration, Charging and Test) Electrical (Encapsulation,..) Medical sterilisation Silicon Semiconductor (Memory, Logic, MEMS ) Compound Semiconductor (LEDs, ) Semicon Crystal Pulling Please note: Above includes both Process Equipment Manufacturers and End Users for PVD, CVD, Etching, Ion Implantation, MBE Glass/Web/Optical Coating Optical Data Storage (CD, DVD, Hi Def Disk,..) Magnetic Data Storage (HDD) Thin Film Heads Surface Coating (wear protection, decorative,..) Thin Film batteries TFT-LCD Displays Display Coatings (OLED, FED, PDP, SED, ) Photovoltaic Solar (c-si & Thin-Film Deposition, Laminating,,..) Thermal Solar (Water Heaters, ) Solar Crystal Growth (Pulling, Re-melt, ) Mass Spectrometers Electron Microscopes Metrology/ Inspection/ Defect Review systems for Semiconductor including Focused Ion Beam systems and Electron Beam systems Surface Analysis Gas Analysis X-Ray Analysis MRI and NMR Sample reparation (Driers, Centrifuges, Concentrators, ) Leak Detectors Medical accelerators (Linac, Synchrotron, Cyclotron ) Universities Government Labs Scientific Research Laboratories Space Simulation Typical operating pressure (mbar) > 1 > PVD: Physical Vapour Deposition CD: Compact Disk CVD: Chemical Vapour Deposition DVD: Digital Video Disk MBE: Molecular Beam Epitaxy OLED: Organic Light Emitting Diode (or OELD: Organic Electro Luminescent Display) MEMS: Micro Electro Mechanical Systems FED: Field Emission Display TFT-LCD: Thin-Film Transistor Liquid Crystal Display PDP: Plasma Display Panel SED: Surface Emission Display MRI: Magnetic Resonance Imaging HDD: Hard Disk Drive NMR: Nuclear Magnetic Resonance FPD: Flat Panel Display This Vacuum Market Segmentation Chart was developed by the Working Group of the International Statistics on Vacuum Technology Program (ISVT), and is published with their permission. Organisations that participate in the program are the Association of Vacuum Equipment Manufacturers International (AVEM), the Japan Vacuum Industry Association (JVIA), the European Vacuum Technology Association (EVTA), and the Semiconductor Equipment and Materials International (SEMI). Version , Paris, France, September 10 th, 2013

11 Join the International Statistics on Vacuum Technology (ISVT) Contact Japan Vacuum Industry Association (JVIA) Onarimon Yusen building 13th floor Minato-ku, Tokyo, Japan Association of Vacuum Equipment Manufacturers (AVEM) International 201 Park Washington Court Falls Church, VA, USA European Vacuum Technology Association (EVTA) c/o VDMA Compressors, Compressed Air and Vacuum Technology Lyoner Straße Frankfurt am Main, Germany SEMI South Zanker Milpitas Road Blvd Milpitas, CA 95035, San José, USACA, USA Source: Pfeiffer Vacuum GmbH This Buyers' Guide was developed by the Working Group of the International Statistics on Vacuum Technology Program (ISVT), and is published with their permission. Organisations that participate in the program are the Association of Vacuum Equipment Manufacturers International (AVEM), the Japan Vacuum Industry Association (JVIA), the European Vacuum Technology Association (EVTA), and the Semiconductor Equipment and Materials International (SEMI). Frankfurt, Germany, March 2017