a clear edge Solutions for Industrial Processes Mid-Range Dry Vacuum Pumps Vacuum science... product solution.

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1 a clear edge Solutions for Industrial Processes Mid-Range Dry Vacuum Pumps Vacuum science... product solution.

2 Upgrading your vacuum technology has never been easier with Edwards broad range of dry vacuum pumps Join the ever-growing group of vacuum pump users who have discovered the many benefits of using dry vacuum pumps. Edwards has the largest installed base of dry vacuum pumps in the world. Dry mechanism vacuum pumps offer many key advantages for industrial applications. Ability to handle large volumes of condensable vapours including water vapour Tolerance of process dust and particles Delivery of repeatable pumping performance Clean, quiet pumping with minimal service disruption Reliability with low cost of ownership Eliminate repeated oil changes and waste oil disposal Entry level dry pumping Drystar 80 the robust and highly reliable Drystar 80 is the most cost effective introduction to basic dry pumping Intelligent dry vacuum pumps ixl for clean applications GX for medium applications ixh for harsh applications Edwards intelligent and compact dry pumps will save energy, reduce installation costs and enhance process control and optimisation. Other features include: Vacuum speed control with inverter-driven motors Automated start-up and shut-down routines Smart communications via Ethernet, Profibus or hard-wired interfaces Green Mode energy-saving with reduced power consumption during idle periods Besides the mid-range dry vacuum pumps, Edwards offers a wide range of small dry vacuum pumps (nxds and XDS range) and a series of large dry vacuum pumps (GXS, IDX and pumping combinations range). For further information, please contact us.

3 Vacuum expertise and application solutions Edwards is a world leader in the design, technology and manufacture of vacuum pumps for industrial applications. Edwards believes in delivering results that bring value to our customers by using our breadth of industry experience to identify and apply solutions to your problems. Using the most innovative and up-to-date modelling techniques, and selecting the right pumps from a wide range of dry and wet products, we can optimise the pumping configuration to provide a system design giving the maximum performance in the most reliable and cost-effective way. ~100 m 3 /h dry pumps for coating, drying and other applications ixh100 Drystar 80 GX100N ixl120n plasma spray surface activation GXS160 or larger Harsh pipeline drying glass coating roll/web coating optical/opthalmic coating reflective/decorative coating house/central vacuum hard coating/cvd transformer VP drying, bushing filling Clean automotive drying/filling transformer drying refrigeration/ac drying plasma deposition plasma cleaning/sterilising freeze drying TMP backing Coating Drying Other, R&D ~100 m 3 /h dry pumps for heat treatment and metallurgy GX100N ixl120n ixh100 Drystar 80 GXS160 or larger VAR (arc refining) VIM (induction melting) PIC (investment casting) MIM/vac. sintering Harsh LPC (with propane) plasma beam welding LPC (with acetylene) LPN (nitriding) & nitrocarb. plasma nitriding EB welding/vac. brazing Clean oil or gas quenching tempering/annealing Heat Treatment Metallurgy

4 Drystar 80 robust entry-level dry vacuum pumping Drystar 80 is the most cost effective introduction to basic dry pumping. It is available as a stand-alone unit for 80 m 3 /h repeatable pumping performance; or in a combination with the respected EH500 hydrokinetic drive mechanical booster, offering 500 m 3 /h displacement for applications where increased pumping speed and/or lower vacuum levels are required. Depending upon the application the Drystar 80 could be supplied with mineral oil or PFPE lubrication. Technical data Unit Drystar 80 Drystar 80/EH500 Peak pumping speed 50 Hz m 3 /h / cfm 80 / / 230 Peak pumping speed 60 Hz m 3 /h / cfm 94 / / 277 Ultimate pressure mbar / torr 3x10-2 / 2x10-2 3x10-3 / 2x10-3 ultimate Kw Motor Power Kw Inlet connection ISO40 ISO100 Outlet connection NW40 NW40 Cooling water connection 1/2 Quick Connect 1/2 Quick Connect Nitrogen connection 1/4 Quick Connect 1/4 Quick Connect Water flow l/min 1 1 Typical purge flow slm Weight Kg Noise level db(a) <78 <78 Ordering information Dimensions (mm) Description DRYSTAR 80 SSP V 50Hz DRYSTAR 80 SSP V 60Hz DRYSTAR 80 PFPE SSP V 50Hz DRYSTAR 80 PFPE SSP V 60Hz DRYSTAR 80/EH500 SSP V 50Hz DRYSTAR 80/EH500 SSP V 60Hz DRYSTAR 80/EH500 PFPE SSP V 50Hz DRYSTAR 80/EH500 PFPE SSP V 60Hz Order number NR NR NR NR NRY NRY NRY NRY Type L W H DRYSTAR DRYSTAR 80 & EH

5 ixl for clean applications ixl is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations, with extremely low power consumption. Technical data Unit ixl120n ixl1000n Peak pumping speed m 3 /h / cfm 110 / / 547 Ultimate pressure mbar / torr 1.3x10-2 / 9x x10-3 / 7.5x10-4 ultimate (1) Kw green mode Kw Motor Power Kw Inlet connection Vertical / Horizontal ISO63 / NW50 ISO100 Outlet connection NW25 NW25 Cooling water connection 3/8" Quick Connect 3/8" Quick Connect Nitrogen connection 1/4" tube fitting 1/4" tube fitting Water flow (2) l/min Typical purge flow slm (default 10) Weight Kg Noise level db(a) <55 <55 (1) Average power at 700T exhaust pressure (2) Flow with Constant Flow Valve accessory fitted Ordering information Dimensions (mm) Description ixl120n V 50/60 Hz ixl1000n V 50/60 Hz Order number A A Type L W H ixl120n ixl1000n

6 GX for medium applications GX is the ideal choice for medium duty applications and sets new standards for zero maintenance between overhauls and low cost of ownership. It is available as the stand-alone GX100N pump, or combined with an inverter-driven booster as the GX600N (620 m 3 /h peak speed) and GX1000N (800 m 3 /h peak speed) units. Technical data Unit GX100N GX600N GX1000N Peak pumping speed m 3 /h / cfm 90 / / / 471 Ultimate pressure mbar / torr 5.0x10-3 / 3.75x x10-3 / 7.5x x10-3 / 7.5x10-4 ultimate (1) Kw green mode Kw Motor Power Kw Inlet connection ISO63 ISO100 ISO100 Outlet connection NW25 NW25 NW25 Cooling water connection 3/8" quick connect 3/8" quick connect 3/8" quick connect Nitrogen connection 1/4" compression fitting 1/4" compression fitting 1/4" compression fitting Water flow (2) l/min Typical purge flow slm 4 to 39 4 to 39 4 to 39 Weight Kg Noise level db(a) <60 <55 <55 (1) Average power at 700T exhaust pressure (2) Flow with Constant Flow Valve accessory fitted Ordering information Dimensions (mm) Description GX100N V 50/60 Hz GX100N V 50/60 Hz GX600N V 50/60 Hz GX600N V 50/60 Hz GX1000N V 50/60 Hz GX1000N V 50/60 Hz Order number A A A A A A Type L W H GX GX600,

7 ixh for harsh applications ixh sets new standards for really harsh process capabilities, reliability, and low cost of ownership. ixh pumps offer greatly increased dust and powder handling capabilities plus our innovative Gas Buster technology. A wide pump temperature range allows optimisation to minimise by-product accumulation from condensation and plating reactions. ixh is available as primary pump at 100 m 3 /h (the ixh100) or combined with inverter-driven boosters delivering peak speeds of 665 m 3 /h (ixh610) or 1025 m 3 /h (ixh1210). Technical data Unit ixh100 ixh610 ixh1210 Peak pumping speed m 3 /h / cfm 100 / / / 603 Ultimate pressure mbar / torr 2.0x10-2 / 1.5x x10-3 / 3.7x x10-3 / 3.7x10-3 ultimate (1) Kw green mode Kw Motor Power Kw Inlet connection ISO63 ISO100 ISO100 Outlet connection NW40 NW40 NW40 Cooling water connection 3/8" quick connect 3/8" quick connect 3/8" quick connect Nitrogen connection 1/4" compression fitting 1/4" compression fitting 1/4" compression fitting Water flow (2) l/min Typical purge flow slm 28 or or or 44 Weight Kg Noise level db(a) (1) Average power at 700 T exhaust pressure (2) Water consumption varies with pump operating temperature; figures at 110 ºC Ordering information Dimensions (mm) Description ixh /60Hz ixh /60Hz ixh Hz ixh V 50/60Hz ixh /60Hz ixh /60Hz Order number AC ACA AC ACB AC ACD Type L W H ixh ixh ixh

8 Service and Support Our expertise is in vacuum technology. We have been in the business since 1919 and our knowledge runs deep. We design, develop, manufacture and support vacuum equipment to the very highest standards. With a global installed base of 750,000 pumps we understand how vacuum pumps and systems perform in real life. We use our know-how to get the best from our products, whatever the application. Our wide portfolio of services is designed with our customers in mind: to help you deliver the best value and performance from your Edwards equipment. Whether you need our expert help at your site, a rapid product repair or exchange, or simply original OEM spares, we can help. All our services are built on our world-class technical know-how, extensive and growing footprint, and backed by our sophisticated logistics and supply chain infrastructure. Whatever you need, Edwards can help you improve productivity, lower cost of ownership and reduce impact on the environment. Improving performance On-Site Repairs Spares Global Strength Local Support Exchange Reducing costs Global contacts Belgium Brussels Brazil Sao Paulo China Shanghai (toll free) France Paris Germany Munich India Pune Israel Qiryat Gat Italy Milan Japan Yachiyo Korea Bundang Singapore Singapore Taiwan R.O.C. Jhunan Town United Kingdom Crawley UK (local rate) United States Niagara (toll free) info@edwardsvacuum.com Publication Number: J Issue A. Edwards Limited All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.

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