Cost reduced by up to. 21,060 yen/year! Purge air flow rate (rated conditions) Running cost (yen/year) 46,440. Model IDG50A. Existing model 67,500

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Membrane Air Dryer RoS New Possible to easily supply dry air using the hollow fiber membrane! Non-fluorocarbon Compatible with low dew point ( 6C) No vibration or heat discharge Purge air flow rate (L/min [ANR]) Energy saving 18 16 14 12 8 6 4 New IDGA in air flow by up to 39 (L/min [ANR]) Existing model..5 1. Inlet air pressure (MPa) Cost reduced by up to 21,6 yen/year! Reduction ratio 31% Purge air flow rate (rated conditions) Model New IDGA Existing model Running cost (yen/year) 46,44 67, Purge air flow rate Purge ratio (L/min [ANR]) (%) 86 15 1 2 [Calculation conditions] Air unit price: 3 yen/m 3 Operating hours: 12 hours/day Annual operating days: 2 days/year IDGA Variations IDGA Single Unit Type Unit Type IDGA Purge air flow reduction type IDG1 Tube configuration low flow rate type A white body is introduced. <Type M> When dry clean air is required. Mist separator + Micro mist separator + IDG <Type V> When dry clean air and pressure control are required. Mist separator + Micro mist separator + IDG + Regulator Single Unit Body size Standard dew point 1 3, 5 1, 2 3 6 2C/ 15C/Type 4C/Type L 6C/Type S IDGA/IDG New IDGA IDG CAT.ES3-7E

Membrane Air Dryer Space saving Total length is shortened. Max. 59 mm igh performance Time to reach the rated dew point Shortened by 4 minutes Under test condition IDGA Size New IDGA Existing model 3 269 271 38 315 Standard dew point: 4C/L, 6C/ 6 348 392 418 472 483 542 New Model IDGSA Time to reach the rated dew point (minutes) 6 9 6 4 minutes IDGA Existing model 483 mm 542 mm 59 mm Dew point indicator IDGLA, SA Existing model Dew point indicator visually confirms air drying. (Except IDG1) (Optional on IDG3, IDG5, IDG3, IDG5) Color of the dew point indicator Normal operating: Blue Initial state: White/Pink Fitting for exhausting air for dew point indicator Fitting for exhausting air for dehumidification Model with fitting for air discharge is also available. When air discharge is undesirable in the area around the membrane air dryer, it can be discharged to atmosphere via tubing (option). in air discharge noise with built-in silencer Except IDG1, IDG3, IDG3, IDG5, IDG5, IDG3A, IDG3A, IDG3LA, IDGA, ( ) IDGA, IDGLA Features 1

IDGA/IDG Dehumidification Principle The membrane air dryer uses hollow fibers composed of a macro molecular membrane through which moisture passes easily, but is difficult for air (oxygen and nitrogen) to pass through. When humid, compressed air is supplied to the inside of the hollow fibers, only moisture permeates the membrane and moves to the outside due to the pressure difference between the moisture inside and outside of the fibers. The compressed air becomes dry air and continues out of the dryer. Part of the dry air from the outlet side is passed through a very small orifice to reduce the pressure and the outside of the hollow fibers. The moisture which permeated to the outside of the hollow fibers is discharged to the atmosphere by this air. In this way, the partial pressure outside of the hollow fibers remains low and dehumidification is continuously performed. Air (oxygen, nitrogen, etc.) Dry air Moisture Orifice Purge air ollow fiber umid compressed air Machine tool Application Examples Measuring machine Semiconductor-related manufacturing equipment Powder coating Food machinery Packaging machine (sealing of film and paper package) Others Dental equipment Chemical analysis equipment Ozonizers, ydrogen gas generating equipment Printed circuit board IC mounting machines Fine particle drying, Transfer equipment Drying and cleaning of precision parts Condensation prevention in control panels General pneumatic equipment and pneumatic tools Features 2

Variations Meets a wide variety of flow rates (1 to L/min [ANR]) and dew points (Atmospheric pressure dew point: 15C to 6C). Single Unit Type Standard dew point: 2C Standard dew point: 15C Standard dew point: 4C Standard dew point: 6C Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] IDG1 1 IDG3 IDG3 IDG5 IDG5 IDG1 IDG2 2 IDG1 IDG2 2 Page 1 Page 2 IDG3A 3 IDG3A 3 IDG3LA IDGA IDGA IDGLA 11 IDG6 6 IDG6 6 IDG6LA 17 IDG6SA IDG 7 IDG 7 IDGLA 24 IDGSA IDG IDG IDGLA 3 IDGSA 1 = New Note) Standard dew point: Outlet air atmospheric pressure dew point under standard performance conditions Outlet air flow rate: Values under standard performance conditions Features 3

IDGA/IDG Unit Type <Type M> A mist separator, micro mist separator, or micro mist separator with pre-filter combined with a single unit Standard dew point: 2C Standard dew point: 15C Standard dew point: 4C Standard dew point: 6C Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] IDG3M3 IDG3M3 IDG5M3 IDG5M3 IDG1M3 IDG2M3 IDG3AM3 2 3 IDG1M3 IDG2M3 IDG3AM3 2 3 IDG3LAM3 Page 15 Page 16 IDGAM3 IDGAM3 IDGLAM3 11 IDG6M2 6 IDG6M2 6 IDG6LAM3 17 IDG6SAM3 IDGM2 7 IDGM2 7 IDGLAM3 24 IDGSAM3 IDGM2 IDGM2 IDGLAM3 3 IDGSAM3 1 Rated conditions are.7 MPa of inlet air pressure and C of inlet air temperature. <Type V> A regulator combined with the type M Standard dew point: 2C Standard dew point: 15C Standard dew point: 4C Standard dew point: 6C Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] Outlet air flow rate L/min [ANR] IDG3V3 IDG3V3 IDG5V3 IDG5V3 IDG1V3 IDG2V3 IDG3AV3 2 3 IDG1V3 IDG2V3 IDG3AV3 2 3 IDG3LAV3 Page 15 Page 16 IDGAV3 IDGAV3 IDGLAV3 11 IDG6V2 6 IDG6V2 6 IDG6LAV3 17 IDG6SAV3 IDGV2 7 IDGV2 7 IDGLAV3 24 IDGSAV3 IDGV2 IDGV2 IDGLAV3 Rated conditions are.7 MPa of inlet air pressure and C of inlet air temperature. 3 IDGSAV3 1 Made to Order -X16 Contents With element service indicator -X17 With micro mist separator regulator -X32 With differential pressure gauge Features 4

Membrane Air Dryer/Single Unit Type IDGA Standard dew point 2C, 15C, 4C, 6C ow to Order IDGA RoS IDGA IDG 3 A 3 Size 3 6 Standard dew point temperature and air flow rate Standard Flow rate by size Outlet air flow rate (L/min [ANR]) dew point (C) 3 6 2 3 Select from IDG 15 3 L S 4 6 JIS 11 17 24 3 1 Thread type N F Type Rc NPT G Option P R Accessory B Contents None (Standard) With fitting for air discharge Flow direction (Right Left) Note) In the case of two or more options, indicate them alphabetically. Type None (Standard) With bracket Note) When symbol B is indicated, a bracket assembly with a part number shown in the table left below is included as an accessory. Bracket Assembly (Accessory) Part No. Part no. BM64 BM65 Applicable model IDG3A, IDGA IDG6A, IDGA, IDGA With cap bolts (2 pcs.) and spring washers (2 pcs.) 2 3 4 1/4 3/8 1/2 3 Size 6 1

L S JIS Bracket Assembly (Accessory) Part No. Part no. BM59 BM61 BM63 BM65 IDG 1 2 Size 1 3 5 1 2 6 Standard dew point temperature and air flow rate Standard dew point Flow rate by size Outlet air flow rate (L/min [ANR]) (C) 1 3 5 1 2 6 2 1 2 6 7 15 6 7 4 6 IDG3, 5 IDG1 IDG2 IDG6,, With cap bolts (2 pcs.) and spring washers (2 pcs.) Applicable model Membrane Air Dryer/Single Unit Type IDG 2 Select from IDGA ow to Order Thread type N F Type Rc NPT G P R S 1 2 3 4 Contents None (Standard) Accessory B Port size 1/8 1/4 3/8 1/2 With fitting for air discharge Flow direction (Right Left) With dew point indicator 1 3 5 Type None (Standard) With bracket (Except IDG1) Note) When symbol B is indicated, a bracket assembly with a part number shown in the table left below is included as an accessory. 1 Size 2 6 Size 1 3 5 1 2 6 Option Standard equipment Note) In the case of two or more options, indicate them alphabetically. RoS Specific Product Precautions Made to Order Model Selection Unit V Type M Single Unit Type 2

IDGA IDGA/IDG Standard Specifications/Single Unit Type (Standard dew point 2C, 15C) Standard dew point 2C Range of operating conditions Standard performance Standard performance conditions Model IDG1 IDG3 IDG5 IDG1 IDG2 IDG3A IDGA IDG6 IDG Fluid Compressed air Inlet air pressure (MPa).3 to.85.3 to 1. Inlet air temperature ( C) Note 1) 5 to 55 5 to Ambient temperature ( C) Note 1) 5 to 55 5 to Outlet air atmospheric pressure dew point (C) 2 Note 2) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) Inlet air pressure (MPa) Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator air flow rate (Nominal size B) Weight (kg) (With bracket) 12.5 1 2.5 31 6 62 12 1 2 2.7 1 L/min [ANR] {In case of Inlet air pressure.7 MPa} 1/4 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2.11. (.31).43 (.51) Note 1) When using the product in the temperature range between 5C and 5C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (at.7 MPa inlet air pressure) for the dew point indicator (except IDG1, 3, 5)..66 (.76) 36 3 6.78 (.91) 586 86.81 (.94) 7 6 1 1. (1.65) 9 7 1 1. (1.65) IDG 119 19 1.55 (1.7) Standard dew point 15C/Type Range of operating conditions Standard performance Standard performance conditions Model IDG3 IDG5 IDG1 IDG2 IDG3A IDGA IDG6 IDG IDG Fluid Compressed air Inlet air pressure (MPa).3 to.85.3 to 1. Inlet air temperature (C) Note 1) 5 to 55 5 to Ambient temperature (C) Note 1) 5 to 55 5 to Outlet air atmospheric pressure dew point (C) 15 Note 2) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) Inlet air pressure (MPa) Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator air flow rate (Nominal size B) Weight (kg) (With bracket) 28 3 56 6 111 11 222 2 22 329 3 5 665 6 65 83 7 8 29.7 1 L/min [ANR] {In case of Inlet air pressure.7 MPa} 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2..43.66.78.81 1. 1. (.31) (.51) (.76) (.91) (.94) (1.65) (1.65) Note 1) When using the product in the temperature range between 5C and 5C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (at.7 MPa inlet air pressure) for the dew point indicator (except IDG3, 5). 111 11 1.55 (1.7) 3

Membrane Air Dryer/Single Unit Type IDGA IDGA/IDG Standard Specifications/Single Unit Type (Standard dew point 4C, 6C) Standard dew point 4C/Type L Range of operating conditions Standard performance Standard performance conditions Model IDG3LA IDGLA IDG6LA IDGLA Fluid Compressed air Inlet air pressure (MPa).3 to 1. Inlet air temperature (C) Note 1) 5 to Ambient temperature (C) Note 1) 5 to Outlet air atmospheric pressure dew point (C) 4 Note 2) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) Inlet air pressure (MPa) Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator air flow rate (Nominal size B) Weight (kg) (With bracket) 93 18 135 11 224 17 54.7 38 24 68 IDGLA 4 3 1 L/min [ANR] {In case of Inlet air pressure.7 MPa} 1/4, 3/8 3/8, 1/2.78 (.91).81 (.94) 1.56 (1.71) 1.69 (1.84) 1.82 (1.97) Note 1) When using the product in the temperature range between 5C and 5C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (at.7 MPa inlet air pressure) for the dew point indicator. Standard dew point 6C/Type S Range of operating conditions Standard performance Standard performance conditions Model IDG6SA IDGSA IDGSA Fluid Inlet air pressure (MPa) Inlet air temperature (C) Note 1) Ambient temperature (C) Note 1) Compressed air.3 to 1. 5 to 5 to Outlet air atmospheric pressure dew point (C) 6 Note 2) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) Inlet air pressure (MPa) Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator air flow rate (Nominal size B) Weight (kg) (With bracket) 14 23 1 8 4.7 1 L/min [ANR] {In case of Inlet air pressure.7 MPa} 3/8, 1/2 1.56 (1.71) 1.69 (1.84) 1.82 (1.97) Note 1) When using the product in the temperature range between 5C and 5C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (at.7 MPa inlet air pressure) for the dew point indicator. Specific Product Precautions Made to Order Model Selection Unit V Type M Single Unit Type 4

IDGA IDGA/IDG Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C, P1: Inlet air pressure, Tube for air discharge (Option: P): None Note: Correcting outlet air flow rate is required depending on inlet air temperature. Refer to page 31 or after for details. For model with fitting for air discharge (Option: P), the outlet air atmospheric pressure dew point may become higher depending on the tube length for air discharge. For other models, if the tube length is 5 m or less, a rise of the outlet air at the atmospheric pressure dew point will be 1C or less. Standard dew point 2C [: ], 15C [: ] IDG1 IDG3, 3 Outlet air atmospheric pressure dew point (C) 1 2 3 IDG1 4 4 8 12 16 Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point (C) 1 2 IDG3 3 IDG3 4 1 2 3 4 Outlet air flow rate (L/min [ANR]) IDG5, 5 IDG1, 1 Outlet air atmospheric pressure dew point (C) 1 2 IDG5 3 IDG5 4 2 4 6 8 Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point (C) 1 2 IDG1 3 IDG1 4 4 8 12 16 Outlet air flow rate (L/min [ANR]) IDG2, 2 IDG3A, 3A Outlet air atmospheric pressure dew point (C) 1 2 IDG2 3 IDG2 4 2 3 Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point (C) 1 2 3 4 IDG3A IDG3A 2 3 4 Outlet air flow rate (L/min [ANR]) IDGA, A IDG6, 6 Outlet air atmospheric pressure dew point (C) 1 2 3 IDGA 4 IDGA 2 4 6 8 Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point (C) 1 2 IDG6 3 IDG6 4 2 4 6 8 Outlet air flow rate (L/min [ANR]) 5

Membrane Air Dryer/Single Unit Type IDGA IDGA/IDG Performance Chart IDG, Outlet air atmospheric pressure dew point (C) IDG3LA, LA Outlet air atmospheric pressure dew point (C) 1 2 3 4 2 4 6 8 1 2 3 4 Outlet air flow rate (L/min [ANR]) IDGLA 6 IDG3LA 7 4 8 12 16 IDGLA, SA Outlet air atmospheric pressure dew point (C) 1 2 3 4 6 Outlet air flow rate (L/min [ANR]) IDG, Outlet air atmospheric pressure dew point (C) 1 2 3 4 4 8 12 16 IDG6LA, 6SA Outlet air atmospheric pressure dew point (C) 1 2 3 4 6 Outlet air flow rate (L/min [ANR]) 7 4 8 12 16 2 24 IDGLA, SA Outlet air atmospheric pressure dew point (C) 1 2 3 4 Outlet air flow rate (L/min [ANR]) IDGSA IDG IDG 7 2 3 Outlet air flow rate (L/min [ANR]) Standard dew point 4C [: L], 6C [: S] ow to read the Performance Chart and to select the model IDGLA Solid lines and dashed lines beginning at the top indicate the performance at C of inlet air temperature and P1 =.3 MPa,.5 MPa, and.7 MPa of inlet air pressure, respectively. In the case of C of inlet air temperature and 45 [L/min] of outlet air flow rate Model 1: The atmosphere pressure dew point at P1 =.7 MPa: C. In the case of 4C of inlet air temperature and 45 [L/min] of outlet air flow rate Example) Outlet air flow rate correction factor:.6 (The correction factor differs depending on the model. Refer to page 31 and after for details.) Corrected outlet air flow rate: 45.6 = [L/min] Model 1: Performing corresponding to 15C of outlet atmosphere pressure dew point at. Outlet air atmospheric pressure dew point (C) 1 15 2 3 4 Model 2: IDG6SA IDGS IDG IDG 6 IDGL 7 2 3 4 Outlet air flow rate (L/min [ANR]) Model 1: 45 Outlet air flow rate (L/min) IDG6LA Model 2: Model 1: 6 Single Unit Type Specific Product Precautions Made to Order Model Selection Unit V Type M

IDGA IDGA/IDG Single Unit Type/Flow-rate Characteristics Standard dew point 2C [: ], 15C [: ] IDG1 IDG3, 3 Conditions: Inlet air temperature C, P1: Inlet air pressure.4.4.3.2.1.3.2.1.. 4 8 12 16 1 2 3 4 IDG5, 5 IDG1, 1.4.3.2.1.6.4.2. 2 4 6 8 IDG2, 2. 4 8 12 16 IDG3A, 3A.8.3.6.4.2.2.1.. 2 3 2 3 4 IDGA, A.8 IDG6A, 6A.6.5.6.4.2.4.3.2.1 7. 2 4 6 8. 2 4 6 8

Membrane Air Dryer/Single Unit Type IDGA IDGA/IDG Single Unit Type/Flow-rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure Standard dew point 2C [: ], 15C [: ] IDG,.8.6.4.2 IDG,.1.8.6.4.2 Single Unit Type. 2 4 6 8 12 Standard dew point 4C [: L], 6C [: S] IDG3LA.3.2.1.1.8.6.4.2 2 3 4 IDG6LA, 6SA.. 2 3 2 3 4 IDGLA, SA.3.2.1. 2 3 4. 4 8 12 16 IDGLA.8.6.4.2 2 4 6 8 IDGLA, SA.2.16.12.8.4 Tube length m 1 m 3 m 5 m IDG3A 2 19 17 16 IDG3LA 4 39 38 With fitting for air discharge (Option: P) As the tube length for air discharge becomes longer, the outlet air atmospheric pressure dew point becomes higher. Refer to the table below. Conditions Inlet air temperature : C (Saturated) Ambient temperature : C Inlet air pressure :.7 MPa Outlet air flow rate : Flow gained under conditions of the standard performance. (Refer to pages 3 and 4.) Tube size : O.D. ø12 x I.D. ø9 8 Specific Product Precautions Made to Order Model Selection Unit V Type M

IDGA IDGA/IDG Purge Air Flow-rate Characteristics IDG1, 3, 5, 1, 2 (Standard dew point 2C) IDG3, 5, 1, 2 (Standard dew point 15C) IDG3A, A (Standard dew point 2C) IDG3A, A (Standard dew point 15C) IDG3LA, LA (Standard dew point 4C) 1 6 IDG2 IDGA Purge air flow rate (L/min) 4 3 2 IDG1 IDG2 Purge air flow rate (L/min) IDG3A IDG3A 1 IDG5 IDG1 IDG3,IDG5 IDG3 IDG1.5 1. Inlet air pressure (MPa) IDGA IDG3LA IDGLA.5 1. Inlet air pressure (MPa) IDG6,, (Standard dew point 2C) IDG6,, (Standard dew point 15C) IDG6LA, LA, LA (Standard dew point 4C) IDG6SA, SA, SA (Standard dew point 6C) 1 28 IDG IDGLA 24 IDGSA IDG Purge air flow rate (L/min) 2 16 12 8 IDG6 IDG IDG IDG6 Purge air flow rate (L/min) IDG6LA IDGLA IDGSA 4 IDG6SA.5 1..5 1. Inlet air pressure (MPa) Inlet air pressure (MPa) 9

Membrane Air Dryer/Single Unit Type IDGA IDGA/IDG Dimensions IDG1 q e dehumidification t w Single Unit Type Option With fitting for air discharge (Option: P) IDG3, 5 IDG3, 5 Component Parts No. 1 2 3 4 5 6 Purge air for dehumidification Body Description Female connector Strainer Case Orifice Silencer plug plug t q i Brass Brass Brass Resin Option With fitting for air discharge (Option: P) Purge Material IDG1, 2 IDG1, 2 Aluminum alloy Stainless steel o t q y i r dehumidification IDG1 IDG3, 3 IDG5, 5 IDG1, 1 IDG2, 2 Resin Brass dehumidification plug Option With fitting for air discharge (Option: P) Purge Note! Platinum silver coated (IDG1 is electroless nickel plated.) Electroless nickel plated Specific Product Precautions Made to Order Model Selection Unit V Type M Replacement Parts No. Description 8 Membrane module kit 9 Dew point indicator kit 1 Part no. IDG1 IDG3 IDG3 IDG5 IDG5 IDG1 IDG1 IDG2 IDG2 IDG-EL3 IDG-EL3 IDG-EL5 IDG-EL5 IDG-EL1 IDG-EL1 IDG-EL2 IDG-EL2 With Orifice (1 pc.), O-ring (3 pcs.), Gasket (1 pc.) With Orifice (1 pc.), Silencer (1 pc.), O-ring (4 pcs.) IDG-DP1 (Option: S) IDG-DP1 With O-ring (1 pc.) IDG-DP1-X1 (Option: PS) IDG-DP1-X1 (Option: P) With O-ring (1 pc.) 1

IDGA IDGA/IDG Dimensions IDG3A IDGA o q e Option With fitting for air discharge (Option: P) r w i dehumidification y dehumidification IDG6,, IDG6A, A, A o q e t Option With fitting for air discharge (Option: P) r! w i dehumidification dehumidification Component Parts No. Description 1 Body Material IDG3A IDGA IDG6, 6 IDG6LA, 6SAIDG, IDGLA, SA IDG, IDGLA, SA Note Aluminum alloy/white Platinum silver coated 2 3 4 5 6 Case Orifice older Silencer Adapter Aluminum alloy Resin Stainless steel Stainless steel Aluminum alloy Resin + Brass Resin Resin + Brass Resin Resin + Brass Resin Replacement Parts No. Description Part no. IDG3A IDGA IDG6, 6 IDG6LA, 6SA IDG, IDGLA, SA IDG, IDGLA, SA 8 Membrane module kit IDG-EL3A IDG-ELA IDG-EL6 IDG-EL6LA IDG-EL IDG-ELLA IDG-EL IDG-ELLA With Nozzle (1 pc.), Adapter (1 pc.), O-ring (1 pc.) With O-ring (1 pc.) 9 Dew point indicator kit IDG-DP1 1 IDG-DP1-X1 (Option: P) 11

Membrane Air Dryer/Single Unit Type IDGA IDGA/IDG Dimensions/Single Unit Type IDG1 IDG3, 5 IDG3, 5 Bracket (Accessory: B) : 1/4 exagon width across flats 19 IDG1, 2 IDG1, 2 16 22 2.3 : 1/8, 1/4 14 3 A E Purge air (67) (46) (26) 4 (86) (67) 14 exagon width across flats 14 dehumidification (Maintenance space mm or more) 7 D B (293) dehumidification Dew point indicator (Option: S) 17 11 L dehumidification ø8 With fitting for air discharge (Option: P) dehumidification exagon width across flats 14 exagon width across flats 17 exagon width across flats 14 exagon width across flats 17 73 38 Purge air C 41 12 6 2.3 23 118 : 1/4 Bracket (Accessory: B) Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø6 (NPT threads: ø1/4 inch) (34) () With fitting for air discharge (Option: P) 14 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø8 or ø5/16 inch With fitting for air discharge (Option: P) Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 or ø5/16 inch Purge air discharge tubing port for dehumidification Applicable tubing O.D.: øj dehumidification (NPT threads: øk inch) (98) () (64) (F) (G) Specific Product Precautions Made to Order Model Selection Unit V Type M Single Unit Type (Maintenance space mm or more) Model IDG1, 1 IDG2, 2 L 1/4, 3/8 A B C D E 83 187 53 165 113 212 54 19 62 82 Option: P F G J 97 114 224 249 119 [126] 147 [154] 8 1 K 5/16 3/8 Values inside [ ] are for NPT threads. 12

IDGA IDGA/IDG Dimensions/Single Unit Type IDG3A IDGA With fitting for air discharge (Option: P) 2.3 Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 or ø5/16 inch 18 7 82 Purge air 17 L 91 With fitting for air discharge (Option: P) Purge air discharge tubing 2.3 port for dew point indicator 24 Applicable tubing O.D.: ø8 or ø5/16 inch 26 97 () (D) (B) (G) 18 7 14 7 dew 24 point indicator 17 L 7 26 Bracket (Accessory: B) (G) 8 (D) (B) () dehumidification (Maintenance space mm or more) Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø12 (NPT threads: ø1/2 inch) IDG6,, IDG6A, A, A 18 14 6 Bracket (Accessory: B) dehumidification (Maintenance space mm or more) Model Option: P B D L G IDG3A 291 269 361 32 1/4, 3/8 IDGA 33 38 4 341 IDG6 3/8, 1/2 IDG, 1/2 352 33 428 369 IDG6A 348 326 426 367 IDGA 3/8, 1/2 418 396 495 436 IDGA 483 461 56 1 13 Purge air discharge tubing port for dehumidification Applicable tubing I.D.: ø19 (NPT threads: ø3/4 inch)

RoS Type M, Type V Membrane Air Dryer/Unit Type IDGA ow to Order IDGA IDGA IDG 3 A M 3 3 Size 3 6 Standard dew point temperature/outlet air flow rate Standard dew Flow rate by size Outlet air flow rate (L/min [ANR]) point (C) 3 6 2 3 15 3 Select from IDG L S 4 6 11 17 24 3 1 Option P R Contents None (Standard) With fitting for air discharge Flow direction (Right Left) Made to Order Refer to page 33 to 44 for details. Note discharge: Combination with standard type () is not available. Combination with Type V is not available. Note) In the case of two or more options, indicate them alphabetically. Note) Type V is not applicable because it is equipped with a relief type regulator. M V Contents With separator With separator and regulator Size 3 6 3 6 3 Mist separator Components Micro mist separator Membrane air dryer Regulator Equipment connection 6 2 3 4 discharge method discharge Note method Manual Combination with valve Option P is not available. C D J Port size 1/4 3/8 1/2 N.C. auto-drain N.O. auto-drain guide ( 1/4 without valve) 3 Auto-drains listed on page 17 are attached. For model selection of an auto-drain, refer to the Selection Precautions on page 45. Size 6 Contents 3 Modular connection L L L S L S L S M, V Thread type N F Type Rc NPT G 15

RoS Membrane Air Dryer/Unit Type IDG ow to Order IDG 1 M 3 2 Single Unit Type Size 3 5 1 2 6 Standard dew point temperature/outlet air flow rate Standard dew Flow rate by size Outlet air flow rate (L/min [ANR]) point (C) 3 5 1 2 6 2 2 6 7 L S M V 15 4 6 Contents With separator With separator and regulator Size 3 5 1 2 6 3 5 1 2 6 Mist separator 2 Micro mist separator 6 Components 7 Select from IDGA Micro mist separator with pre-filter Membrane air dryer Regulator In the case of two or more options, indicate them alphabetically. Note 1) Type V is not applicable because it is equipped with a relief type regulator. ( P is used when it is undesirable for the air to be discharged into the main body of IDG. Therefore, it is not possible to use it in combination with a separator with manual valve, which discharges air around it, or Type V with a relief type regulator.) Note 2) They are not applicable in case the thread type is N or F if the thread size is 3, 5, 1, and 2. (Because barrel nipples are used for equipment connections.) Note 3) Select the option if the size is 3 or 5. The option is the standard equipment for other sizes. discharge method (Mist separator, Micro mist separator, Micro mist separator with pre-filter) discharge 3 method 5 C D J 1 2 3 4 Port size 1/8 1/4 3/8 1/2 3 Size 1 2 5 6 1 For model selection of an auto-drain, refer to the Selection Precautions on page 45. Thread type N F Type Rc NPT G Option Contents Note None (Standard) P R S Note 2) With fitting for air discharge Made to Order Refer to page 33 to 44 for details. discharge: Combination with standard type () is not available. Combination with Type V is not available. Note 1) Flow direction (Right Left) With dew point indicator Note 3) Manual valve N.C. auto-drain N.O. auto-drain guide ( 1/4 without valve) Size 2 6 Note Combination with Option P is not available. Auto-drains listed on page 17 are attached. Specific Product Precautions Made to Order Model Selection Unit V Type M Equipment connection: Models are applicable for either a modular connection or a nipple connection. IDG3 IDG5 IDG1 IDG2 IDG6 IDG IDG 3 2 Contents Modular connection Note 1) Nipple connection Note 2) M, V Note 1) For some models of option P, some parts are connected with nipples (Refer to pages 23 and 24). Note 2) For some models, some parts are connected with modules (Refer to page 29). 16

IDGA IDGA/IDG Auto-drain, Bowl Assembly, Pressure Gauge Part No. Description Float type auto-drain Bowl assembly (N.O) N.C. N.O. Pressure gauge (Type V only) IDG3M3 IDG5M3 IDG3V3 IDG5V3 AD27-C IDG1M3 IDG1V3 IDG2M3 IDG2V3 IDG3AM3 IDG3AV3 AD37 GC3-1AS IDG3AM3 IDGAM3 IDG3AV3 IDGAV3 AD47 AD48 IDGAM3 IDGAV3 Description Float type auto-drain Bowl assembly (N.O) N.C. N.O. Pressure gauge (Type V only) IDG6M2 IDG6M2 IDG6V2 IDG6V2 AM-CA3C-D IDGM2 IDGM2 IDGM2 IDGV2 IDGV2 IDGV2 AM-CA4C-D GC3-1AS Description Float type auto-drain N.C. N.O. Pressure gauge (Type V only) IDG3LAM3 IDG3LAV3 IDGLAM3 IDGLAV3 IDG6LAM3 IDG6LAV3 IDG6SAM3 IDGLAM2 IDG6SAV3 IDGLAV2 AD47 AD48 GC3-1AS IDGSAM2 IDGSAV2 IDGLAM3 IDGLAV3 IDGSAM3 IDGSAV3 Replacement Parts (Element for mist separator, micro mist separator, micro mist separator with pre-filter) Description AFM4 AFD4 AM3 AM4 Element assembly AFM4P-6AS AFD4P-6AS AM-EL3 AM-EL4 Type M Type V JIS (Type M) (Type V) Mist separator Micro mist separator Membrane air dryer Mist separator Micro mist separator Membrane air dryer Regulator IDG6 to M2 IDG6 to M2 IDG6 to V2 IDG6 to V2 Micro mist separator with pre-filter Membrane air dryer Micro mist separator with pre-filter Membrane air dryer Regulator 17

Membrane Air Dryer/Unit Type IDGA IDGA/IDG Clogging Indication Replace the element when the element service indicator s red indication reaches completely to the top. The top of the indication window shows differential pressure of approximately.1 MPa. Replace the element after two years of use, even if the element service indicator s red indication does not reach the top. Single Unit Type When the differential air is.5 MPa or less (The tip of the indicator is just visible.) When the differential air is.1 MPa or more (The indicator is completely up to the top.) The element service indicator is shipped mounted to the micro mist separator with pre-filter, and cannot be retrofitted or used individually. Specific Product Precautions Made to Order Model Selection Unit V Type M 18

IDGA IDGA/IDG Standard Specifications/Unit [Type M, Type V] (Standard dew point: 2C, 15C) Component equipment Range of operating conditions Model Mist separator Micro mist separator Micro mist separator with pre-filter Regulator (Type V only) Note 1) Fluid Inlet air pressure (MPa) Inlet air temperature (C) Ambient temperature (C) Standard Outlet air atmospheric performance pressure dew point (C) Inlet air flow rate Standard performance conditions (L/min [ANR]) Note 4) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 5) Inlet air pressure (MPa) Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator air flow rate Regulator construction (Type V only) (Nominal size B) Weight (kg) (With auto-drain) Type M Type V IDG3M3 IDG5M3 IDG3V3 IDG5V3 AFM2 31 6 AFD2 AR2 Note 2) 1/8, 1/4.83 (.9) 1.28 (1.35).3 to.85 5 to 55 Note 3) 5 to 55 Note 3) 62 12 IDG1M3 IDG1V3 IDG2V3 AFM3 1 Standard dew point: 2C IDG3AM3 IDG3AV3 2 36 3 6.7 AFM4 AFD4 Compressed air IDGAM3 IDGAV3 586 86 IDG6M2 IDG6V2 AM3C 1 L/min [ANR] {In the case of Inlet air pressure.7 MPa} 1.21 (1.3) 1.67 (1.76) AFD3 AR Note 2) IDG2M3 2 2 1.44 (1.53) 1.9 (1.99) Relief type 3.38 (3.49) 3.41 (3.52) AR4 Note 2).3 to 1. 5 to Note 3) 5 to Note 3) 72 6 12 3.8 (3.9) IDGM2 IDGV2 888 7 138 4.48 (4.58) AM4C 1/4, 3/8 3/8, 1/2 1/2 2.27 (2.37) 2.3 (2.4) 2.61 (2.71) 3.29 (3.39) IDGM2 IDGV2 1185 185 3.42 (3.52) 4.61 (4.71) Component equipment Range of operating conditions Model Standard Outlet air atmospheric performance pressure dew point (C) Standard performance conditions Mist separator Micro mist separator Micro mist separator with pre-filter Regulator (Type V only) Note 1) Fluid Inlet air pressure (MPa) Inlet air temperature (C) Ambient temperature (C) Inlet air flow rate (L/min [ANR]) Note 4) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 5) Inlet air pressure (MPa) Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator air flow rate Regulator construction (Type V only) (Nominal size B) Weight (kg) (With auto-drain) Type M Type V IDG3M3 IDG3V3 28 3 AFM2 AFD2 AR2 Note 2) 1/8, 1/4.83 (.9) 1.28 (1.35) IDG5M3 IDG5V3.3 to.85 5 to 55 Note 3) 5 to 55 Note 3) 56 6 IDG1M3 Standard dew point: 15C IDG2M3 IDG3AM3 IDGAM3 IDG6M2 IDG1V3 IDG2V3 IDG3AV3 IDGAV3 IDG6V2 AFM3 AFM4 111 11 222 2 22 15.7 AFD4 Compressed air 329 3 29 AM3C 1 L/min [ANR] {In the case of Inlet air pressure.7 MPa} 1.21 (1.3) 1.67 (1.76) AFD3 AR Note 2) 1.44 (1.53) 1.9 (1.99) Relief type 3.38 (3.49) 5 3.41 (3.52) AR4 Note 2).3 to 1. 5 to Note 3) 5 to Note 3) 665 6 65 3.8 (3.9) IDGM2 IDGV2 818 7 68 4.48 (4.58) AM4C 1/4, 3/8 3/8, 1/2 1/2 2.27 (2.37) 2.3 (2.4) 2.61 (2.71) 3.29 (3.39) IDGM2 IDGV2 1 3.42 (3.52) 4.61 (4.71) 19

Membrane Air Dryer/Unit Type IDGA IDGA/IDG Standard Specifications/Unit [Type M, Type V] (Standard dew point: 4C, 6C) Component equipment Range of operating conditions Model Standard Outlet air atmospheric performance pressure dew point (C) Standard performance conditions Mist separator Micro mist separator Regulator (Type V only) Note 1) Fluid Inlet air pressure (MPa) Inlet air temperature (C) Ambient temperature (C) Inlet air flow rate (L/min [ANR]) Note 5) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 6) Inlet air pressure (MPa) Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator air flow rate Regulator construction (Type V only) (Nominal size B) Weight (kg) (With auto-drain) Type M Type V IDG3LAM3 IDG3LAV3 93 18 2.27 (2.37) 3.38 (3.49) IDGLAM3 IDGLAV3 135 11 Standard dew point: 4C IDG6LAM3 IDG6LAV3 AFM4 AFD4 AR4 Note 2) Compressed air.3 to 1. 5 to Note 3) 5 to Note 3) 4 Note 4) 224 17 54.7 IDGLAM3 IDGLAV3 38 24 1 L/min [ANR] {In the case of Inlet air pressure.7 MPa} 3.41 (3.52) Relief type 4.16 (4.26) 68 1/4, 3/8 3/8, 1/2 2.3 (2.4) 3.5 (3.15) 3.18 (3.28) 4.29 (4.39) IDGLAM3 IDGLAV3 Note 1) For flow-rate characteristics and pressure characteristics of regulator, refer to Best Pneumatics No. 5. Note 2) It will come with Option E (With square-shaped, embedded type of a pressure regulator). Refer to Best Pneumatics No. 5 for details of regulators such as set pressure range, etc. Note 3) No freezing. Note 4) Refer to the Piping Precautions (Piping material for low dew point air) on page 46. Note 5) ANR indicates the flow rate converted to the value at 2C, under the atmospheric pressure and the state of relative humidity 65%. Note 6) Includes 1 L/min [ANR] of air flow (at.7 MPa inlet air pressure) for the dew point indicator. Note 7) When highly purified air is required, refer to the Design 3. on page 45. 4 3 3.31 (3.41) 4.42 (4.52) IDG6SAM3 IDG6SAV3 Standard dew point: 6C IDGSAM3 IDGSAV3 AFM4 AFD4 AR4 Note 2) Compressed air.3 to 1. 5 to Note 3) 5 to Note 3) 6 Note 4) 14 4.7 IDGSAM3 IDGSAV3 1 L/min [ANR] {In the case of Inlet air pressure.7 MPa} 3.5 (3.15) 4.16 (4.26) Relief type 3/8, 1/2 3.18 (3.28) 4.29 (4.39) 23 1 8 3.31 (3.41) 4.42 (4.52) Single Unit Type Specific Product Precautions Made to Order Model Selection Unit V Type M 2

IDGA IDGA/IDG Unit Type/Flow-rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure Standard dew point 2C [: ], 15C [: ] IDG3M3, 3V3 IDG3M3, 3V3.12.1 P1.8 =.3 MPa.6.4.2.12.1.8.6 1 2 3 4 IDG1M3, 1V3 IDG1M3, 1V3.4.2 4 8 12 16 IDG3AM3, 3AV3.8.6.4 Element saturated state (AFM, AFD) Element saturated state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element initial state (AFM, AFD) Element initial state (AFM, AFD).2 2 3 4 IDG5M3, 5V3 IDG5M3, 5V3.12.1.8.6.4.2.12.1.8.6 2 4 6 8 IDG2M3, 2V3 IDG2M3, 2V3.4.2 2 3 IDGAM3, AV3.12.1.8.6 Element saturated state (AFM, AFD) Element saturated state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element initial state (AFM, AFD) Element initial state (AFM, AFD).4.2 2 4 6 8 IDG6M2, 6M2 IDG6V2, 6V2 21.12.1.8.6.4.2 2 4 6 8 IDGM2, M2 IDGV2, V2 Element saturated state (AM) Element initial state (AM) Element saturated state (AM) Element initial state (AM).12.1.8.6.4.2 3 6 9 12

Membrane Air Dryer/Unit Type IDGA IDGA/IDG Unit Type/Flow-rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure IDGM2, M2 IDGV2, V2.12.1.8.6.4.2 4 8 12 16.8.6.4.8.6.4.2.12.1.8.6.4.2 Element saturated state (AM) IDG3LAM3, 3LAV3 Element saturated state (AFM, AFD).2 2 3 4 IDG6LAM3, 6SAM3 IDG6LAV3, 6SAV3 8 16 24 2 3 IDGLAM3, SAM3 IDGLAV3, SAV3 Element initial state (AM) Standard dew point 4C [: L], 6C [: S] Element initial state (AFM, AFD) 2 3 4 IDGLAM3, LAV3 IDGLAM3, SAM3 IDGLAV3, SAV3.12.1.8.6.4.2 2 4 6 8.12.1.8.6.4.2 Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) 22 Single Unit Type Specific Product Precautions Made to Order Model Selection Unit V Type M

IDGA IDGA/IDG Dimensions (Type M) IDG3M3, 5M3 IDG3M3, 5M3 53 3 24 29 : 1/8, 1/4 41.5 43 159 ø5.5 Dew point indicator (Option: S) 24 67 1 116 97 5.5 12 118 14 9 3.2 O S O S dehumidification (Maintenance space mm or more) Discharge With float type auto-drain (N.C.) 115 O S M5 x.8 With fitting for air discharge (Option: P) Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 in the case of 1/8: (23) in the case of 1/4: (199) 54 3 41.5 43 ø5.5 Dew point indicator (Option: PS) (177) 9 24 1 24 29 67 134 115 5.5 12 118 3.2 (64) O S O S 23 M5 x.8 M5 x.8 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø8 (Maintenance space mm or more) 53 : Rc1/8, 1/4 (NPT, G threads are not available.)

Membrane Air Dryer/Unit Type IDGA IDGA/IDG Dimensions (Type M) IDG1M3, 2M3 IDG1M3, 2M3 C With fitting for air discharge (Option: P) 197 156 17 129 14 14 55 57 A ø7 14 dew point indicator 7 (Maintenance space mm or more) 55 57 ø7 14 (F) 7 22 B Purge air for dehumidification (59) 97 () : 1/4, 3/8 7 41 35 35 4 41 82 Purge air for dehumidification Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 7 41 (24) 35 35 4 41 82 Discharge With float type auto-drain N.C.: Gray With drain guide : Rc1/4, 3/8 (NPT, G threads are not available.) D Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) E Thread size: 1/4 (Without valve mechanism) exagon width across flats 17 Total length of the separator Specific Product Precautions Made to Order Model Selection Unit V Type M Single Unit Type Model A B C IDG1M3,1M3 IDG2M3,2M3 S S O 197 227 O 187 212 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: øg 192 217 With float type auto-drain D With drain guide E 17 136 Option: P F G Port Port size: 1/4 size: 3/8 239 241 269 (Maintenance space mm or more) 271 8 1 224 249 Discharge With drain guide E Rc1/4 (Without valve mechanism) exagon width across flats 17 Total length of the separator 24

O O O IDGA IDGA/IDG Dimensions (Type M) IDG3AM3 IDGAM3 IDG6AM3 IDGAM3 IDGAM3 18 72.5 ø9 C dew point indicator 22 L D 4 48 4 96 195 165 9 4 B A 18 ø4 ø4 Purge air for dehumidification (Maintenance space mm or more) With fitting for air discharge (Option: P) IDG6LAM3, 6SAM3 IDGLAM3, SAM3 IDGLAM3, SAM3 L C 72.5 ø9 E 59 Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 or ø5/16 inch D (24) 4 48 9 4 96 234 24 4 F S S Purge air discharge tubing port for dehumidification Applicable tubing I.D.: ø19 (NPT threads: ø3/4 inch) Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø12 (NPT threads: ø1/2 inch) (Maintenance space mm or more) With float type auto-drain With drain guide 24 172 18 F 18 Discharge Model IDG3AM3 IDGAM3 IDG6LAM3, 6SAM3 IDGLAM3, SAM3 IDGLAM3, SAM3 L 1/4 3/8 3/8 1/2 A 291 33 348 418 483 B 299 338 356 426 491 C 22 232 D 88 91 E 18 24 F 361 45 426 495 56 N.O.: Black N.C.: Gray S Thread size: 1/4 (Without valve mechanism) Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) exagon width across flats 17

Membrane Air Dryer/Unit Type IDGA IDGA/IDG Dimensions (Type M) IDG6M2 IDGM2 IDGM2 Q (F) G 37 Q ør C K D L (A) (B) dew point indicator 22 18 M N P Single Unit Type (E) M5 female thread With fitting for air discharge (Option: P) Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 or ø5/16 inch M5 female thread Purge air discharge tubing port for dehumidification Applicable tubing I.D.: ø19 (NPT threads: ø3/4 inch) 24 (59) (352) (Maintenance space mm or more) (428) (Maintenance space mm or more) Discharge With float type auto-drain N.O.: Black With drain guide dehumidification S Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) T Thread size: 1/4 (Without valve mechanism) exagon width across flats 24 Total length of the separator Specific Product Precautions Made to Order Model Selection Unit V Type M Model IDG6M2 IDGM2 IDGM2 3/8, 1/2 1/2 A 189 B 186 C 7.5 D 8 E 363 F 241 G 18 127 K 7 L 14 M 95 N P 28 Q 7 R 12 25 22 11 9 433 498 262 2 146 9 18 18 55 31 9 15 With float type auto-drain With drain guide S T 5 241 276 262 26

IDG3V3, 5V3 IDG3V3, 5V3 6 3 29 24 24 67 9 Discharge With float type auto-drain (N.C.) 115 IDG1V3, 2V3 IDG1V3, 2V3 M5 x.8 Discharge With float type auto-drain With drain guide D E 2 ø7 1 I N 41.5 ø5.5 22 119 Dew point indicator (Option: S) 1/8, 1/4 1 136 116 97 5.5 12 O S O S 133.5 14 (Maintenance space mm or more) 3.2 1/4, 3/8 71 41 156 2 IDGA IDGA/IDG Dimensions (Type V) dehumidification Total length of the separator 14 1 I N 7 22 35 35 41 82 55 A C dew point indicator 129 B 4 14 dehumidification dehumidification (Maintenance space mm or more) 27 Model IDG1V3, 1V3 IDG2V3, 2V3 A 4 284 B 192 217 C 144 174 With float type auto-drain D 17 With drain guide E 136 N.C.: Gray Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) Total length of the separator Thread size: 1/4 (Without valve mechanism) exagon width across flats 17

O Membrane Air Dryer/Unit Type IDGA IDGA/IDG Dimensions (Type V) IDG3AV3 IDGAV3 IDG6AV3 IDGAV3 IDGAV3 B 72.5 C dew point indicator ø9 L D Single Unit Type 18 195 165 22 96 ø4 ø4 9 4 48 4 18 A Discharge With drain guide dehumidification (Maintenance space mm or more) With float type auto-drain N.O.: Black N.C.: Gray S 4 F Thread size: 1/4 (Without valve mechanism) exagon width across flats 17 E Total length of the separator Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) Specific Product Precautions Made to Order Model Selection Unit V Type M Model IDG3AV3 IDGAV3 IDG6AV3 IDGAV3 IDGAV3 L 1/4 3/8 3/8 1/2 A 269 38 356 426 491 B 295 37 C 1 162 D 88 91 With float type auto-drain E With drain guide F 24 172 28

IDGA IDGA/IDG Dimensions (Type V) IDG6V2 IDGV2 IDGV2 P øq P C (D) K (A) (B) dew point indicator 54 8 L M Discharge With float type auto-drain With drain guide R S 8.5 (352) N 54 1.5 (E) 37 J 1 I N 2 3/8, 1/2 (F) G M5 female thread dehumidification (Maintenance space mm or more) N.O.: Black Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) Thread size: 1/4 (Without valve mechanism) exagon width across flats 24 Total length of the separator 29 Model IDG6V2 IDGV2 IDGV2 3/8, 1/2 1/2 A 264 B 261 C 7.5 D 8 E 363 F 241 G 18 127 J 7 K 14 L 84 M N 28 P 7 Q 12 28 277 11 9 433 498 262 2 146 9 18 18 55 31 9 15 With float type auto-drain With drain guide R S 5 241 276 262

IDGA IDGA/IDG Model Selection Step 1 Confirmation of operating conditions Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point (C) (When it is necessary to convert from the pressurized dew point, refer to the conversion chart for dew point temperature below.) Inlet air pressure (MPa) Inlet air temperature (C) Allowable pressure drop P (MPa) Compressed air supply capacity Q (L/min [ANR]) Dew Point Temperature Conversion Chart [Example] Outlet air flow rate Outlet air atmospheric pressure dew point Inlet air pressure Inlet air temperature Allowable pressure drop Compressed air supply capacity 1 (L/min[ANR]) 15 (C).5 (MPa) 35 (C).3 (MPa) 3 (L/min [ANR]) 6 Pressure dew point (C) 4 3 2 1 1 2 1 MPa.9 MPa.7 MPa.5 MPa.3 MPa.1 MPa Atmospheric pressure 3 4 6 6 4 3 2 1 1 2 3 Atmospheric pressure dew point ( C) 31

Model Selection IDGA IDGA/IDG Step 2 Correction of the outlet air flow rate influenced by the inlet air temperature (When the inlet air temperature is C, refer to Step 4 ) Step 3 Step 4 When the inlet air temperature is not the same temperature (C) on the performance charts, calculate the correction factor for the outlet air flow rate from the chart below to compensate the outlet air flow rate. Example: From table below (Inlet Air Temperature Correction Factor for Outlet Air Flow Rate) Inlet air temperature 35C Correction factor for outlet air flow rate is.4 for IDGA.86 for IDG Therefore, corrected outlet air flow rate can be determined. Outlet air flow rate 1 L/min [ANR] [ IDGA] 1.4 = 3 L/min [ANR] [ IDG] 1.86 = 1 L/min [ANR] Inlet Air Temperature Correction Factor for Outlet Air Flow Rate Inlet air temperature (C) IDGA IDG 1 15 2 3 35 4 45 Note) Correction factors between IDGA and IDG are different from each other, because the module characteristics are different. Model selection based on corrected outlet flow rate Select a model based on the corrected outlet air flow rate calculated by Step 2 on the flow-rate characteristics charts on pages 5 and 6. Example: Corrected outlet air flow rate Confirmation of d air flow rate Read out from the graph on the d air flow rate (page 9). Example: Inlet air pressure.5 MPa 1.35 1.22 1.1 1..92.86.8..7 3 L/min [ANR] [ IDGA] Corrected outlet air flow rate 1 L/min [ANR] [ IDG] Inlet air pressure.5 MPa Outlet air atmospheric pressure dew point 15C 3. 2.17 1.52 1..65.4..19.14 With the conditions of the corrected outlet air flow rate and the inlet air pressure mentioned to the left, the outlet air atmospheric pressure dew point is found to be 15C or below. When selecting a model [ IDGA] IDG6 [ IDG] IDG3A, IDGA Model selection IDG3A In the case of IDG3A 56 L/min[ANR] IDGA In the case of IDGA 45 L/min[ANR] IDG6 In the case of IDG6 94 L/min[ANR] Step 5 Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity Step 6 Step 7 Inlet air flow rate Q1 (L/min [ANR]) = Outlet air flow rate (L/min [ANR]) + Purge air flow rate (L/min [ANR]) Example: Assuming that IDG3A is chosen by Step 1 Step 4 Outlet air flow rate 1 L/min [ANR] Purge air flow rate 56 L/min [ANR] Compressed air supply capacity Q NO 3 L/min [ANR] Review operating conditions. or The inlet air flow rate Q1 = 1 + 56 = 26 L/min[ANR] Confirmation of compressed air supply capacity Q Q1 YES Step 6 Confirmation of pressure drop P1 [MPa] Single unit (Refer to pages 7 and 8.) Unit (Refer to pages 21 and 22.) Step 1 Step 2 NO Review operating conditions or increase size. P P1 YES 3 26, therefore proceed to Step 6 Example: Model to be selected in the case of IDG3A Single unit IDG3A Inlet air pressure.5 MPa on the flow-rate characteristics (page 7), Inlet air flow 26 L/min [ANR] P1 =.6 MPa Allowable pressure drop P Unit IDG3AM3.3 MPa P1 =.1 MPa (Element initial state) P1 =.55 MPa (Element saturated state) discharge method (in the case of unit), accessories and optional specifications Example: In the case of IDG3A Accessories: With bracket Option specifications: None In the case of IDG3AM3 discharge method: N.O. auto-drain Option specifications: None In the case of IDG3A and IDG3AM3 (with the element in the initial state), P P1, therefore proceed to Step 7 Single unit (Refer to pages 1 and 2.) Unit (Refer to pages 15 and 16.) Refer to Selection in Specific Product Precautions 1 on page 45. Model selected Single Unit Type Specific Product Precautions Made to Order Model Selection Unit V Type M <In the case of single unit type> IDG3A-3B <In the case of unit type> IDG3AM3-3D 32

IDGA IDGA/IDG Made to Order Please contact for further details about dimensions, specifications and delivery. Made to Order 1 With Element Service Indicator IDGA ow to Order IDG 3 A M2 3 X16 Size 3 6 Standard dew point temperature and air flow rate Standard Flow rate by size Outlet air flow rate (L/min [ANR]) dew point (C) 3 6 2 3 15 3 L 4 11 17 24 3 S 6 1 With element service indicator Option Contents None (Standard) R Flow direction (Right Left) discharge method C D J discharge method Manual valve N.C. auto-drain N.O. auto-drain guide ( 1/4 without valve) Note Auto-drains listed on page 17 are attached. -X16 An element service indicator is mounted on the micro mist separator with pre-filter ( AM) to allow visual management of the element s clogging life. In addition, combination with a micro mist separator with pre-filter also provides a spatially compact design. Element service indicator For model selection of an auto-drain, refer to the Selection Precautions on page 45. Thread type Type Rc N NPT F G 2 3 Port size 1/4 3/8 3 6 L L L L L S Component equipment Component equipment Micro mist separator with pre-filter (AM) 3 6 L L L L L S AM2 AM1 AM3 AM1 AM2 AM2 AM2 Replacement Parts (Element for micro mist separator with pre-filter) Description AM1 AM2 AM3 Element assembly AM-EL1 AM-EL2 AM-EL3 Refer to page 18 for the clogging indication of the element service indicator. 33

Made to Order IDGA IDGA/IDG Standard dew point temperature and air flow rate Standard Flow rate by size Outlet air flow rate (L/min [ANR]) dew point (C) 3 5 1 2 2 15 ow to Order IDG 1 M2 2 Size 3 5 1 2 2 2 Replacement Parts (Element for micro mist separator with pre-filter) Description AM1 AM2 Element assembly AM-EL1 AM-EL2 Thread type Type Rc N NPT F G Option discharge method Port size 1/8 1/4 C J 1 2 Component equipment Component equipment Micro mist separator with pre-filter (AM) discharge method Manual valve N.C. auto-drain guide 1/4 ( without valve) 3 R S 3 X16 None (Standard) Flow direction (Right Left) With dew point indicator 5 1 2 Contents 3 With element service indicator 5 Size 5 1 AM1 Size 3 5 1 2 Standard equipment 2 Note Auto-drains listed on page 17 are attached. For model selection of an auto-drain, refer to the Selection Precautions on page 45. discharge method does not need to be selected for N.O. auto-drain type. 1 2 AM2 Single Unit Type Specific Product Precautions Made to Order Model Selection Unit V Type M Refer to page 18 for the clogging indication of the element service indicator. 34

P P øq C D (A) (B) dew point indicator L M K F 37 (E) J (G) IDGA IDGA/IDG Dimensions IDG3M2, 5M2, 1M2, 2M2 IDG3M2, 5M2, 1M2, 2M2 (G) N M5 female thread (Maintenance space mm or more) IDG3AM2, AM2 IDG3AM2, AM2 IDG3LAM2, LAM2 P P øq C D (A) (B) dew point indicator L M Discharge 37 J With float type auto-drain F N N.O.: Black N.C.: Gray (R) (E) K Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) With drain guide (S) M5 female thread dehumidification Thread size: 1/4 (Without valve mechanism) exagon width across flats 24 (Maintenance space mm or more) Total length of the separator Model IDG3M2, 3M2, 5M2, 5M2 IDG1M2, 1M2 IDG2M2, 2M2 IDG3AM2, 3AM2 IDG3LAM2 IDGAM2, AM2 IDGLAM2 35 A B C D E 1/8, 1/4 1/4 1/4, 3/8 1/4 3/8 1/4 1 16 23 16 147 1 147 147 158 21 158 143 172 143 7 7.5 7 56 66 56 8 56 195 29 195 241 195 F G J K L M N 1 14 1 18 1 154 198 227 32 298 345 337 12 14 12 6 7 6 89 99 89 127 89 66.5 78 7 95 7 35 4 35 35 2 24 2 28 2 P 6 7 6 Q 1 12 1 With float type auto-drain R 29 223 29 5 29 With drain guide S 195 29 195 241 195

Made to Order IDGA IDGA/IDG Dimensions IDG6LAM2 IDGLAM2 IDGLAM2, SAM2 Single Unit Type (F) 91 (C) (D) 99 E 37 M5 female thread 7 14 6 dew point indicator 11 18 17 (22) (B) (A) Discharge N.C: Gray N.O: Black (G) With float type auto-drain 2.3 26 dehumidification (Maintenance space mm or more) With drain guide () Thread size: 1/4 (Without valve mechanism) Specific Product Precautions Made to Order Model Selection Unit V Type M Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) exagon width across flats 24 Total length of the separator Model A B C D E F IDG6LAM2 IDGLMA2 IDGLAM2, SAM2 348 326 363 3/8 418 396 433 212 14 17 483 461 498 With float type auto-drain With drain guide G 223 29 36

IDGA IDGA/IDG Made to Order Please contact for further details about dimensions, specifications and delivery. Made to Order 2 With Micro Mist Separator Regulator ( AWD) This can be used when highly purified air is required (supply for air bearings, semiconductor parts blow, etc.). Type V regulator (AR) is modified to the micro mist separator regulator (AWD). -X17 Micro mist separator regulator IDGA ow to Order IDG 3 A V3 3 X17 Size 3 6 Standard dew point temperature and air flow rate Standard Flow rate by size Outlet air flow rate (L/min [ANR]) dew point (C) 3 6 2 3 15 3 L 4 11 17 24 3 S 6 1 Thread type Type Rc N NPT F G Port size With micro mist separator regulator Option Contents None (Standard) R Flow direction (Right Left) discharge method discharge method Manual valve C N.C. auto-drain D N.O. auto-drain guide J ( 1/4 without valve) 3 6 Note Auto-drains listed on page 17 are attached. For model selection of an auto-drain, refer to the Selection Precautions on page 45. L L L S L S L S 2 3 4 1/4 3/8 1/2 Component equipment Component equipment Mist separator Micro mist separator Micro mist separator regulator 3 6 AFM4 AFD4 AWD4 L L L S L S L S Replacement Parts (Element for mist separator, micro mist separator, micro mist separator regulator) Description AFM4 AFD4 AWD4 Element assembly AFM4P-6AS AFD4P-6AS AFD4P-6AS 37

Made to Order IDGA IDGA/IDG ow to Order IDG 1 V3 2 Size 3 5 1 2 Standard dew point temperature and air flow rate Standard Flow rate by size Outlet air flow rate (L/min [ANR]) dew point (C) 3 5 1 2 2 2 15 2 Thread type Type N F 1 2 Rc NPT G Option discharge method discharge method Manual valve C N.C. auto-drain D N.O. auto-drain guide J ( 1/4 without valve) Port size 1/8 1/4 Component equipment Component equipment Mist separator Micro mist separator Micro mist separator regulator 3 R S X17 None (Standard) Flow direction (Right Left) With dew point indicator 5 1 2 Contents With micro mist separator regulator Note Auto-drains listed on page 17 are attached. Size 3 5 1 2 Standard equipment For model selection of an auto-drain, refer to the Selection Precautions on page 45. 3 AFM2 AFD2 AWD2 5 1 2 AFM3 AFD3 AWD3 Specific Product Precautions Made to Order Model Selection Unit V Type M Single Unit Type Replacement Parts (Element for mist separator, micro mist separator, micro mist separator regulator) Description Element assembly AFM2 AFM2P-6AS AFM3 AFM3P-6AS AFD2 AFD2P-6AS AFD3 AFD3P-6AS AWD2 AFD2P-6AS AWD3 AFD3P-6AS 38

t o L IDGA IDGA/IDG Dimensions IDG3V3, 5V3, 1V3, 2V3 IDG3V3, 5V3, 1V3, 2V3 P U S O C K B A C (L) M øp D () (J) N N Q R G S 9 (IDG3, 5 only) E F (K) (Maintenance space mm or more) Model IDG3V3, 3V3, 5V3, 5V3 IDG1V3, 1V3 IDG2V3, 2V3 A B C D E 1/8, 1/4 1/4, 3/8 22 41.5 119 1 4 144 55 14 284 174 97 129 F G J K L M 5.5 7 12 14 73 86 173 21 18 237 262 93 17 3 41 N 24 35 P 5.5 7 Q 29 41 R 67 S 3.2 82 4 With float With drain type auto-drain guide T 192 242 U 28 39

Made to Order IDGA IDGA/IDG Dimensions IDG3AV3, AV3 IDG3AV3, AV3 IDG3LAV3, LAV3, 6LAV3, LAV3, LAV3 IDG6SAV3, SAV3, SAV3 Single Unit Type 195 E D ø4 B F øp G ø4 A C dew point indicator ø4 Discharge With float type auto-drain N.O.: Black N.C.: Gray () S (J) O (K) (L) (Maintenance space mm or more) (T) Applicable tubing O.D.: ø1 (NPT threads: ø3/8 inch) (M) N N S Q R dehumidification With drain guide (U) Thread size: 1/4 exagon width across flats 17 Specific Product Precautions Made to Order Model Selection Unit V Type M Total length of the separator With float With Model A B C D E F G J K L M N P Q R S type auto-drain drain guide T U IDG3AV3, 3AV3 343 1/4, 3/8 295 1 IDGAV3, AV3 382 IDG6LAV3, 6SAV3 72.5 18 165 9 18 92 239 4 126 4 9 48 96 4 278 246 IDGLAV3, SAV3 IDGLAV3, SAV3 3/8, 1/2 37 162 47 535 4

IDGA IDGA/IDG Made to Order Please contact for further details about dimensions, specifications and delivery. Made to Order 3 With Differential Pressure Gauge The service life of the element service indicator can be controlled with differential pressure. Differential pressure gauge -X32 ow to Order IDGA IDG 3 A V3 3 X32 Size 3 6 With differential pressure gauge Option Contents None (Standard) R Flow direction (Right Left) Standard dew point temperature and air flow rate Standard Flow rate by size Outlet air flow rate (L/min [ANR]) dew point (C) 3 6 2 3 15 3 L 4 11 17 24 3 S 6 1 Thread type N F Type Rc NPT G Port size 3 discharge method discharge method Manual valve C N.C. auto-drain D N.O. auto-drain guide J ( 1/4 without valve) 6 Note Auto-drains listed on page 17 are attached. For model selection of an auto-drain, refer to the Selection Precautions on page 45. L L L S L S L S 2 3 4 1/4 3/8 1/2 Component equipment Component equipment Mist separator Micro mist separator Differential pressure gauge Regulator 3 6 AFM4 AFD4 GD4-2-1 AR4 L L L S L S L S Replacement Parts (Element for mist separator, micro mist separator) Description AFM4 AFD4 Element assembly AFM4P-6AS AFD4-6AS 41