Membrane Air Dryer. Dew point indicator. Fitting to exhaust purge air for dew point checker. Purge air discharge fitting for dehumidification

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Membrane Air Dryer Series IDG Dew point indicator Dew point indicator visually confirms air drying (Except IDG) (Optional on IDG3, IDG5, IDG3H, IDG5H) Compact Lightweight Space-saving Type with fitting to purge air is also available. When purge air discharge is undesirable in the area around the membrane air dryer, it can be discharged to atmosphere via tubing (option). Discharged air noise reduced with built-in silencer Except IDG1, IDG3, IDG3H, IDG5, IDG5H, ( ) IDG3, IDG3H, IDG3L, IDG5, IDG5H, IDG5L Fitting to exhaust purge air for dew point checker Purge air discharge fitting for dehumidification Environmentally friendly (non-freon) Power supply not required No power supply is necessary. Wiring labor is not required and there is no need to consider electrical standards, etc. No vibration or heat discharge There are no mechanical moving parts as in the case of refrigeration equipment. Compatible with low dew points Outlet air atmospheric pressure dew point: 4 C ( IDG3L, IDG5L, IDG6L ) IDG75L, IDG1L Outlet air atmospheric pressure dew point: 6 C (IDG6S, IDG75S, IDG1S) Unit type Integrated prefilter and regulator IDG1 Flexible piping is possible Low flow rate type tube configuration Outlet air flow: 1 l/min (ANR) Dehumidification principle Air Dry air (oxygen, nitrogen, etc.) Moisture Orifice Purge air Hollow fiber Humid compressed air Type M Type V Mist separator + Micro mist separator + IDG Micro mist separator with prefilter The membrane air dryer uses hollow fibers composed of a macro molecular membrane through which moisture passes easily, but is difficult for air (oxygen and nitrogen) to pass through. When humid, compressed air is supplied to the inside of the hollow fibers, only moisture permeates the membrane and moves to the outside due to the pressure difference between the moisture inside and outside of the fibers. The compressed air becomes dry air and continues out of the dryer. Part of the dry air from the outlet side is passed through a very small orifice to reduce the pressure and purge the outside of the hollow fibers. The moisture which permeated to the outside of the hollow fibers is discharged to the atmosphere by this purge air. In this way, the partial pressure outside of the hollow fibers remains low and dehumidification is continuously performed. + IDG Mist separator + Micro mist separator + IDG + Regulator Micro mist separator with prefilter + IDG + Regulator Application example Machine tools (air bearings, lasers, etc.) Precision measuring equipment (3-D measuring machines) Semiconductor manufacturing equipment Semiconductor inspection equipment Dental equipment Chemical analysis equipment Ozonizers, Hydrogen gas generating equipment Packaging machines, Paper making machines, Food processing machines Printed circuit board IC mounting machines Fine particle drying, Transfer equipment Electrostatic and high grade coating Drying and cleaning of precision parts Condensation prevention in control panels General pneumatic equipment and pneumatic tools 14-19-5 HA AT ID AMG AFF AM Misc.

Series Variations Meets a wide variety of flow rates (1 to 1 l /min (ANR)) and dew points (Atmospheric pressure dew point: 15 C to 6 C) Standard dew point: 2 C Note) Standard purge Note) Standard purge rate: 2% Standard dew point: 15 C Note) Low purge Note) Standard purge rate: 1% Standard dew point: 4 C Note) Low dew point Note) Standard purge rate: % Standard dew point: 6 C Note) Low dew point Note) Standard purge rate: 35% IDG1 is not available with standard dew point 15 C. Outlet air flow rate Note) Outlet air flow rate Note) Series (l /min (ANR)) Series (l /min (ANR)) Series Outlet air flow rate Note) (l /min (ANR)) Series Outlet air flow rate Note) (l /min (ANR)) Unit Type Single Unit Type IDG1 IDG3 IDG5 IDG1 IDG2 IDG3 IDG5 IDG6 IDG75 IDG1 IDG3M IDG5M IDG1M IDG2M IDG3M IDG5M IDG6M IDG75M IDG1M IDG3V IDG5V IDG1V IDG2V IDG3V IDG5V IDG6V IDG75V IDG1V 1 5 1 2 3 5 6 75 1 5 1 2 3 5 6 75 1 5 1 2 3 5 6 75 1 IDG3H IDG5H IDG1H IDG2H IDG3H IDG5H IDG6H IDG75H IDG1H IDG3HM IDG5HM IDG1HM IDG2HM IDG3HM IDG5HM IDG6HM IDG75HM IDG1HM IDG3HV IDG5HV IDG1HV IDG2HV IDG3HV IDG5HV IDG6HV IDG75HV IDG1HV 5 1 2 3 5 6 75 1 5 1 2 3 5 6 75 1 5 1 2 3 5 6 75 1 IDG3L IDG5L IDG6L IDG75L IDG1L IDG3LM IDG5LM IDG6LM IDG75LM IDG1LM IDG3LV IDG5LV IDG6LV IDG75LV IDG1LV 75 11 17 24 3 75 11 17 24 3 75 11 17 24 3 IDG6S IDG75S IDG1S Type M A mist separator, micro mist separator, or micro mist separator with prefilter combined with a single unit Type V A regulator combined with the type M IDG6SM IDG75SM IDG1SM IDG6SV IDG75SV IDG1SV 5 1 15 5 1 15 5 1 15 Note) Standard dew point : Outlet air atmospheric pressure dew point under standard performance conditions Standard purge rate : Ratio of purge air flow rate to inlet air flow rate under standard performance conditions Outlet air flow rate : Values under standard performance conditions 14-19-6

Membrane Air Dryer Series IDG Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 14-14-8 for Precautions on every series. Warning Caution on Design 1. Depending on the model and operating conditions, the oxygen ratio of the outlet air may drop below the prescribed standard. Do not use standard dew point 4 C (symbol L) type, standard dew point 6 C (symbol S) type and IDG3, 5, 3H, 5H for dehumidifying breathing air. Do not use only outlet air (dried air) in a closed room. Caution 1. Devise a layout which considers the position of purge air discharge ports. Purge air is humid air. Devise a layout in which purge air will not cause trouble such as corrosion or malfunction of peripheral equipment. 2. When very clean air is required (supply to air bearings, blowing of semiconductor parts, etc.) Install a micro mist separator or super mist separator on the outlet side (end terminal) of the membrane air dryer (unit). Grease is applied inside a regulator used in the unit (V type). When air with high purity is required, please either mount the above separator on the outlet side or use a made-to-order product (refer to page 14-19-5), which is provided with a micro mist separator (Series AWD) instead of a regulator. 3. Time to reach the rated dew point A certain amount of time is required to achieve the rated dew point after the air begins flowing into the membrane air dryer. Using the times below as a guide, begin operating outlet side equipment after the rated dew point is achieved. Standard dew point 2 C, 15 C: about 1 min. Standard dew point 4 C: about 3 min. Standard dew point 6 C: about 12 min. This time can be shortened as described below. 1) Provide a valve on the outlet side of the membrane air dryer. 2) Supply air with the valve closed. Only purge air flows into the membrane air dryer. 3) After 15 minutes or more, open the valve and let air flow to the outlet side equipment. 4. Dehumidification performance when inlet air temperature changes Drying performance shows the case at an inlet air temperature of C. In other cases, please refer to How to Select a (page 14-19-1) for proper selection. Caution Selection 1. Consider the purge air flow rate. Find the purge air flow rate from the charts and calculate the required outlet air flow rate + purge air flow rate. The air supply capacity must be at least equal to the calculated flow or the required outlet air flow rate cannot be obtained. 2. Selection for a compressed air line in which a mist separator or micro mist separator is already installed Verify the operating air flow rate and air pressure, and select a membrane air dryer in accordance with the model selection method (page 14-19-1). If a membrane air dryer is selected using the port size of the equipment that is already installed as a reference, it could result in the selection of a model that is too small and has an insufficient dehumidification capacity. 3. With fittings for purge air discharge (Option: P) The dehumidification capacity decreases in proportion to the length of the tube for discharging purge air. Use a tube of the specified size and keep its length within 5 m. For the outlet air atmospheric pressure dew point in relation to the length of the tube for discharging purge air, refer to the table Outlet Dew Point at Atmospheric Pressure to Tube for Exhaust of Purge Air on page 14-19-. 4. Auto-drain selection for the unit style When the compressor in use is for 2.2 kw {3 l/min (ANR)} or less, please use an N.C. auto drain (symbol: C). If an N.O. auto drain (symbol: D) is used when the compressor is for 2.2 kw or less, pressure inside the mist separator may not increase and remain in the state of blowing off. Auto drain with differential pressure type can be used in 2.2 kw or less. Mounting Caution 1. Do not obstruct the purge air discharge ports. If purge air back pressure becomes too high or purge air stops flowing, dehumidification performance will decrease or may become impossible. 2. Be sure to install a mist separator and micro mist separator or a micro mist separator with prefilter on the inlet side of the membrane air dryer. If the inlet air contains oil or water drops, etc., performance will be reduced. (A mist separator and micro mist separator or a micro mist separator with prefilter are already installed on the unit types.) 3. Install a regulator on the outlet side of the membrane air dryer. If it is installed on the inlet side, dehumidification performance will be reduced. 4. Take sufficient care in handling. There is a danger of damage if dropped. HA AT ID AMG AFF AM Misc. 14-19-7

Series IDG Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 14-14-8 for Precautions on every series. Warning Piping 1. Confirm locking of case and body. When using in a unit, be sure to set the air pressure to zero before using a mist separator or micro mist separator with modular connections. Also, confirm that the body and case are locked together with a click before starting the flow of compressed air. 2. Confirm tightening of the holder. (for IDG3 to IDG1, IDG3H to IDG1H, IDG3L to IDG1L and IDG6S to IDG1S) Before starting the flow of compressed air, turn the membrane air dryer's holder in its tightening direction, confirming that it is completely tightened and that the case will not come off. 3. Minimum bending radius (for IDG1) When installing piping for the membrane air dryer, maintain a minimum bending radius of 35 mm or more. Furthermore, do not bend the sections that are within 5 mm of the ends of the membrane module. 4. With fittings for purge air discharge (Option: P) The piping of purge air for dehumidification and for the dew point checker can be combined, but do not merge these with compressed air lines or drain piping, etc., as this can cause damage. 5 Min. bending radius: 35 5 sections cannot be bent. Caution Piping 1. Use of tools Hold the upper portion of the body (die-cast aluminum section) with a spanner or adjustable angle wrench. Do not turn it while holding the case section. 2. piping for separators When installing drain piping for mist separators or micro mist separators, use a tube of the prescribed size and keep the length within 5 meters or less. Also, be sure that the tube does not rise up or become folded over. 3. Piping materials for low dew point air If air of a low dew point ( 4 C or less) is required, do not use a nylon tube piping for the outlet side of the membrane air dryer. Due to the nature of the nylon tube, it could be affected by the ambient air, and it might not be possible to achieve the prescribed low dew point at the end of the tube. Therefore, for low dew point air, use a stainless steel or fluoropolymer piping. 4. With fittings for purge air discharge (Option: P) (for IDG6 to IDG1, IDG6H to IDG1H, IDG6L to IDG1L and IDG6S to IDG1S) To install piping for dehumidification purge air discharge, attach tubing of the prescribed size to the hose nipple section and then secure it with tubing bands. Caution Air Supply 1. Compressed air supply Air Supply capacity An air source that has a supply capacity that is larger than the necessary outlet air flow rate (dry air flow rate) + purge air flow rate is required. Verify the purge air flow rate in the Purge Air Flow Characteristics. (page 14-19-14) Operating Environment Caution 1. Do not use at temperatures (fluid or ambient temperatures) higher than the prescribed operating conditions. Resin is used in the membrane module, and it can be damaged by operation at high temperatures. Especially when installed immediately after a reciprocating type air compressor, confirm that the fluid temperature does not exceed the range of operating conditions during use. 2. Keep the inlet air temperature lower than the ambient temperature. If the membrane air dryer, s body is cooled by the surrounding air, water drops may accumulate inside and reduce its dehumidification capacity. 14-19-8

Membrane Air Dryer Series IDG Maintenance Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 14-14-8 for Precautions on every series. Warning 1. Do not remove the orifice (plug) when in a pressurized state. Never remove the orifice (plug) while under pressure, as it can fly out causing a hazard. Caution 1. Confirming the dehumidification function with the dew point indicator Observe the color of the dew point indicator to confirm whether the membrane air dryer is functioning normally. [When dew point indicator color is blue: Functioning normally] [When the color of the dew point indicator is pink: Dew point temperature is high. (Outlet air is humid.) Note: Atmospheric pressure dew point approximately 1 C minimum.] If humid air flowing in turns the color pink. If dry air then enters, the color turns back to blue. It takes about 1 hour from the start of air flow for the dew point indicator color to change. 2. Dew point indicator replacement period The absorbent is used in the dew point indecator. It absorbs the gasified oil in the compressed air and/or the gaseous elements other than the air, and then may turn brown. When it turned brown, replace the dew point indicator. Besides, in the event of replacing them periodically, carry out after two-year operation as a guideline. (For the part number of the dew point indicator, refer to page 14-19-28 to 29.) 3. Element replacement period Refer to the following guide when replacing the elements in the mist separator and in the micro mist separator, or micro mist separator with prefilter that are installed on the inlet side of the membrane air dryer. 1) When two years have passed since installation. 2) When the unit s pressure drop reaches.2 MPa, even before the two year period is reached. 3) When the red portion of the dew point indicator reaches the upper limit. (With micro-mist separator with pre-filter) [IDG6M to IDG1M, IDG6HM to IDG1HM, IDG6V to IDG1V, IDG6HV to IDG1HV] Note 1) Note 1) For other models as well, they are available with the dewpoint indicator under made-to-order. Refer to page 14-19-48. 4. Membrane module replacement period Replace the membrane module when the color of the dew point indicator turns white or pink. As a guideline, unit should be replaced after approximately 1 years of use (1 hours/day operation). Replace it when the color of the dew point indicator turns white or pink, even if it is within the period. 5. Tightening torque for installing the membrane module and the case (for IDG5/1/2/5H/1H/2H) Use caution not to tighten excessively. It may result in a breakdown of membrane module, case and mounting screws or insufficient sealing. (Verify the tightening torque range in the instruction manual.) 6. Installing a pressure gauge A pressure gauge should be installed on the inlet and outlet sides of the membrane air dryer (unit) for the maintenance and inspection purposes. HA AT ID AMG AFF AM Misc. 14-19-9

Selection Series IDG Selection Step 1 Confirmation of operating conditions Outlet air flow rate [l /min (ANR)] Outlet air atmospheric pressure dew point [ C] (When it is necessary to convert from the pressurized dew point, refer to the conversion diagram for dew point temperature below.) Inlet air pressure [MPa] Inlet air temperature [ C] Allowable pressure drop P [MPa] Compressed air supply capacity Q [l /min (ANR)] [Example] Outlet air flow rate Outlet air dew point Inlet air pressure Inlet air temperature Allowable pressure drop Compressed air supply capacity 15 [l /min (ANR)] 15 [ C].5 [MPa] 35 [ C].3 [MPa] 3 [l /min (ANR)] Dew Point Temperature Conversion Chart Pressure dew point ( C) 6 5 4 3 2 1 1.9 MPa.7 MPa.5 MPa.3 MPa.1 MPa Atmospheric pressure 2 3 4 5 6 6 5 4 3 2 1 1 2 3 Atmospheric pressure dew point ( C) 14-19-1

Membrane Air Dryer Series IDG Step 2 Correction of the outlet air flow rate influenced by the inlet air temperature. (When the inlet air temperature is C, refer to Step 4) Step 3 When the inlet air temperature is not the same temperature ( C) on the performance charts, calculate the correction factor for the outlet air flow rate from the chart below to compensate the outlet air flow rate. Example Inlet air temperature35 C Outlet air flow 15 l/min (ANR) Inlet air temperature ( C) From table below (Inlet Air Temperature Correction Factor for Outlet Air Flow rate) Correction factor for outlet air flow rate is.4 for Type A products group.86 for Type B products group Therefore, corrected outlet air flow rate can be determined. [Type A products group] 15.4 = 375 l/min (ANR) [Type B products group] 15.86 = 175 l/min (ANR) Inlet Air Temperature Correction Factor for Outlet Air Flow Rate 1 15 2 3 35 4 45 5 3. 2.17 1.52 1..65.4..19.14 1.35 1.22 1.1 1..92.86.8.75.7 Note) Correction factors between the products A group and the products B group are different from each other, because the module characteristics are different. Example Type A products group Standard dew point 2 C In the case of 15 C (symbol H) type (but, except IDG3, 5, 3H, 5H) selection based on corrected outlet flow rate Corrected outlet air flow375 l/min (ANR) [Type A product group] Corrected outlet air flow175 l/min (ANR) [Type B product group] Inlet air pressure.5 MPa Outlet air dew point 15 C Step 4 Confirmation of purged air flow rate Type B products group Standard dew point 4 C In the case of 4 C (symbol L) type and IDG3, 5, 3H, 5H Select a model based on the corrected outlet air flow rate calculated by Step 2 on the flow characteristics charts on pages 14-19-17, 18, 21, 22,, and 27. With the conditions of the corrected outlet air flow and the inlet air pressure mentioned to the left, the outlet air atmospheric pressure dew point is found to be 15 C or below. When selecting a model [Type A product group] IDG6 [Type B product group] IDG3, IDG5H Read out from the graph on the purged air flow rate (page 14-19-14). Example Inlet air pressure.5 MPa selection IDG3 In the case of IDG356 l/min (ANR) IDG5H In the case of IDG5H 45 l/min (ANR) IDG6 In the case of IDG694 l/min (ANR) Step 5 Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity. Inlet air flow rate Q1 [l/min (ANR)] = Outlet air flow rate [l/min (ANR)] + Purge air flow rate [l/min (ANR)] Example: Assuming that IDG3 is chosen by Step 4 Outlet air flow rate 15 l/min (ANR) Purge air flow rate 56 l/min (ANR) Compressed air supply capacity Q 3 l/min (ANR) Step 1 Step 6 Confirmation of pressure drop P1 [MPa] Step 1 or Step 2 NO Review operating conditions. Step 6 Single unit (Refer to pages 14-19-12 and 13.) Unit (Refer to pages 14-19-37 and 38.) NO Review operating conditions or increase size. Confirmation of compressed air supply capacity Q Q1 P P1 YES YES 3 26, therefore proceed to Step 6 In the case of IDG3 and IDG3M (with the element in the initial state), P P1, therefore proceed to Step 7. Step 7 The way of discharging drain (in the case of unit), accessories and optional specifications Example In the case of IDG3 With Accessories: Bracket Option specifications: None In the case of IDG3M The way of discharging drain: N.O. auto-drain Option specifications: None The inlet air flow rate Q1 = 15 + 56 = 26 l/min (ANR) Example: to be selected in case of IDG3 Single unit IDG3 Inlet air pressure.5 MPa on the flow characteristics (page 14-19-12), Inlet air flow 26 l/min (ANR) P1 =.6 MPa Allowable pressure drop P Unit IDG3M.3 MPa P1 =.1 MPa (Element initial state) P1 =.55 MPa (Element saturated state) Single unit (Refer to pages 14-19-16, 2, 24, and 26.) Unit (Refer to page 14-19-32.) Refer to Selection in Specific Product Precautions on page 14-19-7. selected <In the case of single unit type> IDG3-3B <In the case of unit type> IDG3M-3D HA AT ID AMG AFF AM Misc. 14-19-11

Series IDG Flow Characteristics IDG1 (Standard dew point: 2 C) IDG3 (Standard dew point: 2 C), IDG3H (Standard dew point: 15 C).4.4.3.2.1.3.2.1 4 8 12 16 1 2 3 4 IDG5 (Standard dew point: 2 C), IDG5H (Standard dew point: 15 C).4.3.2.1 IDG1 (Standard dew point: 2 C), IDG1H (Standard dew point: 15 C).6.4.2 2 4 6 8 4 8 12 16 IDG2 (Standard dew point 2 C), IDG2H (Standard dew point 15 C) IDG3 (Standard dew point 2 C), IDG3H (Standard dew point 15 C), IDG3L (Standard dew point 4 C).8.3.6.4.2.2.1 1 2 3 1 2 3 4 5 IDG5 (Standard dew point: 2 C), IDG5H (Standard dew point: 15 C), IDG5L (Standard dew point: 4 C) IDG6 (Standard dew point: 2 C), IDG6H (Standard dew point: 15 C).8.6.6.4.2.4.2 2 4 6 8 2 4 6 8 14-19-12

Membrane Air Dryer Series IDG Conditions: Inlet air temperature C, P1: Inlet air pressure IDG6L (Standard dew point: 4 C), IDG6S (Standard dew point: 6 C).1.8.6.4.2 IDG75 (Standard dew point: 2 C), IDG75H (Standard dew point: 15 C).6.4.2 1 2 3 4 8 12 IDG75L (Standard dew point: 4 C), IDG75S (Standard dew point: 6 C) IDG1 (Standard dew point: 2 C), IDG1H (Standard dew point: 15 C).2.16.12.8.4.6.4.2 1 2 3 4 4 8 12 16 IDG1L (Standard dew point: 4 C), IDG1S (Standard dew point: 6 C).3.2.1 1 2 3 4 HA AT ID AMG AFF AM Misc. 14-19-13

Series IDG Purge Air Flow Characteristics Conditions: Inlet air temperature C IDG1/3/5/1/2 (Standard dew point: 2 C) IDG3H/5H/1H/2H (Standard dew point: 15 C) IDG3/5 (Standard dew point: 2 C) IDG3H/5H (Standard dew point: 15 C) IDG3L/5L (Standard dew point: 4 C) 6 IDG2 18 IDG5 16 5 14 Purge air flow rate (l/min (ANR)) 4 3 2 1 IDG1 IDG2H IDG5 IDG1H IDG3, IDG5H IDG3H IDG1 Purge air flow rate (l/min (ANR)) 12 1 8 6 4 2 IDG3 IDG5H IDG5L IDG3H IDG3L.5 1..5 1. Inlet air pressure (MPa) Inlet air pressure (MPa) IDG6/75/1 (Standard dew point: 2 C) IDG6H/75H/1H (Standard dew point: 15 C) IDG6L/75L/1L (Standard dew point: 4 C) IDG6S/75S/1S (Standard dew point 6 C) 28 IDG1 14 IDG1L 24 12 IDG1S IDG75 Purge air flow rate (l/min (ANR)) 2 16 12 8 IDG6 IDG1H IDG75H IDG6H Purge air flow rate (l/min (ANR)) 1 8 6 4 IDG75L IDG6L IDG75S IDG6S 4 2.5 1..5 1. Inlet air pressure (MPa) Inlet air pressure (MPa) 14-19-14

HA AT ID AMG AFF AM Misc. 14-19-15

Membrane Air Dryer Single Unit Type Series IDG Single Unit/Standard Dew Point 2 C Specifications IDG 1 How to Order 3 Flow rate by size Outlet air flow rate l/min Size Purge air flow rate (ANR) 1 1/2.5 3 /6 5 5/12 1 1/ 2 2/5 3 3/75 5 5/1 6 6/1 75 75/15 1 1/19 Thread type Nil N F Rc NPT G Note) In the case of two or more options, indicate them alphabetically. Accessory Nil B Note) When symbol B is indicated, a bracket assembly with a part number shown in the table below is included as an accessory. Port size Symbol Bore Size 1 3 5 1 2 3 1 1/8 2 1/4 3 3/8 4 1/2 Option Symbol Contents Size 1 3 5 1 2 3 5 6 75 Nil None (Standard) P With fitting for purge air discharge R Flow direction (Right Left) S With dew point indicator Standard equipment None (Standard) With bracket (Except IDG1) 5 6 75 1 1 Standard Specifications/Single Unit Type (Standard dew point: 2 C) IDG1 IDG1 JIS Symbol Bracket Assembly (Accessory) Part No. Part no. BM59 BM61 BM63 BM64 BM65 Applicable model IDG3, 5 IDG1 IDG2 IDG3/5 IDG6/75/1 With cap bolts and spring washers 14-19-16 IDG3 Range of operating conditions Standard performance Standard performance conditions Fluid Inlet air pressure (MPa) Inlet air temperature ( C) (1) 5 to 55 Ambient temperature ( C) 5 to 55 Outlet air atmospheric pressure dew point ( C) Inlet air flow rate (l/min(anr)) (2) Outlet air flow rate (l/min(anr)) Purge air flow rate (l/min(anr)) (3) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) IDG1 IDG3 Standard dew point: 2 C IDG5 IDG1 IDG2 IDG3 IDG5 IDG6 IDG75 IDG1 Compressed air.3 to.85.3 to 1. 2 12.5 31 62 1 375 6 5 to 5 5 to 5 7 9 119 1 5 1 2 3 5 6 75 1 2.5 6 12 5 75 1 1 15 19.7-1l/min (ANR) {In case of Inlet air pressure.7 MPa} 1/4 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2.11. (.31).43 (.51) (.76).66 (.87).74 (.9).77 (1.65) 1.5 (1.65) 1.5 (1.7) 1.55 Note 1) No freezing. Note 2) ANR indicates the flow rate converted to the value at 2 C under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 l/min (ANR) of purge air flow (at.7 MPa inlet air pressure) for the dew point indicator (except IDG1, 3, 5).

Membrane Air Dryer Single Unit Type Series IDG Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C, P1: Inlet air pressure, Tube for purge air discharge (Option: P): None Notice: In the case of products with fitting for purge air discharge (Option: P), refer to page 14-19-18. Product groups inside parentheses in the graph are classification symbols for selecting a model. (Refer to page 14-19-11.) IDG1 (Type A products group) 1 2 3 4 4 8 12 16 IDG3 (Type A products group) 1 2 3 4 1 2 3 4 IDG5 (Type A products group) 1 2 3 4 2 4 6 8 IDG1 (Type A product group) 1 2 3 4 4 8 12 16 IDG2 (Type A products group) 1 2 3 4 IDG5 (Type B products group) 1 2 3 4 1 2 3 5 2 4 6 8 IDG3 (Type B products group) IDG6 (Type A products group) 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 2 4 6 8 HA AT ID AMG AFF AM Misc. 14-19-17

Series IDG Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C, P1: Inlet air pressure IDG75 (Type A products group) IDG1 (Type A products group) 1 2 3 4 5 2 4 6 8 1 1 2 3 4 5 4 8 12 16 With fittings for purge air discharge (Option: P) As the length of tubing for purge air discharge becomes longer, the outlet air atmospheric pressure dew point becomes higher. Refer to the table below. Outlet Air at the Atmospheric Pressure Dew point in Compliance with the Tube Length for Discharging the Purged Air ( C) IDG3 IDG5 Tube length m 1 m 3 m 5 m 2 19 17 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1 C or less. Conditions Inlet air temperature : C (Saturated) Ambient temperature : C Inlet air pressure Outlet air flow rate Tubing size (O.D. x I.D.) mm: ø12 x ø9 :.7 MPa : Flow gained under conditions of the standard performance. (Refer to page 14-19-16.) Construction Refer to pages 14-19-28 to 29. Dimensions Refer to pages 14-19-3 to 31. 14-19-18

HA AT ID AMG AFF AM Misc. 14-19-19

Single Unit/Standard Dew Point 15 C Specifications IDG 1 H How to Order 3 Flow rate by size Outlet air flow rate Size Purge air flow rate 3 /3 5 5/6 1 1/11 2 2/22 3 3/35 5 5/6 6 6/65 75 75/8 1 1/11 Standard dew point temperature Symbol H l /min(anr) Standard dew point ( C) 15 Thread type Nil N F Rc NPT G Accessory Option Note) When symbol B is indicated, a bracket assembly with a part number shown inthe table below is included as an accessory. Port size Symbol Nil B Bore 1 1/8 2 1/4 3 3/8 3 Size 5 1 2 3 4 1/2 Symbol Contents Size 3 5 1 2 3 5 6 75 1 Nil None (Standard) P With fitting for purge air discharge R Flow direction (Right Left) S With dew point indicator Standard equipment Note) In the case of two or more options, indicate them alphabetically. None (Standard) With bracket 5 6 75 1 IDG3H Part no. BM59 BM61 BM63 BM64 BM65 IDG1H JIS Symbol Bracket Assembly (Accessory) Part No. Applicable model IDG3H/5H IDG1H IDG2H IDG3H/5H IDG6H/75H/1H With cap bolts and spring washers IDG3H Standard Specifications/Single Unit Type (Standard dew point: 15 C) Range of operating conditions Standard perfor mance Standard performance conditions Fluid Inlet air pressure (MPa) Inlet air temperature ( C) (1) Ambient temperature ( C) Outlet airatmospheric pressuredew point ( C) Inlet air flow rate (l/min(anr)) (2) Outlet air flow rate (l/min(anr)) Purge air flow rate (l/min(anr)) (3) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) IDG3H 28 3 Standard dew point 15 C IDG5H IDG1H IDG2H IDG3H IDG5H IDG6H IDG75H IDG1H Compressed air.3 to.85.3 to 1. 5 to 55 5 to 5 5 to 55 5 to 5 15 56 111 222 335 56 665 83 111 5 1 2 3 5 6 75 1 6 11 22 35 6 65 8 11.7-1 l/min (ANR) {In the case of Inlet air pressure.7 MPa} 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2. (.31).43 (.51).66 (.76).74 (.87).77 (.9) 1.5 (1.65) 1.5 (1.65) 1.55 (1.7) Note 1) No freezing. Note 2) ANR indicates the flow rate converted to the value at 2 C under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 l/min (ANR) of purge air flow (at.7 MPa inlet air pressure) for the dew point indicator (except IDG3H, 5H). 14-19-2

Membrane Air Dryer Single Unit Type Series IDG Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C, P1: Inlet air pressure, Tube for purge air discharge (Option: P): None Notice: When using product with fittings for purge air discharge (Option: P) and if the tube lengthis 5 m or less, an increase of the outlet air dew point is 1 C or less. Product groups inside parentheses in the graph are classification symbols for selecting a model. (Refer to page 14-19-11.) IDG3H (Type A products group) P1 =.3 MPa 1 2 3 4 1 2 3 4 IDG5H (Type A products group) 1 2 3 4 2 4 6 8 IDG1H (Type A products group) P1 =.3 MPa 1 2 3 4 4 8 12 16 IDG2H (Type A products group) 1 2 3 1 2 3 IDG3H (Type B products group) IDG6H (Type A product group) 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 2 4 6 8 IDG5H (Type B products group) IDG75H (Type A products group) 1 2 3 4 5 2 4 6 8 1 2 3 4 5 2 4 6 8 1 14-19-21 HA AT ID AMG AFF AM Misc.

Series IDG Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C, P1: Inlet airpressure,tube for purge air discharge (Option: P): None Notice: When using products with fitting for purge air discharge (Option: P) and if the tube length is 5 m or less, an increase of the outlet air dew point is 1 C or less. IDG1H (Type A products group) 1 2 3 4 5 4 8 12 16 Construction Refer to pages 14-19-28 to 29. Dimensions Refer to pages 14-19-3 to 31. 14-19-22

HA AT ID AMG AFF AM Misc. 14-19-23

Series IDG Single Unit/Standard Dew Point 4 C Specifications IDG 5 L How to Order 3 Size 3 5 6 75 1 Standard dew point temperature Symbol L Flow rate by size Outlet air flow rate Purge air flow rate (l/min(anr)) 75/ 11/4 17/57 24/8 3/1 Standard dew point (N) 4 Accessory Option Nil P R Flow direction (Right Left) Note) In the case of two or more options, indicate them alphabetically. Nil None (Standard) B With bracket Note) When symbol B is indicated, a bracket assembly with a part number shown in the table below is included as an accessory. None (Standard) With fitting for purge air discharge Thread type Nil N F Rc NPT G Port size Symbol Bore 2 1/4 3 3/8 3 4 1/2 5 Size 6 75 1 Standard Specifications/Single Unit Type (Standard dew point: 4 C) IDG3L JIS Symbol Bracket Assembly (Accessory) Part No. IDG6L Part no. Applicable model BM64 IDG3L/5L BM65 IDG6L/75L/1L With cap bolts and spring washers Range of operating conditions Standard performance Standard performance conditions Fluid Inlet air pressure (MPa) Inlet air temperature ( C) (1) Ambient temperature ( C) Outlet air atmospheric pressure dew point ( C) Inlet air flowrate (l/min(anr)) (2) Outlet air flowrate (l/min(anr)) Purge air flowrate (l/min(anr)) (3) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) Standard dew point: 4 C IDG3L IDG5L IDG6L IDG75L IDG1L Compressed air.3 to 1. 5 to 5 5 to 5 4 1 15 227 32 4 75 11 17 24 3 4 57 8 1.74 (.87).7 1 l/min (ANR) {In the case of Inlet air pressure.7 MPa} 1/4, 3/8 3/8, 1/2.77 (.9) 1.5 (1.65) 1.65 (1.8) 1.8 (1.95) Note 1) No freezing. Note 2) ANR indicates the flow rate converted to the value at 2 C under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 l/min (ANR) of purge air flow (at.7 MPa inlet air pressure) for the dew point indicator. 14-19-24

Membrane Air Dryer Single Unit Type Series IDG Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C P1: Inlet air pressure, Tube for purge air discharge (Option: P): None Product groups inside parentheses in the graph are classification symbols for selecting a model. (Refer to page 14-19-11.) IDG3L (Type B products group) 1 2 3 4 5 6 7 2 4 6 8 1 IDG5L (Type B products group) 1 2 3 4 5 6 7 4 8 12 16 IDG6L (Type B products group) 1 2 3 4 5 6 7 4 8 12 16 2 IDG75L (Type B products group) 1 2 3 4 5 6 7 1 2 3 IDG1L (Type B products group) 1 2 3 4 5 6 7 1 2 3 4 With fitting for purge air discharge (Option: P) As the length of tubing for purge air discharge becomes longer, the outlet air atmospheric pressure dew point becomes higher. Refer to the table below. Outlet Air at the Atmospheric Pressure Dew point in Compliance with the Tube Length for Discharging the Purged Air ( C) Tube length m 1 m 3 m 5 m IDG3L 4 39 38 IDG5L Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1 C or less. Construction Dimensions Refer to pages 14-19-28 to 29. Refer to pages 14-19-3 to 31. Conditions Inlet air temperature : C (Saturated) Ambient temperature : C Inlet air pressure :.7 MPa Outlet air flow rate : Flow gained under conditions of the standard performance.(refer to page 14-19-24.) Tubing size (O.D. x I.D.) mm: ø12 x ø9 14-19- HA AT ID AMG AFF AM Misc.

Series IDG Single Unit/Standard Dew Point 6 C Specifications IDG 6 S How to Order 3 B Size 6 75 1 Flow rate by size Outlet air flow rate Purge air flow rate (l/min(anr)) 5/27 1/54 15/85 Standard dew point temperature Symbol S Standard dew point ( C) 6 Thread type Nil N F Rc NPT G Port size Symbol 3 3/8 4 1/2 Option Accessory Nil None (Standard) B With bracket Note) When symbol B is indicated, a bracket assembly with a part number shown in the table below is included as an accessory. Bore Nil P R Size 6 75 1 None (Standard) With fitting for purge air discharge Flow direction (Right Left) Note) In the case of two or more options, indicate them alphabetically. Standard Specifications/Single Unit Type (Standard dew point: 6 C) Bracket Assembly (Accessory) Part No. Part no. BM65 IDG6S JIS Symbol Applicable model IDG6S/75S/1S With cap bolts and spring washers Range of operating conditions Standard performance Standard performance conditions Fluid Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) Inlet air temperature ( C) (1) Ambient temperature ( C) Outlet air atmospheric pressure dew point ( C) Inlet air flow rate (l/min(anr)) (2) Outlet air flow rate (l/min(anr)) Purge air flow rate (l/min(anr)) (3) Inlet air pressure (MPa) Standard dew point: 6 C IDG6S IDG75S IDG1S Compressed air.3 to 1. 5 to 5 5 to 5 6 77 154 235 5 1 15 27 54 85.7 1 l/min (ANR) {In the case of Inlet air pressure.7 MPa} 3/8, 1/2 1.5 1.65 1.8 (1.65) (1.8) (1.95) Note 1) No freezing. Note 2) ANR indicates the flow rate converted to the value at 2 C under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 l/min (ANR) of purge air flow (at.7 MPa inlet air pressure) for the dew point indicator. 14-19-26

Membrane Air Dryer Single Unit Type Series IDG Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C, P1: Inlet air pressure, Tube for purge air discharge (Option: P): None Notice: When using products with fitting for purge air discharge (Option: P) and if the tube length is 5 m or less, an increase of the outlet air dew point is 1 C or less. Product groups inside parentheses in the graph are classification symbols for selecting a model. (Refer to page 14-19-11.) IDG6S (Type B products group) 1 2 3 4 5 6 7 8 2 4 6 8 IDG75S (Type B products group) 1 2 3 4 5 6 7 8 4 8 12 16 IDG1S (Type B products group) 1 2 3 4 5 6 7 8 4 8 12 16 2 HA AT ID AMG AFF AM Misc. 14-19-27

Series IDG Construction IDG1 q e t w Purge air for dehumidification Option specifications With fitting for purge air discharge (Option: P) Purge air for dehumidification IDG3/5 IDG3H/5H Plug Plug t q Option specifications With fitting for purge air discharge (Option: P) IDG1/2 IDG1H/2H i t q Option specifications With fitting for purge air discharge (Option: P) } o Purge air for dehumidification u Plug y u Purge r Purge Purge air for dehumidification Component Parts No. q w e r t y Description Body Female connector Strainer Case Orifice Silencer Replacement Parts No. u i o Description Membrane module kit Dew point indicator kit IDG1 IDG3/3H IDG5/5H IDG1/1H IDG2/2H Copper alloy Copper alloy Copper alloy Resin Material Aluminum alloy Resin Stainless steel Copper alloy IDG1 IDG3/3H IDG5/5H IDG1/1H IDG2/2H IDG-EL3 IDG-EL3H Part no. IDG-EL5 IDG-EL5H IDG-DP1 (Option: S) IDG-DP1-X1 (Option: PS) IDG-EL1 IDG-EL1H IDG-DP1 IDG-EL2 IDG-EL2H IDG-DP1-X1 (Option: P) Note Platinum silver coated (IDG1 is electroless nickel plated.) Electroless nickel plated IDG3H is resin. Note 14-19-28

Membrane Air Dryer Single Unit Type Series IDG IDG3/5 IDG3H/5H IDG3L/5L u q r e Option specifications With fitting for purge air discharge (Option: P) } i w y Purge air for dehumidification IDG6/75/1 IDG6H/75H/1H IDG6L/75L/1L IDG6S/75S/1S u q r e t Purge air for dehumidification Option specifications With fitting for purge air discharge (Option: P) } i w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts No. q w e r t Description Body Case Orifice Holder Silencer Replacement Parts No. Description IDG3/3H/3L IDG5/5H/5L IDG6/6H/6L/6S IDG75/75H/75L/75S IDG1/1H/1L/1S Aluminum alloy Material Aluminum alloy Stainless steel Stainless steel Part no. Aluminum Resin + Copper alloy IDG3/3H/3L IDG5/5H/5L IDG6/6H/6L/6S IDG75/75/75L/75S IDG1/1H/1L/1S Note Platinum silver coated Note AFF AM Misc. y u i Membrane module kit Dew point indicator kit IDG-EL3 IDG-EL5 IDG-EL6 IDG-EL6L IDG-DP1 IDG-DP1-X1 IDG-EL75 IDG-EL75L IDG-EL1 IDG-EL1L Option: P 14-19-29

Series IDG Dimensions IDG1 (293) Purge air outlet for dehumidification (67) (46) (26) Port size: 1/4 Hexagon width across flats 19 Hexagon width across flats 14 With fitting for purge air discharge (Option: P) (86) Purge air outlet for dehumidification (67) ø8 Hexagon width across flats 14 Hexagon width across flats 17 Port size: 1/4 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø6 (NPT thread: ø1/4 inch) (34) () Hexagon width across flats 14 Hexagon width across flats 17 IDG3, 5 IDG3H, 5H 2.3 3 4 Dew point indicator (Option: S) 73 38 Purge air 12 With fitting for purge air discharge (Option: P) Bracket (Accessory: B) Port size: 1/8, 1/4 (Maintenance space 1 mm or more) IDG1, 2 IDG1H, 2H 14 16 A E Purge air D B 22 17 6 (98) Purge air for dehumidification 11 118 14 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø8 ø5/16 inch (64) With fitting for purge air discharge (Option: P) 14 7 Port size L C 41 2.3 23 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø8 ø5/16 inch (H) Bracket (Accessory: B) (G) Purge air for dehumidification Purge air for dehumidification Purge air discharge tubing port for dehumidification Applicable tubing O.D.: øj (NPT thread: øk inch) (F) (Maintenance space 1 mm or more) Port size Option: P A B C D E L F G H J K IDG1/1H 83 187 53 165 62 97 224 119 [126] 8 5/16 1/4, 3/8 IDG2/2H 113 212 54 19 82 114 249 147 [154] 1 3/8 Values inside [ ] are for NPT threads. 14-19-3

Membrane Air Dryer Single Unit Type Series IDG IDG3/5 IDG3H/5H IDG3L/5L 18 7 7 Purge air 24 14 17 Port size L 5 7 2.3 26 Purge air discharge tubing port for dew point indicator Applicable tubing O.D. ø8 ø5/16 inch With fitting for purge air discharge (Option: P) 18 8 Bracket (Accessory: B) (D) (B) (G) (H) Purge air for dehumidification Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø12 (NPT threads: ø1/2 inch) (Maintenance space 1 mm or more) IDG6/75/1 IDG6H/75H/1H IDG6L/75L/1L IDG6S/75S/1S 18 7 82 6 Purge air 14 17 Port size L 91 5 With fitting for purge air discharge (Option: P) Purge air discharge tubing 2.3 port for dew point indicator 24 Applicable tubing O.D.: ø8 ø5/16 inch 26 97 Bracket (Accessory: B) HA (D) (B) (H) (G) AT ID AMG Purge air for dehumidification AFF AM (Maintenance space 1 mm or more) Misc. Port size Option: P B D L G H IDG3/3H/3L 293 271 361 32 1/4, 3/8 IDG5/5H/5L 337 315 45 346 IDG6/6H 3/8, 1/2 IDG75/75H/1/1H 1/2 352 33 428 369 IDG6L/6S 392 37 468 49 IDG75L/75S 3/8, 1/2 472 45 548 489 IDG1L/1S 542 52 618 559 Purge air discharge tubing port for dehumidification Applicable tubing I.D.: ø19 (NPT threads: ø3/4 inch) 14-19-31

Membrane Air Dryer Unit Type Series IDG Units (Type M, Type V) IDG 3 How to Order M 3 Symbol M V Contents Description Component equipment IDG3 to IDG5 IDG3H to IDG5H IDG3L, IDG5L IDG6 to IDG1 IDG6H to IDG1H IDG6L to IDG1L IDG6S to IDG1S IDG3 to IDG5 IDG3H to IDG5H IDG3L, IDG5L IDG6 to IDG1 IDG6H to IDG1H IDG6L to IDG1L Size 3 5 1 2 3 5 6 75 1 Standard dew point temperature and air flow rate Symbol Standard dew point ( C) 3 5 1 2 3 5 6 75 1 Nil 2 /6 5/12 1/2 2/5 3/7 5/12 6/12 75/15 1/19 H 15 /3 5/6 1/1 2/2 3/3 5/6 6/6 75/8 1/11 L 4 75/2 11/4 17/5 24/8 3/1 S 6 5/27 1/5 15/85 With separator With separator regulator Flow rate by size Outlet air flow rate Purge air flow rate (l/min(anr)) Mist separator Micro mist separator Micro mist separator with pre-filter Membrane air dryer IDG6S to IDG1S Note 1) Element service indicator is also available. Refer to Made to Order Specifications on page 14-19-48. Note 2) Specifications with micro mist separator is also available. Refer to Made to Order Specifications on page 14-19-5. (1) (2) Regulator Symbol Nil C Note) D Note) ( without valve) For the model selection of an auto-drain, refer to Selection 4 of Precautions on page 14-19-7. Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together. Port size Symbol Bore 1 1/8 2 1/4 3 3/8 Option Size Symbol Contents 3 5 1 2 3 5 6 75 1 Nil Standard (1) (2) (2) (2) (2) P With fitting for purge air discharge Flow direction R (Right Left) S With dew point indicator Standard equipment In the case of two or more options, indicate them alphabetically. Note 1) Symbol P is only applicable for Type M with either auto-drain or drain-guide. Type V is not applicable because it is equipped with a relief type regulator. (Symbol P is used when it is undesirable for the air to be discharged into the main body of IDG. Therefore, it is not possible to use it in combination with a separator with manual valve, which discharges air around it, or Type V with a relief type regulator.) Note 2) They are not applicable in case the thread type is N or F. (Because barrel nipples are used for equipment connections.) discharge method (Mist separator, Micro mist separator, Micro mist separator with prefilter) Size and standard dew point discharge 6, 6H 6L, 6S 3, 3H 1, 1H 3, 3H, 3L method 75, 75H 75L, 75S 5, 5H 2, 2H 5, 5H, 5L 1, 1H 1L, 1S Manual valve N.C. auto-drain auto-drain N.O. guide J Bore 1/4 3 Size 5 1 2 3 5 6 75 Note) 1 Note) 4 1/2 Note) Not applicable with the cases of standard dew point 2 C (Nil), 15 C (symbol H). Thread type Nil N F Rc NPT G 14-19-32

Membrane Air Dryer Unit Type Series IDG Standard Specifications/Unit (Type M, Type V) [Standard dew point: 2 C] Component equipment Range of operating conditions Standard performance Standard performance conditions Standard dew point: 2 C IDG3M IDG5M IDG1M IDG2M IDG3M IDG5M IDG6M IDG75M IDG1M IDG3V IDG5V IDG1V IDG2V IDG3V IDG5V IDG6V IDG75V IDG1V Mist separator AFM2 AFM3 AFM4 Micro mist separator AFD2 AFD3 AFD4 Micro mist separator with prefilter AMH35 AMH45 Regulator (Type V only) (1) AR2(2) AR (2) AR4 (2) Fluid Compressed air Inlet air pressure (MPa).3 to.85.3 to 1. Inlet air temperature ( C) 5 to 55 (3) 5 to 5 (3) 5 to 5 Ambient temperature ( C) 5 to 55 5 to 5 5 to 5 Outlet air atmospheric pressure dew point ( C) 2 Inlet air flow rate (l/min (ANR)) (4) 31 62 1 375 6 7 9 119 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator purge air flow rate Regulator construction (Type V only) Port size (Nominal size B) Weight (kg) (With auto-drain) Type M Type V 6 1.28 (1.35) 5 1 2 3 5 6 75 1 12 5 75 1 1 15 19.7 1 l/min (ANR) {In the case of Inlet air pressure.7 MPa} Relief type 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2.83 1.21 1.44 2.23 2.26 2.55 3.1 3.15 (.9) (1.3) (1.53) (2.33) (2.36) (2.65) (3.2) (3.) 1.67 (1.76) Note 1) For flow characteristics and pressure characteristics of regulator, refer to page 14-4-37. Note 2) It will come with Option E (With square-shaped, embedded type of a pressure regulator). For details on regulators, refer to pages 14-4-35 to 14-4-4. Note 3) No freezing. Note 4) ANR indicates the flow rate converted to the value at 2 C under the atmospheric pressure and the state of relative humidity 65%. Note 5) Includes 1 l/min (ANR) of purge air flow (at.7 MPa inlet air pressure) for the dew point indicator (except IDG3M/3V/5M/5V). Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7. 1.9 (1.99) 3.34 (3.45) 3.37 (3.48) 3.74 (3.84) 4.29 (4.39) 4.34 (4.44) JIS Symbol (Type M) IDG3M to 5M (Type V) IDG3V to 5V IDG6M IDG1V IDG3V Mist separator Micro mist separator Micro mist separator with prefilter Membrane air dryer IDG6M to 1M Membrane air dryer Auto-drain, Bowl Assembly, Pressure Gauge Part No. Mist separator Micro mist separator Micro mist separator with prefilter Membrane air dryer Regulator IDG6V to 1V Membrane air dryer Regulator Applicable models IDG3M IDG5M IDG1M IDG2M IDG3M IDG5M IDG6M IDG75M IDG1M Description IDG3V IDG5V IDG1V IDG2V IDG3V IDG5V IDG6V IDG75V IDG1V Float type N.C. AD27 AD37 AD47 auto-drain N.O. AD48 Bowl assembly (N.O.) AMH-CA35-D AMH-CA45-D Pressure gauge (Type V only) GC3-1 HA AT ID AMG AFF AM Misc. Replacement Parts (Mist separator, Micro mist separator, Element for micro mist separator with prefilter) Description AFM2 AFD2 AFM3 AFD3 AFM4 Element assembly 63611 6392 63617 6393 63623 Please refer to pages 14-19-28 to 14-19-29 for the replacement parts of a membrane air dryer. For flow characteristics, refer to pages 14-19-37 to 14-19-38, and for external dimensions, refer to pages 14-19-39 to 14-19-47. AFD4 6394 AMH35 AMH-EL35 AMH45 AMH-EL45 14-19-33

Series IDG Standard Specifications/Unit (Type M, Type V) [Standard dew point: 15 C] Component equipment Range of operating conditions Standard performance Standard performance conditions Standard dew point: 15 C IDG3HM IDG5HM IDG1HM IDG2HM IDG3HM IDG5HM IDG6HM IDG75HM IDG1HM IDG3HV IDG5HV IDG1HV IDG2HV IDG3HV IDG5HV IDG6HV IDG75HV IDG1HV Mist separator AFM2 AFM3 AFM4 Micro mist separator AFD2 AFD3 AFD4 Micro mist separator with prefilter AMH35 AMH45 Regulator (Type V only) (1) AR2(2) AR (2) AR4 (2) Fluid Compressed air Inlet air pressure (MPa).3 to.85.3 to 1. Inlet air temperature ( C) 5 to 55 (3) 5 to 5 (3) 5 to 5 Ambient temperature ( C) 5 to 55 5 to 5 5 to 5 Outlet air atmospheric pressure dew point ( C) 15 Inlet air flow rate (l /min (ANR)) (4) Outlet air flow rate (l /min (ANR)) Purge air flow rate (l /min (ANR)) (5) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator purge air flow rate Regulator construction (Type V only) Port size (Nominal size B) Weight (kg) (With auto-drain) Type M Type V 28 3 1.28 (1.35) 56 111 222 335 56 665 83 111 5 1 2 3 5 6 75 1 6 11 22 35 6 65 8 11.7 1 l/min (ANR) {In the case of Inlet air pressure.7 MPa} Relief type 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2.83 1.21 1.44 2.23 2.26 2.55 3.1 3.15 (.9) (1.3) (1.53) (2.33) (2.36) (2.65) (3.2) (3.) 1.67 (1.76) 1.9 (1.99) 3.34 (3.45) 3.37 (3.48) 3.74 (3.84) 4.29 (4.39) Note 1) For flow characteristics and pressure characteristics of regulator, refer to page 14-4-37. Note 2) It will come with Option E (With square-shaped, embedded type of a pressure regulator). For details on regulators, refer to pages 14-4-35 to 14-4-4. Note 3) No freezing. Note 4) ANR indicates the flow rate converted to the value at 2 C under the atmospheric pressure and the state of relative humidity 65%. Note 5) Includes 1 l/min (ANR) of purge air flow (at.7 MPa inlet air pressure) for the dew point indicator (except IDG3HM/3HV/5HM/5HV). Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7. 4.34 (4.44) JIS Symbol (Type M) IDG3HM to 5HM (Type V) IDG3HV to 5HV Mist separator Micro mist separator Membrane air dryer Mist separator Micro mist separator Membrane air dryer Regulator IDG6HM to 1HM IDG6HV to 1HV IDG1HV IDG3HV Micro mist separator with prefilter Membrane air dryer Micro mist separator with prefilter Membrane airdryer Regulator IDG6HM Auto-drain, Bowl Assembly, Pressure Gauge Part No. Applicable model IDG3HM IDG5HM IDG1HM IDG2HM IDG3HM IDG5HM IDG6HM IDG75HM IDG1HM Description IDG3HV IDG5HV IDG1HV IDG2HV IDG3HV IDG5HV IDG6HV IDG75HV IDG1HV Float type N.C. AD27 AD37 AD47 auto-drain N.O. AD48 Bowl assembly AMH-CA35-D AMH-CA45-D Pressure gauge (Type V only) GC3-1 Replacement Parts (Mist separator, Micro mist separator, Element for micro mist separator with prefilter) Description AFM2 AFD2 AFM3 AFD3 AFM4 Element assembly 63611 6392 63617 6393 63623 Refer to pages 14-19-28 to 14-19-29 for the replacement parts of a membrane air dryer. For flow characteristics, refer to pages 14-19-37 to 14-19-38, and for external dimensions, refer to pages 14-19-39 to 14-19-47. AFD4 6394 AMH35 AMH-EL35 AMH45 AMH-EL45 14-19-34

Membrane Air Dryer Unit Type Series IDG Standard Specifications/Unit (Type M, Type V) [Standard dew point: 4 C] Component equipment Range of operating conditions Standard performance Standard performance conditions Mist separator Micro mist separator Regulator (Type V only) (1) Fluid Inlet air pressure (MPa) Inlet air temperature ( C) Ambient temperature ( C) Outlet air atmospheric pressure dew point ( C) Inlet air flow rate (l/min (ANR)) (4) Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) Inlet air flow pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator purge air flow rate Regulator construction (Type V only) Port size (Nominal size B) Weight (kg) (With auto-drain) Type M Type V IDG3LM IDG5LM Standard dew point: 4 C IDG6LM IDG75LM IDG1LM IDG3LV IDG5LV IDG6LV IDG75LV IDG1LV AFM4 AFD4 AR4 (2) Compressed air.3 to 1. 5 to 5 (3) 5 to 5 4 1 15 227 32 4 75 11 17 24 3 4 57 8 1 2.23 (2.33) 3.34 (3.45).7 1 l/min (ANR) {In the case of Inlet air pressure.7 MPa} Relief type 1/4, 3/8 3/8, 1/2 2.26 2.99 3.14 (2.36) (3.9) (3.24) 3.37 (3.48) 4.1 (4.2) 4. (4.35) Note 1) For flow characteristics and pressure characteristics of regulator, refer to page 14-4-37. Note 2) It will come with Option E (With square-shaped, embedded type of a pressure regulator). For details on regulators, refer to pages 14-4-35 to 14-4-4. Note 3) No freezing Note 4) ANR indicates the flow rate converted to the value at 2 C under the atmospheric pressure and the state of relative humidity 65%. Note 5) Includes 1 l/min (ANR) of purge air flow (at.7 MPa inlet air pressure) for the dew point indicator. Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7. 3.29 (3.39) 4.4 (4.5) JIS Symbol (Type M) (Type V) IDG3LV Mist separator Micro mist separator Membrane air dryer Mist separator Auto-drain, Pressure Gauge Part No. Description Float type auto-drain Pressure gauge Applicable model IDG3LM IDG3LV IDG5LM IDG5LV Micro mist separator IDG6LM IDG6LV AD47 AD48 GC3-1 Membrane airdryer IDG75LM IDG75LV Replacement Parts (Mist separator, Element for micro mist separator) Description Element assembly 63623 6394 IDG6LV IDG6LM Refer to pages 14-19-28 to 14-19-29 for the replacement parts of a membrane air dryer. For flow characteristics, refer to pages 14-19-37 to 14-19-38 for external dimensions, refer to pages 14-19-41, 43, 45, and 47. N.C. N.O. AFM4 AFD4 Regulator IDG1LM IDG1LV HA AT ID AMG AFF AM Misc. 14-19-35