Cost reduced by up to 21,060. Purge air flow rate (rated conditions) Running cost (yen/year) Model 46,440 IDG50A. Current model 67,500.

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Membrane Air Dryer A/ RoS Possible to easily supply dry air using the hollow fiber membrane! AT Non-fluorocarbon Compatible with low dew point ( 6 C) No vibration or heat discharge Purge air flow rate (L/min [ANR]) Energy saving in air flow by up to Current model 14 A 12 21,6 4 1..5 Inlet air pressure (MPa) IDK Purge air flow rate Purge ratio (%) (L/min [ANR]) A 46,44 86 15 Current model 67, 1 2 AMG AFF [Calculation conditions] Air unit price: 3 yen/m3 Operating hours: 12 hours/day Annual operating days: days/year AM Variations AMD Unit Type Single Unit Type AM Adopted a new air combination with reduced required maintenance space and weight! Except AR A A ID Running cost (yen/year) FS ID yen/year! Model 6 IDU B Purge air flow rate (rated conditions) 8. A Reduction ratio 31% Cost reduced by up to 18 16 39 (L/min [ANR]) AA AW AME A AMF Purge air flow reduction type ZFC A white body is introduced. SF Thread type Rc NPT G 1 Tube configuration low flow rate type <Type M> <Type V> When dry clean air is required. When dry clean air and pressure control are required. Mist separator Mist separator + + Micro mist separator Micro mist separator + GD Regulator Single Unit Body size Standard dew point 1 3, 5 1, 2 3 6 75 2 C/ 15 C/Type 4 C/Type L 6 C/Type S LLB AD + + ø6 One-touch fitting SFD A 139

Membrane Air Dryer Total length is shortened. Flexible mounting orientation Space 3A to A saving Max. 59 mm 1 Easy to install in narrow spaces! (mm) Size 3 Shortened dimension 6 75 Thread type Rc NPT G 2 7 44 54 59 A 291 33 348 418 483 Current model 271 315 392 472 542 ø6 One-touch fitting Inspection equipment Standard dew point: 4 C/L, 6 C/S A 483 mm 542 mm 35 Min. bending radius: mm Possible to dehumidify like a tube. 59 mm LA, SA Weight: Current model Time to reach the standard dew point igh performance Shortened by 4 minutes Model 45 g Time to reach the standard dew point (minutes) SA 6 6 9 4 minutes A Current model Under SMC test condition Dew point indicator visually confirms air drying. Model with fitting for air discharge is also available. (Except 1) (Semi-standard: 3, 5, 3, 5) When air discharge is undesirable in the area around the membrane air dryer, it can be discharged to atmosphere via tubing (semi-standard). Color of the dew point indicator Normal operating: Blue Initial state: White/Pink Dew point indicator Fitting for exhausting air for dew point indicator Fitting for exhausting air for dehumidification in air discharge noise with built-in silencer 14 ( Except 1, 3, 3, 5, 5, 3A, 3A, 3LA, A, A, LA )

A/ Dehumidification Principle The membrane air dryer uses hollow fibers composed of a macro molecular membrane through which moisture passes easily, but is difficult for air (oxygen and nitrogen) to pass through. When humid, compressed air is supplied to the inside of the hollow fibers, only moisture permeates the membrane and moves to the outside due to the pressure difference between the moisture inside and outside of the fibers. The compressed air becomes dry air and continues out of the dryer. Part of the dry air from the outlet side is passed through a very small orifice to reduce the pressure and the outside of the hollow fibers. The moisture which permeated to the outside of the hollow fibers is discharged to the atmosphere by this air. In this way, the partial pressure outside of the hollow fibers remains low and dehumidification is continuously performed. AA AW AT Air (oxygen, nitrogen, etc.) Dry Moisture Orifice IDU air FS Purge air A B ID ID ollow fiber umid compressed air IDK AMG AFF Application Examples Machine Tool Measuring Machine AM Semiconductor-related Manufacturing Equipment AMD AM AME AMF ZFC SF Powder Coating Food Machinery SFD Packaging Machine (sealing of film and paper package) LLB AD GD Others Dental equipment Chemical analysis equipment Ozonizers, ydrogen gas generating equipment Printed circuit board IC mounting machines Fine particle drying, Transfer equipment Drying and cleaning of precision parts Condensation prevention in control panels General pneumatic equipment and pneumatic tools 141

Variations Meets a wide variety of flow rates (1 to L/min [ANR]) and dew points (Atmospheric pressure dew point: 15 C to 6 C). Single Unit Type Standard dew point: 2 C Standard dew point: 15 C Standard dew point: 4 C Standard dew point: 6 C Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) 1 1 3 3 5 1 2 2 5 1 2 2 P.144 P.145 3A 3 3A 3 3LA 75 A A LA 11 6 6 6 6 6LA 17 6SA 75 7 75 7 75LA 24 75SA LA 3 SA 1 = Note) Standard dew point: Outlet air atmospheric pressure dew point under standard performance conditions Outlet air flow rate: Values under standard performance conditions 142

A/ Unit Type <Type M> A mist separator, micro mist separator, or micro mist separator with pre-filter combined with a single unit Standard dew point: 2 C Standard dew point: 15 C Standard dew point: 4 C Standard dew point: 6 C 3M4 5M4 1M4 2M4 3AM4 AM4 6M2 75M2 M2 Rated conditions: Inlet air pressure.7 MPa, Inlet air temperature C <Type V> Outlet air flow rate (L/min [ANR]) 2 3 6 7 3M4 5M4 1M4 2M4 3AM4 AM4 6M2 75M2 M2 A regulator combined with the type M Outlet air flow rate (L/min [ANR]) 2 3 6 7 Rated conditions: Inlet air pressure.7 MPa, Inlet air temperature C 3LAM4 LAM4 6LAM4 75LAM4 LAM4 Outlet air flow rate (L/min [ANR]) 75 11 17 24 3 6SAM4 75SAM4 SAM4 Outlet air flow rate (L/min [ANR]) Standard dew point: 2 C Standard dew point: 15 C Standard dew point: 4 C Standard dew point: 6 C 3V4 5V4 1V4 2V4 3AV4 AV4 6V4 75V4 V4 Outlet air flow rate (L/min [ANR]) 2 3 6 7 3V4 5V4 1V4 2V4 3AV4 AV4 6V4 75V4 V4 Outlet air flow rate (L/min [ANR]) 2 3 6 7 3LAV4 LAV4 6LAV4 75LAV4 LAV4 Outlet air flow rate (L/min [ANR]) 75 11 17 24 3 6SAV4 75SAV4 SAV4 1 Outlet air flow rate (L/min [ANR]) 1 P.158 P.159 P.158 P.159 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD Made to Order -X16 Symbol Specifications With element service indicator P.176 -X17 With micro mist separator regulator P.18 -X32 With differential pressure gauge P.184 143

Membrane Air Dryer Single Unit Type A A Standard dew point 2 C, 15 C, 4 C, 6 C RoS ow to Order A 3 A 3 Size 3 6 75 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol dew point ( C) 3 6 75 2 15 3 3 Select from (page 145) L S 4 6 75 11 17 24 3 1 Symbol Thread type Symbol Type Rc N NPT F G Semi-standard Symbol Specifications None (Standard) P With fitting for air discharge R Flow direction (Right Left) Note) In the case of more than one symbol, indicate them alphabetically. Accessory Symbol Specifications None (Standard) B With bracket Note) When symbol: B is indicated, a bracket assembly with a part number shown to the left below is included as an accessory. Bracket Assembly (Accessory)/Part No. Part no. Applicable model BM64 3A, A BM65 6A, 75A, A With hexagon socket head cap screws (2 pcs.) and spring washers (2 pcs.) Symbol 2 3 4 Port size 1/4 3/8 1/2 3 Size 6 75 144

Membrane Air Dryer Single Unit Type RoS 1 2 Size 1 3 5 1 2 6 75 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol dew point ( C) 1 3 5 1 2 6 75 2 15 1 2 2 6 6 7 7 L 4 Select from S 6 A (page 144) Symbol Bracket Assembly (Accessory)/Part No. Part no. Applicable model BM59 3, 5 BM61 1 BM63 2 BM65 6, 75, With hexagon socket head cap screws (2 pcs.) and spring washers (2 pcs.) Thread type/one-touch fitting Symbol Type Rc N NPT F G C Note) ø6 One-touch fitting Note) Size 1 only ow to Order Accessory Symbol Specifications None (Standard) B With bracket (Except 1) Note) When symbol: B is indicated, a bracket assembly with a part number shown to the left below is included as an accessory. /Applicable tubing O.D. Port Size Symbol Piping type size 1 3 5 1 2 6 75 1 1/8 2 1/4 Thread 3 3/8 4 1/2 One-touch 6 ø6 fitting Semi-standard Symbol Specifications 1 3 5 Size 1 2 6 75 P R None (Standard) With fitting for air discharge Flow direction (Right Left) S With dew point indicator Standard equipment Note) In the case of more than one symbol, indicate them alphabetically. AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD 145

A A/ Standard Specifications/Single Unit Type (Standard dew point 2 C, 15 C) Standard dew point 2 C Range of operating conditions Standard performance Model Fluid Inlet air pressure (MPa) Inlet air temperature ( C) Note 1) Ambient temperature ( C) Note 1) Outlet air atmospheric pressure dew point ( C) Note 2) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator air flow rate Applicable tubing O.D. Standard performance conditions Weight (kg) (With bracket) 1/4.11 1 3 5 1 2 3A A 6 75 Compressed air.3 to.85.3 to 1. 5 to 55 5 to 5 to 55 5 to 12.5 1 2.5 31 6 62 12 1 2 36 586 7 9 2 3 6 7 6 86 1 1.7 1 L/min [ANR] (Inlet air pressure at.7 MPa) 119 19 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2 ø6..43.66.78.81 1. 1. 1.55.5 (.31) (.51) (.76) (.91) (.94) (1.65) (1.65) (1.7) Note 1) When using the product in the temperature range between 5 C and 5 C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 MPa) for the dew point indicator (except 1, 3, 5). Standard dew point 15 C/Type Model 3 5 1 2 3A A 6 75 Fluid Compressed air Inlet air pressure (MPa).3 to.85.3 to 1. Inlet air temperature ( C) Note 1) 5 to 55 5 to Ambient temperature ( C) Note 1) 5 to 55 5 to Standard Outlet air atmospheric performance pressure dew point ( C) Range of operating conditions Note 2) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator air flow rate Weight (kg) (With bracket) Standard performance conditions 28 3 56 6 111 11 222 2 22 15 329 5 665 3 6 29 65.7 1 L/min [ANR] (Inlet air pressure at.7 MPa) 83 7 8 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2..43.66.78.81 1. 1. (.31) (.51) (.76) (.91) (.94) (1.65) (1.65) 111 11 1.55 (1.7) Note 1) When using the product in the temperature range between 5 C and 5 C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 MPa) for the dew point indicator (except 3, 5). 146

Membrane Air Dryer Single Unit Type A A/ Standard Specifications/Single Unit Type (Standard dew point 4 C, 6 C) Standard dew point 4 C/Type L Range of operating conditions Standard performance Model 3LA LA 6LA 75LA LA Fluid Compressed air Inlet air pressure (MPa).3 to 1. Inlet air temperature ( C) Note 1) 5 to Ambient temperature ( C) Note 1) 5 to Outlet air atmospheric pressure dew point ( C) Note 2) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator air flow rate Weight (kg) (With bracket) Standard performance conditions 93 75 18.78 (.91) 135 11 4 224 17 54.7 38 24 68 1 L/min [ANR] (Inlet air pressure at.7 MPa) 1/4, 3/8 3/8, 1/2.81 1.56 1.69 (.94) (1.71) (1.84) 4 3 1.82 (1.97) Note 1) When using the product in the temperature range between 5 C and 5 C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 MPa) for the dew point indicator. Standard dew point 6 C/Type S Model 6SA 75SA SA Fluid Compressed air Inlet air pressure (MPa).3 to 1. Inlet air temperature ( C) Note 1) 5 to Ambient temperature ( C) Note 1) 5 to Standard Outlet air atmospheric performance pressure dew point ( C) Range of operating conditions Note 2) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator air flow rate Weight (kg) (With bracket) Standard performance conditions 6 75 14 23 1 4 8.7 1 L/min [ANR] (Inlet air pressure at.7 MPa) 3/8, 1/2 1.56 (1.71) 1.69 (1.84) 1.82 (1.97) Note 1) When using the product in the temperature range between 5 C and 5 C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 MPa) for the dew point indicator. AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD 147

A A/ Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C, P1: Inlet air pressure, Tube for air discharge (semi-standard: P): None Note: Correcting outlet air flow rate is required depending on inlet air temperature. Refer to page 174 for details. For model with fitting for air discharge (semi-standard: P), the outlet air atmospheric pressure dew point may become higher depending on the tube length for air discharge. For other models, when the tube length is 5 meters or less, a rise of the outlet air atmospheric pressure dew point will be 1 C or less. Standard dew point 2 C [Symbol: ], 15 C [Symbol: ] 1 Outlet air atmospheric pressure dew point ( C) 1 2 1 3 4 4 8 12 16 Outlet air flow rate (L/min [ANR]) 5, 5 Outlet air atmospheric pressure dew point ( C) 2, 2 Outlet air atmospheric pressure dew point ( C) 1 2 5 3 5 4 2 4 6 8 Outlet air flow rate (L/min [ANR]) 1 2 2 3 2 4 2 3 Outlet air flow rate (L/min [ANR]) A, A 3, 3 Outlet air atmospheric pressure dew point ( C) 1 2 3 4 1 2 3 4 1, 1 Outlet air atmospheric pressure dew point ( C) 3A, 3A Outlet air atmospheric pressure dew point ( C) 1 2 3 Outlet air flow rate (L/min [ANR]) 4 4 8 12 16 1 2 3 4 Outlet air flow rate (L/min [ANR]) 2 3 4 6, 6 3 1 3 1 3A 3A Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point ( C) 1 2 3 A 4 A 2 4 6 8 Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point ( C) 1 2 6 3 6 4 2 4 6 8 Outlet air flow rate (L/min [ANR]) 148

Membrane Air Dryer Single Unit Type A A/ Performance Chart 75, 75, Outlet air atmospheric pressure dew point ( C) Standard dew point 4 C [Symbol: L], 6 C [Symbol: S] 3LA, LA Outlet air atmospheric pressure dew point ( C) 1 2 3 4 2 4 6 8 1 2 3 4 Outlet air flow rate (L/min [ANR]) LA 6 3LA 7 4 8 12 16 75LA, 75SA Outlet air atmospheric pressure dew point ( C) Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point ( C) 1 2 3 4 4 8 12 16 6LA, 6SA Outlet air atmospheric pressure dew point ( C) 1 2 3 4 6 Outlet air flow rate (L/min [ANR]) 7 4 8 12 16 2 24 LA, SA Outlet air atmospheric pressure dew point ( C) 1 2 3 4 Outlet air flow rate (L/min [ANR]) P1 P1 =.3 MPa =.3 MPa 1 2 3 4 6 75SA 75 75 7 2 3 Outlet air flow rate (L/min [ANR]) ow to read the Performance Chart and select the model 75LA Solid lines and dashed lines beginning at the top indicate the performance of inlet air temperature at C and inlet air pressure,.5 MPa,.7 MPa respectively. For the inlet air temperature at C and outlet air flow rate at 45 (L/min) Model q: The outlet air atmospheric pressure dew point at : ( C). For the inlet air temperature at 45 C and outlet air flow rate at 45 (L/min) Example) Outlet air flow rate correction factor:.75 (The correction factor differs depending on the model. Refer to page 174 for details.) Corrected outlet air flow rate: 45.75 = 6 (L/min). Model q: Performing corresponding to the outlet air atmospheric pressure dew point 2 ( C) at. Outlet air atmospheric pressure dew point ( C) 1 15 2 3 4 Model w: 6SA SA 6 LA 7 2 3 4 Outlet air flow rate (L/min [ANR]) Model q: 45 6 Outlet air flow rate (L/min) 6LA Model w: Model q: 149 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD

A A/ Single Unit Type/Flow Rate Characteristics Standard dew point 2 C [Symbol: ], 15 C [Symbol: ] 1 3, 3 Conditions: Inlet air temperature C, P1: Inlet air pressure.4.4.3.2.1.3.2.1.. 4 8 12 16 1 2 3 4 5, 5 1, 1.4.3.2.1.6.4.2. 2 4 6 8 2, 2. 4 8 12 16 3A, 3A.8.3.6.4.2.2.1.. 2 3 2 3 4 A, A.8 6A, 6A.6.5.6.4.2.4.3.2.1. 2 4 6 8. 2 4 6 8 1

Membrane Air Dryer Single Unit Type A A/ Single Unit Type/Flow Rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure Standard dew point 2 C [Symbol: ], 15 C [Symbol: ] 75, 75,.8.6.4.2. 2 4 6 8 12.1.8.6.4.2.. 2 3 2 3 4.3.2.1. 2 3 4 Standard dew point 4 C [Symbol: L], 6 C [Symbol: S] 3LA.3.2.1 2 3 4 6LA, 6SA LA, SA.1.8.6.4.2. 4 8 12 16 LA.6.4.2.2.16.12.8.4.8 2 4 6 8 75LA, 75SA Tube length m 1 m 3 m 5 m 3A 2 19 17 16 3LA 4 39 38 With fitting for air discharge (Semi-standard: P) As the tube length for air discharge becomes longer, the outlet air atmospheric pressure dew point becomes higher. Refer to the table below. Conditions Inlet air temperature : C (Saturated) Ambient temperature : C Inlet air pressure :.7 MPa Outlet air flow rate : Flow gained under conditions of the standard performance. (Refer to pages 146 and 147.) Tube size : O.D. ø12 x I.D. ø9 151 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD

A A/ Purge Air Flow Rate Characteristics 1, 3, 5, 1, 2 (Standard dew point 2 C) 3, 5, 1, 2 (Standard dew point 15 C) 3A, A (Standard dew point 2 C) 3A, A (Standard dew point 15 C) 3LA, LA (Standard dew point 4 C) 1 6 2 A Purge air flow rate (L/min) 4 3 2 1 2 Purge air flow rate (L/min) 75 3A 3A 1 5 1 3, 5 3 1.5 1. Inlet air pressure (MPa) A 3LA LA.5 1. Inlet air pressure (MPa) 6, 75, (Standard dew point 2 C) 6, 75, (Standard dew point 15 C) 6LA, 75LA, LA (Standard dew point 4 C) 6SA, 75SA, SA (Standard dew point 6 C) 1 28 LA 24 SA Purge air flow rate (L/min) 2 16 12 8 75 6 75 6 Purge air flow rate (L/min) 6LA 75LA 75SA 4 6SA.5 1..5 1. Inlet air pressure (MPa) Inlet air pressure (MPa) 152

Membrane Air Dryer Single Unit Type A A/ Construction 1 q e t w 3, 5 3, 5 Component Parts No. 1 2 3 4 5 6 Purge air for dehumidification Description Plug Body Female connector Strainer Case Orifice Silencer Plug t q i dehumidification Semi-standard With fitting for air discharge (Semi-standard: P) Semi-standard With fitting for air discharge (Semi-standard: P) dehumidification 1, 2 1, 2 o t q y i r dehumidification dehumidification Semi-standard With fitting for air discharge (Semi-standard: P) Material 1 3, 3 5, 5 1, 1 2, 2 Note Brass Brass Brass Aluminum alloy Platinum silver coated (1 is electroless nickel plated.) Electroless nickel plated Resin Resin Stainless steel Bronze Plug! dehumidification AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD Replacement Parts No. Description 8 Membrane module kit 9 Dew point indicator kit 1 Part no. 1 3 3 5 5 1 1 2 2 -EL3 -EL3 -EL5 -EL5 -EL1 -EL1 -EL2 -EL2 With Orifice (1 pc.), O-ring (3 pcs.), Gasket (1 pc.) With Orifice (1 pc.), Silencer (1 pc.), O-ring (4 pcs.) -DP1 (Semi-standard: S) -DP1 With O-ring (1 pc.) -DP1-X1 (Semi-standard: PS) -DP1-X1 (Semi-standard: P) With O-ring (1 pc.) 153

A A/ Construction 3A A o q e Semi-standard With fitting for air discharge (Semi-standard: P) r w i dehumidification y dehumidification 6, 75, 6A, 75A, A o q e t Semi-standard With fitting for air discharge (Semi-standard: P) r! w i dehumidification dehumidification Component Parts No. 1 Description Body Material 3A A 6, 6 6LA, 6SA 75, 75 75LA, 75SA, LA, SA Note Aluminum alloy/white Platinum silver coated 2 3 4 5 6 Case Orifice older Silencer Adapter Aluminum alloy Resin Stainless steel Stainless steel Aluminum alloy Resin + Bronze Resin Resin + Bronze Resin Resin + Bronze Resin Replacement Parts No. Description Part no. 3A A 6, 6 6LA, 6SA 75, 75 75LA, 75SA, LA, SA 8 Membrane module kit -EL3A -ELA -EL6 -EL6LA -EL75 -EL75LA -EL -ELLA With Nozzle (1 pc.), Adapter (1 pc.), O-ring (1 pc.) With O-ring (1 pc.) 9 Dew point indicator kit -DP1 1 -DP1-X1 (Semi-standard: P) 154

Membrane Air Dryer Single Unit Type A A/ Dimensions/Single Unit Type 1 : 1/4 exagon width across flats 19 Bracket (Accessory: B) 16 22 2.3 3 4 A E dew point indicator (Maintenance space mm or more) 14 7 D B ø8 1-C6: With One-touch fitting Applicable tubing O.D.: ø6 3, 5 3, 5 : 1/8, 1/4 1, 2 1, 2 14 (67) (46) () (293) dehumidification (28) Purge air discharge port Dew point indicator (Semi-standard: S) dehumidification Rc1/8 exagon width across flats 17 ø8 17 11 L (26) dehumidification 73 38 dew point indicator C 41 With fitting for air discharge (Semi-standard: P) : 1/4 (86) dehumidification (33) (67) (23) With fitting for air discharge (Semi-standard: P) () (23) Applicable tubing O.D.: ø6 12 6 2.3 23 118 14 Bracket (Accessory: B) dehumidification exagon width across flats 14 exagon width across flats 17 Dew point indicator (Semi-standard: S) Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" Purge air discharge tubing port for dehumidification Applicable tubing O.D. Rc thread and G thread: ø NPT thread: øj" Purge air discharge port Applicable tubing O.D.: ø6 With fitting for air discharge (Semi-standard: P) Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" Purge air discharge tubing port for dehumidification Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" With fitting for air discharge (Semi-standard: P) (F) Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø6 (NPT thread: ø1/4") (92) (178) (G) AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD (Maintenance space mm or more) Model 1, 1 2, 2 L 1/4, 3/8 A B C D E 83 187 53 113 212 54 165 62 19 82 Semi-standard: P F G 114 2 8 14 [139] 1 J 5/16 3/8 Values inside [ ] are for NPT thread. 155

A A/ Dimensions/Single Unit Type 3A A With fitting for air discharge (Semi-standard: P) 18 7 14 7 dew 24 point indicator 17 L 7 2.3 26 Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" 1/4, 3/8 Bracket (Accessory: B) (G) 8 (D) (B) () dehumidification 6, 75, 6A, 75A, A 18 7 14 82 6 dew point indicator 97 (Maintenance space mm or more) 17 L 91 2.3 26 Bracket (Accessory: B) Purge air discharge tubing port for dehumidification Applicable tubing O.D. Rc thread and G thread: ø12 NPT thread: ø1/2" With fitting for air discharge (Semi-standard: P) Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" 3/8,1/2 (D) (B) () (G) dehumidification (Maintenance space mm or more) Purge air discharge tubing port for dehumidification 3A A 6 75, 6A 75A A 156 Model L 1/4, 3/8 3/8, 1/2 1/2 3/8, 1/2 B 291 33 352 348 418 483 D 269 38 33 326 396 461 Semi-standard: P G 362 41 429 427 496 561 32 341 369 367 436 1 Applicable tubing O.D. Rc thread and G thread: ø19 NPT thread: ø3/4"

Type M, Type V Membrane Air Dryer Unit Type A A RoS ow to Order A 3 A M 4 3 Size 3 6 75 Standard dew point temperature/outlet air flow rate Standard dew Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol point ( C) 3 6 75 2 3 15 3 Select from L 4 75 11 17 24 3 S 6 1 Semi-standard Symbol Specifications None (Standard) P R With fitting for air discharge Flow direction (Right Left) Made to Order Refer to pages 176 to 187 for details. Note Combination with drain discharge method symbol: is not available. Combination with Type V is not available. Note) In the case of more than one symbol, indicate them alphabetically. Note) Type V is not applicable because it is equipped with a relief type regulator. Symbol M V Mist separator Components Micro mist separator Membrane air dryer Regulator Equipment connection Symbol Components 4 M V Contents Modular connection Thread type Symbol Type Rc N NPT F G Symbol 2 3 4 Drain discharge method Drain discharge Symbol Note method Manual Combination with semi-standard valve symbol: P is not available. N.C. C auto-drain Auto-drains listed on page 171 N.O. D are attached. auto-drain J Drain guide For model selection of an auto-drain, refer to the Selection Precautions on page 188. Port size 1/4 3/8 1/2 3 Size 6 75 158

Membrane Air Dryer Unit Type RoS 1 M 4 2 Size 3 5 1 2 6 75 Standard dew point temperature/outlet air flow rate Standard dew Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol point ( C) 3 5 1 2 6 75 2 2 6 7 15 2 6 7 Symbol 4 2 Symbol Components V M M M V Size 3 5 1 2 6 75 3 5 1 2 6 75 Contents Mist separator Micro mist separator 3 Modular connection Nipple connection Micro mist separator with pre-filter Components Membrane air dryer Regulator Equipment connection Size 5 1 2 6 75 Some parts of the connected contents are exceptions. Check the equipment composition (described later) or the external dimension drawing for details of the connection method and the contents of the equipment. Thread type Symbol Type Rc N NPT F G ow to Order Drain discharge method (Mist separator, Micro mist separator, Micro mist separator with pre-filter) 1 2 3 4 C D J Symbol Semi-standard Port size 1/8 1/4 3/8 1/2 N.C. auto-drain N.O. auto-drain Drain guide 3 Standard Note 2) With fitting for air discharge 5 1 Size 2 6 75 Made to Order Refer to pages 176 to 187 for details. Size Symbol Specifications Note 3 5 P Type V is not available. Note 1) R Flow direction (Right Left) With dew point S Standard equipment indicator Note 3) In the case of more than one symbol, indicate them alphabetically. Note 1) Type V is not applicable because it is equipped with a relief type regulator. (Symbol: P is used when it is undesirable for the air to be discharged into the main body of the. Therefore, it is not possible to use it in combination with a separator with manual valve, which discharges air around it, or Type V with a relief type regulator.) Note 2) They are not applicable in case the thread symbol is N or F when the size is 3, 5, 1, 2. (Because barrel nipples are used for equipment connections.) Note 3) Select the option when the size is 3 or 5. The option is the standard equipment for other sizes. Drain discharge Size Symbol Note method 3 5 1 2 6 75 Manual Combination with semi-standard valve symbol: P is not available. For model selection of an auto-drain, refer to the Selection Precautions on page 188. 1 2 6 75 Combination with drain discharge method symbol: is not available. Combination with Auto-drains listed on page 171 are attached. 159 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD

A A/ Standard Specifications/Unit [Type M, Type V] (Standard dew point: 2 C, 15 C) Components Range of operating conditions Standard performance Standard dew point: 2 C Model 3M4 3V4 5M4 5V4 1M4 1V4 2M4 2V4 3AM4 AM4 3AV4 AV4 6M2 6V4 75M2 75V4 M2 V4 Mist separator AFM2-A (with bowl guard) AFM3-A AFM4-A Micro mist separator AFD2-A (with bowl guard) AFD3-A AFD4-A Micro mist separator with pre-filter AM3C AM4C Regulator (Type V only) Note 1) AR2-B Note 2) AR-B Note 2) AR4-B Note 2) Spacer Y2T-A Y3T-A Y4T-A Y2-A (Type V only) Y3-A (Type V only) Y4-A (Type V only) Y4-A (Type V only) Fluid Compressed air Inlet air pressure (MPa).3 to.85.3 to 1. Inlet air temperature ( C) 5 to 55 Note 3) 5 to Note 3) 5 to Ambient temperature ( C) 5 to 55 Note 3) 5 to Note 3) 5 to Outlet air atmospheric pressure dew point ( C) 2 Inlet air flow rate (L/min [ANR]) Note 5) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 6) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator air flow rate Regulator construction (Type V only) Type M Weight (kg) Type V Standard performance conditions 31 6 1/8, 1/4.6.9 62 12 1 1. 1.3 2 36 3 586 72 6 888 7 6 86 12 138.7 1 L/min [ANR] (Inlet air pressure at.7 MPa) Relief type 1/4, 3/8 3/8, 1/2 1/2 1.3 1.8 1.9 2.7 3.2 1.5 2.4 2.5 3.1 3.7 1185 185 3.3 3.8 Standard dew point: 15 C Model 3M4 5M4 1M4 2M4 3AM4 AM4 6M2 75M2 M2 3V4 5V4 1V4 2V4 3AV4 AV4 6V4 75V4 V4 Mist separator AFM2-A (with bowl guard) AFM3-A AFM4-A Micro mist separator AFD2-A (with bowl guard) AFD3-A AFD4-A Micro mist separator with pre-filter AM3C AM4C Regulator (Type V only) Note 1) AR2-B Note 2) AR-B Note 2) AR4-B Note 2) Spacer Y2T-A Y3T-A Y4T-A Y2-A (Type V only) Y3-A (Type V only) Y4-A (Type V only) Y4-A (Type V only) Fluid Compressed air Inlet air pressure (MPa).3 to.85.3 to 1. Inlet air temperature ( C) 5 to 55 Note 3) 5 to Note 3) 5 to Ambient temperature ( C) 5 to 55 Note 3) 5 to Note 3) 5 to Outlet air atmospheric pressure dew point ( C) 15 Inlet air flow rate (L/min [ANR]) Note 5) 28 56 111 222 329 5 665 818 1 Outlet air flow rate (L/min [ANR]) 2 3 6 7 Purge air flow rate (L/min [ANR]) Note 6) 3 6 11 22 29 65 68 Inlet air pressure (MPa).7 Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator air flow rate 1 L/min [ANR] (Inlet air pressure at.7 MPa) Regulator construction (Type V only) Relief type 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2 Weight (kg) Type M.6 1. 1.3 1.8 1.9 2.7 3.2 3.3 Type V.9 1.3 1.5 2.4 2.5 3.1 3.7 3.8 Components Range of operating conditions Standard performance Standard performance conditions 16

Membrane Air Dryer Unit Type A A/ Standard Specifications/Unit [Type M, Type V] (Standard dew point: 4 C, 6 C) Standard Range of operating performance conditions Components Model Mist separator Micro mist separator Regulator (Type V only) Note 1) Spacer Fluid Inlet air pressure (MPa) Inlet air temperature ( C) Ambient temperature ( C) Outlet air atmospheric pressure dew point ( C) Inlet air flow rate (L/min [ANR]) Note 5) Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 6) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator air flow rate Regulator construction (Type V only) Type M Weight (kg) Type V Standard performance conditions 3LAM4 LAM4 3LAV4 LAV4 93 75 18 135 11 Standard dew point: 4 C 6LAM4 6LAV4 AFM4-A AFD4-A AR4-B Note 2) Y4T-A Y4-A (Type V only) Compressed air.3 to 1. 5 to Note 3) 5 to Note 3) 4 Note 4) 224 17 54 75LAM4 75LAV4 38 24.7 1 L/min [ANR] (Inlet air pressure at.7 MPa) Relief type 1/4, 3/8 3/8, 1/2 1.8 2.4 1.9 2.5 2.6 3.1 2.8 3.3 68 LAM4 LAV4 Note 1) For flow rate characteristics and pressure characteristics of regulator, refer to pages 549 and 5. Note 2) It will come with Option E (With square-shaped, embedded type of a pressure regulator). Refer to page 547 for details of regulators such as set pressure range etc. Note 3) No freezing Note 4) Refer to the Piping Precautions (Piping material for low dew point air) on page 189. Note 5) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 6) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 MPa) for the dew point indicator. Note 7) When highly purified air is required, refer to the Design 3. on page 188. 4 3 2.9 3.4 6SAM4 6SAV4 75 Standard dew point: 6 C 75SAM4 75SAV4 AFM4-A AFD4-A AR4-B Note 2) Compressed air.3 to 1. 5 to Note 3) 5 to Note 3) 6 Note 4) 14 4.7 SAM4 SAV4 23 1 8 1 L/min [ANR] (Inlet air pressure at.7 MPa) Relief type 2.6 3.1 Y4T-A Y4-A (Type V only) 3/8, 1/2 2.8 3.3 2.9 3.4 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD 161

A A/ Unit Type/Flow Rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure Standard dew point 2 C [Symbol: ], 15 C [Symbol: ] 3M4, 3V4 3M4, 3V4.12.1 P1.8 =.3 MPa.6.4.2 Element saturated state (AFM, AFD) Element initial state (AFM, AFD) 1 2 3 4 5M4, 5V4 5M4, 5V4.12.1.8.6.4.2 Element saturated state (AFM, AFD) Element initial state (AFM, AFD) 2 4 6 8 1M4, 1V4 1M4, 1V4.12.1.8.6.4.2 4 8 12 16 3AM4, 3AV4.8.6.4 Element saturated state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element initial state (AFM, AFD).2 2 3 4 2M4, 2V4 2M4, 2V4.12.1.8.6.4.2 2 3 AM4, AV4 Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD).12.1.8.6.4.2 2 4 6 8 6M2, 6M2 6V4, 6V4.12.1.8.6.4.2 2 4 6 8 75M2, 75M2 75V4, 75V4 Element saturated state (AM) Element initial state (AM) Element saturated state (AM) Element initial state (AM).12.1.8.6.4.2 3 6 9 12 162

Membrane Air Dryer Unit Type A A/ Unit Type/Flow Rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure M2, M2 V4, V4.12.1.8.6 Element saturated state (AM).4.2 4 8 12 16 3LAM4, 3LAV4 6LAM4, 6SAM4 6LAV4, 6SAV4 LAM4, SAM4 LAV4, SAV4.8.6.4.8.6.4.2.12.1.8.6.4.2 Element initial state (AM) Standard dew point 4 C [Symbol: L], 6 C [Symbol: S] Element saturated state (AFM, AFD).2 2 3 4 LAM4, LAV4 75LAM4, 75SAM4 75LAV4, 75SAV4 8 16 24 2 3 Element initial state (AFM, AFD) 2 3 4 Element saturated state (AFM, AFD) Element initial state (AFM, AFD).12.1.8.6.4.2 2 4 6 8 Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) Element saturated state (AFM, AFD) Element initial state (AFM, AFD).12.1.8.6.4.2 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD 163

A A/ Dimensions/Type M 3M4, 5M4 3M4, 5M4 41.6 12 43.2 5.5 (159) dew point indicator Dew point indicator (Semi-standard: S) (54) 3 9.8 11 24 29 1/8, 1/4 (14) 24 9 3.5 67 136 dehumidification (Maintenance space mm or more) Drain Discharge Manual valve M5 x.8 Float type auto-drain N.C. type exagon width across flats 14 1/8 Female thread Drain guide With fitting for air discharge (Semi-standard: P) For port size 1/8: (24) For port size 1/4: (22) Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 (54) 3 41.6 12 43.2 Dew point indicator (Semi-standard: S) 9.8 24 29 5.5 Rc1/8, 1/4 (NPT, G threads are not available.) 178 24 9 3.5 67 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø8 (Maintenance space mm or more) Drain Discharge 164 M5 x.8 Float type auto-drain N.C. type exagon width across flats 14 Rc1/8 Drain guide

Membrane Air Dryer Unit Type A A/ Dimensions/Type M 1M4, 2M4 1M4, 2M4 14 1/4, 3/8 Model 1M4, 1M4 2M4, 2M4 55.1 14 7 (A) 57.2 dew point indicator With fitting for air discharge (Semi-standard: P) 14 Rc1/4, 3/8 (NPT, G threads are not available.) A 197 227 55.1 14 7 B 192 217 57.2 (A) Dew point indicator Dew point indicator (B) (Maintenance space mm or more) Drain Discharge ø4 Manual valve (With drain discharge valve) Purge air for dehumidification Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 N.C.: Gray N.O.: Black Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" (72) 41 Float type auto-drain N.C. type N.O. type (72) 41 35 41 35 4 82 Purge air for dehumidification exagon width across flats 17 1/4 Female thread Drain guide (Without drain discharge valve) 35 35 41 82 4 (B) (C) AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD Model 1M4, 1M4 2M4, 2M4 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ød A B C 1/4 1/4 242 272 3/8 3/8 243 273 2 231 (Maintenance space mm or more) Drain Discharge N.C.: Gray N.O.: Black Applicable tubing O.D.: ø1 Float type auto-drain N.C. type N.O. type exagon width across flats 17 Rc1/4 Drain guide (Without drain discharge valve) 165

A A/ Dimensions/Type M 3AM4 AM4 6AM4 75AM4 AM4 18 L (A) 72.6 75.2 18 dew point indicator Dew point indicator 9 (C) 4 4 48 96 5 N.C.: Gray N.O.: Black ø4 Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" exagon width across flats 17 1/4 Female thread Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" (A) 72.6 75.2 18 Dew point indicator (C) (B) (B) 4 48 9 (B) Drain Discharge Purge air for dehumidification (Maintenance space mm or more) Manual valve (With drain discharge valve) Float type auto-drain N.C. type N.O. type Drain guide (Without drain discharge valve) With fitting for air discharge (Semi-standard: P) 6LAM4, 75LAM4, LAM4 6SAM4, 75SAM4, SAM4 18 L 4 5 96 Purge air discharge tubing port for dehumidification Applicable tubing I.D. Rc thread and G thread: ø19 NPT thread: ø3/4 Purge air discharge tubing port for dehumidification Applicable tubing O.D. Rc thread and G thread: ø12 NPT thread: ø1/2" Purge air for dehumidification (Maintenance space mm or more) Drain Discharge Model 3AM4 AM4 6LAM4, 6SAM4 75LAM4, 75SAM4 LAM4, SAM4 166 L 1/4, 3/8 3/8, 1/2 A 22 232 B Standard Semi-standard: P 299 362 338 41 356 427 426 496 491 561 C 88 91 N.C.: Gray N.O.: Black Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" Float type auto-drain N.C. type N.O. type exagon width across flats 17 1/4 Female thread Drain guide (Without drain discharge valve)

Membrane Air Dryer Unit Type A A/ Dimensions/Type M 6M2 75M2 M2 (E) Q Q ør 37 G (F) C K M5 female thread With fitting for air discharge (Semi-standard: P) 3/8, 1/2 D L Drain (A) (B) Dew point indicator Purge air discharge tubing port for dehumidification Applicable tubing I.D. Rc thread and G thread: ø19 NPT thread: ø3/4" dew point indicator 18 22 (428) (352) Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" (Maintenance space mm or more) M (Maintenance space mm or more) Drain Discharge exagon width across flats 24 N S P Purge air for dehumidification N.O.: Black Applicable tubing O.D.: ø1 (NPT thread: ø3/8") With float type auto-drain T Thread size: 1/4 (Without valve mechanism) With drain guide Total length of the separator AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD Model 6M2 75M2 M2 3/8, 1/2 1/2 A B 189 186 C 7.5 D E F G 8 367 244 18 K L 127 7 14 M N P 95 28 With float type auto-drain With drain guide Q R S T 7 12 5 241 26 24 1.5 9 369 262 2 146 9 18 18 55 31 9 15 276 262 167

A A/ Dimensions/Type V 3V4, 5V4 3V4, 5V4 9.8 (23) 41.6 119.4 12 dew point indicator Dew point indicator (Semi-standard: S) 5.5 6 3 24 29 1/8, 1/4 dehumidification 136 (14) (Maintenance space mm or more) Drain Discharge 24 9 3.5 67 Manual valve M5 x.8 Float type auto-drain N.C. type exagon width across flats 14 1/8 Female thread Drain guide 1V4, 2V4 1V4, 2V4 (A) 55.1 C 14 dew point indicator Dew point indicator 7 (72) 41 14 35 41 1/4, 3/8 35 82 B 4 dehumidification dehumidification (Maintenance space mm or more) Model 1V4, 1V4 2V4, 2V4 A 5 285 B 192 217 C 144.4 174.4 Drain Discharge ø4 Manual valve (With drain discharge valve) N.C.: Gray N.O.: Black Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" Float type auto-drain N.C. type N.O. type exagon width across flats 17 1/4 Female thread Drain guide (Without drain discharge valve) 168

Membrane Air Dryer Unit Type A A/ Dimensions/Type V 3AV4 AV4 6AV4 75AV4 AV4 18 L Model (A) 72.6 C 18 dew point indicator 9 3AV4 AV4 6LAV4, 6SAV4 75LAV4, 75SAV4 LAV4, SAV4 L 1/4, 3/8 3/8, 1/2 A 296 38 B 299 338 356 426 491 C 1.4 162.4 D 88 91 ø4 (B) Drain Discharge Manual valve (With drain discharge valve) (D) N.C.: Gray N.O.: Black 4 4 Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" 5 48 96 Purge air for dehumidification Float type auto-drain N.C. type N.O. type (Maintenance space mm or more) exagon width across flats 17 1/4 Female thread Drain guide (Without drain discharge valve) AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD 169

A A/ Dimensions/Type V 6V4, 75V4, V4 6V4, 75V4, V4 N (A) N øp 37 D G E (C) dew point indicator Dew point indicator 54 8 J K 2.3 Rc3/8, 1/2 (NPT, G threads are not available.) 8.5 (B) F L 1.5 54 2.3 Purge air for dehumidification (Maintenance space mm or more) Drain Discharge M5 female thread Manual valve N.O.: Black Applicable tubing O.D.: ø1 Float type auto-drain N.O. type exagon width across flats 24 1/4 Female thread Drain guide (Without drain discharge valve) Model A B C D E F G J K L 6V4, 6V4 75V4, 75V4 V4, V4 3/8 1/2 1/2 264 266 281 367 261 263 7.5 369 279 1.5 8 9 18 2 7 9 14 18 95 18 55 28 31 17

Membrane Air Dryer Unit Type A A/ Bowl Assembly, Pressure Gauge/Part No. Description Float type N.C. auto-drain N.O. Pressure gauge (Type V only) Description Bowl assembly (N.O.) Pressure gauge (Type V only) Description Float type auto-drain N.C. N.O. Pressure gauge (Type V only) 3M4 3V4 3M4 3V4 6M2 6V4 3LAM4 3LAV4 5M4 5V4 AD27-C-A AM-CA3C-D 6M2 6V4 LAM4 LAV4 5M4 5V4 75M2 75V4 6LAM4 6LAV4 1M4 1V4 GC3-1AS 1M4 2M4 2M4 3AM4 3AM4 AM4 AM4 1V4 2V4 2V4 3AV4 3AV4 AV4 AV4 AD37-A AD47-A AD38-A AD48-A GC3-1AS 75M2 75V4 6SAM4 6SAV4 AM-CA4C-D AD47-A AD48-A GC3-1AS M2 V4 75LAM4 75LAV4 M2 V4 75SAM4 75SAV4 Replacement Parts (Element for mist separator, micro mist separator, micro mist separator with pre-filter) Description Element assembly AFM2-A AFM2P-6AS AFD2-A AFD2P-6AS AFM3-A AFM3P-6AS AFD3-A AFD3P-6AS AFM4-A AFM4P-6AS AFD4-A AFD4P-6AS AM3C AM-EL3 Symbol (Type M) Mist separator Type M Micro mist separator Membrane air dryer 6 to M2 6 to M2 Micro mist Membrane separator air dryer with pre-filter (Type V) Mist separator Type V Micro mist separator Micro mist separator with pre-filter Membrane air dryer Regulator 6 to V4 6 to V4 Membrane air dryer Regulator LAM4 SAM4 LAV4 SAV4 AM4C AM-EL4 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD 171

A A/ Clogging Indication When the differential air is.5 MPa or less When the differential air is.1 MPa or more (The tip of the indicator is just visible.) (The indicator is completely up to the top.) Replace the element when the element service indicator s red indication reaches completely to the top. The top of the indication window shows differential pressure of approximately.1 MPa. Replace the element after two years of use, even if the element service indicator s red indication does not reach the top. The element service indicator is shipped mounted to the micro mist separator with pre-filter, and cannot be retrofitted or used individually. Spacer Compatibility Chart Spacer size 3 5 1 2 3 6 75 Y2(T)-A Y3(T)-A Y4(T)-A 172

A Model Selection A/ Step 1 Check the operating conditions. Outlet air flow rate (L/min [ANR]) Outlet air atmospheric pressure dew point ( C) (When it is necessary to convert from the pressurized dew point, refer to the conversion chart for dew point temperature below.) Inlet air pressure (MPa) Inlet air temperature ( C) Allowable pressure drop P (MPa) Compressed air supply capacity Q (L/min [ANR]) Dew Point Temperature Conversion Chart [Example] Outlet air flow rate Outlet air atmospheric pressure dew point Inlet air pressure Inlet air temperature Allowable pressure drop Compressed air supply capacity 1 (L/min[ANR]) 15 ( C).5 (MPa) 35 ( C).3 (MPa) 3 (L/min [ANR]) 6 Pressure dew point ( C) 4 3 2 1 1 2 1 MPa.9 MPa.7 MPa.5 MPa.3 MPa.1 MPa Atmospheric pressure 3 4 6 6 4 3 2 1 1 2 3 Atmospheric pressure dew point ( C) 174

Model Selection A A/ Step 2 Correction of the outlet air flow rate influenced by the inlet air temperature (When the inlet air temperature is C, proceed to Step 4 ) Step 3 Step 4 When the inlet air temperature is not the same temperature ( C) on the performance charts, calculate the correction factor for the outlet air flow rate from the table below to compensate the outlet air flow rate. Example: From the table below (Inlet Air Temperature Correction Factor for Outlet Air Flow Rate), Inlet air temperature 35 C correction factors for outlet air flow rate are as follows. A series:.86 series:.4 Therefore, corrected outlet air flow rate can be determined. Outlet air flow rate 1 L/min [ANR] [A series] 1.86 = 175 L/min [ANR] [ series] 1.4 = 375 L/min [ANR] Inlet Air Saturation Temperature Correction Factor for Outlet Air Flow Rate Inlet air temperature ( C) A series series 1 1.35 3. 15 1.22 2.17 2 1.1 1.52 1. 1. 3.92.65 35.86.4 4.8. 45.75.19.7.14 Note) Correction factors between A series and series are different from each other, because the membrane module characteristics are different. Model selection based on corrected outlet air flow rate Based on the corrected outlet air flow rate calculated by Step 2, select a model from the performance charts on pages 148 and 149. Example: Corrected outlet air flow rate 175 L/min [ANR] [A series] Corrected outlet air flow rate 375 L/min [ANR] [ series] Inlet air pressure.5 MPa Outlet air atmospheric pressure dew point 15 C Check the air flow rate. With the conditions of the corrected outlet air flow rate and the inlet air pressure mentioned to the left, when selecting a model which satisfies the specifications that the outlet air atmospheric pressure dew point 15 C or less, [A series] 3A, A [ series] 6 Read out from the air flow rate characteristics on page 152. Example: Inlet air pressure.5 MPa Selected model 3A For the 3A 45 L/min [ANR] A For the A 38 L/min [ANR] 6 For the 6 94 L/min [ANR] Step 5 Calculate the inlet air flow rate Q1, and check the compressed air supply capacity. Step 6 Check the pressure drop P1 [MPa]. Step 7 Inlet air flow rate Q1 (L/min [ANR]) = Outlet air flow rate (L/min [ANR]) + Purge air flow rate (L/min [ANR]) Example: Assuming that the 3A is chosen Inlet air flow rate Q1 = 1 + 45 = 195 L/min [ANR] by Step 4 Outlet air flow rate 1 L/min [ANR] Purge air flow rate 45 L/min [ANR] Compressed air supply capacity Q 3 L/min [ANR] NO Step 1 Review the operating conditions. Step 1 NO or Step 2 Review the operating conditions or increase size. Compressed air supply capacity Q Q1 Single Unit (Refer to pages 1 and 151.) Unit (Refer to pages 162 and 163.) P P1 YES YES 3 195, therefore proceed to Step 6 Step 6 Example: Selected model: 3A Single Unit: 3A Inlet air pressure.5 MPa Based on the flow rate characteristics (page 1), Inlet air flow rate 195 L/min [ANR] P1 =.6 MPa Allowable pressure drop P Unit: 3AM4.3 MPa P1 =.1 MPa (Element initial state) Consider the drain discharge method (in the case of Unit), accessory and semi-standard specification. Example: For the 3A Accessory: With bracket Semi-standard: None For the 3AM4 Drain discharge method: N.O. auto-drain Semi-standard: None For the 3A and 3AM4 (element initial state), P P1, therefore proceed to Step 7 Single Unit (Refer to pages 144 and 145.) Unit (Refer to pages 158 and 159.) Refer to Selection in the Specific Product Precautions 1 on page 188. Model selected AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD <Single Unit> 3A-3B <Unit> 3AM4-3D 175

A A/ Made to Order 1 Please contact SMC for detailed dimensions, specifications and lead times. 1 With Element Service Indicator A ow to Order 3 A M2 3 X16 Size 3 6 75 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol dew point ( C) 3 6 75 2 3 15 3 L 4 75 11 17 24 3 S 6 1 With element service indicator Semi-standard Symbol Specifications None (Standard) R Flow direction (Right Left) Drain discharge method Symbol Drain discharge method Manual valve C N.C. auto-drain D N.O. auto-drain Drain guide J ( 1/4 without valve) For model selection of an auto-drain, refer to the Selection Precautions on page 188. Symbol -X16 An element service indicator is mounted on the micro mist separator with pre-filter (AM series) to allow visual management of the element s clogging life. In addition, combination with a micro mist separator with pre-filter also provides a spatially compact design. Element service indicator Thread type Symbol Type Rc N NPT F G Symbol 2 3 Port size 1/4 3/8 3 6 75 L L L L L S Components Components Micro mist separator with pre-filter (AM) 3 6 75 L L L L L S AMC AM1C AM3C AM1C AMC AMC AMC Replacement Parts (Element for micro mist separator with pre-filter) Description AM1C AMC AM3C Element assembly AM-EL1 AM-EL AM-EL3 Refer to page 172 for the clogging indication of the element service indicator. 176

Made to Order A A/ ow to Order 1 M2 2 Size 3 5 1 2 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol dew point ( C) 3 5 1 2 2 2 15 2 Components Replacement Parts (Element for micro mist separator with pre-filter) Description AM1C AMC Element assembly AM-EL1 AM-EL Thread type Symbol Type Rc N NPT F G Semi-standard Symbol Specifications Drain discharge method Symbol C Drain discharge method Manual valve N.C. auto-drain Drain guide J ( 1/4 without valve) For model selection of an auto-drain, refer to the Selection Precautions on page 188. Drain discharge method does not need to be selected for N.O. auto-drain type. Symbol 1 2 3 Components Port size 1/8 1/4 3/8 Micro mist separator with pre-filter (AM) 3 R S None (Standard) Flow direction (Right Left) With dew point indicator 5 1 2 3 X16 With element service indicator 5 AM1C Size 3 5 1 2 Standard equipment 3 Size 5 1 1 2 AMC 2 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD Refer to page 172 for the clogging indication of the element service indicator. 177

P P øq C D (A) (B) dew point indicator L M Drain Discharge (R) N.O.: Black N.C.: Gray Applicable tubing O.D.: ø1 (NPT thread: ø3/8") Float type auto-drain (S) (E) J (G) A A/ Dimensions 3M2, 5M2, 1M2, 2M2 3M2, 5M2, 1M2, 2M2 K F 37 (G) N (Maintenance space mm or more) M5 Female thread Drain 3AM2, AM2 3AM2, AM2 3LAM2, LAM2 P P øq C D (A) (B) dew point indicator L M F N 37 J (E) K M5 Female thread Drain dehumidification Thread size: 1/4 (Without valve mechanism) exagon width across flats 24 (Maintenance space mm or more) Drain guide Total length of the separator Model 3M2, 3M2, 5M2, 5M2 1M2, 1M2 2M2, 2M2 3AM2, 3AM2 3LAM2 AM2, AM2 LAM2 178 A B C D E 1/8 1/4 1/4 1/4 3/8 1/4, 3/8 1/4 3/8 1/4 155.5 153.5 163.5 25 26 16 1.5 175 1.5 152 1 16 23 24 158 147 172 147 7 7.5 7 56 66 56 8 56 198 212 198 244 198 F G J K L M N 1 14 1 18 1 154 198 227 32 298 345 337 12 14 12 6 7 6 89 99 89 127 89 66.5 78 69 95 69 35 4 35 35 2 24 2 28 2 P 6 7 6 Q 1 12 1 With float type auto-drain R 29 223 29 5 29 With drain guide S 195 29 195 241 195

Made to Order A A/ Dimensions 6LAM2 75LAM2 LAM2, SAM2 (C) (D) 99 E 37 M5 Female thread Drain SMC 7 (F) 6 dew point indicator 14 11 18 17 (22) (B) (A) 91 Drain Discharge (G) 26 2.3 dehumidification N.C.: Gray N.O.: Black Applicable tubing O.D.: ø1 (NPT thread: ø3/8") Float type auto-drain Total length of the separator (Maintenance space mm or more) () Thread size: 1/4 (Without valve mechanism) exagon width across flats 24 Drain guide AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD Model A B C D E F 6LAM2 75LAM2 LAM2, SAM2 348 326 359 3/8 418 396 429 212 14 17 483 461 494 With float type auto-drain With drain guide G 223 29 179

A A/ Made to Order 2 Please contact SMC for detailed dimensions, specifications and lead times. 2 With Micro Mist Separator Regulator (AWD ) This can be used when highly purified air is required (supply for air bearings, semiconductor parts blow, etc.). Unit Type V regulator (AR) is changed to the micro mist separator regulator (AWD). Symbol -X17 Micro mist separator regulator A ow to Order 3 A V4 3 X17 Size 3 6 75 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol dew point ( C) 3 6 75 2 3 15 3 L 4 75 11 17 24 3 S 6 1 Thread type Symbol Type Rc N NPT F G Symbol Port size With micro mist separator regulator Semi-standard Symbol Specifications None (Standard) R Flow direction (Right Left) Drain discharge method Symbol Drain discharge method Manual valve C N.C. auto-drain D N.O. auto-drain Drain guide J ( 1/4 without valve) For model selection of an auto-drain, refer to the Selection Precautions on page 188. 3 6 75 L L L S L S L S 2 3 4 1/4 3/8 1/2 Components Components Mist separator Micro mist separator Micro mist separator regulator 3 6 75 AFM4-A AFD4-A AWD4 L L L S L S L S Replacement Parts (Element for mist separator, micro mist separator, micro mist separator regulator) Description AFM4-A AFD4-A AWD4 Element assembly AFM4P-6AS AFD4P-6AS AFD4P-6AS 18

Made to Order A A/ ow to Order 1 V4 2 Size 3 5 1 2 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol dew point ( C) 3 5 1 2 2 2 15 2 Thread type Symbol Type Rc N NPT F G Components Semi-standard Symbol Specifications Drain discharge method Symbol Drain discharge method Manual valve C N.C. auto-drain D N.O. auto-drain J Drain guide For model selection of an auto-drain, refer to the Selection Precautions on page 188. Symbol 1 2 3 Components Port size 1/8 1/4 3/8 Mist separator Micro mist separator Micro mist separator regulator 3 R S X17 None (Standard) Flow direction (Right Left) With dew point indicator 5 1 2 3 With micro mist separator regulator 5 AFM2-A AFD2-A AWD2 Size 3 5 1 2 Standard equipment 1 2 AFM3-A AFD3-A AWD3 AA AW AT IDU FS A B ID ID IDK AMG AFF AM AMD AM AME AMF ZFC SF SFD LLB AD GD Replacement Parts (Element for mist separator, micro mist separator, micro mist separator regulator) Description Element assembly AFM2-A AFM2P-6AS AFM3-A AFM3P-6AS AFD2-A AFD2P-6AS AFD3-A AFD3P-6AS AWD2 AFD2P-6AS AWD3 AFD3P-6AS 181

A A/ Dimensions 3V4, 5V4, 1V4, 2V4 3V4, 5V4, 1V4, 2V4 C (A) D (F) G 14 dew point indicator 7 Dew point indicator E J L (B) K dehumidification M dehumidification 9 (3, 5 only) (Maintenance space mm or more) Drain Discharge (3V4, 5V4) Drain Discharge (1V4, 2V4) N.C.: Gray N.O.: Black M5 x.8 1/8 Female thread exagon width across flats 14 ø4 Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" 1/4 Female thread exagon width across flats 17 Manual valve Float type auto-drain N.C. type Drain guide (Without drain discharge valve) Manual valve (With drain discharge valve) Float type auto-drain N.C. type N.O. type Drain guide (Without drain discharge valve) Model A B C D E F G J K M 3V4, 3V4, 5V4, 5V4 1V4, 1V4 2V4, 2V4 L 1/8, 1/4 1/4, 3/8 23 5 285 18 237 262 41.6 55.1 119.4 144.4 174.4 9.8 14 93 3 17 41 24 35 29 41 67 82 3.5 4 182

Made to Order A A/ Dimensions 3AV4, AV4 3AV4, AV4 3LAV4, LAV4, 6LAV4, 75LAV4, LAV4 6SAV4, 75SAV4, SAV4 18 L A 72.6 C 9 18 dew point indicator Dew point indicator (126) 4 4 48 96 AA AW AT IDU FS A B (B) 5 ID ID IDK AMG AFF AM Drain Discharge AMD AM AME N.C.: Gray N.O.: Black AMF ø4 Manual valve (With drain discharge valve) Applicable tubing O.D. Rc thread or G thread: ø1 1/4 Female thread NPT thread: ø3/8" exagon width across flats 17 Float type auto-drain N.C. type N.O. type Drain guide (Without drain discharge valve) ZFC SF SFD LLB Model 3AV4 AV4 6LAV4, 6SAV4 75LAV4, 75SAV4 LAV4, SAV4 L 1/4, 3/8 3/8, 1/2 A B C 296 38 343 1.4 382 4 47 162.4 535 AD GD 183

A A/ Made to Order 3 Please contact SMC for detailed dimensions, specifications and lead times. 3 With Differential Pressure Gauge The service life of the element service indicator can be controlled with differential pressure. Differential pressure gauge Symbol -X32 ow to Order A 3 A V4 3 X32 Size 3 6 75 With differential pressure gauge Semi-standard Symbol Specifications None (Standard) R Flow direction (Right Left) Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate (L/min [ANR]) Symbol dew point ( C) 3 6 75 2 3 15 3 L 4 75 11 17 24 3 S 6 1 Thread type Symbol Type Rc N NPT F G Symbol Port size Drain discharge method Symbol Drain discharge method Manual valve C N.C. auto-drain D N.O. auto-drain J Drain guide 3 6 75 Note Auto-drains listed on page 171 are attached. For model selection of an auto-drain, refer to the Selection Precautions on page 188. L L L S L S L S 2 3 4 1/4 3/8 1/2 Components Components Mist separator Micro mist separator Differential pressure gauge Regulator 3 6 75 AFM4-A AFD4-A GD4-2-1-X29 AR4-B L L L S L S L S Replacement Parts (Element for mist separator, micro mist separator) Description AFM4-A AFD4-A Element assembly AFM4P-6AS AFD4-6AS 184