Cost reduced by up to /year! Purge air flow rate (rated conditions) Running cost [ /year] Model IDG50A

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embrane Air Dryer Possible to easily supply dry air using the hollow fiber membrane! Non-fluorocarbon Compatible with low dew point ( 6 C) RoHS No vibration or heat discharge New Energy saving in air flow by up to 39 [L/min [ANR]] Cost reduced by up to IDGA Purge air flow rate [L/min [ANR]] 18 16 Existing model 14 12 IDGA 8 6 4..5 1. Inlet air pressure [Pa] Variations IDGA Reduction ratio 31% Purge air flow rate (rated conditions) IDGA Existing model IDGA Purge air flow reduction type A white body is introduced. 14.4 /year! odel Running cost [ /year] 39.6 4 Purge air flow rate [L/min [ANR]] 86 1 Unit Type Purge ratio [%] Adopted a new air combination with reduced required maintenance space and weight! Except AR 15 2 [Calculation conditions] Air unit price:.2 /m 3 Operating hours: 12 hours/day Annual operating days: 2 days/year IDG1 Tube configuration low flow rate type Thread type Rc NPT G ø6 One-touch fitting <Type > When dry clean air is required. ist separator + icro mist separator + IDG <Type V> When dry clean air and pressure control are required. ist separator + icro mist separator + IDG + Regulator Single Unit Body size Standard dew point 1 3, 5 1, 2 3 6 75 2 C/ 15 C/Type H 4 C/Type L 6 C/Type S IDGA/IDG IDGA IDG CAT.EUS3-7F-UK

embrane Air Dryer Space saving Total length is shortened. IDG3A to A ax. 59 mm Size Shortened dimension IDGA Existing model 3 2 291 271 7 33 315 Standard dew point: 4 C/L, 6 C/S 6 44 348 392 75 54 418 472 (mm) 59 483 542 Flexible mounting orientation IDG1 Easy to install in narrow spaces! ø6 One-touch fitting Inspection equipment Thread type Rc NPT G IDGA 483 mm 59 mm IDGLA, SA Existing model 542 mm in. bending radius: 35 mm Possible to dehumidify like a tube. Weight: 45 g High performance Time to reach the standard dew point Shortened by 4 minutes Under SC test condition IDGA odel IDGSA Existing model Time to reach the standard dew point (minutes) 6 9 6 4 minutes Dew point indicator visually confirms air drying. (Except IDG1) (Semi-standard: IDG3, IDG5, IDG3H, IDG5H) Colour of the dew point indicator Normal operating: Blue Initial state: White/Pink Dew point indicator odel with fitting for air discharge is also available. When air discharge is undesirable in the area around the membrane air dryer, it can be discharged to atmosphere via tubing (semi-standard). Fitting for exhausting air for dew point indicator Fitting for exhausting air for dehumidification in air discharge noise with built-in silencer ( Except IDG1, IDG3, IDG3H, IDG5, ) IDG5H, IDG3A, IDG3HA, IDG3LA, IDGA, IDGHA, IDGLA Features 1

IDGA/IDG Dehumidification Principle The membrane air dryer uses hollow fibers composed of a macro molecular membrane through which moisture passes easily, but is difficult for air (oxygen and nitrogen) to pass through. When humid, compressed air is supplied to the inside of the hollow fibers, only moisture permeates the membrane and moves to the outside due to the pressure difference between the moisture inside and outside of the fibers. The compressed air becomes dry air and continues out of the dryer. Part of the dry air from the outlet side is passed through a very small orifice to reduce the pressure and the outside of the hollow fibers. The moisture which permeated to the outside of the hollow fibers is discharged to the atmosphere by this air. In this way, the partial pressure outside of the hollow fibers remains low and dehumidification is continuously performed. Air (oxygen, nitrogen, etc.) Dry air oisture Orifice Purge air Hollow fiber Humid compressed air achine Tool Application Examples easuring achine Semiconductor-related anufacturing Equipment Powder Coating Food achinery Packaging achine (sealing of film and paper package) Others Dental equipment Chemical analysis equipment Ozonizers, Hydrogen gas generating equipment Printed circuit board IC mounting machines Fine particle drying, Transfer equipment Drying and cleaning of precision parts Condensation prevention in control panels General pneumatic equipment and pneumatic tools Features 2

Variations eets a wide variety of flow rates (1 to L/min [ANR]) and dew points (Atmospheric pressure dew point: 15 C to 6 C). Standard dew point: 2 C Standard dew point: 15 C Standard dew point: 4 C Standard dew point: 6 C Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] IDG1 1 IDG3 IDG3H IDG5 IDG5H IDG1 IDG2 2 IDG1H IDG2H 2 Page 1 Page 2 IDG3A 3 IDG3HA 3 IDG3LA 75 IDGA IDGHA IDGLA 11 IDG6 6 IDG6H 6 IDG6LA 17 IDG6SA IDG75 7 IDG75H 7 IDG75LA 24 IDG75SA IDG IDGH IDGLA 3 IDGSA 1 = Note) Standard dew point: Outlet air atmospheric pressure dew point under standard performance conditions Outlet air flow rate: Values under standard performance conditions Features 3

IDGA/IDG Unit Type <Type > A mist separator, micro mist separator, or micro mist separator with pre-filter combined with a single unit Standard dew point: 2 C Standard dew point: 15 C Standard dew point: 4 C Standard dew point: 6 C Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] IDG34 IDG3H4 IDG54 IDG5H4 IDG14 IDG24 IDG3A4 2 3 IDG1H4 IDG2H4 IDG3HA4 2 3 IDG3LA4 75 Page 15 Page 16 IDGA4 IDGHA4 IDGLA4 11 IDG62 6 IDG6H2 6 IDG6LA4 17 IDG6SA4 IDG752 7 IDG75H2 7 IDG75LA4 24 IDG75SA4 IDG2 IDGH2 IDGLA4 3 IDGSA4 1 Rated conditions: Inlet air pressure.7 Pa, Inlet air temperature C <Type V> A regulator combined with the type Standard dew point: 2 C Standard dew point: 15 C Standard dew point: 4 C Standard dew point: 6 C Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] Outlet air flow rate [L/min [ANR]] IDG3V4 IDG3HV4 IDG5V4 IDG5HV4 IDG1V4 IDG2V4 IDG3AV4 2 3 IDG1HV4 IDG2HV4 IDG3HAV4 2 3 IDG3LAV4 75 Page 15 Page 16 IDGAV4 IDGHAV4 IDGLAV4 11 IDG6V4 6 IDG6HV4 6 IDG6LAV4 17 IDG6SAV4 IDG75V4 7 IDG75HV4 7 IDG75LAV4 24 IDG75SAV4 IDGV4 IDGHV4 IDGLAV4 Rated conditions: Inlet air pressure.7 Pa, Inlet air temperature C 3 IDGSAV4 1 ade to Order -X16 Specifications With element service indicator -X17 With micro mist separator regulator -X32 With differential pressure gauge Features 4

embrane Air Dryer IDGA Standard dew point 2 C, 15 C, 4 C, 6 C IDGA RoHS How to Order IDGA IDG 3 A 3 Size 3 6 75 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate [L/min [ANR]] dew point [ C] 3 6 75 H 2 15 3 3 Select from IDG (page 2) L S 4 6 75 11 17 24 3 1 Thread type Type Rc N NPT F G Semi-standard Specifications None (Standard) P With fitting for air discharge R Flow direction (Right Left) Note) In the case of more than one symbol, indicate them alphabetically. Accessory Specifications None (Standard) B With bracket Note) When symbol: B is indicated, a bracket assembly with a part number shown to the left below is included as an accessory. Bracket Assembly (Accessory)/Part No. Part no. Applicable model B64 IDG3A, IDGA B65 IDG6A, IDG75A, IDGA With hexagon socket head cap screws (2 pcs.) and spring washers (2 pcs.) 2 3 4 Port size 1/4 3/8 1/2 3 Size 6 75 1

embrane Air Dryer IDG How to Order IDG 1 2 RoHS Size 1 3 5 1 2 6 75 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate [L/min [ANR]] dew point [ C] 1 3 5 1 2 6 75 H 2 15 1 2 2 6 6 7 7 L 4 Select from S 6 IDGA (page 1) Bracket Assembly (Accessory)/Part No. Part no. Applicable model B59 IDG3, 5 B61 IDG1 B63 IDG2 B65 IDG6, 75, With hexagon socket head cap screws (2 pcs.) and spring washers (2 pcs.) Thread type/one-touch fitting Type Rc N NPT F G C Note) ø6 One-touch fitting Note) Size 1 only P R S /Applicable tubing O.D. 1 2 3 4 6 Accessory Specifications None (Standard) B With bracket (Except IDG1) Note) When symbol: B is indicated, a bracket assembly with a part number shown to the left below is included as an accessory. Port size 1/8 1/4 3/8 1/2 ø6 Specifications Piping type Size Thread One-touch fitting None (Standard) With fitting for air discharge Flow direction (Right Left) With dew point indicator 1 3 5 1 2 6 75 Semi-standard Size 1 3 5 1 2 6 75 Standard equipment Note) In the case of more than one symbol, indicate them alphabetically. Specific Product Precautions ade to Order odel Selection Unit Type V 2

IDGA IDGA/IDG Standard Specifications/ (Standard dew point 2 C, 15 C) Standard dew point 2 C Range of operating conditions Standard performance odel Fluid Inlet air pressure [Pa] Inlet air temperature [ C] Note 1) Ambient temperature [ C] Note 1) Outlet air atmospheric pressure dew point [ C] Note 2) Outlet air flow rate [L/min [ANR]] Purge air flow rate [L/min [ANR]] Note 3) Inlet air pressure [Pa] Inlet air temperature [ C] Inlet air saturation temperature [ C] Ambient temperature [ C] Dew point indicator air flow rate Applicable tubing O.D. Standard performance conditions Weight [kg] (With bracket) 1/4.11 IDG1 IDG3 IDG5 IDG1 IDG2 IDG3A IDGA IDG6 IDG75 Compressed air.3 to.85.3 to 1. 5 to 55 5 to 5 to 55 5 to 12.5 1 2.5 31 6 62 12 1 2 2 2.7 1 L/min [ANR] (Inlet air pressure at.7 Pa) 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2 ø6.5. (.31) Note 1) When using the product in the temperature range between 5 C and 5 C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 Pa) for the dew point indicator (except IDG1, 3, 5)..43 (.51).66 (.76) 36 3 6.78 (.91) 586 86.81 (.94) 7 6 1 1. (1.65) 9 7 1 1. (1.65) IDG 119 19 1.55 (1.7) Standard dew point 15 C/Type H Range of operating conditions Standard performance Standard performance conditions odel IDG3H IDG5H IDG1H IDG2H IDG3HA IDGHA IDG6H IDG75H IDGH Fluid Compressed air Inlet air pressure [Pa].3 to.85.3 to 1. Inlet air temperature [ C] Note 1) 5 to 55 5 to Ambient temperature [ C] Note 1) 5 to 55 5 to Outlet air atmospheric pressure dew point [ C] 15 Note 2) Outlet air flow rate [L/min [ANR]] Purge air flow rate [L/min [ANR]] Note 3) Inlet air pressure [Pa] Inlet air temperature [ C] Inlet air saturation temperature [ C] Ambient temperature [ C] Dew point indicator air flow rate Weight [kg] (With bracket) 28 3 56 6 111 11 222 2 22 329 3 5 665 6 65 29.7 1 L/min [ANR] (Inlet air pressure at.7 Pa) 83 7 8 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2..43.66.78.81 1. 1. (.31) (.51) (.76) (.91) (.94) (1.65) (1.65) Note 1) When using the product in the temperature range between 5 C and 5 C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 Pa) for the dew point indicator (except IDG3H, 5H). 111 11 1.55 (1.7) 3

embrane Air Dryer IDGA IDGA/IDG Standard Specifications/ (Standard dew point 4 C, 6 C) Standard dew point 4 C/Type L Range of operating conditions Standard performance odel IDG3LA IDGLA IDG6LA IDG75LA IDGLA Fluid Compressed air Inlet air pressure [Pa].3 to 1. Inlet air temperature [ C] Note 1) 5 to Ambient temperature [ C] Note 1) 5 to Outlet air atmospheric pressure dew point [ C] 4 Note 2) Outlet air flow rate [L/min [ANR]] Purge air flow rate [L/min [ANR]] Note 3) Inlet air pressure [Pa] Inlet air temperature [ C] Inlet air saturation temperature [ C] Ambient temperature [ C] Dew point indicator air flow rate Weight [kg] (With bracket) Standard performance conditions 93 75 18.78 (.91) 135 11 224 17 54.7 38 24 68 1 L/min [ANR] (Inlet air pressure at.7 Pa) 1/4, 3/8 3/8, 1/2.81 1.56 1.69 (.94) (1.71) (1.84) Note 1) When using the product in the temperature range between 5 C and 5 C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 Pa) for the dew point indicator. Standard dew point 6 C/Type S Range of operating conditions Standard performance Standard performance conditions odel IDG6SA IDG75SA IDGSA Fluid Inlet air pressure [Pa] Inlet air temperature [ C] Note 1) Ambient temperature [ C] Note 1) Compressed air.3 to 1. 5 to 5 to Outlet air atmospheric pressure dew point [ C] 6 Note 2) Outlet air flow rate [L/min [ANR]] Purge air flow rate [L/min [ANR]] Note 3) Inlet air pressure [Pa] Inlet air temperature [ C] Inlet air saturation temperature [ C] Ambient temperature [ C] Dew point indicator air flow rate Weight [kg] (With bracket) 75 14 23 1 8 4.7 1 L/min [ANR] (Inlet air pressure at.7 Pa) 3/8, 1/2 1.56 (1.71) 1.69 (1.84) 1.82 (1.97) Note 1) When using the product in the temperature range between 5 C and 5 C, prevent water droplets from entering the inlet port. (No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 3) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 Pa) for the dew point indicator. 4 3 1.82 (1.97) V Specific Product Precautions ade to Order odel Selection Unit Type 4

IDGA IDGA/IDG Performance Chart Conditions: Inlet air temperature C (saturated air), Ambient temperature C, P1: Inlet air pressure, Tube for air discharge (semi-standard: P): None Note: Correcting outlet air flow rate is required depending on inlet air temperature. Refer to page 31 or after for details. For model with fitting for air discharge (semi-standard: P), the outlet air atmospheric pressure dew point may become higher depending on the tube length for air discharge. For other models, when the tube length is 5 meters or less, a rise of the outlet air atmospheric pressure dew point will be 1 C or less. Standard dew point 2 C [: ], 15 C [: H] IDG1 IDG3, IDG3H Outlet air atmospheric pressure dew point [ C] 1 2 3 IDG1 4 4 8 12 16 Outlet air flow rate [L/min [ANR]] Outlet air atmospheric pressure dew point [ C] 1 2 IDG3 3 IDG3H 4 1 2 3 4 Outlet air flow rate [L/min [ANR]] IDG5, IDG5H IDG1, IDG1H Outlet air atmospheric pressure dew point [ C] 1 2 IDG5 3 IDG5H 4 2 4 6 8 Outlet air flow rate [L/min [ANR]] Outlet air atmospheric pressure dew point [ C] 1 2 IDG1 3 IDG1H 4 4 8 12 16 Outlet air flow rate [L/min [ANR]] IDG2, IDG2H IDG3A, IDG3HA Outlet air atmospheric pressure dew point [ C] 1 2 IDG2 3 IDG2H 4 2 3 Outlet air flow rate [L/min [ANR]] Outlet air atmospheric pressure dew point [ C] 1 2 3 4 IDG3A IDG3HA 2 3 4 Outlet air flow rate [L/min [ANR]] IDGA, IDGHA IDG6, IDG6H Outlet air atmospheric pressure dew point [ C] 1 2 3 IDGA 4 IDGHA 2 4 6 8 Outlet air flow rate [L/min [ANR]] Outlet air atmospheric pressure dew point [ C] 1 2 IDG6 3 IDG6H 4 2 4 6 8 Outlet air flow rate [L/min [ANR]] 5

embrane Air Dryer IDGA IDGA/IDG Performance Chart IDG75, IDG75H Outlet air atmospheric pressure dew point [ C] IDG3LA, IDGLA Outlet air atmospheric pressure dew point [ C] 1 2 3 4 2 4 6 8 1 2 3 4 Outlet air flow rate [L/min [ANR]] IDGLA 6 IDG3LA 7 4 8 12 16 IDG75LA, IDG75SA Outlet air atmospheric pressure dew point [ C] 1 2 3 4 6 Outlet air flow rate [L/min [ANR]] IDG, IDGH Outlet air atmospheric pressure dew point [ C] 1 2 3 4 4 8 12 16 IDG6LA, IDG6SA Outlet air atmospheric pressure dew point [ C] 1 2 3 4 6 Outlet air flow rate [L/min [ANR]] 7 4 8 12 16 2 24 IDGLA, IDGSA Outlet air atmospheric pressure dew point [ C] 1 2 3 4 Outlet air flow rate [L/min [ANR]] P1 P1 =.3 Pa =.3 Pa IDG75SA IDG75H IDG75 7 2 3 Outlet air flow rate [L/min [ANR]] Standard dew point 4 C [: L], 6 C [: S] How to read the Performance Chart and select the model IDG75LA Solid lines and dashed lines beginning at the top indicate the performance of inlet air temperature at C and inlet air pressure,.5 Pa,.7 Pa respectively. For the inlet air temperature at C and outlet air flow rate at 45 (L/min) odel q: The outlet air atmospheric pressure dew point at : ( C). For the inlet air temperature at 45 C and outlet air flow rate at 45 (L/min) Example) Outlet air flow rate correction factor:.75 (The correction factor differs depending on the model. Refer to page 31 or after for details.) Corrected outlet air flow rate: 45.75 = 6 (L/min). odel q: Performing corresponding to the outlet air atmospheric pressure dew point 2 ( C) at. Outlet air atmospheric pressure dew point [ C] 1 15 2 3 4 odel w: IDG6SA IDGSA IDGH IDG 6 IDGLA 7 2 3 4 Outlet air flow rate [L/min [ANR]] odel q: 45 6 Outlet air flow rate [L/min] IDG6LA odel w: odel q: 6 V Specific Product Precautions ade to Order odel Selection Unit Type

IDGA IDGA/IDG /Flow-rate Characteristics Standard dew point 2 C [: ], 15 C [: H] IDG1 IDG3, IDG3H Conditions: Inlet air temperature C, P1: Inlet air pressure.4.4 Pressure drop [Pa].3.2.1 Pressure drop [Pa].3.2.1.. 4 8 12 16 1 2 3 4 IDG5, IDG5H IDG1, IDG1H Pressure drop [Pa].4.3.2.1 Pressure drop [Pa].6.4.2. 2 4 6 8 IDG2, IDG2H. 4 8 12 16 IDG3A, IDG3HA.8.3 Pressure drop [Pa].6.4.2 Pressure drop [Pa].2.1.. 2 3 2 3 4 IDGA, IDGHA.8 IDG6A, IDG6HA.6.5 Pressure drop [Pa].6.4.2 Pressure drop [Pa].4.3.2.1. 2 4 6 8. 2 4 6 8 7

embrane Air Dryer IDGA IDGA/IDG /Flow-rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure Standard dew point 2 C [: ], 15 C [: H] IDG75, IDG75H Pressure drop [Pa] Pressure drop [Pa] Pressure drop [Pa] Pressure drop [Pa].8.6.4.2. 2 4 6 8 12.1.8.6.4.2.. 2 3 2 3 4.3.2.1. 2 3 4 Standard dew point 4 C [: L], 6 C [: S] IDG3LA.3.2.1 2 3 4 IDG6LA, IDG6SA IDGLA, IDGSA IDG, IDGH Pressure drop [Pa] Pressure drop [Pa] Pressure drop [Pa].1.8.6.4.2. 4 8 12 16 IDGLA.6.4.2.2.16.12.8.4.8 2 4 6 8 IDG75LA, IDG75SA Tube length m 1 m 3 m 5 m IDG3A 2 19 17 16 IDG3LA 4 39 38 With fitting for air discharge (Semi-standard: P) As the tube length for air discharge becomes longer, the outlet air atmospheric pressure dew point becomes higher. Refer to the table below. Conditions Inlet air temperature : C (Saturated) Ambient temperature : C Inlet air pressure :.7 Pa Outlet air flow rate : Flow gained under conditions of the standard performance. (Refer to pages 3 and 4.) Tube size : O.D. ø12 x I.D. ø9 8 V Specific Product Precautions ade to Order odel Selection Unit Type

IDGA IDGA/IDG Purge Air Flow-rate Characteristics IDG1, 3, 5, 1, 2 (Standard dew point 2 C) IDG3H, 5H, 1H, 2H (Standard dew point 15 C) IDG3A, A (Standard dew point 2 C) IDG3HA, HA (Standard dew point 15 C) IDG3LA, LA (Standard dew point 4 C) 1 6 IDG2 IDGA Purge air flow rate [L/min] 4 3 2 IDG1 IDG2H Purge air flow rate [L/min] 75 IDG3A IDG3HA 1 IDG5 IDG1H IDG3, IDG5H IDG3H IDG1.5 1. Inlet air pressure [Pa] IDGHA IDG3LA IDGLA.5 1. Inlet air pressure [Pa] IDG6, 75, (Standard dew point 2 C) IDG6H, 75H, H (Standard dew point 15 C) IDG6LA, 75LA, LA (Standard dew point 4 C) IDG6SA, 75SA, SA (Standard dew point 6 C) 1 28 IDG IDGLA 24 IDGSA Purge air flow rate [L/min] 2 16 12 8 IDG75 IDG6 IDGH IDG75H IDG6H Purge air flow rate [L/min] IDG6LA IDG75LA IDG75SA 4 IDG6SA.5 1..5 1. Inlet air pressure [Pa] Inlet air pressure [Pa] 9

embrane Air Dryer IDG첸A IIDG 첸A/IDG Construction q e t IDG1 w dehumidification V Unit Type Semi-standard With fitting for air discharge (Semi-standard: P) IDG1, 2 IDG1H, 2H Semi-standard t plug With fitting for air discharge (Semi-standard: P) o t q! q plug Purge air for dehumidification With fitting for air discharge (Semi-standard: P) Semi-standard y i ade to Order IDG3, 5 IDG3H, 5H odel Selection dehumidification plug i dehumidification r dehumidification Component Parts No. Description aterial IDG1 IDG3, 3H IDG5, 5H Note IDG1, 1H IDG2, 2H 1 Body Brass Aluminium alloy Platinum silver coated (IDG1 is electroless nickel plated.) 2 Female connector Brass Electroless nickel plated 3 Strainer Brass 4 Case 5 Orifice 6 Silencer Resin Resin Stainless steel Bronze Replacement Parts No. 8 Description embrane module kit Part no. IDG1 9 Dew point indicator kit 1 IDG3 IDG3H IDG5 IDG5H IDG1 IDG1H IDG2 IDG2H IDG-EL3 IDG-EL3H IDG-EL5 IDG-EL5H IDG-EL1 IDG-EL1H IDG-EL2 IDG-EL2H With Orifice (1 pc.), O-ring (3 pcs.), Gasket (1 pc.) With Orifice (1 pc.), Silencer (1 pc.), O-ring (4 pcs.) IDG-DP1 (Semi-standard: S) IDG-DP1 With O-ring (1 pc.) IDG-DP1-X1 (Semi-standard: PS) IDG-DP1-X1 (Semi-standard: P) With O-ring (1 pc.) 1 Specific Product Precautions dehumidification

IDG첸A IIDG 첸A/IDG Construction IDG3첸A IDG첸A o q e Semi-standard With fitting for air discharge (Semi-standard: P) r w i dehumidification dehumidification y o q IDG6첸, 75첸, 첸 IDG6첸A, 75첸A, 첸A e t Semi-standard With fitting for air discharge (Semi-standard: P)! r w i dehumidification dehumidification Component Parts No. Description 1 Body 2 3 4 5 6 Case Orifice Holder Silencer Adapter aterial IDG3첸A IDG3첸A IDG첸A IDG첸A IDG6, IDG6, 6H 6H IDG6LA, IDG6LA, 6SA 6SA IDG75, IDG75, 75H 75H IDG75LA, IDG75LA, 75SA 75SA IDG, IDG, H H IDGLA, IDGLA, SA SA Platinum silver coated Aluminium alloy/white Aluminium alloy Resin Resin + Bronze Stainless steel Stainless steel Aluminium alloy Resin Resin + Bronze Resin Note Resin + Bronze Resin Replacement Parts No. Description 8 embrane module kit 9 Dew point indicator kit 1 11 Part no. IDG3첸A IDG첸A IDG-ELA IDG-EL3A With Nozzle (1 pc.), Adapter (1 pc.), O-ring (1 pc.) IDG6, 6H IDG6LA, 6SA IDG75, 75H IDG75LA, 75SA IDG, H IDGLA, SA IDG-EL6 IDG-EL6LA IDG-EL75 IDG-EL75LA With O-ring (1 pc.) IDG-DP1 IDG-DP1-X1 (Semi-standard: P) IDG-EL IDG-ELLA

embrane Air Dryer IDGA IDGA/IDG Dimensions/ IDG1 : 1/4 Hexagon width across flats 19 (67) (46) (293) dehumidification ø8 Hexagon width across flats 17 (26) With fitting for air discharge (Semi-standard: P) : 1/4 (33) (23) (67) Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø6 (NPT thread: ø1/4") (86) dehumidification Hexagon width across flats 14 Hexagon width across flats 17 IDG1-C6: With One-touch fitting Applicable tubing O.D.: ø6 IDG3, 5 IDG3H, 5H 17 11 dehumidification L 73 38 dew point indicator IDG1, 2 IDG1H, 2H C () 41 (28) Purge air discharge port 12 6 Bracket (Accessory: B) (aintenance space mm or more) 2.3 23 118 14 Bracket (Accessory: B) ø8 Applicable tubing O.D.: ø6 16 22 2.3 : 1/8, 1/4 14 4 3 A E dew point indicator With fitting for air discharge (Semi-standard: P) (23) () Dew point indicator (Semi-standard: S) 14 7 Purge air discharge port Applicable tubing O.D.: ø6 Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" With fitting for air discharge (Semi-standard: P) Purge air discharge tubing port for dehumidification Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" (92) (F) With fitting for air discharge (Semi-standard: P) (G) Specific Product Precautions ade to Order odel Selection Unit Type V dehumidification dehumidification D B Purge air discharge tubing port for dehumidification Applicable tubing O.D. Rc thread and G thread: øh NPT thread: øj" (aintenance space mm or more) odel IDG1, 1H IDG2, 2H L 1/4, 3/8 A B C D E 83 187 53 165 113 212 54 19 62 82 Semi-standard: P F G H 114 2 8 14 [139] 2 1 J 5/16 3/8 Values inside [ ] are for NPT thread. 12

IDGA IDGA/IDG Dimensions/ IDG3A IDGA With fitting for air discharge (Semi-standard: P) L 7 2.3 26 18 7 14 7 dew 24 point indicator 17 Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" 1/4, 3/8 Bracket (Accessory: B) (G) 8 (D) (B) (H) dehumidification IDG6, 75, IDG6A, 75A, A L 91 2.3 (aintenance space mm or more) 26 Bracket (Accessory: B) 18 7 14 97 82 6 dew point indicator 17 Purge air discharge tubing port for dehumidification Applicable tubing O.D. Rc thread and G thread: ø12 NPT thread: ø1/2" Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" With fitting for air discharge (Semi-standard: P) 3/8,1/2 (D) (B) (H) (G) dehumidification (aintenance space mm or more) Purge air discharge tubing port for dehumidification odel IDG3A IDGA IDG6 IDG75, IDG6A IDG75A IDGA L 1/4, 3/8 3/8, 1/2 1/2 3/8, 1/2 B 291 33 352 348 418 483 D 269 38 33 326 396 461 Semi-standard: P G H 362 32 41 341 429 427 496 561 369 367 436 1 Applicable tubing O.D. Rc thread and G thread: ø19 NPT thread: ø3/4" 13

Specific Product Precautions ade to Order odel Selection Unit Type V 14

Type, Type V embrane Air Dryer Unit Type IDGA IDGA RoHS How to Order IDGA IDG 3 H A 4 3 Size 3 6 75 Standard dew point temperature/outlet air flow rate Standard dew Flow rate by size, Outlet air flow rate [L/min [ANR]] point [ C] 3 6 75 2 3 H 15 3 Select from IDG L 4 75 11 17 24 3 S 6 1 Semi-standard P R ade to Order Refer to pages 33 to 44 for details. Specifications Note None (Standard) Combination with drain discharge method symbol: With fitting for is not available. air discharge Combination with Type V is not available. Note) Flow direction (Right Left) In the case of more than one symbol, indicate them alphabetically. Note) Type V is not applicable because it is equipped with a relief type regulator. V ist separator Components icro mist separator embrane air dryer Regulator Equipment connection Components Contents 4 odular V conection Thread type Type Rc N NPT F G 2 3 4 Drain discharge method C D Drain discharge method anual valve N.C. auto-drain N.O. auto-drain Note Combination with semi-standard symbol: P is not available. Auto-drains listed on page 17 are attached. J Drain guide For model selection of an auto-drain, refer to the Selection Precautions on page 45. Port size 1/4 3/8 1/2 3 Size 6 75 15

embrane Air Dryer Unit Type IDG How to Order IDG 1 H 4 2 RoHS 4 2 V V Size 3 5 1 2 6 75 3 5 1 2 6 75 Contents odular connection Nipple connection 3 Size 3 5 1 2 6 75 Standard dew point temperature/outlet air flow rate Standard dew Flow rate by size, Outlet air flow rate [L/min [ANR]] point [ C] 3 5 1 2 6 75 2 2 6 7 H 15 2 6 7 Components ist separator icro mist separator icro mist separator with pre-filter Components embrane air dryer Some parts of the connected contents are exceptions. Check the equipment composition (described later) or the external dimension drawing for details of the connection method and the contents of the equipmentent. Regulator Equipment connection Size 5 1 2 6 75 Thread type Type Rc N NPT F G Drain discharge method (ist separator, icro mist separator, icro mist separator with pre-filter) Drain discharge Size method 3 5 1 2 6 75 anual valve 1 2 3 4 C D J Semi-standard Port size 1/8 1/4 3/8 1/2 N.C. auto-drain N.O. auto-drain Drain guide 3 Standard Note 2) With fitting for air discharge 5 1 Size 2 6 75 ade to Order Refer to pages 33 to 44 for details. Size Specifications Note 3 5 P R Flow direction (Right Left) With dew point S Standard equipment indicator Note 3) In the case of more than one symbol, indicate them alphabetically. Note 1) Type V is not applicable because it is equipped with a relief type regulator. (: P is used when it is undesirable for the air to be discharged into the main body of the IDG. Therefore, it is not possible to use it in combination with a separator with manual valve, which discharges air around it, or Type V with a relief type regulator.) Note 2) They are not applicable in case the thread symbol is N or F when the size is 3, 5, 1, 2. (Because barrel nipples are used for equipment connections.) Note 3) Select the option when the size is 3 or 5. The option is the standard equipment for other sizes. For model selection of an auto-drain, refer to the Selection Precautions on page 45. 1 2 6 75 Combination with drain discharge method symbol: is not available. Combination with Type V is not available. Note 1) Note Combination with semi-standard symbol: P is not available. Auto-drains listed on page 17 are attached. Specific Product Precautions ade to Order odel Selection Unit Type V 16

IDGA IDGA/IDG Auto-drain, Bowl Assembly, Pressure Gauge/Part No. Description Float type N.C. auto-drain N.O. Pressure gauge (Type V only) IDG34 IDG3H4 IDG3V4 IDG3HV4 AD27-C-A IDG54 IDG5V4 IDG5H4 IDG5HV4 IDG14 IDG1H4 IDG1V4 IDG1HV4 IDG24 IDG2V4 AD37-A AD38-A GC3-1AS IDG2H4 IDG2HV4 IDG3A4 IDG3HA4 IDG3AV4 IDG3HAV4 AD47-A AD48-A IDGA4 IDGAV4 IDGHA4 IDGHAV4 Description Bowl assembly (N.O.) Pressure gauge (Type V only) IDG62 IDG6V4 IDG6H2 IDG6HV4 AH-CA3C-D IDG752 IDG75V4 GC3-1AS IDG75H2 IDG75HV4 IDG2 IDGV4 AH-CA4C-D IDGH2 IDGHV4 Description Float type N.C. auto-drain N.O. Pressure gauge (Type V only) IDG3LA4 IDG3LAV4 IDGLA4 IDGLAV4 IDG6LA4 IDG6LAV4 IDG6SA4 IDG6SAV4 AD47-A AD48-A GC3-1AS IDG75LA4 IDG75LAV4 IDG75SA4 IDG75SAV4 IDGLA4 IDGLAV4 IDGSA4 IDGSAV4 Replacement Parts (Element for mist separator, micro mist separator, micro mist separator with pre-filter) Description AF2-A AFD2-A AF3-A AFD3-A AF4-A AFD4-A AH3C Element assembly AF2P-6AS AFD2P-6AS AF3P-6AS AFD3P-6AS AF4P-6AS AFD4P-6AS AH-EL3 AH4C AH-EL4 Type Type V (Type ) (Type V) ist separator icro mist separator embrane air dryer IDG6 to 2 IDG6H to H2 ist separator icro mist separator embrane Regulator air dryer IDG6 to V4 IDG6H to HV4 icro mist separator with pre-filter embrane air dryer icro mist separator with pre-filter embrane air dryer Regulator 17

embrane Air Dryer Unit Type IDGA IDGA/IDG Clogging Indication When the differential air is.5 Pa or less (The tip of the indicator is just visible.) When the differential air is.1 Pa or more (The indicator is completely up to the top.) Replace the element when the element service indicator s red indication reaches completely to the top. The top of the indication window shows differential pressure of approximately.1 Pa. Replace the element after two years of use, even if the element service indicator s red indication does not reach the top. The element service indicator is shipped mounted to the micro mist separator with pre-filter, and cannot be retrofitted or used individually. Specific Product Precautions ade to Order odel Selection Unit Type V 18

IDGA IDGA/IDG Standard Specifications/Unit [Type, Type V] (Standard dew point: 2 C, 15 C) Components odel ist separator icro mist separator icro mist separator with pre-filter Regulator (Type V only) Note 1) Spacer Fluid Inlet air pressure [Pa] Inlet air temperature [ C] Ambient temperature [ C] Outlet air atmospheric pressure dew point [ C] Inlet air flow rate [L/min [ANR]] Note 5) Outlet air flow rate [L/min [ANR]] Purge air flow rate [L/min [ANR]] Note 6) Inlet air pressure [Pa] Inlet air temperature [ C] Inlet air saturation temperature [ C] Ambient temperature [ C] Dew point indicator air flow rate Regulator construction (Type V only) Range of operating conditions Standard performance Standard performance conditions Weight [kg] Type Type V IDG34 IDG54 IDG3V4 IDG5V4 AF2-A AFD2-A AR2-B Note 2) Y2T-A Y2-A (Type V only) 31 6 1/8, 1/4.6.9.3 to.85 5 to 55 Note 3) 5 to 55 Note 3) 62 12 Standard dew point: 2 C IDG14 IDG24 IDG3A4 IDGA4 IDG1V4 IDG2V4 IDG3AV4 IDGAV4 AF3-A AF4-A AFD3-A AFD4-A AR-B Note 2) Y3T-A Y3-A (Type V only) 1 1. 1.3 2 2 Y4T-A Y4-A (Type V only) Compressed air 2 36 3 6 586 86.7 1 L/min [ANR] (Inlet air pressure at.7 Pa) Relief type IDG62 IDG6V4 AH3C AR4-B Note 2).3 to 1. 72 6 12 IDG752 IDG2 IDG75V4 IDGV4 AH4C Y4-A (Type V only) 5 to Note 3) 5 to 5 to Note 3) 5 to 888 7 138 1/4, 3/8 3/8, 1/2 1/2 1.3 1.5 1.8 2.4 1.9 2.5 2.7 3.1 3.2 3.7 1185 185 3.3 3.8 Components odel ist separator icro mist separator icro mist separator with pre-filter Regulator (Type V only) Note 1) Spacer Fluid Inlet air pressure [Pa] Inlet air temperature [ C] Ambient temperature [ C] Outlet air atmospheric pressure dew point [ C] Inlet air flow rate [L/min [ANR]] Note 5) Outlet air flow rate [L/min [ANR]] Purge air flow rate [L/min [ANR]] Note 6) Inlet air pressure [Pa] Inlet air temperature [ C] Inlet air saturation temperature [ C] Ambient temperature [ C] Dew point indicator air flow rate Regulator construction (Type V only) Range of operating conditions Standard performance Standard performance conditions 19 Weight [kg] Type Type V IDG3H4 IDG3HV4 28 3 AF2-A AFD2-A 1/8, 1/4.6.9 IDG5H4 IDG5HV4 AR2-B Note 2) Y2T-A Y2-A (Type V only).3 to.85 5 to 55 Note 3) 5 to 55 Note 3) 56 6 IDG1H4 IDG1HV4 111 11 1. 1.3 AF3-A AFD3-A Standard dew point: 15 C IDG3HA4 IDGHA4 IDG3HAV4 IDGHAV4 AF4-A AFD4-A IDG2H4 IDG2HV4 AR-B Note 2) Y3T-A Y3-A (Type V only) 222 2 22 Y4T-A Y4-A (Type V only) Compressed air 5 to Note 3) 5 to Note 3) 15 329 3 29 5.7 1 L/min [ANR] (Inlet air pressure at.7 Pa) Relief type IDG6H2 IDG6HV4 AH3C AR4-B Note 2).3 to 1. 665 6 65 IDG75H2 IDG75HV4 AH4C Y4-A (Type V only) 5 to 5 to 818 7 1/4, 3/8 3/8, 1/2 1/2 1.3 1.8 1.9 2.7 3.2 1.5 2.4 2.5 3.1 3.7 68 IDGH2 IDGHV4 1 3.3 3.8

embrane Air Dryer Unit Type IDGA IDGA/IDG Standard Specifications/Unit [Type, Type V] (Standard dew point: 4 C, 6 C) Standard Range of operating performance conditions Components odel ist separator icro mist separator Regulator (Type V only) Note 1) Spacer Fluid Inlet air pressure [Pa] Inlet air temperature [ C] Ambient temperature [ C] Outlet air atmospheric pressure dew point [ C] Inlet air flow rate [L/min [ANR]] Note 5) Outlet air flow rate [L/min [ANR]] Purge air flow rate [L/min [ANR]] Note 6) Inlet air pressure [Pa] Inlet air temperature [ C] Inlet air saturation temperature [ C] Ambient temperature [ C] Dew point indicator air flow rate Regulator construction (Type V only) Standard performance conditions Weight [kg] Type Type V IDG3LA4 IDG3LAV4 93 75 18 1.8 2.4 IDGLA4 IDGLAV4 135 11 Standard dew point: 4 C IDG6LA4 IDG6LAV4 AF4-A AFD4-A AR4-B Note 2) Y4T-A Y4-A (Type V only) Compressed air.3 to 1. 5 to Note 3) 5 to Note 3) 4 Note 4) 224 17 54 IDG75LA4 IDG75LAV4 38 24.7 1 L/min [ANR] (Inlet air pressure at.7 Pa) Relief type 1/4, 3/8 3/8, 1/2 1.9 2.6 2.8 2.5 3.1 3.3 68 IDGLA4 IDGLAV4 Note 1) For flow-rate characteristics and pressure characteristics of regulator, refer to the Best Pneumatics No. 5. Note 2) It will come with Option E (With square-shaped, embedded type of a pressure regulator). Refer to our website www.smc.eu for details of regulators such as set pressure range etc. Note 3) No freezing Note 4) Refer to the Piping Precautions (Piping material for low dew point air) on page 46. Note 5) ANR indicates the flow rate converted to the value at 2 C, under the atmospheric pressure and the state of relative humidity 65%. Note 6) Includes 1 L/min [ANR] of air flow (Inlet air pressure at.7 Pa) for the dew point indicator. Note 7) When highly purified air is required, refer to the Design 3. on page 45. 4 3 2.9 3.4 IDG6SA4 IDG6SAV4 75 Standard dew point: 6 C IDG75SA4 IDG75SAV4 AF4-A AFD4-A AR4-B Note 2) Y4T-A Y4-A (Type V only) Compressed air.3 to 1. 5 to Note 3) 5 to Note 3) 6 Note 4) 14 4 IDGSA4 IDGSAV4 23 1 8.7 1 L/min [ANR] (Inlet air pressure at.7 Pa) Relief type 2.6 3.1 3/8, 1/2 2.8 3.3 2.9 3.4 V Specific Product Precautions ade to Order odel Selection Unit Type 2

IDGA IDGA/IDG Unit Type/Flow-rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure Standard dew point 2 C [: ], 15 C [: H] IDG34, 3V4 IDG3H4, 3HV4 Pressure drop [Pa] 1 2 3 4 IDG14, 1V4 IDG1H4, 1HV4 Pressure drop [Pa].12.1 P1.8 =.3 Pa.6.4.2.12.1.8.6.4.2 4 8 12 16 IDG3A4, IDG3HAV4 Pressure drop [Pa].8.6.4 Element saturated state (AF, AFD) Element saturated state (AF, AFD) Element saturated state (AF, AFD) Element initial state (AF, AFD) Element initial state (AF, AFD) Element initial state (AF, AFD).2 2 3 4 IDG54, 5V4 IDG5H4, 5HV4 Pressure drop [Pa] IDG24, 2V4 IDG2H4, 2HV4 Pressure drop [Pa].12.1.8.6.4.2 2 4 6 8.12.1.8.6.4.2 2 3 IDGA4, IDGHAV4 Pressure drop [Pa] Element saturated state (AF, AFD) Element saturated state (AF, AFD) Element initial state (AF, AFD) Element initial state (AF, AFD) Element saturated state (AF, AFD) Element initial state (AF, AFD).12.1.8.6.4.2 2 4 6 8 IDG62, 6H2 IDG6V4, 6HV4 Pressure drop [Pa] IDG752, 75H2 IDG75V4, 75HV4 Element saturated state (AH) Element initial state (AH) Element saturated state (AH) Element initial state (AH).12.12.1.1.8.8.6.6.4.4.2.2 2 4 6 8 3 6 9 12 Pressure drop [Pa] 21

embrane Air Dryer Unit Type IDGA IDGA/IDG Unit Type/Flow-rate Characteristics Conditions: Inlet air temperature C, P1: Inlet air pressure IDG2, H2 IDGV4, HV4 Pressure drop [Pa].12.1.8.6 Element saturated state (AH).4.2 4 8 12 16 IDG3LA4, IDG3LAV4 Pressure drop [Pa] IDG6LA4, 6SA4 IDG6LAV4, 6SAV4 Pressure drop [Pa] IDGLA4, SA4 IDGLAV4, SAV4 Pressure drop [Pa].8.6.4.8.6.4.2.12.1.8.6.4 Element initial state (AH) Standard dew point 4 C [: L], 6 C [: S] Element saturated state (AF, AFD).2 2 3 4 IDGLA4, IDGLAV4 IDG75LA4, 75SA4 IDG75LAV4, 75SAV4 8 16 24 2 3 Element initial state (AF, AFD).2 2 3 4 Pressure drop [Pa] Pressure drop [Pa] Element saturated state (AF, AFD) Element initial state (AF, AFD).12.1.8.6.4.2 2 4 6 8 Element saturated state (AF, AFD) Element initial state (AF, AFD) Element saturated state (AF, AFD) Element initial state (AF, AFD) Element saturated state (AF, AFD) Element initial state (AF, AFD).12.1.8.6.4.2 V Specific Product Precautions ade to Order odel Selection Unit Type 22

IDGA IDGA/IDG Dimensions/Type IDG34, 54 IDG3H4, 5H4 (54) 3 41.6 12 (159) 43.2 dew point indicator 5.5 Dew point indicator (Semi-standard: S) 24 24 9 29 9.8 11 3.5 67 136 1/8, 1/4 (14) Drain Discharge dehumidification (aintenance space mm or more) anual valve 5 x.8 Float type auto-drain N.C. type Hexagon width across flats 14 1/8 Female thread Drain guide With fitting for air discharge (Semi-standard: P) (54) Purge air discharge tubing port 3 for dew point indicator Applicable tubing O.D.: ø8 41.6 12 43.2 For port size 1/8: (24) For port size 1/4: (22) Dew point indicator (Semi-standard: S) 24 29 24 9 9.8 5.5 3.5 67 Rc1/8, 1/4 (NPT, G threads are not available.) 178 Drain Discharge Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ø8 (aintenance space mm or more) 23 5 x.8 Float type auto-drain N.C. type Hexagon width across flats 14 Rc1/8 Drain guide

embrane Air Dryer Unit Type IDGA IDGA/IDG Dimensions/Type IDG14, 24 IDG1H4, 2H4 Purge air for dehumidification Drain Discharge ø4 anual valve (With drain discharge valve) (72) 41 35 35 4 41 82 Purge air for dehumidification N.C.: Grey N.O.: Black Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" 14 1/4, 3/8 55.1 14 7 Hexagon width across flats 17 1/4 Female thread With fitting for air discharge (Semi-standard: P) (72) 41 35 35 4 Float type auto-drain N.C. type N.O. type 41 82 (B) (C) 14 Rc1/4, 3/8 (NPT, G threads are not available.) Drain guide (Without drain discharge valve) 55.1 7 14 (A) 57.2 57.2 dew point indicator (A) Dew point indicator Dew point indicator (B) (aintenance space mm or more) odel IDG14, 1H4 IDG24, 2H4 Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: ø8 A 197 227 B 192 217 V Specific Product Precautions ade to Order odel Selection Unit Type Drain Discharge N.C.: Grey N.O.: Black Applicable tubing O.D.: ø1 Float type auto-drain N.C. type N.O. type Hexagon width across flats 17 Rc1/4 Drain guide (Without drain discharge valve) Purge air discharge tubing port for dehumidification Applicable tubing O.D.: ød odel IDG14, 1H4 IDG24, 2H4 (aintenance space mm or more) 1/4 3/8 1/4 3/8 A 242 243 272 273 B 2 2 C 231 24

IDGA IDGA/IDG Dimensions/Type IDG3A4 IDGA4 IDG6A4 IDG75A4 IDGA4 (C) 4 4 48 96 5 18 L (A) 72.6 75.2 18 dew point indicator Dew point indicator 9 N.C.: Grey N.O.: Black ø4 Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" Hexagon width across flats 17 Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" (C) (A) 72.6 75.2 18 Dew point indicator (B) (B) 4 48 9 (B) Purge air for dehumidification Drain Discharge (aintenance space mm or more) anual valve (With drain discharge valve) Float type auto-drain N.C. type N.O. type 1/4 Female thread Drain guide (Without drain discharge valve) With fitting for air discharge (Semi-standard: P) IDG6LA4, 75LA4, LA4 IDG6SA4, 75SA4, SA4 4 5 96 18 L Purge air discharge tubing port for dehumidification Applicable tubing I.D. Rc thread and G thread: ø19 NPT thread: ø3/4 Purge air discharge tubing port (aintenance space mm or more) for dehumidification Applicable tubing O.D. Rc thread and G thread: ø12 NPT thread: ø1/2" Drain Discharge Purge air for dehumidification odel IDG3A4 IDGA4 IDG6LA4, 6SA4 IDG75LA4, 75SA4 IDGLA4, SA4 L 1/4, 3/8 3/8, 1/2 A 22 232 B Standard Semi-standard: P 299 362 338 41 356 427 426 496 491 561 C 88 91 N.C.: Grey N.O.: Black Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" Float type auto-drain N.C. type N.O. type Hexagon width across flats 17 1/4 Female thread Drain guide (Without drain discharge valve)

embrane Air Dryer Unit Type IDGA IDGA/IDG Dimensions/Type IDG62 IDG752 IDG2 N P Q Q ør G 37 C K D L (A) (B) dew point indicator 18 22 (aintenance space mm or more) With fitting for air discharge (Semi-standard: P) 3/8, 1/2 Purge air for dehumidification Dew point indicator Purge air discharge tubing port for dehumidification Applicable tubing I.D. Rc thread and G thread: ø19 NPT thread: ø3/4" (E) H (F) 5 female thread (428) Drain Purge air discharge tubing port for dew point indicator Applicable tubing O.D. Rc thread and G thread: ø8 NPT thread: ø5/16" (aintenance space mm or more) Drain Discharge N.O.: Black Hexagon width across flats 24 S (352) Applicable tubing O.D.: ø1 (NPT thread: ø3/8") With float type auto-drain T Thread size: 1/4 (Without valve mechanism) With drain guide Total length of the separator Specific Product Precautions ade to Order odel Selection Unit Type V odel IDG62 IDG752 IDG2 3/8, 1/2 1/2 A 189 B 186 C D 7.5 8 E 367 F 244 G H K 18 127 7 L 14 95 N P 28 26 24 1.5 9 369 262 2 146 9 18 18 55 31 9 15 Q 7 R 12 With float type auto-drain With drain guide S T 5 241 276 262 26

IDGA IDGA/IDG Dimensions/Type V IDG3V4, 5V4 IDG3HV4, 5HV4 6 3 24 29 9.8 (23) 41.6 119.4 12 dew point indicator Dew point indicator (Semi-standard: S) 5.5 Drain Discharge 24 9 3.5 67 1/8, 1/4 dehumidification 136 (14) (aintenance space mm or more) anual valve 5 x.8 Float type auto-drain N.C. type Hexagon width across flats 14 1/8 Female thread Drain guide IDG1V4, 2V4 IDG1HV4, 2HV4 (72) 41 (A) 55.1 C 14 dew point indicator 7 Dew point indicator 14 35 82 35 41 1/4, 3/8 4 B dehumidification dehumidification (aintenance space mm or more) Drain Discharge ø4 N.C.: Grey N.O.: Black Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" Hexagon width across flats 17 1/4 Female thread odel IDG1V4, 1HV4 IDG2V4, 2HV4 A 5 285 B 192 217 C 144.4 174.4 anual valve (With drain discharge valve) Float type auto-drain N.C. type N.O. type Drain guide (Without drain discharge valve) 27

embrane Air Dryer Unit Type IDGA IDGA/IDG Dimensions/Type V IDG3AV4 IDGAV4 IDG6AV4 IDG75AV4 IDGAV4 (D) (A) 72.6 C 18 dew point indicator odel IDG3AV4 IDGAV4 IDG6LAV4, 6SAV4 IDG75LAV4, 75SAV4 IDGLAV4, SAV4 4 4 5 48 96 Purge air for dehumidification 18 L (aintenance space mm or more) L 1/4, 3/8 3/8, 1/2 A 296 38 B 299 338 356 426 491 C 1.4 162.4 D 88 91 9 Drain Discharge ø4 anual valve (With drain discharge valve) N.C.: Grey N.O.: Black Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" Float type auto-drain N.C. type N.O. type (B) Hexagon width across flats 17 1/4 Female thread Drain guide (Without drain discharge valve) Specific Product Precautions ade to Order odel Selection Unit Type V 28

IDGA IDGA/IDG Dimensions/Type V IDG6V4, 75V4, V4 IDG6HV4, 75HV4, HV4 N (A) J K N øp D E H (C) dew point indicator 2.3 37 G Dew point indicator 54 8 54 Rc3/8, 1/2 (NPT, G threads are not available.) (B) F L 2.3 8.5 1.5 Purge air for dehumidification (aintenance space mm or more) Drain Discharge 5 female thread anual valve N.O.: Black Applicable tubing O.D.: ø1 Float type auto-drain N.O. type Hexagon width across flats 24 1/4 Female thread Drain guide (Without drain discharge valve) odel A B C D E F G H J K L IDG6V4, 6HV4 IDG75V4, 75HV4 IDGV4, HV4 3/8 1/2 1/2 264 266 281 367 369 261 263 279 7.5 1.5 8 9 18 2 7 9 14 18 95 18 55 28 31 29

Specific Product Precautions ade to Order odel Selection Unit Type V 3

IDGA IDGA/IDG odel Selection Step 1 Check the operating conditions. Outlet air flow rate [L/min [ANR]] Outlet air atmospheric pressure dew point [ C] (When it is necessary to convert from the pressurized dew point, refer to the conversion chart for dew point temperature below.) Inlet air pressure [Pa] Inlet air temperature [ C] Allowable pressure drop ΔP [Pa] Compressed air supply capacity Q [L/min [ANR]] [Example] Outlet air flow rate 1 L/min[ANR] Outlet air atmospheric pressure dew point 15 C Inlet air pressure.5 Pa Inlet air temperature 35 C Allowable pressure drop.3 Pa Compressed air supply capacity 3 L/min [ANR] Dew Point Temperature Conversion Chart 6 Pressure dew point [ C] 4 3 2 1 1 2 1 Pa.9 Pa.7 Pa.5 Pa.3 Pa.1 Pa Atmospheric pressure 3 4 6 6 4 3 2 1 1 2 3 Atmospheric pressure dew point [ C] 31

odel Selection IDGA IDGA/IDG Step 2 Correction of the outlet air flow rate influenced by the inlet air temperature (When the inlet air temperature is C, proceed to Step 4 ) Step 3 Step 4 When the inlet air temperature is not the same temperature ( C) on the performance charts, calculate the correction factor for the outlet air flow rate from the table below to compensate the outlet air flow rate. Example: Inlet air temperature 35 C Outlet air flow rate 1 L/min [ANR] odel selection based on corrected outlet air flow rate Based on the corrected outlet air flow rate calculated by Step 2, select a model from the performance charts on pages 5 and 6. Check the air flow rate. From the table below (Inlet Air Temperature Correction Factor for Outlet Air Flow Rate), correction factors for outlet air flow rate are as follows. IDGA:.86 IDG:.4 Therefore, corrected outlet air flow rate can be determined. [ IDGA] 1.86 = 175 L/min [ANR] [ IDG] 1.4 = 375 L/min [ANR] Inlet Air Temperature Correction Factor for Outlet Air Flow Rate Inlet air temperature [ C] IDGA IDG 1 1.35 3. 15 1.22 2.17 2 1.1 1.52 1. 1. 3.92.65 35.86.4 4.8. 45.75.19.7.14 Note) Correction factors between IDGA and IDG are different from each other, because the membrane module characteristics are different. Example: Corrected outlet air flow rate 175 L/min [ANR] [ IDGA] Corrected outlet air flow rate 375 L/min [ANR] [ IDG] Inlet air pressure.5 Pa Outlet air atmospheric pressure dew point 15 C With the conditions of the corrected outlet air flow rate and the inlet air pressure mentioned to the left, when selecting a model which satisfies the specifications that the outlet air atmospheric pressure dew point 15 C or less, [ IDGA] IDG3A, IDGHA [ IDG] IDG6 Read out from the air flow-rate characteristics on page 9. Example: Inlet air pressure.5 Pa Selected model IDG3A For the IDG3A 45 L/min [ANR] IDGHA For the IDGHA 38 L/min [ANR] IDG6 For the IDG6 94 L/min [ANR] Step 5 Calculate the inlet air flow rate Q1, and check the compressed air supply capacity. Step 6 Step 7 Inlet air flow rate Q1 [L/min [ANR]] = Outlet air flow rate [L/min [ANR]] + Purge air flow rate [L/min [ANR]] Example: Assuming that the IDG3A is chosen by Step 4 Outlet air flow rate 1 L/min [ANR] Purge air flow rate 45 L/min [ANR] Compressed air supply capacity Q 3 L/min [ANR] Step 1 NO Review the operating conditions. or Inlet air flow rate Q1 = 1 + 45 = 195 L/min [ANR] Compressed air supply capacity Q Q1 YES Step 6 Check the pressure drop ΔP1 [Pa]. Single Unit (Refer to pages 7 and 8.) Unit (Refer to pages 21 and 22.) Step 1 Step 2 NO Review the operating conditions or increase size. ΔP ΔP1 YES 3 195, therefore proceed to Step 6 Example: Selected model: IDG3A Single Unit: IDG3A Inlet air pressure.5 Pa Based on the flow-rate characteristics (page 7), Inlet air flow rate 195 L/min [ANR] ΔP1 =.6 Pa Allowable pressure drop ΔP Unit: IDG3A4.3 Pa ΔP1 =.1 Pa (Element initial state) Consider the drain discharge method (in the case of Unit), accessory and semi-standard specification. Example: For the IDG3A Accessory: With bracket Semi-standard: None For the IDG3A4 Drain discharge method: N.O. auto-drain Semi-standard: None For the IDG3A and IDG3A4 (element initial state), ΔP ΔP1, therefore proceed to Step 7 Single Unit (Refer to pages 1 and 2.) Unit (Refer to pages 15 and 16.) Refer to Selection in the Specific Product Precautions 1 on page 45. odel selected V Specific Product Precautions ade to Order odel Selection Unit Type <Single Unit> IDG3A-3B <Unit> IDG3A4-3D 32

IDGA IDGA/IDG ade to Order 1 Please contact SC for further details about dimensions, specifications and delivery. 1 With Element Service Indicator IDGA How to Order IDG 3 A 2 3 X16 Size 3 6 75 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate [L/min [ANR]] dew point [ C] 3 6 75 2 3 H 15 3 L 4 75 11 17 24 3 S 6 1 With elementent service indicator Semi-standard Specifications None (Standard) R Flow direction (Right Left) -X16 An element service indicator is mounted on the micro mist separator with pre-filter ( AH) to allow visual management of the element s clogging life. In addition, combination with a micro mist separator with pre-filter also provides a spatially compact design. Element service indicator Drain discharge method Drain discharge method anual valve C N.C. auto-drain D N.O. auto-drain Drain guide J ( 1/4 without valve) For model selection of an auto-drain, refer to the Selection Precautions on page 45. Thread type Type Rc N NPT F G 2 3 Port size 1/4 3/8 3 6 75 H L H L L L L S Components Components 3 6 75 H L H L L L L S icro mist separator with pre-filter (AH) AH2C AH1C AH3C AH1C AH2C AH2C AH2C Replacement Parts (Element for micro mist separator with pre-filter) Description AH1C AH2C AH3C Element assembly AH-EL1 AH-EL2 AH-EL3 33 Refer to page 18 for the clogging indication of the element service indicator.

ade to Order IDGA IDGA/IDG How to Order IDG 1 2 2 Replacement Parts (Element for micro mist separator with pre-filter) Description AH1C AH2C Element assembly Size 3 5 1 2 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate [L/min [ANR]] dew point [ C] 3 5 1 2 2 2 H 15 2 AH-EL1 Components AH-EL2 1 2 3 Thread type Type Rc N NPT F G Components Semi-standard Drain discharge method Drain discharge Size method 3 5 1 C J anual valve N.C. auto-drain Drain guide 1/4 ( without valve) Port size 1/8 1/4 3/8 icro mist separator with pre-filter (AH) 3 5 1 2 H H H R S 3 X16 Specifications None (Standard) Flow direction (Right Left) With dew point indicator With element service indicator 5 Size 3 5 1 2 Standard equipment For model selection of an auto-drain, refer to the Selection Precautions on page 45. Drain discharge method does not need to be selected for N.O. auto-drain type. 2 H 1 2 H H H H AH1C AH2C V Specific Product Precautions ade to Order odel Selection Unit Type Refer to page 18 for the clogging indication of the element service indicator. 34

L P P øq C D H (A) (B) dew point indicator N K F 37 (E) J (G) IDGA IDGA/IDG Dimensions IDG32, 52, 12, 22 IDG3H2, 5H2, 1H2, 2H2 (G) (aintenance space mm or more) 5 Female thread Drain IDG3A2, A2 IDG3HA2, HA2 IDG3LA2, LA2 L P P øq C D H (A) (B) dew point indicator Drain Discharge 37 J N F N.O.: Black N.C.: Grey (R) (E) K Applicable tubing O.D.: ø1 (NPT thread: ø3/8") Float type auto-drain dehumidification 5 Female thread Drain (S) Thread size: 1/4 (Without valve mechanism) Hexagon width across flats 24 (aintenance space mm or more) Drain guide Total length of the separator odel IDG32, 3H2, 52, 5H2 IDG12, 1H2 IDG22, 2H2 IDG3A2, 3HA2 IDG3LA2 IDGA2, HA2 IDGLA2 35 A B C D E 1/8 1/4 1/4 1/4 3/8 1/4, 3/8 1/4 3/8 1/4 155.5 153.5 163.5 25 26 16 1.5 175 1.5 152 1 16 23 24 158 147 172 147 7 7.5 7 56 66 56 8 56 198 212 198 244 198 F G H J K L N 1 14 1 18 1 154 198 227 32 298 345 337 12 14 12 6 7 6 89 99 89 127 89 66.5 78 69 95 69 35 4 35 35 2 24 2 28 2 P 6 7 6 Q 1 12 1 With float type auto-drain R 29 223 29 5 29 With drain guide S 195 29 195 241 195

ade to Order IDGA IDGA/IDG Dimensions IDG6LA2 IDG75LA2 IDGLA2, IDGSA2 91 26 2.3 dehumidification (aintenance space mm or more) (C) (D) 99 E 37 5 Female thread Drain Discharge Drain (G) 7 SC (F) 6 dew point indicator 14 N.C.: Grey N.O.: Black Applicable tubing O.D.: ø1 (NPT thread: ø3/8") 11 17 18 (22) (B) (A) (H) Thread size: 1/4 (Without valve mechanism) Hexagon width across flats 24 V Specific Product Precautions ade to Order odel Selection Unit Type Float type auto-drain Total length of the separator Drain guide odel A B C D E F IDG6LA2 IDG75LA2 IDGLA2, IDGSA2 348 326 359 3/8 418 396 429 212 14 17 483 461 494 With float type auto-drain With drain guide G H 223 29 36

IDGA IDGA/IDG ade to Order 2 Please contact SC for further details about dimensions, specifications and delivery. 2 With icro ist Separator Regulator ( AWD) This can be used when highly purified air is required (supply for air bearings, semiconductor parts blow, etc.). Unit Type V regulator (AR) is changed to the micro mist separator regulator (AWD). -X17 icro mist separator regulator IDGA How to Order IDG 3 A V4 3 X17 Size 3 6 75 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate [L/min [ANR]] dew point [ C] 3 6 75 2 3 H 15 3 L 4 75 11 17 24 3 S 6 1 Thread type Type Rc N NPT F G Port size With micro mist separator ator regulator Semi-standard Specifications None (Standard) R Flow direction (Right Left) Drain discharge method Drain discharge method anual valve C N.C. auto-drain D N.O. auto-drain Drain guide J ( 1/4 without valve) For model selection of an auto-drain, refer to the Selection Precautions on page 45. 3 6 75 H L H L L S L S L S 2 3 4 1/4 3/8 1/2 Components Components ist separator icro mist separator icro mist separator regulator 3 6 75 AF4-A AFD4-A AWD4 H L H L L S L S L S Replacement Parts (Element for mist separator, micro mist separator, micro mist separator regulator) Description AF4-A AFD4-A AWD4 Element assembly AF4P-6AS AFD4P-6AS AFD4P-6AS 37

ade to Order IDGA IDGA/IDG How to Order IDG 1 V4 2 Size 3 5 1 2 Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate [L/min [ANR]] dew point [ C] 3 5 1 2 2 2 H 15 2 Components Thread type Type Rc N NPT F G Semi-standard Drain discharge method Drain discharge method anual valve C N.C. auto-drain D N.O. auto-drain J Drain guide For model selection of an auto-drain, refer to the Selection Precautions on page 45. 1 2 3 Components Port size 1/8 1/4 3/8 ist separator icro mist separator icro mist separator regulator 3 5 1 2 H H H R S 3 X17 None (Standard) Flow direction (Right Left) With dew point indicator Specifications 5 With micro mist separator regulator Size 3 5 1 2 Standard equipment H 1 2 H H H H AF2-A AFD2-A AWD2 AF3-A AFD3-A AWD3 V Specific Product Precautions ade to Order odel Selection Unit Type Replacement Parts (Element for mist separator, micro mist separator, micro mist separator regulator) Description Element assembly AF2-A AF2P-6AS AF3-A AF3P-6AS AFD2-A AFD2P-6AS AFD3-A AFD3P-6AS AWD2 AFD2P-6AS AWD3 AFD3P-6AS 38

IDGA IDGA/IDG Dimensions IDG3V4, 5V4, 1V4, 2V4 IDG3HV4, 5HV4, 1HV4, 2HV4 (F) G C (A) D 14 dew point indicator 7 Dew point indicator H J H K E L (B) dehumidification dehumidification 9 (IDG3, 5 only) (aintenance space mm or more) Drain Discharge (IDG3V4, 5V4) Drain Discharge (IDG1V4, 2V4) N.C.: Grey N.O.: Black 5 x.8 1/8 Female thread Hexagon width across flats 14 ø4 Applicable tubing O.D. Rc thread or G thread: ø1 NPT thread: ø3/8" 1/4 Female thread Hexagon width across flats 17 anual valve Float type auto-drain N.C. type Drain guide (Without drain discharge valve) anual valve (With drain discharge valve) Float type auto-drain N.C. type N.O. type Drain guide (Without drain discharge valve) odel A B C D E F G H J K IDG3V4, 3HV4, 5V4, 5HV4 IDG1V4, 1HV4 IDG2V4, 2HV4 L 1/8, 1/4 1/4, 3/8 23 5 285 18 237 262 41.6 55.1 119.4 144.4 174.4 9.8 14 93 17 3 41 24 35 29 41 67 82 3.5 4 39

ade to Order IDGA IDGA/IDG Dimensions IDG3AV4, AV4 IDG3HAV4, HAV4 IDG3LAV4, LAV4, 6LAV4, 75LAV4, LAV4 IDG6SAV4, 75SAV4, SAV4 (126) A 72.6 C 18 dew point indicator Dew point indicator 9 Drain Discharge ø4 anual valve (With drain discharge valve) odel IDG3AV4 IDGAV4 IDG6LAV4, 6SAV4 IDG75LAV4, 75SAV4 IDGLAV4, SAV4 N.C.: Grey N.O.: Black 4 4 5 48 96 18 L Applicable tubing O.D. Rc thread or G thread: ø1 1/4 Female thread NPT thread: ø3/8" Hexagon width across flats 17 Float type auto-drain N.C. type N.O. type L 1/4, 3/8 3/8, 1/2 A B C 296 38 343 382 4 47 535 1.4 162.4 Drain guide (Without drain discharge valve) (B) Specific Product Precautions ade to Order odel Selection Unit Type V 4

IDGA IDGA/IDG ade to Order 3 Please contact SC for further details about dimensions, specifications and delivery. 3 With Differential Pressure Gauge The service life of the element service indicator can be controlled with differential pressure. Differential pressure gauge -X32 How to Order IDGA IDG 3 A V4 3 X32 Size 3 6 75 With differential pressure gauge Semi-standard Specifications None (Standard) R Flow direction (Right Left) Standard dew point temperature/outlet air flow rate Standard Flow rate by size, Outlet air flow rate [L/min [ANR]] dew point [ C] 3 6 75 2 3 H 15 3 L 4 75 11 17 24 3 S 6 1 Thread type Type Rc N NPT F G Port size 3 Drain discharge method Drain discharge method anual valve C N.C. auto-drain D N.O. auto-drain J Drain guide 6 75 Note Auto-drains listed on page 17 are attached. For model selection of an auto-drain, refer to the Selection Precautions on page 45. H L H L L S L S L S 2 3 4 1/4 3/8 1/2 Components Components ist separator icro mist separator Differential pressure gauge Regulator 3 6 75 AF4-A AFD4-A GD4-2-1-X29 AR4-B H L H L L S L S L S Replacement Parts (Element for mist separator, micro mist separator) Description AF4-A AFD4-A Element assembly AF4P-6AS AFD4-6AS 41