Contents. Manufacturing Inc.

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2 Contents Introduction... Exhausted Workstations... Exhaust Transitions... Workstation Terminology... Exhaust Flow Calculations... Sample Deck Layout... Options... Hand Guns, Aspirators, Vacuum Wands... Eye Wash, Glove Wash, Bottle Wash & Beaker Storage... Deck and Tank Lids, Displacement Blocks, Condensing Collars... Station Rear Access & Dilution Drain Valves... Plenum Flush & Deck Rings... Process Modules... Constant Temperature Bath... Megasonic Bath... Quick Dump Rinser... Ambient Static Bath... Ambient Filtration Bath... Static Heated Bath... Heated Filtered Bath... Ultrasonic Tanks... Heated Downflow Bath... Hot Plate... Utility Sink... Chemical Filling & Draining... Chemical Filling Process Baths... Chemical Bulk Fill Cabinets... Auto Chemical Dispense... Draining Wasted Chemicals from Process Baths in a Work Station... Neutralization Reservoirs, Carboys, Pump Carts... Waste Drum Cabinets... Chemical Bottle Handling... Appendix... Appendix A: Chemical compatibility... Appendix B: Recommended JST Baths... Appendix C: Safety & Industry Standards Organization... Appendix D: Industry Terminology... Notes Page 1

3 Introduction JST Manufacturing Inc. has been in business designing and building cleanroom equipment since We have built many tools for our competitors as well as for end users. Quality is what we focus on. Our equipment is built to last and we take pride in building safe equipment while focusing on minimizing power, water, nitrogen and chemical consumption. JST practices green principals in our manufacturing processes by recycling plastics and metals, minimizing material usage by maximizing sheet layouts and cnc cutting as well as using fiber optics for cutting that miniminzing power consumption. This catalog is intended to be a guide to understanding process and laboratory equipment as well as the steps in specifying the type of equipment you will need. We have attempted to cover most common items. If you find anything you d like us to include, please let us know and we will update the catalog. If you are not a current customer of JST s, we hope you will find the information you are looking for in this catalog and give us a chance to earn your business. For existing customers, we thank you for your patronage and look forward to continuing to service you. Sincerely, Page 2

4 Exhausted Workstations Several features are essential to the proper performance of an exhausted shell. The most important aspect of the hood is the relationship between the push of the filtered clean room air, and the pull of the exhaust design. For the hood to adequately control contaminants there should be a balanced air flow into the station with a uniform exhaust air distribution across the workstation. In properly designed and installed systems, there should be 10% variation in point to point face velocity with the face shield in the maximum open position. For a process application, the operator stands in front of the hood and manipulates the apparatus within the hood. The air flow of the clean room and the exhaust of the station work in combination to effectively remove fumes and particulate way from the both the operator and the product. The point where the operator would be located and the where the capture velocity of the station begins is called the face velocity of the station. JST s workstations are designed to pull a face velocity of 120 cfm for applications without carcinogens and 150 cfm for applications using known carcinogens. Room air currents have a large effect on the performance of the workstation. The design of the room air supply distribution system is important in securing good exhaust performance as is the face velocity of the hood. Tracer gas analysis (nitrous oxide) is used to test the exhaust at the face or opening of the station. When the system is set-up with proper exhaust there should be no gas or levels below the TLV (Threshold Limit Value) detected at the operator s face. JST s designs have been tested and approved by an independent laboratory to meet OSHA (Occupational Safety and Health Association) and SEMI (Semiconductor Equipment and Materials Institute) exhaust flow requirements through ASHRAE (American Society of Heating, Refrigeration and Air-conditioning Engineers) testing. Several of JST s workstation designs utilize cleanroom HEPA filtered air for their fresh air intake. In order to minimize the exhausted air pulled from the cleanroom, the opening of the front of the station must be minimized. JST s workstations also have the ability to interface to the facility exhaust fans for exhaust ramping to minimize the amount of airflow leaving the cleanroom when the cleanroom is not in use. Page 3

5 Exhausted Workstation Shell Descriptions Vertical Laminar Flow (VLF) Workstations JST s Vertical Laminar Flow Workstation (VLF) is a modular workstation designed for manually processing 6 or smaller wafers in a class 100 or better cleanroom. This ergonomic design allows users to load and unload product unimpeded. The unique exhaust design pulls laminar air evenly across the work surface maintaining the same clean laminar air inside the work area as in the clean room. Particles and vapor fumes from the chemistry are pulled away from the operator, through the deck and exhaust slots to the facility exhaust system. The workstation s plenum houses the process and rinse baths mounted on removable support bars. Plumbing components are located for easy access. Electrical controllers, switches and flow meters are located in a purged electrical enclosure that provides a safe, easily accessible area for servicing. Face and side shields for protection from splashes are included. Optional features for the VLF shell design includes lower bottle storage, GFCI outlets and top exhaust transitions. JST s VLF is designed to be incorporated with JST s process and rinse baths to customize a workstation to your particular application. Spinner/Hotplate (SHP) Workstations Designed for integrating photoresist spinners and baking hotplates, the Spinner/Hotplate shell is similar to the VLF design but includes a welded in deck and lower exhausted support area. This allows for easy access to Spinner components. Chemical Workstations The Chemical Workstations are designed to be used in multi-purpose applications as a laboratory work area with hazardous chemicals that must be exhausted. A chemical workstation is the simplest shell and consists of an exhausted work surface and counter balanced face shield. The counter balanced shield has a wide range of travel and provides a large opening to place parts into the station and then can be closed off (by lowering the shield) for maximum operator safety. Typical applications for this type of station are chemical mixing, bottle rinsing, glassware washing, and temporary chemical storage. Even airflow is provided across the work surface of the station. The work surface is liquid tight enabling a dry storage area below the work surface. The storage area is accessed through hinged doors from the front of the station. Sealed fluorescent lighting is located above the work area and plugs into a 110 volt outlet. Page 4

6 Exhausted Workstation Shell Descriptions (cont.) Fumehood Workstations Designed to be used for parts cleaning and soaking of parts in hazardous chemistries. This design is a Chemical Workstation with an exhausted plenum for use as secondary containment and lip exhaust on chemical tanks. There is a nitrogen purged headcasing that houses an exhaust failure and Emergency Power Off with a loadcenter. The unit comes standard with a lockout/tagout box and 220 volt, 3 phase power. Glovebox Workstation Used in cleaning applications where the operator must be separated from the cleaning chemistry and lower volume exhaust flow is used. Page 5

7 Vertical Laminar Flow Design Vertical Laminar Flow Design APPLICATIONS Wafer Processing & Cleaning Wafer Stripping Laboratory Applications Bake & Develop Stations Etching JST s Vertical Laminar Flow Workstation (VLF) is a modular workstation designed for manually processing 6 or smaller wafers in a class 100 or better cleanroom. The unique exhaust design pulls laminar air evenly across the work surface maintaining the same clean laminar air inside the work area as in the clean room. Particles and vapor fumes from the chemistry are pulled away from the operator, through the deck and exhaust slots to the facility exhaust system. The workstation s plenum houses the process and rinse baths mounted on removable support bars. Plumbing components are located for easy access. Electrical controllers, switches and flow meters are located in a purged electrical enclosure that provides a safe, easily accessible area for servicing. JST s VLF is designed to be incorporated with JST s process and rinse baths to customize a workstation to your particular application. Page 6

8 Vertical Laminar Flow Design (cont.) STANDARD FEATURES Removable Sloped Deck 304L or 316L Stainless Steel White Polypropylene FM Approved PVC-C Material Purged Electrical Compartments Exhaust Failure Alarm Emergency Power Off Secondary Containment Seismic Anchors Lockout/Tagout Box Front & Side Safety Shields OPTIONAL FEATURES Rear Access Compartment Front Roll Switches Dedicated Drains Drain to Carboy Fire Suppression Storage Compartment SEMI S2 Certification Emergency Power Off CE Marking 3rd Party Electrical Inspections Page 7

9 Spinner/Hotplate Design The deck is welded in and liquid-tight to support an optional photoresist spinner or hotplate module. The module controllers are mounted in the nitrogen purged headcase. The large doors allow access to the lower storage area. The lower storage area is exhausted and houses the spinner motor, plumbing, photoresist or developer pressure vessels, and waste containers. Page 8

10 Chemical Workstation Design The deck is welded in with an optional utility sink (as shown). The lower storage area can be configured with doors and drawers which replace the plenum in the Fumehood style (as seen below). An optional counter balanced front shield, nitrogen and CDA gun is also shown. The only electrical components are a light and optional duplex outlet. Other optional equipment can be incorporated into a custom design for specific equipment or application. Page 9

11 Fumehood Design The Fumehood design has a movable sash, nitrogen purged headcasing and secondary containment plenum. The plenum houses the process and rinse baths supported on removable bars. Plumbing components are located in the front of the plenum for easy access through the removable deck surface. The clear lifting shield is counter balanced for easy raising and lowering. The ergocolumn has a load center with a lockout/ tagout box and standard 220 VAC 3-phase power. The fumehood is standard with an EPO and exhaust failure that shuts down the workstation if exhaust is lost. Page 10

12 Glovebox Design This picture shows a glovebox with lower storage and glove ports. The door is located on the right-hand side to load parts into a dry, fumeless chamber. The door is then closed and the cleaning process begins. This glovebox is a more traditional design using hand scrubbing and a spray to clean the part. The station is exhasted out the rear and is shown with an optional HEPA filtration unit. Page 11

13 VLF Hood with Hepa Filter Designed for Class 100 Cleanrooms Open front access Designed for wet processing of 6 or smaller wafers in a controlled environment. Standalone HEPA filter frame Optimized for applications where frequent access or cleaner processing is required such as wafer processing. JST s exhaust system is designed to pull clean laminar air evenly from the top of the work area towards the deck and away from the operator. There are no dead air pockets to hold contaminates. Page 12

14 Ergonomic Reach on VLF Design Dimensional Comparison Between EWS and VLF The above drawings show the reach dimensions of an average Man and Women using JST s VLF Style Station. These dimensional are per SEMI Standards for ergonomic reach. Page 13

15 Ergonomic Reach on Fumhood Design The above drawings show the reach dimensions of an average Man and Women using JST s Fumehood Style Station. These dimensional are per SEMI Standards for ergonomic reach. Page 14

16 Exhaust Transitions All of JST s exhausted workstations come with exhaust transitions with dampers so that you can adjust your exhaust flow to the required amount. The required exhaust standard cubic foot per minute will be listed in your manual and also included on the facility drawings provided to you at time of order. JST s Chemical Workstations, Gloveboxes and VLF designs are standard with the exhaust located in the rear of the unit. All EWS stations and Fumehoods are standard with the exhaust connection located at the top of the unit. If you are going to push your workstation against a wall and require another exhaust configuration, please note that at time of order. The following exhaust transitions are available. The exhaust transition is removable with a damper and adjusts 360 degrees. CWS, Glove Box and VLF The top transition is removable and designed for flush wall mount or connection to exhaust inside cleanroom with the ability to rotate 180 degrees. The top transition is standard on EWS Stations and Fumehoods and is optional on CWS, Glove Boxes or VLF stations. Page 15

17 Workstation Terminology Headcasing Headcasing Secondary Containment Plenum Face Velocity: The velocity of the air pulling at the Operator s Face. Headcasing: The headcasing enclosure houses electrical components. Secondary Containment Plenum: This area is sloped to a 2 drain located in the center rear of the tool. This can be used to contain rinse water or used as a dry plenum to detect leaks. Page 16

18 Workstation Design Concepts Lip exhaust is designed to keep fumes from rising above the deck area. Air is pulled down around the lip of the process bath and out through the plenum area, away from the operator. An exhaust pressure monitor and a low exhaust pressure alarm system are provided with an audio & visual alarm indicator, interlocked to the EPO. Low voltage modular controllers with high voltage interface modules are easy to identify and meet NEC codes. Redundant safety interlocks are used for all heated baths & hot plates. Emergency Power Off (EPO) using UL rated components automatically shuts down the power if exhaust is lost. Sealed low and high voltage boxes are purged with clean dry air or nitrogen. On solvent tools, if pressure is lost the affected unit shuts down. All lighting is with LED low voltage lights which use 60% less power than a 60 watt fluorescent light. The top deck is removable and the process baths are mounted on adjustable deck rails. Decks can be a solid, sloped surface or perforated workspace. Modular design makes changing out process baths easy. Controllers are UL rated PLC with three security levels as well as a screen saver to minimize power. The life expectancy of the shell and electrical components is 15 years or longer. Page 17

19 Workstation Design Concepts (cont.) Spinner/Hotplate (SHP) Standard Features Include: Lower Exhausted Storage Secondary Containment Slide Out Drawers Flange/ Deck Flush Mounted Spinner & Hot Plate Remote Controls in N2 Purged Head Casing or in N2 Purged 45 Front roll Optional: JST Reusable or Disposable DOT Approved Waste Carboy/ 1- Gallon Bottle w/ liquid level sensing JST Manufactured Spinner Enclosure with N2 Purge & Pressure Sensor Page 18

20 Additional Process Station Options/Features Filter housing have a drain to make changing filters easy. Rear access provides easy maintenance to change filters, maintain air operated valves, pumps and other hardware. Good exhaust flow in the rear access ensures a safe working environment for maintenance personnel. Front roll switches allow operators easy reach to on/ off process functions. The front roll switches are standard on a Fume Hood to meet ergonomic reach guidelines. Page 19

21 Exhaust Flow Calculations Exhaust Calculations Face Opening Height 24 x 72 wide = 1728 Sq. Ft divided by 144 = 12 Sq. Ft. 12 x 120 cfm = 1440 SCFM (Standard Cubic Feet per Minute) Exhaust Flow Requirement Page 20

22 Ergonomic Considerations Ergonomics need to be considered when choosing a workstation design and layout. SEMI S8 recommends ergonomic reaches not exceed 39 high and a maximum reach of 13 horizontal for loading cassettes and a maximum reach of 64 high and 10 horizontal when reaching controls. Switches located on the front roll are available for meeting reach requirements for controls but care needs to be taken when designing deck layouts for cassette reach. Materials of Construction for the Shell Standard Materials of Construction are 304L (low carbon grade) stainless steel for solvent applications and plastics for acid applications. The choices of plastic are dependent upon whether or not your facility requires a Factory Mutual 4910 approved self extinguishing plastic. The economic choice for FM4910 approved plastic is PVC-C. This material does not support all hot acids and it may become necessary to add a drip tray or plenum liner to workstations using a hot acid that is not compatible with PVC-C. (Reference the chemical compatibility chart in Appendix A) PVDF is FM4910 approved but is much costlier than the FM approved PVC-C material. A good choice for non FM4910 material is white polypropylene. Fire Suppression Systems Carbon Dioxide Systems are Designed upon NFPA12, NFPA 318, Factory Mutual Specification No 3, CO2 Protections for Wet Benches and Factory Mutual Semiconductor Facilities Loss Prevention Data. A Notifier Version Controller, which is a UL (Underwriter s Laboratory) Listed, controls the system and can be interlocked into the house Fire System. Discharge Nozzles and Piping are either Stainless Steel or Teflon Coated Stainless Steel for acid applications. All tubing is seamless. Visual and audio alarms are mounted on the station using a Horn/ Strobe and the system is engineered using FM (Factory Mutual) approved engineering package. Water fire suppression systems are also available. If the cleanroom has a water sprinkler system that is to be connected to the Exhausted Workstations, JST can provide an optional pass through sprinkler head installation. Page 21

23 Deck Layout of an Exhausted Workstation The dimensions of the parts being placed into the station drive the sizes of the baths and the number and locations of baths. The deck layout of the workstation will dictate the overall workstation size. It is a good idea to layout the work surface space left to right taking into consideration baths, how the chemistry will get into the bath and how it will be disposed of. Methods of filling are to hand pour into the bath, pump from a reservoir, bulk fill from facility supply or pump fill from an external drum cabinet. Chemical disposal can be drained to a dedicated drain that will be hooked to a facility waste system, drained to the plenum where it will be sent to industrial waste, drained to a remote waste cabinet or drained to a carboy. Secondary Containment If your plenum is a dry plenum, the plenum will be considered secondary containment. If a rinse bath drains into the plenum; however, it will no longer be considered secondary containment for safety purposes. JST offers secondary plenums as options. They will be located under the main plenum and include a leak detection sensor to sense any liquid. Another option is a drip tray that sits underneath the entire station. Seismic Considerations All of JST s Exhausted Workstation come with seismic brackets and seismic calculations are included with the Operations and Maintenance Manual. Page 22

24 Sample Deck Layout PVC-C Station with 30 Deck 2. DI Water & N2 Handspray 3. Gooseneck Footpedal 4. Utility Sink with Gooseneck 5. Npp QDR 6. Needlevalve for QDR 7. Mounting Bars 8. Hot Plate Well 9. Vacuum Wand 10.Eyewash 11. Raceways 12. Water Aspirator 13. Ambient Bath 14. Lid Storage 15. Beaker Drying Rack 16. EPO 17. Magnehelic 18. Exhaust Failure Alarm Page Ambient Bath Drain & N2 Bubbler 20.Timer 21. QDR Controller

25 Steps in Specifying an Exhausted Workstation 1. Choose Exhausted Workstation Shell Design based on what the workstation use will be. 2. If you have access to the back of the workstation and are using pumps and filters that need to be maintained, consider adding a rear access compartment. 3. Choose the Materials of Construction based upon the chemicals used within the station. (See sample processes and recommended process modules in the Appendix B and Chemical Compatibility Chart in Appendix A). 4. If you need a fire suppression system choose either a water mist system or CO2 Fire Suppression. 5. Select the workspace layout by adding modular baths. 6. Choose method of filling baths and disposing of chemical in Bulk Fill and Chemical Dispense. 7. Add options: A. N2 Gun B. DI Gun C. Perforated Work surface D. Aspirator E. Vacuum Wand F. Eyewash G. Glovewash F. Deck Dividers H. Bottle Wash I. Bottle Storage Page 24

26 Options Page 25

27 Hand Guns, Aspirators & Vacuum Wands DI & N2 Handguns The high purity DI ( deionized water) spray gun is all Teflon wetted construction with recirculating bleed by to avoid bacteria growth. The Nitrogen spray gun has a point of use filter and provides safe, convenient high pressure dispensing. High Pressure Solvent Spray Guns Exposed Metal, non recirculating water spray gun Aspirators Aspirators are Venturi-style and are ideal for cleaning up spills or for slow draining of process chemistries. Maximum vacuum is 28.5" (724mm) Hg and operates efficiently with water pressure as low as 7.5 psig (0.5 bar). An integral check valve eliminates vacuum loss after water is shut off. Air aspirators are also available as an option to using water and should be considered when draining solvents or draining into carboys. Unfiltered nitrogen Hand Gun Vacuum Wands Vacuum wands are available for picking up your wafers and can easily be mounted on the deck. Page 26

28 Eye Wash, Glove Wash, Bottle Wash & Storage Eye Wash The eye wash shown above is designed to provide emergency eye/face rinsing. Upon activation a soft aerated flow is used to gently flush the eye free of irritants. Glovewash Glovewash stations can be incorporated into any workstation. Just put your hand in the station and the water automatically comes on and rinses your glove. Bottle Wash The bottlewash shown at the left is mounted into a workstation. Just turn the bottle upside down, close the lid and turn on the sprays. The bottle is washed inside and out so it can safely be disposed. Beaker Storage A storage well with a perforated bottom to hold beakers is shown at right. Also available is a beaker storage rack to locate beakers. Page 27

29 Deck and Tank Lids Module lids can be added to any process module and stored in the deck or stored on the side of the station. Process lids sit flush on the tank, not on the deck. For extra work surface, add a deck lid. The deck lid sits flush with the deck surface extending the work area. Displacement Blocks Displacement blocks are available to add to your process tanks to minimize chemical usage when processing smaller parts. Condensing Collar JST s Condensing Collars can be utilized for all types of Solvent Processing. Benefits Include: Reduces evaporation. Extends chemical life. Supplied by facility process water loop or a remote chiller. Many design options are available for static or filtered baths and manual or automated tools. Page 28

30 Station Rear Access If there is space behind your process station, consider adding rear access. The upper compartment shown at the right houses the electrical components for easy access through sliding clear pvc doors (not shown). The lower compartment is fully exhausted and can house pumps, filters and reservoirs for ease of maintenance. The lower storage area is leak tight providing secondary containment and has sliding clear pvc doors (not shown). Dilution Drain Valves Water inlet pressure opens an internal poppet valve, a vacuum is created by the internal venturi nozzle which siphons and dilutes the process fluids from a tank at a pre-selected, fixed ratio. Dilution drain valves are available in 2:1, 5:1, 10:1 and 50:1 ratios. APPLICATIONS: Fast drain down of high temperature media. Unique field proven design. For Semiconductor or other industries where the chemical tank draining system is restricted by environmental safety hazard code, or secondary operations require a decrease in chemical concentration and temperature reduction. Page 29

31 Plenum Flush A plenum flush is available to rinse out the plenum after dumping acids. A spray rinse manifold can be programmed to rinse after each chemical draining into the plenum or can be manually activated. Deck Rings Deck rings can be provided around process baths to prevent spills from entering into the bath. They can also be used to prevent water from entering a process module when rinsing off the deck. Page 30

32 Process Modules Page 31

33 Constant Temperature Bath JST s Constant Temperature Bath maintains accurate temperature control and particle removal. The recirculated chemistry flow enters the bottom of the process bath and is directed in a laminar flow up to a four sided overflow weir, then returned back through a pump and filter prior to returning to the process bath. The bath is designed to filter sub-micron particles and reduce chemical consumption. The chemistry temperature is controlled by a remote heat/chiller unit using closed loop coils that transfer and maintain the temperature in the bath. A dedicated touch screen PLC with a full PID control loop controls the process parameters and process times. A thermocouple probe monitors the process temperature, high and low temperature set points and the alarms. A liquid level sensor monitors the liquid level in the tank. There is also an audio alarm and interlock to shut off the pump at a low liquid level. BASIC FEATURES A 10 inch inline filter housing accepts an industry standard dual o- ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry PH and particle removal size required. Temperature Range 10ºC- 40ºC +/- 0.5ºC Thermocouple, Type J Teflon Coated Temperature Probe Touch Screen PLC Liquid Level Detection Interlocked to Pump Dual Diaphragm Pneumatic Pump. Air Operated Drain Valve OPTIONAL FEATURES +/-0.1ºC Solid State Chiller/Heater Unit Centrifugal Electric Pump Liquid Level Keep Full Routine Auto Chemical Fill Auto or Manual Lid Dual Filter Housings Auto Chemical Mixing in the Bath Page 32 MATERIALS Natural Polypropylene PVDF Teflon 316L Stainless Steel

34 Constant Temperature Bath (cont) CASSETTE SIZE MATERIAL MODEL NUMBER SINGLE 4 INCH PVDF G0 SINGLE 4 INCH NATURAL POLYPROPYLENE P0 SINGLE 4 INCH TEFLON T0 SINGLE 6 INCH PVDF G0 SINGLE 6 INCH NATURAL POLYPROPYLENE P0 SINGLE 6 INCH TEFLON T0 SINGLE 8 INCH PVDF G0 SINGLE 8 INCH NATURAL POLYPROPYLENE P0 SINGLE 8 INCH TEFLON T0 DUAL 4 INCH PVDF G0 DUAL 4 INCH NATURAL POLYPROPYLENE P0 DUAL 4 INCH TEFLON TO DUAL 6 INCH PVDF G0 DUAL 6 INCH NATURAL POLYPROPYLENE P0 DUAL 6 INCH TEFLON T0 DUAL 8 INCH PVDF G0 DUAL 8 INCH NATURAL POLYPROPYLENE P0 DUAL 8 INCH TEFLON T0 Page 33

35 Megasonic Bath JST s Megasonic Baths provide a high level of cleaning performance by applying high frequency sound (greater than 700 khz) to effectively remove submicron particles via acoustic cavitation. The high frequency energy and cavitation reduces the boundry layer between the fluid and the surface of the part resulting in fine particle removal. JST s baths are designed to provide continuous megasonic energy across the full width and depth for continuous full coverage. Elevated temperature can also help lower the chemistry s surface tension and further improve substrate cleaning. JST offers ambient static megasonic baths, heated ambient or static megasonic baths and megasonic Quick Dump Rinsers, giving customers the ability to fine tune their processes. All heated megasonic baths use a touchscreen PLC controller with a full PID Loop for temperature control. Quartz Recirculating System for critical cleans and high temperature applications PVDF Megasonic Quick Dump Rinser Direct Meg with PFA Coated Transducers Unique wall raising dump design Drains in <2 seconds through 360 o opening 316 Stainless Steel Megasonics Direct Meg with 316 Stainless Steel Electro Polished Transducers Quartz Ambient Megasonic both Static and Recirculating Direct Meg with PFA Coated Transducers Seamless Corners for Cleanliness Page 34

36 Quick Dump Rinser JST s Quick Dump Rinser supplies Deinonized (DI) water from the bottom of the bath through ports that direct the flow up and across the product s surface away from the product and over the four sided overflow weir. After the programmable overflow cycle, the bottom dump door opens and quickly dumps the rinse water. At the same time, top mounted sprays keep the product wet with fresh, clean DI water during the dumping process. The quick dump rinse is followed by a high flow cascade rinse to ensure all chemical and particulates are removed. STANDARD FEATURES Programmable Rinsing Routines Ability to Set the Number of Fill & Dump Cycles Rinse Timer for High Flow Cascading Automatic Self Cleaning Cycles PVDF Construction OPTIONAL FEATURES Construction Materials Natural Polypropylene Stainless Steel Resistivity Monitoring DI Water Reclaim Flow Meter for Volume Control Hot DI Water To minimize water usage, anti-bacterial valves can be set to pulse in lieu of bypass. Pulsing them every 10 minutes amounts to 63 gallons of water a day versus bypassing which uses 360 gallons per day or 1/4 gpm. A containment pan for gray water can be added under the Quick Dump Rinser for further water savings. As seen below, the PLC offers flexibility in creating specific rinsing routines and has the ability to set the number of rinse and dump cycles. Timers are included for programming high flow cascade cycle times. An automatic self-cleaning cycle flushes and purges the quick dump plumbing valves, and DI water manifold to eliminate bacterial growth. MATERIALS AVAILABLE PVDF NPP 316L Stainless Steel Page 35

37 Ambient Static Bath JST s Ambient Static Baths incorporate coved corners for cleanliness and a sloped bottom with 3/4 port to assure quick and complete draining. Material selection is based on chemical compatibility and process application. Available Materials Natural Polypropylene PVDF Molded Teflon 316L Stainless Steel Available Features Manual Lid or Auto Lid Process Timer Air Operated Teflon Drain Valve Air Toggle Drain Switch Auto Top Off Auto Chemical Fill Auto Chemical Mixing Controls consist of a PLC based stand alone timer that is programmable to count up or down in hours, minutes and seconds. Timer setting is 0-45:30:30 H:M:S. A programmable Pre Alarm sends an audio warning prior to the timer period being completed. An auto alarm sounds at end of cycle. JST s process baths are designed to be installed in a JST process shell, either manual or automated. Shell designs available are the EWS, VLF and Fumehood for manual work stations and Linear Transfers or Rotary for automated tools. Page 36

38 Ambient Static Bath (cont) CASSETTE SIZE MATERIAL MODEL NUMBER SINGLE 4 INCH 316L ELECTRO-POLISHED BE SINGLE 4 INCH PVDF G0 SINGLE 4 INCH NATURAL POLYPROPYLENE P0 SINGLE 4 INCH TEFLON T0 SINGLE 6 INCH 316L ELECTRO-POLISHED BE SINGLE 6 INCH PVDF G0 SINGLE 6 INCH NATURAL POLYPROPYLENE P0 SINGLE 6 INCH TEFLON T0 SINGLE 8 INCH 316L ELECTRO-POLISHED BE SINGLE 8 INCH PVDF G0 SINGLE 8 INCH NATURAL POLYPROPYLENE P0 SINGLE 8 INCH TEFLON T0 DUAL 4 INCH 316L ELECTRO-POLISHED BE DUAL 4 INCH PVDF G0 DUAL 4 INCH NATURAL POLYPROPYLENE P0 DUAL 4 INCH TEFLON T0 DUAL 6 INCH 316L ELECTRO-POLISHED BE DUAL 6 INCH PVDF G0 DUAL 6 INCH NATURAL POLYPROPYLENE P0 DUAL 6 INCH TEFLON T0 DUAL 8 INCH 316L ELECTRO-POLISHED BE DUAL 8 INCH PVDF G0 DUAL 8 INCH NATURAL POLYPROPYLENE P0 Page 37 DUAL 8 INCH TEFLON T0

39 Ambient Filtered Bath JST s Ambient Filtered bath continuously filters process chemicals in a laminar flow direction from the bottom of the bath upward over a four sided weir. The bath is designed to filter sub-micron particles and reduce chemical consumption. A 10 inch inline filter housing accepts an industry standard dual o-ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry PH and particle removal size required. OPTIONS BASIC FEATURES Manual, Hinged or Auto Lid Dedicated Drain to Acid Waste or Carboy Electrical Centrifugal Pump Auto Chemical Fill Auto Chemical Blending Pump Stroke Monitoring Process Timer with End of Cycle Alarm Liquid Level Detection Interlocked to Pump Dual Diaphragm Pneumatic Pump. Air Operated Drain Valve Dispersion Cassette Platform MATERIALS Natural Polypropylene PVDF Molded Teflon Quartz 316L Stainless Steel OTHER CHEMICAL AND RINSE BATHS AVAILABLE Constant Temperature Bath Heated Solvent Filtered High Temperature Bath Megasonic Baths Quick Dump Rinser Overflow Rinse Bath Page 38 Heated Solvent Baths Heated Solvent Downflow Heated Solvent Filtered Static Ambient or Heated Ultrasonic Filtered Ambient or Heated Ultrasonic

40 Ambient Filtered Bath (cont) CASSETTE SIZE MATERIAL MODEL NUMBER SINGLE 4 INCH 316L ELECTRO-POLISHED BE SINGLE 4 INCH PVDF G0 SINGLE 4 INCH NATURAL POLYPROPYLENE P0 SINGLE 4 INCH TEFLON T0 SINGLE 6 INCH 316L ELECTRO-POLISHED BE SINGLE 6 INCH PVDF G0 SINGLE 6 INCH NATURAL POLYPROPYLENE P0 SINGLE 6 INCH TEFLON T0 SINGLE 8 INCH 316L ELECTRO-POLISHED BE SINGLE 8 INCH PVDF G0 SINGLE 8 INCH NATURAL POLYPROPYLENE P0 SINGLE 8 INCH TEFLON T0 DUAL 4 INCH 316L ELECTRO-POLISHED BE DUAL 4 INCH PVDF G0 DUAL 4 INCH NATURAL POLYPROPYLENE P0 DUAL 4 INCH TEFLON T0 DUAL 6 INCH 316L ELECTRO-POLISHED BE DUAL 6 INCH PVDF G0 DUAL 6 INCH NATURAL POLYPROPYLENE P0 DUAL 6 INCH TEFLON T0 DUAL 8 INCH 316L ELECTRO-POLISHED BE DUAL 8 INCH PVDF G0 DUAL 8 INCH NATURAL POLYPROPYLENE P0 DUAL 8 INCH TEFLON Page T0

41 FEATURES Temperature Range 40 C- 120ºC +/- 0.5ºC Thermocouple, Type J Teflon Coated Temperature Probe Touch Screen PLC Controller Liquid Level Detection Semi and NEC Compliant. 1 Sloped Drain Port Dedicated Air Operated Drain Valve Static Heated Bath JST s Static Heated Baths are designed to maintain uniform temperature for processing while meeting NEC and SEMI standards for safety. Quartz and 316 L stainless steel tanks have the heating element bonded to the outer walls, insulated and contained with an outer shroud. The heating element is in a sealed, double wall housing which is N2 purged and monitored for additional safety for solvent applications. Optional zoned heating is available for energy savings. PVDF and Teflon tanks have submersible Teflon coated heaters resting in the bottom of the tank. A dedicated touch screen PLC with a full PID control loop using a Type J thermocouple temperature probe controls the bath temperature. The controller has a programmable temperature and timer. An audio alarm sounds if the bath exceeds the specified operating temperature. In an over temperature condition the controller will turn off the heaters. A heating element snap switch protects an over temperature condition in case the controller or probe fail. A liquid level detection monitors the chemistry level in the bath to keep a safe operating level. OPTIONS Condensing Cooling Coils Dedicated Drain Liquid Level Keep Full Auto Fill N2 Heater Purge Monitor Interlocked to EPO ASPI Water Air Operated Drain Valve. Dedicated Drain to Carboy or House Facility. Hinged Automated Lid or Manual Lid Zoned Heating Page 40 MATERIALS Quartz PVDF Teflon 316L Stainless Steel

42 Static Heated Bath (cont) CASSETTE SIZE MATERIAL MODEL NUMBER SINGLE 4 INCH 316L ELECTRO-POLISHED BE SINGLE 4 INCH QUARTZ G0 SINGLE 4 INCH TEFLON T0 SINGLE 6 INCH 316L ELECTRO-POLISHED BE SINGLE 6 INCH QUARTZ G0 SINGLE 6 INCH TEFLON T0 SINGLE 8 INCH 316L ELECTRO-POLISHED BE SINGLE 8 INCH QUARTZ G0 SINGLE 8 INCH TEFLON T0 DUAL 4 INCH 316L ELECTRO-POLISHED BE DUAL 4 INCH QUARTZ G0 DUAL 4 INCH TEFLON T0 DUAL 6 INCH 316L ELECTRO-POLISHED BE DUAL 6 INCH QUARTZ G0 DUAL 6 INCH TEFLON T0 DUAL 8 INCH 316L ELECTRO-POLISHED BE DUAL 8 INCH QUARTZ G0 DUAL 8 INCH TEFLON T0 Page 41

43 Heated Filtered Bath JST s Heated Filtered bath continuously filters process chemicals in a laminar flow direction from the bottom of the bath upward over a four-sided weir. The bath is designed to filter sub-micron particles and reduce chemical consumption. A 10 inch inline filter housing accepts an industry standard 10 inch dual o-ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry PH and particle removal size required. The heating elements are bonded to the outer walls, insulated and contained with an outer shroud. The heating element in the double wall housing is purged by N2. Inline heaters are recommended for large, high temperature baths that require a fast heat up time. Baths are available in 316L stainless steel or quartz with serrated overflow edges for uniformity. A dedicated touch screen PLC with a full PID control loop using a Type J thermocouple temperature probe controls the bath temperature. The controller has a programmable temperature and timer. An audio alarm sounds if the bath exceeds the specified operating temperature. In an over temperature condition the controller will turn off the heaters. A heating element snap switch protects an over temperature condition in case the controller or probe fail. A liquid level detection monitors the chemistry level in the bath to keep a safe operating level. BASIC FEATURES Temperature Range 40ºC- 120ºC +/- 0.5ºC SideWall Heaters Thermocouple, Type J Teflon Coated Temperature probe Touch Screen PLC Controller Liquid Level Detection Interlocked to Pump Dual Diaphragm Pneumatic Pump. Air Operated Drain Valve Dispersion Cassette Platform. Page 42 OPTIONS Hinged or Auto lid Dedicated Drain to Carboy Flow Sensor Electrical Centrifugal Pump Auto Chemical Fill Auto Chemical Blending Pump Stroke Monitoring Temperature Range 40ºC- 180ºC +/- 0.5ºC with Inline Heater

44 Heated Filtered Bath (cont) CASSETTE SIZE MATERIAL MODEL NUMBER SINGLE 4 INCH 316L ELECTRO-POLISHED BE SINGLE 4 INCH QUARTZ G0 SINGLE 6 INCH 316L ELECTRO-POLISHED BE SINGLE 6 INCH QUARTZ G0 SINGLE 8 INCH 316L ELECTRO-POLISHED BE SINGLE 8 INCH QUARTZ G0 DUAL 4 INCH 316L ELECTRO-POLISHED BE DUAL 4 INCH QUARTZ G0 DUAL 6 INCH 316L ELECTRO-POLISHED BE DUAL 6 INCH QUARTZ G0 DUAL 8 INCH 316L ELECTRO-POLISHED BE DUAL 8 INCH QUARTZ G0 Page 43

45 Ultrasonic Baths JST s ultrasonic baths are designed to make the most of your cleaning chemistry while taking advantage of the cleaning action of the sound waves. Coved corners eliminate particle traps and make tank cleaning easier. JST uses only certified, high performance alloys for maximum strength and long term durability. All standard 316 L stainless steel tanks are electro-polished and have uniform sloped bottoms to ensure complete draining. JST s tank design eliminates particle buildup and reduces bath cross contamination, making it the ideal choice for critical cleaning of: Semiconductors Optics Disk Drive Components Flat Panel Displays Microelectronics and more 40, 72, 104, or 170 khz Frequencies are available Ultrasonic transducer placement and frequency selection are critical for proper cleaning without damaging parts. All frequencies drive the same universal transducer allowing for cleaning different parts within one bath at varying frequencies. Each Heated Ultrasonic bath is controlled by a dedicated PLC touch screen controller which uses full PID for temperature control. The controller has the ability to store and execute user defined recipes. JST s application engineers can help you optimize cleaning by matching the right frequency and pattern for your specific cleaning application. JST s designs put safety first. OPTIONS Heating & Control Systems to Maintain +/-.5 Celsius. Overflow Weir with Filtration & Recirculation Work Baskets Mechanical Agitation Auto & Manual Lids Custom Sizes to Fit Your Product Page 44

46 Heated Downflow Bath JST s heated downflow baths are designed for metal lift off and removal of heavy particles that have a tendency to fall to the bottom of the tank. Filtered and heated solvent chemistry flows directly onto the submersed parts, lifting the contaminants and flowing them down the bottom of the tank and out the bath drain. This downflow action eliminates the possiblity of sheeting films redepositing back onto the product. In an overflow bath, chemistry is introduced into the tank via the bottom and flows over the product and out the top into the overflow weir leaving heavier films to circulate within the body of the bath. With the JST downflow design the particles are pulled out of the tank and captured in a filter trap. BASIC FEATURES Temp Range 40ºC- 120ºC +/-.5ºC Sidewall Heaters Thermocouple, Type J Teflon Coated Temperature Probe PLC Touch Screen Controller Liquid Level Detection Interlocked to Pump Dual diaphragm Pneumatic Pump. Air Operated Drain Valve Dispersion Cassette Platform. A 12 inch inline filter housing accepts a standard 10 inch dual o-ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry Ph and particle removal size required. For applications that require reclaim, a removable filter trap is available. The heating elements are bonded to the outer walls, insulated and contained within an outer shroud. The heating element in the double wall housing is N2 purged. Inline heaters are recommended for large, high temperature baths that require a fast heat up time or higher processing temperatures. A PID controller using a Type J RTD temperature probe controls the bath temperature. The controller has a programmable temperature and timer. An audio alarm sounds if the bath exceeds the specified operating temperature. In an over-temperature condition the controller will turn off the heaters. A heating element snap switch protects an over-temperature condition in case the controller or probe fail. A liquid level detector monitors the chemistry level in the bath to maintain a safe operating level. Page 45 OPTIONS Hinged or Auto Lid Dedicated Drain to Carboy Flow Sensor Electrical Centrifugal Pump Auto Chemical Fill Auto Chemical Blending Pump Stroke Monitoring Temperature Range 40ºC- 100ºC

47 Hot Plates A Ceramic hot plate can be placed in an exhausted well and Teflon coated for acid applications. One TC probe is used to control temperature and another is provided for redundant over-temperature control. Users can program both hot plate temperature and process temperature as well as chart the relationship. Liquid level is sensed in the beaker through a back pressure switch and is interlocked to the hot plate for safety. The flexible hose allows users to easily move the probes and liquid level sensor out of the way when moving the beakers in and out. The assembly is mounted on deck bars for flexibility and the hot plate has a N2 purged housing with controls in the headcasing. Stirrers are optional. Repeat any program automatically. Infinite repeats can be set. Programmable and nonprogrammable operationplatinum RTD temperure measurement for +/- 1%. Solid ceramic heater top. Stir up to 4 liters of aqueous solution from 1000 rpm to 1500 rpm. Timer to 99 hours, 59 minutes, 59 seconds. RS232 interface. Custom display of all parameters, all the time. 12 month warranty. UL, CSA and CE compliant. 10 Program Memory Storage in CMOS. (No Batteries). Each Program can be 10 steps where 1 step is a unique temperature, stirring speed, time and heating rate. Page 46

48 Utility Sinks Utility sinks are available in all sizes and materials. Goosenecks can be configured with remote momentary switch, manual valve (as shown at left) or with a footpedal control. Removable lids can be added to increase your workspace when the sink is not in use. Page 47

49 Chemical Filling and Draining Page 48

50 Chemical Filling Process Baths Filling the process baths with chemicals can be manual, semiautomatic or totally automated from bulk dispense systems. Manual filling chemistry from gallon bottles directly into the bath should include an easy reach to the bath in order to avoid accidents. When filling a process bath that is located towards the rear deck beyond safe ergonomic reach, the chemical should be poured into a cup sink plumbed to the bath. The cup sink should be within easy reach, located in the front roll or in front of the deck surface. Cup Sink for Filling Semi automated chemical filling is accomplished by using a remote cleanroom chemical cart with low pressure air pumps to transfer premixed chemical from a holding reservoir in the cart using a Teflon fill tube. Using a chemical fill tube requires each work station have a DI utility sink to rinse and clean the fill tube. When rear access workstations are installed in a chase wall, the chemicals can be poured or dispensed into reservoirs mounted in the work station rear access. A front mounted chemical dispense touch screen controller shows the reservoir s volume condition. Upon needing chemistry, the operator activates a momentary fill switch on the controller to start the reservoir air pump for auto dispensing the chemistry to the bath. A redundant safey feature that uses a high liquid level switch and time delay is interlocked to turn off the air pump and preventing overfilling. For fully automated systems, please refer to JST s Chemical Bulk Fill Cabinets on page 50. For chemical blending and mixing management in a process bath see JST s Auto-Chemical Dispense Management on page 51. Page 49

51 Chemical Bulk Fill Cabinets Whether filling a single chemistry or multiple chemistries to multiple benches, JST offers Chemical Bulk Fill Cabinets to meet your needs. All cabinets are designed with safety in mind. Solvent cabinets are double wall construction and include CO2 Fire Suppression systems for flammable chemistries. All cabinets include sealed secondary containment with leak detection. Drum dispense heads contain venting, chemical fill and liquid level connections. Just disconnect the head and hang it on the hook to change out the drum. Optional rollers are included to make sliding the drum into position easier. Pneumatic pumps are sized for the necessary head pressure. Optional PLC controls and valve manifolds are available to manage bulk filling to single or multiple stations. FEATURES White Polypropylene, PVC-C FM4910 Material or 304 Low Carbon Stainless Steel Available. Sized to fit standard 30 gallon or 55 gallon drums. Teflon drumheads and tubes Storage area for temporary head storage Liquid Level sensor with nitrogen backpressure sensor Optional liquid level via scales Optional N2 blanket for solvents Exhausted Front access doors for easy maintenance PLC Controls Page 50

52 Auto Chemical Dispense Chemicals can be metered direct from chemical supply into the process tank though metering pumps or the chemicals can be metered from on board chemical reservoirs. Concentrated chemistry is precisely metered into tank through metering pumps. Chemical Reservoir DI Water Supply Process Tank From the DI water supply, DI water is metered through a paddle wheel for precise chemical blending. Metered DI Water Filter Metering Pumps P Application: Metered DI water for complete concentration dispensing. DI water flow range from 2 to 10 gpm Linearity: ±1% of full range Repeatability ±0.5% of full range All wetted parts are PVDF 200 psi 20 C, 25 psi 85 C For ultra-critical concentrations, a precision pressure regulator is used on the DIW supply to the bath. Nitric Acid Metering Pump and Reservoir Application: dosing of ultrapure chemicals in Semiconductor wafer fabs. Dosing from 6 to 40 ml per stroke or 8 to 80 ml per stroke, reproducibility <1% Delivery fluids: from 0 to 60 PSI, from 0 C up to 100 C, and up to 1000 Cpo. All wetted parts are PFA HP or Virgin PTFE Alternative pumps are available for smaller dosing Chemical concentrations are programmable on JST s color touch screen user interface. Programmable volume control and spiking are available and are user defined. Calibration of the flow sensor and pump are easily proformed using the guides on the operator interface. Note: JST can accommodate multiple reservoir / metering pump combinations. Page 51

53 Draining Waste Draining spent chemicals from a bath within a workstation depends on the local requirements of the sewer district. Both the chemical mix, concentrations and volumes determine how the waste chemistry is to be disposed. Methods for disposing waste chemicals from wet process workstations are: pre-treating chemicals in a neutralization systems prior to dispensing into the local sewer or draining to a collection container which is then hauled off site for disposal. Containers can be disposable carboys, reuseable carboys or drums. For draining to drums please see JST Chemical Waste Drum Systems on page 55. Methods for draining spent chemicals from a process bath in a workstation are; air aspirator, water aspirator or an air operated valve. The most common and safest draining method is using the air operated valve which opens to a dedicated drain which can then be plumbed to the facility s waste management system or to the plenum. The air operated valve (AOV) is plumbed to a NPT coupling located at the bottom of the bath. The on/off switch to activate the AOV is located on the bath controller in the headcasting. The AOV drains the chemistry directly into the workstation plenum or is plumbed directly out the rear of the workstation for connecting to the acid or solvent main facility drain. The connection outlet on the workstation is a 1 NPT coupling. Air or water aspirators are Teflon venturi valves mounted in the workstation plenum. A hand held tube is used to draw the chemistry from the process bath into another container. Aspirators tend to leave trace liquids in the bottom of the bath but are ideal for draining chemistry from beakers. (See Options Section of Catalog) Hot chemicals should be cooled before draining. If they need to be drained hot they can be cooled during draining by using a dilution drain valve which mixes the chemistry with city water to cool it. Dilution drain valves come in ratios of 2:1, 5:1, or 10:1. Dilution drain valves are also used to dilute acids before draining to the main acid waste drain. If neither of these options are practical, the hot chemistry can be drained into a cooling reservoir which will automatically dump the chemistry when it lowers to a pre-programmed temperature. Cooling the chemistry in the bath before draining is accomplished by setting a temperature range acceptable for draining the chemistry in the touch screen bath controller. The AOV is interlocked to a pre-determined set point in the controller, preventing the valve from opening until the low temperature reading is satisfied. The valve can then be activated to drain manually or automatically when low temperature is reached. Page 52 Heated Bath Dilution Drain Valve

54 Cooling the hot chemistry in a separate cooling reservoir can be done when there is no time to wait for the chemistry to cool in the bath or if you can t add water to mix in the main acid drain. The hot chemistry is directly drained to the reservoirs that have closed loop cooling coils plumbed to a remote chiller unit or have open cooling coils plumbed to chilled facility water. The reservoir AOV is interlocked to a pre-determined set point in the controller preventing the valve from opening until the low temperature reading is satisfied. The valve can then be activated to drain manually or automatically when low temperature is satisfied. Low profile Carboys located under the workstation collect chemistry from process baths when facilities do not have house chemical drain facilities. The drain switch panel has three liquid level indicator lights: low, near full, and full. The near full liquid indicator indicates the carboy is near full capacity, the full liquid level indicator is interlocked to the drain valve preventing the drain from opening. An audio alarm is optional. The carboy has exhaust and drip free drain quick disconnects for easy maintenance. Mounted on casters with flexible lines or on slide out drawers, the carboy is easily removable from the workstation. Using disposable carboys combined with a remote pump cart to drain is another method for removing chemistry from process baths. The self-contained pump cart holds two disposable 5 gallon cans, an air pump with air line to activate the pump and drip free chemical quick disconnect drains. A high liquid level switch interlocked to the air pump will shut down the pump when the carboy reaches high liquid level. The cart is mounted on clean room rubber casters to transport easily to a pickup station where carboys are left for chemical disposal. Page 53

55 Neutralization Reservoir Neutralization reservoirs can be located remotely or within the workstation. Acids are drained into the reservoir where an akaline solution is added and mixed. A ph probe reads the ph and when the acid is neutralized to ph 7, the chemistry automatically drains. Carboys Carboys come with liquid level sensors, quick disconnects, a drain fill and a vent for draining. All JST carboys are safety interlocked so no chemistry drains into the carboy when the carboy is full. When ordering please specify reuseable or disposable, the chemistry being stored and capacity of the carboy. DOT approved carboys are available. Pump Cart to Pump to Disposal Vessel JST offers pump carts that connect to the workstation air supply and pump chemistry from process baths or carboys into disposable containers. Carts are offered for pumping acids or solvents in a safe manner. Each cart offers secondary containment and exhausts the vents back to the workstation. Page 54

56 Waste Drum Cabinets Drum cabinets can be configured in a variety of ways to safety handle chemistry to and from the process baths in a workstation. The cabinets are sized for 30 or 55 gallon drums and are designed to hold one or multiple drums. The cabinets are manufactured from FM4910 material, meet SEMI S2 guide lines and CE Mark. Solvent Drum Cabinets are double wall construction incorporated with CO2 Fire Suppression. Facility inlets and outlets are NPT couplings for plumbing double wall piping between the Drum cabinets and Workstation. Waste Drum Cabinets, located remote from the workstation, collect used chemistry for bulk disposal when waste chemistry facility drains are not available. In facilities that do not accommodate gravity feed lines to the drum cabinet, a pneumatic pump located within the workstation is used to drain the chemistry from the process bath to the Waste Drum Cabinet. Liquid levels send signal status to the front control panel showing the volume of waste chemistry by percentage. The near full and full status alarm is a set value. The near full percentage setting indicates the drum needs changing to an empty drum. The full percentage liquid level setting is interlocked to the inoperative pneumatic pump condition until a new drum has been installed and the reset condition is satisfied. Full liquid level level audio alarm is optional. Dual Waste Cabinets are configured to hold two drums with the capability to automatically switch over to a second drum when the first drum becomes full. Page 55

57 Chemical Bottle Handling One gallon chemical bottles are transported into cleanrooms via pass-throughs or transport carts. The chemical bottles are stored in chemical cabinets or under the chemical workstation. Solvents are stored in explosion proof double wall stainless steel cabinets. Bottle storage in workstations is kept in an enclosed bottom area with exhaust ventilation. Access for retrieving the bottles is through sliding doors or with roll out shelves for easy and safe handling. When a chemical bottle is emptied, it can be washed in the station using a bottle washer module mounted in the workstation deck. The bottle washer rinses the bottle both inside and outside For large volume bottle washing, stand alone bottle washer systems are capable of washing multiple bottles at one time. A twelve bottle capacity bottle washer can be programmed to wash 4, 6 or 12 bottles independently. Passthru for supplying cleanroom with chemicals. Bottle Wash Station. Single bottle wash modules can be included in process station. (See Options) Page 56 CWS Station with Chemical Bottle Storage

58 Appendix A Chemical Compatibility The following chemical compatibility chart is for reference only. Heated refers to baths up to 70 degrees Celsius. For Plastics and Elastomers R=Resistant L=Reduced Service Life U=Unsatisfactory N=No Data available For Metals E=Less than 2 mils penetration/year G=Less than 20 mils penetration/year S=Less than 50 mils penetration/year X=Greater than 50 mils penetration/year N=No Data Available Page 57

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