Nanoquim Plataform Basic Course. Neus Romà, Luigi Morrone, Marta Riba, Oriol Sabater
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1 Nanoquim Plataform Basic Course Scientific Director: Technicians: Teresa Puig Neus Romà, Luigi Morrone, Marta Riba, Oriol Sabater
2 O u t l i n e 1. What is a Clean Room? 2. Nanoquim Plataform 3. Laboratory Rules 4. Safety at Laboratories 5. Management Nanoquim Platform 6. User Type and Equipment Booking Request
3 1. What is a Clean Room? General Features A cleanroom is an environment, typically used in manufacturing or scientific research, that has a low level of environmental pollutants such as dust, airborne microbes, aerosol particles and chemical vapors. Cleanrooms are classified according to the number and size of particles permitted per volume of air.
4 1. What is a Clean Room? General Features Contamination Causes Equipment 25% Processes 20% Chemical Products 20% User [PERCENTAG E] Reduce the external contamination during the whole process in the Clean Room!! Limitation of the number of persons Controlling the behaviour inside the Clean Room
5 1. What is a Clean Room? General Features Influence of User movement Particles/min ( 0,3 µm) Stand straight or seated without any movement Seated, slight movement of head, hands and arms Seated, body and arms movement Change of position, from seated to stand straight Walk slowly Walk normally Walk quickly
6 1. What is a Clean Room? Specific Clothes
7 2. Nanoquim Platform General Features Clean Room ISO 7 (Class 10000) 2 Features: 30 Equipments 5 Laboratories Controlled Enviroment Conditions 1 SAS Service Zone Material Cleaning Room Control Panel Lab Connection Doors L1, L2, L3, L4 T=21⁰C ΔP=20mbar R.H. 45% L5 T=21⁰C ΔP=30mbar R.H. 35% Furnitures: Service Gases (N 2, O 2, Ar, Ar/H 2, Compressed Air), Vacuum lines, DI Water (15MΩ.cm & 18MΩ.cm) and Solvents (Acetone, Ethanol, Methanol, Isopropanol)
8 2. Nanoquim Platform Laboratories L1: Advanced Optical Lithography Laboratory Ellipsometer GESSE from Sopra Chemical Hood (Photolitography) Spin Coater SMA AC 6000 from SMA Optical Microscopy OPTIPHOT from Nikon Micro Writer from Durham Magneto Optics LTD. L2: Characterization at the Nanoscale Laboratory Ultrasonic Wire bonder 4526 from Kuliche & Soffa Profiler P16+ from KLA Tencor Profiler Nanopics 2100 from Nanopics IR-Spectrometer Vertex 70 from Bruker (IRRAS/PM-IRRAS) Optical Microscope from OPTIKA Binocular Loupe from Labbox
9 2. Nanoquim Platform Laboratories L3: Physico-Chemical Characterization and Nanofabrication Laboratory Reactive Ion Etcher RIE 2000 CE from SBT South Bay Technology inc. Evaporation System Auto 306 from Boc Edwards Atomic Layer Deposition System Savannah from Cambrige NanoTech Centrifugue Allegra 64R from Beckman Coulter Rheometer HAAKE RheoStress RS600 from Thermo Electron Corporation Contact Angle Measuring System DSA 100 from KRÜSS Fluorimeter Perkin Elmer LS45 Ion Miller & DC-Sputtering System from TSST Nano Dip Coater ND-DC from NADETECH
10 2. Nanoquim Platform Laboratories L4: Chemical Synthesis Laboratory Microwave Oven with controlled atmosphere Discover Explorer Hybrid from CEM 6 Chemical Hoods with Rotavapour, Vacuum Line and Spinner Glove Box GP (Concept)-II-P from JACOMEX L5: Highly control Humidity Laboratory SPINNER SMA AC 6000 from SMA Furnace Rapid thermal annealing (RTA) from AS-micro Tubular furnace ST from HOBERSAL Inert Atmosphere Chamber from TRALLERO Dip Coater DipMaster-201
11 3. Laboratory Rules People who enter to the laboratories must use specifics clothes Cap 2 User s SAS Coat 1 SAS (Special Airlock System) Service Zone Material Cleaning Room Control Panel Lab Connection Doors Glasses Gloves Overshoes Pants
12 3. Laboratory Rules Gowning Protocol S A S Z O N E 1 To Clean Room 1 2 SAS Zone 2 Take the suit from the wardrope Put on the hair cover SAS Zone 1 3 Put on single-use shoe covers over your street shoes 4 Put on pan and coat. Make sure suit does not touch the floor while putting it on. Outside 5 Once gowning is complete cross over zone 2 of the SAS.
13 3. Laboratory Rules Gowning Protocol S A S Z O N E Put on clean room shoe covers. Walk across the sticky carpet and enter to the clean room Inside the Cleanroom 8 Once you are in the cleanroom put gloves and glasses
14 3. Laboratory Rules Specific Rules of Clean Room Do not eat food, drink beverages in the laboratory (no chewing gum!) Do not run or walk fast inside of laboratories Do not make jokes Do not use cosmetics products, paper towels or tissues Do not entry personal objects inside of laboratories Do not comb or handle your hair in SAS areas Do not entry if you are ill Do not use clean room clothes outside of laboratories Do not store a lot of materials/samples in the laboratories Do not enter or take out anything without permission Minimize the contamination (how??) It is forbidden to enter material that remove particles like cotton, wool, cork, powder chemical substances ask to technicians personal It is forbidden to enter laboratory material ask to technicians personal
15 3. Laboratory Rules Specific Rules of Clean Room Always wear appropriate protection (safety glasses, special clothes for HF process) Always use clean room gloves Ask about the residues generates Only use special paper of clean room Only use pen to write Maintain a safe and healthful environment Keep working area CLEAN and TIDY Experiments must be personally monitored What can we do? To enter our tweezers and our samples. The samples should be inside a clean box without paper or others particles To use computers in order to write process or results
16 3. Laboratory Rules HF Protocol It is mandatory to read and firm the HF protocol Aprox.35% and Aprox.6.5% The use and the access to the HF solutions into the Nanoquim Platform Labs is not free. As general rule, user who wants to use HF must be authorized. It is mandatory to wear special suit while using HF. It is not allowed to use HF alone, always with a technician.
17 4. Safety at Laboratories READ THE SAFETY AND HYGIENE WEB PAGE: Know: 1) which are the resources available in the surrounding we are operating 2) what to do in case of an emergency 3) what are the hazards and risks you could be exposed to, in general in the Institute and in particular where you are working In case of EMERGENCY, KEEP CALM In each laboratory there is a telephone. If You Have Any Doubt Please Ask!!! CALL 5+DIAL Or Technicians CALL 335
18 4. Safety at Laboratories EMERGENCY EXITS PARTIAL EMERGENCY: The alarm sounds and soon is disconnected: NO action necessary, the emergency team will act. 1 2 meeting point SAS Service Zone Material Cleaning Room Control Panel Lab Connection Doors GENERAL EMERGENCY: An intermittent alarm sounds. Close doors and go to the meeting point (in front of the stairs). Leave the Clean Room clothes in SAS area. Await instructions from the head of the emergency team. EVACUATION: A continuous alarm sounds. Close doors and go to the concentration point (outside of the Institute) without taking off Clean Room clothes.
19 4. Safety at Laboratories SAFETY IN THE LABORATORIES IN CASE OF ACCIDENT EMERGENCY SHOWERS EYES WASHER 2 1 SAS Service Zone Material Cleaning Room Control Panel Lab Connection Doors KNOW the location and operating procedures of all safety equipment: Emergency Showers. The Safety Shower and Eyes Washer gives an immediate deluge of water that dilutes and washes away harmful materials, such as caustic, acids.
20 5. Management Nanoquim Platform
21 5. Management Nanoquim Platform Clean Room Organization Nanostructuration Platform Committee T. Puig : Dept. Materials Superconductors i nanoestructuració a gran escala (Responsable científico del Servicio) M. Mas : Dept. Nanociència Molecular i materials orgànics S. Ricart : Dept. Materials Moleculars i Supramoleculars Ll. Balcells : Dept. Materials Magnètics i les seves aplicacions A. Goñi : Dept. Materiales Nanoestructurats R. Palacín : Dept. Química de Sòlids M. Gich: Dept. de Cristal.lografía N. Romà: Técnico responsable de la Plataforma Technicians (General Phone 335) Neus Romà Tel (364) Luigi Morrone Tel (363) Marta Riba Tel (365) Oriol Sabater Tel (365) Users
22 6. User Type and Equipment Booking Request User por parte del tecnico (perfomed by the technician): User who demands a Clean Room service to the technicians (without the user participation). Important! This is not the case of ICMAB users. ICMAB users have to be trained to be equipment self-user. User con soporte tecnico (with technical support): User with technician support. Training for ICMAB users. Booking 48hrs Experiment User autousuario (self-user): User without technician support. Booking 12hrs Experiment
23 Plataforma de Nanoquim Gràcies per la vostra atenció Thank you.
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