E6700 Bench Top Evaporator Turbo Pumped Operating Manual

Transcription

1 E6700 Bench Top Evaporator Turbo Pumped Operating Manual Document Number OM-E6700 Issue1 (01/02) For technical and applications advice plus our on-line shop for spares and consumable parts visit

2 Quorum Technologies Ltd is the owner and manufacture of the preparation equipment. QUORUM TECHNOLOGIES LTD 1 & 3 Eden Business Centre South Stour Avenue ASHFORD Kent, UK TN23 7RS range of EM Tel: +44(0) Fax: +44(0) sales@quorumtech.com Web : For further information regarding any of the other products designed and manufactured by Quorum Technologies, contact your local representative or directly to Quorum Technologies at the address above. Carbon and Sputter Coaters Plasma Reactor for ashing and etching High Vacuum Bench Top Evaporators Cryo Transfer Systems Critical Point Dryers Service and Spares For technical and applications advice plus our on-line shop for spares and consumable parts visit Disclaimer The components and packages described in this document are mutually compatible and guaranteed to meet or exceed the published performance specifications. No performance guarantees, however, can be given in circumstances where these component packages are used in conjunction with equipment supplied by companies other than Quorum Technologies Quorum Technologies Ltd. Company No Registered offices Unit 19 Charlwoods Road, East Grinstead, West Sussex. RH19 2HL.

3 OM-E6700 Contents 1 Contents 1.1 Manual Layout This Operating Manual is divided up into the following major section, each chapter dealing with specific topics, as follows: Chapter 1 - Contents Chapter 2 - Health and Safety General section which applies to all Quorum Technologies Polaron products detailing the very important issues of Health and Safety applicable when using sample preparation equipment. Chapter 3 - Introduction Introduces this manual. Chapter 4 - General Description Identifies each of the equipment items and provides an overview of their functions and how they work. Chapter 5 - Installation Instructions on how this Instrument should be installed and the connections which should be made between the equipment items. Chapter 6 - Operation Instructions on how to start-up and run the instrument. Chapter 7 - Maintenance Instructions on how to check the system is functioning correctly, and how to change consumable items. Details of appropriate Spare parts. Chapter 8 - Fault Finding Information on how to identify faults in the system and how to rectify these faults. Chapter 9 - Agents List of main agents supporting the Quorum Technologies product range. Chapter 10 - Index Issue 1 3 E6700 Evaporator (Turbo Pumped)

4 Contents OM-E Chapter Contents Chapter 1 - Contents Manual Layout Chapter Contents Illustrations Tables... 6 Chapter 2 - Health and Safety Control of Substances Hazardous to Health (COSHH) Safety Policy Conformity Servicing Disclaimer Operators and Service Engineers Hazard Signals and Signs Hazard Signal Words Hazard Labels used on Equipment Hazard Warning Labels used in Equipment Manuals Instrument Functionality Signs Serious Damage to Instruments Hazard to Operator Risk Analysis Personal Operational Risks Hazardous Materials Good Working Practices E6700 Coater Specific Safety Hazards Contamination Chapter 3 - Introduction Return of Goods Returns Procedure Chapter 4 - Description Equipment Additional Requirements Optional Components Overview Technical Specification E6700 Coater Specification Physical Description Description of Optional Components Pumping Requirements Interlocks E6700 Panel Details E6700 Turbo Controller, Front Panel Controls E6700 Vacuum Panel Controls E6700 Evaporation Power Supply Panel Controls E6760 High Voltage Power Supply E6700 Evaporator (Turbo Pumped) 4 Issue 1

5 OM-E6700 Contents Chapter 5 - Installation Unpacking Checklist Preparation E6700 Installation Connections Standard Work Chamber Jigging Installation of Sputtering Set Installation of FT7690-ET Film Thickness Monitor Installation of E6762 Glow Discharge Ring Chapter 6 - Operation Pump Down Procedure Vacuum Monitoring Vent Procedure Carbon and Metal Evaporation Loading the Carbon Evaporation Source Loading the Filament Holder Evaporation of Carbon Evaporation of Metal Sputtering Coating Process Sputter Coating Specimens Sputter Coating Specimens with FTM Glow Discharge Attachment Glow Discharge AC Clean up Process Chapter 7 - Maintenance Maintenance - General Cleaning Vacuum Chamber Cleaning Fuses Spare Parts Chapter 8 - Fault Finding Trouble Shooting / Fault Finding Fault Prevention Chapter 9 - Agents Chapter 10 - Index Issue 1 5 E6700 Evaporator (Turbo Pumped)

6 Contents OM-E Illustrations Figure Hazard Warning Symbols... 8 Figure International Warning Symbols... 9 Figure Typical Signs as shown in this Manual... 9 Figure Typical Signs as shown in this Manual... 9 Figure Typical Warnings, as shown in this Manual... 9 Figure E6700 Evaporator Figure Rotary Planetary Stage Figure Rotating Specimen Stage Figure Sputtering Head and other Accessories Mounted on Standard Jigging 17 Figure Low Angle Rotary Shadowing Figure Glow Discharge Figure FT7690-ET Film Thickness Monitor Figure E6700 Turbo Controller, Front Panel Controls Figure E6700 Vacuum Panel Figure E6700 Evaporation Power Supply Panel Figure E6760 High Voltage Power Supply Figure E6700 Service Connections Figure E6700 Baseplate Hole Designations Figure Standard Jigging with Glow Discharge Ring Fitted Figure Standard TEM Jigging Figure Arrangement of Carbon Rods in Evaporation Source Figure Clamping of Filament Holder Tables Table Personal Operational Risks Table E6700 Turbo Controller, Front Panel Control Descriptions Table E6700 Front Panel Controls Table E6700 Evaporation Power Supply Panel Controls Table E6760 High Voltage Power Supply Panel Controls Table Fuse Values and Positions Table Spare Parts Table Trouble Shooting Table Fault Prevention E6700 Evaporator (Turbo Pumped) 6 Issue 1

7 OM-E6700 Health and Safety 2 Health and Safety Safety is very important when using any instrumentation and this chapter should be read by all users of our equipment. This section of the Manual applies to all surface analysis and surface preparation equipment supplied by Quorum Technologies Polaron range of products, not just the particular instrument for which the manual refers. Included in this chapter are details on warning notations, good working practices and information on European Community (EC) legislation regarding Control Of Substances Hazardous to Health (COSHH) and risk analysis. 2.1 Control of Substances Hazardous to Health (COSHH) The E.C. legislation regarding the Control of Substances Hazardous to Health requires Quorum Technologies to monitor and assess every substance entering or leaving their premises. Consequently any returned goods of whatever nature must be accompanied by a declaration form available from Quorum Technologies, reference number SP-100. Without this declaration Quorum Technologies reserves the right not to handle the substance/item. Also in accordance with E.C. regulations we will supply on request hazard data sheets for substances used in our instruments. 2.2 Safety Policy This section contains important information relating to all health and safety aspects of the equipment. As such it should be read, and understood, by all personnel using the instrument whether as an operator or in a service capacity. Quorum Technologies is committed to providing a safe working environment for its employees and those that use it's equipment and conducts its business responsibly, and in a manner designed to protect the health and safety of its customers, employees and the public at large. It also seeks to minimise any adverse effects that its activities may have on the environment. Quorum Technologies regularly reviews its operations to make environmental, health and safety improvements in line with UK and European Community legislation. The equipment has been designed as free-standing bench mounted instruments. Quorum Technologies cannot be held responsible for any damage, injury or consequential loss arising from the use of its equipment for any other purposes, or any unauthorised modifications made to the equipment. All service work carried out on the equipment should only be undertaken by suitably qualified personnel. Quorum Technologies is not liable for any damage, injury or consequential loss resulting from servicing by unqualified personnel. Quorum Technologies will also not be liable for damage, injury or consequential loss resulting from incorrect operation of the instrument or modification of the instrument. 2.3 Conformity This instrument is supplied in a form that complies with the protection requirements of the EC Electromagnetic Compatibility Directive 89/336/EEC and the essential health and safety requirements of the low voltage directive 72/23/EEC both as amended by 92/31/EEC. Any modifications to the equipment, including electronics or cable layout may affect the compliance with these directives. Issue 1 7 E6700 Evaporator (Turbo Pumped)

8 Health and Safety OM-E Servicing Disclaimer All service work on the equipment should be carried out by qualified personnel. Quorum Technologies cannot be liable for damage, injury or consequential loss resulting from servicing from unqualified personnel. Quorum Technologies will also not be liable for damage, injury or consequential loss resulting from incorrect operation of the instrument or modification of the instrument Operators and Service Engineers A normal operator of the equipment will not be trained in or qualified for service work on the equipment and may cause a hazard to himself/herself or others if such work is attempted. Operators should therefore restrict themselves to the normal operation of the equipment and not by removing covers from the electronic equipment or dismantling of the instruments. Service Engineers who are suitably trained to assess and isolate electrical, mechanical and vacuum hazards should be the only personnel who access the equipment. 2.5 Hazard Signals and Signs Hazard Signal Words The standard three hazard signal words are defined as follows: DANGER - imminently hazardous situation or unsafe practice that, if not avoided, will result in death or severe injury. WARNING - potentially hazardous situation or unsafe practice that, if not avoided, could result in death or severe injury. CAUTION - potentially hazardous situation or unsafe practice that, if not avoided, may result in minor or moderate injury or damage to equipment Hazard Labels used on Equipment Several hazard symbols may be found on the equipment, they are shown below with their meaning: Caution, risk of electric shock Caution (refer to accompanying documents) Easily touched higher temperature parts Warning, risk of electric shock Figure Hazard Warning Symbols E6700 Evaporator (Turbo Pumped) 8 Issue 1

9 OM-E6700 Health and Safety Hazard Warning Labels used in Equipment Manuals The international warning signs used in equipment manuals as shown in Figure 2.2. Figure International Warning Symbols Where appropriate these are used when a specific identifiable risk is involved in either using or maintaining the instrument. These take the form of warning triangles or signs with a graphical description of the hazard Instrument Functionality Signs CAUTION Do NOT depress button P as this will change the program Figure Typical Warning sign as shown in this Manual This typical sign applies to cautions where there is a risk to the functionality of equipment due to incorrect operation. These cautions or warnings will be contained in a box and be accompanied by a circular warning symbol as shown in Figure Serious Damage to Instruments WARNING Do NOT operate without first filling the reservoir with water as this will damage both the pump and the heater. Figure Typical Warning sign as shown in this Manual This typical caution sign is used where serious damage will be caused by incorrect operation of instrumentation. They will follow the same form as functionality warnings but with a triangular warning symbol as shown in Figure Hazard to Operator WARNING HAZARD TO HEALTH! Potentially lethal voltages are used in this equipment. Before making / breaking connections to the equipment, ensure power is off and that it is safe to proceed. Figure Typical Warning as shown in this Manual These warnings will generally occur in relevant installation and maintaining sections where there exists a potential hazard to the engineer working on the instrument. They will take the form of the triangular warning symbol accompanied by an international warning sign and bold type lettering beginning with WARNING-HAZARD TO HEALTH! as shown in Figure 2.5. Issue 1 9 E6700 Evaporator (Turbo Pumped)

10 Health and Safety OM-E Risk Analysis Personal Operational Risks The following is a list of tasks carried out by both the operator and service engineer where recognised risks have been observed, listed is the personnel protection equipment (PPE) which is suggested for use for various tasks on any surface analysis equipment and systems: Task Carried out by Nature of Hazard Recommended PPE Cleaning of parts / samples with isopropanol (IPA) Operator / Service engineer Splash hazard to eyes, drying of skin Protective goggles, protective gloves. Use of Liquid Nitrogen in sample cooling etc. Lifting of Heavy Items Operator / Service engineer Burn risk Thermally protective gloves and goggles should be worn. Service engineer Dropping on foot. Protective footware Hazardous Materials Table Personal Operational Risks Isopropanol (IPA) For certain service tasks isopropanol is suggested for cleaning components before use in the vacuum system. It should be noted that isopropanol is a flammable liquid and as such should not be used on hot surfaces. In addition it is recommended that protective gloves be worn when using isopropanol. Compressed Air Compressed air can be a potential hazard if handled inappropriately. A compressed air line may be fed from some instruments to the customers supply, and the customer should ensure that this and any other service pipes and cables are maintained in good condition. Nitrogen, Argon and Helium Gas Supplies Instruments may use nitrogen, argon or helium gas supplies for their operation, the customer is responsible for maintaining the supply to the instrument. This supply should be regulated and kept to the lowest pressure and flow rate as is practical to minimise the effects of any leaks. Hazardous Gases Quorum Technologies has no control over the gases used within the system. It is therefore viewed as the customers responsibility to assess the hazards involved and take appropriate precautions when using explosive, toxic or corrosive gases or gases which may result in hazardous products as a result of a chemical reaction. E6700 Evaporator (Turbo Pumped) 10 Issue 1

11 OM-E6700 Health and Safety 2.7 Good Working Practices It is essential that good hygienic working practices are adopted at all times especially in an ultra high vacuum or cleanroom environment and are generally of the Common sense type. Some simple good practice rules are: If in doubt don't. If in doubt ask. When handling solvents wear face mask, gloves, apron and work only in a well ventilated area. Mop up any spillages immediately. When handling or decanting mineral oils wear protective clothing. Aerosols of mineral oils, such as that produced by gas ballasting, can prove to be hazardous and an exhaust is recommended. Before attempting to service electrical apparatus, isolate from the mains. Treat all unknown substances as hazardous. Dispose of substances in an appropriate manner. Use the correct tool for the job. Keep a straight back and bend from the knees when lifting heavy objects. Wear protective clothing when using liquid nitrogen. Affix pressurised gas cylinders firmly to walls or racks. Use the correct regulating valves on gas cylinders and always transport cylinders using the appropriate specialist trolley. Obey safety regulations regarding lifts, hoists and machine tools. Always make sure you understand a procedure well before attempting it for the first time. 2.8 E6700 Coater Specific Safety Hazards The following Safety Hazards are specific to the E6700 Evaporator. The Power Supply fitted to the E6700 Evaporator supplies 10 Volt at 100 Amp for carbon coating and 20 Volt at 50 Amp for metal evaporation. If the E6760 High Voltage power supply is supplied, This unit can supply outputs of up to 3kV at 50mA. In the event of a mains failure the pump will stop, however, when the mains supply is restored the pump will start up again. Therefore in the event of mains failure always switch the controller off before breaking the vacuum and examining the pump. All accessory power supplies are vacuum interlocked for operator protection and cannot be energised unless the chamber is under vacuum Contamination Contamination can seriously affect the evaporation process. To reduce the possibility of contamination by airborne particles, minimise the time the vacuum chamber is open to the atmosphere. Issue 1 11 E6700 Evaporator (Turbo Pumped)

12 Introduction OM-FT7690-ET 3 Introduction This manual is intended for all users of the E6700 Evaporator manufactured by Quorum Technologies from the POLARON range and provides information on the installation, operation and maintenance of the instrument. Please note that the servicing and maintenance procedures should only be carried out by qualified service personnel and it is essential that all users should read the Health and Safety section of this manual. 3.1 Return of Goods If goods are to be returned to Quorum Technologies for repair or servicing the customer should contact their local distributor or the factory direct before shipment. A "Returns Authorisation Number" should be obtained in advance of any shipment. This number is to be clearly marked on the outside of the shipment. Complete the returned equipment report form, number SP106 with as much detail as possible and return with the goods. All returned goods are to be accompanied by a completed "Returned Goods Health and Safety Clearance" form SP-100 attached to the outside of the package (to be accessible without opening the package) and a copy of the forms should be faxed in advance to the factory. When goods are to be returned under warranty refer to the Warranty Claim, Repair and Returns Procedure form number SP-105 Copies of all these three forms can be found in the documentation pack supplied with the instrument or direct from Quorum Technologies, the details can be found on page two of this document. 3.2 Returns Procedure Warranty Claim Electronic and basic servicing capabilities exist at most in-country appointed agents, however all components are sold with a return to factory warranty (unless otherwise stated) which covers failure during the first 12 months after delivery. Returns must be sent carriage paid, Quorum Technologies will cover the return carriage costs. This covers defects which arise as a result of a failure in design or manufacturing. It is a condition of warranty that equipment must be used in accordance with the manufacturers instructions and not have been subjected to misuse. This warranty does not cover consumable items such as sputter coating targets and carbon evaporation material. To make a claim under the terms of this warranty provision contact the Customer Service Department at your local Quorum Technologies Representative in the first instance. Chargeable Repairs Always contact your in-country Quorum Technologies Representative in the first instance. They will be pleased to assist you and will be able to provide an estimate of repair costs, many offer local repair facilities. For routine repairs where down-time is not critical. The target standard return time at Quorum Technologies is 20 working days. Returns All returns to Quorum Technologies require the following procedure to be followed: 1. Contact the local Quorum Technologies Representative and request a Returns Authorisation Number. 2. Complete a Returned Goods Health and Safety form and returned equipment fault report form. 3. Attach a copy of the completed form to the outside of the package with the usual shipping documents. Packaging and Carriage All goods shipped to the factory must be sealed inside a clean plastic bag and packed in a suitable carton. If the original packaging is not available Quorum Technologies should be contacted for advice. Quorum Technologies will not be responsible for damage resulting from inadequate returns packaging or contamination of delicate structures by stray particles under any circumstances. All non-warranty goods returned to the factory must be sent carriage pre-paid, (Free Domicile). They will be returned carriage forward (Ex-Works). E6700 Evaporator (Turbo Pumped) 12 Issue 1

13 OM-E6700 Description 4 Description 4.1 Equipment Each E6700 Evaporator when supplied as a complete package includes the basic unit, a Gold Palladium target, a start up kit and operation manual. Items can be ordered as a full package or separately against the following numbers: E6700 Evaporator V complete, consisting of the following: LA670001D Evaporator V Start up Kit OM-E6700 Operation Manual E6700/110V Evaporator V complete, consisting of the following: LA670002D Evaporator V Start up Kit OM-E6700 Operation Manual Additional Requirements The following accessories are available from Quorum Technologies: E5005G E4860 Two Stage Rotary Pump, 90 l/m, 110/240 Volt, 50/60Hz, fitted with E5004 rotary pump oil mist exhaust filter. Heater/Chiller for control of the heating cycle, 0.2HP (400 Watts) extraction rate at 20 degrees centigrade Optional Components The E6700 Evaporator is available with the following optional accessories, only one of which may be fitted at a time. These accessories will normally be factory fitted at the time of ordering, the required option must be stated at this time. If more than one of these options are ordered the others will be supplied as kits. Alternatively, the Evaporator can be returned to the factory for upgrading. The following list also includes various attachment which can be used with the E6700 Evaporator. E6344 E6744 E6348 E6746 E6478 E6479 E6760 E6773 E6762 FT7690-ET E5511 Rotary planetary stage. Power Supply for E6344/E6348/E6478. Rotary Spin 6" Table. Rotary source shutter. Low angle shadowing attachment. Filament evaporation source (additional) kV Power Supply for sputtering/etching/glow discharge. Sputtering set with series II head, Au Target. Glow discharge work chamber jigging & baseplate electrode. Film thickness monitor with terminator. FTM jigging & crystal holder & feedthrough. Issue 1 13 E6700 Evaporator (Turbo Pumped)

14 Description OM-E Overview Modern electron microscopy demands a versatile coater that is space saving, flexible and reliable. The E6700 Turbo Molecular Bench Top Vacuum Evaporator and alternative E6300 Diffusion Pumped Bench Top Vacuum Evaporator offer this and more. Both models enable Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM) specimen preparation; for example carbon support films, preparation of replicas, shadowing, aperture cleaning, etc. SEM sputter coating can be done by the addition of a cool sputtering head and power supply. The E6700 Evaporator is presented in an attractive, compact housing with standard stainless steel base plate, TEM work chamber jigging set with bell jar and implosion guard. 4.3 Technical Specification E6700 Coater Specification Unit dimensions: Vacuum chamber: Weight: Power requirement: Baseplate: Power supply output: 820mm wide x 440mm deep x 520mm high (not including vacuum chamber). 250mm (10 ) diameter bell jar with implosion guard. 77 kg (170lbs). Available for either 230V (13 amp) or 110V (20 amp) operation at 50/60Hz. 300mm (12 ) diameter. Normal operation is up to 10V at 100A for carbon coating and 20V at 50A for metal evaporation. E6700 Evaporator (Turbo Pumped) 14 Issue 1

15 OM-E6700 Description 4.4 Physical Description The E6700 Turbo Pumped Bench Top Vacuum Evaporator has been designed as a cost and space saving alternative to the larger floor standing systems currently available. The use of a Turbo Molecular Vacuum pump, rather than the more usual Diffusion pump ensures Oil Free Vacuum Chamber environments, since Turbo pumps are essentially oil free and do not suffer from back streaming. Ease of operation, Rapid Pump Down; High Vacuum operation, (routinely 10-5 /10-6 mbar) and safe use are further benefits. Additional options increase the versatility of the equipment as required by the user. Most options can be customer retrofitted. The general layout of the system is shown in Fig 4.1 with optional glow discharge and source shutter. The pumping system is valveless and comprises of a 240 l/sec water cooled Turbo pump, coupled to an appropriate Dual Stage Rotary Vacuum Pump. High Vacuum is monitored by means of a Penning Gauge and a Pirani gauge is used to monitor both the chamber pressure and the Backing line. The E6700 is equipped as standard with TEM Jigging and Power Supplies for both Carbon and Metal Evaporation. Optional accessories include sputtering, glow discharge, low angle shadowing, film thickness monitoring etc. All accessory power supplies are vacuum interlocked for operator protection and cannot be energised unless the chamber is under vacuum. Figure 4.1: E6700 Evaporator Mounted on a 300mm (12 ) diameter Stainless Steel base plate, the standard TEM set includes resistive evaporation sources for 6mm diameter carbon rods, metal evaporation, tiltable specimen holder and base. The jigging is a one piece assembly making it easy to remove or modify. The base has 10 ports through which electrical, vacuum and water connections can be made. A rotating source shutter is also available. A 250mm (10 ) diameter bell jar provides the vacuum chamber. Issue 1 15 E6700 Evaporator (Turbo Pumped)

16 Description OM-E Description of Optional Components Rotary Planetary Stage E6344 The standard stage can be replaced with a rotary planetary stage. An additional power supply for the rotary stage is required. Carbon coating of SEM samples is necessary for X-ray analysis. The quality of carbon films produced by evaporation in a high vacuum is superior to that produced by using a carbon evaporation head on a sputter coater. However, in order to produce a multi-directional coating on the specimen in high vacuum (necessary for SEM observations), the samples must be tilted and rotated with respect to the evaporation source. For this reason a tilt and rotate attachment can be fitted onto the baseplate of the coater. The unit is powered by an electric motor which forms part of the vacuum feedthrough. An E6744 power supply is used to vary the rotational speed. Figure 4-2: Rotary Planetary Stage Rotating Specimen Stage E6348 The standard stage can be replaced with a rotating specimen stage. An additional power supply for the rotating specimen stage is required. This 150mm (6 ) Rotating Specimen Stage allows coating of large flat specimens (for example, up to 6 diameter wafers) with carbon or metal. The specimen simply rests on the table. The E6744 power supply can also be used for this stage to vary the rotational speed. Figure 4-3: Rotating Specimen Stage E6700 Evaporator (Turbo Pumped) 16 Issue 1

17 OM-E6700 Description Figure 4.4 Sputtering Head and other Accessories Mounted on Standard Jigging Rotary Source Shutter E6746 Filament Evaporation Source E6479 Additional to supplied Low Angle Rotary Shadowing E6478 This technique is used to improve the contrast of very thin structures prepared on carbon support films. The most usual application is for imaging DNA and RNA helices which are otherwise very difficult to prepare. The attachment replaces the normal jigging on the work chamber jigging uprights. The evaporation source is fixed onto a movable arm which can be precisely tilted between 0 o and 10 o with respect to the specimen table. The horizontal specimen is rotatable at variable speed using an E6445 external power supply. A shield is fitted over the evaporation filament so that shadowing is confined to the specimen table region. An alignment tool ensures the shadowing angle is correctly indicated on the angular scale. Figure 4-5: Low Angle Rotary Shadowing Issue 1 17 E6700 Evaporator (Turbo Pumped)

18 Description OM-E6700 Power Supplies E6445 Variable power supply used for E6344, E6348 and E6478. E KV, 50mA power supply used for sputtering/etching/glow discharge units E6773 and E6762. The output voltage is AC for glow discharge cleaning or selectable polarity DC for sputtering or etching. A needle valve is supplied to bleed gas, normally argon, into the system. A second timer is fitted as standard for timed coatings and this can be over-ridden by the FTM (when supplied). Sputter Coating Module E6773 Sputtering set with series II cool sputtering head module with a gold target and used in conjunction with the E6760 power supply and needle valve. Glow Discharge E6762 Glow discharge work chamber jigging and baseplate electrode. Glow discharge is a technique used to remove absorbed gases from chamber parts resulting in improved evacuation times and ultimate pressures. It can be used to change the normal hydrophobic properties of carbon films to hydrophilic. The chamber components consist of an insulating ring system and HV feedthrough and is used with the Model E6760 Power Supplies. Film Thickness Monitor Figure 4-6: Glow Discharge FT7690-ET The Quorum Technologies FT7690/ET Film Thickness Monitor and Controller operates by monitoring the frequency shift of an oscillating quartz crystal as evaporated material is deposited on the crystal. The frequency shift is related to the mass of the deposited material and thus calibration of the thickness depends on the area of crystal exposed (fixed by the design of the crystal holder) and the density of the material being deposited. A Quartz Crystal is placed in the vacuum work chamber of the coating instrument. One face of this Crystal is exposed towards the deposition source, such that, as material is deposited it will coat the Crystal. The Crystal is connected via a vacuum feed through to external components, the whole becoming an oscillator whose output is controlled by the frequency of Crystal oscillation. As material is deposited on the Crystal, so its frequency of oscillation is modified. This 'modification' is used to determine the thickness of material deposited. E5511. Figure 4-7: FT7690-ET Film Thickness Monitor A quartz crystal holder which is mounted on the jigging near to the substrate. E6700 Evaporator (Turbo Pumped) 18 Issue 1

19 OM-E6700 Description Pumping Requirements The work chamber may be evacuated to <10-5 mbar. This can be achieved in a reasonable time (depending on the cleanliness of the chamber) using a floor mounted 90 l/m two stage rotary pump, Preferably incorporating an anti-suck back device and fitted with an oil mist filter on the exhaust port. 4.5 Interlocks Safety interlocks are incorporated in the E6700 Evaporator to prevent evaporation power supplies being switched on with the chamber in a vented or open condition. Issue 1 19 E6700 Evaporator (Turbo Pumped)

20 Description OM-E E6700 Front Panel Details E6700 Turbo Controller Front Panel Controls The controls and indicators mounted on the E6700 Turbo Controller front panel are described below and identified in Figure 4.8 and described in Table 4.1. CONTROL or INDICATOR SPEED FAIL START/STOP STANDBY DESCRIPTION Figure 4.8 E6700 Turbo Controller, Front Panel Controls 4 Segment LED to indicate acceleration to full speed (i.e. converter is ramping up the output frequency). LED indicates that the converter has tripped off as a result of supply overcurrent, pump motor temperature too high, or pump body temperature too high. Blue latching push button push to start vacuum pumping sequence. Push to STOP (or reset). This switch includes a green LED which illuminated indicates vacuum operation. Grey latching push button. The controller standby function is used to run the pump at reduced speed, (approx. 70% of full speed). Running the pump at this lower speed has a beneficial affect on bearing lifetime. The standby function can be usefully used if the vacuum system is at ultimate pressure with low gas load, such as a system which must be kept under vacuum overnight or a weekend but without the need for the lowest possible pressure. An LED on the standby switch indicates which mode the pump is operating in. This is also necessary when using the sputtering assembly to allow for the use of argon gas. HEATER Flange heater ON/OFF facility (not available on E6700) Table 4.1 E6700, Turbo Controller, Front Panel Control Descriptions E6700 Evaporator (Turbo Pumped) 20 Issue 1

21 OM-E6700 Description E6700 Vacuum Panel Controls The controls and indicators mounted on the E6700 Vacuum front panel are described below and identified in Figure 4.9 and described in Table 4.2. Figure 4.9 E6700 Vacuum Panel. CONTROL or INDICATOR CURRENT PENNING PIRANI DESCRIPTION Meter to display the evaporation current CONT / OFF / PULSE Three position rocker switch used to select the mode of operation. Meter to display the high vacuum chamber pressure. OFF / 0N Illuminated rocker switch interlocked with chamber vacuum switch to prevent operation at poor vacuum levels. Meter to display the low vacuum chamber or backing pressure. CHAMBER / BACKING Toggle switch to select chamber or backing pressure monitoring. Table 4.2 E6700 Front Panel Controls Issue 1 21 E6700 Evaporator (Turbo Pumped)

22 Description OM-E E6700 Evaporation Power Supply Panel Controls A dual voltage/current evaporation supply is standard to the E6700. It is a conventional low voltage high current AC supply (LT). The outputs are routed in the three baseplate electrodes I, II and III via a rotary selector switch. The controls and indicators mounted on the E6700 Evaporation Power Supply front panel are described below and identified in Figure 4.10 and described in Table 4.3. Figure 4.10 E6700 Evaporation Power Supply Panel. CONTROL or INDICATOR DESCRIPTION SELECTOR SWITCH Four position Switch for baseplate electrodes 1, 2 and 3. Switch positions 1, 2 and 4 are 10V, 100A, Position 3 is 20V 50A. Position 3 and 4 correspond to the same baseplate electrode 3. POWER ON / OFF mains power toggle switch. VOLTAGE CONTROL Variable voltage selector, graduated Table E6700 Evaporation Power Supply Panel Controls. E6700 Evaporator (Turbo Pumped) 22 Issue 1

23 OM-E6700 Description 4.7 E6760 High Voltage Power Supply The controls and indicators mounted on the E6760 High Voltage Power Supply front panel are described below and identified in Figure 4.11 and described in Table 4.4. Figure 4.11 E6760 High Voltage Power Supply Panel. CONTROL or INDICATOR CURRENT ma DESCRIPTION KV VOLTAGE Variable Voltage selector. POWER SWITCH TIMER SELECTOR SWITCH Meter to display output current in ma, range 0-50 ma. Illuminated Mains power switch DIRECT ACC ETCH OFF SPUTTER OFF G/DIS Bypasses timer and allows continuous Direct operation Bypasses timer and allows operation with accessories. Reverse polarity etching facility for use with the E6773 Sputtering head. Off position Sputter Coating process used with the E6773 Sputtering head. Off position Glow Discharge facility for use with the E6762 glow discharge rings assembly. Table E6760 High Voltage Power Supply Panel Controls. Issue 1 23 E6700 Evaporator (Turbo Pumped)

24 Installation OM-E Installation Quorum Technologies has carefully packed the E6700 Evaporator instrument so that it will reach its destination in perfect operating order. Do NOT discard any packing materials until the unit has been inspected for any transit damage and the instrument has been used to the customers satisfaction. If any damage is found, notify the carrier and Quorum Technologies (or local agent) immediately. If it is necessary to return the shipment, use the packaging as supplied and follow the instructions in this manual for return of goods paragraph Unpacking Checklist The Equipment package will normally be despatched from the factory in two boxes. Inside the boxes the following will be found, refer and check each item off against the supplied packing list. E6700 Evaporator - packed in its box or crate with internal packaging. E6700 Glass Bell jar - packed with the rest of the equipment. E6700 START-UP kit - packed in a polythene bag. Optional Spares - packed individually. Documentation - Inserted in a folder, containing the operating manual and a standard forms pack Preparation (a) (b) (c) Ensure that a suitable mains electricity supply (110 Vac - 20amps or 240 Vac - 13amps, frequency 50/60 Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency. The units are supplied for either 230V or 110V operation at 50/60Hz. The power rating is 1.5KVA excluding the rotary pump. The rotary pump outlet is rated at 230V 10A or 110V at 16A. The 240V pump outlet uses a 3-pin plug ( ) which is supplied or 110V standard US plug (not supplied). Ensure that a suitable gas supply is available. Typically: A commercial cylinder of Nitrogen gas for venting and a cylinder of Argon gas (Zero Grade) for sputtering if required. Both cylinders should be fitted with two stage regulators in order to deliver gas at a pressure around 5-10 psi (0.5bar). Ensure that a suitable vacuum pump is available. Where a rotary pump is used, ensure that the rotary pump has been filled with oil, in accordance with the manufacturers instructions. The exhaust should be filtered or expelled to a safe area. All pumps supplied by Quorum Technologies are fitted with an exhaust filter. E6700 Evaporator (Turbo Pumped) 24 Issue 1

25 OM-E6700 Installation 5.2 E6700 Installation WARNING HAZARD TO HEALTH! Potentially lethal voltages are used in this equipment. Before making / breaking connections to the equipment, ensure power is switched off and that it is safe to proceed. WARNING HAZARD TO HEALTH! Precautions to be taken when lifting this equipment. Weight of unit is 77 Kilograms (170 lbs) (a) (b) (c) (d) Position the Evaporator Cabinet on a suitable level working surface, access to both front and rear of the cabinet are required. Clean the O ring gaskets using a cloth moistened with isopropanol. Position the top plate assembly on the glass cylinder. Position the vacuum pump as close as possible to the Evaporator Connections Before connecting either the Electrical Supply or Water Supply (where required) it is advisable to remove the rear access panel by unscrewing the two large fastenings in the top corners of the case, using a large screw-driver. Check tightness of water connections (if fitted) and check that all internal electrical plugs are correctly placed and secure. When satisfied, close the rear panel. All necessary service connections are mounted on the side or rear panels and appropriately labelled. See figure 5.1. Water Water fittings are of the collet type and require 6mm diameter nylon tubing (as supplied where necessary). The tubing should be inserted in to the fitting until a positive stop is felt. A water flow of 30 Litres/hour is required which can be provided either form a mains water supply or from a recirculating chiller, model E4860 is recommended. Vacuum The vacuum connection is made by a flexible vacuum hose direct from the Rotary pump to the vacuum nozzle through the rear panel. The Rotary pump must be charged with oil in accordance with the manufacturers instructions. Venting The system may be vented to Air or to Dry nitrogen for TEM work or to argon for SEM work. The use of nitrogen greatly improves pump down time by eliminating water vapour from the vacuum system. The vent connection is mounted on the rear panel and should be connected to an appropriate gas cylinder regulated at approximately 7.5 psi (0.55 bar). Electrical Electrical connection are made via the three pin socket in the rear panel. Finally connect the instrument power cord to an appropriate wall-socket. Testing Mount the chamber on the base plate, ensuring that the surfaces of both the baseplate and the chamber L -gasket are clean, dry and free from dust, hair etc. The system is now ready for a check of Vacuum Performance. The unit should be allowed to pump the work chamber to high vacuum for at least fives hours. Failure to reach a vacuum of better than 10-5 mbar within 5 hours indicates a vacuum leak, which must be located and cured before installing the chamber jigging. Issue 1 25 E6700 Evaporator (Turbo Pumped)

26 Installation OM-E6700 Film Thickness Monitor Connection Rota Coater Speed Adjustment Knob and On/Off Switch Rotary Pump Hose Rotary Shutter Control Figure E6700 Service Connections E6700 Evaporator (Turbo Pumped) 26 Issue 1

27 OM-E6700 Installation 5.3 Standard Work Chamber Jigging Figure 5.2 shows the general arrangement of the electrode holes in the baseplate. The chamber jigging is a complete assembly and should be bolted to the baseplate with 3 bolts and spacers, at positions A, B and C. The orientation of the jigging as shown in Figure 5.2 which illustrates a typical arrangement. The standard TEM Jigging includes 1 Carbon Evaporation Source, 1 filament holder, and one specimen tilting table. The electrical connections to the evaporation sources, are as follows :- Carbon evaporation source Electrode 1 Hole position 4 Selector Switch position 1 Filament holder Electrode II Hole position 6 Selector Switch position 3 N.B. (a) Selector switch positions 1 and 3 only are used. (b) Additional carbon source or filament holder is connected electrically to Electrode III. Hole position 8 Selector switch position 2 Finally fit the bell jar and implosion guard, making sure the bell jar is flush with the baseplate, and both the L gasket and baseplate are clean and free of foreign matter. Arrangement of Electrode Holes in Baseplate of E6700 Vacuum Coater A, B and C are the blind tapped holes for the jigging assembly. Port No. Usual Function Holes in Baseplate 1 Pirani Gauge 2 Rotary Shutter 3 Sputtering Head Connections LT Electrode I (10V, 100A) 5 Penning Gauge LT Electrode II (10V, 100A) 7 AC Clean up 8 LT Electrode III (10V, 100A or 20V, 50A) Rota Cota 10 Film Thickness Monitor Figure Baseplate Hole Designations Note: If LT Electrode III is not required, AC clean up may be connected through Part Number 8. Issue 1 27 E6700 Evaporator (Turbo Pumped)

28 Installation OM-E Installation of Sputtering Set (a) (b) (c) (d) (e) (f) Disconnect from Mains Power Supply. Remove Bell Jar and Implosion Guard, open rear access panel as described in Installation section. Fit Argon Inlet through hole in rear of the left hand panel. Fit Argon Valve through hole in front of the left hand panel. Remove the brass screw from the top of the Pirani Gauge Manifold and replace it with the nipple adaptor provided. Connect the Argon inlet to the Argon Valve and the Argon Valve to the Nipple with the narrow bore tubing provided. Remove any convenient unused feedthrough and replace it with the high voltage feedthrough provided. The most convenient position is shown in figure 5.2. Remove the upper right hand front panel and install the E6760 High Voltage power Supply. Make the appropriate electrical connections and close the rear panel. Fit Sputtering Target assembly and connect the high voltage feedthrough. 5.5 Installation of FT7690-ET Film Thickness Monitor (a) (b) (c) (d) The lead from the FT7690-ET Film Thickness Monitor plugs directly into the side panel of the E6700 Evaporator into connection marked FTM Remove Bell Jar and Implosion Guard. Open rear panel as described previously and remove an unused feedthrough. Replace the feedthrough with the special unit supplied. The most convenient position is shown in Figure 2. Position the Crystal Holder at some convenient location and connect to the feedthrough. 5.6 Installation of E6762 Glow Discharge Ring (a) (b) (c) (d) Isolate the system from main power, remove the Bell Jar and Implosion Gauge and open the rear panel. Remove an unused feedthrough and replace with the high voltage feedthrough provided. The most convenient position is indicated in Figure 5.2. Fix the glow discharge ring assembly on the centre post of the jigging. Make the appropriate electrical interconnections and close the rear panel. E6700 Evaporator (Turbo Pumped) 28 Issue 1

29 OM-E6700 Installation Figure Standard Jigging with Glow Discharge Ring Fitted Issue 1 29 E6700 Evaporator (Turbo Pumped)

30 Operation OM-E Operation Ensure all services are connected and all the front panel switches are in the off position. Switch on the Main Power Isolator on the right hand side panel. 6.1 Pump Down Procedure (a) (b) CAUTION Contamination can seriously affect the sputtering process To reduce the possibility of contamination by airborne particles, minimise the time the vacuum chamber is open to the atmosphere. Turn on the cooling water supply. Depress Blue Start/Stop Button. The rotary pump will start immediately and the turbo Speed acceleration lights will be illuminated, NOTE: The water cooling system should be left running when the E6700 Evaporator is in operation. Should the system be vented and idle for long periods the cooling water should be turned off. This is to avoid condensation on the pump rotor and walls. During the pump down the following sequence of signals will be displayed on the front panel: (i) START/STOP led switches ON. (ii) The SPEED led s switch on as the turbo pump ramps up to speed. (iii) With the turbo pump at full speed, all four led segments will be lit. (c) If during the pump down the turbo pump trips into FAIL check the following :- (i) Check that the water cooling is operational if used or alternatively that the air cooling accessory is working. If the pump has been ramped or partially ramped several times in quick succession leave for several minutes to allow the motor to cool. (ii) If the cooling is operating normally then it is likely that the turbo pump was started when the pressure was too high or there is a vacuum leak in the system. To stop the turbo pump simply press the START/STOP switch. The led s on the START/STOP switch and the SPEED indicator will switch OFF. Stopping the turbo pump will automatically vent the system after a short delay. The turbo pump can be stopped and the system vented or restarted at any rotational speed. WARNING Mains failure during a mains failure the pump will stop, however, when the mains supply is restored the pump will start up again. Therefore in the event of mains failure always switch the controller off before breaking the vacuum and examining the pump Vacuum monitoring Switch the Pirani gauge to CHAMBER. When the needle reaches mid scale (10-1 mbar), switch on the Penning Gauge and switch the Pirani Gauge to BACKING to monitor the backing pressure. See figure 4.9. If the system has been open to air for a considerable time it will take a relatively long time for the ultimate chamber pressure to be achieved (better than 10-5 mbar). Better performance can be expected when the system has been vented to dry Nitrogen Vent Procedure To vent, press the START/STOP button. This switches off the turbo pump and automatically vents the system. The vent valve will remain open for a preset duration and then close to minimise gas usage. E6700 Evaporator (Turbo Pumped) 30 Issue 1

31 OM-E6700 Operation 6.2 Carbon and Metal Evaporation Evaporation sources are supplied with the equipment. They are of the well established resistive type. These can be used for carbon and precious metal evaporation or for microscope aperture cleaning. (Figure 6.1). Carbon Evaporation Source Metal Evaporation Filament Specimen Table Loading the Carbon Evaporation Source Figure 6.1 Standard TEM Jigging Two pieces of carbon rod are prepared, one having a blunt flat end, the other having been sharpened to a fine pointed end using a Carbon rod Shaper. The approximate lengths of each piece is shown in figure 6.2. The blunt shorter piece of carbon is clamped (finger tight) in the holder using socket screw B, so that the end protrudes a few mm into the slit. The end knob assembly, C, is pulled fully outwards and the other rod inserted. The rod is clamped using socket screw A, and the knob C is then released. In this way spring tension maintains contact between the two rods. The slit can be rotated by loosening the clamp screw in the shield so that carbon is evaporated in the direction of the substrate. Figure Arrangement of Carbon Rods in Evaporation Source Issue 1 31 E6700 Evaporator (Turbo Pumped)

32 Operation OM-E Loading the Filament Holder The filament ends can be inserted in the small holes in the holders (see figure 6.3). The filament can be tightened using the clamp screws. The filaments can then be loaded with particles of material to be evaporated. Alternatively a metal boat can be clamped and apertures to be cleaned can be placed in the hollow central area Evaporation of Carbon Figure Clamping of Filament Holder Samples to be coated are placed on the specimen table or baffle cover plate. The evaporation sources are loaded (See and 6.2.2) the bell jar and implosion guard is placed over the jigging and the E6700 Vacuum evaporator pumped down to < 5x10-4 mbar. (if Film Thickness Monitor is fitted, see section 5.5) Before use, the Carbon Rods must be degassed. The Electrode selector switch is set such that a 10V 100A supply is selected and the required evaporation source is active. The Evaporation switch is set to the left to select CONTinuous operation. The voltage control is then gradually increased until the tips of the carbon electrode begin to glow dull red, the vacuum pressure will also rise. This rise in system pressure indicates that gases are evolving from the carbon electrodes. The outgassing of the carbon electrodes should be done in stages to avoid overheating the source and tempering the internal spring. After 2 or 3 minutes of intermittent outgassing the vacuum pressure will recover showing that no more gas is being released. The evaporation switch should now be set to the PULSE position and the voltage control set to position 7 or 8. The PULSE button is depressed and released in short bursts (typicaly 1-2 seconds). The tip of the sharpened carbon rod becomes extremely hot and carbon is evaporated through the slit in the shield. The current meter records instantaneously the current through the carbon rods. The PULSE button is repeatedly depressed to increase the thickness of the evaporative coating on the specimen table or baffle cover plate. The shaped end of the carbon rod will eventually be consumed and the meter will then indicate a large increase in current. At this point the evaporation rocker switch is turned to the OFF position and the electrode voltage control set at 0. Completely evaporating the first stepped section of a shaped carbon rod will provide a simple method of reproducing the thickness of the carbon coating between subsequent runs Evaporation of Metal It is normal to configure the metal evaporation or filament source to electrode 3 to enable use of the 20V 50A power supply. Using the selector switch, set to electrode 3 and the 20V 50A setting. The voltage control should be set to 0 and the evaporation switch set to CONTinuous. The electrode voltage control is gradually rotated increasing the current through the filament. The filament will begin to glow and as the voltage is increased the material in the filament will begin to evaporate. After evaporation, reset the voltage control to 0 and the evaporation rocker switch to OFF. E6700 Evaporator (Turbo Pumped) 32 Issue 1

33 OM-E6700 Operation 6.3 Sputtering Sputtering, etching and glow discharge techniques can only be accomplished when the optional E6760 Power Supply is fitted and in conjunction with the appropriate chamber sources. In the case of Sputtering, the E6773 SEM work Chamber Sputtering Set, comprising the cool Sputtering head, the specimen holder appropriate to the electron Microscope to be used and the High Voltage Baseplate Electrode, an argon inlet and argon needle valve will be required. To set the system up for sputtering refer to Installation section Coating Process A metal film of uniform thickness between 50 and 300 Å is generally used for SEM investigations. Care must be taken to ensure the vacuum chamber is kept clean and free from contamination. Contamination, which can arise from the out-gassing of specimens, adhesives (especially Chlorohydrocarbon based solvents) and rubber gaskets, will adversely affect the quality and rate of sputtering. A measure of thickness can be obtained using the following equation: d = KIVt d The coating thickness in Angstrom units. K An experimentally determined constant based on: The metal being sputtered, The gas being used, 45 mm (approx.) target to sample distance. For gold used with argon, K = 0.17 approx. For gold used with air, K = 0.07 approx. I is plasma current, in ma. V is the applied voltage, in kv, (1 kv). t is the sputtering time, in seconds. For a typical sputtering, using gold in argon with a plasma current of 18 ma for 120 seconds: d = KIVt = 0.17 x 18 x 1 x 120 = 367 Å (approx. 3 Å / second) The uniformity of the coating thickness within the area of the specimen holder is better than 10% Sputter Coating Specimens (a) (b) (c) (d) (d) (e) Place specimens in specimen holder and place holder on the sample platform. Replace Bell Jar and Implosion Guard, ensuring surfaces are clean and free from dust, hair etc. Open Argon Cylinder and set to about 5 psi. Start Turbo pump and allow the system pressure to fall to <10-4 mbar. Switch off the Penning Gauge at this point. Depress STANDBY on the vacuum controller to reduce the pumping speed of the turbo pump such that it can operate with a high gas load. Open Needle valve and flush the chamber with Argon then adjust the needle valve to achieve a stable 10-1 mbar as indicated on the pirani CHAMBER vacuum gauge. (f) On the E6760 High Voltage power supply ensure that the VOLTAGE control is set to 0, both TIMER switches are in the up TIMER position and the SPUTTER / ETCH / GLOW DISCHARGE selector switch is set to an OFF position. (g) For control of Sputtering by timer proceed as follows :- (i) Set left hand TIMER switch to the DIRECT position. (ii) Set the required duration on the timer, which is calibrated from 30 seconds to 195 second in 15 second intervals. Issue 1 33 E6700 Evaporator (Turbo Pumped)

34 Operation OM-E6700 (h) (iii) (iv) (v) (vi) (vii) Set the SPUTTER / ETCH / GLOW DISCHARGE switch to SPUTTER Switch ON the E6760 High Voltage power supply. Slowly increase the VOLTAGE control until a plasma discharge is observed around the sputtering head in the chamber. Partially opening or closing the Argon leak valve will adjust the plasma current. Routine coatings may be achieved with the VOLTAGE set at 2.2KV and the current adjusted to 18-20mA. Higher resolution coatings will be obtained at lower voltages and currents, typically <1KV and 5 10mA. Set the TIMER / DIRECT switch back to timer, the plasma discharge will terminate. Press the START button on the TIMER module. The plasma discharge will again strike and the sputtering process will last for the duration of the timed period. It may be necessary to adjust the Argon leak valve to maintain a stable plasma current. (viii) At the end of the timed period the sputtering will stop, additional coating may be applied by repeating the timer operation with the same or an adjusted timer setting. (ix) With the sputtering process complete return the VOLTAGE control to 0, the SPUTTER / ETCH / GLOW DISCHARGE switch to an OFF position and finally switch off the E6760 High Voltage power supply. To remove coated samples, close the Argon leak valve, switch off the Turbo pump and wait for the system to vent automatically Sputter Coating Specimens with Film Thickness termination (a) (b) (c) (d) (e) (f) (g) (h) (i) (j) (k) (l) (m) Adjust the position of the Film Thickness Monitor crystal holder such that it is close to and in the same plane as the samples. The crystal should also be pointing towards the sputtering target. Mount the samples and set the system as in a-g, detailed above. Set left hand TIMER switch to the DIRECT position. Set the required duration on the timer, which is calibrated from 30 seconds to 195 second in 15 second intervals. Set the SPUTTER / ETCH / GLOW DISCHARGE switch to SPUTTER Switch ON the E6760 High Voltage power supply. slowly increase the VOLTAGE control until a plasma discharge is observed around the sputtering head in the chamber. Partially opening or closing the Argon leak valve will adjust the plasma current. Routine coatings may be achieved with the VOLTAGE set at 2.2KV and the current adjusted to 18-20mA. Higher resolution coatings will be obtained at lower voltages and currents, typically <1KV and 5 10mA. Set the TIMER / DIRECT switch back to timer, the plasma discharge will terminate. Set the TIMER / ACCessory switch to the ACC position. Press the START button on the Film Thickness Monitor. (Consult the separate FT7690-ET operating manual for detailed instructions). At the end of the terminate period the sputtering will stop. With the sputtering process complete return the VOLTAGE control to 0, the SPUTTER / ETCH / GLOW DISCHARGE switch to an OFF position and finally switch off the E6760 High Voltage power supply. To remove coated samples, close the Argon leak valve, switch off the Turbo pump and wait for the system to vent automatically. E6700 Evaporator (Turbo Pumped) 34 Issue 1

35 OM-E6700 Operation 6.4 Glow Discharge Attachment If samples are to be treated by Electron Bombardment, place the samples in the centre of the chamber and as low as possible. Position the Glow discharge rings about 15mm above the surface of the samples. If the Glow Discharge accessory is to be used for generally cleaning up the work chamber and jigging, position the Glow Discharge Rings about the mid point of the Bell Jar Glow Discharge AC Clean up Process (a) (b) (c) (d) (e) (f) Place specimens in specimen holder and place holder on the sample platform. Replace Bell Jar and Implosion Guard, ensuring surfaces are clean and free from dust, hair etc. Open Argon Cylinder and set to about 5 psi. Start Turbo pump and allow the system pressure to fall to <10-4 mbar. Switch off the Penning Gauge at this point. Depress STANDBY on the vacuum controller to reduce the pumping speed of the turbo pump such that it can operate with a high gas load. Open Needle valve and flush the chamber with Argon then adjust the needle valve to achieve a stable 10-1 mbar as indicated on the pirani CHAMBER vacuum gauge. (g) On the E6760 High Voltage power supply ensure that the VOLTAGE control is set to 0, both TIMER switches are in the up TIMER position and the SPUTTER / ETCH / GLOW DISCHARGE selector switch is set to an OFF position. (h) For control of Glow Discharge by timer proceed as follows :- (i) Set left hand TIMER switch to the DIRECT position. (ii) Set the required duration on the timer, which is calibrated from 30 seconds to 195 second in 15 second intervals. (iii) Set the SPUTTER / ETCH / GLOW DISCHARGE switch to GLOW DISCHARGE (iv) Switch ON the E6760 High Voltage power supply. (v) Slowly increase the VOLTAGE control until a plasma discharge is observed around the glow discharge rings in the chamber. Partially opening or closing the Argon leak valve will adjust the discharge current. Routine cleaning may be achieved with the VOLTAGE set at 1.5KV and the current adjusted to 40mA. (vi) Set the TIMER / DIRECT switch back to timer, the glow discharge will terminate. (vii) Press the START button on the TIMER module. The glow discharge will again strike and the clean-up process will last for the duration of the timed period. It may be necessary to adjust the Argon leak valve to maintain a stable discharge current. (viii) At the end of the timed period the glow discharge will stop, additional cleaning may be applied by repeating the timer operation with the same or an adjusted timer setting. (ix) With the glow discharge process complete return the VOLTAGE control to 0, the SPUTTER / ETCH / GLOW DISCHARGE switch to an OFF position and finally switch off the E6760 High Voltage power supply. Issue 1 35 E6700 Evaporator (Turbo Pumped)

36 Maintenance OM-E Maintenance For technical and applications advice plus our on-line shop for spares and consumable parts visit Maintenance - General WARNING HAZARD TO HEALTH! Potentially lethal voltages are used in this equipment. Before making / breaking connections to the equipment, ensure power is switched off on the the Electronics unit. (a) (b) The procedures listed in this chapter should only be done by persons who have had training and who have achieved a satisfactory knowledge of the necessary skills and techniques. If repairs entail the dismantling of any part of the vacuum system, care must be taken to ensure that it is not contaminated (by dust or fingerprints). (i) Always wear disposable plastic gloves. (ii) Do NOT handle internal surfaces. (iii) Whenever possible, cover to protect against dust. 7.2 Cleaning Use a damp cloth or proprietary equipment cleaner to remove surface grime from the outer surfaces of the cabinet and vacuum chamber. Finish with a dry lint free cloth to remove smearing Vacuum Chamber Cleaning Cleaning of the vacuum chamber is required if the interior of the chamber becomes contaminated, cleaning on a regular basis is unnecessary. The fact that the glass walls of the chamber becomes coated with target material and the sample cannot be seen, should not normally be considered reason to clean the system. If the system is contaminated by handling or air-born pollution, carry out the following procedure. For cleaning use a nylon abrasive pad (Scotchbrite or similar) and Cleaning fluid (Isopropanol or alcohol). (a) Ensure power and gas supplies to the Evaporator are set to OFF. (b) Remove the glass chamber. Unscrew and remove the stage assembly. (c) Lightly abrade all the accessible interior surfaces of the vacuum chamber to remove any deposits (not the target). Rinse with cleaning fluid. Cover cleaned components to prevent further contamination. (d) The vacuum and gas tubing cannot be readily cleaned, if these items are suspect or showing signs of ageing they should be replaced. (e) Reassemble the vacuum chamber components. E6700 Evaporator (Turbo Pumped) 36 Issue 1