Series 47 Vacuum Piping Heater System. Operation and Maintenance Manual

Transcription

1 Series 47 Vacuum Piping Heater System Operation and Maintenance Manual

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3 Series 47 Vacuum Piping Heater System February, 2002 Part # Revision B 47 Vacuum piping heater

4 Part # - Please fill in these nubers and have them readily Available when calling for service or additional information. (The part number can be found on your packing slip, and both the part number and serial number are located on the bottom side of the housing.) For more information or literature, contact: Vacuum Products Group of MKS Instruments, Inc sterling Drive Boulder, CO USA Phone: Fax: by Vacuum Products Group of MKS Instruments, Inc. All rights reserved. 47 Vacuum piping heater

5 Table of Contents Table of Contents Package Contents... 1 Symbols Used in this Manual... 2 Safety Precautions... 3 Cleaning... 4 General Specifications... 5 Base Station Feature and Control Locations... 6 Satellite Feature and Control Locations... 7 Typical Applications for the Series 47 Vacuum Line Heaters 8 About the Series 47 Vacuum Piping Heater System... 9 Installing and Using the Series 47 Vacuum Piping Heaters Installation Overview Detailed Installation Instructions Using the Heaters Serial Port Communications for Remote Mode Operations Overview Addressing Base Station Satellites Cable Pin Out RS-232 Serial Port RS-485 Serial Port Port settings: Series 47 Heater Software Software Features System Requirements User Interface Accessories/Part Replacement Vacuum piping heater

6 Troubleshooting Isolating a Ground Fault Product Warranty Notes Appendix A:... 1 Base Station Modbus Assignments... 1 Base Station... 2 Control Module NO Vacuum piping heater

7 Package Contents Before unpacking your Series 47 vacuum piping heater system, check all surfaces of the packing material for shipping damage. Be sure that your Series 47 vacuum piping heater system contains these items:! Series 47 heaters with satellite controllers (quantity specified on packing slip). The satellite controllers are temporarily secured to the heater with disposable plugs. Save at least one of these disposable plugs to be used in final installation. " Flange insulators (quantity specified on packing slip) # Coiled satellite cables (quantity and length specified on packing slip) $ Main power cable (one per base station) % 1 (or more) base station & ' Main tether cable (one per base station) This Operation and Maintenance Manual ( 1 CE Declaration of Conformity (not shown) Inspect the components for visible evidence of damage during shipment. If anything has been damaged, notify the carrier immediately. Keep all shipping materials and packaging for claim verification. Do not return the product to MKS. If any items are missing from the package, call MKS Customer Service at or MKS Instruments, Inc. Telephone (303) Sterling Dr. Toll-Free (800) (USA only) Boulder, CO Facsimile (303) USA Series 47 Vacuum piping heater system 1

8 Symbols Used in this Manual CAUTION: Risk of electrical shock. CAUTION: Refer to manual. Failure to heed message could result in personal injury, serious damage to the equipment, or both. Failure to heed message could result in damage to the equipment. Calls attention to important procedures, practices, or conditions. Class 2 Construction. Ungrounded equipment with double or reinforced electrical insulation. 2 Series 47 Vacuum piping heater system

9 Safety Precautions Do not use heaters outdoors or in an explosive environment. Electric shock or ignition of explosive vapors is possible. Heaters are rated IP40 according to IEC 529 Degrees of Protection Provided by Enclosures (IP code). IP40 is Protected against ingress of solid foreign objects greater than or equal to 1.0 mm in diameter and not protected against ingress of water with harmful effects. Heaters are designed for use with metal piping. Heater operating temperatures may exceed the melting point of other materials. Check specifications. Do not immerse the base station, satellite controller, or heaters in water or liquid of any kind. Electrical shock may result. Permanent equipment damage may also occur. Ground piping system according to U.S. National Electric Code or local requirements or both. For increased safety Series 47 base stations contain an integral Ground Fault Equipment Leakage Circuit Interrupter (GFELCI). Although grounded piping is not required, the performance of the GFELCI is enhanced and risk of electrical shock is further reduced when the piping is grounded. Heaters must be secured to piping before operation. Heaters may overheat, resulting in permanent damage, if not attached to piping. Also, heaters should only be used with piping of their assigned diameter. Follow hazardous chemical safety procedures specified by the chemical supplier when heating vacuum piping designed to conduct hazardous chemicals. Series 47 Vacuum piping heater system 3

10 Cleaning Clean base station, satellite controllers, cables and heaters with damp cloth and mild detergent. Do not immerse in water. There is a risk of electrical shock and damage to the equipment. Do not use solvents. Some of the plastic enclosures may be attacked. 4 Series 47 Vacuum piping heater system

11 General Specifications Electrical rating Electric duty cycle Pollution Degree Over-voltage category Environment Relative humidity Pipeline temperature Heater exterior surface Materials Weight Safety Agency Testing V~, 50/60 Hz, 12 A V~, 50/60 Hz, 12 A 6% to 85% depending on temperature set point and supply voltage 1 II Indoor use only 0% to 90 % non-condensing Adjustable 20 to 185 C in 1 degree increments. 20 to 80 C depending on temperature set point Base station: polycarbonate enclosure Satellite controller: polycarbonate enclosure Heater: molded silicone foam, fiberglass-reinforced silicone fabric, Teflon insulated wire Heater cables: polyurethane sheath, Teflon insulated core wires Base station: 0.65 kg Satellite controller: 0.05 kg Heater: 0.7 to 1.5kg CSA International, OSHA Nationally Recognized Test Lab (NRTL) Testing by CSA International and TUV Series 47 Vacuum piping heater system 5

12 Base Station Feature and Control Locations! Ground Fault Equipment Leakage Circuit Interrupter (GFELCI) "! " On/off switch with 12 A circuit breaker (12 AMP Max Current) # LED status indicators $ Base station address switch % Alarm relay terminal block & Output connector to satellite controllers. Attach main tether power cable here. ' AC power input. (IEC 320 receptacle) ( ) Dual RS-485 receptacles for digital communication with computer. RS-232 serial digital communication port. Male DB 9. # $ ' ( ) % & 6 Series 47 Vacuum piping heater system

13 Satellite Feature and Control Locations! " # $ % & Writable area for users. Typically used to record set point temperature or satellite address. Red LED status indicator: Flashing = temperature above set point. Steady = system error Green LED status indicator: Steady = normal range. Blue LED status indicator: Flashing = temperature below set point. Steady = off line. Connector pins for docking with heater. Label for part number ( ) and 6-digit serial number with bar code. ' 8 position dip switch for setting satellite control address (remote mode) or temperature set point (local mode) "! # % $ Top view of satellite controller & ' Bottom view of satellite controller Series 47 Vacuum piping heater system 7

14 Typical Applications for the Series 47 Vacuum Line Heaters Prevent solidification of ammonium chloride (NH 4 Cl) in a silicon nitride LPCVD system Prevent solidification of aluminum chloride (AlCl 3 ) in an aluminum etching system Reduce solid buildup in other semiconductor processes, such as titanium nitride, tungsten, and TEOS CVD Maintain uniform temperature environments in downstream semiconductor and related processes and equipment. 8 Series 47 Vacuum piping heater system

15 About the Series 47 Vacuum Piping Heater System Series 47 Vacuum Piping Heater System is an integrated electronically controlled line of heating jackets specially made for HPS components and valves. They have been designed for semiconductor processes to prevent solid buildup in vacuum systems while emphasizing personnel safety. These heaters reduce contamination, increase system uptime and product yield, and decrease scheduled maintenance. The Series 47 heaters are designed to be simple and quick to install. The set point temperature is adjustable from 20 to 185 o C in one degree increments. Each heater can be independently adjusted permitting easy correction of cold spots or the creation of a thermal ramp from one end of the line to the other. The system is operated in either local or remote mode. In local mode, the set point temperature is set by an 8-position dip switch located inside the satellite temperature controller. No computer is required and the set point can be changed at any time (power off). Remote mode requires a personal computer, but enables set point adjustment on the fly, data logging and enhanced diagnostics. To control the solidification of byproducts, such as ammonium chloride, a temperature of at least 125 o C needs to be maintained for the vacuum component system. The Series 47 heaters set at 150 o C will heat the system to a stable temperature well above this minimum. This will drastically reduce by-product buildup and system downtime, while achieving a low outside temperature, meeting today s more stringent corporate personnel safety standards. Molded silicone foam thermal insulation limits the outside temperature to 80 o C while the lines are being heated to stable temperatures as high as 185 o C. From room temperature, the heaters typically reach their set temperatures in less than 30 minutes. The heater s elastic, conforming shape and convenient snaps make installation and removal fast and easy. All materials used in the heaters and insulators are suitable for clean room use. Based on Class 1 clean room tests conducted at HPS, Series 47 heaters emit less than ten 0.7µm size particles per cubic foot per minute. As a safety feature, a high limit thermostat protects each heater. Series 47 Vacuum piping heater system 9

16 Installing and Using the Series 47 Vacuum Piping Heaters The Series 47 heater control system can be operated in either local or remote mode, but not both. 1. Installation Overview 1.1 Inspect pipe system and heaters 1.2 Install heaters 1.3 Set dip switches on satellite controllers 1.4 Daisy chain satellite controllers with satellite jumper cables. 1.5 Install base station and connect to satellite controllers with main tether power cord. 1.6 Remote mode only: connect RS-232 or RS-485 serial ports located on the base station to personal computer. Disposable Connector Main Power Cord (16ga) Main Tether Power Cord 10 Series 47 Vacuum piping heater system

17 1.7 Turn on base station. All satellites and base station(s) should illuminate the blue LED (off line). After 45 seconds, the base station(s) and satellites should come on line and show either a flashing blue LED (cold heaters) and/or green LED if the heaters happen to be at operating temperature. 1.8 Remote mode only: launch Series 47 Heater Software. 2. Detailed Installation Instructions 2.1 Inspect pipe system and heaters for damage. Make sure that there are no burrs or other protrusions on the vacuum piping that could cut the heater and expose a live heater element wire. 2.2 Install the heaters on the pipe. Make sure to match the heater to the part being heated. These are molded heaters specifically designed to heat piping of matching dimensions. In addition to diameter and length it is also important to match the bend radius for elbows. Fasten all of the snaps. The fit should be snug to ensure good thermal contact between the heater and the part to be heated. Only moderate insulation compression is needed. Do not use any other device to hold a heater in place. Series 47 Vacuum piping heater system 11

18 Heaters for bellows and flexible hose are designed for a loose fit to allow for modest bellows and hose movement. These heaters must be installed with the satellite control in the up position with respect to gravity. Failure to follow these instructions could lead to overheating and possible heater damage. Wrap and secure insulators around flanges. Correctly-sized flange insulators must be used for bellows or hose installation. Special flange insulators are available for covering connections from tubing to hose. Ground piping system according to U.S. National Electric Code (NEC), local requirements, or both. 2.3 Set the dip switches of the satellite controllers. Each satellite contains an 8-position dip switch that can be accessed from the bottom of the controller Close up of 8-position dip switch. In this case, the setting is C. As shown at the right, a bent paper clip works well to set the dip switch. The dip switch is physically capable of 256 settings ranging from 0 to 255 hexadecimal. Note that the value from 20 to 185 is the temperature in degrees C. The full assignment ranges are given in the table below: 12 Series 47 Vacuum piping heater system

19 Dip switch range (hexadecimal) Assignment 0 15 Satellite remote address (remote mode) Not allowed Temperature in o C and automatically puts the satellite in local mode Not allowed s s s s s s s s The least significant bit is at the left (position 1) and the most significant bit is at the right (position 8). Position 1 is the one s column, position 2 is the two s column, position 3 is the four s column, and so on up to position 8 which is the one hundred twenty eight s column. Up is on and down is off. The dip switch setting is the sum of the on positions. In this example we have = 150 which equates to a local temperature set point of 150 o C. Do not mix remote mode and local mode settings within a line of heaters. Satellite controllers operating in local mode will ignore commands sent from a remotely connected computer. Install heaters using factory supplied cables only. Failure to do so may cause heaters to fail prematurely. Series 47 Vacuum piping heater system 13

20 2.4 Daisy chain satellite controllers with satellite jumper cables. These cables are available in 3 lengths: short, medium, and long. Size Part number Length (unstretched stretched) Mm [inches] Short mm [ in] Medium mm [ in] Long mm 483 mm [ in] Release button Note that the satellite jumper cords act as a mechanical retainer to secure the satellite controller to the heater. The satellite controllers must be docked to the heater prior to plugging in the jumper cables. Do not exceed the stretch range listed in the table above or the cable will lose its ability to recoil to its original collapsed length. 14 Series 47 Vacuum piping heater system

21 2.5 Install base station and connect to satellite controllers with main tether power cord. The base station can be attached to a bench or metal frame using the integral mounting brackets. Any position is fine, but it is a good idea to mount the base station in a location where the status LEDs can be easily viewed. The base station can also be left loose and set on a desk or bench. Connect the main tether power cord to the base station and the other end to the string of satellite controllers. The main tether power cord can be connected to either end of the daisy chained satellite controllers. Insert a disposable connector in the last satellite to mechanically anchor it to its heater. Connect the main power cord to the base station and plug it into the power source. If the main power cord is supplied by the user, make sure that the cable is 16ga wire designed to carry 13 A. This cable has the same connector (IEC 320) as a personal computer power cord, but most computer power cords are made with smaller 18 ga wire that is limited to 10 A service. Series 47 Vacuum piping heater system 15

22 2.6 Remote mode only: connect the RS-232 or RS-485 serial ports located on the base station to the personal computer. Cable pin out is given in the section on Serial Port Communications. Set the base station address via the rotary switch located on the top surface of the base station. There are sixteen possible addresses: 0-9 and A-F. If one base station is being used, then any setting will work. If two or more are used, then each must be assigned a different address to avoid confusion. Local mode: there is no need to attach computer data cables to the RS-232 or RS-485 ports. The system operated in local mode will ignore any information sent to the serial ports on the base station. Likewise, there is no need to set the base station address switch. Any setting will work. 16 Series 47 Vacuum piping heater system

23 Using the Heaters 1. Turn on the main on/off switch. If not set already, reset the Ground Fault Equipment Leakage Circuit Interrupter (GFELCI) by pressing the black button. The blue LED indicators at both the base station and all satellite controllers should come on confirming that power is being applied. They will remain steady on for about 45 seconds while the system boots up. After initialization, the base station s blue LED should start to flash confirming that the system has successfully booted up, but that at least one heater is still below set point. In some cases, after the system is on-line, the green LED may turn on signifying that all heaters are already at their operating temperatures. Heaters typically reach their operating temperatures within 30 minutes and will indicate normal operation by lighting the green LED on each satellite. Once all of the heaters have reached their set points, the green LED at the base station will come on and the blue LED will turn off. If any heater is above its set point, the red LED on its satellite will flash indicating a high temperature. In turn, the red LED on the base station will also flash. On/Off Switch GFELCI LEDS Series 47 Vacuum piping heater system 17

24 A steady red LED indicates a system error. See the section on troubleshooting for help. Heaters must be secured to piping before operation. Upon startup, observe heaters closely for smoke, which indicates overheating of piping or an individual heater. I. If smoke is seen, shut down the system. II. Verify that operating temperatures are less than 185 o C before restarting. III. Check the heaters rated voltage. It must be consistent with the supply voltage. When installed in confined areas, some of the outside surface of a heater may reach temperatures higher than 80 o C. Touching these heaters will not cause harm due to the thermal insulation properties of the Series 47 heaters, which prevent excessive energy transfer. 2. Normal Operational Status. A steady green LED signifies the normal operating state, confirming that the system is powered up and that the heaters are operating at their designated temperature set points. 18 Series 47 Vacuum piping heater system

25 Indication Base Station Satellite Controller Steady Blue Flashing Blue Off line: - System is probably booting up (45 seconds) - If accompanied by a steady red LED then there is also a system error At least one heater is below temperature set point Off line: - Satellite is probably booting up - Dip switch incorrectly set to a not allowed setting (See dip switch setting procedure) - If accompanied by a steady red LED then there is also a system error Attached heater is below temperature set point Steady Green Normal operation: all heaters are at set point Normal operation: attached heater is at set point Flashing Red At least one heater is above temperature set point Attached heater is above set point Steady Red (can only be cleared by cycling power) System error: - Bad memory, - No satellite controllers attached, - More than 16 satellite controllers attached, - At least one satellite has a system error System error: - Bad memory, - Open or shorted temperature sensor 3. Diagnostics. Series 47 heaters provide basic level diagnostic information at the satellite controllers and base station via colored LEDs: 3.1 More elaborate diagnostic reporting is available in remote mode operation. For example: temperature set point adjustment, actual operating temperature, alarm window sizing, data logging, and more is available via a personal computer equipped with data cables and MKS Series 47 Heater Software. Series 47 Vacuum piping heater system 19

26 3.2 In some cases it is desirable to hard wire a simple go/no-go alarm into a user s system. There is an alarm relay with electrically isolated contacts available at the base station for this purpose. The relay can be used to actuate any low voltage devices such as an audible alarm, a visual display, or supply a voltage signal to a user s computer. The relay is a single pole double throw (SPDT) device - it has one common terminal and a normally open (N.O.) contact and a normally closed (N.C.) contact. The relay closes the normally open contact whenever there is an alarm condition reported at the base station. Alarm relay Do not exceed the relay contact rating of 30 VAC or 30 VDC maximum. The current rating is 6 amps. 20 Series 47 Vacuum piping heater system

27 Serial Port Communications for Remote Mode Operations 1. Overview The Series 47 heater system supports RS-232 and RS-485 serial port communications via the base station. Remote mode enables system monitoring, set point adjustment, data logging, and provides an assortment of diagnostic tools. RS-232 permits the connection of a single base station that in turn supports up to 16 heaters. RS-485 permits the connection of as many as 16 base stations to a single personal computer. Potentially, as many as 256 heaters could be monitored via the RS-485 serial port. The RS-232 and RS-485 serial ports are only active when all of the satellite controllers have been set for remote mode operations. See the Addressing section below on how to set the satellite dip switches. The base station uses a Modbus communication protocol. Users can talk to the base station by writing their own software or by purchasing Series 47 Heater Software. For those that wish to write their own code, a complete list of the register assignments is given in Appendix A. 2. Addressing 2.1 Base Station The address is set with the rotary switch located on the top of each base station. The possible addresses are 0 through 9 and A through F for a total of 16 different addresses. When communicating with multiple base stations via RS-485 be sure to use a different address for each base station to avoid an addressing collision. 2.2 Satellites There are two basic modes that each satellite can operate in: local mode and remote mode. Remote mode is established by setting the satellite dip switch to an address of 0 to 15. Thus, up to 16 satellites can be connected to a base station. If two satellites powered by the same base station are identically addressed, then only one will respond to the commands passed by the serial port. The other will indicate Series 47 Vacuum piping heater system 21

28 that it is off-line with a steady blue LED on the satellite itself. On the 8 position dip switch, the least significant bit is at the left (position 1) and the most significant bit as at the right (position 8). Position 1 is the one s column, position 2 is the two s column, position 3 is the four s column, and so on up to position 8 which is the one hundred twenty eight s column. Up is on and down is off. The dip switch setting is the sum of the on positions. For remote (software) control, the switches must be set at values that range from 0 to 15. For local control (where each heater is self controlled), these switches can be set between 20 and 185. In the following example the satellite is set to an address of 15. In this case positions 1, 2, 3, and 4 are set to on ( = 15) S S S S S S S S Dip switch settings of 16 to 19 and 186 to 255 are not allowed. Settings of 20 to 185 are local mode settings. 3. Cable Pin Out 3.1 RS-232 Serial Port. The RS-232 serial port, standard on most PCs, can be used to control one base station, which controls up to 16 heaters. The RS-232 uses a standard female to female 9-pin D subminiature (D-sub) cable. 3.2 RS-485 Serial Port. RS-485 serial port communications employ either a 4-wire or 2-wire system for transmitting and receiving signals. The Series 47 base station uses the 2- wire system. Frequently, the RS-485 serial port uses a standard 9-pin D-sub connector, while the base station uses an RJ45 cable and connector plug commonly found on telephones. An adapter can be constructed to allow the use of a 4-wire RS-485 computer card with a 2-wire system. 22 Series 47 Vacuum piping heater system

29 Most personal computers do not come with an RS-485 serial port, so installation of hardware may be required. The following diagram shows the pin numbering convention for each connector. For the RJ45 connector, the pins are numbered 1 through 10 with 1 being at the far right, and 10 being at the far left. The RS-232 connector has 9 pins and is numbered as shown. To wire the 9-pin D-sub to RJ45 adapter, pins 4 and 8 on the D-sub are connected to pin 3 on the RJ45. Pins 5 and 9 (D-sub) are connected to pin 4 (RJ45), and GND (pin 1 on the D-sub) is connected to pin 6 (RJ45). The adapter is now ready for use with the base station. 4. Port settings: 9600 baud, 8 data bits, no parity, 1 stop bit, Xon/Xoff control. 5. Series 47 Heater Software Series 47 Heater software is designed as a monitoring system for the HPS Series 47 vacuum piping heater system. Its purpose is to be used remotely to monitor and diagnose the functioning of up to 256 heaters. The software can be utilized as an invaluable diagnostics and control tool that will allow the user to analyze and optimize the performance of heated lines installed on a system. 5.1 Software Features. The software allows for temperature set point adjustment, data logging, and enhanced diagnostics with the use of a PC. Instead of manually setting temperature points for each heater locally, the software allows the user to adjust temperatures on a per heater basis from a remote location with the simple click of a mouse. These temperatures can be changed real-time and monitored closely using the graphical output incorporated into the software. This facilitates the fine-tuning of desired temperature profiles along the line. In addition to the blue, green, and red LED displays that are synonymous with the LEDs located on each satellite and base station, the software will Series 47 Vacuum piping heater system 23

30 display the operating temperature of each individual heater. This function allows the user to determine the temperature characteristics and temperature profile throughout the line and individually adjust the temperature settings of each heater for peak performance. The data logging function of the software provides the user with the option to record the performance of the system over time. 5.2 System Requirements. The software requires a PC with Windows 95, 98 or NT, and either an RS- 232 serial port (one base station) or an RS-485 serial port (up to 16 Base Stations). 5.3 User Interface. The user interface is intended to mirror the hierarchy of the heater system. There is a window dedicated to base station control to the left of the screen, a window dedicated to satellite control in the middle, and a window dedicated to heater temperature charting to the right. Base Station Info Satellite Info Temperature graph with alarm limits Complete Series 47 Heater Software installation and operating instructions are available in the Series 47 Heater Software Manual that comes standard with the software. 24 Series 47 Vacuum piping heater system

31 Accessories/Part Replacement Description Part Number Base station Satellite Controller Main Power Cable, 0.92 m [3 ft] Main Power Cable, 1.83 m [6 ft] Main Power Cable, 3.05 m [10 ft] Main Tether Cable, 1 m [3.3 ft] Main Tether Cable, 2 m [6.6 ft] Main Tether Cable, 4 m [13 ft] Short Satellite Jumper Cord, mm [ in] Medium Satellite Jumper Cord, mm [ in] Long Satellite Jumper Cord, mm [ in] Disposable Connector Series 47 Heater Software Special Heater Part Numbers Special Series 47 heaters (notated as 97XX-XXXX-XXX) are available for design and quotation. Please call customer service at or for inquiries. Series 47 Vacuum piping heater system 25

32 Troubleshooting Problem Cause Remedy System will not turn on Satellite will not turn on No power at source System not plugged in Ground Fault Equipment Leakage Circuit Interrupter (GFELCI) has tripped Bad connection between satellite controller and heater Restore power Plug system in Reset GFELCI. If the GFELCI immediately trips again then there is a ground fault that needs to be isolated. See procedure below to isolate ground fault. Check to see that none of the satellite pins are bent and that the satellite is properly docked to the heater Steady blue LED at all satellites after turning system on Steady blue indicates that the system is off line. This is normal for the first 45 seconds during system boot up. Wait 45 seconds Steady blue LED at one satellite after boot up is complete Dip switch incorrectly set to an invalid setting Check setting per section 2.3 Steady red LED at satellite System error. -Bad memory -Open or shorted temperature sensor -Replace Satellite -Replace Heater Steady red LED at base station System error -Bad memory -No satellite controllers attached -More than 16 satellite controllers attached -One of the satellites has a system error -Replace base station -Attach at least one satellite controller -Remove excess satellite controllers -Replace the defective satellite or heater that is causing the system error 26 Series 47 Vacuum piping heater system

33 Problem Cause Remedy Heater will not heat Satellite is off line 10 A electrical fuse inside satellite has blown. Heater is open Check dip switch settings The fuse is non-replaceable intended for short circuit protection. Replace satellite controller and check heater for short circuit. Replace heater (try switching either the satellite or the heater to see which component is bad) Ground Fault Equipment Leakage Circuit Interrupter will not reset There is a ground fault Isolate the ground fault. See procedure below. Isolating a Ground Fault Imminent shock hazard! Make sure that the vacuum piping is grounded prior to attempting to isolate a ground fault. Disconnect the main tether power cord from the base station and cycle power to the base station. If the GFELCI still trips then the problem is in the base station and it should be replaced. If the GFELCI successfully resets, then the problem is a ground fault between one of the heaters and the vacuum piping. Reconnect one half of the heaters and restart the base station. If the GFELCI trips then the problem is in the active portion of the daisy chained heaters. If the GFELCI successfully resets, then the problem is in disconnected portion of the heaters. Continue the search to fully isolate the offending heater. Throw away the defective heater, or return it for credit if it is within its warranty period. Series 47 Vacuum piping heater system 27

34 Product Warranty MKS Instruments, Inc., warrants the HPS Products warrants the HPS Products Series 47 Vacuum Piping Heater System and its accessories to be free from defects in materials and workmanship for one (1) year from the date of shipment by HPS or authorized representative to the original purchaser (PURCHASER). Any product or parts of the product repaired or replaced by HPS under this warranty are warranted only for the remaining unexpired part of its one (1) year original warranty period. After expiration of the applicable warranty period, the PURCHASER shall be charged HPS current prices for parts and labor, plus any transportation for any repairs or replacement. ALL EXPRESS AND IMPLIED WARRANTIES, INCLUDING THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE, ARE LIMITED TO THE WARRANTY PERIOD. NO WARRANTIES, EXPRESS OR IMPLIED, WILL APPLY AFTER THIS PERIOD. Warranty Service The obligations of HPS under this warranty shall be at its option: (1) to repair, replace, or adjust the product so that it meets applicable product specifications published by HPS or (2) to refund the purchase price. What Is Not Covered The product is subject to above terms only if located in the country of the seller from whom the product was purchased. The above warranties do not apply to: I. Damages or malfunctions due to failure to provide reasonable and necessary maintenance in accordance with HPS operating instructions. II. Damages or malfunctions due to chemical or electrolytic influences or use of the product in working environments outside the specification. III. Fuses and all expendable items which by their nature or limited lifetime may not function for a year. If such items fail to give reasonable service for a reasonable period of time within the warranty period of the product; they will, at the option of HPS, be repaired or replaced. IV. Defects or damages caused by modifications and repairs effected by the original PURCHASER or third parties not authorized in the manual. Condition of Returned Products HPS will not accept for repair, replacement, or credit any product which is asserted to be defective by the PURCHASER, or any product for which paid or unpaid service is desired, if the product is contaminated with potentially corrosive, reactive, harmful, or radioactive materials, gases, or chemicals. When products are used with toxic chemicals, or in an atmosphere that is dangerous to the health of humans, or is environmentally unsafe, it is the responsibility of the PURCHASER to have the product cleaned by an independent agency skilled and approved in the handling and cleaning of contaminated materials before the product will be accepted by HPS for 28 Series 47 Vacuum piping heater system

35 repair and/or replacement. In the course of implementing this policy, HPS Customer Service Personnel may inquire of the PURCHASER whether the product has been contaminated with or exposed to potentially corrosive, reactive, harmful, or radioactive materials, gases, or chemicals when the PURCHASER requests a return authorization. Notwithstanding such inquiries, it is the responsibility of the PURCHASER to ensure that no products are returned to HPS which have been contaminated in the aforementioned manner. Other Rights and Remedies I. These remedies are exclusive. HPS SHALL NOT BE LIABLE FOR CONSEQUENTIAL DAMAGES, FOR ANTICIPATED OR LOST PROFITS, INCIDENTAL DAMAGES OR LOSS OF TIME, OR OTHER LOSSES INCURRED BY THE PURCHASER OR BY ANY THIRD PARTY IN CONNECTION WITH THE PRODUCT COVERED BY THIS WARRANTY, OR OTHERWISE. Some states do not allow exclusion or limitation of incidental or consequential damage or do not allow the limitation on how long an implied warranty lasts. If such laws apply, the limitations or exclusions expressed herein may not apply to PURCHASER. II. Unless otherwise explicitly agreed in writing, it is understood that these are the only written warranties given by HPS. Any statements made by any persons, including representatives of HPS, which are inconsistent or in conflict with the terms of the warranty shall not be binding on HPS Ò unless reduced to writing and approved by an authorized officer of HPS. III. This warranty gives PURCHASER specific legal rights, and PURCHASER may also have other rights which vary from state to state. IV. For HPS products sold outside of the U.S., contact your MKS TM representative for warranty information and service. Warranty Performance To obtain warranty satisfaction, contact the following: MKS TM Instruments, Inc., HPS Products, Inc., 5330 Sterling Drive, Boulder, CO 80301, USA, at phone number (303) You may be required to present proof of original purchase. Series 47 Vacuum piping heater system 29

36 Notes 30 Series 47 Vacuum piping heater system

37 Appendix A: Base Station Modbus Assignments 0-99 Base Station Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Control Module No Broadcast Note: Use Single Register Read (3) or Single Register Write (6)

38 Base Station Register Parameter Default Range Units Function 0 Alarm Status 0 0 = No Alarm - Read Only 1 = Corrupt Memory 2 = All Slots Full 3 = All Slots Empty 1 Module Status to FFFF - Read Only Bit# 0 = Control 0 Bit# 15 = Control Serial Number Read Only 4 Software Version Read Only 5 System Status 0 00 to FF - Read Only Bit# 0 = Off Line Bit# 1 = Any low alarms Bit# 2 = Any high alarms Bit# 3 = Any other alarms Bit# 4-7 = Reserved 6-82 Reserved Ping 0 0 = Off - Write Only 1 = On Reserved

39 Control Module NO. 0 Register Parameter Default Range Units Function 100 Alarm Status 0 0 = No Alarm - Read Only 1 = Corrupt Memory 4 = Open Sensor 5 = Low Temp 6 = High Temp 101 Actual Temperature - - Degrees C Read Only 102 Control Setpoint20 20 to 185 Degrees C Read/Write 103 High Deviation Setpoint 10 1 to 50 Degrees C Read/Write 104 Low Deviation Setpoint 10 1 to 50 Degrees C Read/Write 105 Proportional Band 8 0 to 50 Degrees C Read/Write 106 Reset 17 0 to 999 Repeats/Min Read/Write 107 Rate 17 0 to 999 Minutes Read/Write 108 Cycle Time 30 5 to 60 Seconds Read/Write 109 Switching Hysteresis 3 1 to 20 Degrees C Read/Write Relay Contact 0 0 to FFFFFF - Read/Reset Life Count Serial Number Read Only 114 Software Version Read Only 115 Percent Power - 0 to 100 % Read Only Reserved Ping 0 0 = Off - Write Only 1 = On Reserved

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