Meggitt A/S Denmark Ferroperm Piezoceramics

Transcription

1 Meggitt A/S Denmark Ferroperm Piezoceramics Meggitt Sensing Systems. This document and the information in it is proprietary and is the property of Meggitt Sensing Systems. It may not be copied or disclosed to a third party or used for any purpose other than that for which it is supplied without the express written consent of Meggitt Sensing Systems. Information contained in this document is subject to certain Export Control regulations, specifically of the (choose as appropriate) United Kingdom, European Union, other national jurisdiction and / or the United States International Traffic in Arms Regulations and / or Export Administration Regulations. Each recipient of this document is responsible for ensuring that transfer or use of any information contained in this document complies with all relevant Export Control Regulations.

2 Outline 1 Background 2 Meggitt PLC and Meggitt Sensing Systems 3 4 Introduction to piezoceramics Piezoceramic materials processing 5 Specialised shaping processes 6 Applications 7 Research and development

3 1 Background

4 History 1952 Personal Company Ferroperm founded Production of iron dust cores and ceramic capacitors First piezoceramic product based on Barium Titanate The Industrial group Ferroperm registered as limited company Optical filters added to product range Formation of a separate piezoceramic division Piezoceramic division moved to current facility in Kvistgaard Generation change in original owner family 1998 Ferroperm Piezoceramics registered as a separate limited company Ferroperm Piezoceramics A/S acquired by American Piezoceramics International Inc Ferroperm Piezoceramics A/S acquired by Meggitt Plc Ferroperm Multilayer Department spun out as separate company Company later renamed to Noliac A/S Management buy-out of 100% of the shares in Ferroperm Piezoceramics A/S Name-change to Meggitt A/S and integration into the newly formed Meggitt Sensing Systems

5 Strategic Markets Areas of Meggitt A/S Medical Ultrasound Underwater Acoustics Vibration Sensors Industrial Flow-meters Meggitt A/S is not a producer of finished ultrasonic devices 5 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

6 Market Segments 2009 Flow/Level meters 8% NDT 2% Other/Unknown 4% Underwater Acoustics 22% 2013 Medical Ultrasound 44% Vibration Sensing 20% 6 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

7 2 Meggitt PLC and Meggitt Sensing Systems Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

8 Meggitt group Overview Meggitt PLC is a FTSE-100 global engineering company extreme environment components and sub-systems for aerospace, defence and energy markets Strong pedigree in extreme environment engineering high technology products and systems content on virtually every aircraft 55,000 installed base Well-balanced portfolio commercial/military/other (45%/38%/17%) original equipment/aftermarket (55%/45%) Global footprint Annual sales of 1.6 billion in 2013 ($2.6 billion) Meggitt Sensing Systems external sales GB 240.4M (~US$402) in 2013 Meggitt A/S Denmark 8 September 2014 Meggitt Sensing Systems. Proprietary.

9 A balanced portfolio Group revenues by end-market Meggitt: GB 1.64B (US$2.57B) in 2013 Other Energy Civil OE Military AM Military OE Civil AM Original equipment 56%/aftermarket 44% 9 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

10 Global reach employees worldwide Mainland Europe Employees: ~ 1600 Locations: 8 Denmark, France, Germany, Spain and Switzerland UK Employees: ~ 2800 Locations: 13 North America Employees: ~ 5500 Locations: 28 USA, Canada and Mexico Asia and RoW Employees: ~ 800 Locations: 9 Australia, Brazil, China, India, Singapore, UAE and Vietnam 10 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

11 Leading technology positions Meggitt strategic business units Aircraft Braking Systems Control Systems Polymers & Composites Sensing Systems Equipment Group Wheels Brakes Brake control Landing gear control Nose wheel steering Landing systems monitoring Thermal management Fluid and pneumatic control Electromagnetic control Safety systems Seals Fuel bladders Fuel systems Ice protection Condition monitoring systems High performance sensors Power management Defence systems Specialty components 11 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

12 Meggitt Sensing Systems Technologies Health monitoring Data acquisition Engine sensing and ignition Inertial sensing Flight test systems Medical ultrasound Condition monitoring (Energy) Integrated vehicle health management Tyre pressure monitoring Helicopter HUMS Engine monitoring units Turbine blade tip clearance Optical combustion monitoring High performance acquisition Engine control interface Data concentrator Power management Central maintenance computer Integrated packages Speed Temperature Fuel flow Oil debris Oil level Acceleration Pressure Displacement HE and laser ignition Inertial monitoring units Tilt sensors Angular rate sensors Gyrometer Servo and MEMS accel. Test and measurement Flutter testing Engine testing Seat testing Hydraulics testing Acoustic testing Pressure belts Sensing and guided therapy Cardiac rhythm monitoring High-intensity focused ultrasound Ultrasonic transducers Total condition monitoring Sensors Conditioners Machinery protection Analysis tools and software Decision support 12 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

13 Facilities of MSS division employees UK North America Germantown, MD: industrial accelerometers Indianapolis, IN: piezoceramics Tucson, AZ: electronic security, battery management Denver, CO: piezoceramics Portland, OR: electro-magnetic and power conversion devices Sunnyvale, CA: MEMS sensor systems Irvine, CA: condition monitoring Basingstoke: temperature and speed Rugby: industrial ignition. Mainland Europe Fribourg, Switzerland: condition monitoring Angoulême, France: ignition systems Angers and Toulouse, France: electro-mechanical solutions Archamps, France: position and inertial Kvistgård, Denmark: piezoceramics.... Asia and RoW Xiamen, China: sensor manufacturing/assembly Dong Nai, Vietnam: electro-mechanical solutions. MSS factories. MSS sales and service offices 13 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

14 Power management for more electric aircraft Meggitt Sensing Systems Artus OECO Securaplane Demonstrated success on the 787, A350, A400M, NH90 DC generation system Primary flight control motors Passenger seat harness system Horizontal stabiliser speed control and sensor Power door opening system motors Windshield wiper motor and electronics Pilot seat actuators and controllers Wireless emergency lighting system Battery charger system Nose wheel steering sensor Starter/generator starter system Throttle control Electric brake motors Start power generator Air conditioning motors and controllers Digital engine control alternator Meggitt A/S Denmark 14 September 2014 Meggitt Sensing Systems. Proprietary.

15 3 Introduction to Piezoceramics Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

16 The piezoelectric effect Piezoelectricity: the formation of electric polarisation in certain materials when they are subjected to mechanical stress or the formation of mechanical stress in such materials when an electric voltage is applied to them. Discovered by Pierre & Jacques Curie in (a) Equilibrium. (b-c) Mechanical excitation (direct effect), open and shorted conditions, respectively. (d) Electrical excitation (converse effect). Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

17 Classes of materials Dielectric material Ideally no charge conduction Charge stored by polarisation mechanism Essential properties permittivity (ε) and dielectric loss tangent (tan δ) Piezoelectric material Conversion from mechanical to electrical energy and vice versa Crystal structure must be non-centrosymmetric Pyroelectric material Temperature change results in polarisation (surface charges) Crystal structure must show a unique polar axis ( spontaneously polarised) Ferroelectric material Polarisation can be switched by external field (phenomenological definition) Ferroelectricity is lost above a characteristic temperature, the Curie point T C, generally recognised by a distinct peak in permittivity Subgroup of pyroelectric materials Antiferroelectric material Showing a Curie point like ferroelectric materials Not piezoelectric below Curie point, because neighbouring polar subcells are oppositely aligned Paraelectric state Centrosymmetric state of ferro- and antiferroelectric materials above T C Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

18 Crystal symmetry and piezoelectricity 32 SYMMETRY POINT GROUPS 21 NON- CENTROSYMMETRIC 11 CENTROSYMMETRIC m3m, m 3, 6/mmm, 4/mmm, mmm, 3m, 6/m, 4/m, 2/m, 3, 1 20 PIEZOELECTRIC (polarized under stress) 1 NONPIEZOELECTRIC (combined symm. el.) PYROELECTRIC (spontan. polarized) 6mm, 4mm, 3m, mm 2, m, 6, 4, 3, 2, 1 10 POLAR-NEUTRAL (no unique polar axis) 43m, 23, 62, 622, 6, 32, 42m, 422, 4, 222 subgroup FERROELECTRIC (reversible polarization) Quartz (α- and β-) PZT Lead metaniobate Poled piezoceramic eqv. Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

19 Polar crystal structure b b 8 pm 403 pm + 6 pm 6 pm Ba 2 + O pm 398 pm a b Ti 4+ Tetragonal BaTiO 3, a perovskite. Each unit cell has a dipole moment (not drawn to scale) [after van Vlack, 1971]. Tetragonal distortion in a perovskite [Cranfield Univ., 2002]. Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

20 Overview of applications of piezoceramics Mechanical energy into Electrical energy Ignition units Pressure sensors Accelerometers Push-buttons Airbag sensors Hydrophones Medical imaging Doppler systems Transformers NDT Electrical energy into Mechanical energy Ultrasonic cleaning Nebulizers Actuators Motors and micro-pumps Buzzers Ultrasonic machining Direct effect Converse effect Piezoceramics form a link between the electrical and the mechanical world Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

21 Orders of magnitude for piezoceramics Pz27 (soft PZT) under static conditions (i.e., far below resonance): 10 N ( 1 kg) Pz27 10 mm 10 mm Pz27 1 kv Battery Stress Electric field Voltage 10 mm = Force / Area = 10 N / 10-4 m 2 = 100 kpa = g 33 x Stress = 27 x mv m/n x 100 kpa = 2,7 V/mm = Electric field x Thickness = 27 Volt 10 mm Displacement = d 33 x voltage = 425 pm/v x 1000 V = 425 nm Blocking force = (U x L x W)/(g 33 x t) = (1000 x 10-4 )/0,00027 = 370 N ( 37 kg) Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

22 Classes of piezoelectric materials Polycrystalline ceramics Classical single crystals New single crystals Polymer (PZT) (Quartz) (PMN-PT) (PVDF) Coupling factor, k (%) Mechanical quality factor, Q m Acoustic impedance, Z a (MRay) Charge coefficient, d 33 (10-12 C/N) Voltage coefficient, g 33 (10-3 Vm/N) Curie temperature, T C ( C) Advantages Shape Stability Sensitivity Low acoust. imp. Coupling Linearity Cheap Power density Tough Ferroperm Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

23 Hysteresis loop and poling Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

24 Piezoelectric ceramics: PZT Pb(Zr 1-x Ti x )O 3 (PZT): the most commercially important piezoelectric material. The piezoelectric properties are optimal near the morphotropic phase boundary (x 0.5) between the tetragonal and the rhombohedral phase. Pb 2+ O 2- Zr 4+ /Ti 4+ Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

25 Ferroperm materials programme Soft PZT Pz23 Pz27 Pz29 Hard PZT Pz24 Pz26 Pz28 Pz189 Very soft, relaxor-based Pz21 Pz194 Pz59 Bismuth titanates Pz46 Pz48 HIFU materials Pz34 Pz52 Pz54 Low-Z a materials Pz36 Pz37 Pz39 Pz31 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

26 Materials data of Ferroperm range Conventional soft PZT Conventional hard PZT Low acoustic impedance family HIFU family Very soft relaxor-based comp. High-T Symbol Unit Pz23 Pz27 Pz29 Pz24 Pz26 Pz28 Pz189 Pz31* Pz36* Pz37* Pz39* Pz34 Pz52 Pz54 Pz21 Pz194 Pz59 Pz46 Navy Type / Industry "equivalent" N/A Navy 2 "PZT5A" Navy 6 "PZT5H" "PZT7A" Navy 1 "PZT4D" Navy 3 "PZT8" Navy 3 "PZT8" "K81" N/A N/A N/A "PZT2" N/A N/A "3203HD" "3203HD" N/A "K15" Electrical Properties Free dielectric constant (1 khz) K 33 T Dielectric dissipation factor (1 khz) tan δ Curie temperature T C > ºC Recommended working range T < ºC Electromechanical Properties k p Coupling factors k t k k d 31 pc/n Piezoelectric charge coefficients d 33 pc/n d 15 pc/n Piezoelectric voltage coefficients -g 31 mv m/n g 33 mv m/n N p m/s Frequency constants N t m/s N 31 m/s N 33 m/s Mechanical Properties Density ρ kg/m Mechanical quality factor E Q m,t >1000 >1000 >1000 > > > >600 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

27 4 Piezoceramic Materials Processing

28 Industrial manufacture of piezoceramics

29 Powder Manufacturing process From 1 kg to 130 kg batches Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

30 Powder Manufacturing Process Full in-house manufacturing of traditional and unique piezoceramic grades Qualified sources are large EU chemical groups Full traceability back to Certificate of Analysis Batch-specific logging system Batch approval of standardized parts before release to production Strict environmental control Lowest batch-to-batch variation in the industry 30 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

31 Batch-to-Batch Variation Last 15 years statistics on Pz The Key starting point in sensors and transducers is to have low variation in the active component Meggitt has demonstrated to have less than ±5% variation in key parameters over many years of production, while competitors have up to ± 20% Rel. Dielectric Constant High 5% Limit Low 5% Limit Batch Number Planar Coupling factor Thickness coupling factor 65 This enables customers to specify tighter and optimise internal processes Coupling factor [%] Batch Number Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

32 Component Manufacturing process Part numbers produced from 50 pcs to pcs per year Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

33 Component Manufacturing Process Full in-house manufacturing capability State-of-the-art ceramic manufacturing equipment Large Investment program for new equipment and automation From 0.20 mm to 115 mm Tolerances down to ± 10 µm State-of-the-art ERP system (Microsoft Dynamics) Full traceability back to operator, time, and machine ISO 9001 and ISO Certified 33 Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

34 5 Specialised Shaping Processes

35 Fully automated line for medical bimorph sensors Turn-key delivery December 2011 Production of miniature medical sensors and transducers using automated line Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

36 Dust-free room for medical line Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

37 Meggitt s InSensor thick film products Unique possibility to co-fire highly sensitive PZT on metallic or ceramic substrates High-volume commercial products since 2010 in medical high-frequency imaging Technology is very well suited for nextgeneration sensor devices closely integrated with electronics on a silicon substrate Technology can be wafer-based, and therefore cost-effective in high quantity Meggitt A/S Denmark September 2014 Meggitt Sensing Systems. Proprietary.

38 6 Applications

39 Piezo-applications in quasi-static to low-frequency conditions micro-pumps, ultrasonic motors piezo-lighter omni-directional hydrophones

40 Sensors for low-f conditions: accelerometers Delta-shear Theta-shear Ortho-shear From Brüel & Kjær From Brüel & Kjær From Brüel & Kjær D 3.6 mm From Brüel & Kjær

41 Low frequency: ultrasonic cleaning and welding Frequency: few khz to 500 khz ultrasonic bath imploding cavity in a liquid irradiated with ultrasound ultrasonic welding for plastics joining

42 Low frequency: underwater acoustics Frequency: ~30 khz to 1 MHz

43 Low frequency: flow-meters Frequency: 100 khz to 2 MHz Doppler flow-meter Accuracy is becoming more and more important. vortex flow-meter Tolerance on PZT is critical, and cost is negligible in relation to inaccuracy in the measured media

44 High-Intensity Focused Ultrasound (HIFU) Frequency: ~300 khz to 2 MHz Treatment of prostate cancer Medical non-invasive therapy Drug delivery (insulin) Cancer therapy Tissue ablation Lithotriptor Removal of blood clots Cosmetic treatment Industrial application Sonochemistry Ablatherm is a registered trademark of EDAP. 39 mill. people in industrialised countries 1-3 hour session 90% success rate No hospitalisation

45 Meggitt s focus on new medical ultrasonic therapeutics Very large presence in new medical treatment devices (high-intensity focused ultrasound, HIFU) Program of new and traditional materials specially suitable for HIFU Extensive investments in lens-grinding and round grinding in Implementation in automated line Q Sales to the medical market became the largest sector for sales in

46 Ultrasonic imaging Frequency: ~ 1 MHz to 10 MHz 3D 2D

47 7 Research and development

48 EU Research Programs Continuous involvement in international program for more than 20 years PhD1 PhD2 PhD3 PhD4 Composite SAW Dev High temp ECITA PAMELA PIMET TRAMST TIFFANI IMMEDIATE RANNTAC DISURFEX POLECER TN PIRAMID LEAF PIEZOTAG MINUET π-mems MIND NoE IMMEDIATE PiMEMS AISHA II MICROFLEX ELBA

49 R&D Strategy Highway LEAF (Lead-Free) Piezoceramcis More Effective More Integrated Lead-free Ultra-High Temperature Piezoceramics Low Acoustic Impedance Materials PiezoPaint High Intensity Focused Ultrasound InSensor

50 R&D Group 8 R&D Engineers (6 PhD's), 5 nationalities Development of core competences Ultra-high frequency imaging Miniaturized and integrated sensors Energy harvesting Wireless integration PiezoPaint (flexible PZT on textiles) Production facility for dust-free processing (bimorph and thick-film production) Three labs: lead-free, chemistry and measurement

51 ELBA project, (Højteknologifonden) ELiminating BAtteries energy harvesters for integrated systems Development of wireless sensor nodes powered by vibrational energy harvesting Main application: monitoring of wind turbines Temperature and humidity sensor inlet 25 mm 70 mm

52 Sensing capabilities Operation temperature Range: ºC Acceleration measurement % 3D acceleration measurement Sampling frequency = up to 3200 Hz º C Resolution = 13 bits Ambient temperature Accuracy ±0.4 ºC (10 ºC - 60ºC) Relative humidity Accuracy ±3.0 %RH (20% - 80%) Y Z X Sensor nodes are linked using 2.4 GHz wireless communication forming star-like network architecture 52

53 No wires, no batteries, easy to install sensors 53

54 Flexible data access through web interface Table of last 100 records Database record ID Reception time stamp Sensor ID Acceleration sampling frequency X, Y, Z DC components X, Y, Z AC components Temperature Humidity Received RF power 54

55 Flexible data access through web interface Data trend Sensor ID First package time stamp Last package time stamp 55

56 FutureSonic, (Højteknologifonden) Funding agency: Danish National Advanced Technology Foundation Project title: A new platform and business model for on-demand diagnostic ultrasound imaging Project acronym: FutureSonic Total budget (DANATF contribution): 20 M (10 M ) Project duration and start date: 5 years / 1 st March 2013 Short description: This is a large-scale project (platform) with the objective of developing a range of new technologies in the field of medical ultrasound, ranging from ultra-portable imaging systems in the pocket of physicians to high-performance systems employing thousands of transducer elements for advanced 3-dimensional real time anatomic and functional imaging as easy to use as an ipad 2013 Meggitt Sensing Systems. Proprietary.

57 Key ideas of FutureSonic (1) At present, medical ultrasonic scanning is mostly performed at the hospital by specially trained personnel, using large and bulky scanners with complex user interfaces For more demanding diagnostic tasks, very expensive MR scanners are used The scanner of the future should be small, handy and equipped with wireless interface for easy connection to a tablet computer (e.g., ipad), which would help increase the speed of diagnosis By rethinking the technologies, the platform will radically change the possibilities of using ultrasound, so that doctors and nurses may carry a scanner in the pocket, capable of 4D imaging of human organs and their functions without time-consuming adjustments 4D imaging here means 3-dimensional imaging in real-time of structures and blood flow in all directions, and this could be shown together with key indicators of body functions This technology could save lives, e.g. allowing a surgeon during heart valve replacement to check the blood flood before closing the lid allowing an ER nurse to discover internal bleeding helping a midwife to discover complications such as nuchal cord (umbilical cord around neck) giving much easier access to ultrasonic imaging in development countries (from press release) 2013 Meggitt Sensing Systems. Proprietary.

58 Key ideas of FutureSonic (2) This technology has the potential of changing the whole concept of diagnosis, making internal imaging as natural as taking blood samples and listening to the heart; time has come to take the exponential technology from IT into the doctor s examination room (Jesper Manigoff, Man.Dir. of BK Medical) In order to obtain wireless ultrasonic scanner heads, advanced nano- and microtechnology in the transducers will be combined with advanced scanning algorithms The platform will have special focus on user friendliness in order to design intuitive programs with automatic settings and optimised procedures In the field of data processing, a completely new business model is envisaged: Ultrasonic examination will result in the recording of a quite extensive set of data These data may subsequently be processed using new analysis schemes implemented on supercomputers (cloud computing) This will allow the specialist to extract additional information (e.g., about anatomy, principal and capillary blood flow) In this model it will be possible to charge according to the amount of post-analysis delivered (from press release) 2013 Meggitt Sensing Systems. Proprietary.

59 FutureSonic consortium Partner Country Type Competences BK Medical DK RTD Ultrasound imaging systems DTU Elektro/CFU DK RTD Ultrasound imaging DTU Elektro DK RTD Digital electronics DTU Nanotech DK RTD MEMS technology Rigshospitalet DK RTD Hospital doing clinical testing Alexandra Instituttet DK IND Programming, cloud computing Meggitt A/S DK IND Piezoceramic technology 2013 Meggitt Sensing Systems. Proprietary.

60 Thank you 60