4-Channel-aSTEM Detector. Detecting Transmitted Electrons in an FESEM with the new Annular STEM Detector. Upgrade Info

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1 4-Channel-aSTEM Detector Detecting Transmitted Electrons in an FESEM with the new Annular STEM Detector Upgrade Info

2 4-Channel-aSTEM Detector Detecting Transmitted Electrons in an FESEM with the new Annular STEM Detector Contact: Dr. Ulrich Kohl-Roscher Date: October 2015 Several different STEM Modes acquired simultaneously from one Detector. Introduction Availability Usually, a Field Emission Scanning Electron Microscope (FESEM) is used to image the surface structures or near-surface structures of a specimen. However, with the optional Scanning Transmission Electron Microscope (STEM) detector, you can detect transmitted electrons as well. Specimens need to be ultra thin, so they can be penetrated easily by the electron beam. Due to resolving power of the GEMINI column and the included 12x sample holder you save processing time on TEM samples for high resolution applications. The diode geometry is optimized to the axially symmetric scattering behavior of electrons in STEM mode and provides improved low kv response and higher sensitivity. The increased detector area allows larger acceptance angles. Bright field (BF) and dark field (DF) signals can be clearly separated. Electrons scattered at higher angles will be detected by the annular dark field (ADF) or the high angle annular dark field (HAADF) segment. An arbitrary configuration of segments for read out can be defined by the user. Due to the new electronics the 4-Channel-aSTEM Detector allows a parallel read out of up to four different signal combinations. This not only saves time but also reduces beam damage on the sample to a minimum since different sample information can be obtained in a single scan run. The 4-Channel-aSTEM Detector is available for the following microscopes: Crossbeam series GeminiSEM series MERLIN series Benefits High speed 4 channel parallel read out Higher sensitivity Better signal to noise ratio (S/N) Larger diode active area, larger acceptance angle Improved low kv response High sample throughput Reduced radiation damage on specimen Minimized sample damage by simultaneous acquisition of up to 4 different detector configurations during a single scan. Imaging of stained and unstained samples New annular detector design Optimized for better adaptation to the scattering behavior of electrons in STEM mode. BF, DF and HAADF signals can be clearly separated. By inverting two of the DF segments oriented dark field imaging is possible. Easy to use The astem detector is fully software-controlled. The detector is inserted and retracted pneumatically. Arbitrary segment configurations can be defined and read out. 2

3 Allows to obtain SEM images of conventionally stained and prepared TEM samples (UD sections of plastic embedded samples) in TEM like quality. STEM mode EDX resolution down to 20 nm or less Improved graphical user interface in SmartSEM Operation The semiconductor based detector consists of multiple segments: a BF area in the middle, four DF diode segments, an additional ADF ring and a dedicated HAADF outer ring (see fig. 1). Among the four dark field segments, the two opposing fields are pairwise connected. The total detector area is 200 mm² which corresponds to an acceptance angle of up to one rad at minimal detector sample distance. Operation of the GEMINI Multi-Mode astem detection system and signal processing is controlled by an additional menu embedded into the SmartSEM graphical user interface. Figure 1 D1 DF2 HAADF ADF Schema of the semiconductor based detector with its BF area in the center, the four DF diodes, the ADF ring and the HAADF outer ring. BF D2 DF1 Specification Feature Specification Imaging modes Bright-field, Dark-field and orientated Dark-field Image processing Real-time Mixing, Normal, Inverse WD detector 8 mm +/-1 mm WD sample 2-5 mm Detector assembly Fully retractable Sample holder 12 TEM grids on carrousel included Upgrade path Software SmartSEM 5.07 Hardware NSE systems Firmware SmartSEM 5.07 release The product requires a free port. The old port of an already existing STEM detector can not be reutilized. Due to the bigger diode head, a new port is required. Please state the desired port when ordering. A system preventive maintenance performed within the last 12 months is mandatory. The retrofit must be performed by a ZEISS-authorized service engineer. Application training is recommended. For further information, contact: microscopy@zeiss.com Figure 2 Comparison of the old and the new detector. 3

347805-8024-200 66mm MP Port Adapter for MERLIN 347805-8027-100 CL/C port adapter for MERLIN 347805-8017-200 EBSD Port Adapter for 347805-8018-100 MERLIN & Crossbeam Universal Port Adapter for

4 Part Ordering no. Upgrade Kit for pneumatically driven astem detector, long version Upgrade Kit for pneumatically driven astem detector, short version Universal Port Adapter for MERLIN mm MP Port Adapter for MERLIN CL/C port adapter for MERLIN EBSD Port Adapter for MERLIN & Crossbeam Universal Port Adapter for Crossbeam 66 MP Port Adapter for Crossbeam GIS Port Adapter for Crossbeam Figure 3 Mouse brain, ultrathin section on a grid, double membrane of mitochondria resolved down to lipid bilayer structure. Left: annular STEM (astem) BF, Right: astem DF. Sample: courtesy of EPFL Lausanne, Switzerland Figure 4 Heart muscle, mouse, ultrathin section, ultramicrotome, on grid, SEM, astem, BF image. Courtesy of M. Kruger, Institute for Anatomy, University Leipzig, Germany

Carl Zeiss Microscopy GmbH 07745 Jena, Germany microscopy@zeiss.

5 Carl Zeiss Microscopy GmbH Jena, Germany EN_43_011_039 CZ-10/2015 Subject to change in design and scope of delivery and as a result of ongoing technical development. Carl Zeiss Microscopy GmbH

AsB Detector. Showing Material Contrast and Topographical Information with the AsB Detector. Upgrade Info

AsB Detector. Showing Material Contrast and Topographical Information with the AsB Detector. Upgrade Info AsB Detector Showing Material Contrast and Topographical Information with the AsB Detector Upgrade Info AsB Detector Showing Material Contrast and Topographical Information with the AsB Detector Contact: